CN216067280U - Stuck point replacing device - Google Patents

Abstract

The application provides a stuck point replacing device for change the stuck point of graphite boat piece, be provided with a plurality of stuck point through-holes of placing the stuck point on the graphite boat piece, include: the device comprises a base, a filling sheet and a punch, wherein the base is used for bearing the graphite boat sheet. The filling piece is used for being arranged on the graphite boat piece, a plurality of filling through holes corresponding to the clamping point through holes are formed in the filling piece, and the filling through holes are used for placing clamping points. The punch is arranged above the base and used for providing downward pressure for the clamping point in the clamping point through hole so as to enable the clamping point to be separated from the clamping point through hole or providing downward pressure for the clamping point in the filling through hole so as to enable the clamping point to be filled into the clamping point through hole. The filling piece can transfer the pressure acting on the graphite boat piece to the filling piece when the punch applies downward pressure to the clamping point, so that the damage risk of the graphite boat piece during the replacement of the clamping point is reduced.

Description

Stuck point replacing device

Technical Field

The application relates to the field of solar cell manufacturing, in particular to a stuck point replacing device.

Background

In the production process of solar cells, a PECVD (Plasma Enhanced Chemical Vapor Deposition) coating process is an important link in the production process, and plays a significant role in the quality of the final solar cells. When carrying out the PECVD procedure, the silicon wafer which is not coated needs to be inserted into a wafer carrier of vacuum coating equipment. At present, graphite boats are generally used as the slide carriers. In order to fix the silicon wafer in the graphite boat, the graphite boat is provided with a clamping point, and the clamping point fixes the silicon wafer on the graphite boat. However, the silicon wafer is worn to some extent during the insertion and removal process, and the clamping points need to be replaced periodically, so that the good state of the graphite boat is ensured, and the film coating quality of the silicon wafer is further ensured.

The operation method for replacing the stuck point of the existing graphite boat generally comprises the following steps: the press is adopted to disassemble the clamping points, after the disassembly is completed, the new clamping points are manually placed in the clamping point holes of the graphite boat, and then the press is used to press the new clamping points to the clamping point holes so as to complete the installation of the new clamping points. However, the graphite boat is easily damaged after many times of replacement.

SUMMERY OF THE UTILITY MODEL

The inventor researches and finds that when the clamping point is installed, the clamping point is difficult to be vertically and rightly placed in the clamping point hole when being manually placed, the clamping point is easy to incline in the clamping point hole, when the clamping point is pressed and installed, the clamping point can apply certain pressure to the graphite boat close to the clamping point hole, and the graphite boat is damaged as the replacement times are increased and the pressure is continuously applied to the graphite boat.

In view of the above, an object of the present application is to provide a cassette-point changing device that can reduce the risk of damage to the graphite boat piece during cassette-point changing.

In order to achieve the purpose, the following technical means are adopted in the application:

the utility model provides a stuck point replacement device for change the stuck point of graphite boat piece, be provided with a plurality of stuck point through-holes of placing the stuck point on the graphite boat piece, include:

the base is used for bearing the graphite boat piece;

the filling sheet is used for being arranged on the graphite boat sheet, a plurality of filling through holes corresponding to the clamping point through holes are formed in the filling sheet, and the filling through holes are used for placing clamping points;

and the punch is arranged above the base and used for providing downward pressure for the clamping point in the clamping point through hole so as to enable the clamping point to be separated from the clamping point through hole or providing downward pressure for the clamping point in the filling through hole so as to enable the clamping point to be filled into the clamping point through hole.

When the stuck point needs to be replaced, the graphite boat piece of the stuck point needing to be replaced is placed on the base, downward pressure is provided for the old stuck point in the stuck point through hole by the aid of the punch until the old stuck point is separated from the stuck point through hole, and the old stuck point is detached. And then, installing a new clamping point, at the moment, removing the graphite boat piece by using the punch, placing the filling piece on the graphite boat piece, aligning the filling through hole with the clamping point through hole, then placing the new clamping point in the filling through hole, and providing downward pressure to the new clamping point by using the punch again until the new clamping point is filled into the clamping point through hole, thereby completing the installation of the new clamping point.

When carrying out new stuck point installation, the packing piece that is located on the graphite boat piece can bear the pressure that the stuck point acted on the card point through-hole periphery when the punching press applys decurrent pressure to new stuck point, and the pressure that will act on the graphite boat piece shifts to on the packing piece, and then reduces the damage risk of graphite boat piece when the stuck point is changed.

Furthermore, the filling through hole is conical, the aperture of the filling through hole close to one end of the base is consistent with that of the clamping point through hole, and the aperture of the filling through hole far away from one end of the base is 0.015-0.025mm larger than that of the clamping point through hole.

When a new clamping point is installed, the filling sheet is placed on the graphite boat sheet, the filling through hole of the filling sheet is in a conical shape with a large upper part and a small lower part, and the aperture of the lower part is consistent with that of the filling through hole. Such a shape makes it easier to place a new card in a filled via when placing the new card in the filled via.

Further, the thickness of the filling sheet is 1-2 cm. The filling piece has certain thickness, can give the stuck point of putting into filling in the through-hole with certain vertical support, and will fill the thickness of the toper structure of big-end-up and little and filling piece in the through-hole and combine the setting, make filling through-hole inclination keep in very little within range, increase its probability that presents vertical attitude in filling the through-hole.

Further, the filling sheet is made of rigid material. The material that uses non-deformable is as the filling piece, when exerting decurrent pressure to the stuck point in filling the through-hole, even this pressure is great, when the pressure that acts on the filling piece is also great, the filling piece is difficult for the deformation damage, increases the life of filling piece.

Furthermore, a first filling positioning part is arranged on the base, a second filling positioning part matched with the first filling positioning part is arranged on the filling piece, and the first filling positioning part and the second filling positioning part are detachably matched to enable the filling through hole to be aligned with the clamping point through hole.

Through the cooperation of first filling setting element and second filling setting element, make the through-hole of filling can be more convenient align with the stuck point through-hole, guarantee when new stuck point installation, new stuck point can fill smoothly to the stuck point through-hole in.

Furthermore, the first filling positioning pieces are concave holes formed in the edges of the two sides of the base, the second filling positioning pieces are protrusions, the concave holes are detachably matched with the protrusions, and the number of the concave holes is consistent with that of the protrusions.

When the filling piece is placed on the graphite boat piece, the protrusion on the filling piece is sunk into the concave hole of the base, the filling through hole can be aligned to the clamping point through hole by using a simple structure, after the filling piece is placed and completed, the relative position between the filling piece and the base is fixed, and the filling piece and the base are not easy to move relatively.

Furthermore, the stamping device comprises a clamping point claw and a press, the press is arranged above the clamping point claw and connected with the clamping point claw, and the clamping point claw moves up and down under the action of the press so as to enable the clamping point claw to act on a clamping point.

When the clamping points need to be replaced, the graphite boat sheet is placed on the base below the punch, then the clamping point paw moves downwards under the action of the press until the clamping point paw acts on the clamping points, and unloading or/and installation of the clamping points are/is carried out. After the clamping point is replaced, the clamping point paw moves upwards under the action of the press again to reset so as to replace the clamping point next time.

Furthermore, the stuck point paw comprises a protruding column which is close to one end of the base, the protruding column corresponds to the stuck point through hole and can extend into the stuck point through hole, and the number of the protruding column is consistent with that of the stuck point through hole. When the old clamping point is disassembled, the protruding column can enter the clamping point through hole in the process that the clamping point paw moves downwards, and the old clamping point is removed from the clamping point through hole. The arrangement of the protruding columns enables the same punch to be used for dismounting the old clamping point and mounting the new clamping point.

Further, the base still is provided with and holds the chamber and with the corresponding dismantlement passageway of stuck point through-hole, dismantle the upper surface that the passageway is located the top that holds the chamber and runs through the base, and with holding the chamber intercommunication, the aperture of dismantling the passageway is not less than the aperture of stuck point through-hole.

When the clamping point is replaced, the clamping point moves downwards along the axial direction of the clamping point through hole under the action of the pressure of the punch, and at the moment, the arrangement of the disassembly channel enables the old clamping point to enter the accommodating cavity along the disassembly channel for collection, so that the old clamping point can be conveniently collected in a concentrated manner; on the other hand for during new stuck point can partly get into the dismantlement passageway, the upper and lower surface of graphite boat piece all protrudes and has some stuck points, and the stuck point can be more stable be fixed in the stuck point through-hole.

Furthermore, the clamping point replacing device also comprises a substrate, and the substrate can be arranged in the base in a pulling mode to limit the clamping point to be separated from the clamping point through hole. In the process of filling the clamping point into the clamping point through hole, the pressure applied to the clamping point by the punch or the downward moving distance needs to be adjusted, and if the pressure is too large or the downward moving distance is too large, the clamping point can excessively enter the clamping point through hole and directly separate from the clamping point through hole. The base plate is arranged in the base and positioned below the graphite boat piece, and the distance between the graphite boat piece and the base plate is controlled within a certain range, wherein the distance can be the length of the clamping point extending out of the graphite boat piece. Like this, even the punching press gives the stuck point pressure too big or the effect time is too long, the base plate also can restrict the degree that the stuck point got into the stuck point through-hole, and the stuck point can not break away from the stuck point through-hole and drop, avoids stuck point installation failure.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments are briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained from the drawings without inventive efforts and also belong to the protection scope of the present application.

FIG. 1 is a schematic view of a graphite boat piece according to an embodiment of the present application;

FIG. 2 is a schematic view of a stuck point replacing device according to an embodiment of the present application;

FIG. 3 is a perspective view of a base of an embodiment of the present application;

FIG. 4 is a bottom view taken at IV in FIG. 2;

fig. 5 is a schematic view of a filling sheet according to an embodiment of the present application.

Icon: 100-graphite boat pieces; 101-silicon chip grooves; 102-stuck through holes; 200-a base; 201-grooves; 202-boat sheet holder; 203-a receiving cavity; 204-detaching channel; 205-a first filling locator; 300-a punch; 301-click gripper; 302-a press; 303-raised columns; 400-filling sheets; 401-filling the via; 402-a second fill locator; 500-substrate.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.

As a wafer carrier used in a PECVD process, a plurality of silicon wafers may be supported on one graphite boat 100, and generally, 5 to 8 silicon wafers may be supported on one graphite boat. In order to fix the silicon wafer on the graphite boat piece and ensure that the silicon wafer does not have position change during PECVD operation, the graphite boat piece is provided with a corresponding number of silicon wafer grooves, and the size of the silicon wafer grooves is consistent with that of the silicon wafer. Meanwhile, a plurality of clamping point through holes are formed in the periphery of the silicon wafer groove, and clamping points are placed in the clamping point through holes to further fix the silicon wafer placed in the silicon wafer groove 101.

Fig. 1 is a schematic view of a graphite boat piece according to an embodiment of the present application. Referring to fig. 1, in the present embodiment, 8 silicon wafer grooves 101 are formed in a graphite boat 100, 8 silicon wafers can be placed in the silicon wafer grooves 101, each silicon wafer groove 101 has a square structure, 5 through holes 102 are formed on three sides of each silicon wafer groove 101, and 40 through holes 102 and clamping points (not shown) are formed in the graphite boat 100.

Fig. 2 is a schematic view of a stuck point replacing device according to an embodiment of the present application, and fig. 3 is a perspective view of a base according to the embodiment of the present application. Referring to fig. 1-3, an embodiment of the present application provides a clamping point changing device for changing the clamping point of a graphite boat 100. The clamping point replacing device comprises a base 200 and a punch 300, wherein the base 200 is used for bearing the graphite boat piece 100, and a groove 201 and a boat piece fixer 202 are arranged on the base 200. The groove 201 may be a square shape having a length and a width corresponding to those of the graphite boat 100 for receiving the graphite boat 100. And the boat sheet holder 202 may be configured as a snap fit, which is disposed at the edge of the groove 201 for holding the graphite boat sheet 100.

FIG. 4 is a schematic view of the structure at IV in FIG. 3. Referring to fig. 1-4, the punch 300 is disposed above the base 200 and includes 8 chucking claws 301 and a press 302, and the number of the chucking claws 301 is equal to that of the silicon wafer grooves 101. The press 302 is arranged above and connected with the clamping point paw 301, the clamping point paw 301 comprises protruding columns 303 which are arranged close to one end of the base 200, each clamping point paw 301 is provided with 5 protruding columns 303 which correspond to the clamping point through holes 102 around the corresponding silicon chip grooves 101 respectively, the protruding columns 303 correspond to the clamping point through holes 102 and can extend into the clamping point through holes 102, and the number of the protruding columns 303 is consistent with that of the clamping point through holes 102.

The stuck point gripper 301 is movable up and down by the press 302 so that the stuck point gripper 301 acts on the stuck point. As the checkpoint gripper 301 moves downward, the raised post 303 thereon can contact and impart downward pressure on the checkpoint. The punch 300 is used to provide downward pressure to the card point in the card point through hole 102 to disengage it from the card point through hole 102.

In other embodiments, the number of click fingers 301 is not limited to 8, but may be 1 or another number. When the number of the clamping point claws 301 is not equal to that of the silicon wafer grooves 101, the punch 300 further comprises a moving mechanism, and the clamping point claws 301 can move along the length direction of the graphite boat 100 under the action of the moving mechanism, so that the same clamping point claw 301 can move to the upper side of another silicon wafer groove 101 under the action of the moving mechanism after pressing the clamping point around a certain silicon wafer groove 101, and then downward pressing the clamping point around the silicon wafer groove 101.

Generally, it is necessary to detach the old chuck from the graphite boat 100 and then attach a new chuck. Therefore, the present embodiment will first explain the removal of the old stuck point.

Referring to fig. 1-4, when the clamping point on the graphite boat 100 needs to be removed, the graphite boat 100 is placed in the groove 201 of the base 200 and further fixed by the boat holder 202, and a distance greater than the length of the clamping point exists between the bottom of the groove 201 and the graphite boat 100, the press 302 located above the base 200 is operated to lower the clamping point gripper 301, and during the lowering of the clamping point gripper 301, the protruding column 303 corresponding to the clamping point through hole 102 is lowered, and downward pressure is gradually applied to the clamping point in the clamping point through hole 102 until the protruding column 303 extends into the clamping point through hole 102 to separate the clamping point from the clamping point through hole 102, thereby completing the removal of the clamping point.

Referring to fig. 3, in order to collect the detached clamping points, the base 200 further includes an accommodating cavity 203 and a detaching channel 204 corresponding to the clamping point through hole 102, the detaching channel 204 is located above the accommodating cavity 203, penetrates through the upper surface of the base 200, and is communicated with the accommodating cavity 203, and an aperture of the detaching channel 204 is not smaller than an aperture of the clamping point through hole 102. Referring to fig. 1-4, the through hole 102 is aligned with the detaching hole, the press 302 located above the base 200 is operated to lower the clamping point claw 301, and during the descending process of the clamping point claw 301, the protruding column 303 corresponding to the through hole 102 is also lowered, and downward pressure is gradually applied to the clamping point in the through hole 102, so that the clamping point gradually enters the detaching channel 204 below the graphite boat 100, and finally the clamping point is separated from the through hole 102 and collected into the accommodating cavity 203 along the detaching channel 204.

The number of the clamping point claws 301 is the same as that of the silicon wafer grooves 101 on the graphite boat piece 100, correspondingly, the number of the protruding columns 303 is the same as that of the clamping points, and by using the clamping point replacing device, all the clamping points on the graphite boat piece 100 can be disassembled at one time, and the disassembled clamping points are collected in the accommodating cavity 203 in a centralized manner.

After the old card is detached, the installation of the new card will be described in detail.

Fig. 5 is a schematic view of a filling sheet according to an embodiment of the present application. Referring to fig. 1 to 5, the clamping point replacing device of the present embodiment further includes a filling sheet 400 and a substrate 500, the filling sheet 400 is used to be disposed on the graphite boat 100, and the filling sheet 400 is provided with a plurality of filling through holes 401 corresponding to the clamping point through holes 102, in this embodiment, the number of the filling through holes 401 is 40. The filling through hole 401 is conical, the aperture of the filling through hole 401 close to one end of the base 200 is consistent with that of the clamping point through hole 102, the aperture of the filling through hole 401 far away from one end of the base 200 is 0.015-0.025mm larger than that of the clamping point through hole 102, and the filling through hole 401 is used for placing a clamping point. In this embodiment, the filled via 401 at the end away from the base 200 has an aperture 0.02mm larger than the aperture of the landing via 102.

The lateral surface of the base 200 is provided with a horizontal channel, and the substrate 500 is inserted into the horizontal channel and is drawn into the base 200 to limit the separation of the clamping point from the clamping point through hole 102. The substrate 500 may be a stainless steel plate having a thickness of 2cm and a size larger than the upper surface of the susceptor 200.

This embodiment is based on the equipment that has completed the removal of the old cassette (the graphite boat 100 has been fixed above the base 200), followed by the installation of a new cassette.

With continued reference to fig. 1-5, the substrate 500 is inserted into the susceptor 200 such that it is below the upper surface of the susceptor 200 and spaced from the graphite boat 100 by a distance that is the desired length of the chuck extending beyond the graphite boat 100. The press 302 is then operated again to move the clamping point finger 301 up until it is a distance from the graphite boat 100, the filling sheet 400 is placed over the graphite boat 100 with the filling through holes 401 aligned with the clamping point through holes 102, and a new clamping point is placed in the filling through holes 401.

The press 302 is operated again to move the click claw 301 downward, and the projecting column 303 corresponding to the click through hole 102 is lowered until it contacts and gradually applies downward pressure to a new click in the filling through hole 401, at which time the punch 300 is used to provide downward pressure to the new click in the filling through hole 401 to fill it into the click through hole 102. The new card point moves downwards in the card point through hole 102 until the lower part of the new card point abuts against the substrate 500, the card point claw 301 cannot descend any more, and the operation of the press 302 is stopped, so that the installation of the new card point is realized. Finally, the press 302 is operated again to move the clamping point gripper 301 upwards, and the punch 300 is reset so as to perform the next clamping point replacement.

Of course, in other embodiments, the installation of the new card point may be a separate operation, not performed after the removal of the old card point. In this case, the graphite boat 100 may be fixed above the base 200 before the new chucking point is mounted, and the new chucking point may be mounted in the above-described mounting manner.

When a new clamping point is installed, the filling piece 400 positioned on the graphite boat piece 100 can bear part of the pressure acting on the periphery of the clamping point through hole 102 when the punch 300 applies downward pressure to the new clamping point even if the new clamping point is not vertically placed in the filling through hole 401, the force of the part is transferred to the filling piece 400 from the graphite boat piece 100, and then the damage risk of the graphite boat piece 100 during the replacement of the clamping point is reduced.

In this embodiment, the filling sheet 400 is only used for mounting the new clamping point, but in other embodiments, the filling sheet 400 may also be used for removing the old clamping point, at this time, the old clamping point passes through the filling through hole 401, and the filling sheet 400 is similarly placed on the graphite boat 100, i.e., the clamping point replacing device of this embodiment may be used to remove the old clamping point.

And make filling through-hole 401 present big-end-up's toper type, the aperture of below is unanimous with filling through-hole 401's aperture, and when placing new stuck point in filling through-hole 401, new stuck point is changeed and is put into filling through-hole 401, and it is more convenient to install.

The arrangement of the substrate 500 can avoid that the clamping point excessively enters the clamping point through hole 102 and directly breaks away from the clamping point through hole 102 to drop due to too large pressure or too long acting time of the clamping point given by the punch 300, so that the clamping point installation fails. Meanwhile, due to the space between the substrate 500 and the graphite boat 100, the new clamping points can partially enter the detaching passage 204 penetrating through the upper surface of the base 200, and partial clamping points protrude from the upper and lower surfaces of the graphite boat 100 and can be more stably fixed in the clamping point through holes 102.

In this embodiment, the protruding column 303 on the click claw 301 can enter the click through hole 102 in the process of moving the click claw 301 downward, and the protruding column 303 enables the same punch 300 to be used for the removal of the old click and the installation of the new click, without replacing the click claw 301.

However, in other embodiments, the plate-like structure without the post 303 may be replaced when a new card point is installed.

To increase the probability that a new card point will be placed vertically into the fill via 401, the fill sheet 400 has a thickness of 1.5 cm. The filling sheet 400 has a thickness that can give a certain vertical support to the stuck point put in the filling through-hole 401. Meanwhile, the conical structure with the large upper part and the small lower part of the filling through hole 401 is combined with the thickness of the filling sheet 400, so that the inclination angle of the filling through hole 401 is kept in a small range, and the probability that a new clamping point is vertically placed in the filling through hole 401 is further increased.

In other embodiments, the thickness of the fill sheet 400 may also be 1cm or 2 cm.

In order to increase the service life of the filling sheet 400, the filling sheet 400 is made of a rigid material, and in this embodiment, the filling sheet 400 is made of stainless steel. When a material that is not easily deformed is used as the filling sheet 400, the filling sheet 400 is not easily deformed and damaged even when a downward pressure is applied to the stuck point in the filling through hole 401 and the pressure applied to the filling sheet 400 is large.

In other embodiments, the filling sheet 400 may also be made of a material having elasticity, such as a rubber product, so that the filling sheet 400 may also serve as a buffer structure to further reduce the pressure applied to the graphite boat sheet 100.

Referring to fig. 1-5, the base 200 is further provided with a first filling positioning element, which is a concave hole disposed on the two side edges of the base 200, and the filling sheet 400 is also provided with a second filling positioning element 402 adapted to the first filling positioning element 205, the second filling positioning element 402 is a protrusion, the concave hole and the protrusion are detachably engaged, and the number of the concave hole is consistent with the number of the protrusion.

First filling setting element 205 and second filling setting element 402 carry out the unsmooth joint cooperation of detachable, make filling through-hole 401 obtain more convenient and checkpoint through-hole 102 align, guarantee when new checkpoint is installed, the new checkpoint can be filled smoothly to checkpoint through-hole 102 in, and filling piece 400 places the completion back, and the relative position between filling piece 400 and base 200 has been fixed, and both are difficult for producing relative movement.

In other embodiments, the first filling positioning element 205 may also be a cylinder disposed on two side edges of the base 200, the second filling positioning element 402 may be a through hole, the aperture of the through hole is the same as the axial diameter of the cylinder, and the first filling positioning element 205 and the second filling positioning element 402 are inserted and matched.

One or/and combination of a plurality of technical schemes in the embodiment of the application has the following beneficial effects:

(1) when a new clamping point is installed, the filling piece 400 can share the pressure of the clamping point acting on the periphery of the clamping point through hole 102, and the force of the part is transferred to the filling piece 400 from the graphite boat piece 100, so that the damage risk of the graphite boat piece 100 during the replacement of the clamping point is reduced;

(2) the filling through hole 401 is in a conical shape with a large upper part and a small lower part, the aperture of the lower part is consistent with that of the filling through hole 401, when a new clamping point is placed in the filling through hole 401, the new clamping point is more easily placed in the filling through hole 401, and the new clamping point is more convenient to install;

(3) the filling sheet 400 has a certain thickness, can give the stuck point of putting into filling through-hole 401 with certain vertical support, and combines the setting with the thickness of filling sheet 400 with the big-end-up's of filling through-hole 401 toper structure, makes filling through-hole 401 inclination keep in very little scope, increases its probability that presents vertical attitude in filling through-hole 401.

(4) The filling sheet 400 is made of a material which is not easy to deform, so that the filling sheet 400 is not easy to deform and damage even if the pressure applied to the filling sheet 400 is high, and the service life of the filling sheet 400 is prolonged;

(5) the first filling positioning member 205 is matched with the second filling positioning member 402 in a concave-convex clamping manner, so that the filling through hole 401 can be aligned with the clamping point through hole 102 more conveniently, the new clamping point can be smoothly filled into the clamping point through hole 102 when the new clamping point is installed, and meanwhile, the filling sheet 400 is not easy to move relative to the base 200 after being placed;

(6) the arrangement of the protruding columns 303 on the clamping point claws 301 enables the clamping points to be dismounted and mounted by using the same punch 300 without sliding the clamping point claws 301;

(7) the disassembly channel 204 is arranged, so that on one hand, old clamping points can enter the accommodating cavity 203 along the disassembly channel 204 for collection, and the old clamping points can be conveniently collected in a centralized manner; on the other hand, the new clamping points can partially enter the detaching passage 204, and partial clamping points protrude from the upper and lower surfaces of the graphite boat piece 100, so that the clamping points can be more stably fixed in the clamping point through holes 102;

(8) the arrangement of the substrate 500 can avoid that the clamping point excessively enters the clamping point through hole 102 due to too large pressure or too long acting time of the clamping point given by the punch 300, so that the clamping point directly breaks away from the clamping point through hole 102 and falls, and the clamping point is failed to be installed.

The above description is only a few examples of the present application and is not intended to limit the present application, and various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims (10)

1. The utility model provides a stuck point replacing device for change the stuck point of graphite boat piece, be provided with a plurality of places on the graphite boat piece the stuck point through-hole of stuck point, its characterized in that includes:

the base is used for bearing the graphite boat piece;

the filling sheet is arranged on the graphite boat sheet, a plurality of filling through holes corresponding to the clamping point through holes are formed in the filling sheet, and the filling through holes are used for placing clamping points;

the punch is arranged above the base and used for providing downward pressure for the clamping point in the clamping point through hole so as to enable the clamping point to be separated from the clamping point through hole or providing downward pressure for the clamping point in the filling through hole so as to enable the clamping point to be filled into the clamping point through hole.

2. The stuck point replacing device according to claim 1, wherein the through-fill hole is tapered, the through-fill hole near the base end has a diameter corresponding to the diameter of the stuck point through-hole, and the through-fill hole far from the base end has a diameter 0.015 to 0.025mm larger than the diameter of the stuck point through-hole.

3. The stuck point replacing device of claim 2, wherein the filling sheet has a thickness of 1-2 cm.

4. The stuck point replacement device of claim 1, wherein the filler piece is a rigid material.

5. The clamping point replacing device according to any one of claims 1 to 4, wherein a first filling positioning member is arranged on the base, a second filling positioning member adapted to the first filling positioning member is arranged on the filling sheet, and the first filling positioning member and the second filling positioning member are detachably matched to align the filling through hole and the clamping point through hole.

6. The stuck point replacing device according to claim 5, wherein the first filling positioning element is a concave hole disposed at two side edges of the base, the second filling positioning element is a protrusion, the concave hole and the protrusion are detachably engaged, and the number of the concave holes is consistent with the number of the protrusions.

7. The stuck point changing device of any one of claims 1-4, wherein the punch comprises a stuck point gripper and a press, the press is arranged above the stuck point gripper and connected with the stuck point gripper, and the stuck point gripper moves up and down under the action of the press so that the stuck point gripper acts on the stuck point.

8. The stuck point replacing device according to claim 7, wherein the stuck point claw comprises a protruding column arranged close to one end of the base, the protruding column corresponds to the stuck point through hole and can extend into the stuck point through hole, and the number of the protruding columns is consistent with that of the stuck point through holes.

9. The clamping point replacing device according to claim 1, wherein the base is further provided with an accommodating cavity and a detaching channel corresponding to the clamping point through hole, the detaching channel is located above the accommodating cavity, penetrates through the upper surface of the base and is communicated with the accommodating cavity, and the aperture of the detaching channel is not smaller than that of the clamping point through hole.

10. The click-on-replacement device according to any one of claims 1 to 4, further comprising a base plate, wherein the base plate is drawably disposed in the base to restrict the click from escaping from the click through hole.

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