CN215750090U

CN215750090U - Cutting machine with inclined water spraying opening

Info

Publication number: CN215750090U
Application number: CN202121822762.1U
Authority: CN
Inventors: 廖招军; 张智广; 于飞; 宋鹏飞
Original assignee: Suzhou Teste Semiconductor Equipment Co ltd
Current assignee: Suzhou Teste Semiconductor Equipment Co ltd
Priority date: 2021-08-05
Filing date: 2021-08-05
Publication date: 2022-02-08
Anticipated expiration: 2031-08-05

Abstract

The utility model discloses a cutting machine with inclined water spray nozzles, which comprises an air main shaft, wherein a blade is arranged on an output shaft of the air main shaft through a clamping flange, a connecting frame is arranged on the air main shaft, an adjusting block is arranged on the connecting frame, an installation channel is arranged in the adjusting block, a water spray pipe is arranged in the installation channel, a water spray hole is arranged on the water spray pipe, the water spray hole is obliquely arranged, and the water spray hole faces the blade. Through setting up the regulating block, guaranteed the adjustable installation of spray pipe, the slope setting of hole for water spraying moreover can guarantee more timely and effective to blade cooling, and the cooling water that makes spouts more is in the place of blade and material contact for refrigerated scope is bigger, and the back probably diameter change is great before even blade wearing and tearing, also need not the height-adjusting almost. The flow rate is also increased substantially, cooling the material while cooling the blade.

Description

Cutting machine with inclined water spraying opening

Technical Field

The utility model relates to the field of a cutting machine, in particular to a cutting machine with an inclined water spray nozzle.

Background

Wafer dicing (i.e., scribing) is an indispensable process in the chip manufacturing process, and belongs to a subsequent process in wafer manufacturing. The wafer dicing is to divide the whole wafer with the manufactured chips into single chips (dies) according to the size of the chips. The earliest wafers were diced (diced) using a dicing system, a process that has historically occupied a large portion of the world's chip dicing market, particularly in the non-integrated circuit wafer dicing field. The diamond saw blade (grinding wheel) cutting method is a common wafer cutting method, in which a blade contacts a large-sized wafer and cuts the wafer into small single or multiple small wafers for packaging.

The wafer cutting requires a special cutter blade, and during the cutting process, the blade and the wafer are rubbed to generate a large amount of heat, and the blade needs to be cooled by a water spray pipe. The existing water spraying pipe directly sprays water to the blade, if the thickness of the cut wafer is different, different heights need to be adjusted, when the adjusting position is lower, products are easily scratched, cooling is not timely, the position needs to be adjusted, the process is complicated, and efficient processing is not facilitated.

Therefore, the present inventors have aimed to invent a dicing saw having inclined water jets in view of the above technical problems.

SUMMERY OF THE UTILITY MODEL

To overcome the above disadvantages, it is an object of the present invention to provide a dicing machine having inclined water spray.

In order to achieve the above purposes, the utility model adopts the technical scheme that: the utility model provides a cut-up machine with slope water jet, includes the air main shaft, set up the blade through the centre gripping flange on the output shaft of air main shaft, set up the link on the air main shaft, set up the regulating block on the link, set up installation passageway in the regulating block, just set up the spray pipe in the installation passageway, set up the hole for water spraying on the spray pipe, the hole for water spraying slope sets up, just the hole for water spraying is towards the blade.

Preferably, a U-shaped through hole is formed in the adjusting block, and the U-shaped through hole is arranged downwards. The cutting position of the blade is located at the lower end of the blade, so that the position where the water spray holes face is mainly the lower end of the blade, the size of the adjusting block is slightly long, the design of the U-shaped through hole is necessary, the highest position of the U-shaped through hole is not lower than the center of the blade, the fact that when the blade rotates along with the air spindle at a high speed, debris impurities and water can flow away along the U-shaped through hole is guaranteed, and interference of the debris impurities and cooling water is reduced.

Preferably, two water spray pipes are arranged on the adjusting block, the two water spray pipes are respectively positioned on two sides of the blade, and water spray holes in the water spray pipes face the blade. The water spray pipes are arranged on the two sides of the blade, so that the two sides of the blade can be cooled and cleaned at the same time, smooth cutting is guaranteed, and convenience is brought to efficient cutting of wafers.

Preferably, the water spraying holes are arranged in parallel, and water can be sprayed out of the water spraying pipes along the water spraying pipes. Namely, a plurality of water spray holes, specifically three water spray holes are arranged in the attached drawing, so that the blade can be cooled in time.

Preferably, the lowest of the orifices is higher than the bottom end of the spout, and the highest of the orifices is not higher than the top end of the spout. I.e., the direction of water sprayed from the water spray holes, if it is lower than the bottom end, water leakage may occur, resulting in waste of cooling water.

Preferably, the adjusting block is provided with a waist-shaped hole, and is connected with the connecting frame through a waist-shaped piece arranged in the waist-shaped hole, and the waist-shaped piece can slide in the waist-shaped hole. The waist-shaped hole comprises two parts, namely a through hole part and a step part, the step part is used for the waist-shaped sheet to slide, the through hole part is used for a screw or a bolt to pass through, and the step part is longer than the waist-shaped sheet in size, so that the mounting height of the adjusting block can be adjusted according to different cutting requirements, and high-quality cutting is realized.

The cutting machine with the inclined water spraying opening has the advantages that the adjustable installation of the water spraying pipe is guaranteed by arranging the adjusting block, the blades can be cooled timely and effectively due to the inclined arrangement of the water spraying holes, more cooling water is sprayed to the positions where the blades are contacted with materials, the cooling range is wider, the height can not be adjusted almost, and the cutting of multiple sizes is realized.

Drawings

FIG. 1 is a schematic view of a scribe machine with inclined water jets.

FIG. 2 is a partial schematic view of the location of the spray tube and the blade.

FIG. 3 is a schematic view of the installation of the sprinkler tube and the adjustment block.

Fig. 4 is a schematic view of the mounting channel of the adjustment block.

In the figure:

1. an air main shaft, 2, a clamping flange, 3, a blade, 4, a connecting frame, 5, an adjusting block, 6, a water spray pipe, 7 and a waist-shaped sheet,

51. installation channel, 52, U-shaped through hole, 53, waist-shaped hole, 61 and water spraying hole.

Detailed Description

The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the utility model easier to understand by those skilled in the art, and thus will clearly and clearly define the scope of the utility model.

Referring to fig. 1-4, the dicing saw with inclined water spraying openings in the present embodiment includes an air spindle 1, a blade 3 is disposed on an output shaft of the air spindle 1 through a clamping flange 2, a connecting frame 4 is disposed on the air spindle 1, an adjusting block 5 is disposed on the connecting frame 4, an installation channel 51 is disposed in the adjusting block 5, a water spraying pipe 6 is disposed in the installation channel 51, a water spraying hole 61 is disposed on the water spraying pipe 6, the water spraying hole 61 is inclined, and the water spraying hole 61 faces the blade 3.

A U-shaped through hole 52 is formed in the adjusting block 5, and the U-shaped through hole 52 is arranged downwards. Since the cutting position of the blade 3 is located at the lower end of the blade 3, the water spray hole 61 is mainly located at the lower end of the blade 3, so the size of the adjusting block 5 is slightly longer, and therefore the design of the U-shaped through hole 52 is necessary, and the highest position of the U-shaped through hole 52 is not lower than the center of the blade 3, so that when the blade 3 rotates along with the air spindle 1 at high speed, the chip impurities and water can flow away along the U-shaped through hole 52, and the interference of the chip impurities and the cooling water is reduced.

Two water spray pipes 6 are arranged on the adjusting block 5, the two water spray pipes 6 are respectively positioned at two sides of the blade 3, and the water spray holes 61 on the water spray pipes 6 face the blade 3. The water spraying pipes 6 are arranged on the two sides of the blade 3, so that the two sides of the cutting blade can be cooled and cleaned at the same time, the smooth proceeding of cutting is guaranteed, and convenience is brought to efficient cutting of wafers.

At least two water spray holes 61 are arranged in parallel, and water can be sprayed from the water spray pipe 6 along the water spray pipe 6. I.e. a plurality of water spray holes 61, in the figure in particular three water spray holes 61, ensures that the blade 3 can be cooled in time.

The lowest point of the water jet hole 61 is higher than the bottom end of the water jet pipe 6, and the highest point of the water jet hole 61 is not higher than the top end of the water jet pipe 6. I.e., the direction in which water is sprayed from the water spray holes 61, if it is lower than the bottom end, water leakage occurs, resulting in waste of cooling water.

The adjusting block 5 is provided with a waist-shaped hole 53 and is connected with the connecting frame 4 through a waist-shaped sheet 7 arranged in the waist-shaped hole 53, and the waist-shaped sheet 7 can slide in the waist-shaped hole 53. That is, the waist-shaped hole 53 includes two parts, which are a through hole part and a step part, respectively, the step part is used for the waist-shaped sheet 7 to slide, the through hole part is used for the screw or bolt to pass through, and the step part is longer than the waist-shaped sheet 7 in size, so as to ensure that the mounting height of the adjusting block 5 can be adjusted according to different cutting requirements, and realize high-quality cutting.

The utility model provides a scratcher with slope water jet's beneficial effect is, through setting up regulating block 5, has guaranteed the adjustable installation of spray pipe 6, and the slope setting of hole for water spraying 61 more can guarantee in time and effective to blade 3 refrigerated moreover, and the cooling water that makes is more spout in blade 3 and the place of material contact for refrigerated scope is bigger, can not adjust the height almost, realizes the cutting of a plurality of sizes.

The air main shaft is a permanent magnet synchronous motor, can rotate at high speed, 2-6 ten thousand revolutions per minute, and has blades: the metal sheet is used as a substrate, fine diamond particles are bonded on the surface of the metal sheet, and the wafer or other packaged products are divided into independent small particles.

The theory of operation, the setting in waist shape hole can guarantee that the spray pipe can adjust at certain extent, and the area of hole for water spraying can be increaseed in the setting of the hole for water spraying of deuterogamy slope, also through the setting of slope, has guaranteed the scope grow of water spraying simultaneously, realizes not adjusting the height, and the more wafer-cutting of adaptation realizes high-efficient cooling, has guaranteed the life-span of blade, improves cutting accuracy.

The above embodiments are merely illustrative of the technical concept and features of the present invention, and the present invention is not limited thereto, and any equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.

Claims

1. The utility model provides a cutting machine with slope water jet, includes the air main shaft, set up the blade through the centre gripping flange on the output shaft of air main shaft, set up the link on the air main shaft, set up the regulating block on the link, set up installation passageway in the regulating block, just set up the spray pipe in the installation passageway, set up hole for water spraying on the spray pipe, its characterized in that: the water spraying holes are obliquely arranged and face the blade.

2. A dicing machine with inclined water jets according to claim 1, characterized in that: a U-shaped through hole is formed in the adjusting block and arranged downwards.

3. A dicing machine with inclined water jets according to claim 1, characterized in that: two water spray pipes are arranged on the adjusting block and are respectively positioned on two sides of the blade, and water spray holes in the water spray pipes face the blade.

4. A dicing machine with inclined water jets according to claim 1, characterized in that: the water spray holes are arranged in parallel, and water can be sprayed out from the water spray pipes along the water spray pipes.

5. A dicing machine with inclined water jets according to claim 1, characterized in that: the lowest position of the water spraying hole is higher than the bottom end of the water spraying pipe, and the highest position of the water spraying hole is not higher than the top end of the water spraying pipe.

6. A dicing machine with inclined water jets according to claim 1, characterized in that: the adjusting block is provided with a waist-shaped hole, and is connected with the connecting frame through a waist-shaped sheet arranged in the waist-shaped hole, and the waist-shaped sheet can slide in the waist-shaped hole.