CN215030193U

CN215030193U - Two-fluid spraying device

Info

Publication number: CN215030193U
Application number: CN202120695623.0U
Authority: CN
Inventors: 王辉
Original assignee: Jinglong Technology Suzhou Co ltd
Current assignee: Jinglong Technology Suzhou Co ltd
Priority date: 2021-04-06
Filing date: 2021-04-06
Publication date: 2021-12-07
Anticipated expiration: 2031-04-06
Also published as: TWM616800U

Abstract

The utility model discloses a two fluid atomizer, including first pressure boost piece, with the second pressure boost piece of first pressure boost piece cooperation installation, first pressure boost piece includes first body, set up in first internal plenum chamber and set up on first body and with the first jet of plenum chamber intercommunication, the lateral wall that plenum chamber and first jet are connected encloses and establishes into the toper that reduces gradually along the direction opening that is close to first jet, second pressure boost piece includes the second body, set up in this internal mixing chamber of second and set up on the second body and with the second jet of mixing chamber intercommunication, the inboard wall that mixing chamber and second jet are connected encloses and establishes into the toper that reduces gradually along the direction opening that is close to the second jet. The utility model provides a two fluid atomizer spun aqueous vapor merge effectually, and the water column angle is wide on a large scale, can get rid of the foreign matter that remains at the ultramicro tiny particle surface on wafer surface, and the cleaning performance is good.

Description

Two-fluid spraying device

Technical Field

The utility model belongs to the field of machinery, concretely relates to two fluid atomizer.

Background

Powder and foreign matter that can produce behind the wafer cutting, for subsequent processing, so need in time wash, generally all adopt the washing, current washing device leads to aqueous vapor to fuse the effect poor owing to there is not the pressure boost design, and water column focus point pressure is relatively poor during the washing, and two fluid aqueous vapors fuse inadequately and the blowout water column is thick, can't be with powder and foreign matter sanitization, and the cleaning performance is poor.

Therefore, in view of the above technical problems, it is necessary to provide a two-fluid spraying device.

SUMMERY OF THE UTILITY MODEL

In view of this, the present invention provides a two-fluid spraying device to increase the spraying pressure, thereby improving the cleaning effect of the powder and the foreign matters.

In order to achieve the above object, an embodiment of the present invention provides the following technical solutions:

a two-fluid spraying device comprises a first pressurizing part and a second pressurizing part matched with the first pressurizing part, wherein the first pressurizing part comprises a first body, a pressurizing chamber arranged in the first body and a first spraying opening arranged on the first body and communicated with the pressurizing chamber, the first body is used for allowing gas and liquid to flow through, the side wall of the pressurizing chamber connected with the first spraying opening is encircled to form a cone with the opening gradually decreasing along the direction close to the first spraying opening, the pressurizing chamber is used for spraying the gas flowing through the first body from the first spraying opening after being pressurized, the second pressurizing part comprises a second body, a mixing chamber arranged in the second body and a second spraying opening arranged on the second body and communicated with the mixing chamber, the inner side wall of the mixing chamber connected with the second spraying opening is encircled to form a cone with the opening gradually decreasing along the direction close to the second spraying opening, the mixing chamber is used for mixing and pressurizing the gas and the liquid flowing out of the pressurizing chamber and then spraying out of the second spraying opening.

In one embodiment, the first plenum further comprises a first fluid passage opening in the first body and at least two second fluid passages communicating with each other, the first fluid passage communicating with the plenum chamber and the second fluid passage communicating with the mixing chamber, the first fluid passage communicating with a gas and the second fluid passage communicating with a liquid.

In one embodiment, the two-fluid spraying device further comprises a connecting member fitted with the first pressurizing member, and a gasket fitted between the first pressurizing member and the connecting member, the connecting member being used for allowing gas and liquid to flow through and into the first pressurizing member via the gasket, and the gasket being used for cooperating with the connecting member and the first pressurizing member to pressurize the liquid flowing through.

In one embodiment, the connecting member includes a third body and at least two mutually communicated fourth fluid passages provided in the third body, the fourth fluid passages are used for allowing liquid to flow through, the gasket is provided with a plurality of through holes, a first annular groove communicated with the second fluid passages and the through holes is provided on an end portion of the first body close to the gasket, a second annular groove communicated with the through holes and the fourth fluid passages is provided on an end portion of the third body close to the gasket, and an aperture of the through holes is smaller than a width of the first annular groove and a width of the second annular groove.

In one embodiment, a third fluid passage is formed in the third body and is communicated with the first fluid passage.

In an embodiment, a third annular groove communicated with the fourth fluid channel is formed in the other end of the third body, which is far away from the second annular groove.

In one embodiment, the inner side wall of the end portion of the second body far away from the second jet opening is provided with a first thread, and the outer side wall of the first body is provided with a second thread matched with the first thread.

In an embodiment, a first external threaded pipe communicated with the first fluid passage is installed on an end portion, far away from the pressurizing chamber, of the first body, and third threads used for being installed in a matched mode with the first external threaded pipe are formed on an inner side wall of the third fluid passage.

In one embodiment, a second externally threaded tube is mounted on an end of the third body remote from the washer in communication with the third fluid passage for mating mounting with a base.

In an embodiment, the base is provided with a fifth fluid channel communicated with the third fluid channel and a sixth fluid channel communicated with the third annular groove, the fifth fluid channel is used for introducing gas, and the sixth fluid channel is used for introducing liquid.

Compared with the prior art, the utility model has the advantages of it is following:

the utility model provides a two fluid atomizer spun aqueous vapor merge effectually, and the water column angle is wide on a large scale, can get rid of the foreign matter that remains at the ultramicro tiny particle surface on wafer surface, and the cleaning performance is good.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is an exploded schematic view of a cross-sectional structure of a two-fluid spraying device according to an embodiment of the present invention;

fig. 2 is a schematic sectional view of a two-fluid spraying apparatus according to an embodiment of the present invention.

Detailed Description

The present invention will be described in detail below with reference to embodiments shown in the drawings. However, the present invention is not limited to the embodiments, and the structural, method, or functional changes made by those skilled in the art according to the embodiments are all included in the scope of the present invention.

The present invention will be further described with reference to the following specific examples.

The first embodiment is as follows:

referring to fig. 1 in combination with fig. 2, a two-fluid spraying device includes a first pressurizing part 1, a second pressurizing part 2 installed in cooperation with the first pressurizing part 1, and a connecting part 3 installed in cooperation with the first pressurizing part 1, a gasket 4 is installed between the first pressurizing part 1 and the connecting part 3, and the two-fluid spraying device is installed on a base 5 through the connecting part 3.

Specifically, the first pressurizing part 1 comprises a first body 10, a first fluid channel 11 arranged in the first body 10, a pressurizing chamber 12 arranged in the first body 10 and communicated with the first fluid channel 11, and a first injection port 14 arranged on the first body 10 and communicated with the pressurizing chamber 12, wherein the diameter of the first injection port 14 is 0.02-0.06 mm, the first injection port 14 is positioned at one end of the first body 10, the side wall of the pressurizing chamber 12 connected with the first injection port 14 is surrounded by a cone with an opening gradually reduced along the direction close to the first injection port 14, the angle formed by the cone is 40-45 degrees, the first fluid channel 11 is used for introducing gas, and the gas enters the pressurizing chamber 12 through the first fluid channel 11, collides with the cone-shaped side wall, is pressurized, and is injected through the first injection port 14 and then is discharged.

Meanwhile, at least two second fluid passages 13 which are communicated with each other are formed in the first body 10, three second fluid passages 13 are formed in the second body 13 in this embodiment, the three second fluid passages 13 are arranged in parallel and are uniformly distributed in the circumferential direction by taking the first fluid passage 11 as an axis, a first annular groove 15 which is communicated with the three second fluid passages 13 is formed in one end portion of the first body 10, the first annular groove 15 is located at the end portion of the first body 10 close to the gasket 4, and liquid flows into the second fluid passages 13 through the first annular groove 15.

Referring to fig. 1 in combination with fig. 2, the second pressurizing member 2 includes a second body 20, a mixing chamber 21 formed in the second body 20 and communicating with the pressurizing chamber 12 and the second fluid passage 13, the mixing chamber 21 communicating with the pressurizing chamber 12 through a first injection port 14, the second body 20 being opened with a second injection port 22 communicating with the mixing chamber 21 and the outside, the second injection port 22 having a diameter of 1mm to 1.5mm, the liquid and the gas being mixed by the mixing chamber 21, an inner sidewall of the mixing chamber 21 connected with the second injection port 22 being enclosed in a cone shape having an opening gradually decreasing in a direction close to the second injection port 22, an angle formed by the inner sidewall of the cone shape being 40 ° to 45 °, the liquid and the gas entering the mixing chamber 21 being pressurized again by the cone shape of the inner sidewall, and an injection range of the fluid injected from the second injection port 22 being increased, an injection angle of 60 ° to 90 °, the jet distance is 18 mm-25 mm, the gas flow rate is 35-50 m/s, and the impact force of the jetted fluid in the range of 50mm in diameter is 10-19 g/m 2.

In this embodiment, the inner side wall of the end portion of the second body 20 far away from the second injection port 22 is provided with a first thread 23, the outer side wall of the first body 10 is provided with a second thread 17 matched with the first thread 23, and the first pressurizing piece 1 and the second pressurizing piece 2 are matched and installed through the first thread 23 and the second thread 17.

The gas is pressurized in the pressurizing chamber 12 and then injected into the mixing chamber 21 through the first injection port 14, and the liquid enters the mixing chamber 21 through the second fluid passage 13, so that the gas and the liquid are mixed and pressurized in the mixing chamber 21 and finally are injected out through the second injection port 22.

Referring to fig. 1 in combination with fig. 2, the connector 3 includes a third body 30, a third fluid passage 31 opened in the third body 30 and communicating with the first fluid passage 11, at least two mutually communicated fourth fluid passages 32 arranged in the third body 30, the fourth fluid passages 32 in this embodiment are provided with three passages, the passages are parallel to each other and are uniformly distributed along the circumferential direction by taking the third fluid passage 31 as an axis, the third body 30 is provided with a second annular groove 33 and a third annular groove 34, the second annular groove 33 and the third annular groove 34 are respectively positioned at two end parts of the third body 30, the second annular groove 33 is positioned at the end part of the third body 30 close to the gasket 4, the third annular groove 34 is positioned at the end part of the third body 30 close to the base 5, the second annular groove 33 is communicated with one end of all the fourth fluid passages 32, and the third annular groove 34 is communicated with the other end of all the fourth fluid passages 32.

Meanwhile, the first pressurizing member 1 further includes a first external threaded pipe 16 installed on the first body 10, the first external threaded pipe 16 is communicated with the first fluid passage 11, the first external threaded pipe 16 is located on an end portion of the first body 10 far away from the pressurizing chamber 12, the first external threaded pipe 16 and the first injection port 14 are respectively located on both ends of the first body 10, a third thread 36 for being installed in cooperation with the first external threaded pipe 16 is opened on an inner side wall of the third fluid passage 31, and the first pressurizing member 1 and the connecting member 3 are installed in cooperation through the first external threaded pipe 16 and the third thread 36.

In addition, a second external thread pipe 35 which is communicated with the third fluid channel 31 and is used for being matched and installed with the base 5 is installed on the end portion, far away from the gasket 4, of the third body 30, a fifth fluid channel 51 communicated with the third fluid channel 31 and a sixth fluid channel 52 communicated with the third annular groove 34 are formed in the base 5, a fourth thread 53 matched with the second external thread pipe 35 is arranged on the inner side wall of the fifth fluid channel 51, and the connecting piece 3 is matched and installed with the base 5 through the second thread pipe 35 and the fourth thread 53.

In this embodiment, the gasket 4 is provided with a plurality of through holes 41, preferably, the through holes 41 are eight, the diameter of each through hole 41 is 0.8mm to 1mm, the through holes 41 are communicated with the first annular groove 15 and the second annular groove 33, the aperture of each through hole 41 is smaller than the width of the first annular groove 15 and the width of the second annular groove 33, and through the arrangement of the through holes 41 on the gasket 4, liquid is pressurized when entering the first annular groove 15 from the second annular groove 33 through the through holes 41, and enters the conical surface of the mixing chamber 21 after being pressurized.

In this embodiment, the gas enters the first fluid passage 11 through the fifth fluid passage 51 of the base 5, and then enters the pressurizing chamber 12 through the first fluid passage 11, and is ejected into the mixing chamber 21 through the first ejection port 14 after impacting the tapered side wall of the pressurizing chamber 12 for pressurization; meanwhile, the liquid enters each fourth fluid channel 32 through the sixth fluid channel 52 of the base 5, and the liquid flows from the fourth fluid channel 32 through the second annular groove 33, the through hole 41 and the first annular groove 15, is pressurized and then enters the mixing chamber 21 through the second fluid channel 13; the liquid and gas entering the mixing chamber 21 collide with the tapered surface of the mixing chamber 21, are mixed and pressurized, and are finally ejected through the second ejection port 22.

According to the technical scheme provided by the utility model, the utility model discloses following beneficial effect has:

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. A two-fluid spraying device is characterized by comprising a first pressurizing part and a second pressurizing part matched with the first pressurizing part, wherein the first pressurizing part comprises a first body, a pressurizing chamber arranged in the first body and a first spraying opening arranged on the first body and communicated with the pressurizing chamber, the first body is used for allowing gas and liquid to flow through, the side wall of the pressurizing chamber connected with the first spraying opening is surrounded into a cone with the opening gradually reduced along the direction close to the first spraying opening, the pressurizing chamber is used for pressurizing the gas flowing through the first body and then spraying the gas from the first spraying opening, the second pressurizing part comprises a second body, a mixing chamber arranged in the second body and a second spraying opening arranged on the second body and communicated with the mixing chamber, and the inner side wall of the mixing chamber connected with the second spraying opening is surrounded into an opening gradually reduced along the direction close to the second spraying opening The mixing chamber is used for mixing and pressurizing the gas and the liquid flowing out of the pressurizing chamber and then spraying out of the second spraying opening.

2. The two-fluid spraying apparatus of claim 1 wherein the first plenum further comprises a first fluid passage opening in the first body in communication with the plenum and at least two interconnected second fluid passages in communication with the mixing chamber, the first fluid passage for communicating gas and the second fluid passage for communicating liquid.

3. The two-fluid spraying apparatus of claim 2, further comprising a connecting member cooperatively mounted with said first pumping member, said connecting member adapted to allow gas and liquid to flow therethrough and into said first pumping member via said gasket, and a gasket mounted between said first pumping member and said connecting member, said gasket adapted to cooperate with said connecting member and said first pumping member to pressurize liquid flowing therethrough.

4. The two-fluid spraying apparatus as claimed in claim 3, wherein the connecting member includes a third body and at least two mutually communicating fourth fluid passages formed in the third body, the fourth fluid passages are used for allowing the liquid to flow through, the gasket is provided with a plurality of through holes, a first annular groove communicated with the second fluid passages and the through holes is formed at an end portion of the first body close to the gasket, a second annular groove communicated with the through holes and the fourth fluid passages is formed at an end portion of the third body close to the gasket, and the aperture of the through holes is smaller than the width of the first annular groove and the width of the second annular groove.

5. A two-fluid spraying device according to claim 4 in which a third fluid passage is formed in the third body in communication with the first fluid passage.

6. A two-fluid spraying apparatus as claimed in claim 5, wherein a third annular groove communicating with the fourth fluid passageway is provided in the other end of the third body remote from the second annular groove.

7. The two-fluid spraying apparatus as claimed in claim 1, wherein the second body has a first thread formed on an inner sidewall of an end portion thereof remote from the second spraying port, and a second thread formed on an outer sidewall of the first body for engaging with the first thread.

8. A two-fluid spraying apparatus as claimed in claim 5, wherein the first body has a first externally threaded tube mounted on an end thereof remote from the pumping chamber and communicating with the first fluid passageway, and the third fluid passageway has third threads formed on an inner side wall thereof for mating with the first externally threaded tube.

9. A two-fluid spraying device as claimed in claim 5, in which the end of the third body remote from the gasket is fitted with a second externally threaded tube communicating with the third fluid passage and adapted to fit with a base.

10. The two-fluid spraying device as claimed in claim 9, wherein the base defines a fifth fluid passage in communication with the third fluid passage and a sixth fluid passage in communication with the third annular groove, the fifth fluid passage being configured to allow passage of gas and the sixth fluid passage being configured to allow passage of liquid.