CN215010478U - Huygens-super lens-based near-infrared imaging system - Google Patents
Huygens-super lens-based near-infrared imaging system Download PDFInfo
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- CN215010478U CN215010478U CN202120525331.2U CN202120525331U CN215010478U CN 215010478 U CN215010478 U CN 215010478U CN 202120525331 U CN202120525331 U CN 202120525331U CN 215010478 U CN215010478 U CN 215010478U
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Abstract
The utility model relates to a near-infrared imaging system based on huygens-super lens, include: a lens barrel; the optical detector module is arranged at one end of the lens cone, and an imaging surface of the optical detector module faces to the other end of the lens cone; the huygens-super lens is arranged at the other end of the lens barrel and comprises a substrate and a plurality of super-surface structure units arranged on the surface of the substrate, wherein the super-surface structure units are arranged in an array; and the optical narrow-band filter is arranged between an imaged object and the Wheatstone-superlens or between the Wheatstone-superlens and the optical detector module. The utility model discloses a set up huygens-super lens, the effectual epaxial and off-axis aberration that has reduced, the effectual traditional optical lens of having solved is bulky, heavy, the processing is complicated, difficult shortcoming such as integrated.
Description
Technical Field
The utility model relates to a near-infrared imaging field, more specifically say, relate to near-infrared imaging system based on huygens-super lens.
Background
With the development of science and technology, near infrared imaging has increasingly wide application in the fields of household night vision security, eyeball tracking, gesture control and face recognition. The existing near-infrared imaging system is composed of a traditional optical lens, a near-infrared narrow-band filter and an optical detector module. However, the conventional optical lens imaging system has the disadvantages of large volume, heavy weight, complex processing, difficult integration and the like, and is difficult to meet the requirement of the modern miniaturized equipment on high integration design.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the present invention is to provide a huygens-super lens-based near-infrared imaging system, in view of the above-mentioned drawbacks of the prior art.
The utility model provides a technical scheme that its technical problem adopted is:
a huygens-superlens-based near-infrared imaging system, comprising:
a lens barrel;
the optical detector module is arranged at one end of the lens cone, and an imaging surface of the optical detector module faces to the other end of the lens cone;
the huygens-super lens is arranged at the other end of the lens barrel and comprises a substrate and a plurality of super-surface structure units arranged on the surface of the substrate, wherein the super-surface structure units are arranged in an array;
and the optical narrow-band filter is arranged between an imaged object and the Wheatstone-superlens or between the Wheatstone-superlens and the optical detector module.
Optionally, the optical detector module includes a base, a plurality of photosensitive units arranged on one side of the base in an array arrangement, and a circuit unit connected to the plurality of photosensitive units; the Wheatstone-super lens or the super surface structure units are coaxially arranged with the photosensitive units.
Optionally, the super-surface structure units are regular hexagons or regular quadrilaterals, and the central positions of the super-surface structure units are respectively provided with a nano structure; the unit periods of the super-surface structure units at different positions are the same; the nano structure is a nano column structure; the nano-pillar structure comprises one or more of a positive nano-pillar structure, a negative nano-pillar structure, a hollow nano-pillar structure, a negative hollow nano-pillar structure and a topological nano-pillar structure.
Optionally, the substrate is made of quartz glass, and the thickness of the substrate is 0.1-3 mm.
Optionally, the material of the nanostructure is a material transparent at a target waveband, and the wavelength range of the target waveband is 920-960 nanometers.
Optionally, the nanostructure material is one of silicon oxide, silicon nitride, aluminum oxide, gallium nitride, titanium oxide, and amorphous silicon.
Optionally, one surface of the huygens-super lens, which is far away from the optical narrowband filter, is plated with an antireflection film of a target waveband matched with the substrate material.
Optionally, the huygens-superlens is circular or square; when the shape is circular, the diameter is 0.5-10 mm; when square, the side length is 0.5-10 mm.
Optionally, after the on-axis and off-axis parallel light rays pass through the huygens-super lens, the light at different angles is focused to different positions, and the chief ray angle is less than 10 °.
Optionally, the optical narrowband filter has a center wavelength of 940nm ± 5nm and a half-width of 30 nm.
Implement the utility model discloses a near-infrared imaging system based on huygens-super lens has following beneficial effect: the utility model discloses an introduce huygens-super lens, effectually solved traditional optical lens bulky, heavy, the processing is complicated, difficult shortcoming such as integrated.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention as claimed.
Drawings
The invention will be further explained with reference to the drawings and examples, wherein:
fig. 1 is a schematic structural diagram of a huygens-superlens-based near-infrared imaging system provided by an embodiment of the present invention;
fig. 2 is a schematic view of huygens-superlens focusing provided by an embodiment of the present invention;
fig. 3A is a schematic structural diagram of a huygens-superlens provided by an embodiment of the present invention;
fig. 3B is a schematic diagram of a quadrilateral unit structure of a huygens-super lens according to an embodiment of the present invention;
fig. 3C is a schematic diagram of a regular hexagonal structural unit arrangement of huygens-superlens provided by an embodiment of the present invention;
fig. 4A is a schematic structural diagram of a right nanocylinder for a huygens-superlens according to an embodiment of the present invention;
fig. 4B is a schematic diagram of the relationship between the optical phase at 940nm and the cross-sectional diameter of the positive nanorod structure of a huygens-superlens according to an embodiment of the present invention;
fig. 4C is a schematic diagram of transmittance at 940nm of a positive nanorod structure of a huygens-superlens according to an embodiment of the invention.
Fig. 5A is a schematic diagram of a huygens-superlens surface nanostructure distribution with a focal length of 3mm according to an embodiment of the present invention;
fig. 5B is a schematic diagram of the relationship between the radius of the huygens-superlens surface and the optical phase with a focal length of 3mm according to an embodiment of the present invention.
Fig. 6A is a schematic diagram of modulation transfer functions of 0, 0.5 and 1 fields of view of a huygens-superlens with a focal length of 3mm provided by an embodiment of the present invention;
fig. 6B is a schematic diagram of meridional and sagittal foci of a huygens-superlens with a focal length of 3mm according to an embodiment of the present invention.
Fig. 7 is a diagram of simulation imaging effect provided by the embodiment of the present invention;
labeled as:
a lens barrel (1) is provided,
the optical detector module 2, the imaging plane 20, the base 21, the photosensitive unit 22,
a huygens-superlens 3, a substrate 31, a super-surface structure unit 32, a nanostructure 3,
an optical narrowband filter 4.
Detailed Description
The utility model provides a huygens-super lens-based near-infrared imaging system, which comprises a huygens-super lens, a mechanical lens barrel, an optical narrowband filter and an optical detector module; the optical detector module consists of a photosensitive unit array, a peripheral circuit and a related mechanical structure; the huygens-superlens is mounted in the mechanical lens barrel; the optical narrow-band filter is arranged in the mechanical lens barrel; the mechanical lens barrel is mounted on a mechanical structure of the optical detector module. The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings and exemplary embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
The embodiment provides a huygens-super lens-based near infrared imaging system, and the structure of the embodiment is shown in fig. 1. As shown in fig. 1, the huygens-superlens-based near-infrared imaging system includes: the device comprises a lens barrel 1, an optical detector module 2, a Huygens-super lens 3 and an optical narrow-band filter 4; the optical detector module 2 is arranged at one end of the lens barrel 1, and an imaging surface 20 of the optical detector module faces to the other end of the lens barrel 1; the huygens-super lens 3 is arranged at the other end of the lens barrel 1, and comprises a substrate 31 and a plurality of super surface structure units 32 arranged on the surface of the substrate 31, wherein the plurality of super surface structure units 32 are arranged in an array; the optical narrowband filter 4 is arranged between an imaged object and the huygens-superlens 3 or between the huygens-superlens 3 and the optical detector module 2.
Specifically, the lens barrel 1 is mounted on a mechanical structure of the optical detector module 2, that is, on the base 21, and the huygens-super lens 3 and the optical narrowband filter 4 are mounted in the lens barrel 1; when the optical imaging device is used, light reflected or scattered by an imaged object is focused by the Wheatstone-super lens 3, light in other wave bands is filtered by the optical narrowband filter 4 and then collected by the optical detector module 2 and imaged on a photosensitive surface of the optical detector module 2, and the photosensitive surface absorbs near infrared light of the imaged object and converts the near infrared light into a fingerprint image electric signal to be output.
The optical detector module 2 comprises a base 21, a plurality of photosensitive units 22 arranged on one surface of the base 21 in an array manner, and a circuit unit connected with the plurality of photosensitive units 22; the huygens-super lens 3 or the super surface structure units are coaxially arranged with the plurality of photosensitive units 22.
As shown in fig. 2, the huygens-super lens 3 focuses parallel light incident at different angles to different positions of an image plane, the nano-structure 33 of the huygens-super lens 3 faces the optical narrowband filter 4, and the other side of the huygens-super lens 4, i.e. the side without the nano-structure, faces an imaged object.
Referring to fig. 3A, the huygens-super lens 3 includes a substrate 31 and super surface structure units 32 disposed on one surface of the substrate 31, where the super surface structure units 32 are periodically arranged, unit periods of the periodically arranged array-type super surface structure units 32 at different positions are the same, optionally, the super surface structure units 32 are arranged in a regular hexagon or a regular quadrangle, and the center positions of the super surface structure units 32 are respectively provided with a nano structure 33. In the present embodiment, a regular quadrilateral array of super-surface structure units is taken as an example to describe, a central position of each super-surface structure unit is provided with a nano-structure, and an example of the array is shown in fig. 3B. In the present embodiment, an array of regular hexagonally arranged super-surface structure units is described as an example, a central position of each super-surface structure unit is provided with a nano-structure, and an example of the array is shown in fig. 3C. It will be appreciated that the arrangement of the super surface structure units 32 may be other choices to meet the needs.
Specifically, the substrate 31 is made of quartz glass, and the thickness of the substrate 31 is 0.1-3 mm.
The nanostructures 33 are nanopillar structures; the nano-pillar structure comprises one or more of a positive nano-pillar structure, a negative nano-pillar structure, a hollow nano-pillar structure, a negative hollow nano-pillar structure and a topological nano-pillar structure; the material of the nano-structure 33 is one of silicon oxide, silicon nitride, aluminum oxide, gallium nitride, titanium oxide and amorphous silicon. For example, the present embodiment is described by taking a positive nanorod as an example; the nano-structure 33 material is transparent in the wavelength band of 920-960 nm. In an example, the present embodiment is described by taking an amorphous silicon nanostructure as an example. It is understood that the material of the nano-structure 33 may be selected to be other materials that are sufficiently transparent in the operating band of the huygens-superlens 3. The cross-sectional shape of the nano-pillar structure can be one or a combination of circular, elliptical, quadrilateral, pentagonal, hexagonal and topological shapes. In an example, the present embodiment is illustrated by taking a positive nanorod with a circular cross section as an example, and referring to fig. 4A.
Further, the material of the nano-structure 33 is transparent at the target wavelength band, and the wavelength range of the target wavelength band is 920-960 nm.
As another preferred embodiment of the present invention, one surface of the huygens-super lens 3 away from the optical narrowband filter 4 is plated with an antireflection film of a target waveband matched with the material of the substrate 31.
As a preferred embodiment of the present invention, the huygens-superlens 3 may be circular or square; when the huygens-superlens 3 is circular, its diameter is 0.5-10 mm; when the huygens-superlens 3 is square, its side length is 0.5-10 mm. In particular, when the huygens-superlens 3 is circular, its diameter is greater than or equal to 0.5mm and less than or equal to 10 mm; when the huygens-superlens 3 is square, its side length is greater than or equal to 0.5mm and less than or equal to 10 mm. The mirror light phase of the huygens-superlens 3 satisfies a monochromatic huygens surface distribution in the target wavelength band range. On the one hand, the effect of this surface phase distribution of the huygens-superlens 3 is that the absolute value of the chief ray angle through the huygens-superlens 3 is small, for example, the chief ray angle is less than 10 ° for all fields of view. On the other hand, the effect of this huygens-superlens 3 surface phase distribution corrects monochromatic on-axis aberrations (spherical aberration) and monochromatic off-axis aberrations (coma, astigmatism, etc.).
Optionally, after the on-axis and off-axis parallel light rays pass through the huygens-superlens 3, the light of different angles is focused to different positions, and the chief ray angle is less than 10 °.
Optionally, the optical narrowband filter 4 has a center wavelength of 940nm ± 5nm and a half width of 30 nm.
Specifically, the substrate 31 of the huygens-super lens 3 is made of quartz glass, and optionally, the substrate 31 may also be made of other transparent materials with wavelength of 920-960nm, such as K7 glass, calcium fluoride, sapphire, K9 glass, and the like. The thickness of the substrate 31 is 0.1-3mm, and may be 0.1mm, 0.2mm, 0.3mm, 0.4mm, 0.5mm, 1mm, 2mm, 3mm, etc.
The geometric dimension of the nano-pillar structure, including the height of the nano-pillars, the diameter of the cross section and the distance between the nano-pillars, can be selected according to the requirements of different conditions. In the present embodiment, the height of the nano-pillar structure of the huygens-superlens 3 is greater than or equal to 300nm and less than or equal to 2000 nm; the minimum size (diameter, side length and/or minimum spacing between two adjacent nano-pillar structures and the like) of the nano-pillar structure is greater than or equal to 60 nm; the maximum aspect ratio of the nano-pillar structure, i.e. the ratio of the height of the nano-pillar structure to the minimum diameter of the nano-pillar structure in the superlens, is less than or equal to 20. The cross section diameters of the nano-pillar structures at different positions are partially the same or different from each other; the structure periods of the nano-pillar structures at different positions are the same; the optical phase of the nanostructure 33 is related to the nanopillar cross-sectional diameter; in the present embodiment, the heights of the nano-pillar structures at different positions are all 480nm, the distance between the centers of the adjacent nano-pillar structures is 420nm, and the cross-sectional diameter of the nano-pillar is greater than or equal to 60nm and less than or equal to 360 nm. The relationship between the nanopillar light phase and the cross-sectional diameter at 940nm near infrared light is shown in fig. 4B; the relationship between the transmittance of the nano-pillar structure and the cross-sectional diameter at 940nm is shown in fig. 4C. It will be appreciated that the geometry and dimensions of the nano-pillar structures may be other choices that meet the detection requirements and processing conditions.
In the huygens-super lens near infrared imaging system of the present embodiment, one side of the super surface structure unit 32 of the huygens-super lens 3 faces the photosensitive surface of the optical detector module 2, and the huygens-super lens 3 or the super surface structure units 32 arranged in an array are coaxially mounted with the photosensitive units 22 arranged in an array; the distance between the huygens-super lens 3 and the light-sensitive surface of the optical detector module 2 is 1-30mm, and optionally, the distance may be 1mm, 2mm, 3mm, 4mm, 5mm, 10mm, 20mm, 30mm, and the like; the focal length of the huygens-superlens 3 is 1-30mm, and optionally, the focal length may be 1mm, 2mm, 3mm, 4mm, 5mm, 10mm, 20mm, 30mm, and the like.
In the huygens-super lens-based near-infrared imaging system of the embodiment, the central wavelength of the optical narrowband filter 4 is 940nm ± 5nm, and the half width is 30 nm; this optical narrowband filter 4 can be placed between the imaged object and the huygens-superlens 3, this optical narrowband filter 4 can also be placed between the huygens-superlens 3 and the optical detector module 2.
In this embodiment, the huygens-super lens 3 is a circular lens with a diameter of 3.8 mm; the optical phase of the huygens-super lens 3 meets the phase distribution of the huygens surface focusing lens, the focal length of the huygens-super lens 3 is 3mm, the F number is 2.5, and the full field angle is 50 degrees. A schematic diagram of the micro-nano structure of the huygens-superlens 3 is shown in fig. 5A; the relationship between the optical phase and the surface radius of the huygens-super lens 3 can be seen in fig. 5B.
In the huygens-super lens-based near infrared imaging system, the Modulation Transfer Function (MTF) and astigmatism (meridional sagittal focal point) curves can comprehensively evaluate the imaging effect of the huygens-super lens-based near infrared imaging system. The modulation transfer function of the huygens-superlens 3 in this embodiment can be seen in fig. 6A, where the transfer functions of 0, 0.5 and 1 fields are all close to the diffraction limit transfer function and all are greater than 0.4 at the cut-off frequency 160l p/mm. Astigmatism curves see fig. 6B, where it can be seen that the astigmatism at all incident angles is less than 10 μm. The imaging simulation can more intuitively illustrate the imaging effect of the near-infrared imaging system in the embodiment, and the imaging image of the imaging system in the embodiment can be referred to in fig. 7.
The utility model provides a based on huygens-super lens near-infrared imaging system, through setting up huygens-super lens 3, the effectual epaxial aberration that has reduced and off-axis aberration, the effectual traditional optical lens of having solved is bulky, weight sinks, the processing is complicated, be difficult for shortcomings such as integrated.
The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.
Claims (10)
1. A huygens-superlens-based near-infrared imaging system, comprising:
a lens barrel;
the optical detector module is arranged at one end of the lens cone, and an imaging surface of the optical detector module faces to the other end of the lens cone;
the huygens-super lens is arranged at the other end of the lens barrel and comprises a substrate and a plurality of super-surface structure units arranged on the surface of the substrate, wherein the super-surface structure units are arranged in an array;
and the optical narrow-band filter is arranged between an imaged object and the Wheatstone-superlens or between the Wheatstone-superlens and the optical detector module.
2. The huygens-super lens-based near-infrared imaging system as claimed in claim 1, wherein the optical detector module comprises a base, a plurality of photosensitive units arranged on one side of the base in an array, and a circuit unit connected to the plurality of photosensitive units; the Wheatstone-super lens or the super surface structure units are coaxially arranged with the photosensitive units.
3. The huygens-superlens-based near-infrared imaging system as claimed in claim 1, wherein the super-surface structure units are regular hexagons or regular tetragons, and the central positions of the super-surface structure units are respectively provided with nano-structures; the unit periods of the super-surface structure units at different positions are the same; the nano structure is a nano column structure; the nano-pillar structure comprises one or more of a positive nano-pillar structure, a negative nano-pillar structure, a hollow nano-pillar structure, a negative hollow nano-pillar structure and a topological nano-pillar structure.
4. The huygens-superlens-based near infrared imaging system of claim 1, wherein the substrate is made of quartz glass and has a thickness of 0.1-3 mm.
5. The huygens-superlens-based near-infrared imaging system of claim 3, wherein the nano-structured material is transparent at a target wavelength band, and the wavelength range of the target wavelength band is 920-960 nm.
6. The huygens-superlens-based near-infrared imaging system of claim 5, wherein the nanostructure material is one of silicon oxide, silicon nitride, aluminum oxide, gallium nitride, titanium oxide, and amorphous silicon.
7. The huygens-superlens-based near-infrared imaging system of claim 1, wherein a side of the huygens-superlens away from the optical narrowband filter is coated with an anti-reflection film of a target waveband matching the substrate material.
8. The huygens-superlens-based near infrared imaging system of claim 1, wherein the huygens-superlens is circular or square; when the shape is circular, the diameter is 0.5-10 mm; when square, the side length is 0.5-10 mm.
9. The huygens-superlens-based near infrared imaging system of claim 1, wherein after on-axis and off-axis parallel rays pass through the huygens-superlens, different angles of light are focused to different positions, and a chief ray angle is less than 10 °.
10. The huygens-superlens-based near-infrared imaging system of claim 1, wherein the optical narrowband filter has a center wavelength of 940nm ± 5nm and a half-width of 30 nm.
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| WO2023125542A1 (en) * | 2021-12-28 | 2023-07-06 | 深圳迈塔兰斯科技有限公司 | Metalens array, and wavefront detection system |
| CN116597477A (en) * | 2023-04-27 | 2023-08-15 | 信扬科技(佛山)有限公司 | Imaging device and fingerprint identification device |
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| US11988844B2 (en) | 2017-08-31 | 2024-05-21 | Metalenz, Inc. | Transmissive metasurface lens integration |
| US12140778B2 (en) | 2019-07-02 | 2024-11-12 | Metalenz, Inc. | Metasurfaces for laser speckle reduction |
| US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
| WO2023125542A1 (en) * | 2021-12-28 | 2023-07-06 | 深圳迈塔兰斯科技有限公司 | Metalens array, and wavefront detection system |
| CN114623960A (en) * | 2022-03-08 | 2022-06-14 | 深圳迈塔兰斯科技有限公司 | Pressure sensor, pressure analyzer and preparation method thereof |
| US11927769B2 (en) | 2022-03-31 | 2024-03-12 | Metalenz, Inc. | Polarization sorting metasurface microlens array device |
| CN116597477A (en) * | 2023-04-27 | 2023-08-15 | 信扬科技(佛山)有限公司 | Imaging device and fingerprint identification device |
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