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CN214959329U - Inertial impact type piezoelectric driver capable of carrying large load - Google Patents

Inertial impact type piezoelectric driver capable of carrying large load Download PDF

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Publication number
CN214959329U
CN214959329U CN202120714382.XU CN202120714382U CN214959329U CN 214959329 U CN214959329 U CN 214959329U CN 202120714382 U CN202120714382 U CN 202120714382U CN 214959329 U CN214959329 U CN 214959329U
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mass block
load
leaf
load platform
shaped flexible
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CN202120714382.XU
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Chinese (zh)
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曹营华
衣春学
游琳敬
邬雅轩
汤纪洲
黄虎
徐智
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Abstract

The utility model relates to a can take inertial impact formula piezoelectric actuator of heavy load belongs to the precision machinery field. The driver consists of a load platform (inertial mass block), a piezoelectric stack, a leaf-shaped flexible hinge, a main mass block, a pre-tightening mechanism, a rolling bearing and a base. The linear deformation generated by the electricity obtained by the piezoelectric stack is converted into the angular displacement of the load platform (inertial mass block) through three leaf-shaped flexible hinges which are uniformly distributed circumferentially and take a rotation center as an axis, and the angular displacement of the load platform (inertial mass block) is realized based on the inertial impact principle. The utility model has the advantages that: through special structural design, convert load mass into extra inertial mass, be favorable to increasing the step angle of main quality piece, can drive great vertical load under the low-voltage condition. The utility model discloses can be used to fields such as little/nanometer mechanical test, optical instrument, precision finishing, integrated circuit encapsulation.

Description

Inertial impact type piezoelectric driver capable of carrying large load
Technical Field
The utility model relates to a precision machinery field, in particular to can take inertial impact formula piezoelectric actuator of heavy load. The utility model provides an inertia impacted style piezoelectric actuator size and the contradiction of load, can realize the heavy load motion of low-voltage simultaneously. The utility model discloses can be used to fields such as little/nanometer mechanical test, optical instrument, precision finishing, integrated circuit encapsulation, bioengineering and aerospace technique.
Background
Since the 21 st century, aerospace, material science, bioengineering, precision mechanical instruments and the like have gradually become key scientific and technological fields of attack, and with the continuous development of the technologies, the mechanical field also meets the challenges of extreme directions such as extremely complexity, oversize, ultraprecision and the like. Many new drivers and driving technologies are developed in industry based on physical effects of memory alloy, magnetostriction, piezoelectricity, etc. Among many new drivers, the piezoelectric driver is considered to be the most promising one due to its advantages of no magnetic field interference, compact structure, high positioning accuracy, and the like.
In previous researches, researchers have proposed stepping piezoelectric drivers based on different working principles, mainly including inchworm type, ultrasonic type, stick-slip type and inertial impulse type. Inchworm-type actuators can output large forces, but are relatively complex in structure and difficult to manufacture and assemble. The ultrasonic type driver can easily realize high speed, but the positioning resolution and accuracy are relatively low. The stick-slip type actuator is relatively simple in structure, but the output displacement thereof generally has a backset motion. Compared with other types of drivers, the inertial impact type driver has the advantages of simple structure, convenient control, no output backspacing and wide attention, but the bearing capacity is generally lower; in order to realize a large load-bearing capacity, the structural size of the driver needs to be greatly increased, so that the compatibility of the structural size and the load-bearing capacity is often difficult to realize.
In order to improve the load capacity of the inertia impact type piezoelectric actuator and obtain stable output performance in the aspects of forward and reverse consistency, moving speed, positioning resolution and the like, a rotary piezoelectric actuator capable of bearing large load is developed. In the prior design, a load is usually added on a main mass block, and the main mass block and the load are driven to perform stepping motion through an inertia mass block; in this case, the load capacity of the driver is not sufficiently utilized. In order to solve the problem, the utility model provides a method, through designing special structure, on applying the inertial mass piece with the load, the load that makes and take follows the motion of inertial mass piece can improve bearing capacity by a wide margin under the prerequisite of guaranteeing the whole size miniaturization of driver.
Disclosure of Invention
An object of the utility model is to provide a can take inertial impact formula piezoelectric actuator of heavy load, solve the above-mentioned problem that prior art exists. The utility model discloses a special structural design turns into load mass extra inertial mass, is favorable to increasing the step angle of main quality piece, can drive great vertical load under the low-voltage condition to, the driver has less size, has further widened its range of application. The control is convenient and simple, and the continuous rotary motion in a large range can be realized by applying periodic sawtooth driving voltage. The utility model discloses an inertia driver that development was compromise small-size and heavy load provides a new solution, has wide application prospect in fields such as little/nanometer mechanical test, optical instrument, precision finishing, integrated circuit encapsulation, bioengineering and aerospace technique.
The utility model discloses a realize that the technical scheme that above-mentioned purpose adopted as follows:
an inertial impact piezoelectric actuator with a large load, which is characterized in that: through the design of a special mechanism, the inertia mass block is designed into a load platform (inertia mass block) so as to greatly improve the load capacity of the driver. The driver comprises a load platform (inertia mass block), a piezoelectric stack, a leaf-shaped flexible hinge, a main mass block, a pre-tightening mechanism, a rolling bearing and a base; the load platform (inertia mass block) and the main mass block are arranged in parallel with the three blade-shaped flexible hinges through screws to form an actuating mechanism; two sides of the pre-tightening mechanism are respectively provided with a through hole which is fixedly connected with the base through a screw; the outer ring of the rolling bearing is connected with the base in a transition fit manner and is fixed by a screw, and the inner ring of the rolling bearing is connected with a cylindrical boss designed at the lower end of the main mass block in an interference fit manner; the piezoelectric stack is embedded into the amplifying mechanism and fixed through the pretightening force of the mechanism, and is periodically slowly extended and rapidly contracted under the control of a sawtooth-shaped electric signal, so that the continuous rotary motion of the load platform (inertia mass block) is realized according to the inertia impact principle.
The three blade-shaped flexible hinges for connecting the load platform (inertial mass block) and the main mass block are completely the same and are uniformly distributed and connected with the load platform (inertial mass block) and the main mass block, and the blade-shaped flexible hinges form an angle with the main mass block and the load platform (inertial mass block); when the piezoelectric stack is electrically extended, the leaf-shaped flexible hinge is extended, the load platform (inertial mass block) and the main mass block generate rotary displacement, and continuous rotary displacement is generated based on the principle of inertial impact.
The beneficial effects of the utility model reside in that: the inertial impact type piezoelectric driver with the large load can effectively improve the capability of the driver with the vertical load, realize the driving of the large load under the condition of low voltage, and remarkably improve the output power of the inertial impact type piezoelectric driver. Meanwhile, the inertia impact type piezoelectric actuator has the advantages of small volume, simple structure, easiness in control, high resolution and the like, and the lowest 3V starting voltage is realized.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate example embodiments of the invention and together with the description serve to explain the invention without limitation.
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a front view and a left side view of the flexible hinge of the present invention.
Fig. 3 is a schematic view of the working process of the present invention.
Fig. 4 is a graph showing the relationship between the actual output angular velocity and the load measured at a driving voltage U of 20V and a driving frequency f of 10 Hz.
Fig. 5 is a graph showing the relationship between the actual output angular velocity and the load measured at a driving voltage U of 100V and a driving frequency f of 10 Hz.
In the figure: 1. a load platform (inertial mass); 2. a piezoelectric stack; 3. a leaf-type flexible hinge; 3.1, fixing end I; 3.2, flexible beams; 3.3, fixing end II; 4. a main mass block; 5. a rolling bearing; 6. a pre-tightening mechanism; 7. a base.
Detailed Description
The details of the present invention and its embodiments will be further explained with reference to the accompanying drawings.
Referring to fig. 1 to 5, the present invention provides an inertial impact piezoelectric actuator with a large load, which designs a novel actuator, improves the capability of the inertial impact piezoelectric actuator with a vertical load, and is significant for the application of the large load of the actuator.
The inertial impact type piezoelectric driver capable of carrying a large load is characterized in that: the driver comprises a load platform (inertial mass block) (1), a piezoelectric stack (2), a leaf-shaped flexible hinge (3), a main mass block (4), a pre-tightening mechanism (5), a rolling bearing (6) and a base (7). On traditional inertia impulse type driver is fixed the load platform to the main mass piece usually, the utility model discloses a special design of mechanism of amplification has realized linking firmly load platform and inertia mass piece, the effectual load carrying capacity who improves the driver, it is small to have kept inertia impulse type piezoelectric driver simultaneously, simple structure, the control is easy and the high advantage of resolution ratio to realized minimum 3V's starting voltage, widened its range of application in fields such as little/nanometer mechanical test, optical instrument, precision finishing, integrated circuit encapsulation, bioengineering and aerospace technique.
Referring to fig. 1 and 2, an inertial impact piezoelectric actuator with a large load according to the present invention includes a load platform (inertial mass block) (1), a piezoelectric stack (2), a leaf-shaped flexible hinge (3), a main mass block (4), a pre-tightening mechanism (5), a rolling bearing (6), and a base (7); the load platform (inertia mass block) (1), the main mass block (4) and the three leaf-shaped flexible hinges (3) are arranged in parallel through screws to form an amplifying mechanism; two sides of the pre-tightening mechanism (5) are respectively provided with a through hole which is fixedly connected with the base (7) through screws; the outer ring of the rolling bearing (6) is connected with the base (7) in a transition fit manner and is fixed by a screw, and the inner ring is connected with a cylindrical boss designed at the lower end of the main mass block (4) in an interference fit manner; the piezoelectric stack (2) is embedded into the actuating mechanism and fixed through pretightening force of the mechanism, and is periodically slowly extended and rapidly contracted under the control of a sawtooth-shaped electric signal, so that the continuous rotary motion of the load platform (inertia mass block) (1) is realized according to an inertia impact principle.
The three blade-shaped flexible hinges (3) for connecting the load platform (inertial mass block) (1) and the main mass block (4) are completely the same and are uniformly distributed and connected with the load platform (inertial mass block) (1) and the main mass block (4), and the blade-shaped flexible hinges (3) form an angle with the main mass block (4) and the load platform (inertial mass block) (1); when the piezoelectric stack (2) is electrically stretched, the leaf-shaped flexible hinge (3) is stretched, the load platform (inertial mass block) (1) and the main mass block (4) generate rotary displacement, and continuous rotary displacement is generated based on the principle of inertial impact.
Referring to fig. 3, the working process of the inertial impact piezoelectric actuator with large load according to the present invention includes the following steps:
①t0the load platform (inertia mass block) (1), the main mass block (4) and the leaf-shaped flexible hinge (3) are connected through screws to form an amplification mechanism, the piezoelectric stack (2) is embedded into the amplification mechanism in a tight fit mode, and before work, the friction force is adjusted by adjusting the contact force between a pre-tightening screw on the pre-tightening mechanism (5) and the main mass block (4);
secondly, the amplitude of a voltage signal input to the piezoelectric stack (2) is slowly increased, the piezoelectric stack (2) is gradually extended based on the inverse piezoelectric effect, and the leaf-shaped flexible hinge (3) is stretched to generate bending deformation so that the inertial mass block (1) rotates clockwise;
at t1-t2At the stage, the voltage amplitude is sharply reduced to 0V, the piezoelectric stack (2) rapidly contracts, the leaf-shaped flexible hinge (3) restores to the initial state, and the inertial mass block (1) generates an inertial impact force in the clockwise direction, so that the main mass block (4) rotates in the clockwise direction to generate displacement S;
and fourthly, stable stepping motion can be realized by repeating the steps, the amplitude and the frequency of the electric signal input by the piezoelectric stack (2) are adjusted, and the motion direction, the speed and the like of the driver can be adjusted.
Referring to fig. 4-5, an inertial impact piezoelectric actuator with a large load according to the present invention is a curve of the relationship between the actual output angular velocity and the load measured at a driving voltage U of 20V, a driving frequency f of 10Hz, and a driving voltage U of 100V, a driving frequency f of 10 Hz. It can be seen that when the driving voltage U is 20V and the driving frequency f is 10Hz, the moving speed of the driver tends to increase first and then decrease. Analysis has shown that the downward trend may be due to increased friction from vertical loading that limits the motion of the actuator; 67N is measured when the driving voltage U is 100V and the driving frequency f is 10Hz of the applied vertical load, and the load is not increased considering that the driver can be damaged by continuously increasing the load, the workbench is damaged by the mass block being overturned, and the like. When the driving voltage U is 100V, the maximum load that can be driven by the driving frequency f being 10Hz exceeds 67N.
The above description is only a preferred example of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made to the present invention should be included in the protection scope of the present invention.

Claims (3)

1. An inertial impact piezoelectric actuator with a large load, which is characterized in that: the driver comprises a load platform (1), a piezoelectric stack (2), a leaf-shaped flexible hinge (3), a main mass block (4), a pre-tightening mechanism (5), a rolling bearing (6) and a base (7); the load platform (1), the main mass block (4) and the three leaf-shaped flexible hinges (3) are arranged in parallel through screws to form an amplifying mechanism; two sides of the pre-tightening mechanism (5) are respectively provided with a through hole which is fixedly connected with the base (7) through screws; the outer ring of the rolling bearing (6) is connected with the base (7) in a transition fit manner and is fixed by a screw, and the inner ring is connected with a cylindrical boss designed at the lower end of the main mass block (4) in an interference fit manner; the piezoelectric stack (2) is embedded into the amplifying mechanism and fixed through pretightening force of the mechanism, and is periodically slowly extended and rapidly contracted under the control of a sawtooth-shaped electric signal, so that the continuous rotary motion of the load platform (1) is realized according to an inertial impact principle.
2. An inertial impact piezoelectric actuator with large load according to claim 1, wherein: the three leaf-shaped flexible hinges (3) are completely the same and are uniformly distributed and connected with the load platform (1) and the main mass block (4), and the leaf-shaped flexible hinges (3), the main mass block (4) and the load platform (1) form an angle; when the piezoelectric stack (2) is electrically stretched, the angle of the leaf-shaped flexible hinge (3) changes, and the load platform (1) and the main mass block (4) rotate and displace.
3. An inertial impact piezoelectric actuator with large load according to claim 1, wherein: the leaf-shaped flexible hinge (3) is composed of a fixed end I (3.1), a flexible beam (3.2) and a fixed end II (3.3), the fixed beam I (3.1) is connected with the load platform (1) through a screw, and the fixed end II (3.3) is connected with the main mass block (4) through a screw.
CN202120714382.XU 2021-04-08 2021-04-08 Inertial impact type piezoelectric driver capable of carrying large load Expired - Fee Related CN214959329U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112910310A (en) * 2021-04-08 2021-06-04 曹营华 Inertial impact type piezoelectric driver capable of carrying large load and driving method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112910310A (en) * 2021-04-08 2021-06-04 曹营华 Inertial impact type piezoelectric driver capable of carrying large load and driving method thereof

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