CN214588790U - Automatic modified Micro-LED huge transfer device - Google Patents
Automatic modified Micro-LED huge transfer device Download PDFInfo
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- CN214588790U CN214588790U CN202022988667.0U CN202022988667U CN214588790U CN 214588790 U CN214588790 U CN 214588790U CN 202022988667 U CN202022988667 U CN 202022988667U CN 214588790 U CN214588790 U CN 214588790U
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Abstract
The utility model discloses an in the semiconductor manufacturing field, in particular to automatic huge transfer device of Micro-LED who revises. The automatic correction Micro-LED bulk transfer device comprises an elastic film, wherein a Micro device is arranged on the elastic film; the interval expansion device is positioned on one side of the elastic film and comprises an expansion platform for placing the elastic film; a transfer device facing the spacing expansion device; and the interval correction device is embedded in the expansion platform and comprises a rectangular correction platform, and the correction platform can lift relative to the expansion platform. The utility model discloses can revise microdevice interval error, realize the adjustment of microdevice interval.
Description
Technical Field
The utility model relates to a semiconductor manufacturing technical field, in particular to automatic huge transfer device of Micro-LED of revising.
Background
Micro-size light emitting diode (Micro LED) technology, as a final display technology, has many advantages such as high brightness, high response speed, high contrast, high color gamut, high reliability, low power consumption, etc., and will have a profound effect on the conventional display products such as LCD/OLED already on the market, and has attracted a wide attention in academia and industry in recent years. In the manufacturing process of Micro LED display devices, hundreds of thousands of millions of Micro light emitting chips need to be transferred from a wafer to a circuit board, and a huge transfer scheme with high efficiency and high precision is required. This is also a problem in the industry.
There are many schemes currently used in the industry to perform bulk transfer operations, such as electrostatic force, magnetic force, fluid assembly, elastic membrane, etc. However, these methods are complicated in process, require precise alignment, cannot adjust the pitch between micro devices, require separate design transfer schemes for different products, and have greatly increased cost and development period, which the inventors have proposed further improvements.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a can revise little device interval error, realize the automatic Micro-LED huge amount transfer device of revising of little device interval adjustment.
In order to realize the purpose of the utility model, the utility model relates to an automatic following technical scheme that Micro-LED huge transfer device of revising adopted:
an auto-correcting Micro-LED bulk transfer device, comprising:
an elastic film on which a micro device is disposed;
the interval expansion device is positioned on one side of the elastic film and comprises an expansion platform for placing the elastic film;
a transfer device facing the spacing expansion device; and
the interval correcting device is embedded in the expansion platform and comprises a rectangular correcting table, and the correcting table can lift relative to the expansion platform. In the process of transferring a large amount of micro devices, the micro devices are adhered to the elastic film through the adhesive layer, the elastic film is stretched by controlling the rising height of the expansion platform, the distance between the micro devices adhered to the elastic film is enlarged, the elastic film is secondarily expanded through the rectangular correction platform, the distance error is corrected, and the distance adjustment of the micro devices is achieved.
The utility model relates to an automatic Micro-LED huge transfer device's of revising further improvement lies in, and the Micro device is just adorning, flip-chip and vertical construction's LED chip.
The utility model relates to an automatic Micro-LED huge transfer device's of correction further improvement lies in that elastic film can bear the mechanical stretching expansion, does not kick-back after the expansion, fixes Micro device on the membrane through the viscous layer.
The utility model relates to an automatic Micro-LED huge transfer device's of correction further improvement lies in, is provided with heating device and fixed elastic film's fixing device on the expansion platform.
The utility model relates to an automatic Micro-LED huge transfer device's of correction further improvement lies in, fixing device includes a snap ring, is provided with the draw-in groove that matches with the snap ring on the expansion platform.
The utility model relates to an automatic Micro-LED huge transfer device's of revising further improvement lies in that, the expansion platform is circular platform, and its one side is provided with the cylinder of control expansion platform height.
The utility model relates to an automatic Micro-LED huge transfer device's of correction further improvement lies in, transfer device include the warm table and match compression fittings with elastic film.
The utility model relates to an automatic Micro-LED huge transfer device's of correction further improvement lies in, compression fittings includes the cylinder and has the platform of pushing down of buffer layer.
The utility model relates to an automatic Micro-LED huge transfer device's of correction further improves and lies in that the rectangle is revised the platform and is passed through the extensible member and connect in the expansion platform, and the extensible member is one kind or several kinds in electric push rod, pneumatic cylinder, the cylinder.
Compared with the prior art, the beneficial effects of the utility model reside in that:
in the process of transferring a large amount of micro devices, the micro devices are adhered to the elastic film through the adhesive layer, the elastic film is stretched by controlling the rising height of the expansion platform, the distance between the micro devices adhered to the elastic film is enlarged, the elastic film is secondarily expanded through the rectangular correction platform, the distance error is corrected, and the distance adjustment of the micro devices is achieved.
Drawings
Fig. 1 is a schematic view of the present invention.
Wherein, 1 expansion platform, 2 correction platforms, 3 extensible parts, 4 snap rings and 5 pressing devices.
Detailed Description
The present invention will be further explained with reference to the following embodiments, which are to be understood as illustrative only and not as limiting the scope of the invention, and modifications of the various equivalent forms of the present invention by those skilled in the art after reading the present invention fall within the scope of the appended claims.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "vertical" and "outer peripheral surface" are used to indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship that the product of the present invention is usually placed when in use, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element to be referred must have a specific position, be constructed in a specific orientation, and be operated, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the term "vertical" or the like does not imply that the components are required to be absolutely horizontal or overhanging, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1, an auto-corrected Micro-LED bulk transfer apparatus includes:
an elastic film on which a micro device is disposed;
the interval expansion device is positioned on one side of the elastic film and comprises an expansion platform 1 for placing the elastic film;
a transfer device facing the spacing expansion device; and
the interval correcting device is embedded in the expansion platform 1 and comprises a rectangular correcting table 2, and the correcting table 2 can lift relative to the expansion platform 1. In the process of transferring a large amount of micro devices, the micro devices are adhered to the elastic film through the adhesive layer, the elastic film is stretched by controlling the rising height of the expansion platform 1, the distance between the micro devices adhered to the elastic film is enlarged, the elastic film is expanded for two times through the rectangular correction platform 2, the distance error is corrected, and the distance adjustment of the micro devices is achieved.
Specifically, the micro device is an LED chip with a forward mounting structure, a reverse mounting structure and a vertical structure.
Specifically, the elastic film can withstand mechanical stretching expansion without springback after expansion, and the micro device is fixed on the film by the adhesive layer.
Specifically, the expansion platform 1 is provided with a heating device (the heating device is embedded in the expansion platform 1) and a fixing device for fixing the elastic film.
Specifically, the fixing device comprises a clamping ring 4, and a clamping groove matched with the clamping ring 4 is formed in the expansion platform 1.
Specifically, the expansion platform 1 is a circular platform, and one side of the circular platform is provided with a cylinder for controlling the height of the expansion platform 1.
In particular, the transfer device comprises a heating table and a pressing device 5 matched with the elastic film.
Specifically, the pressing device 5 includes a cylinder and a pressing table with a cushion layer.
Specifically, the rectangular correction platform 2 is connected to the expansion platform 1 through a telescopic piece 3, and the telescopic piece is one or more of an electric push rod, a hydraulic cylinder and a cylinder.
The above is only a preferred embodiment of the present invention, and the present invention is not limited to the above embodiments, and although the present invention has been disclosed with the above preferred embodiments, but the present invention is not limited to the above embodiments, and any skilled person familiar with the art can make some changes or modifications to equivalent embodiments without departing from the technical scope of the present invention, but all the technical matters of the present invention are within the scope of the technical solution of the present invention.
It should be noted that the structure, ratio, size and the like shown in the drawings attached to the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by those skilled in the art, and are not used for limiting the limit conditions that the present invention can be implemented, so that the present invention has no technical essential meaning, and any structure modification, ratio relationship change or size adjustment should still fall within the range that the technical content disclosed in the present invention can cover without affecting the efficacy and the achievable purpose of the present invention.
Claims (9)
1. An auto-correcting Micro-LED bulk transfer device, comprising:
an elastic film on which a micro device is disposed;
the interval expansion device is positioned on one side of the elastic film and comprises an expansion platform for placing the elastic film;
a transfer device facing the spacing expansion device; and
the interval correction device is embedded in the expansion platform and comprises a rectangular correction platform, and the correction platform can lift relative to the expansion platform.
2. An auto-correcting Micro-LED bulk transfer device according to claim 1, wherein: the micro device is an LED chip with a forward mounting structure, an inverted mounting structure and a vertical structure.
3. An auto-correcting Micro-LED bulk transfer device according to claim 1, wherein: the elastic film can bear mechanical stretching expansion, does not rebound after expansion, and fixes the micro device on the film through the adhesive layer.
4. An auto-correcting Micro-LED bulk transfer device according to claim 1, wherein: and the expansion platform is provided with a heating device and a fixing device for fixing the elastic film.
5. An auto-correcting Micro-LED bulk transfer device according to claim 4, wherein: the fixing device comprises a clamping ring, and a clamping groove matched with the clamping ring is formed in the expansion platform.
6. An auto-correcting Micro-LED bulk transfer device according to claim 1, wherein: the expansion platform is a circular platform, and one side of the expansion platform is provided with a cylinder for controlling the height of the expansion platform.
7. An auto-correcting Micro-LED bulk transfer device according to claim 1, wherein: the transfer device comprises a heating table and a pressing device matched with the elastic film.
8. An auto-correcting Micro-LED bulk transfer device according to claim 7, wherein: the pressing device comprises an air cylinder and a pressing table with a buffer layer.
9. An automated modified Micro-LED bulk transfer apparatus according to any of claims 1-8, wherein: the rectangular correction platform is connected to the expansion platform through a telescopic piece, and the telescopic piece is one or more of an electric push rod, a hydraulic cylinder and a cylinder.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202022988667.0U CN214588790U (en) | 2020-12-11 | 2020-12-11 | Automatic modified Micro-LED huge transfer device |
Applications Claiming Priority (1)
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CN202022988667.0U CN214588790U (en) | 2020-12-11 | 2020-12-11 | Automatic modified Micro-LED huge transfer device |
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CN214588790U true CN214588790U (en) | 2021-11-02 |
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CN202022988667.0U Active CN214588790U (en) | 2020-12-11 | 2020-12-11 | Automatic modified Micro-LED huge transfer device |
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