CN214486355U - Fluorine-containing tail gas treatment device - Google Patents
Fluorine-containing tail gas treatment device Download PDFInfo
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- CN214486355U CN214486355U CN202120153678.9U CN202120153678U CN214486355U CN 214486355 U CN214486355 U CN 214486355U CN 202120153678 U CN202120153678 U CN 202120153678U CN 214486355 U CN214486355 U CN 214486355U
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Abstract
The utility model provides a fluorine-containing tail gas's processing apparatus, including the evacuation reactor, establish the carbon bottle in the evacuation reactor bottom with install electric heater between the carbon bottle, the one-level washing tower is connected at the evacuation reactor top, the caustic wash tower is connected on one-level washing tower top, the second grade washing tower is connected on the caustic wash tower top, exhaust apparatus is connected on the second grade washing tower top. The utility model discloses the device make full use of the hydrophilicity nature of fluorine-containing tail gas such as HF, set up one-level washing tower and second grade washing tower, the water sprays fluorine-containing tail gas such as HF, the acid nature of fluorine-containing tail gas such as HF has been utilized simultaneously, the caustic wash tower has been set up, spray fluorine-containing tail gas such as HF with KOH or NaOH alkali lye, fluorine-containing tail gas such as HF can discharge to reach standard after the processing purification of one-level washing tower, caustic wash tower and second grade washing tower in proper order, can not produce the pollution to the environment.
Description
Technical Field
The utility model belongs to the fluorine chemical industry field, concretely relates to fluorine-containing tail gas's processing apparatus.
Background
Fluorine gas (F)2) Are very reactive gases that react with many substances and generate 2H if treated directly with water2O+2F2＝4HF+O2A severe reaction of (D), a potential safety hazard, fluorine gas (F)2) Can also be subjected to combustion reaction with tail gas treatment plastic equipment and pipelines. Thus, it is necessary to treat fluorine gas (F)2) Firstly, carrying out harmless conversion treatment. Similarly, in the regeneration process of the sodium fluoride adsorbent of the industrial purifier, a small amount of fluorine gas and HF cannot be directly discharged along with the removal of replacement purge nitrogen, so that the fluorine-containing tail gas such as fluorine gas and HF and the like which needs to be treated and removed can be discharged after reaching the standard.
SUMMERY OF THE UTILITY MODEL
The main object of the utility model is to provide a fluorine-containing tail gas processing apparatus for the deficiency of the prior art, utilize the evacuation reactor to turn into CF with fluorine gas4From CF4The gas from the first water washing tower enters a KOH or (NaOH) alkaline washing tower, alkaline solution KOH or (NaOH) is sprayed by utilizing the acidic property of the HF, so that residual HF and KOH or (NaOH) generate HF + OH- ═ F--+H2And (4) performing an O reaction to remove residual HF, introducing gas from the alkaline tower into a secondary water washing tower, and purifying the residual HF by spraying water for the second time to reach the standard and discharge.
In order to achieve the above purpose, the utility model provides a following technical scheme:
a fluorine-containing tail gas treatment device comprises an emptying reactor, wherein a carbon bottle is arranged in the emptying reactor, an electric heater is arranged between the bottom of the emptying reactor and the carbon bottle, the top of the emptying reactor is connected with a primary water washing tower, a primary water washing tower water tank is arranged at the bottom of the primary water washing tower, one side of the primary water washing tower water tank, which deviates from the emptying reactor, is connected with a first corrosion-resistant water circulating pump, the side, which is the same as the first corrosion-resistant water circulating pump, of the primary water washing tower is connected with a first fluoroplastic barrel, the outlet of the first corrosion-resistant water circulating pump is connected with a second valve, the top of the primary water washing tower is connected with an alkaline washing tower, the bottom of the alkaline washing tower is provided with an alkaline liquid tank, one side, which deviates from the primary water washing tower, is connected with an alkaline-resistant circulating pump, the side, which is the same as the alkaline-resistant circulating pump, of the alkaline washing tower is connected with a waste alkaline liquid barrel, alkali-resistant circulating pump exit linkage fifth valve, the second grade washing tower is connected on alkaline wash tower top, be equipped with the second grade washing tower water tank at the bottom of the second grade washing tower, deviating from of second grade washing tower water tank the corrosion-resistant water circulating pump of second is connected to one side of alkaline wash tower the second fluorine plastic bucket is connected to the side the same with the corrosion-resistant water circulating pump of second department of second grade washing tower, the eighth valve of corrosion-resistant water circulating pump exit linkage, exhaust apparatus is connected on the second grade washing tower top.
As a fluorine-containing tail gas's processing apparatus's preferred scheme, be close to the tower bottom department level of one-level scrubbing tower is equipped with first double-deck filter plate, is being close to the tower top department level of one-level scrubbing tower is equipped with the double-deck filter plate of second, first double-deck filter plate the double-deck filter plate of second and the inside of one-level scrubbing tower constitutes first water spray room.
As the utility model discloses a fluorine-containing tail gas's processing apparatus's preferred scheme first water spray booth is equipped with two the same and upper and lower parallel arrangement sets up the first spray pipe, first spray pipe respectively with the second valve is connected, first spray pipe structure is triangle ring.
As a fluorine-containing tail gas's processing apparatus's preferred scheme, be close to the tower bottom department level of caustic wash tower is equipped with the double-deck filter plate of third, is being close to the tower top department level of caustic wash tower is equipped with the double-deck filter plate of fourth, the double-deck filter plate of third the double-deck filter plate of fourth and the inside constitution alkali lye shower room of caustic wash tower.
As an optimal scheme of fluorine-containing tail gas's processing apparatus alkali lye spray booth be equipped with two the same and about parallel arrangement set up spout alkali pipe, spout alkali pipe respectively with the fifth valve is connected, spout alkali pipe structure for the triangle ring.
As a fluorine-containing tail gas's processing apparatus's preferred scheme, be close to the tower bottom department level of second grade washing tower is equipped with the fifth double-deck filter plate, is being close to the tower top department level of second grade washing tower is equipped with the sixth double-deck filter plate, the fifth double-deck filter plate the sixth double-deck filter plate and the inside of second grade washing tower constitutes the second water spray room.
As an optimized scheme of the fluorine-containing tail gas treatment device, the second water spray chamber is provided with two same second water spray pipes which are arranged in parallel from top to bottom, the second water spray pipes are respectively connected with the eighth valve, and the second water spray pipes are constructed into triangular rings.
As a fluorine-containing tail gas's processing apparatus's preferred scheme, the one-level wash tower is close to first pressure relief pole is installed to exhaust reactor one side, the caustic wash tower is close to the second pressure relief pole is installed to first corrosion-resistant water circulating pump one side, the second grade wash tower is close to the third pressure relief pole is installed to alkali-resistant circulating pump one side.
The utility model discloses at least, can have following beneficial effect:
1) HF and other fluorine-containing tail gas sequentially pass through the primary water scrubber, the alkaline scrubber and the secondary water scrubber for leaching, and then enter the exhaust device to be discharged into the air without polluting the environment.
2) And (2) carrying out first water spraying and leaching on fluorine-containing tail gas such as HF and the like in the primary water washing tower, detecting the concentration of HF in the first leaching solution after the first water spraying and leaching, introducing the first leaching solution which does not meet the standard into the first fluoroplastic barrel to be used as a hydrofluoric acid product with water, spraying alkali liquor KOH or NaOH in the alkaline washing tower for leaching the fluorine-containing tail gas such as HF and the like treated by the primary water washing tower, detecting the concentration of KOH or NaOH in the second leaching solution after the alkaline liquor KOH or NaOH is leached, introducing the second leaching solution which does not meet the standard into the waste alkaline liquor barrel for storage, carrying out second water spraying and leaching on the fluorine-containing tail gas such as HF and the like treated by the alkaline washing tower in the secondary water washing tower, detecting the concentration of HF in the third leaching solution after the second water spraying and leaching, and introducing the third leaching solution which does not meet the standard into the second fluoroplastic barrel to be used as the hydrofluoric acid product with water.
3) When the pressure in the first-stage water washing tower is overlarge, the first pressure relief rod is opened to relieve the pressure, so that the first-stage water washing tower can be prevented from being exploded due to the overlarge pressure, and the safety of the first-stage water washing tower is guaranteed; when the pressure in the alkaline tower is overlarge, the second pressure relief rod is opened to relieve the pressure, so that the alkaline tower can be prevented from being exploded due to the overlarge pressure, and the safety of the alkaline tower is guaranteed; when the pressure in the second-stage water washing tower is too large, the third pressure relief rod is opened to relieve the pressure, so that the second-stage water washing tower can be prevented from exploding due to the too large pressure, and the safety of the second-stage water washing tower is guaranteed.
Drawings
In order to illustrate the embodiments of the present invention more clearly, the drawings that are needed in the description of the embodiments will be briefly described below, it being apparent that the drawings in the following description are only exemplary embodiments of the invention, and that other drawings can be obtained by those skilled in the art without inventive effort, based on the structures shown in these drawings, wherein:
fig. 1 is a schematic structural view of the fluorine-containing tail gas treatment device of the present invention.
The reference numerals include:
1, emptying reactor 101, carbon bottle 102 and electric heater
2, a first-stage water washing tower 21, a first-stage water washing tower water tank 22, a first water spraying chamber 23, a first double-layer filter plate 24, a second double-layer filter plate 25, a first pressure relief rod 26, a first water spraying pipe
3: first valve
4 first corrosion-resistant water circulating pump
5: second valve
6: third valve
7: first fluoroplastic barrel
8, an alkaline tower 81, an alkaline liquid tank 82, an alkaline liquid spray chamber 83, a third double-layer filter plate 84, a fourth double-layer filter plate 85, a second pressure relief rod 86 and an alkaline spray pipe
9: fourth valve
10: alkali-resistant circulating pump
11: fifth valve
12: sixth valve
13, waste lye barrel
14: a secondary water washing tower 141, a secondary water washing tower water tank 142, a second water spraying chamber 143, a fifth double-layer filter plate 144, a sixth double-layer filter plate 145, a third pressure relief rod 146, a second water spraying pipe
15 the seventh valve
16: second corrosion-resistant water circulating pump
17 eighth valve
18 the ninth valve
19 the second fluorine plastic barrel
20, an exhaust device.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is obvious that the described embodiments are only exemplary embodiments of the present invention, rather than the only embodiments.
As shown in figure 1, the fluorine-containing tail gas treatment device comprises an emptying reactor 1, a carbon bottle 101 is arranged in the emptying reactor 1, an electric heater 102 is arranged between the bottom in the emptying reactor 1 and the carbon bottle 101, the top of the emptying reactor 1 is connected with a primary water washing tower 2, a primary water washing tower water tank 21 is arranged at the bottom of the primary water washing tower 2, one side of the primary water washing tower water tank 21, which is far away from the emptying reactor 1, is connected with a first corrosion-resistant water circulating pump 4, a first valve 3 is arranged between the primary water washing tower water tank 21 and the first corrosion-resistant water circulating pump, a first fluoroplastic barrel 7 is connected with the same side of the primary water washing tower 2 as the first corrosion-resistant water circulating pump 4, a third valve 6 is arranged between the primary water washing tower 2 and the first fluoroplastic barrel 7, the first corrosion-resistant water circulating pump 4 is connected with a second valve 5, an outlet of the primary water washing tower 2 is connected with an alkaline washing tower 8, an alkaline liquid tank 81 is arranged at the bottom of the alkaline tower 8, an alkaline-resisting circulating pump 10 is connected to one side of the alkaline liquid tank 81, which is far away from the primary water scrubber 2, a fourth valve 9 is arranged between the alkaline liquid tank 81 and the alkaline-resisting circulating pump, a waste alkaline liquid barrel 13 is connected to the side of the alkaline tower 8, which is the same as the alkaline-resisting circulating pump 10, a sixth valve 12 is arranged between the alkaline tower 8 and the waste alkaline liquid barrel 13, an outlet of the alkaline-resisting circulating pump 10 is connected with a fifth valve 11, a secondary water scrubber 14 is connected to the top of the alkaline tower 8, a secondary water scrubber water tank 141 is arranged at the bottom of the secondary water scrubber 14, a second corrosion-resisting water circulating pump 16 is connected to one side of the secondary water scrubber water tank 141, which is far away from the alkaline tower 8, a seventh valve 15 is arranged between the secondary water scrubber water tank 141 and the second corrosion-resisting water circulating pump, a second fluoroplastic barrel 19 is connected to the side of the secondary water scrubber 14, which is the same as the second corrosion-resisting water circulating pump 16, a ninth valve 18 is arranged between the second-stage water washing tower 14 and the second fluoroplastic barrel, an eighth valve 17 is connected with an outlet of the second corrosion-resistant water circulating pump 16, and an exhaust device 20 is connected with the top of the second-stage water washing tower 14.
Further, a first double-layer filter plate 23 is horizontally arranged at the bottom of the first-stage water washing tower 2, a second double-layer filter plate 24 is horizontally arranged at the top of the first-stage water washing tower 2, and the first double-layer filter plate 23, the second double-layer filter plate 24 and the inside of the first-stage water washing tower 2 form a first water spray chamber 22. CF (compact flash)4Fluorine-containing tail gas such as HF can enter the first-stage water scrubber 2 through the first double-layer filter plate 23, meanwhile, a relatively stable flowing space can be formed by the second double-layer filter plate 24 and the first double-layer filter plate 23, flowing of the fluorine-containing tail gas such as HF is facilitated, and the first water-washing spray chamber 22 is arranged to facilitate first leaching of the fluorine-containing tail gas such as HF with water.
Furthermore, two identical first water spray pipes 26 are arranged in parallel up and down in the first water spray chamber 22, the first water spray pipes 26 are respectively connected with the second valve 5, and the first water spray pipes 26 are configured as triangular rings. The arrangement of the two first water spraying pipes 26 is beneficial to the leaching of fluorine-containing substances such as HF and the like, and the leaching efficiency is improved; the triangular ring-shaped structure can fix the position of the first water spray pipe 26 without displacement, thereby ensuring the smooth washing.
Further, a third double-layer filter plate 83 is horizontally arranged at the bottom of the tower close to the alkaline tower 8, a fourth double-layer filter plate 84 is horizontally arranged at the top of the tower close to the alkaline tower 8, and the third double-layer filter plate 83, the fourth double-layer filter plate 84 and the inside of the alkaline tower 8 form an alkaline solution spray chamber 82. The residual fluorine-containing tail gas such as HF and the like after being treated by the first-stage water scrubber 2 can enter the alkaline washing tower 8 through the third double-layer filter plate 83, meanwhile, a relatively stable flowing space can be formed by the fourth double-layer filter plate 84 and the third double-layer filter plate 83, the flowing of the fluorine-containing tail gas such as HF and the like is facilitated, and the alkaline solution spraying chamber 82 is helpful for leaching the residual fluorine-containing tail gas such as HF and the like after being treated by the first-stage water scrubber 2 by using alkaline solution KOH or NaOH.
Furthermore, two identical alkali spraying pipes 86 arranged in parallel up and down are arranged in the alkali liquor spraying chamber 82, the alkali spraying pipes 86 are respectively connected with the fifth valve 11, and the alkali spraying pipes 86 are in a triangular ring structure. The arrangement of the two alkali spray pipes 86 is beneficial to leaching fluorine-containing substances such as HF and the like and improves the leaching efficiency; the triangular ring-shaped structure can fix the position of the alkali spraying pipe 86 without displacement, thereby ensuring the smooth operation of leaching.
Further, a fifth double-layer filter plate 143 is horizontally arranged near the bottom of the second-stage water washing tower 14, a sixth double-layer filter plate 144 is horizontally arranged near the top of the second-stage water washing tower 14, and the fifth double-layer filter plate 143, the sixth double-layer filter plate 144 and the inside of the second-stage water washing tower 14 form a second water spray chamber 142. The residual fluorine-containing tail gas such as HF and the like after being treated by the alkaline tower 8 enters the secondary water scrubber 14 through the fifth double-layer filter plate 143, meanwhile, a relatively stable flowing space is formed by the sixth double-layer filter plate 144 and the fifth double-layer filter plate 143, which is beneficial to the flowing of the fluorine-containing tail gas such as HF and the like, the second water spray chamber 142 is beneficial to leaching the residual fluorine-containing tail gas such as HF and the like in the alkaline tower 8 with water for the second time, and the fluorine-containing tail gas such as HF and the like can reach the standard and be discharged after being subjected to the second leaching in the second water spray chamber 142.
Further, two identical second water spraying pipes 146 arranged in parallel up and down are arranged in the second water spraying chamber 142, the second water spraying pipes 146 are respectively connected with the eighth valve 17, and the second water spraying pipes 146 are constructed as triangular rings. The arrangement of the two second water spray pipes 146 is beneficial to the leaching of fluorine-containing substances such as HF and the like, and the leaching efficiency is improved; the triangular ring structure can fix the position of the second water spray pipe 146 without displacement, thereby ensuring the smooth washing.
Further, a first pressure relief rod 25 is installed on one side, close to the emptying reactor 1, of the first-stage washing tower 2, a second pressure relief rod 85 is installed on one side, close to the first corrosion-resistant water circulating pump 4, of the alkaline washing tower 8, and a third pressure relief rod 145 is installed on one side, close to the alkaline resistant circulating pump 10, of the second-stage washing tower 14. When the pressure in the first-stage water scrubber 2, the alkaline washing tower 8 and the second-stage water scrubber 14 is too high, potential safety hazards exist, so that the pressure in the corresponding tower body can be timely leaked by arranging the first pressure release rod 25, the second pressure release rod 85 and the third pressure release rod 145, explosion-proof pressure release can be realized, and the safety of the corresponding tower body is guaranteed.
In different embodiments, the primary water scrubber 2 is disposed downstream of the blowdown reactor 1, similarly, the caustic scrubber 8 is disposed downstream of the primary water scrubber 2, and the secondary water scrubber 14 is disposed downstream of the caustic scrubber 8, that is, the fluorine-containing tail gas reacts in the blowdown reactor 1, is washed with water in the primary water scrubber 2, is washed with alkali liquor in the caustic scrubber 8, is washed with water again in the secondary water scrubber 14, and finally the fluorine-containing tail gas is purified and enters the exhaust device 20.
During operation, the fluorine-containing tail gas after reaction in the emptying reactor 1 enters the first water spray chamber 22 in the first-stage water washing tower 2, water in the first-stage water washing tower water tank 21 enters the first water spray chamber 22 under the action of the first corrosion-resistant water circulating pump 4 to spray the fluorine-containing tail gas, similarly, alkali liquor in the alkali liquor tank 81 enters the alkali liquor spray chamber 82 under the action of the alkali-resistant circulating pump 81 to spray the fluorine-containing tail gas in the alkali liquor spray chamber 82, water in the second-stage water washing tower water tank 141 enters the second water spray chamber 142 under the action of the second corrosion-resistant water circulating pump 16 to spray the fluorine-containing tail gas in the second water spray chamber 142, and finally the fluorine-containing tail gas after the treatment enters the exhaust device 20.
By adopting the scheme of the embodiment, the following beneficial effects can be achieved:
1) HF and other fluorine-containing tail gas are leached by the primary water scrubber 2, the alkaline scrubber 8 and the secondary water scrubber 14 in sequence, and then enter the exhaust device 20 to be discharged into the air without polluting the environment.
2) The method comprises the steps of firstly spraying and leaching fluorine-containing tail gas such as HF and the like in a primary water washing tower 2, detecting the concentration of HF in the first leaching solution after the first water spraying and leaching, introducing the first leaching solution which does not meet the standard into a first fluoroplastic barrel 7 to be used as a hydrofluoric acid product with water for reuse, spraying alkali liquor KOH or NaOH in an alkali washing tower 8 for leaching the fluorine-containing tail gas such as HF and the like treated by the primary water washing tower 2, detecting the concentration of KOH or NaOH in a second leaching solution after the alkali liquor KOH or NaOH is leached, introducing the second leaching solution which does not meet the standard into a waste alkali liquor barrel 13 for storage, secondly spraying and leaching the fluorine-containing tail gas such as HF and the like treated by the alkali washing tower 8 in a secondary water washing tower 14, detecting the concentration of HF in a third leaching solution after the second water spraying and leaching, and introducing the third leaching solution which does not meet the standard into a second fluoroplastic barrel 19 to be used as the hydrofluoric acid product with water for reuse.
3) When the pressure in the first-stage water washing tower 2 is overlarge, the first pressure relief rod 25 is opened to relieve the pressure, so that the first-stage water washing tower 2 can be prevented from being exploded due to the overlarge pressure, and the safety of the first-stage water washing tower 2 is guaranteed; when the pressure in the alkaline tower 8 is overlarge, the second pressure relief rod 85 is opened to relieve the pressure, so that the alkaline tower 8 can be prevented from being exploded due to the overlarge pressure, and the safety of the alkaline tower 8 is guaranteed; when the pressure in the secondary water scrubber 14 is too high, the third pressure relief rod 145 is opened to relieve the pressure, so that the secondary water scrubber 14 can be prevented from exploding due to the too high pressure, and the safety of the secondary water scrubber 14 is guaranteed.
It is above only the utility model discloses a preferred embodiment, the utility model discloses a scope of protection does not only confine above-mentioned embodiment, the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that modifications and embellishments without departing from the principles of the present invention will occur to those skilled in the art, and are to be considered within the scope of the present invention.
Claims (8)
1. The utility model provides a processing apparatus of fluorine-containing tail gas which characterized in that: including emptying reactor (1), establish charcoal bottle (101) in emptying reactor (1) bottom in emptying reactor (1) with install electric heater (102) between charcoal bottle (101), one-level scrubbing tower (2) is connected at emptying reactor (1) top, be equipped with one-level scrubbing tower water tank (21) at the bottom of one-level scrubbing tower (2), one-level scrubbing tower water tank (21) deviate from first corrosion-resistant water circulating pump (4) are connected to one side of emptying reactor (1) first fluoroplastic bucket (7) is connected to the side of one-level scrubbing tower (2) the same with first corrosion-resistant water circulating pump (4) place, second valve (5) is connected to first corrosion-resistant water circulating pump (4), alkaline tower (8) is connected at the top of one-level scrubbing tower (2) tower, alkaline tower (8) is equipped with lye tank (81) at the bottom, one side of the lye tank (81) departing from the first-stage water washing tower (2) is connected with an alkali-resistant circulating pump (10), the side surface of the alkaline tower (8) which is the same as the side surface where the alkaline-resisting circulating pump (10) is positioned is connected with a waste alkaline liquid barrel (13), an outlet of the alkali-resistant circulating pump (10) is connected with a fifth valve (11), the top of the alkaline tower (8) is connected with a secondary water scrubber (14), the bottom of the secondary water washing tower (14) is provided with a secondary water washing tower water tank (141), one side of the secondary water washing tower water tank (141) departing from the alkaline washing tower (8) is connected with a second corrosion-resistant water circulating pump (16), a second fluoroplastic barrel (19) is connected with the side surface of the secondary water washing tower (14) which is the same as the side surface of the secondary corrosion-resistant water circulating pump (16), an outlet of the second corrosion-resistant water circulating pump (16) is connected with an eighth valve (17), and the top of the second-stage water washing tower (14) is connected with an exhaust device (20).
2. The apparatus for treating fluorine-containing off-gas according to claim 1, characterized in that: be close to the tower bottom department level of one-level water scrubber (2) is equipped with first double-deck filter plate (23), is being close to the top of the tower department level of one-level water scrubber (2) is equipped with second double-deck filter plate (24), first double-deck filter plate (23) second double-deck filter plate (24) and the inside of one-level water scrubber (2) constitutes first water spray room (22).
3. The apparatus for treating fluorine-containing off-gas according to claim 2, characterized in that: two first water spraying pipes (26) which are identical and arranged in parallel up and down are arranged in the first water spraying chamber (22), the first water spraying pipes (26) are respectively connected with the second valve (5), and the first water spraying pipes (26) are in a triangular ring structure.
4. The apparatus for treating fluorine-containing off-gas according to claim 1, characterized in that: the device is characterized in that a third double-layer filter plate (83) is horizontally arranged at the position, close to the tower bottom of the alkaline tower (8), a fourth double-layer filter plate (84) is horizontally arranged at the position, close to the tower top of the alkaline tower (8), of the third double-layer filter plate (83), the fourth double-layer filter plate (84) and the inside of the alkaline tower (8) form an alkaline liquor spray chamber (82).
5. The apparatus for treating fluorine-containing off-gas according to claim 4, wherein: the alkali liquor spraying chamber (82) is provided with two identical alkali spraying pipes (86) which are arranged in parallel up and down, the alkali spraying pipes (86) are respectively connected with the fifth valve (11), and the alkali spraying pipes (86) are constructed into triangular rings.
6. The apparatus for treating fluorine-containing off-gas according to claim 1, characterized in that: be close to the tower bottom department level of second grade water scrubber (14) is equipped with fifth double-deck filter plate (143), is being close to the top of the tower department level of second grade water scrubber (14) is equipped with sixth double-deck filter plate (144), fifth double-deck filter plate (143), sixth double-deck filter plate (144) and the inside of second grade water scrubber (14) constitutes second water spray room (142).
7. The apparatus for treating fluorine-containing off-gas according to claim 6, wherein: the second water spray chamber (142) is provided with two identical second water spray pipes (146) which are arranged in parallel up and down, the second water spray pipes (146) are respectively connected with the eighth valve (17), and the second water spray pipes (146) are constructed into triangular rings.
8. The apparatus for treating fluorine-containing off-gas according to claim 1, characterized in that: one-level scrubbing tower (2) are close to first pressure relief pole (25) are installed to air release reactor (1) one side, alkaline wash tower (8) are close to second pressure relief pole (85) are installed to first corrosion-resistant water circulating pump (4) one side, second grade scrubbing tower (14) are close to third pressure relief pole (145) are installed to alkali-resistant circulating pump (10) one side.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120153678.9U CN214486355U (en) | 2021-01-20 | 2021-01-20 | Fluorine-containing tail gas treatment device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120153678.9U CN214486355U (en) | 2021-01-20 | 2021-01-20 | Fluorine-containing tail gas treatment device |
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| CN214486355U true CN214486355U (en) | 2021-10-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115419825A (en) * | 2022-08-29 | 2022-12-02 | 欧中电子材料（重庆）有限公司 | Gas cylinder comprehensive treatment system and treatment method thereof |
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2021
- 2021-01-20 CN CN202120153678.9U patent/CN214486355U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115419825A (en) * | 2022-08-29 | 2022-12-02 | 欧中电子材料（重庆）有限公司 | Gas cylinder comprehensive treatment system and treatment method thereof |
| CN115419825B (en) * | 2022-08-29 | 2024-05-14 | 欧中电子材料（重庆）有限公司 | Gas cylinder comprehensive treatment system and treatment method thereof |
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