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CN214123830U - Sample stage for Zeiss scanning electron microscope EBSD test process - Google Patents

Sample stage for Zeiss scanning electron microscope EBSD test process Download PDF

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Publication number
CN214123830U
CN214123830U CN202120278981.1U CN202120278981U CN214123830U CN 214123830 U CN214123830 U CN 214123830U CN 202120278981 U CN202120278981 U CN 202120278981U CN 214123830 U CN214123830 U CN 214123830U
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top surface
front surface
sample
screw rod
threaded holes
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CN202120278981.1U
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Chinese (zh)
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任子君
孟令杰
陈亚楠
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Xian Jiaotong University
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Xian Jiaotong University
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Abstract

The utility model discloses a sample platform to cai si scanning electron microscope EBSD test process, include: the T-shaped sample table comprises a cuboid vertical beam, the top end of the vertical beam is connected with a cross beam, the cross beam is in a quadrangular shape, the included angle between the top surface of the cross beam and the horizontal plane is 20 degrees, the front surface of the cross beam is perpendicular to the top surface, and a plurality of first threaded holes are uniformly formed in the length directions of the front surface and the top surface; the sample seat is fixedly connected to the bottom end of the vertical beam; the object carrying platform comprises fixed rods which are respectively in threaded connection with the first threaded holes, and the top ends of the fixed rods are connected with object carrying sheets; the side plates are respectively connected to two sides of the front surface and the top surface and are perpendicular to the front surface and the top surface, a plurality of second threaded holes which correspond to the first threaded holes one by one are formed in the side plates, a screw rod is arranged in each second threaded hole, and one end, close to the objective plate, of each screw rod is connected with a clamping piece; the utility model provides an EBSD sample platform that once can bear a plurality of samples.

Description

Sample stage for Zeiss scanning electron microscope EBSD test process
Technical Field
The utility model belongs to the technical field of scanning electron microscope consumptive material, concretely relates to sample platform to caisi scanning electron microscope EBSD test process.
Background
With the progress of science and technology, the development of new material industry is rapidly advanced, which drives the technical innovation in the field of material research, the research of materials under the microstructure is more frequent, and the research result of materials also promotes the development. Under EBSD conditions, the study of the microstructural and microtexturing characterization of materials is an extremely important task for researchers. At present, the sample platform device of doing EBSD analysis usefulness is a sample platform that has 70 inclined planes, this sample platform is copper material, it is softer, easy damage, and the sample is difficult to fix, easy drift, especially the inclined plane area is too little, only 10mm size, can only install a sample at every turn and carry out EBSD analysis, if continue to analyze next sample, need take off the new sample of reinstallation again with the sample, greatly increased the experimental period, whole operation flow is too frequent, be unfavorable for the quick high-efficient analysis of sample.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a sample platform to chase scanning electron microscope EBSD test process provides an EBSD sample platform that once can bear a plurality of samples.
The utility model provides a, a sample platform to chase scanning electron microscope EBSD test process, include:
the T-shaped sample table comprises a cuboid vertical beam, the top end of the vertical beam is connected with a cross beam, the cross beam is in a quadrangular shape, the included angle between the top surface of the cross beam and the horizontal plane is 20 degrees, the front surface of the cross beam is perpendicular to the top surface, and a plurality of first threaded holes are uniformly formed in the length directions of the front surface and the top surface;
the sample seat is fixedly connected to the bottom end of the vertical beam;
the object carrying platform comprises fixed rods which are respectively in threaded connection with the first threaded holes, and the top ends of the fixed rods are connected with object carrying sheets;
the side plates are connected to the two sides of the front surface and the top surface respectively and are perpendicular to the front surface and the top surface, a plurality of second threaded holes in one-to-one correspondence with the first threaded holes are formed in the side plates, a screw rod is arranged in each second threaded hole, and one end, close to the slide, of each screw rod is connected with a clamping piece.
The first threaded hole is perpendicular to the front surface and the top surface respectively, the second threaded hole is perpendicular to the side plate, and the clamping piece is perpendicular to the screw rod.
The both sides of front surface and top surface are provided with deep groove respectively, and the curb plate passes through deep groove and can dismantle with front surface and top surface respectively and be connected.
One end of the screw rod, which is far away from the clamping piece, is detachably connected with a limiting piece.
The height of the objective plate is consistent with that of the clamping plate.
The utility model has the advantages that:
the utility model relates to a to sample platform of caisi scanning electron microscope EBSD test process, when locking the sample respectively on top surface and front surface through clamp plate and slide, can realize the scanning of 20 °, 70 ° direction to can realize a plurality of samples at every turn and adorn the appearance on top surface and front surface, avoided frequently putting operations such as vacuum-dress appearance-evacuation, realized a plurality of samples and scanned in batches, improved the speed of scanning test; during specific operation, can press from both sides the sample of multiple shape through the screw rod between tight piece of clamp and the slide, for example can place regular cuboid, irregular block and lamellar sample, after placing, press from both sides the sample tightly through rotating the screw rod, consequently improved electronic microscope scanning sample's practicality.
Drawings
FIG. 1 is a perspective view of a sample stage for a Chuiss scanning electron microscope EBSD test process of the present invention;
fig. 2 is a side view of the utility model discloses a sample platform to zeiss scanning electron microscope EBSD test process.
In the figure, 1, a T-shaped sample table, 2, a vertical beam, 3, a cross beam, 4, a top surface, 5, a front surface, 6, a first threaded hole, 7, a sample seat, 8, a carrying platform, 9, a fixing rod, 10, a carrying sheet, 11, a side plate, 12, a second threaded hole, 13 a screw rod, 14, a limiting sheet, 15, a clamping sheet and 16, a deep groove are arranged.
Detailed Description
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments. The following examples are only used to illustrate the technical solutions of the present invention more clearly, and the protection solutions of the present invention are not limited thereto.
Example 1
The utility model discloses a sample platform to chase scanning electron microscope EBSD test process is shown in fig. 1-fig. 2, including T style of calligraphy sample platform 1, sample holder 7, cargo platform 8 and curb plate 11 etc. wherein T style of calligraphy sample platform 1 includes cuboid shape perpendicular roof beam 2, the top of perpendicular roof beam 2 is connected with crossbeam 3, the shape of crossbeam 3 is the quadrangular prism, the top surface 4 of crossbeam 3 and the contained angle of horizontal plane are 20, the front surface 5 and the top surface 4 of crossbeam 3 are mutually perpendicular, evenly be provided with a plurality of first screw holes 6 along the length direction of front surface 5 and top surface 4; the sample seat 7 is fixedly connected to the bottom end of the vertical beam 2; the object carrying platform 8 comprises a fixed rod 9 which is respectively in threaded connection with the first threaded hole 6, and the top end of the fixed rod is connected with an object carrying sheet 10; the curb plate 11 is connected respectively in the both sides of front surface 5 and top surface 4 and perpendicular with front surface 5 and top surface 4, be provided with a plurality of second screw holes 12 with first screw hole 6 one-to-one on the curb plate 11, be provided with screw rod 13 in every second screw hole 12, the one end that screw rod 13 is close to slide 10 is connected with and presss from both sides tight piece 15, slide 10 and the highly uniform who presss from both sides tight piece 15, the one end dismantlement that keeps away from tight piece 15 on screw rod 13 is connected with spacing piece 14, spacing piece 14 is used in the position of restriction screw rod 13 when the screw rod pivoted.
Further, the first threaded hole 6 is perpendicular to the front surface 5 and the top surface 4, the second threaded hole 12 is perpendicular to the side plate 11, and the clamping piece 15 is perpendicular to the screw 13.
Deep grooves 16 are respectively formed in two sides of the front surface 5 and the top surface 4, and the side plates 11 are detachably connected with the front surface 5 and the top surface 4 through the deep grooves 16; during the use, directly insert curb plate 11 in deep groove 16, after the examination is accomplished, can directly extract curb plate 11 from deep groove 16 after screwing out the threaded rod to make things convenient for depositing of testboard.
The utility model discloses a to sample platform of caisi scanning electron microscope EBSD test process when working, when locking the sample respectively on top surface 4 and front surface 5 through clamp plate 15 and slide 10, can realize the scanning of 20 °, 70 ° direction to can realize a plurality of samples dress appearance at every turn on top surface 4 and front surface 5, avoided frequently putting operations such as vacuum-dress appearance-evacuation, realized a plurality of samples scan in batches, improved the speed of scanning test; during specific operation, can be through the sample of screw rod 13 centre gripping multiple shape between the piece 15 of pressing from both sides and the slide 10, for example can place regular cuboid, irregular block and lamellar sample, after placing, press from both sides the sample tightly through rotating screw rod 13, consequently improved the practicality of electron microscope scanning sample.
The above-mentioned embodiments are only preferred embodiments of the present invention, and the protection scope of the present invention is not limited thereto, and any person skilled in the art can obviously obtain simple changes or equivalent replacements of the technical solutions within the technical scope of the present invention.

Claims (3)

1. The utility model provides a sample platform to zeiss scanning electron microscope EBSD test process which characterized in that includes:
the T-shaped sample table (1) comprises a cuboid vertical beam (2), a cross beam (3) is connected to the top end of the vertical beam (2), the cross beam (3) is in a quadrangular shape, an included angle between a top surface (4) of the cross beam (3) and a horizontal plane is 20 degrees, a front surface (5) of the cross beam (3) is perpendicular to the top surface (4), and a plurality of first threaded holes (6) are uniformly formed in the length directions of the front surface (5) and the top surface (4);
the sample seat (7) is fixedly connected to the bottom end of the vertical beam (2);
the object carrying platform (8) comprises a fixed rod (9) which is respectively in threaded connection with the first threaded hole (6), and the top end of the fixed rod is connected with an object carrying sheet (10);
the side plates (11) are respectively connected to two sides of the front surface (5) and the top surface (4) and are perpendicular to the front surface (5) and the top surface (4), a plurality of second threaded holes (12) which correspond to the first threaded holes (6) one to one are formed in the side plates (11), a screw rod (13) is arranged in each second threaded hole (12), and one end, close to the objective lens (10), of each screw rod (13) is connected with a clamping piece (15);
deep grooves (16) are respectively formed in two sides of the front surface (5) and the top surface (4), and the side plate (11) is detachably connected with the front surface (5) and the top surface (4) through the deep grooves (16);
one end of the screw rod (13) far away from the clamping piece (15) is detachably connected with a limiting piece (14), and the limiting piece (14) is used for limiting the position of the screw rod (13) when the screw rod rotates.
2. The sample stage for the zeiss scanning electron microscope EBSD testing process according to claim 1, characterized in that the first threaded holes (6) are perpendicular to the front surface (5) and the top surface (4), respectively, the second threaded holes (12) are perpendicular to the side plate (11), and the clamping pieces (15) are perpendicular to the threaded rods (13).
3. The sample stage for the zeiss scanning electron microscope EBSD testing process according to claim 1, characterized in that the height of the slide (10) coincides with the height of the clamping plate (15).
CN202120278981.1U 2021-02-01 2021-02-01 Sample stage for Zeiss scanning electron microscope EBSD test process Active CN214123830U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202120278981.1U CN214123830U (en) 2021-02-01 2021-02-01 Sample stage for Zeiss scanning electron microscope EBSD test process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202120278981.1U CN214123830U (en) 2021-02-01 2021-02-01 Sample stage for Zeiss scanning electron microscope EBSD test process

Publications (1)

Publication Number Publication Date
CN214123830U true CN214123830U (en) 2021-09-03

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115128109A (en) * 2022-09-02 2022-09-30 北京化工大学 EBSD sample stage based on orientation calibration and correction and image acquisition method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115128109A (en) * 2022-09-02 2022-09-30 北京化工大学 EBSD sample stage based on orientation calibration and correction and image acquisition method
CN115128109B (en) * 2022-09-02 2022-11-25 北京化工大学 EBSD sample stage based on orientation calibration and correction and image acquisition method

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