CN203854316U

CN203854316U - Combination unit of gas enclosed assembly and systems

Info

Publication number: CN203854316U
Application number: CN201320841800.7U
Authority: CN
Inventors: J.莫克; A.S-K.柯; E.弗伦斯基; S.奥尔德森
Original assignee: Kateeva Inc
Current assignee: Kedihua Display Technology Shaoxing Co ltd
Priority date: 2012-12-19
Filing date: 2013-12-19
Publication date: 2014-10-01
Anticipated expiration: 2023-12-19
Also published as: CN104129163A; CN105818540A; CN104129163B; CN105818540B

Abstract

The utility model relates to a combination unit of a gas enclosed assembly and systems, wherein the gas enclosed assembly and systems are easy to transport and assemble and are configured to maintain the minimum inert gas volume and approaches various packaged devices and equipment to the greatest extent. According to various embodiments, the combination unit has a gas enclosed assembly that is constructed by the following way: the internal volume of the gas enclosed assembly is minimized and the working space is optimized to adapt to various occupied areas of all kinds of OLED printing systems. Therefore, on the basis of the construction of the gas enclosed assembly, the inside of the gas enclosed assembly can be approached easily from the outside during processing and the inside can be approached easily for convenient maintenance; and the shutdown time can be minimized.

Description

The combination of gas closed component and system

the cross reference of related application

The application is the part continuation application of the U.S. Patent application No. 13/720,830 of submission on December 19th, 2012.The application also requires the rights and interests of the U.S. Provisional Application No. 61/764,973 of submission on February 14th, 2013.The application of all cross references is all incorporated herein in full with way of reference.

Technical field

This instruction relates to each embodiment of gas-tight seal gas closed component and system, described gas closed component and system can easily be carried and assemble, and various devices and the equipment being arranged to keep minimum inert gas volume and farthest approaching wherein encapsulation.

Background technology

To the interest of the potential of OLED Display Technique, by OLED Display Technique attribute drive, these attributes comprise the representing of display floater with HI SA highly saturated color, and are high-contrast, ultra-thin, response with energy-conservation fast.In addition, various baseplate materials, comprise flexible polymeric material, can be used for the manufacture of OLED Display Technique.Although for the potential that is used for emphasizing this technology that represents of the display of the small screen application (being mainly cell phone), remain challenge when this manufacture is amplified to compared with large format.For example, manufacture OLED display on than the larger substrate of Gen 5.5 substrates (size with about 130cm * 150cm) and still need proof.

Organic Light Emitting Diode (OLED) device can be by printing various organic films by OLED print system and other material is manufactured on substrate.Such organic material can be easy to be subject to the infringement of oxidation and other chemical process.With can convergent-divergent for various substrate sizes and can be in inertia, roughly not having mode that the printing environment of particle carries out to hold OLED print system can a plurality of challenge.Owing to needing a large amount of spaces for printing the equipment of large format display panel substrate printing, large facility is remained on and needs continuously gas purification to remove such as having significant engineering challenge under the reactive environments material of steam and oxygen and the inert atmosphere of organic solvent steam.For example, provide the main facilities being hermetically sealed can there is engineering challenge.In addition, various cables, line and the pipeline of operation print system be fed to turnover OLED print system so that can have challenge, to make gas locking device effectively reach the specification about the level of the Atmospheric components such as oxygen and steam, because they can produce the remarkable dead volume that can hold back such reactive materials.In addition, expectation remain on for the treatment of inert environments in this facility be made as and be easy to approach so that with minimum maintenance downtime.Except roughly, not containing reactive materials, for the printing environment of OLED device, need the environment of remarkable low particle.In this respect, in complete closed system, provide and keep roughly not having the environment of particle provide can in atmospheric conditions, (for example, in the open, under high flow capacity laminar flow filter mantle) carries out particle reduce the unexistent additional challenges of process.

Therefore; each embodiment that needs gas locking device; described gas locking device can be in inertia, roughly do not have to hold OLED print system in the environment of particle; and easily convergent-divergent is to be provided for manufacturing oled panel on various substrate sizes and baseplate material; during processing, be also easy to approach from outside OLED print system simultaneously and be easy to approach inside, so that with safeguarding minimum downtime.

Utility model content

Disclose the combination of a kind of gas closed component and system, having comprised:

Gas closed component, it has the inside that comprises inert gas environment, and wherein, gas closed component comprises:

The first framing component assembly portion section, it limits the first internal capacity, and wherein, the first framing component assembly portion section comprises a plurality of framing component assemblies, and each framing component assembly has a plurality of panel part sections;

The second framing component assembly portion section, it limits the second internal capacity, and wherein, the second framing component assembly portion section comprises a plurality of framing component assemblies, and each framing component assembly has a plurality of panel part sections; And

At least one opening, it is in first framing component assembly portion's section and the common panel part section of the second framing component assembly portion section, and wherein, opening provides fluid to be communicated with between first framing component assembly portion's section and the second framing component assembly portion section;

Print system, it has the print head assembly that comprises at least one printhead; And

Maintenance system, it is for safeguarding print head assembly; Maintenance system is contained in the second framing component assembly portion section, wherein, and the closing maintenance system and the first framing component components apart of opening.

Preferably, also comprise:

The first framing component and the second relative framing component, wherein, the first framing component is first framing component assembly portion's section and the common framing component of the second framing component assembly portion section with the second relative framing component;

Base portion, it supports print system and maintenance system; Base portion is crossed over by the first framing component and the second framing component; And

At the first base portion seal between the first framing component and base portion and the second base portion seal between the second framing component and base portion.

Preferably, the salable sealing of the opening between the first internal capacity and the second internal capacity is combined with the first base portion seal and the second base portion seal and is isolated the first internal capacity and the second internal capacity.

Gas closed component, it has the internal capacity that comprises inert gas environment, and wherein, gas closed component comprises:

The first framing component assembly portion section, it limits the first internal capacity; And

The second framing component assembly portion section, it limits the second internal capacity;

Print system, it comprises:

Print head assembly, it comprises at least one printhead;

Kinematic system, it is for being positioned at print system in gas closed component; And

Maintenance system, it is for safeguarding print head assembly; Maintenance system is contained in the second framing component assembly portion section, and wherein, kinematic system energy positioning printing head is to safeguarded by maintenance system.

Preferably, the second internal capacity be less than or equal to gas closed component internal capacity 1%.

Preferably, the second internal capacity be less than or equal to gas closed component internal capacity 10%.

Preferably, the second internal capacity be less than or equal to gas closed component internal capacity 20%.

Preferably, also comprise gas purge system, gas purge system is configured to be communicated with the internal gas closed component fluid that is selected from gas closed component, first framing component assembly portion's section and the second framing component assembly portion section.

Preferably, the internal capacity of gas purge system heap(ed) capacity based on gas closed component.

Preferably, when gas purge system is configured to be communicated with the second framing component assembly portion section fluid, gas purification heap(ed) capacity can be used for purifying the second framing component assembly portion intersegmental part volume.

Preferably, print system has base plate supports equipment.

Preferably, it is removable by the stroke of print system that base plate supports equipment limits substrate.

Preferably, base plate supports equipment can support the substrate with the size between 130cm * 150cm to 285cm * 305cm.

Preferably, the printable oled substrate of print system, wherein, base plate supports equipment can support the substrate with the size between 60cm * 72cm to 220 * 250cm.

Preferably, the inert gas environment being included in inside comprises all at 100ppm or with lower horizontal water and oxygen.

Accompanying drawing explanation

By reference to accompanying drawing, will obtain the better understanding of feature and advantage of the present disclosure, accompanying drawing is intended to explanation rather than limits this instruction.

Fig. 1 is according to the gas closed component of each embodiment of this instruction and the schematic diagram of system.

Fig. 2 is according to the gas closed component of each embodiment of this instruction and the front, left perspective view of system.

Fig. 3 is according to the front, right perspective view of the gas closed component of each embodiment of this instruction.

Fig. 4 shows according to the exploded view of the gas closed component of each embodiment of this instruction.

Fig. 5 is according to the exploded front perspective view of the framing component assembly of each embodiment of this instruction, shows each panel frame portion section and portion's section panel.

Fig. 6 A is the back perspective view of gloves port cover cap, and Fig. 6 B is according to the enlarged drawing of the shoulder screw of the gloves port cover cap of each embodiment of the gas closed component of this instruction.

Fig. 7 A is the enlarged perspective of the snap lock latch (bayonet latch) of gloves port cover assembly, and Fig. 7 B is the sectional view of gloves port cover assembly, shows engaging of the head of shoulder screw and recess in snap lock latch.

Fig. 8 A-8C is the schematic top plan view of each embodiment that is used to form the gasket seal of joint.

Fig. 9 A and Fig. 9 B are the various perspective views that illustrate according to the sealing of the framing component of each embodiment of the gas closed component of this instruction.

Figure 10 A-10B be with according to each embodiment of the gas closed component of this instruction for receiving the relevant various views of the sealing of easy portion's section panel of detachable maintaining window.

Figure 11 A-11B be with according to each embodiment of this instruction for receiving the relevant magnification fluoroscopy sectional view of the sealing of the portion's section panel that inserts panel or window panel.

Figure 12 A is according to the base portion of each embodiment of this instruction, and described base portion comprises dish and sits and put a plurality of cushion blocks (spacer block) thereon.Figure 12 B is the enlarged perspective of the cushion block shown in Figure 12 A.

Figure 13 is according to the wall framing component relevant with dish of each embodiment of this instruction and the exploded view of top plate member.

Figure 14 A is according to the perspective view in the structure stage of the gas closed component of each embodiment of this instruction, and wherein, lifter assembly is in raised position.Figure 14 B is the exploded view of the lifter assembly shown in Figure 14 A.

Figure 15 is according to the imaginary front perspective view of the gas closed component of each embodiment of this instruction, shows the pipe-line system being arranged in gas closed component inside.

Figure 16 is according to the imaginary top perspective of the gas closed component of each embodiment of this instruction, shows the pipe-line system being arranged in gas closed component inside.

Figure 17 is according to the imaginary bottom perspective view of the gas closed component of each embodiment of this instruction, shows the pipe-line system being arranged in gas closed component inside.

Figure 18 A shows the schematic diagram of multi beam cable, line and pipeline etc.Figure 18 B shows that gas is inswept to be fed by according to this bundle of each embodiment of the pipe-line system of this instruction.

Figure 19 is schematic diagram, and how the reactive materials (A) showing in the dead band that is trapped in multi beam cable, circuit and pipeline etc. initiatively purges from the inert gas (B) of inswept pipeline, and described wiring in bundles (route) is by described pipeline.

Figure 20 A is by the cable of pipeline and the imaginary perspective view of pipeline according to the wiring of each embodiment of the gas closed component of this instruction and system.Figure 20 B is according to the enlarged drawing of the opening shown in Figure 20 A of each embodiment of the gas closed component of this instruction, shows for being enclosed in the details of the cover cap on opening.

Figure 21 is the view comprising according to the top board of the illuminator of the gas closed component of each embodiment of this instruction and system.

Figure 22 is curve map, and it shows according to the LED spectrum of the illuminator of the gas closed component of each embodiment of this instruction and system unit.

Figure 23 is according to the front perspective view of the view of the gas closed component of each embodiment of this instruction.

Figure 24 shows according to the exploded view of each embodiment of the gas closed component shown in Figure 23 of each embodiment of this instruction.

Figure 25 shows according to the front perspective view of the decomposed of each embodiment of the gas closed component of each embodiment of this instruction.

Figure 26 shows according to the decomposed side perspective view of each embodiment of the gas closed component shown in Figure 25 of each embodiment of this instruction.

Figure 27 A and Figure 27 B show according to the enlarged drawing of the gas closed component shown in Figure 26 of each embodiment of this instruction.

Figure 28 is through according to the sectional view of the framing component assembly that comprises base portion and vertical corbel (riser) of each embodiment of this instruction.

Figure 29 is according to the front perspective view of the view of the gas closed component of each embodiment of this instruction.

Figure 30 shows according to the exploded view of each embodiment of the gas closed component shown in Figure 29 of each embodiment of this instruction.

Figure 31 A is according to the cross sectional view of the gas closed component of each embodiment of the gas locking device shown in Figure 29.

Figure 31 B and Figure 31 C are according to the cross sectional view of the gas closed component shown in Figure 29 of each embodiment of this instruction, show the continuous moving of the print head assembly that moves into maintenance position.

Figure 31 D-Figure 31 F is according to the cross sectional view of the gas closed component of each embodiment of the gas locking device shown in Figure 29.

Figure 32 shows the perspective view being arranged on according to the all-in-service station in the frame assembly portion section of the gas closed component shown in Figure 29 of each embodiment of this instruction.

Figure 33 is according to the perspective view of the frame assembly portion section of the gas closed component shown in Figure 29 of each embodiment of this instruction.

Figure 34 A and Figure 34 B are the schematic diagrames of the gas closed component of this instruction and each embodiment of relevant system unit.

Figure 35 is according to the gas closed component of each embodiment of this instruction and the schematic diagram of system, shows by the embodiment of the gas circulation of gas closed component.

Figure 36 is according to the gas closed component of each embodiment of this instruction and the schematic diagram of system, shows by the embodiment of the gas circulation of gas closed component.

Figure 37 is according to the diagrammatic cross-sectional view of the gas closed component of each embodiment of this instruction.

Figure 38 is according to the gas closed component of each embodiment of this instruction and the schematic diagram of system.

Figure 39 is according to the gas closed component of each embodiment of this instruction and the schematic diagram of system.

Figure 40 is according to the form of each embodiment of this instruction, shows the valve position that can use the gas closed component in extraneous gas loop and each operator scheme of system.

Figure 41 is the front perspective view illustrating according to the suspending bench of each embodiment of this instruction.

Figure 42 is according to the enlarged drawing in the region of indicating in Figure 40 of the suspending bench of each embodiment of this instruction.

Figure 43 A and Figure 43 B are the schematic sectional view that is illustrated in the deflection (flection) producing in substrate during advancing in the suspending bench shown in Figure 40.

Figure 44 shows according to the front perspective view of the suspending bench of each embodiment of the suspending bench of this instruction.

Figure 45 A and Figure 45 B be in the suspending bench being illustrated in as shown in Figure 43, advance during the general planar of the substrate schematic sectional view of arranging.

The specific embodiment

This instruction discloses each embodiment of gas closed component, described gas closed component can sealably build and integral body is formed with gas circulation, filtration and purifying part to form gas closed component and the system that can keep inertia, roughly there is no the environment of particle, for the process of this environment of needs.This embodiment of gas closed component and system can (comprise various reactive ambient gas by various reactive materials, for example steam and oxygen, and organic solvent steam) every kind of levels of substance for example remain on 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.In addition, each embodiment of gas closed component can provide the low particle environment of 3 grades and 4 grades toilet's standards that meet ISO 14644.

The practicality of the embodiment that the those of ordinary skill of every field can be expected gas closed component in each technical field.For example, although extremely this instruction can be benefited from different fields (, chemistry, biotechnology, new and high technology and pharmaceutical field), OLED prints for illustration according to the practicality of each embodiment of the gas closed component of this instruction and system.Each embodiment that can hold the gas closed component system of OLED print system can provide such as but not limited to following feature: sealing provides gas-tight seal locking device through a plurality of structures and destructing circulation, minimize enclosed volume, and during processing and during safeguarding, be easy to approach from outside inner.As subsequently by discussion; this feature of each embodiment of gas closed component can have the impact on function; such as but not limited to; structural integrity makes during processing, to be easy to keep the low-level of reactive materials, and the downtime of fast packing volume turnover (turnover) minimum maintenance cycle period.Thereby, provide each feature of the practicality that oled panel prints and specification also to can be various technical fields benefit is provided.

As mentioned before, manufacture OLED display on than the larger substrate of Gen 5.5 substrates (size with about 130cm * 150cm) and still need proof.For the flat-panel monitor of manufacturing outside being printed by OLED, each godmother's glass substrate size has been gone through differentiation since about generation nineteen ninety is early stage.First godmother's glass substrate (being expressed as Gen 1) is about 30cm * 40cm, and therefore can produce 15 " panels.About nineteen ninety, the prior art of producing flat-panel monitor developed into female glass substrate size of Gen 3.5 for mid-term, and it has the size of about 60cm * 72cm.

Along with the propelling in each generation, for female glass size of Gen 7.5 and Gen 8.5, produce for the printing manufacture process outside OLED.The female glass of Gen 7.5 has the size of about 195cm * 225cm, and each substrate " or six 47 " flat board that can cut into eight 42.The female glass using in Gen 8.5 is about 220 * 250cm, and each substrate " or eight 46 " flat board that can cut into six 55.OLED flat-panel monitor for example, is realized the promise of quality (, purer color, higher contrast, thin, flexible, transparency and energy efficiency), and meanwhile, OLED manufactures and is limited in practice Gen 3.5 and less.Current, OLED prints the best manufacturing technology that is considered to break through this restriction, and allows oled panel manufacture not only for Gen 3.5 and less female glass size, and for the female glass size of maximum, for example, Gen 5.5, Gen 7.5 and Gen 8.5.It will be appreciated by the skilled addressee that a feature that oled panel is printed comprises can use various baseplate materials, such as but not limited to, various glass substrate materials and various Polymers plate material.In this respect, come from and use size that the term of the substrate based on glass is recorded to can be applicable to be applicable to the substrate of any material that OLED prints.

About OLED, print, according to this instruction, have been found that keep remarkable low-level reactive materials (such as but not limited to, such as the Atmospheric components of oxygen and steam, and the various organic solvent steams that use in OLED China ink) the OLED flat-panel monitor of satisfied necessary life-span specification is relevant with providing.Life-span specification is for oled panel technology particular importance, because this is directly related with the display product life-span; For the product specification of all panel technology is current, for oled panel technology, be difficult to meet.Each embodiment by means of the gas closed component system of this instruction, for the panel that meets necessary life-span specification is provided, the level of every kind of reactive materials (for example, steam, oxygen and organic solvent steam) for example can remain on 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.In addition, OLED prints the environment that need to roughly there is no particle.For OLED, print, keep roughly not having the environment particular importance of particle, even if because very little particle also can cause the visible defects on oled panel.Current, meeting the required low defect level of commercialization has challenge for OLED display.In closed system, keeping roughly not having the environment of particle to provide the particle that can carry out in (for example,, under high flow capacity laminar flow filter mantle) in atmospheric conditions to reduce the unexistent additional challenges of process in the open completely.Thereby, in large facility, keep inertia, without the necessary specification of particle environment, can there are various challenges.

The level of every kind of reactive materials (for example, steam, oxygen and organic solvent steam) can remain on while printing the information that the needs of oled panel can summarize in checking table 1 in 100ppm for example or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower facility and illustrate therein.On table 1, the data of general introduction come from for every kind in red, green and blueness and are comprising that each test sample with the organic film composition of large pixel, the manufacture of spin coating device breadth tests.This test sample is easier to Computer-Assisted Design, Manufacture And Test significantly, for the rapid evaluation object of various preparations and process.Although test sample test should not obscured with the life test of printing panel, it can represent various preparations and the impact of process on the life-span.Result shown in following table represents the variation of the process steps that test sample is manufactured, wherein, compare with the test sample that (but in air rather than in nitrogen environment) manufactured similarly, only spin coating environment changes for the test sample of manufacturing in nitrogen environment (wherein, reactive materials is less than 1ppm).

By check that the data for the test sample manufactured in table 1 can be clear under various process environment, especially red and blue in the situation that, in effectively reducing organic film composition and be exposed to the environment of reactive materials, print can on the stability of various EL with thereby the life-span is had to remarkable impact.

Table 1: the impact of inert gas treatment on the oled panel life-span

Thereby, OLED is being printed and to zoom to Gen 8.5 and above generation from Gen 3.5, and provide simultaneously can be in inertia, roughly do not have to hold in the gas enclosed environment of particle aspect stalwartness (robust) closed system of OLED print system and challenge.What can imagine is; according to this instruction; this gas locking device will have the attribute comprising such as but not limited to following: gas locking device can be easy to convergent-divergent to be provided for the Optimization Work space of OLED print system; minimum inert gas volume is provided simultaneously; and during processing, be also made as and be easy to from outside, approach OLED print system, approaching so that with safeguarding minimum downtime inside is provided simultaneously.

According to each embodiment of this instruction, provide a kind of for needing the gas closed component of the various air-sensitive processes of inert environments, it can comprise salable a plurality of wall frameworks and top board framing component together.In certain embodiments, a plurality of wall frameworks and top board framing component can be used reusable securing member to tighten together, for example bolt and screwed hole.For according to each embodiment of the gas closed component of this instruction, a plurality of framing components can be built into and limit gas closed frame assembly, and each framing component comprises a plurality of panel frame portion section.

The gas closed component of this instruction can be designed to can minimization system the mode containment of enclosed volume around, for example OLED print system.Each embodiment of gas closed component can build to hold the mode of the various occupied areas of various OLED print systems with internal capacity and the while Optimization Work space of minimum gas closed component.Each embodiment of the gas closed component so building also during processing, be made as be easy to approach from outside the inside of gas closed component and be easy to approach inner to safeguard, simultaneous minimization downtime.In this respect, can be wide about the various occupied area fixed wheels of various OLED print systems according to each embodiment of the gas closed component of this instruction.According to each embodiment, once the wide framing component of fixed wheel is fabricated to form gas closed frame assembly, various types of panels just can sealably be arranged in a plurality of panel part sections that form framing component, to complete the installation of gas closed component.In each embodiment of gas closed component, can be a position or a plurality of position manufacture a plurality of framing components (comprise such as but not limited to, a plurality of wall framing components and at least one top board framing component) and for being arranged on a plurality of panels of panel frame portion section, and then in another position, build.In addition, given for build this instruction gas closed component parts can transport properties, each embodiment of gas closed component can be through building and destructing is cycled to repeat and mounts and dismounts.

In order to ensure gas locking device, be hermetically sealed, each embodiment of the gas closed component of this instruction is provided in conjunction with each framing component so that frame seal to be provided.By the close fit cross part between each framing component (comprising pad or other seal), inside can be sealed fully, for example gas-tight seal.Once build completely, the gas closed component of sealing can comprise inner and a plurality of inner corners edge, and at least one inner corners edge is arranged on the cross part place of each framing component and adjacent frame member.One or more in framing component, for example in framing component at least half, can comprise along the fixing one or more sealant compressible shims of its one or more respective edges.Once described one or more sealant compressible shim can be configured to, a plurality of framing components combine and panel that airtight body is installed just produces gas-tight seal gas closed component.The gas closed component of sealing can form the corner edge of framing component is sealed by a plurality of sealant compressible shims.For each framing component, such as but not limited to interior wall framework surface, roof framework surface, upright side walls framework surface, diapire framework surface and combination thereof, can be provided with one or more sealant compressible shims.

Each embodiment for gas closed component, each framing component can comprise a plurality of sections, the reception of described a plurality of section Design and manufactures one-tenth can sealably be arranged on any in the various panel type in each section, to be provided for the panel sealing of the airtight body of each panel.In each embodiment of the gas closed component of this instruction, each segment frames can have portion's segment frames pad, thereby described portion segment frames pad is guaranteed to be arranged on by means of selected securing member, each panel in each segment frames can be provided for each panel and for building the sealing of the airtight body of gas locking device completely.In each embodiment, gas closed component can have one or more in window panel or maintenance control panel in each Wall board; Wherein, each window panel or maintenance control panel can have at least one gloves port.At gas closed component assembly process, each gloves port can have attached gloves, thereby gloves can extend in inside.According to each embodiment, each gloves port can have for the hardware of gloves is installed, and wherein, this hardware is used gasket seal around at each gloves port, and it provides the sealing of airtight body to minimize leakage or the molecular diffusion by gloves port.For each embodiment of the gas closed component of this instruction, the gloves port that described hardware is also designed to be easy to cover cap and opens terminal use.

According to each embodiment of the gas closed component of this instruction and system, can comprise gas closed component and gas circulation, filtration and the purifying part being formed by a plurality of framing components and panel part section.For each embodiment of gas closed component and system, pipe-line system can be installed during assembling is processed.According to each embodiment of this instruction, pipe-line system can be arranged in the gas closed frame assembly being built by a plurality of framing components.In each embodiment, pipe-line system can be at a plurality of framing components in conjunction with being arranged on a plurality of framing components before forming gas closed frame assembly.The roughly all gas that can be configured to make to be drawn into pipe-line system from one or more pipe-line system entrances for the pipe-line system of each embodiment of gas closed component and system moves through each embodiment of gas circulation and filtration circuit, for removing the particulate matter of gas closed component and internal system.In addition, the pipe-line system of each embodiment of gas closed component and system can be configured to gas circulation and the filtration circuit of the entrance and exit of the gas purification loop of gas closed component outside and gas closed component inside to separate.

For example, gas closed component and system can have gas circulation and the filtration system in gas closed component inside.This self-filtering system can have a plurality of fan filter units in inside, and can be configured to provide gas laminar flow in inside.Laminar flow can be along the direction from inner top to inner bottom or along any other direction.Although the gas flow producing by the circulatory system is laminar flow not necessarily, gas laminar flow can be used for guaranteeing the thorough and turnover completely of gas in inside.Gas laminar flow also can be used for minimizing turbulent flow, and this turbulent flow is undesirable, because it can make the particle in environment be collected in this regions of turbulent flow, thereby stops filtration system to remove those particles from environment.In addition, in order to keep preferred temperature in inside, can provide the heat regulating system that uses a plurality of heat exchangers, for example, by means of fan or the operation of another gas-recycling plant, near fan or another gas-recycling plant, or be combined with fan or another gas-recycling plant.Gas purification loop can be configured by least one gas purification parts in locking device outside from gas closed component inner loop gas.In this respect, the circulation of gas closed component inside and filtration system are combined the continuous circulation that runs through the remarkable low particulate inert gas with remarkable low-level reactive materials in gas closed component can be provided with the gas purification loop of gas closed component outside.Gas purge system can be configured to keep the very low-level component of not wishing, such as organic solvent and steam thereof and water, steam, oxygen etc.

Except being provided for gas circulation, filtration and purifying part, pipe-line system can sizing and is shaped at least one that hold therein in electric wire, wire harness and various fluid containment pipe, it can have a large amount of dead volumes when tying in, wherein, Atmospheric components (for example, water, steam, oxygen etc.) may be trapped and be difficult to and be removed by cleaning system.In certain embodiments, the combination of any in cable, electric wire and wire harness and fluid containment pipe can roughly be arranged in pipe-line system, and can be respectively operationally associated with at least one in the electrical system, mechanical system, fluid system and the cooling system that are arranged in inside.Because gas circulation, filtration and purifying part can be configured to make roughly all circulated inert gas, all aspirate by pipe-line system, the Atmospheric components that are therefore trapped in the dead volume of the various materials that tie in can purge from a large amount of dead volumes of this material that ties in effectively by this material that ties in is contained in pipe-line system.

According to each embodiment of the gas closed component of this instruction and system, can comprise gas closed component and gas circulation, filtration and the purifying part being formed by a plurality of framing components and panel part section, and additionally comprise each embodiment of pressurized inert gas recirculating system.This pressurized inert gas recirculating system can be used in the operation of OLED print system, for various pneumatic actuating devices and equipment, as described in more detail subsequently.

According to this instruction, a plurality of engineering challenges have been solved, to each embodiment of pressurized inert gas recirculating system is provided in gas closed component and system.First, in there is no the gas closed component of pressurized inert gas recirculating system and the typical operation of system, gas closed component can remain on slight positive internal pressure with respect to external pressure, to prevent that extraneous gas or air from entering inside while producing any leakage in gas closed component and system.For example, for the gas closed component of this instruction and each embodiment of system, under typical operation, the inside of gas closed component can for example remain on respect to the surrounding environment of closed system outside at least pressure of 2mbarg, the pressure of 4mbarg at least for example, the pressure of 6mbarg at least, the pressure of 8mbarg at least, or high pressure more.In gas closed component system, keep pressurized inert gas recirculating system may have challenge, because it has the dynamic balance play with continue carry out relevant with the slight positive internal pressure that keeps gas closed component and system, and introduces continuously gas-pressurized in gas closed component and system simultaneously.In addition, the variable demand of each device and equipment can be formed for the various gas closed components of this instruction and the irregular pressure distribution of system.Under this condition, keep dynamic pressure balance can be provided for continuing the globality of the OLED print procedure that carries out the gas closed component that remains on slight positive pressure with respect to external environment condition.

Each embodiment for gas closed component and system, each embodiment that can comprise pressurized inert gas loop according to the pressurized inert gas recirculating system of this instruction, this loop can be used at least one in compressor, reservoir and air blast and be combined.Each embodiment of pressurized inert gas recirculating system that comprises each embodiment in pressurized inert gas loop can have custom-designed pressure and control bypass circulation, and it can provide the inert gas internal pressure in stability line definite value in the gas closed component of this instruction and system.In each embodiment of gas closed component and system, when can be configured to inert gas pressure in the reservoir in pressurized inert gas loop and surpass predetermined threshold value pressure, pressurized inert gas recirculating system controls bypass circulation recirculation pressurized inert gas via pressure.Threshold pressure can be for example in from about 25psig to the about scope between 200psig, or more specifically at about 75psig to the about scope between 125psig, or more specifically at about 90psig to the about scope between 95psig.In this respect, there is gas closed component and the system of this instruction of pressurized inert gas recirculating system of controlling each embodiment of bypass circulation with custom-designed pressure and can remain on the balance in gas-tight seal gas locking device with pressurized inert gas recirculating system.

According to this instruction, various devices and equipment can be arranged in inside, and be communicated with each embodiment fluid with the pressurized inert gas recirculating system in various pressurized inert gas loop, various pressurized-gas sources can be used in described pressurized inert gas loop, for example at least one in compressor, air blast and combination thereof.For the gas locking device of this instruction and each embodiment of system, use various pneumatically-operated devices and equipment can provide low particle to generate performance and low maintenance.Can be arranged in gas closed component and internal system and the exemplary means and the equipment that are communicated with various pressurized inert gas loop fluid can comprise, such as but not limited to, one or more in pneumatic robot, substrate suspending bench, air bearing, air lining (bushing), Compressed Gas instrument, pneumatic actuator and combination thereof.Substrate suspending bench and air bearing can be used for operation according to the various aspects of the OLED print system of each embodiment of the gas closed component of this instruction.For example, use the substrate suspending bench of air bearing technology to can be used for substrate to be transported to correct position in printhead chamber and supporting substrate during OLED print processing.

As mentioned before, each embodiment of substrate suspending bench and air bearing may be useful to being contained according to the operation of each embodiment of the OLED print system in the gas closed component of this instruction.As Fig. 1 for gas closed component and system 2000 schematically as shown in, use the substrate suspending bench of air bearing technology to can be used for substrate to be transported to correct position in printhead chamber and supporting substrate during OLED print processing.In Fig. 1, gas closed component 1500 can be load locking system, it can have for receive the entrance chamber 1510 of substrate by the first access hatch 1512 and gate 1514, for substrate is moved to gas closed component 1500 from entrance chamber 1510, to print.According to each gate of this instruction, can be used for chamber being isolated from each other and isolating with external environment condition.According to this instruction, each gate can be selected from physics gate and gas curtain.

During substrate reception & disposal, gate 1512 can be opened, and gate 1514 can be in the closed position, to prevent that environmental gas from entering gas closed component 1500.Once substrate is received in entrance chamber 1510, gate 1512 and 1514 both can be closed and entrance chamber 1510 can be used the inert gas purge such as nitrogen, any rare gas and any combination thereof, until the level of reactive ambient gas is in for example 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.After environmental gas has reached enough low level, gate 1514 can be opened, and 1512 still close, to allow substrate 1550 to be transported to gas closed component chamber 1500 from entrance chamber 1510, as shown in FIG. 1.Substrate is transported to gas closed component chamber 1500 from entrance chamber 1510 can be via the suspending bench such as but not limited to being arranged on chamber 1500 and 1510.Substrate is transported to gas closed component chamber 1500 from entrance chamber 1510 also can be via such as but not limited to substrate conveyer robot, and it can be placed on substrate 1550 in the suspending bench being arranged in chamber 1500.Substrate 1550 is supported in substrate suspending bench can keep during print processing.

Each embodiment of gas closed component and system 2000 can have the outlet chamber 1520 being communicated with gas closed component 1500 fluids by gate 1524.According to each embodiment of gas closed component and system 2000, after print procedure completes, substrate 1550 can be transported to outlet chamber 1520 by gate 1524 from gas closed component 1500.Substrate is transported to outlet chamber 1520 from gas closed component chamber 1500 can be via the suspending bench such as but not limited to being arranged on chamber 1500 and 1520.Substrate is transported to outlet chamber 1520 from gas closed component chamber 1500 also can be via such as but not limited to substrate conveyer robot, and it can pick up and be transported to chamber 1520 from the suspending bench being arranged at chamber 1500 by substrate 1550.For each embodiment of gas closed component and system 2000, in the closed position when preventing that reactive ambient gas from entering gas closed component 1500 when gate 1524, substrate 1550 Ke Cong outlet chamber 1520 fetch via gate 1522.

Except comprising respectively the load locking system via gate 1514 and the 1524 entrance chambers 1510 that are communicated with gas closed component 1500 fluids and outlet chamber 1520, gas closed component and system 2000 can comprise system controller 1600.System controller 1600 can comprise the one or more processor circuit (not shown) that are communicated with one or more memory circuitry (not shown).System controller 1600 also can be communicated with the load locking system that includes oral chamber 1510 and outlet chamber 1520, and is finally communicated with the printing nozzle of OLED print system.Like this, system controller 1600 tunable gates 1512,1514,1522 and 1524 opening and closing.System controller 1600 also can be controlled the China ink distribution to the printing nozzle of OLED print system.Substrate 1550 can be by this instruction each embodiment of load locking system carry, via substrate suspending bench or the substrate suspending bench of use air bearing technology and the combination of substrate conveyer robot such as but not limited to using air bearing technology, load locking system comprises respectively via gate 1514 and 1524 entrance chamber 1510 and the outlet chamber 1520 that are communicated with gas closed component 1500 fluids.

Each embodiment of the load locking system of Fig. 1 also can comprise atmospheric control 1700, the inert gas source that it can comprise vacuum source and can comprise nitrogen, any rare gas and any combination thereof.The substrate suspension system being contained in gas closed component and system 2000 can comprise the gentle axon socket end of a plurality of vacuum ports mouth being usually placed on flat surfaces.Substrate 1550 can leave crust by boost in pressure and the maintenance of the inert gas such as nitrogen, any rare gas and any combination thereof.Flowing out flowing of bearing volume completes by means of a plurality of vacuum ports.The hoverheight of substrate 1550 in substrate suspending bench becomes with gas pressure and gas flow conventionally.Supporting substrate 1550 during the vacuum of atmospheric control 1700 and pressure are used in and control in gas closed component 1500 in the load locking system of Fig. 1, for example, during printing.Supporting substrate 1550 during control system 1700 is also used in and carries by the load locking system of Fig. 1, load locking system comprises respectively via gate 1514 and 1524 entrance chamber 1510 and the outlet chamber 1520 that are communicated with gas closed component 1500 fluids.In order to control substrate 1550, carry by gas closed component and system 2000, system controller 1600 is communicated with inert gas source 1710 and vacuum 1720 by valve 1712 and 1722 respectively.Unshowned addition of vacuum and inert gas supply circuit and valve can offer gas closed component and system 2000, and the load locking system in Fig. 1 illustrates, to be further provided for controlling the required various gas of enclosed environment and vacuum facility.

In order to be provided the more perspective view of multidimensional according to each embodiment of the gas closed component of this instruction and system, Fig. 2 is the front, left perspective view of each embodiment of gas closed component and system 2000.Fig. 2 shows the load locking system that comprises gas closed component 1500, entrance chamber 1510 and the first gate 1512.Gas closed component and the system 2000 of Fig. 2 can comprise gas purge system 2130, for example, for the constant supply of inert gas of the organic solvent steam that has remarkable low-level reactive environments material (steam and oxygen) and obtain from OLED print procedure being provided to gas closed system 1500.The gas closed component of Fig. 2 and system 2000 also have the controller system 1600 for system control function, as mentioned before.

Fig. 3 is the front, right perspective view that builds gas closed component 100 completely according to each embodiment of this instruction.Gas closed component 100 can hold one or more gases, for keeping the inert environments of gas closed component inside.The gas closed component of this instruction and system can be useful aspect the inert gas environment in keeping inside.Inert gas can be without undergoing any gas of chemical reaction under qualifications in groups.Some common usage examples of inert gas can comprise nitrogen, any rare gas and any combination thereof.Gas closed component 100 is configured to surround and protection air-sensitive process, for example, use Industrial Printing system print Organic Light Emitting Diode (OLED) China ink.The example that is reactive environmental gas to OLED China ink comprises steam and oxygen.As mentioned before, gas closed component 100 can be configured to keep the atmospheric environment of sealing and allows parts or print system effectively to operate, and avoids polluting simultaneously, is oxidized and damages original reactive material and substrate.

As shown in FIG. 3, each embodiment of gas closed component can comprise with lower member part, comprise front portion or the first Wall board 210', left side or the second Wall board (not shown), right side or the 3rd Wall board 230', rear portion or wall panel (not shown) and top board panel 250', this gas closed component is attachable to dish 204, and dish 204 is sat and put on base portion (not shown).As described in more detail subsequently, each embodiment of the gas closed component 100 of Fig. 1 can be by anterior or the first wall framework 210, left side or the second wall framework (not shown), right side or the 3rd wall framework 230, rear portion or wall panel (not shown) and top board framework 250 structures.Each embodiment of top board framework 250 can comprise fan filter unit cover cap 103 and the first top board framework pipeline 105 and the first top board framework pipeline 107.According to the embodiment of this instruction, various types of section panels can be arranged in any in a plurality of panel part sections that form framing component.In each embodiment of the gas closed component 100 of Fig. 1, sheet metal panel part section 109 can be welded in framing component during framework builds.For each embodiment of gas closed component 100, can be cycled to repeat the portion's section panel type mounting and dismounting through the structure of gas closed component and destructing and can comprise for insertion (inset) panel 110 shown in Wall board 210' and for the window panel 120 shown in Wall board 230' and can easy-off maintenance window 130.

Although can be made as the inside that is easy to approach locking device 100 by easy-off maintenance window 130, can use dismountable any panel to provide to the approaching of the inside of gas closed component and system, for repairing and routine maintenance object.For this approach of keeping in repair or repairing, be different from by approaching of providing such as window panel 120 and panel that can easy-off maintenance window 130, it is inner that it can make terminal use's gloves from gas closed component outside, approach during use gas closed component.For example, be attached to any gloves of gloves port one 40, for example gloves 142, as in Fig. 3 for as shown in panel 230, can between the operating period, make terminal use approach in gas closed component system inner.

Fig. 4 shows the exploded view of each embodiment of the gas closed component shown in Fig. 3.Each embodiment of gas closed component can have a plurality of Wall boards, the external perspective view that comprises front walls panel 210', the external perspective view of left side wall panel 220', the perspective internal view of right side wall panel 230', the perspective internal view of rear wall panel 240', and the top perspective of top board panel 250', as shown in Figure 3, gas closed component is attachable to dish 204, and dish 204 is sat and put on base portion 202.OLED print system can be arranged on the top of dish 204, and this print procedure is known is responsive to Atmospheric Condition.According to this instruction, gas closed component can be built by framing component, for example the wall framework 210 of Wall board 210', the wall framework 230 of the wall framework 220 of Wall board 220', Wall board 230' are, then the top board framework 250 of the wall framework 240 of Wall board 240' and top board panel 250' wherein can install a plurality of section panels.In this respect, can expect that streaming can be through the structure of each embodiment of the gas closed component of this instruction and the design that destructing is cycled to repeat the portion's section panel mounting and dismounting.In addition, can carry out the fixed wheel exterior feature of gas closed component 100 to hold the occupied area of each embodiment of OLED print system, so that required inert gas volume in minimum gas closed component, and make terminal use be easy to approach, between the gas closed component operating period and during safeguarding, be not always the case.

Use front walls panel 210' and left side wall panel 220' as example, each embodiment of framing component can have during framing component builds and is welded to the sheet metal panel part section 109 in framing component.Insert panel 110, window panel 120 and can be arranged in each wall framing component by easy-off maintenance window 130, and can be cycled to repeat and mount and dismount through the structure of the gas closed component 100 of Fig. 4 and destructing.Can find out: in the example of Wall board 210' and Wall board 220', Wall board can have near window panel 120 that can easy-off maintenance window 130.Similarly, as shown at exemplary rear wall panel 240', Wall board can have the window panel such as window panel 125, and it has two adjacent gloves port ones 40.For according to each embodiment of the wall framing component of this instruction, and can find out for the gas closed component 100 of Fig. 3, this layout of gloves can be easy to approach from the outside of gas locking device the parts part in closed system.Therefore, each embodiment of gas locking device can provide two or more gloves ports, thereby terminal use can stretch into left hand cover and right hand cover in inside and control the one or more objects in inside, and does not disturb the composition of the gaseous environment in inside.For example, any in window panel 120 and maintenance window 130 can be positioned to be beneficial to from the outside of gas closed component and easily approach the adjusting part gas closed component inside.According to each embodiment of the window panel such as window panel 120 and maintenance window 130, when not pointing out that the gloves of terminal use by gloves port approach, this window can not comprise gloves port and gloves port assembly.

As shown in Figure 4, each embodiment of wall and top board panel can have a plurality of insertion panels 110.In Fig. 4, can find out, insert panel and can there is various shapes and aspect ratio.Except inserting panel, top board panel 250' can have fan filter unit cover cap 103 and the first top board framework pipeline 105 and the second top board framework pipeline 107 that installations, bolt connect, are threaded, fix or be otherwise fastened to top board framework 250.As described in more detail subsequently, the pipe-line system being communicated with pipeline 107 fluids of top board panel 250' can be arranged in the inside of gas closed component.According to this instruction, this pipe-line system can be a part for the gas-circulating system of gas closed component inside, and be provided for the mobile stream of minute keeping apart gas closed component, for cycling through at least one gas purification parts of gas closed component outside.

Fig. 5 is the exploded front perspective view of framing component assembly 200, and wherein, wall framework 220 can be built into and comprise the completely supplementary of panel.Although design, is used the framing component assembly 200 of wall framework 220 to can be used for illustration according to each embodiment of the framing component assembly of this instruction shown in being not limited to.According to this instruction, each embodiment of framing component assembly can consist of each framing component and the portion's section panel being arranged in each framework panel part section of each framing component.

According to each embodiment of each framing component assembly of this instruction, framing component assembly 200 can consist of the framing component such as wall framework 220.Each embodiment for gas closed component, the gas closed component 100 of Fig. 3 for example, can use the process that is contained in the equipment in this gas closed component can not only need to provide the gas-tight seal locking device of inert environments, and need to roughly there is no the environment of particulate matter.In this respect, according to the framing component of this instruction, can use the metal tube material for the various sizes of each embodiment of construction framework.This metal tube material has solved expectation material properties, include but not limited to, by the non-degradable high globality material with generation particulate matter, and produce the framing component there is high strength and to there is optimum weight, thereby be made as the gas closed component of being convenient to from the three unities is carried to another place, structure and destructing comprise each framing component and panel part section.Those of ordinary skills can easily understand, and any material that meets these requirements can be used for forming according to each framing component of this instruction.

For example, according to each embodiment of the framing component of this instruction, for example framing component assembly 200, can be built by the metal tube of extruding.According to each embodiment of framing component, can carry out construction framework member with aluminium, steel and various metallic composite.In each embodiment, can use and have such as but not limited to following size and there is the metal tube of 1/8 " to 1/4 " wall thickness: 2 " wide * 2 " are high, 4 " wide * 2 " are high and 4 " wide * 4 " height, to build each embodiment according to the framing component of this instruction.In addition, the various fiber reinforced polymer composites with various pipes or other form are available, it has and includes but not limited to following material properties: by non-degradable to produce the high globality material of particulate matter, and produce the framing component there is high strength and to there is optimum weight, be made as be convenient to from the three unities to another place, carry, structure and destructing.

About the metal tube material by various sizes, build each framing component, can imagine, can weld to form each embodiment of frame welding portion.In addition, each framing component of structure material construction by various sizes can be used suitable industry adhesive to carry out.Can imagine, building each framing component should be to carry out the mode that can not form inherently the leakage paths by framing component.In this respect, for each embodiment of gas closed component, build each framing component and can use any method that can not form inherently the leakage paths by framing component is carried out.In addition,, according to each embodiment of the framing component of this instruction, for example the wall framework 220 of Fig. 4, can be brushed or be coated with.For by be for example easy to oxidation (wherein, the material forming in surface can form particulate matter) each embodiment of the framing component made of metal tube material, can brush or be coated with or other surface treatment, for example anodization, to prevent from forming particulate matter.

Framing component assembly such as the framing component assembly 200 of Fig. 5 can have the framing component such as wall framework 220.Wall framework 220 can have top 226 (top wall framework backing plate 227 can be fastened thereon) and bottom 228 (base wall framework backing plate 229 can be fastened thereon).As subsequently by described in more detail, being arranged on the lip-deep backing plate of framing component is a part for gasket seal system, the gasket seal of its panel in being arranged on framing component portion section is combined, and is provided for gas-tight seal according to each embodiment of the gas closed component of this instruction.Framing component, the wall framework 220 of the framing component assembly 200 of Fig. 5 for example, can have some panel frames portion section, wherein, each section can manufacture and receive various types of panels, such as but not limited to inserting panel 110, window panel 120 and can easy-off maintenance window 130.Various types of panel part sections can form when construction framework member.The type of panel part section can comprise such as but not limited to the inserting surface board section 10 of inserting panel 110 for receiving, for the window side board section 20 of receive window panel 120 and for receive can easy-off maintenance window 130 maintenance window panel part section 30.

The panel part section of every type can have the panel part segment frames that receives panel, and can be arranged to each panel and can sealably be fastened to according in each panel part section of this instruction, for building gas-tight seal gas closed component.For example, showing according in Fig. 5 of the frame assembly of this instruction, inserting surface board section 10 is shown as has framework 12, and window side board section 20 is shown as has framework 22, and maintenance window panel part section 30 is shown as and has framework 32.For each embodiment of the wall frame assembly of this instruction, each panel part segment frames can be to receive the sheet material in panel part section with sequential welding bead weld, to provide gas-tight seal.For each embodiment of wall frame assembly, each panel part segment frames can be made by various sheet material, comprises the structure material that is selected from fiber reinforced polymer composites, and it can use suitable industry adhesive to be arranged in panel part section.As the follow-up instruction that relates to sealing is described in more detail, each panel part segment frames can have sealant compressible shim disposed thereon, to guarantee for the sealing of installing and be fastened on each panel in each panel part section and can form airtight body.Except panel part segment frames, each framing component portion section can have and with positioning panel and in panel part section, is firmly fastened to the relevant hardware of panel.

Insert panel 110 and can be built by sheet material for each embodiment of the panel frame 122 of window panel 120, such as but not limited to various alloys and the stainless steel of aluminium, aluminium.The attribute of panel material can be with identical for forming the attribute of structural material of each embodiment of framing component.In this respect, the material having for the attribute of various panel members includes but not limited to: by non-degradable to produce the high globality material of particulate matter, and produce the panel there is high strength and to there is optimum weight so that be made as be easy to from the three unities to another place, carry, structure and destructing.For example, each embodiment of honeycomb core plate material can have as build inserting panel 110 and for the required attribute of the panel material of the panel frame 122 of window panel 120.Honeycomb core plate material can be made by various materials; Metal and metal composite and polymer, and polymer composite honeycomb core material.When being made by metal material, each embodiment of detachable panel can have the grounding connection being included in panel, to guarantee total ground connection when gas closed component is fabricated.

Given for build this instruction gas closed component gas closed component parts can transport properties, any in each embodiment of portion's section panel of this instruction can repeat installation and removal at gas closed component and system between the operating period, to be made as the inside that approaches gas closed component.

For example, for receive can easy-off maintenance window panel 130 panel part section 30 can there are four pads in groups, one of them is shown as window guiding pad 34.In addition, build for receive can easy-off maintenance window panel 130 panel part section 30 can there are four clamping plate (clamping cheat) 36 in groups, it can be used for using and is arranged on each folder of four acting in oppositions hinged (toggle) in groups 136 on can the maintenance window framework 132 of easy-off maintenance window 130 maintenance window 130 is clamped in maintenance window panel part section 30.In addition, each in two window handles 138 can be arranged on can easy-off maintenance window framework 132 on so that terminal use's maintenance window 130 easy to removal and installation.The quantity of dismountable maintenance window handle, type and setting can change.In addition, for receive can easy-off maintenance window panel 130 maintenance window panel part section 30 can make at least two of window folder 35 to be optionally arranged in each maintenance window panel part section 30.Although be shown in top and the bottom of each maintenance window panel part section 30, at least two window folders can be to install in order to any mode of fastening maintenance window 130 in panel part segment frames 32.Instrument can be used for dismounting and window folder 35 is installed, to allow maintenance window 130 dismountings and again install.

The acting in opposition toggle clamp 136 of maintenance window 130 and the hardware (comprising clamping plate 36, window guiding pad 34 and window folder 35) being arranged in panel part section 30 can be built by any suitable material and combination of materials.For example, one or more this elements can comprise at least one metal, at least one pottery, at least one plastics and combination thereof.Dismountable maintenance window handle 138 can be built by any suitable material and combination of materials.For example, one or more this elements can comprise at least one metal, at least one pottery, at least one plastics, at least one rubber and combination thereof.Closed window, for example the window 124 of window panel 120 or the window 134 of maintenance window 130, can comprise any suitable material and combination of materials.According to each embodiment of the gas closed component of this instruction, closed window can comprise transparent and trnaslucent materials.In each embodiment of gas closed component, closed window can comprise material based on silica (such as but not limited to, such as glass and quartz) and various types of material based on polymer (such as but not limited to, such as various other Merlon of level, acrylic acid and vinyl materials).One of ordinary skill in the art will appreciate that, the various compounds of example window material and combination thereof also can be used as the transparent and trnaslucent materials according to this instruction.

In Fig. 5, for framing component assembly 200, can find out can there is the gloves port with cover cap 150 by easy-off maintenance window panel 130.Although show in Fig. 3 that all gloves ports have outward extending gloves, as shown in Figure 5, according to terminal use, whether need the long-range inside that approaches gas closed component, gloves port also can be by cover cap.As each embodiment at the cover assembly as shown in Fig. 6 A-7B is made as when terminal use does not use gloves, cover cap is latched on gloves securely, and is made as simultaneously and when terminal use wishes to use gloves, is convenient to approach.

In Fig. 6 A, show cover cap 150, it can have inner surface 151, outer surface 153 and can the side 152 of fixed wheel exterior feature for grasping.Three shoulder screws 156 extend from the edge 154 of cover cap 150.As shown in Figure 6B, each shoulder screw is arranged in edge 154, makes shank 155 154 extend setpoint distances from edge, thus head 157 joining edge 154 not.In Fig. 7 A-7B, gloves port hardware assembly 160 can be modified to provide cover assembly, it comprise for locking device pressurized when thering is normal pressure with respect to locking device outside the locking mechanism of cover cap gloves port.

For each embodiment of the gloves port hardware assembly 160 of Fig. 6 A, buckle clamping can be so that cover cap 150 be enclosed on gloves port hardware assembly 160, and provides terminal use to be easy to approach the quick connection design of gloves simultaneously.Overlooking in enlarged drawing of the gloves port hardware assembly 160 shown in Fig. 7 A, gloves port assembly 160 can comprise rear plate 161 and header board 163, and header board 163 has for threaded screws head 162 and the flange 164 of gloves are installed.On flange 164, show snap lock latch 166, it has groove 165, for receiving the shoulder screw head 157 (Fig. 6 B) of shoulder screw 156.Each shoulder screw 156 can align and engage with each in the snap lock latch 166 of gloves port hardware assembly 160.The groove 168 of snap lock latch 166 has the opening 165 that is positioned at place, one end and the locking recess 167 that is positioned at the other end place of groove 168.Once each shoulder screw head 157 inserts in each opening 165, cover cap 150 is just rotatable, until the end near locking recess 167 of shoulder screw head adjacent channels 168.Sectional view shown in Fig. 7 B shows the lock-in feature for cover cap gloves when gas closed component system is used.During use, the internal gas pressure of the inert gas in locking device is than the large set amount of pressure of gas closed component outside.Normal pressure can be filled gloves (Fig. 3), thus at gloves between the operating period of the gas closed component of this instruction during in cover cap 150 lower compression, shoulder screw head 157 moves in locking recess 167, thereby guarantees that gloves port window will be by cover cap reliably.Yet terminal use can grasp cover cap 150 for the side 152 grasping by fixed wheel is wide, and easily departs from the cover cap being fastened in snap lock latch when not using.Rear plate 161 and 163, two plates of the header board on the outer surface of window 134 that Fig. 7 B also shows on the inner surface 131 of window 134 all have O-ring packing 169.

As discussed in the following instruction of Fig. 8 A-9B, combine each embodiment of gas-tight seal gas closed component of the air-sensitive process that is provided for needing inert environments of portion's section panel frame seal of wall and top board framing component seal and airtight body.Contribute to provide the parts of the reactive materials of remarkable low concentration and the gas closed component of remarkable low particle environment and system to include but not limited to, gas-tight seal gas closed component and efficient gas circulation and particle filter system, comprise pipe-line system.Be provided for the effective gas-tight seal of gas closed component and may have challenge; Especially when three framing components form three plane ties together.Thereby three plane ties are sealed in that be provided for can be through building and the gas-tight seal aspect of the easy installation of the gas closed component of destructing circulation assembly and disassembly has difficult especially challenge.

In this respect, according to each embodiment of the gas closed component of this instruction, by effective gasket seal of joint and at load bearing, build the gas-tight seal of gas closed component that parts provide effective gasket seal to provide to build completely and system around.Different from conventional joint sealing, according to the joint sealing of this instruction: 1) be included in top and bottom terminal frame joint joint portion (at this place, three framing components are combined) the consistent parallel aligned of the pad section of locating adjacency and vertical orientated pad length, thereby avoid the alignment of angle seam and sealing, 2) be provided for forming along the whole width of joint the length of adjacency, thereby the sealing contact surface that increases by three places, plane tie joint portion is long-pending, 3) be designed with backing plate, described backing plate vertically provides consistent compression stress with level and top with bottom three plane tie gasket seals along all.In addition, the selection of gasket material can affect the validity that provides gas-tight seal, and this will be in subsequent discussion.

Fig. 8 A-8C be illustrate conventional three plane ties sealings with according to the schematic top plan view of the contrast of the three plane ties sealings of this instruction.According to each embodiment of the gas closed component of this instruction, can have such as but not limited to, at least four wall framing components, top board framing component and dishes, its can be combined to form gas closed component, thereby produce need gas-tight seal a plurality of vertically, level and three plane ties.In Fig. 8 A, the schematic top plan view of conventional three gasket seals is formed by the first pad I, and the first pad I is vertical orientated with pad II in X-Y plane.As shown in Figure 8 A, in X-Y plane, by vertical orientated being sewn on of forming, between two sections, there is the contact length W being limited by gasket width size ₁.In addition, the terminal part of pad III (at vertical direction and pad I and the vertical orientated pad of pad II) can be in abutting connection with pad I and pad II, as shown in by shade.In Fig. 8 B, the schematic top plan view of conventional three plane tie gasket seals is formed by the first pad length I, and the first pad length I is vertical with the second pad length II, and has 45 ° of seam faying faces of two length, wherein, be sewn on and between two sections, there is the contact length W that is greater than gasket material width ₂.Be similar to the configuration of Fig. 8 A, in the end of the vertical direction pad III vertical with pad II with pad I, dividing can be in abutting connection with pad I and pad II, as shown in by shade.Suppose that gasket width is identical in Fig. 8 A and Fig. 8 B, the contact length W of Fig. 8 B ₂be greater than the contact length W of Fig. 8 A ₁.

Fig. 8 C is according to the schematic top plan view of the three plane tie gasket seals of this instruction.The first pad length I can have the pad section I' perpendicular to the direction formation of pad length I, wherein, the length that pad section I' has can be approximately the size of the width of combined structure member, for example, be used to form high or 4 " wide * 4 " the high metal tube in 4 " wide * 2 " of each wall framing component of gas closed component of this instruction.Pad II is vertical with pad I in X-Y plane, and has pad section II', and the stacked length of pad section II' and pad section I' is approximately the width of combined structure member.The width of pad section I' and II' is the width of selected compressible pad sheet material.Pad III is vertically vertical orientated with pad I and pad II.Pad section III' is that the end of pad III is divided.Pad section III' is vertical orientated and form by the vertical length of pad section III' and pad III.Pad section III' can form and make it have the length approximately identical with pad section I' and II', and to have be the width of selected sealant compressible shim material thickness.In this respect, the contact length W of the alignment of three shown in Fig. 8 C section ₃be greater than and there is respectively W ₁and W ₂fig. 8 A or Fig. 8 B shown in the sealing of conventional delta connection.

In this respect, according to the three plane tie gasket seals of this instruction, at terminal fitting joint portion place, form the consistent parallel aligned (otherwise by being pad from its vertical alignment, as shown in the situation of Fig. 8 A and Fig. 8 B) of pad section.This consistent parallel aligned of three plane tie gasket seal sections strides across described section and applies consistent transverse sealing power, with the top of joint and airtight three plane ties of bottom corners that promote to be formed by wall framing component, seals.In addition, each section of the consistent alignment pad section of each three plane tie sealing is selected to the width that is approximately combined structure member, thereby the Maximum Contact length of consistent alignment section is provided.In addition, according to the joint sealing of this instruction, be designed with backing plate, described backing plate along build joint all vertically, level and three gasket seals provide consistent compression stress.Evincible, select the gasket material width of three sealings of routine for the example of Fig. 8 A and Fig. 8 B is provided can be at least the width of combined structure member.

The exploded perspective of Fig. 9 A illustrated before all framing components are combined according to the black box 300 of this instruction, thereby pad shows in uncompressed state.In Fig. 9 A, at all parts from gas closed component, build the first step of gas locking device, a plurality of wall framing components, for example wall framework 310, wall framework 350 and top board framework 370, can be by sealably combination.Once be to provide gas closed component according to the framing component sealing of this instruction, build the pith that is just hermetically sealed and provides the sealing that can implement through structure and the destructing circulation of gas closed component completely.Although the example providing is the part for sealing gas closed component, it will be appreciated by the skilled addressee that this instruction is applicable to any whole in the gas closed component of this instruction in the following instruction of Fig. 9 A-9B.

The first wall framework 310 shown in Fig. 9 A can have medial surface 311, the vertical side 314 that backing plate 312 is installed and the top surface 315 that backing plate 316 is installed.The first wall framework 310 can have the first pad 320, the first pads 320 and is arranged in the space being formed by backing plate 312 and adheres to the space being formed by backing plate 312.In the first pad 320 is arranged on the space being formed by backing plate 312 and adhere to the vertical length of extensible the first pad 320 in gap 302 staying after the space that formed by backing plate 312, as shown in Figure 9 A.As shown in Figure 9 A, submissive pad 320 can be arranged in the space being formed by backing plate 312 and adhere to the space being formed by backing plate 312, and can have vertical pad length 321, curve pad length 323 and planar shape is in 90 ° and end at the pad length 325 of the vertical side 314 of wall framework 310 with vertical pad length 321 on inner frame member 311.In Fig. 9 A, the first wall framework 310 can have the top surface 315 that backing plate 316 is installed, thereby forms space on surface 315, and the second pad 340 is arranged in described space and the inward flange 317 of close wall framework 310 adheres to described space.In the second pad 340 is arranged on the space being formed by backing plate 316 and adhere to the horizontal length of extensible the second pad 340 in gap 304 staying after the space that formed by backing plate 316, as shown in Figure 9 A.In addition,, as shown in hacures, the length 345 of pad 340 and the length 325 of pad 320 are as one man parallel and align adjacently.

The second wall framework 350 shown in Fig. 9 A can have external frame side 353, vertical side 354 and the top surface 355 of backing plate 356 is installed.The second wall framework 350 can have the first pad 360, the first pads 360 and is arranged in the space being formed by backing plate 356 and adheres to the space being formed by backing plate 356.In the first pad 360 is arranged on the space being formed by backing plate 356 and adhere to the horizontal length of extensible the first pad 360 in gap 306 staying after the space that formed by backing plate 356, as shown at Fig. 9 A.As shown in Figure 9 A, submissive pad 360 can have vertical length 361, length of curve 363 and planar shape is in 90 ° and end at the length 365 of outer frame members 353 with top surface 355.

As shown in the decomposition diagram of Fig. 9 A, the inner frame member 311 of wall framework 310 can be attached to the vertical side 354 of wall framework 350 to form a structure joint of gas closed frame assembly.Sealing about the structure joint of such formation, in each embodiment of the gasket seal of locating according to the terminal fitting joint portion of the wall framing component of this instruction, as shown in Figure 9 A, the length 325 of pad 320 is, all adjacently and as one man alignment of the length 345 of the length 365 of pad 360 and pad 340.In addition, as described in more detail subsequently, each embodiment of the backing plate of this instruction can be provided for gas-tight seal instruction gas closed component each embodiment compressible pad sheet material about 20% to the consistent compression between about 40% deflection.

Fig. 9 B show all framing components in conjunction with after according to the black box 300 of this instruction, thereby pad is shown as in compressive state.Fig. 9 B shows the perspective view of details of the corner sealing of three plane ties that place, top terminals joint joint portion between the first wall framework 310, the second wall framework 350 and top board framework 370 (illustrating with imaginary drawing) forms.As shown in Fig. 9 B, the pad space being limited by backing plate can be defined as certain width, thereby after in conjunction with wall framework 310, wall framework 350 and top board framework 370; As shown in imaginary drawing, be used to form vertically, the compressible pad sheet material of level and three gasket seals about 20% to the consistent compression between about 40% deflection, guarantee can provide gas-tight seal at the gasket seal at all surface place of the joint of wall framing component sealing.In addition, pad gap 302,304 and 306 (not shown) be sized to make compressible pad sheet material about 20% to the optimal compression between about 40% deflection, each pad can joint sheet gap, as in Fig. 9 B for as shown in pad 340 and pad 360.Thereby, except providing consistent compression by limiting the space of each pad setting and adhesion, be designed to provide each embodiment of the backing plate in gap also to guarantee that each compression gasket can comply with in the space being limited by backing plate, and can with the mode that will form leakage paths in compressive state wrinkling or protuberance or be otherwise shaped brokenly.

According to each embodiment of the gas closed component of this instruction, various types of section panels all can be used the sealant compressible shim material seal being arranged on each panel part segment frames.Integration Framework member gasket seal, can provide the gas-tight seal gas closed component seldom or do not have with Leakage Gas for form position and the material of the sealant compressible shim of sealing between each section panel and panel part segment frames.In addition, for all types of panels (for example, the insertion panel 110 of Fig. 5, window panel 120 and can easy-off maintenance window 130) Seal Design can provide afterwards durable panel sealing in this panel repeated removal and installation (may need in order to approach gas closed component inside, for example, in order to safeguard).

For example, Figure 10 A shows maintenance window panel part section 30 and exploded view that can easy-off maintenance window 130.As mentioned before, can manufacture can easy-off maintenance window 130 for receiving for maintenance window panel part section 30.For each embodiment of gas closed component, such as the panel part section of detachable maintenance surface board section 30, can there is panel part segment frames 32 and be arranged on the sealant compressible shim 38 on panel part segment frames 32.In each embodiment, can make terminal use be convenient to install and again install with fastening can easy-off maintenance window 130 relevant hardware in detachable maintenance window panel part section 30, and while guaranteeing in the terminal use who can easy-off maintenance window 130 directly approaches as required gas closed component inside by needs installs and is again arranged on panel part section 30, guarantee the sealing of airtight body simultaneously.Can comprise rigidity window frame 132 by easy-off maintenance window 130, it can be built by the metal tube material described in any framing component such as but not limited to for this instruction of structure.Maintenance window 130 can be used snap action securing hardware, such as but not limited to acting in opposition toggle clamp 136, to make terminal use be convenient to dismounting and installation and maintenance window 130 again.The gloves port hardware assembly 160 of earlier figures 7A-7B has been shown in Figure 10 A, has shown 3 snap lock latch 166 in groups.

As shown in the front view of the detachable maintenance window panel part section 30 of Figure 10 A, can there are four toggle clamps 136 in groups that are fastened on window frame 132 by easy-off maintenance window 130.Maintenance window 130 can be positioned in panel part segment frames 30 and limits distance, for guaranteeing the suitable compression stress against pad 38.Use four window guiding pads 34 in groups, as shown in Figure 10 B, it can be arranged in each bight of panel part section 30, for locating maintenance window 130 in panel part section 30.Each in clamping plate 36 can be configured to receive acting in opposition toggle clamp 136 that can easy-off maintenance window 136 in groups.According to each embodiment of the gas-tight seal maintenance window 130 for through installation and removal circulation, the mechanical strength of maintenance window framework 132 and maintenance window 130 with respect to the restriction position (by becoming group window guiding pad 34 to provide) of sealant compressible shim 38 once put in place in conjunction with guaranteeing that maintenance window 130 is fastening, such as but not limited to use, be fastened on the acting in opposition toggle clamp 136 in corresponding clamping plate 36, maintenance window framework 132 just can provide uniform power with limiting compression (setting by becoming group window guiding pad 34) on panel part segment frames 32.This group window guiding pad 34 is located so that the compression stress of window 130 on pad 38 deflection sealant compressible shim 38 between about 20% to about 40%.In this respect, the manufacture of the structure of maintenance window 130 and panel part section 30 is provided for the sealing of the airtight body of maintenance window 130 in panel part section 30.As mentioned before, window folder 35 can be arranged in panel part section 30 after maintenance window 130 is fastened in panel part section 30, and dismounting when maintenance window 130 need to be dismantled.

Acting in opposition toggle clamp 136 can use any appropriate means and means combination to be fastened to can easy-off maintenance window framework 132.The example of spendable suitable fastener means comprise at least one adhesive (such as but not limited to, epoxy resin or cement), at least one bolt, at least one screw, at least one other securing member, at least one groove, at least one track, at least one weld part and combination thereof.Acting in opposition toggle clamp 136 can be directly connected to dismountable maintenance window framework 132 or indirectly connect by adaptor plate.Acting in opposition toggle clamp 136, clamping plate 36, window guiding pad 34 and window folder 35 can be built by any suitable material and combination of materials.For example, one or more this elements can comprise at least one metal, at least one pottery, at least one plastics and combination thereof.

Can easy-off maintenance window except sealing, the sealing of airtight body also can be provided for inserting panel and window panel.Portion's section panel of other type that can repeatedly mount and dismount in panel part section comprises such as but not limited to the insertion panel 110 shown in Fig. 5 and window panel 120.In Fig. 5, can find out, the panel frame 122 of window panel 120 builds similarly with insertion panel 110.Thereby, according to each embodiment of gas closed component, can be identical for receiving the manufacture of the panel part section of inserting panel and window panel.The sealing of in this respect, inserting panel and window panel can be used same principle to implement.

With reference to Figure 11 A and Figure 11 B, and according to each embodiment of this instruction, any panel of gas locking device (for example, the gas closed component 100 of Fig. 1) can comprise one or more inserting surface board sections 10, and it can have the framework 12 that is configured to receive corresponding insertion panel 110.Figure 11 A refers to the perspective view of the amplifier section shown in 11B of publishing picture.In Figure 11 A, insert panel 110 and be depicted as with respect to inserting framework 12 location.In Figure 11 B, can find out, insert panel 110 and be bonded to framework 12, wherein, framework 12 can for example be built by metal.In certain embodiments, metal can comprise aluminium, steel, copper, stainless steel, chromium, alloy and combination thereof etc.A plurality of blind screwed holes 14 can form in inserting surface board segment frames 12.Panel part segment frames 12 is built into be included in the pad 16 inserting between panel 110 and framework 12, and sealant compressible shim 18 can be arranged on wherein.Blind hole 14 can be M5 type.Screw 15 can be received by blind hole 14, thereby is inserting compression gasket 16 between panel 110 and framework 12.Once put in place against pad 16 is fastening, insert panel 110 just in the sealing of inserting surface board section 10 interior formation airtight bodies.As mentioned before, this panel sealing can be implemented various portions section panel, includes but not limited to the insertion panel 110 shown in Fig. 5 and window panel 120.

According to each embodiment of the sealant compressible shim according to this instruction, compressible pad sheet material for framing component sealing and panel sealing is optional from various compressible polymeric materials, such as but not limited to any in closed cell (cell) polymeric material classification, this area is also referred to as expanded rubber material or inflated polymer material.Prepared by the mode that in brief, closed cell polymer is enclosed in separate unit with gas; Wherein each separate unit is sealed by polymeric material.The attribute of compressible closed cell polymeric pad sheet material that is expected to be useful in the airtight body sealing of framework and panel component includes but not limited to, they are healthy and strong to the chemical attack of the chemical substance of wide region, there is extraordinary moisture barrier attribute, in wide temperature range, be resilient, and resist permanent compressive deformation (set).Generally speaking, compare with open cells topology convergence material, closed cell polymeric material has high dimension stability, compared with low moisture absorption coefficient and higher-strength.The various types of polymeric materials that can be made into closed cell polymeric material comprise such as but not limited to silicone (silicone), neoprene, ethylene-propylene-diene terpolymer (EPT) (polymer and the compound that use ternary ethylene rubber (EPDM) to make), ethene nitrile, butadiene-styrene rubber (SBR) and various copolymer and blend.

The expectation material properties of closed cell polymer only remains intact during use while can't harm and keeps in the unit that forms block materials.In this respect, take and can for example, over the mode of establishing specified material specification (, surpassing the specification of using in assigned temperature or compression zone) as closed cell polymer, use this material can cause the degraded of gasket seal.In each embodiment of the closed cell polymer pad of the portion's section panel for seal frame member and framework panel part section, the compression of this material should be no more than about 50% between about 70% deflection, and for optimum performance can be about 20% between about 40% deflection.

Except closed cell compressible pad sheet material, have for building according to other another example of the sealant compressible shim material type of the expectation attribute of the embodiment of the gas closed component of this instruction and comprise hollow extrusion removing from mould sealant compressible shim material classification.Hollow extrusion removing from mould gasket material has expectation attribute as material classification, include but not limited to, they are healthy and strong to the chemical attack of wide region chemical substance, have extraordinary moisture barrier attribute, in wide temperature range, be resilient, and it resist permanent compressive deformation.This hollow extrusion removing from mould compressible pad sheet material can occur with the various form factors of wide region, such as but not limited to, any in U-shaped unit, D shape unit, rectangular cells, rectangular element and various conventional shape factor hollow extrusion removing from mould gasket material.Various hollow extrusion removing from mould gasket materials can be by making for the polymeric material of closed cell sealant compressible shim manufacture.Such as but not limited to, each embodiment of hollow extrusion removing from mould pad can be made by silicone, neoprene, ethylene-propylene-diene terpolymer (EPT) (polymer and the compound that use ethylene propylene diene rubber (EPDM) to make), ethene nitrile, butadiene-styrene rubber (SBR) and various copolymer thereof and blend.The compression of this hollow unit gasket material should be no more than about 50% deflection, to keep expectation attribute.

Those of ordinary skill in the art can easily understand, although closed cell sealant compressible shim material classification and hollow extrusion removing from mould sealant compressible shim material classification are given as examples, any compressible pad sheet material with expectation attribute all can be used for sealing structure member (for example various walls and top board framing component) that this instruction provides and each panel in sealing surface board segment frames.

Can build gas closed component from a plurality of framing components, for example the gas closed component 100 of Fig. 3 and Fig. 4 or as by the gas closed component 1000 of Figure 23 of subsequent discussion and Figure 24, so that minimize damage system unit (such as but not limited to, gasket seal, framing component, pipeline and portion's section panel) risk.For example, gasket seal is can be easy to the parts of damage during building gas locking device from a plurality of framing components.According to each embodiment of this instruction, materials and methods is arranged to minimize or eliminate the risk of damaging all parts of gas closed component during building according to the gas locking device of this instruction.

Figure 12 A is the perspective view such as the structure starting stage of the gas closed component of the gas closed component 100 of Fig. 3.Although the structure such as the gas closed component of gas closed component 100 for the gas closed component of this instruction of illustration, those of ordinary skill can recognize, this instruction is applicable to each embodiment of gas closed component.As shown at Figure 12 A, during the starting stage of the structure of gas closed component, first a plurality of cushion blocks are placed on the dish 204 being supported by base portion 202.Cushion block can be thicker than the compressible pad sheet material being arranged on each wall framing component being installed on dish 204.A series of cushion blocks can be placed on the position on dish 204 periphery edge, in described position, can be placed on a series of cushion blocks and near the position of dish 204, and do not contact with dish 204 at each wall framing component of assembly process gas closed component.Expectation is can protect the compressible pad sheet material (for the object with dish 204 sealings) to being arranged on each wall framing component not to be subject to the mode of any infringement to assemble each wall framing component on dish 204.Thereby, in order to form gas-tight seal object with dish 204, use cushion block (each Wall board parts can be placed on the initial position on dish 204 on cushion block) to prevent from making the compressible pad sheet material being arranged on each wall framing component to be subject to any infringement.Such as but not limited to, as shown in Figure 12 A, anterior periphery edge 201 can have pad 93,95 and 97, and front walls framing component can be sat and put on pad 93,95 and 97; Right periphery edge 205 can have pad 89 and 91, and right side wall framing component can be sat and put on pad 89 and 91; And rear portion periphery edge 207 can have two pads, rear wall framework pad can be sat and put thereon, wherein shows pad 87.Can use any quantity, type and the combination of cushion block.It will be appreciated by the skilled addressee that according to this instruction, cushion block can be positioned on dish 204, although the cushion block of each the not shown uniqueness in Figure 12 A-Figure 14 B.

For from component framework Components Composition gas locking device according to the exemplary cushion block of each embodiment of this instruction shown in Figure 12 B, it is the perspective view of irising out the 3rd cushion block 91 shown in part at Fig. 9 A.Exemplary cushion block 91 can comprise the cushion block band 90 of the transverse side 92 that is attached to cushion block.Cushion block can be made by any suitable material and combination of materials.For example, each cushion block can comprise the polyethylene of super high molecular weight.Cushion block band 90 can be made by any suitable material and combination of materials.In certain embodiments, cushion block band 90 comprises nylon material, poly-alkylene material etc.Cushion block 91 has top surface 94 and basal surface 96.Cushion block 87,89,93,95,97 and any other cushion block of using can be with identical or similar physical attribute configuration, and can comprise identical or similar material.Cushion block can be to allow the stable periphery top edge that is placed into dish 204 easy-to-dismount mode sit and put, clamp or otherwise easily arrange.

In the decomposition diagram providing at Figure 13, framing component can comprise being attachable to sit puts front walls framework 210, left side wall framework 220, right side wall framework 230, rear wall framework 240 and top board or the top frame 250 on the dish 204 on base portion 202.OLED print system 50 can be arranged on dish 204 tops.

According to the OLED print system 50 of each embodiment of the gas closed component of this instruction and system, for example can comprise: granite base portion; Can support the movable bridge of OLED printing equipment; The one or more devices and the equipment that from each embodiment of pressurized inert gas recirculating system, extend, for example, substrate suspending bench, air bearing, track, guide rail; For OLED film formation material is deposited on to the inkjet printer system on substrate, comprise OLED China ink supply subsystem and ink jet-print head; One or more robots etc.Provide all parts that can comprise OLED print system 50, each embodiment of OLED print system 50 can have various occupied areas and form factor.

OLED ink-jet print system can comprise some devices and the equipment that allows ink droplet to be reliably arranged on ad-hoc location on substrate.These devices and equipment can include but not limited to, print head assembly, black induction system, kinematic system, such as base plate supports equipment, substrate loading and unloading system and the head maintenance system of suspending bench or chuck (chuck).Print head assembly comprises at least one ink gun, with at least one aperture that ink droplet can be sprayed with controllable rate, speed and size.Ink gun is supplied with by ink supply system, and ink supply system offers ink gun by China ink.Printing need to be between print head assembly and substrate relative motion.This completes by means of kinematic system, normally portal frame or declutch shaft XYZ system.Print head assembly can move (portal frame type) on fixing base, or in the situation that declutch shaft configures, printhead and substrate both can move.In another embodiment, printing station can be fixed, and substrate can move with respect to printhead along X and Y-axis, and Z axis motion provides at substrate or printhead place.When printhead moves with respect to substrate, ink droplet sprays to be deposited on the desired locations on substrate in orthochronous.Substrate uses substrate loading and unloading system insert printer and remove from printer.According to printer configuration, this can complete with mechanical conveyer, substrate suspending bench or the robot with end effector.Head maintenance system can comprise some subsystems, and it allows such as the scraping on drop volume demarcation, inkjet nozzle surface, perfusion China ink is ejected into the maintenance task in useless pond.

According to for assembling each embodiment of this instruction of gas locking device, anterior or the first wall framework 210, left side or the second wall framework 220, right side or the 3rd wall framework 230, rear portion or wall framework 250 as shown in figure 13 and top board framework 250 can be with the sequential build of system together, and are then attached to the dish 204 being arranged on base portion 202.Each embodiment of framing component can be used gantry to be positioned on cushion block to prevent from damaging compressible pad sheet material, as mentioned before.For example, use gantry, front walls framework 210 can be sat and put at least three cushion blocks, for example the pad 93,95 and 97 on the periphery top edge 201 of the dish shown in Figure 12 A 204.After front walls framework 210 is placed on cushion block, wall framework 220 and wall framework 230 can be placed on the periphery edge 203 and the cushion block on periphery edge 205 that has been arranged on respectively dish 204 in succession or with any order successively.According to each embodiment of this instruction from component framework Components Composition gas locking device, front walls framework 210 can be placed on cushion block, subsequently left side wall framework 220 and right side wall framework 230 are placed on cushion block, make them put to be connected by bolt in place or be otherwise fastened to front walls framework 210.In each embodiment, rear wall framework 240 can be placed on cushion block, makes it put to be connected by bolt in place or is fastened to left side wall framework 220 and right side wall framework 230.For each embodiment, once wall framing component tightens together to form abuts with wall framework closed component, top top board framework 250 just can be bonded to this wall framework closed component to form complete gas closed frame assembly.For building each embodiment of this instruction of gas closed component, in this assembling stage, complete gas closed frame assembly is sat and is put on a plurality of cushion blocks, to protect the globality of each framing component pad.

As shown in Figure 14 A, for for building each embodiment of this instruction of gas closed component, then gas closed frame assembly 400 can be located so that pad can remove to prepare gas closed frame assembly 400 is attached to dish 204.Figure 14 A shows and uses lifter assembly 402, lifter assembly 404 and lifter assembly 406 to be increased to the gas closed frame assembly 400 that promotes and leave the position of cushion block from cushion block.In each embodiment of this instruction, lifter assembly 402,404 and 406 can be attached around at the periphery of gas closed frame assembly 400.After lifter assembly is attached, the gas closed frame assembly building completely can be by activating each lifter assembly to raise or to stretch out each lifter assembly and lift from cushion block, thus rising gas closed frame assembly 400.As shown in Figure 14 A, gas closed frame assembly 400 is shown as and is thus lifted to previous seat and puts a plurality of cushion blocks top thereon.Then described a plurality of cushion block can be removed from its seat seated position of coiling 204, thereby then framework can be reduced on dish 204 and then be attached to dish 204.

Figure 14 B is according to the exploded view of each embodiment of the lifter assembly of this instruction and the identical lifter assembly 402 as shown in Figure 11 A.As shown in the figure, lifter assembly 402 comprises wear prevention pad 408, installing plate 410, first clamp bearing 412 and second clamp bearing 413.First clamp 414 and second clamp 415 are shown as with corresponding clip bearing 412 and 413 and are in line.Jack crank 416 is attached to the top of very heavy apical axis 418.Trailer (trailer jack) jack 520 is shown as perpendicular to very heavy apical axis 418 and is attached to very heavy apical axis 418.Jack base portion 422 is shown as a part for the bottom of very heavy apical axis 418.Below jack base portion 422, be foot abutment 424, it is configured to receive the bottom of very heavy apical axis 418 and can be connected thereto.Smoothing foot 426 is also illustrated and is configured to be received by foot abutment 424.Those of ordinary skills can easily recognize, any means that are suitable for lifting operation all can be used for from cushion block rising gas closed frame assembly, thereby cushion block can be removed and intact gas closed component can be reduced on dish.For example, replace the one or more lifter assemblies such as 402,404 and 406, can use hydraulic pressure, pneumatic or electric hoist device.

According to for building each embodiment of this instruction of gas closed component, a plurality of securing members can provide and be configured to described a plurality of framing components are tightened together, and then gas closed frame assembly are fastened to dish.Described a plurality of securing member can comprise along each edge of each framing component be arranged on respective frame member be configured to a plurality of framing components in one or more securing member parts of position of adjacent frame bar-crossing.Described a plurality of securing member and sealant compressible shim can be configured to make, and when framing component combines, sealant compressible shim arranges near inside and hardware close outside, thereby hardware can not provide a plurality of leakage paths of the airtight body closed component of this instruction.

Described a plurality of securing member can comprise along a plurality of bolts at the edge of one or more framing components and along a plurality of screwed holes at the edge of the one or more different frames members in a plurality of framing components.Described a plurality of securing member can comprise a plurality of nut set bolts.Described bolt can comprise the bolt head that extends the outer surface that leaves the corresponding panel.Bolt can sink in the recess in framing component.Clip, screw, rivet, adhesive and other securing member can be used for framing component to tighten together.The extensible outer wall by one or more framing components of bolt or other securing member and entering in the sidewall or the screwed hole in roof or other complementary fasteners feature of one or more adjacent frame members.

As shown in Figure 15-17, for each embodiment that builds the method for gas locking device, pipe-line system can be arranged on by wall framework and top board framing component in conjunction with and in the interior section that forms.For each embodiment of gas closed component, pipe-line system can be installed during building processing.According to each embodiment of this instruction, pipe-line system can be arranged in the gas closed frame assembly being built by a plurality of framing components.In each embodiment, pipe-line system can be at a plurality of framing components in conjunction with being arranged on a plurality of framing components before forming gas closed frame assembly.The roughly all gas that can be configured to make to be drawn into pipe-line system from one or more pipe-line system entrances for the pipe-line system of each embodiment of gas closed component and system moves through each embodiment of gas circulation and filtration circuit, for removing the particulate matter of gas closed component inside.In addition, the pipe-line system of each embodiment of gas closed component and system can be configured to the entrance and exit of the gas purification loop of gas closed component outside to separate from gas circulation and filtration circuit, and gas circulation and filtration circuit are for removing the particulate matter in gas closed component.According to each embodiment of the pipe-line system of this instruction, can be made by sheet metal, such as but not limited to the aluminium flake with about 80mil thickness.

Figure 15 shows the right front imaginary perspective view of the pipe-line system assembly 500 of gas closed component 100.Closed pipe system assembly 500 can have front walls panel pipe-line system assembly 510.As shown in the figure, front walls panel pipe-line system assembly 510 can have front walls panel inlet duct 512, the vertical corbel 514 of the first front walls panel and the vertical corbel 516 of the second front walls panel, and it is both communicated with front walls panel inlet duct 512 fluids.The vertical corbel 514 of the first front walls panel is shown as has outlet 515, and outlet 515 sealably engages with the top board pipeline 505 of fan filter unit cover cap 103.In a similar manner, the vertical corbel 516 of the second front walls panel is shown as has outlet 517, and outlet 517 sealably engages with the top board pipeline 507 of fan filter unit cover cap 103.In this respect, front walls panel pipe-line system assembly 510 is provided for using front walls panel inlet duct 512 that the inert gas in gas closed component is indulged to corbel 514 and 516 from bottom cycle by each front walls panel, and respectively air is carried by outlet 505 and 507, thereby air can filter by for example fan filter unit 752.As subsequently, by described in more detail, the quantity of fan filter unit, size and dimension can be selected according to the physical location of the substrate in print system during processing.As the heat exchanger 742 of the part of heat regulating system, near fan filter unit 752, the inert gas that cycles through gas closed component 100 can be remained on to preferred temperature.

Right side wall panel pipe-line system assembly 530 can have right side wall panel inlet duct 532, and it is communicated with right side wall panel upper pipe 538 fluids by the vertical corbel 534 of right side wall panel first and the vertical corbel 536 of right side wall panel second.Right side wall panel upper pipe 538 can have the first entrance end 535 and second pipe outlet end 537, and second pipe outlet end 537 is communicated with rear wall panel upper pipe 536 fluids of rear wall pipe-line system assembly 540.Left side wall panel pipe-line system assembly 520 can have and parts for identical described in right side wall panel assembly 530, wherein, in Figure 15, can obviously see the left side wall panel inlet duct 522 being communicated with left side wall panel upper pipe (not shown) fluid by the vertical corbel 524 of the first left side wall panel and the vertical corbel 524 of the first left side wall panel.Rear wall panel pipe-line system assembly 540 can have rear wall panel inlet duct 542, and rear wall panel inlet duct 542 is communicated with left side wall panel assembly 520 and right side wall panel assembly 530 fluids.In addition, rear wall panel pipe-line system assembly 540 can have rear wall panel bottom pipe 544, and rear wall panel bottom pipe 544 can have rear wall panel the first entrance 541 and rear wall panel the second entrance 543.Rear wall panel bottom pipe 544 can be communicated with rear wall panel upper pipe 536 fluids via the first next door (bulkhead) 547 and the second next door 549, and described next door structure can be for being fed to inside by the various bundles such as but not limited to cable, line and pipeline etc. from the outside of gas closed component 100.Pipeline tapping 533 is provided for the bundle of cable, line and pipeline etc. to shift out rear wall panel upper pipe 536, and it can be via next door 549 through upper pipe 536.547He next door, next door 549 can externally above be used detachable insertion panel gas-tight seal, as mentioned before.Rear wall panel upper pipe by ventilating opening 545 (an one bight has been shown in Figure 15) with such as but not limited to fan filter unit 754 fluids, be communicated with.In this respect, left side wall panel pipe-line system assembly 520, right side wall panel pipe-line system assembly 530 and rear wall panel pipe-line system assembly 540 are provided for the inert gas in gas closed component from bottom cycle, use respectively Wall board inlet duct 522,532 and 542 and front panel lower pipeline 544, it is communicated with ventilating opening 545 fluids by aforesaid each vertical corbel, pipeline, septal canal etc., thereby air can filter by for example fan filter unit 754.As the heat exchanger 744 of the part of heat regulating system, near fan filter unit 754, the inert gas that cycles through gas closed component 100 can be remained on to preferred temperature.

In Figure 15, the cable showing by opening 533 is fed to.As described in more detail subsequently, each embodiment of the gas closed component of this instruction is provided for making the bundle of cable, line and pipeline etc. to pass through pipe-line system.In order to eliminate the leakage paths forming at this bundle around, can use for using each method of different size cable, line and the pipeline of compliant materials sealed beam.In Figure 15, also show pipe I and pipe II for closed pipe system assembly 500, it is shown as a part for fan filter unit cover cap 103.Pipe I provide the inert gas outlet to extraneous gas cleaning system, and pipe II provides to the gas circulation of gas closed component 100 inside and the purification inert gas in particle filtering loop and returns.

In Figure 16, show the top imagination perspective view of closed pipe system assembly 500.Can find out the symmetric property of left side wall panel pipe-line system assembly 520 and right side wall panel pipe-line system assembly 530.For right side wall panel pipe-line system assembly 530, right side wall panel inlet duct 532 is communicated with right side wall panel upper pipe 538 fluids by the vertical corbel 534 of right side wall panel first and the vertical corbel 536 of right side wall panel second.Right side wall panel upper pipe 538 can have the first entrance end 535 and second pipe outlet end 537, and this second pipe outlet end 537 is communicated with rear wall panel upper pipe 536 fluids of rear wall pipe-line system assembly 540.Similarly, left side wall panel pipe-line system assembly 520 can have left side wall panel inlet duct 522, and left side wall panel inlet duct 522 is communicated with left side wall panel upper pipe 528 fluids by the vertical corbel 524 of left side wall panel first and the vertical corbel 526 of left side wall panel second.Left side wall panel upper pipe 528 can have the first entrance end 525 and second pipe outlet end 527, and this second pipe outlet end 527 is communicated with rear wall panel upper pipe 536 fluids of rear wall pipe-line system assembly 540.In addition, rear wall panel pipe-line system assembly can have rear wall panel inlet duct 542, and rear wall panel inlet duct 542 is communicated with left side wall panel assembly 520 and right side wall panel assembly 530 fluids.In addition, rear wall panel pipe-line system assembly 540 can have rear wall panel bottom pipe 544, and rear wall panel bottom pipe 544 can have rear wall panel the first entrance 541 and rear wall panel the second entrance 543.Rear wall panel bottom pipe 544 can be communicated with rear wall panel upper pipe 536 fluids via the first next door 547 and the second next door 549.Pipe-line system assembly 500 shown in Figure 15 and Figure 16 can provide inert gas from the Efficient Cycle of anterior Wall board pipe-line system assembly 510 (it is recycled to top board panel pipeline 505 and 507 via front walls panel outlet 515 and 517 by inert gas respectively from anterior Wall board inlet duct 512) and from left side wall panel assembly 520, right side wall panel assembly 530 and rear wall panel pipe-line system assembly 540 (its by air respectively from inlet duct 522, 532 and 542 are recycled to ventilating opening 545) Efficient Cycle.Once inert gas via top board panel pipeline 505 and 507 and ventilating opening 545 be discharged to the closed area under the fan filter unit cover cap 103 of locking device 100, the inert gas of discharging so just can be by fan filter unit 752 and 754 filtrations.In addition, the inert gas of circulation can remain on preferred temperature by the heat exchanger 742 and 744 of the part as heat regulating system.

Figure 17 is the imaginary upward view of closed pipe system assembly 500.Inlet duct system component 502 comprises front walls panel inlet duct 512, left side wall panel inlet duct 522, right side wall panel inlet duct 532 and the rear wall panel inlet duct 542 of fluid communication with each other.Each inlet duct comprising for inlet duct system component 502, existence is along the equally distributed obvious opening of each duct bottom, opening is by lay special stress in groups, for the object of this instruction, as the opening 511 of front walls panel inlet duct 512, the opening 521 of left side wall panel inlet duct 522, the opening 541 of the opening 531 of right side wall panel inlet duct 532 and right side wall panel inlet duct 542.Bottom across each inlet duct can see, this opening is provided for the effective absorption of inert gas in locking device 100, for continuous circulation and filtration.The continuous circulation of the inert gas of each embodiment of gas closed component and filter is provided for keeping the environment that roughly there is no particle in each embodiment of gas closed component system.Each embodiment of gas closed component system can remain on 4 grades of ISO 14644 for particulate matter.Each embodiment of gas closed component system can remain on 3 grades of specifications of ISO 14644 for the responsive especially process of particle contamination.As mentioned before, pipe I provide the inert gas outlet to extraneous gas cleaning system, and pipe II provides to the filtration of gas closed component 100 inside and the purification inert gas of closed circuit and returns.

According in each embodiment of the gas closed component of this instruction and system, electrical system, mechanical system, fluid system and cooling system that the Shu Keyu of cable, line and pipeline etc. is arranged in gas closed component and internal system are operationally associated, for example, for the operation of OLED print system.This bundle can be fed to by pipeline, for example, to purge the reactive ambient gas in the dead band of the bundle be trapped in cable, line and pipeline etc., steam and oxygen.According to this instruction, have been found that the dead band that forms forms the reservoir of the reactive materials of holding back in the bundle of cable, line and pipeline, it can extend significantly and makes gas closed component meet the required time of specification of execution air-sensitive process.For for printing the gas closed component of this instruction and each embodiment of system of OLED device, various reactive materials (comprise various reactive ambient gas, for example steam and oxygen, and organic solvent steam) in every kind of material for example all can remain on 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.

For the cable of understanding by pipeline is fed to the required time of reactive ambient gas that can how to cause minimizing to be held back from the dead volume purging of the cable that ties in, line and pipeline etc., with reference to figure 18A-19.Figure 18 A shows the enlarged drawing of bundle I, and bundle I can be the bundle that can comprise pipeline, for example, and for various China inks, solvent etc. being flowed to the pipeline A such as the print system of the print system 50 of Figure 13.The bundle I of Figure 18 A also can comprise such as the electric wire of electric wire B or such as the cable of coaxial cable C.Together with this pipeline, line and cable can tie in and from outside, route to inner to be connected to various devices and the equipment that comprises OLED print system.Shadow region at Figure 18 A can find out, this bundle can form a large amount of dead band D.In the perspective schematic view of Figure 18 B, when cable, line and bale of pipeline I are fed to by pipeline II, inert gas III is inswept bundle serially.How the amplification sectional view of Figure 19 can increase the speed of removing the reactive materials of holding back from the dead volume of this intrafascicular formation effectively if showing the inert gas of the inswept pipeline that ties in, line and cable continuously.The reactive species concentrations that reactive materials A leaves (representing by the overall area being occupied by inert gas substance B in Figure 19) outside the diffusion rate and dead volume of dead volume (representing by the overall area being occupied by substance A in Figure 19) is inversely proportional to.That is,, if the concentration of reactive materials is high in the volume outside dead volume just, diffusion rate reduces so.If the reactive species concentrations in this region reduces (the mobile stream by inert gas, then passes through mass action) continuously from the volume dead volume space just, reactive materials increases from the speed of dead volume diffusion so.In addition, by same principle, inert gas can be diffused in dead volume, because the reactive materials of holding back is removed from these spaces effectively.

Figure 20 A is the perspective view in rear bight of each embodiment of gas closed component 600, and wherein imaginary drawing enters the inside of gas closed component 600 through Returning pipe 605.For each embodiment of gas closed component 600, rear wall panel 640 can have the panel 610 of insertion, inserts panel 610 and is configured to provide the path to for example electric next door.The bundle of cable, line and pipeline etc. can be fed to and enter cable wiring conduit by next door, for example, at the pipeline 632 shown in right side wall panel 630, for this reason, detachably insert panel and dismantled to expose the bundle routing in the first cable, line and bale of pipeline conduit entrance 636.From here, described bundle can be fed to the inside of gas closed component 600, and by the Returning pipe 605 in the inside of gas closed component 600, illustrates in imaginary drawing.Each embodiment of the gas closed component connecting up for cable, line and bale of pipeline can have more than one cable, line and bale of pipeline import, and as shown at Figure 20 A, it shows the first bundle conduit entrance 634 and restraints conduit entrance 636 for second of another bundle.Figure 20 B shows the enlarged drawing for the bundle conduit entrance 634 of cable, line and bale of pipeline.Bundle conduit entrance 634 can have the opening 631 that is designed to form with the cover cap 633 that slides sealing.In each embodiment, opening 631 can be provided by the flexible sealing module for cable entries sealing for example being provided by Roxtec Company, and it can hold cable, line and the pipeline etc. of intrafascicular various diameters.Alternatively, the top 635 of slip cover cap 633 and the top part 637 of opening 631 can have and be arranged on each lip-deep compliant materials, thereby compliant materials can form sealing around at cable, line and the pipeline etc. that be fed to the intrafascicular various sizes diameter by the import such as bundle conduit entrance 634.

Figure 21 is the upward view of each embodiment of the top board panel of this instruction, for example, such as the gas closed component of Fig. 3 and the top board panel 250' of system 100.According to for assembling each embodiment of this instruction of gas locking device, lighting device for example can be arranged on, in the inside top surface of top board panel (the top board panel 250' of the gas closed component of Fig. 3 and system 100).As shown in figure 21, the top board framework 250 that has an interior section 251 can be arranged on lighting device on the interior section of each framing component.For example, top board framework 250 can have two top board frame section sections 40, and top board frame section section 40 has two top board Vierendeel girders 42 and 44 jointly.Each top board frame section section 40 can have towards the first side 41 of top board framework 250 positioned internal with towards outside the second side 43 of locating of top board framework 250.For for gas locking device, provide illumination according to each embodiment of this instruction, 46 pairs of illumination components can be installed.Every pair of illumination component 46 can comprise the second illumination component 47 near the first illumination component 45 of the first side 41 and the second side 43 of close top board frame section section 40.The quantity of the illumination component shown in Figure 21, location and grouping are exemplary.The quantity of illumination component and grouping can change with any expectation or suitable method.In each embodiment, illumination component can flatly be installed, and in other embodiments, can be mounted to and make them be movable to each position and angle.In addition or in alternative, can be positioned on any other inner surface, outer surface and surface combination of the gas closed component shown in Fig. 3 and system 100 setting of illumination component is not limited to top panel top board 433, but.

Various illumination components can comprise the lamp of any quantity, type or combination, for example halogen light modulation, white lamp, incandescent lamp, arc lamp or light emitting diode or device (LED).For example, each illumination component can comprise that 1 LED is to about 100 LED, and about 10 LED are about 50 LED extremely, or are greater than 100 LED.LED or other lighting device can send in chromatogram, chromatogram outer or any color or the color combination of its combination.According to each embodiment of the gas closed component for inkjet printing OLED material, because the photaesthesia of some materials to some wavelength, thereby the optical wavelength that is arranged on the lighting device in gas closed component can specifically be selected, to avoid material degradation during processing.For example, the cold White LED of 4X be can use, 4X yellow led or its any combination also can be used.The example of the cold White LED of 4X is the LF1B-D4S-2THWW4 that can obtain from IDEC Corporation (Sunnyvale, California).The example of spendable 4X yellow led is the LF1B-D4S-2SHY6 that also can obtain from IDEC Corporation.LED or other illumination component can be from the interior sections 251 of top board framework 250 or another lip-deep location, any position of gas closed component or suspend.Illumination component is not limited to LED.Can use the combination of any suitable illumination component or illumination component.Figure 22 is the curve map of IDEC LED spectrum, and show x axle corresponding with intensity when peak strength is 100% and with wavelength (unit: nanometer) corresponding y axle.Show the frequency spectrum of the yellow type of LF1B, yellow fluorescence lamp, LF1B white type LED, the cold white type LED of LF1B and the red type LED of LF1B.Each embodiment according to this instruction, can be used other spectrum and spectral combination.

Recall, each embodiment of gas closed component builds to hold the mode of the various occupied areas of various OLED print systems with internal capacity and the while Optimization Work space of minimum gas closed component.Each embodiment of the gas closed component so building also during processing, be easy to approach from outside the inside of gas closed component and be easy to approach inner to safeguard, simultaneous minimization downtime.In this respect, can be wide about the various occupied area fixed wheels of various OLED print systems according to each embodiment of the gas closed component of this instruction.

Those of ordinary skill can be understood, this instruction that is used for the structure of framing component structure, panel structure, framework and panel sealing and gas closed component (for example, the gas closed component 100 of Fig. 3) can be applicable to have the gas closed component of various sizes and design.Such as but not limited to, contain from each embodiment of the wide gas closed component of fixed wheel of this instruction of substrate size Gen 3.5 to Gen 10 and can have at about 6m ³to about 95m ³between internal capacity, and can save volume between about 30% to about 70% for uncertain profile and the locking device with suitable nominal dimension.Each embodiment of gas closed component can make each framing component be built into the profile that is provided for gas closed component, so that hold OLED print system for its function and simultaneously Optimization Work space to minimize inert gas volume, and also allow to be convenient to approach from outside OLED print system during processing.In this respect, each gas closed component of this instruction can change aspect profile pattern and volume.

Figure 23 provides according to the example of the gas closed component of this instruction.Gas closed component 1000 can comprise forward frame assembly 1100, central frame assembly 1200 and rear frame assembly 1300.Forward frame assembly 1100 can comprise anterior base frame 1120, front walls framework 1140 and anterior top board framework 1160, and front walls framework 1140 can have for receiving the opening 1142 of substrate.Central frame assembly 1200 can comprise the first middle closed frame assembly 1240, midfeather and top board frame assembly 1260 and the second middle closed frame assembly 1280.Rear frame assembly 1300 can comprise rear portion base frame 1320, rear wall framework 1340 and rear portion top board framework 1360.Region shown in shade shows the available work volume of gas component 1000, and it is the volume that can be used for holding OLED print system.Each embodiment fixed wheel of gas closed component 1000 is wide for example, for (minimizing operation air-sensitive process, OLED print procedure) volume of required recirculation inert gas, and allow to be easy to approach OLED print system (remotely or directly easily approaching by can easily dismantling panel during operation) simultaneously.For each embodiment of gas closed component of containing this instruction of substrate size Gen 3.5 to Gen 10, according to each embodiment of the wide gas closed component of the fixed wheel of this instruction, can have at about 6m ³to about 95m ³between gas enclosed volume, and such as but not limited at about 15m ³to about 30m ³between, for the OLED printing of for example Gen 5.5 to Gen 8.5 substrate sizes, this may be useful.

Gas closed component 1000 can have all features of recording for example gases closed component 100 in this instruction.Such as but not limited to, gas closed component 1000 can be used the sealing according to this instruction, to provide through the gas-tight seal locking device building and destructing circulates.Each embodiment of gas closed system based on gas closed component 1000 can have gas purge system, it can (comprise various reactive ambient gas by various reactive materials, for example steam and oxygen, and organic solvent steam) every kind of levels of substance for example remain on 100ppm or lower, 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.

In addition, the gas closed component based on gas closed component 1000 and each embodiment of system can have circulation and filtration system, its can provide meet ISO 14644 3 grades and 4 grades toilet's standards without particle environment.In addition, as described in more detail subsequently, gas closed component based on this instruction (for example, gas closed component 100 and gas closed component 1000) gas closed component system can there is each embodiment of pressurized inert gas recirculating system, it can be used for operation such as but not limited to lower one or more: pneumatic robot, substrate suspending bench, air bearing, air lining, Compressed Gas instrument, pneumatic actuator and combination thereof.For the gas locking device of this instruction and each embodiment of system, use various pneumatically-operated devices and equipment can provide low particle to generate performance and low maintenance.

Figure 24 is according to the exploded view of the gas closed component 1000 of this instruction, shows each framing component that can build to provide gas-tight seal gas locking device.As in above for as described in each embodiment of the gas locking device 100 of Fig. 3 and Figure 13, OLED ink-jet print system 1050 can comprise and allows ink droplet to be reliably arranged on some devices and the equipment that shows the upper ad-hoc location of substrate (for example substrate 1058) being supported by substrate suspending bench 1054.Substrate suspending bench 1054 can be used for supporting substrate 1058, and is provided for carrying without friction of substrate 1058.It is removable by the stroke of system 1000 during the OLED of substrate prints that the substrate suspending bench 1054 of OLED print system can limit substrate 1058.Provide all parts that can form OLED print system 1050, each embodiment of OLED print system 1050 can have various occupied areas and form factor.According to each embodiment of OLED ink-jet print system, various baseplate materials can be used for substrate 1058, such as but not limited to various glass substrate materials and various Polymers plate material.

According to each embodiment of the gas closed component of this instruction, as above for as described in gas locking device 100, the structure of gas closed component can around carry out in whole OLED print system, with the volume of minimum gas closed component and be made as be easy to approach inner.In Figure 24, the example of fixed wheel exterior feature can consider that OLED print system 1050 provides.

As shown in figure 24, in OLED print system 1050, can there are six isolators: 1053 groups of the first isolator group 1051 (the second isolator in this group on opposite side is not shown) and the second isolators (the second isolator in this group on opposite side is not shown), it supports the substrate suspending bench 1054 of OLED print system 1050.Suspending bench 1054 is supported on suspending bench base portion 1052.In Figure 24 invisible and with two isolators of the first isolator 1051 and the second isolator 1053 relative positionings, there are two isolators in groups that support OLED print system base portion 1070.Closed front base portion 1120 can have the first closed front isolator bearing 1121 that supports the first closed front isolator wall framework 1123.The second closed front isolator wall framework 1127 is supported by the second closed front isolator bearing (not shown).Similarly, sealing base portion 1220 in centre can have the first middle sealing isolator bearing 1221 that supports sealing isolator wall framework 1223 in the middle of first.In the middle of second, sealing isolator wall framework 1227 is supported by the second middle sealing isolator bearing (not shown).Finally, rear closure base portion 1320 can have the first rear closure isolator bearing 1321 that supports the middle sealing in rear portion isolator wall framework 1323.The second rear closure isolator wall framework 1327 is supported by the second rear closure isolator bearing (not shown).At each isolator, around fixed wheel is wide for each embodiment of isolator wall framing component, thereby minimizes each isolator supporting member volume around.In addition for the shadow surface board section shown in each isolator wall framework of base portion 1120,1220 and 1320, be demountable detachable panel, for example, so that maintenance isolator.Closed front assembly base portion 1120 can have dish 1122, and simultaneously middle closed component base portion 1220 can have dish 1222, and rear closure assembly base portion 1320 can have dish 1322.When base portion builds to form in abutting connection with base portion completely, to be similar to, OLED print system 50 is arranged on to the mode on the dish 204 of Figure 13, OLED print system can be arranged in the abuts tray forming thus.As mentioned before, then the wall such as following and top board framing component around can be combined in OLED print system 1050: the wall framework 1140 of forward frame assembly 1100, top board framework 1160; Closed frame assembly 1280' in the middle of the first middle closed frame assembly 1240, midfeather and top board frame assembly 1260 and second of central frame assembly 1200; And the wall framework 1340 of rear frame assembly 1300 and top board framework 1360.Thereby each embodiment of the wide framing component assembly of gas-tight seal fixed wheel of this instruction has reduced the inert gas volume in gas closed component 1000 effectively, and is made as each device and the equipment that is easy to approach OLED print system simultaneously.

In addition, each embodiment of the gas closed component of this instruction can be to provide the mode of the framing component assembly portion section working individually to build.Recall, with reference to Fig. 5, according to the framing component assembly of each embodiment of the gas closed component of this instruction and system, can comprise thering is the framing component that is sealably arranged on each panel on framing component.Such as but not limited to, wall framing component assembly or Wall board assembly can be the wall framing components that comprises each panel being sealably arranged on wall framing component.Therefore, the various panel assemblies that build completely, such as but not limited to Wall board assembly, top board panel assembly, wall and top board panel assembly, base portion supports panel assembly etc., are various types of framing component assemblies.The modular nature of each embodiment of the gas closed component of this instruction can be provided for having the embodiment of the gas closed component of various framing component assembly portion section, and wherein each framing component assembly portion section is a part for the total measurement (volume) of gas closed component.The various framing component assembly portion section that forms each embodiment of gas closed component can have at least one common framing component.For each embodiment of gas closed component, the various framing component assembly portion section that forms gas closed component can have at least one common framing component assembly.The various framing component assembly portion section that forms each embodiment of gas closed component can have the combination of common at least one framing component and a framing component assembly.

According to this instruction, various framing component assembly portion section can be by such as but not limited to being separated into portion's section for the common opening of each framing component assembly portion section or the sealing of passage or its combination.For example, in each embodiment, thereby framing component assembly portion section can be sealed opening or passage or its combination and separation effectively by covering for the common framing component of each framing component assembly portion section or the opening in framing component panel or passage or its combination.In each embodiment, thereby framing component assembly portion section can be sealed opening or passage or its combination and separation for the common opening of each framing component assembly portion section or passage or its combination effectively by sealing.Sealably seal the separation that the fluid between each volume that opening or passage or its combination can cause interrupting each framing component assembly portion section is communicated with, wherein each volume is included in a part for the total measurement (volume) in gas closed component.Sealably sealing opening or passage therefore can isolate and be included in each volume in each framing component assembly portion section.

Therefore,, with reference to Figure 24, base portion 1070 can have the first end 1072 of restriction width and the first side 1076 and second side 1078 of the second end 1074 and restriction length.The first vertical corbel 1075 and the second vertical corbel 1077 can and be arranged on base portion 1070 perpendicular to base portion 1070, and bridge 1079 is arranged on the first vertical corbel 1075 and the second vertical corbel 1077.Each embodiment for OLED print system 1050, bridge 1079 can support the first print head assembly navigation system 1090 and the second print head assembly navigation system 1091, and it is respectively used to be controlled at the first print head assembly 1080 of substrate suspending bench 1054 tops and the X-Z axle of the second print head assembly 1081 moves.Although Figure 24 shows two navigation systems and two print head assemblies, for each embodiment of OLED print system 1050, can there is single navigation system and single print head assembly.In addition, each embodiment for OLED print system 1050, can there is single print head assembly, for example, be arranged on the first print head assembly 1080 in navigation system and any in the second print head assembly 1081, and for checking that the camera system of the feature of substrate 1058 can be arranged on the second navigation system.According to each embodiment of gas closed component 1000, head maintenance system can be installed near print head assembly, such as but not limited to, on first upper surface 1071 and the second upper surface 1073 of base portion 1070.

In addition,, with reference to Figure 24, panel can be arranged on first framing component 1224 and the second framing component 1226 of base portion 1220, and can fixed pad on each panel.Pad can be used for being enclosed in each passage between panel and base portion 1070.In addition, bridge framework 1144 can support central frame assembly 1200, and the framework that is provided for supporting each embodiment that inserts framework.Each embodiment that inserts the insertion framework in bridge framework 1144 can have the opening that allows print head assembly to advance, and also can support the gate and valve assembly that allows the opening that print head assembly advances for sealing.By sealably sealing base portion passage around, and the opening that sealably sealing allows print head assembly to advance, the volume roughly being limited around the bridge 1079 being arranged on base portion 1070 by central frame assembly 1200 can be isolated with the remainder volume of gas closed component 1000.

The exemplary purposes of the individual section of divided gas flow locking device can be that print head assembly (for example, the first print head assembly 1080 of print system 1050 and the second print head assembly 1081) is carried out to various maintenance programs.This maintenance program can comprise such as but not limited to the printhead of changing in print head assembly, and do not need to make gas closed component to lead to atmospheric environment.In addition, because the partial volume roughly being limited around the bridge 1079 being arranged on base portion 1070 by central frame assembly 1200 can be isolated completely with the residual volume of gas closed component 1000, this partial volume can lead to surrounding material, such as but not limited to steam and oxygen, and the larger volume of the residue of dusty gas closed component not.By restriction, can be exposed to the volume of surrounding material, system is recovered within the significantly shorter time, to complete.Those of ordinary skill in the art will understand, although the example that print head assembly is safeguarded provides with way of example, but the various processes that need gas closed component can easily be used its middle part can be by separated so that the gas closed component of the framing component assembly portion section working to be individually provided discretely, and wherein at least one section can have the remarkable less partial volume of total locking device volume.

Figure 25 shows according to the decomposed perspective view of each embodiment of the gas closed component 1000 of Figure 23 and Figure 24.In Figure 25, show each intact panel assembly, this panel assembly can be separated to limit first framing component assembly portion's section and the second framing component assembly portion section in every way, first framing component assembly portion paragraph qualification the first volume, second framing component assembly portion paragraph qualification the second volume.

Such as but not limited to, in Figure 25, gas closed component 1000 can comprise front panel assembly 1100', centre panel assembly 1200' and front panel assembly 1300'.Front panel assembly 1100' can comprise anterior top board panel assembly 1160', front walls panel assembly 1140' and anterior base surface board component 1120', and rear portion panel assembly 1300' can comprise rear portion top board panel assembly 1360', rear wall panel assembly 1340' and rear portion base surface board component 1320'.In the exploded view of Figure 24, can find out, for forward frame assembly 1100 and centre panel framework 1200, the front panel assembly 1100' of Figure 25 and centre panel assembly 1200' have common bridge framework 1144.Centre panel assembly 1200' can have the first middle closure panel assembly 1240', midfeather and top board panel assembly 1260' and the second middle closure panel assembly 1280', it can cover base portion 1070 on being sealably arranged on central base portion panel assembly 1220' time, comprises the first vertical corbel 1075 and the second vertical corbel 1077 that bridge 1079 is installed thereon.As mentioned before, bridge 1079 can support the first print head assembly navigation system 1090, and it can control the movement (referring to Figure 24) of print head assembly 1080 above substrate suspending bench 1054.For print head assembly 1080 being positioned to the first print head assembly navigation system 1090 of substrate suspending bench 1054 tops (referring to Figure 24), can comprise that the first X-axis balladeur train (carriage) 1092 and the first Z axis movable plate 1094, the first print head assemblies 1080 can be arranged on the first Z axis movable plate 1094.The second print head assembly navigation system 1091 can be configured to similarly control the second print head assembly 1081 X-Z axle of (referring to Figure 24) above substrate suspending bench 1054 and move.

Figure 26 shows the decomposed side perspective view of gas closed component 1000, and it comprises each section of front panel assembly 1100' and centre panel assembly 1200' and front panel assembly 1300'.Front panel assembly 1100' can comprise insertion framework 1146 therein, can see that inserting framework 1146 is arranged in bridge framework 1144, and bridge framework 1144 is front panel assembly 1100' and the common framing component of centre panel assembly 1200'.Insert framework 1146 and can comprise opening 1148, around can fixed pad 1147 at opening 1148.Above insertion framework 1146, gate and valve assembly 1150 is shown.Gate and valve assembly 1150 can be arranged on and insert framework 1146 tops.In Figure 27 A and Figure 27 B, can find out, gate and valve assembly 1150 can have door 1158, it is installed to Y-Z navigation system via the first balladeur train 1153 and the second balladeur train 1154, for moving door 1158 above the opening 1148 inserting framework 1146, and engages door 1158 is sealably to cover opening 1148.In Figure 27 A, comprise that the navigation system of the first track 1151 and the second track 1152 can have respectively the first balladeur train 1153 and second balladeur train 1154 that can engage with guide rail guidance system.Those of ordinary skills should be understood that guide rail guidance system can comprise such as, such as but not limited to the parts of guide rail, bearing and actuator, for controlling, navigation system moves and the therefore movement of door 1158.In Figure 27 A, pad 1147 is depicted as around opening 1148.Pad 1147 can be above for any gasket material described in seal frame component assembly.In Figure 27 A, door 1158 retractions, thus print head assembly 1080 and 1081 can be passed through in opening 1148 experts and then movement (referring to Figure 24 and Figure 25) by the first print head assembly navigation system 1090 and the second print head assembly navigation system 1091 of suspending bench 1054 tops respectively.In Figure 27 B, door 1158 is depicted as and covers opening 1148.Comprise door 1158 the first balladeur trains 1153 that are installed to and the second balladeur train 1154 navigation system door 1158 can be positioned to opening 1148 tops so that joint sheet 1147 sealably, thereby sealably seal opening 1148.

Figure 28 shows the sectional view through the central base portion panel assembly 1220' relevant with front panel assembly 1300' with front panel assembly 1100'.As shown in figure 28, passage 1225 can be positioned at around base portion 1070; Wherein base portion 1070 extends through the first framing component 1224.In framing component 1224, such as the panel that framing component is provided of panel 1228, can sealably be arranged in framing component 1224.Can imagine, provide the various pads of mechanical seal to can be used for seal channel 1225.In each embodiment, can use the inflatable pad for seal channel 1225.Each embodiment of inflatable pad can be made for hollow molded structure by strengthening elastomeric material, and this structure can be in spill, accordion or planar configuration when not inflating.In each embodiment, pad can be arranged on panel 1228 for sealably sealing base portion 1070 passage 1225 around.Therefore, in using such as but not limited to the multiple suitable fluid media (medium) of inert gas during any inflation, for sealably sealing each embodiment of the inflatable pad of base portion 1070 passage 1225 around, can between the mounting surface of the inner surface such as panel 1228 and surperficial shock (striking) surface such as base portion 1070, form tight barrier.In each embodiment, inflatable pad can be arranged on base portion 1070, and for sealably sealing base portion 1070 passage 1225 around, making base portion 1070 can be mounting surface, and the inner surface of panel 1228 can be impact surface.In this respect, comply with sealably closed channel 1225 of seal.

Except each embodiment of inflatable pad, also can use the flexible seals such as bellows seal or lip seal member to carry out seal channel 1225, the seal is permanently attached, for example, is attached to panel 1228 and base portion 1070.This permanent attached seal can provide various translations and the required pliability of vibration movement of base portion 1070, and simultaneously for passage 1225 provides gas-tight seal.

One skilled in the art will appreciate that it may be problematic in the formation around of the edge of clearly restriction, complying with seal.Illustrate therein in each embodiment of the gas locking device of the sealing of the structure such as base portion 1070, this structure can manufacture the edge clearly limiting of eliminating expectation sealing place.In each embodiment of the print system 1050 of Figure 24, base portion 1070 can initially manufacture the lateral edges of the rounding with base portion 1070 to promote sealing, as shown in the hacures 1070-1B of the hacures 1070-1A by the first side 1076 and the second side 1078.In each embodiment of the print system 1050 of Figure 24, base portion 1070 can be modified to have the structure of installing for providing the lateral edges of the rounding of base portion 1070 to seal with promotion subsequently, as shown in the hacures structure 1070-2B of the hacures structure 1070-2A by the first side 1076 and the second side 1078.Base portion 1070 can be made by the material that can be provided for supporting the required stability of print system, such as but not limited to, granite and steel.This material can easily be revised as shown in Figure 28.Although be given in the example of using pad sealing base portion 1070 passage 1225 around in central base portion panel assembly 1220', but the base portion 1070 that it will be appreciated by the skilled addressee that the frame assembly 1226 of crossing over base portion assembly 1220' (referring to Figure 24) sealing around can be used same principle to carry out.

As mentioned before, the maintenance of print head assembly can comprise various demarcation and maintenance program.For example, for the printing of OLED panel substrate, each print head assembly, for example the first print head assembly 1080 of Figure 24 and the second print head assembly 1081 can have a plurality of printheads that are arranged at least one head device.In each embodiment, head device can comprise such as but not limited to the fluid with at least one printhead and being connected with electronics; Each printhead has can be with a plurality of nozzles or the aperture of controllable rate, speed and size ink-jet.For the first print head assembly 1080 of Figure 24 and each embodiment of the second print head assembly 1081, each print head assembly can be included in the head device between about 1 to about 60, and wherein each head device can have the printhead between about 1 to about 30 in each head device.Printhead, for example industrial inkjet head, can have the nozzle between about 16 to about 2048, and it can discharge about 0.1pL to the droplet volume between about 200pL.Demarcate printhead can comprise such as but not limited to: check that nozzle starts (firing); Measure droplet volume, speed and direction; And adjustment printhead, thereby the ink droplet of the even volume of each nozzle ejection.Safeguard that printhead can comprise that printhead perfusion needs to collect and hold from the China ink of printhead discharge such as but not limited to pour into, remove the program that unnecessary China ink and printhead are changed after perfusion program such as printhead.In print procedure, for example, for the printing of OLED panel substrate, the reliable startup of nozzle is most important for guaranteeing that print procedure can be manufactured the oled panel display of high-quality.Therefore the various programs that, are associated with head maintenance are necessary easily and implement reliably; Especially do not need the interior exposed of gas closed component in various reactive ingredients, such as but not limited to the oxygen from atmospheric environment and steam and such as but not limited to the organic solvent steam from print procedure.

In this respect, for each embodiment of the gas closed component of Figure 24, maintenance system can be mounted to such as but not limited to the first print head assembly 1080 near on the top surface 1071 of base portion 1070 and near the second print head assembly 1081 on the top surface 1073 of base portion 1070.This maintenance system can comprise such as but not limited to for carry out the ink droplet of various printhead calibrating procedures demarcate station, for collect and be contained in purge or perfusion program during the black purging station of discharging from printhead and for purging or perfusion program has purged station and removes unnecessary black blotting station after carrying out.During regular maintenance, this program can be carried out with complete automatic mode.During maintenance program, can indicate in some situation of manual intervention to a certain degree, terminal use approaches and can externally carry out by for example using gloves port.As mentioned before, each embodiment of the gas closed component 1000 of Figure 23-28 reduces the volume of inert gas required during OLED print processing effectively, and is made as the inside that is easy to approach gas locking device simultaneously.

In addition, if head maintenance needs any in direct proximity printing head assembly or various all-in-service station, sealably seal door 1158 (as described in for Figure 27 A and Figure 27 B) on opening 1148 and sealably seal base portion 1070 passage (as described in for Figure 28) around and can isolate by comprising volume that framing component assembly portion's section of centre panel assembly 1200' and the isolated part of central base portion panel assembly 1220' limit and the residual volume of gas closed component 1000.In addition, it will be appreciated by the skilled addressee that and sealably seal door 1158 (as described in for Figure 27 A, Figure 27 B and the Figure 28) on opening 1148 and sealably seal base portion 1070 passage (as described in for Figure 28) around and can remotely and automatically carry out.For each embodiment of gas closed component 1000, for this partial volume of safeguarding this insulation volume of framing component assembly portion section, can be less than or equal to fixed wheel exterior feature gas closed component each embodiment total measurement (volume) about 20%.For each embodiment of gas closed component 1000, for this partial volume of safeguarding this insulation volume of framing component assembly portion section, can be less than or equal to the wide gas closed component of fixed wheel each embodiment total measurement (volume) about 50%.By significantly reducing to need terminal use directly to approach to print the part of the gas closed component of head maintenance, can significantly reduce system recovery time.

Figure 29 shows according to the perspective view of the gas closed component 1010 of each embodiment of the gas closed component of this instruction.Gas closed component 1010 can comprise front panel assembly 1100', centre panel assembly 1200' and front panel assembly 1300'.Front panel assembly 1100' can comprise anterior top board panel assembly 1160', front walls panel assembly 1140' and anterior base surface board component 1120', and front walls panel assembly 1140' can have for receiving the opening 1142 of substrate.Front panel assembly 1300' can comprise rear portion top board panel assembly 1360', rear wall panel assembly 1340' and rear portion base surface board component 1320'.Centre panel assembly 1200' can comprise the first middle closure panel assembly 1240', midfeather and top board panel assembly 1260' and the second middle closure panel assembly 1280' and central base portion panel assembly 1220'.In addition, centre panel assembly 1200' can comprise the first middle maintenance system panel assembly 1230' and the second middle maintenance system panel assembly (not shown).

Figure 30 shows according to the decomposition diagram of the gas locking device 1010 of each embodiment of the gas closed component of this instruction.Gas closed component 1010 can hold OLED print system 1050, and it can comprise the substrate suspending bench 1054 being supported by substrate suspending bench base portion 1052.Substrate suspending bench base portion 1052 can be arranged on base portion 1070.The substrate suspending bench 1054 of OLED print system can supporting substrate 1058, and it is removable by the stroke of system 1010 during the OLED of substrate prints to limit substrate 1058.Substrate suspending bench 1054 can provide carrying without friction of substrate 1058.Gas closed component 1010 for Figure 30, in OLED print system 1050, can there are four isolators: the first isolator group 1051 (second on opposite side is not shown) and the second isolator group 1053 (second on opposite side is not shown), it supports the substrate suspending bench 1054 of OLED print system 1050.Base portion 1070 can comprise the first vertical corbel 1075 and the second vertical corbel 1077, and bridge 1079 is arranged on the first vertical corbel 1075 and the second vertical corbel 1077.For each embodiment of OLED print system 1050, bridge 1079 can support the first print head assembly navigation system 1090 and the second navigation system 1091, and it can control respectively the movement of the first print head assembly 1080 and the second print head assembly 1081.For each embodiment of OLED print system 1050, can there is single navigation system and single print head assembly.Each embodiment for OLED print system 1050, can there is single print head assembly, for example, any in the first print head assembly 1080 and the second print head assembly 1081, and for checking that the camera system of the feature of substrate 1058 can be arranged on the second navigation system.

For the first print head assembly 1080 being positioned to the first print head assembly navigation system 1090 of substrate suspending bench 1054 tops, can comprise that the first X-axis balladeur train 1092 and the first Z axis movable plate 1094, the first print head assembly locking devices 1084 can be arranged on the first Z axis movable plate 1094.The X-Z axle that the second print head assembly navigation system 1091 can be configured to control the second print head assembly 1081 can comprise the second print head assembly locking device 1085 similarly moves.As in Figure 30 for as shown in the first print head assembly 1080, wherein the first print head assembly locking device 1084 illustrates with partial view, each embodiment of print head assembly can have a plurality of head devices 1082 that are arranged on wherein.For each embodiment of print system 1050, print head assembly can be included in the head device between about 1 to about 60, and wherein each head device can have the printhead between about 1 to about 30 in each head device.As subsequently, by described in more detail, the head device that given needs are safeguarded continuously and the accurate quantity of printhead, can see that the first maintenance system assembly 1250 is positioned to easily approach the first print head assembly 1080.

As shown in Figure 30, gas closed component 1010 can comprise anterior base surface board component 1120', central base portion panel assembly 1220' and rear portion base surface board component 1320', it forms in abutting connection with base portion when building completely, to be similar to OLED print system 50, be arranged on the mode on the dish 204 of Figure 13, at this, on base portion, OLED print system 1050 can be arranged in the abuts tray forming thus.The first isolator group 1051 and the second isolator group can be arranged in each corresponding isolator wall (well) panel, for example, and the first isolator wall panel 1225' of central base portion panel assembly 1220' and the second isolator wall panel 1227'.The similar mode of describing with the structure of the gas closed component 100 with for Fig. 3, each framing component and the panel that form front panel assembly 1100', centre panel assembly 1200' and front panel assembly 1300' then can be around OLED print system 1050 in conjunction with each embodiment with formation gas closed component 1050.

For the gas closed component 1010 of Figure 30, central base portion assembly 1220' can comprise the first middle maintenance system panel assembly 1230' and the second middle maintenance system panel assembly 1270'.In the middle of first, in the middle of maintenance system panel assembly 1230' and second, maintenance system panel assembly 1270' can comprise respectively the first print head assembly opening 1242 of the first floor board assembly 1241' and the second print head assembly opening 1282 of the second floor board assembly 1281'.The first floor board assembly 1241' is shown in Figure 30 is the part of the first middle closure panel assembly 1240' of centre panel assembly 1200'.The first floor board assembly 1241' is the common panel assembly of maintenance system panel assembly 1230' in the middle of the first middle closure panel assembly 1240' and first.The second floor board assembly 1281' is shown in Figure 30 is the part of the second middle closure panel assembly 1280' of centre panel assembly 1200'.The second floor board assembly 1281' is the common panel assembly of maintenance system panel assembly 1270' in the middle of the second middle closure panel assembly 1280' and second.

As mentioned before, the first print head assembly 1080 can be contained in the first print head assembly locking device 1084, and the second print head assembly 1081 can be contained in the second print head assembly locking device 1085.As subsequently by described in more detail, the first print head assembly locking device 1084 and the second print head assembly locking device 1085 can have the opening in bottom, this opening can have edge (not shown), thereby various print head assembly can be located for printing during print processing.In addition, the first print head assembly locking device 1084 and the second print head assembly locking device 1085 form the part of housings can be as built as described in various panel assemblies above, thereby frame assembly member and panel can provide hermetic closed device.Sealant compressible shim can be cemented in around each in the first print head assembly opening 1242 and the second print head assembly opening 1282, or around the edge of the first print head assembly locking device 1084 and the second print head assembly locking device 1085.As shown in Figure 30, the first print head assembly docking pad 1245 and the second print head assembly docking pad 1285 can be fixed around the first print head assembly opening 1242 and the second print head assembly opening 1282 respectively.The first print head assembly navigation system 1090 and the second print head assembly navigation system 1091 can be docked the first print head assembly locking device 1084 and the second print head assembly locking device 1085 respectively with maintenance system panel assembly 1270' in the middle of maintenance system panel assembly 1230' in the middle of first and second.For various head maintenance programs, docking can be included between each in print head assembly locking device and maintenance system panel assembly and form gasket seal.When the first print head assembly locking device 1084 and the second print head assembly locking device 1085 are when in the middle of maintenance system panel assembly 1230' in the middle of first and second, maintenance system panel assembly 1270' dock sealably to seal the first print head assembly opening 1242 and the second print head assembly opening 1282, so the combining structure of formation is gas-tight seal.

During various head maintenance programs, the first print head assembly 1080 and the second print head assembly 1081 can be positioned at respectively respectively the second print head assembly opening 1282 tops of the first print head assembly opening 1242 and the second floor board assembly 1281' of the first floor board assembly 1241' by the first print head assembly navigation system 1090 and the second print head assembly navigation system 1091.In this respect, for various head maintenance programs, the first print head assembly 1080 and the second print head assembly 1081 can be positioned at respectively the second print head assembly opening 1282 tops of the first print head assembly opening 1242 and the second floor board assembly 1281' of the first floor board assembly 1241', and do not cover or seal the first print head assembly opening 1242 and the second print head assembly opening 1282.In addition, for various head maintenance programs, the sealing of the first print head assembly opening 1242 and the second print head assembly opening 1282 can be separated with the residual volume of gas closed component 1010 with the second middle maintenance system panel assembly 1270' as portion's section using the first middle maintenance system panel assembly 1230' as portion's section.For various head maintenance programs, the first print head assembly 1080 and the second print head assembly 1081 can be docked at respectively on the pad of the first print head assembly opening 1242 and the second print head assembly opening 1282 tops along Z-direction, thus sealing the first print head assembly opening 1242 and the second print head assembly opening 1282.According to this instruction, depend on the power that is applied to the first print head assembly locking device 1084 and the second print head assembly locking device 1085 in Z-direction, the first print head assembly opening 1242 and the second print head assembly opening 1282 can be capped or seal.In this respect, the power that is applied to the salable first print head assembly opening 1242 of the first print head assembly locking device 1084 in Z-direction can be isolated the first middle maintenance system panel assembly 1230' as portion's section with the residue framing component assembly portion section that forms gas closed component 1010.Similarly, the power that is applied to the salable second print head assembly opening 1282 of the second print head assembly locking device 1085 in Z-direction can be isolated the second middle maintenance system panel assembly 1270' as portion's section with the residue framing component assembly portion section that forms gas closed component 1010.

What can imagine is, in each embodiment of gas closed component 1010, such as, in maintenance system panel assembly 1270' in the middle of maintenance system panel assembly 1230' and second in the middle of can being arranged on first for the covering of the gate valve assembly described in Figure 26 and Figure 27 A and 27B above.This covering can be respectively used to cover the first print head assembly opening 1242 of maintenance system panel assembly 1230' in the middle of first and the second print head assembly opening 1282 of the second middle maintenance system panel assembly 1270'.As subsequently by described in more detail, use and such as the covering such as but not limited to gate valve assembly, seal the first print head assembly opening 1242 and the second print head assembly opening 1282 and can allow first framing component assembly portion's section and the section isolation of the second framing component assembly portion, and do not dock print head assembly.In this respect, can carry out various maintenance programs, and not interrupt print procedure.

Figure 30 of gas closed component 1010 shows the first middle maintenance system panel assembly 1230', and it can comprise the first rear wall panel assembly 1238'.Similarly, also show the second middle maintenance system panel assembly 1270', it can comprise the second rear wall panel assembly 1278'.In the middle of first, the first rear wall panel assembly 1238' of maintenance system panel assembly 1230' can the similar fashion as shown in for the second rear wall panel assembly 1278' build.In the middle of second, the second rear wall panel assembly 1278' of maintenance system panel assembly 1270' can be built by the second rear wall frame assembly 1278, and the second rear wall frame assembly 1278 has the second seal support panel 1275 that is sealably installed to the second rear wall frame assembly 1278.The second seal support panel 1275 can have second channel 1265, and it is near the second end (not shown) of base portion 1070.The second seal 1267 can be installed to the second seal support panel 1275 around second channel 1265.

Figure 31 A-31F is the diagrammatic cross-sectional view of gas closed component 1010, and it also can illustrate the various aspects of the first middle maintenance system panel assembly 1230' and the second middle maintenance system panel assembly 1270'.Those of ordinary skill in the art should understand, the symmetry of given print system 1050, it can have the first print head assembly navigation system 1090 and the second print head assembly navigation system 1091 (referring to Figure 30) that is respectively used to locate the first print head assembly 1080 and the second print head assembly 1081, for Figure 31 A-31D first in the middle of the instruction below of maintenance system panel assembly 1230' can be applicable to second in the middle of maintenance system panel assembly 1270'.

Figure 31 A shows the diagrammatic cross-sectional view of gas closed component 1010, and it shows the first middle maintenance system panel assembly 1230' and the second middle maintenance system panel assembly 1270'.The first middle maintenance system panel assembly 1230' of Figure 31 A can hold the first maintenance system assembly 1250, and they can be by the first maintenance system navigation system 1251 with respect to the first print head assembly opening 1242 location.The first print head assembly opening 1242 is the openings in the first floor board assembly 1241', and the first floor board assembly 1241' is the common panel of closure panel assembly 1240' in the middle of the first middle maintenance system panel assembly 1230' and first.The first maintenance system navigation system 1251 can be arranged on the first maintenance system component platform 1253, and the first maintenance system component platform 1253 can stably be arranged on base portion 1070 on first end 1072.The first maintenance system component platform 1253 can extend through from the first end 1072 of base portion 1070 first passage 1261 and enter the first middle maintenance system panel assembly 1230'.Similarly, as shown at Figure 31 A, the second middle maintenance system panel assembly 1270' of Figure 31 A can hold the second maintenance system assembly 1290, and they can be by the second maintenance system navigation system 1291 with respect to the second print head assembly opening 1282 location.The second print head assembly opening 1282 is the openings in the first floor board assembly 1281', and the first floor board assembly 1281' is the common panel of closure panel assembly 1280' in the middle of the second middle maintenance system panel assembly 1270' and second.The second maintenance system navigation system 1291 can be arranged on second and safeguard on component system platform 1293, and second safeguards that component system platform 1293 can extend through from the second end 1074 of base portion 1070 second channel 1265 and enter the second middle maintenance system panel assembly 1270'.The first seal 1263 can be arranged on the first outer surface 1237 of the first seal support panel 1235 around first passage 1261.Similarly, the second seal 1267 can be arranged on the second outer surface 1277 of the second seal support panel 1275 around second channel 1265.The first seal 1263 and the second seal 1267 can be inflatable pads, as above for as described in Figure 28.Each embodiment of the first seal 1263 and the second seal 1267 can be flexible seals, and it is permanently attached for example to the first outer surface 1237 and the second outer surface 1277 and be attached to the base portion first end 1072 of base portion 1070 and the second end 1074 of base portion 1070 respectively.As mentioned before, flexible seals can be the seal such as bellows seal or lip seal member.This permanent attached seal can provide various translations and the required pliability of vibration movement of base portion 1070, and simultaneously for first passage 1261 and second channel 1265 provide gas-tight seal.

Figure 31 B and Figure 31 C illustrate the various openings of gas closed component 1010 and covering and the sealing of passage of this instruction, and it illustrates the first print head assembly 1080 with respect to the location of the first middle maintenance system panel assembly 1230' for various maintenance programs.As mentioned before, the following instruction for the first middle maintenance system panel assembly 1230' also can be applicable to the second middle maintenance system panel assembly 1270'.

In Figure 31 B, the first print head assembly 1080 can comprise the head device 1082 with at least one printhead, and this printhead comprises a plurality of nozzles or aperture.Head device 1082 can be contained in the first print head assembly locking device 1084, the first print head assembly locking device 1084 can have the first print head assembly locking device opening 1086, head device 1082 can be located from the first print head assembly locking device opening 1086, thereby nozzle is ejected into China ink on the substrate being arranged in the suspending bench 1054 being supported by suspending bench support member 1052 with controllable rate, speed and size during printing.As mentioned before, the first print head assembly navigation system 1090 can be controlled to the first print head assembly 1080 to be positioned at above substrate to print during print processing.In addition,, as shown in Figure 31 B, for each embodiment of gas closed component 1010, there is the first print head assembly navigation system 1090 that controllable X-Z axle moves and the first print head assembly 1080 can be positioned to the first print head assembly opening 1242 tops.As shown in Figure 31 B, the first print head assembly opening 1242 of the first floor board assembly 1241' is that in the middle of the first middle closure panel assembly 1240' and first, maintenance system panel assembly 1230' is common.

The first print head assembly locking device 1084 of Figure 31 B can comprise the first print head assembly locking device edge 1088, and it can be the butting surface with the first print head assembly opening 1242 the first floor board assembly 1241' around.It is being fixed around the first print head assembly opening 1242 shown in Figure 31 B that the first print head assembly locking device edge 1088 can engage the first print head assembly docking pad 1245, the first print head assembly docking pads 1245.Although it will be appreciated by the skilled addressee that the first print head assembly locking device edge 1088 is shown as inwardly stretches out structure, any in various edges can be structured on the first print head assembly locking device 1084.In addition, although the first print head assembly docking pad 1245 shown in Figure 31 B for being cemented in around the first print head assembly opening 1242, those of ordinary skill will be understood, pad 1245 can be bonded to the first print head assembly locking device edge 1088.The first print head assembly docking pad 1245 can be as above for any gasket material as described in seal frame component assembly.In each embodiment of the gas closed component 1010 of Figure 31 B, the first print head assembly docking pad 1245 can be inflatable pad, and for example pad 1263.In this respect, the first print head assembly docking pad 1245 can be inflatable pad, as above for as described in Figure 28.As proposed above, the first seal 1263 can be arranged on the first outer surface 1237 of the first seal support panel 1235 around first passage 1261.

As shown in Figure 31 B and Figure 31 C, for the various maintenance programs that can carry out with complete automatic mode, the first print head assembly 1080 can remain positioned in the first print head assembly opening 1242 tops.In this respect, the first print head assembly 1080 can be adjusted by the first print head assembly navigation system 1090 in Z-direction, and the first print head assembly navigation system 1090 is for being positioned at the first print head assembly opening 1242 tops by head device 1082 with respect to the first maintenance system assembly 1250.In addition, the first maintenance system assembly 1250 can be adjusted in Y-X direction in the first maintenance system navigation system 1251, for the first maintenance system assembly 1250 is located with respect to head device 1082.During various maintenance programs, the first print head assembly 1080 can be by being contacted with the first print head assembly docking pad 1245 whole being arranged to of the enterprising step of Z-direction by the first print head assembly navigation system 1090, the first print head assembly locking device 1084 is set to the position that covers the first print head assembly opening 1242 (not shown).As shown in Figure 31 C, for various maintenance programs, such as but not limited to, need to directly approach the maintenance program of maintenance system panel assembly 1230' inside in the middle of first, the first print head assembly 1080 can be by whole and dock pad 1245 with the first print head assembly and dock in the enterprising step of Z-direction by the first print head assembly navigation system 1090, to seal the first print head assembly opening 1242.As mentioned before, the first print head assembly docking pad 1245 can be as above for the compressible pad sheet material as described in various framing components gas-tight seal or as above for the inflatable pad as described in Figure 28.In addition, as shown in Figure 31 C, inflatable pad 1263 can be inflated, thereby sealably seals first passage 1261.In addition, the first print head assembly locking device 1084 forms the part of housings can be as built as described in various panel assemblies above, thereby frame assembly member and panel can provide hermetic closed device.Therefore, for Figure 31 C, when when the first print head assembly opening 1242 and first passage 1261 are sealably sealed, in the middle of first maintenance system panel assembly 1230' can with the residual volume isolation of gas closed component 1010.

In Figure 31 D and Figure 31 E, show each embodiment of gas locking device 1010, wherein the first maintenance system assembly 1250 and the second maintenance system assembly 1290 can be arranged on respectively on the first maintenance system component platform 1253 and the second maintenance system component platform 1293.In Figure 31 D and Figure 31 E, the first maintenance system component platform 1253 and the second maintenance system component platform 1293 are enclosed in respectively in the first middle maintenance system panel assembly 1230' and the second middle maintenance system panel assembly 1270'.As mentioned before, the following instruction for the first middle maintenance system panel assembly 1230' also can be applicable to the second middle maintenance system panel assembly 1270'.In this respect, as shown in Figure 31 D, the first print head assembly 1080 can dock by means of the sufficient force being applied in Z-direction by the first print head assembly navigation system 1090 pad 1245 docking with the first print head assembly, make the first print head assembly opening 1242 can be sealed.Therefore,, for Figure 31 D, when the first print head assembly opening 1242 is sealably sealed, the first middle maintenance system panel assembly 1230' can isolate with the residual volume of gas closed component 1010.

As above for the gas closed component 1010 of Figure 31 A-31C each embodiment instructed, printhead can remain positioned in the first print head assembly opening 1242 tops, to do not cover or seal the first print head assembly opening 1242 during various maintenance programs, thus sealing the first print head assembly opening 1242.In each embodiment of gas closed component 1010, for various maintenance programs, print head assembly locking device can be arranged to contact to cover print head assembly opening with pad by adjusting Z axis.In this respect, Figure 31 E can explain in two ways.In the first is explained, the first print head assembly docking pad 1245 and the second print head assembly docking pad 1285 can be made by compressible pad sheet material, for example, above for described in various framing components gas-tight seal.In Figure 31 E, the first print head assembly 1080 has been positioned at above the first maintenance system assembly 1250 in Z-direction, makes pad 1245 compressed, thereby sealably seals the first print head assembly opening 1242.By contrast, the second print head assembly 1081 has been positioned at above the second maintenance system assembly 1290 in Z-direction, to contact the second print head assembly docking pad 1285, thereby covers the second print head assembly opening 1282.In the second is explained, the first print head assembly docking pad 1245 and the second print head assembly docking pad 1285 can be inflatable pads, as above for as described in Figure 28.In Figure 31 E, the first print head assembly 1080 docks pad 1245 to contact the first print head assembly before the first print head assembly docking pad 1245 inflations can be positioned at the first maintenance system assembly 1250 in Z-direction above, thereby covers the first print head assembly opening 1242.By contrast, the second print head assembly 1081 has been positioned at above the second maintenance system assembly 1290 in Z-direction, makes when the second print head assembly docking pad 1285 inflation, and the second print head assembly opening 1282 is sealably sealed.

Figure 31 F shows and for example uses the volume of safeguarding shown in the first middle maintenance system panel assembly 1230' and the second middle maintenance system panel assembly 1270' can use such as the covering sealing such as but not limited to gate valve assembly.For the following instruction of maintenance system panel assembly 1270' in the middle of the first middle maintenance system panel assembly 1230' and second, can be applicable to each embodiment of maintenance system panel assembly and gas closed component.As shown in Figure 31 F, use respectively the continued operation that the first print head assembly 1080 and the second print head assembly 1081 can be provided respectively such as but not limited to the first print head assembly gate valve 1247 and the second print head assembly gate valve 1287 sealing the first print head assembly openings 1242 and the second print head assembly opening 1282.If Figure 31 F is in the middle of first as shown in maintenance system panel assembly 1230', use the first print head assembly gate valve 1247 sealably to seal the first print head assembly opening 1242 (as described in for Figure 27 A and Figure 27 B) and the first passage 1261 (as described in for Figure 28) that sealably seals around base portion 1070 can long-range and automatically carry out.Similarly, as shown in the second middle maintenance system panel assembly 1270' for Figure 31 F, use the second print head assembly gate valve 1287 sealably to seal the second print head assembly opening 1282 (as described in for Figure 27 A and Figure 27 B) and can long-range and automatically carry out.What can imagine is, various head maintenance programs can for example be facilitated by the volume of safeguarding that in the middle of the first middle maintenance system panel assembly 1230' and second, maintenance system panel assembly 1270' limits by isolation, and the continuity of the print procedure that uses the first print head assembly 1080 and the second print head assembly 1081 is still provided simultaneously.

As mentioned before, the first print head assembly docking pad 1245 and the second print head assembly docking pad 1285 can be fixed around the first print head assembly opening 1242 and the second print head assembly opening 1282 respectively.In addition,, as shown in Figure 31 F, the first print head assembly docking pad 1245 and the second print head assembly docking pad 1285 can be fixed around the first print head assembly locking device edge 1088 and the second print head assembly locking device edge 1089 respectively.When safeguarding of the first print head assembly 1080 and the second print head assembly 1081 carried out in indication, the first print head assembly gate valve 1247 and the second print head assembly gate valve 1287 can be opened, and the first print head assembly 1080 and the second print head assembly 1081 can dock with maintenance system panel assembly 1270' in the middle of maintenance system panel assembly 1230' in the middle of first and second, as mentioned before.

Such as but not limited to, can provide any maintenance program of maintenance to be undertaken by maintenance system panel assembly 1270' in the middle of maintenance system panel assembly 1230' and second in the middle of isolating respectively first to the first maintenance system assembly 1250 and the second maintenance system assembly 1290, and not interrupt print procedure.It is also contemplated that, new printhead or print head assembly are loaded into and in system or from system, dismantle printhead or print head assembly can be undertaken by maintenance system panel assembly 1270' in the middle of maintenance system panel assembly 1230' and second in the middle of isolating respectively first, and do not interrupt print procedure.Sort of activity can be such as but not limited to automatically facilitating with robot.Such as but not limited to, can carry out fetching by robot the printhead in volume of safeguarding being stored in such as maintenance system panel assembly 1270' in the middle of the first middle maintenance system panel assembly 1230' and second of Figure 31 F, by robot, the fault printhead on the head device of the first print head assembly 1,080 1082 or on the head device 1083 of the second print head assembly 1081 is replaced with to normally functioning printhead subsequently.After this, robot leaves fault printhead in the module in the first maintenance system assembly 1250 or the second maintenance system assembly 1290 in.This maintenance program can carry out with automated manner, and does not interrupt ongoing print procedure.

After fault printhead being left in robot in the first maintenance system assembly 1250 or the second maintenance system assembly 1290, such as maintenance system panel assembly 1270' in the middle of maintenance system panel assembly 1230' in the middle of first and second safeguard volume can be respectively by using respectively such as but not limited to the first print head assembly gate valve 1247 and second print head assembly gate valve 1287 sealing the first print head assembly openings 1242 and the second print head assembly opening 1282 Seal & isolation sealably.In addition, safeguard that then volume can for example lead to atmospheric environment according to aforementioned instruction, thereby can take out and change fault printhead.As described in more detail subsequently, due to each embodiment of gas purge system volume design with respect to whole gas closed component, gas purification resource can be exclusively used in the volume of safeguarding volume space that purging significantly reduces, thereby significantly reduces for the system recovery time of safeguarding volume.In this respect, need to make to safeguard volume lead to atmospheric environment maintenance program can or do not interrupt or carry out the ongoing print procedure of less interruption in the situation that.

Figure 32 shows according to the enlarged drawing of the first maintenance system assembly 1250 of each embodiment of the gas closed component of this instruction and system.As mentioned before, maintenance system can comprise such as but not limited to for carry out the ink droplet of various printhead calibrating procedures demarcate station, for collect and be contained in purge or perfusion program during the black purging station of discharging from printhead and for purging or perfusion program has purged station and removes unnecessary black blotting station after carrying out.In addition, maintenance system can comprise one or more stations, for receiving from one or more printheads or the head device of the first print head assembly 1080 and the second print head assembly 1081 dismountings, or for being stored in printhead or the head device that can be loaded into the first print head assembly 1080 and the second print head assembly 1081 during maintenance program.

According to each embodiment of the maintenance system assembly of this instruction, for example the first maintenance system assembly 1250 of Figure 32, can comprise ink droplet demarcating module 1252, purge pond module 1254 and blotter module 1256.The first maintenance system assembly 1250 can be arranged in the first maintenance system navigation system 1251.The first maintenance system navigation system 1251 can provide y-axis shift moving, for example, with the print head assembly that optionally makes each in various modules and there is the head device (, the head device 1082 of Figure 31 B) with at least one printhead, align with the first print head assembly opening 1242.Various modules with have with the location of the print head assembly of the head device of at least one printhead can working service system navigation system 1251 and the combination of the first print head assembly navigation system 1090 carry out.Maintenance system navigation system 1251 can provide the Y-X location of the various modules of the first maintenance system assembly 1250 with respect to the first print head assembly opening 1242, and the first print head assembly navigation system 1090 can provide the X-Z location of the first print head assembly 1080 above the first print head assembly opening 1242.In this respect, the head device with at least one printhead can be positioned on the first print head assembly opening 1242 tops or inner to receive maintenance.

Figure 33 illustrates the enlarged perspective of maintenance system panel assembly 1230' in the middle of first, wherein shows by cover cap and has the gloves port of gloves.As noted, can imagine, can be about 2m such as the volume of the various maintenance system panel assemblies of maintenance system panel assembly 1230' in the middle of first ³.Can imagine, each embodiment of maintenance system panel assembly can have about 1m ³volume, and in each embodiment of maintenance system panel assembly, volume can be about 10m ³.For each embodiment of gas closed component, the gas closed component 1010 of Figure 29 for example, framing component assembly portion section can be less than or equal to gas closed component total measurement (volume) about 1%.In each embodiment of gas closed component, framing component assembly portion section can be less than or equal to gas closed component total measurement (volume) about 2%.In each embodiment of gas closed component, framing component assembly portion section can be less than or equal to gas closed component total measurement (volume) about 10%.For each embodiment of gas closed component, framing component assembly portion section can be less than or equal to gas closed component total measurement (volume) about 50%.

According to the gas closed component of this instruction and system, can there is gas circulation and the filtration system in gas closed component inside.This self-filtering system can have a plurality of fan filter units in inside, and can be configured to provide gas laminar flow in inside.Laminar flow can be direction or any other direction from inner top to inner bottom.Although the gas flow producing by the circulatory system is laminar flow not necessarily, gas laminar flow can be used for guaranteeing the thorough and turnover completely of gas in inside.Gas laminar flow also can be used for minimizing turbulent flow, and this turbulent flow is undesirable, because it can make the particle in environment be collected in this regions of turbulent flow, thereby stops filtration system to remove those particles from environment.In addition, in order to keep preferred temperature in inside, can provide the heat regulating system that uses a plurality of heat exchangers, for example, by means of fan or the operation of another gas-recycling plant, near fan or another gas-recycling plant, or be combined with fan or another gas-recycling plant.Gas purification loop can be configured by least one gas purification parts in locking device outside from gas closed component inner loop gas.In this respect, the circulation of gas closed component inside and filtration system are combined the continuous circulation that runs through the remarkable low particulate inert gas with remarkable low-level reactive materials in gas closed component can be provided with the gas purification loop of gas closed component outside.Gas purge system can be configured to keep the very low-level component of not wishing, such as organic solvent and steam thereof and water, steam, oxygen etc.

Figure 34 A is the schematic diagram that gas closed component and system 2100 are shown.Each embodiment of gas closed component and system 2100 can comprise the gas closed component 1500 according to this instruction, gas purification loop 2130 and at least one heat regulating system 2140 being communicated with gas closed component 1500 fluids.In addition, each embodiment of gas closed component and system can have pressurized inert gas recirculating system 2169, its can supplying inert gas for operating various devices, for example, for the substrate suspending bench of OLED print system.Each embodiment of pressurized inert gas recirculating system 2169 can be used compressor, air blast and the two combination as the source of each embodiment of inert gas recirculating system 2169, as subsequently by described in more detail.In addition, gas closed component and system 2100 can have filtration and the circulatory system (not shown) of gas closed component and system 2100 inside.

For according to each embodiment of the gas closed component of this instruction, the design of pipeline can be filtered separated with the inert gas circulating by the inert gas of gas purification loop 2130 and the inside of each enforcement at gas closed component that cycle through Figure 34 A continuously.Gas purification loop 2130 comprises egress line 2131, and it is from gas closed component 1500 to removal of solvents parts 2132 and then to gas purge system 2134.Purge solvent and then by entrance circuit 2133, turn back to gas closed component 1500 such as the inert gas of other reactant gas material of oxygen and steam.Gas purification loop 2130 also can comprise suitable pipe and connection, and sensor, for example, and lambda sensor, water vapor sensor and solvent vapour sensor.Such as the gas circulation unit of fan, air blast or motor etc., can arrange individually or integrated in gas purge system 2134 for example, with by gas circulation by gas purification loop 2130.According to each embodiment of gas closed component, although removal of solvents system 2132 and gas purge system 2134 are shown as independent unit in schematic diagram shown in Figure 33, removal of solvents system 2132 and gas purge system 2134 can be used as together with single clean unit is contained in.Heat regulating system 2140 can comprise at least one cooler 2141, its can have for by circulate coolant to the fluid issuing circuit 2143 of gas closed component with for making cooling agent turn back to the fluid intake circuit 2145 of cooler.

The gas purification loop 2130 of Figure 34 A can have the removal of solvents system 2132 of the gas purge system of being arranged on 2134 upstreams, so that pass removal of solvents system 2132 from the inert gas of gas closed component 1500 circulations via egress line 2131.According to each embodiment, removal of solvents system 2132 can be the solvent capture systems of the inert gas adsorption solvent steam of the removal of solvents system 2132 based on from through Figure 34 A.Such as but not limited to one or more beds of the adsorbent such as active carbon, molecular sieve etc., can effectively remove the organic solvent steam of wide region.For each embodiment of gas closed component, can adopt cold capture technique to remove the solvent vapour in removal of solvents system 2132.As mentioned before, for according to each embodiment of the gas closed component of this instruction, such as the sensor of lambda sensor, water vapor sensor and solvent vapour sensor, can be used for monitoring such material from cycling through continuously such as the effective removal the inert gas of the gas closed component system of the gas closed component system 2100 of Figure 34.Each embodiment of removal of solvents system can indicate the adsorbent such as active carbon, molecular sieve etc. when to reach capacity, thus one or more beds of renewable or replacing adsorbent.The regeneration of molecular sieve may relate to heating molecular sieve, make that molecular sieve contacts with composition gas, their combination etc.The molecular sieve that is configured to catch the various materials that comprise oxygen, steam and solvent can be regenerated by heating and being exposed to the composition gas that comprises hydrogen, for example, the composition gas of the hydrogen that comprises about 96% nitrogen and 4%, wherein said percentage is percent by volume or percentage by weight.The physics regeneration of active carbon can be used the similar program heating under inert environments to carry out.

Any suitable gas purge system all can be used for the gas purge system 2134 of the gas purification loop 2130 of Figure 34 A.Can be from for example MBRAUN Inc. (Statham, New Hampshire) or the gas purge system that obtains of Innovative Technology (Amesbury, Massachusetts) can be used for being integrated into according in each embodiment of the gas closed component of this instruction.Gas purge system 2134 can be used for one or more inert gases in Purge gas closed component and system 2100, for example, and with all gas environment in Purge gas closed component.As mentioned before, in order to make gas circulation pass through gas purification loop 2130, gas purge system 2134 can have gas circulation unit, such as fan, air blast or motor etc.In this respect, gas purge system can be selected according to the volume of locking device, and it can be defined for the volume flow rate that makes inert gas move through gas purge system.For comprising having, reach about 4m ³the gas closed component of gas closed component and each embodiment of system of volume, can use and can move about 84m ³the gas purge system of/h.For comprising having, reach about 10m ³the gas closed component of gas closed component and each embodiment of system of volume, can use and can move about 155m ³the gas purge system of/h.For having at about 52-114m ³between each embodiment of gas closed component of volume, can use more than one gas purge system.

Any suitable pneumatic filter or purifier can be included in the gas purge system 2134 of this instruction.In certain embodiments, gas purge system can comprise two purifiers in parallel, make a device can leave production line for safeguarding, and another device can be used for the operation of continuation system, and does not interrupt.In certain embodiments, for example, gas purge system can comprise one or more molecular sieves.In certain embodiments, gas purge system can at least comprise the first molecular sieve and the second molecular sieve, make at the molecular sieve impurity that becomes saturated or perhaps think that can not enough effectively operate time, system switches to another molecular sieve, the molecular sieve of simultaneously regenerate saturated or poor efficiency.Control module can be provided for determining the operating efficiency of each molecular sieve, for switching between the operation at different molecular sieve, and for one or more molecular sieves of regenerating, or for its combination.As mentioned before, molecular sieve can be reproduced and reuse.

About the heat regulating system 2140 of Figure 34 A, at least one fluid cooler 2141 can be set, for the gaseous environment in refrigerating gas closed component and system 2100.For each embodiment of the gas closed component of this instruction, fluid cooler 2141 flows to the heat exchanger in locking device by cooling fluid, and wherein, inert gas is through the filtration system of locking device inside.At least one fluid cooler also can be arranged in gas closed component and system 2100, with the cooling heat that comes from the equipment of gas locking device 2100 interior encapsulation.Such as but not limited to, at least one fluid cooler also can be provided for gas closed component and system 2100, with the cooling heat that comes from OLED print system.Heat regulating system 2140 can comprise heat exchange or Peltier device, and can have various cooling capacities.For example, for each embodiment of gas closed component and system, cooler can provide at about 2kW to the cooling capacity between about 20kW.Fluid cooler 1136 and 1138 can cooling one or more fluids.In certain embodiments, fluid cooler can be used multiple fluid as cooling agent, such as but not limited to, water, antifreezing agent, cold-producing medium and combination thereof, as heat-exchange fluid.Suitable can be used for connecting about pipe and system unit without leaking locking connection.

As the gas closed component 1000 for Figure 23 and Figure 24 or for each embodiment of the gas closed component as shown in the gas closed component 1010 of Figure 29 and Figure 30, can have the first framing component assembly portion section that limits the first volume and the second framing component assembly portion section that limits the second volume, wherein each volume can be separated with another volume.For the gas closed component 1000 of Figure 23 and Figure 24 or for each embodiment of the gas closed component 1010 of Figure 29 and Figure 30, all system features of describing for the gas closed component of Figure 34 A can be used as for having the system features of the such embodiment that limits the first framing component assembly portion section of the first volume and the second framing component assembly portion section of restriction the second volume and are included, and wherein each volume can be separated with another volume.In addition, as shown in Figure 34 B, for gas component and system 2150, for each embodiment with the gas closed component of the second framing component assembly portion section that limits the first framing component assembly portion section of the first volume and limit the second volume, each volume can be arranged to be communicated with the independent fluid of gas purification loop 2130.

As shown in Figure 34 B, the gas closed component 1500 of gas closed component and system 2150 can have the first section 1500-S1 of framing component assembly portion that limits the first volume and the second section 1500-S2 of framing component assembly portion that limits the second volume.If all valve V ₁, V ₂, V ₃and V ₄all open, gas purification loop 2130 roughly as operated above for as described in the gas closed component of Figure 34 A and system 1500 so.At V ₃and V ₄in the situation of closing, only the first section 1500-S1 of framing component assembly portion is communicated with gas purification loop 2130 fluids.Such as but not limited to, during needs the second section 1500-S2 of framing component assembly portion leads to the maintenance program of atmospheric environment, when the second section 1500-S2 of framing component assembly portion sealably closes and therefore isolates with the section 1500-S1 of framing component assembly portion, can use this valve state.At V ₁and V ₂in the situation of closing, only the second section 1500-S2 of framing component assembly portion is communicated with gas purification loop 2130 fluids.Such as but not limited to, after the second section 1500-S2 of framing component assembly portion leads to atmospheric environment, this section, between convalescence, can be used this valve state.As mentioned before, the requirement of gas purification loop 2130 is specified with respect to the total measurement (volume) of gas closed component 1500.Therefore, for example, by (resource of gas purge system being exclusively used in to framing component assembly portion section, the second section 1500-S2 of framing component assembly portion, its shown in Figure 34 B for volume is significantly being less than the total measurement (volume) of gas locking device 1500) recovery, can significantly reduce recovery time.

As shown in Figure 35 and Figure 36, one or more fan filter units can be configured to provide the roughly laminar flow by inner gas.According to each embodiment of the gas closed component according to this instruction, one or more fan units arrange the first inner surface near gaseous environment locking device, and one or more pipe-line system entrance arranges relative the second inner surface near gaseous environment locking device.For example, gaseous environment locking device can comprise inner top and bottom inner rim, described one or more fan unit can arrange near inner top, and one or more pipe-line system entrances can comprise a plurality of entrance openings that arrange near bottom inner rim, it is a part for pipe-line system, as shown in Figure 15-17.

Figure 35 is along the cross sectional view intercepting according to the length of the gas closed component of each embodiment of this instruction and system 2200.The gas closed component of Figure 35 and system 2200 can comprise gas locking device 1500 and gas purge system 2130 (also referring to Figure 34), heat regulating system 2140, filtration and the circulatory system 2150 and the pipe-line system 2170 that can hold OLED print system 50.Heat regulating system 2140 can comprise the fluid cooler 2141 being communicated with cooler outlet circuit 2143 and cooler entrance circuit 2145 fluids.Cooling fluid can leave fluid cooler 2141, flow through cooler outlet circuit 2143, and flow to heat exchanger, for each embodiment of the gas closed component shown in Figure 35 and system, it can be arranged near each of a plurality of fan filter units.Fluid can return to cooler 2141 by cooler entrance circuit 2145 near heat exchanger fan filter unit, to remain on constant preferred temperature.As mentioned before, cooler outlet circuit 2141 and cooler entrance circuit 2143 are communicated with a plurality of heat exchanger fluid, comprise the first heat exchanger 2142, the second heat exchanger 2144 and the 3rd heat exchanger 2146.According to each embodiment of the gas closed component shown in Figure 34 and system, the first heat exchanger 2142, the second heat exchanger 2144 and the 3rd heat exchanger 2146 respectively with the first fan filter unit 2152, the second fan filter unit 2154 and three fan filter unit 2156 thermal communications of filtration system 2150.

In Figure 35, many arrows show to or from the flowing of each fan filter unit, and also show flowing in the pipe-line system 2170 that comprises the first pipe-line system pipe 2173 and second pipe system pipes 2174, as shown in the rough schematic view of Figure 34.The first pipe-line system pipe 2173 can and can be discharged by the first pipe outlet 2175 by the first entrance 2171 receiver gases.Similarly, second pipe system pipes 2174 can export 2176 discharges by second pipe entrance 2172 receiver gases and by second pipe.In addition, as shown in figure 34, pipe-line system 2170 by restriceted envelope 2180 effectively and by interior recirculation the inert gas by filtration system 2150 separately, space 2180 is communicated with gas purge system 2130 fluids via gas purification egress line 2131.Thisly comprise that the circulatory system for each embodiment of the pipe-line system described in Figure 15-17 provides roughly laminar flow, minimize turbulent flow, circulation, turnover and the filtration of the particulate matter of the gaseous environment of promotion in locking device inside, and provide by the circulation of the gas purge system of gas closed component outside.

Figure 36 is according to the cross sectional view of the length intercepting of the gas closed component of each embodiment of the gas closed component of this instruction and system 2300 along basis.Similar with the gas closed component 2200 of Figure 35, the gas closed component system 2300 of Figure 36 can comprise gas locking device 1500, and it can hold OLED print system 50 and gas purge system 2130 (also referring to Figure 34), heat regulating system 2140, filtration and the circulatory system 2150 and pipe-line system 2170.Each embodiment for gas closed component 2300, heat regulating system 2140 can comprise the fluid cooler 2141 being communicated with cooler outlet circuit 2143 and cooler entrance circuit 2145 fluids, can be communicated with a plurality of heat exchanger fluid, for example the first heat exchanger 2142 and the second heat exchanger 2144, as shown in figure 36.According to each embodiment of the gas closed component shown in Figure 36 and system, by locating near the pipe outlet such as the first pipe outlet 2175 of pipe-line system 2170 and second pipe outlet 2176, such as each heat exchanger of the first heat exchanger 2142 and the second heat exchanger 2144 can with the inert gas thermal communication of circulation.In this respect, for example, from entrance (the first entrance 2171 and the second pipe entrance 2172 of pipe-line system 2170), return so that the inert gas filtering can be by thermal conditioning before cycling through respectively the first fan filter unit 2152, the second fan filter unit 2154 and the three fan filter unit 2156 of the filtration system 2150 of Figure 36 for example.

As found out from showing the arrow of direction of the inert gas of the locking device that cycles through Figure 35 and 36, the roughly laminar flow towards bottom is provided provide from locking device top downwards fan filter unit.For example, can be from Flanders Corporation (Washington, North Carolina) or the fan filter unit that obtains of Envirco Corporation (Sanford, North Carolina) can be used for being integrated into according in each embodiment of the gas closed component of this instruction.About 350 cubic feet/minute (CFM) of the commutative inert gas by each unit of each embodiment of fan filter unit are to approximately between 700CFM.As shown at Figure 35 and Figure 36, because fan filter unit is in parallel connection rather than arranged in series, thereby the amount of the inert gas that can exchange in comprising the system of a plurality of fan filter units is proportional with the element number of using.Near the bottom of locking device, gas flow guides towards a plurality of pipe-line system entrances, is schematically illustrated as the first entrance 2171 and second pipe entrance 2172 in Figure 35 and 36.As above for as described in Figure 15-17, entrance is positioned to the roughly bottom of locking device and makes gas flow downward and be beneficial to the good turnover of the gaseous environment in locking device from top fan filter unit, and promote thorough turnover and the movement of all gas environment of the gas purge system by being combined with locking device.By the laminar flow that use is filtered and the circulatory system 2150 makes gaseous environment cycle through the gaseous environment in pipe-line system and promotion locking device, have enough to meet the need with thorough, this pipe-line system is separated the inert gas flow that cycles through gas purification loop 2130, the level of for example, in reactive materials (water and oxygen, and every kind of solvent) each for example can remain on 100ppm or lower, for example 1.0ppm or lower, 0.1ppm or lower in each embodiment of gas closed component.

According to each embodiment of the gas closed component system for OLED print system, the quantity of fan filter unit can be selected according to the physical location of the substrate in print system during processing.Therefore,, although 3 fan filter units have been shown in Figure 35 and 36, the quantity of fan filter unit can change.For example, Figure 37 is the cross sectional view along the length intercepting of gas closed component and system 2400, and the gas closed component shown in itself and Figure 23 and Figure 24 and Figure 29 and Figure 30 and system class are seemingly.Gas closed component and system 2400 can comprise gas closed component 1500, and it holds the OLED print system 1050 being supported on base portion 1220.During the OLED that the substrate suspending bench 1054 of OLED print system is limited to substrate prints, substrate is removable by the stroke of system 2400.Therefore, the filtration system 2150 of gas closed component and system 2400 has the fan filter unit of suitable quantity, and it illustrates with 2151-2155, and corresponding by the physics stroke of OLED print system 1050 with substrate during processing.In addition, the fixed wheel exterior feature that the schematic cross sectional representation of Figure 37 has gone out each embodiment of gas locking device can reduce inert gas volume required during OLED print processing effectively, and be made as the inside that is easy to approach gas locking device 1500 simultaneously, (during processing, remotely approach, for example use and be arranged on the gloves in each gloves port, or by various detachable panels, directly approach the in the situation that of attended operation).

Each embodiment of gas locking device and system can be used pressurized inert gas recirculating system, for operating various pneumatic operation devices and equipment.In addition, as mentioned before, the embodiment of the gas closed component of this instruction can remain on slight positive pressure with respect to external environment condition, such as but not limited between the extremely about 8mbarg of about 2mbarg.In gas closed component system, keep pressurized inert gas recirculating system may have challenge, because it has the dynamic balance play with continue carry out relevant with the slight positive internal pressure that keeps gas closed component and system, and introduces continuously gas-pressurized in gas closed component and system simultaneously.In addition, the variable demand of each device and equipment can form the various gas closed components of this instruction and the irregular pressure distribution of system.Under this condition, keep dynamic pressure balance can be provided for continuing the globality of the OLED print procedure that carries out the gas closed component that remains on slight positive pressure with respect to external environment condition.

As shown in figure 38, each embodiment of gas closed component and system 3000 can have extraneous gas loop 2500, for integrating and control inert gas source 2509 and clean dry air (CDA) source 2512 for the various aspects of the operation of gas closed component and system 3000.It will be appreciated by the skilled addressee that gas closed component and system 3000 also can comprise that internal particle filters and each embodiment of gas-circulating system and each embodiment of extraneous gas cleaning system, as mentioned before.Except for integrating and control the external circuit 2500 in inert gas source 2509 and CDA source 2512, gas closed component and system 3000 can have compressor loop 2160, it can supplying inert gas, for operating each device and the equipment that can be arranged on gas closed component and system 3000 inside.

The compressor loop 2160 of Figure 38 can comprise compressor 2162, the first reservoir 2164 and the second reservoir 2168 that is configured to fluid connection.Compressor 2162 can be configured to be compressed to desired pressure from the inert gas of gas closed component 1500 suctions.The entrance side of compressor loop 2160 can be communicated with gas closed component 1500 fluids by having the circuit 2503 of valve 2505 and check-valves 2507 via gas closed component outlet 2501.Compressor loop 2160 can be communicated with gas closed component 1500 fluids via extraneous gas loop 2500 on the outlet side of compressor loop 2160.Reservoir 2164 can be arranged between compressor 2162 and compressor loop 2160 and the joint portion in extraneous gas loop 2500, and can be configured to produce 5psig or higher pressure.The second reservoir 2168 can be in compressor loop 2160, the fluctuation causing with about 60Hz circulation due to compressor piston for damping.For each embodiment of compressor loop 2160, the first reservoir 2164 can have the capacity between about 80 gallons to about 160 gallons, and the second reservoir can have the capacity between about 30 gallons to about 60 gallons.According to each embodiment of gas closed component and system 3000, compressor 2162 can be the zero compressor (zero ingress compressor) that enters.Various types of zero enters compressor can be in the situation that do not have environmental gas to operate in leaking into the gas closed component of this instruction and each embodiment of system.Zero each embodiment that enters compressor moves serially, for example, during utilization needs the OLED print processing of each device of compressed inert and the purposes of equipment.

Reservoir 2164 can be configured to receive and gather compressed inert from compressor 2162.Reservoir 2164 can be supplied to compressed inert gas closed component 1500 when needed.For example, reservoir 2164 can provide gas to keep the pressure of all parts of gas closed component 1500, such as but not limited to as lower one or more: pneumatic robot, substrate suspending bench, air bearing, air lining, Compressed Gas instrument, pneumatic actuator and combination thereof.If Figure 38 is for as shown in gas closed component and system 3000, gas closed component 1500 can have the OLED print system 50 being encapsulated in wherein.As shown at Figure 24 and Figure 30, OLED print system 50 can be supported by granite level 70, and can comprise substrate suspending bench 54, for substrate being transported to printhead chamber correct position and supporting substrate during OLED print processing.In addition the air bearing 58 being supported on bridge 56, can replace for example linear mechanical bearing use.For the gas locking device of this instruction and each embodiment of system, use various pneumatically-operated devices and equipment can provide low particle to generate performance and low maintenance.Compressor loop 2160 can be configured to pressurized inert gas to be supplied to continuously each device and the equipment of gas provision for sealing 3000.Except supplied with pressurized inert gas, the substrate suspending bench 54 of OLED print system 50 (it uses air bearing technology) is also used vacuum system 2550, and vacuum system 2550 is communicated with gas closed component 1500 by circuit 2552 when valve 2554 is in an open position.

According to the pressurized inert gas recirculating system of this instruction, can have as shown in Figure 38 and control bypass circulation 2165 for the pressure of compressor loop 2160, it is in order to compensate during use the variable demand of gas-pressurized, thereby the dynamic equilibrium of the gas closed component of this instruction and each embodiment of system is provided.For according to each embodiment of the gas closed component of this instruction and system, bypass circulation can keep the constant pressure in reservoir 2164, and does not disturb or change the pressure in locking device 1500.Bypass circulation 2165 can have the first bypass inlet valve 2161 on the entrance side that is positioned at bypass circulation 2165, and it is closed, unless used bypass circulation 2165.Bypass circulation 2165 also can have back pressure regulator, and it can use when second valve 2163 is closed.Bypass circulation 2165 can have second reservoir 2168 at the outlet side place that is arranged on bypass circulation 2165.For using the zero embodiment that enters the compressor loop 2160 of compressor, bypass circulation 2165 can compensate at gas closed component and system and between the operating period, pass in time the little skew of generable pressure.When bypass inlet valve 2161 is in an open position, bypass circulation 2165 can be communicated with compressor loop 2160 fluids on the entrance side of bypass circulation 2165.When bypass inlet valve 2161 is opened, if need to be from the inert gas of compressor loop 2160 in gas closed component 1500 inside, the inert gas of shunting by bypass circulation 2165 so can be recycled to compressor.When the inert gas pressure in reservoir 2164 surpasses predetermined threshold value pressure, compressor loop 2160 is configured to inert gas to shunt by bypass circulation 2165.The predetermined threshold value pressure of reservoir 2164 can be approximately between the extremely about 200psig of 25psig when the flow rate of at least about 1 cubic feet/minute (cfm), or can be approximately between the extremely about 150psig of 50psig when the flow rate of at least about 1 cubic feet/minute (cfm), or can be at about 75psig to approximately between 125psig when the flow rate of at least about 1 cubic feet/minute (cfm), or can be at about 90psig to approximately between 95psig when the flow rate of at least about 1 cubic feet/minute (cfm).

Each embodiment of compressor loop 2160 can be used except zero and enter the various compressors compressor, and for example variable speed compressor maybe can be controlled in the compressor of the state of opening or closing.As mentioned before, zero enter compressor and guarantee not have environment reaction material can introduce gas closed component and system.Therefore, prevent that any compressor configuration that environment reaction material is introduced in gas closed component and system all can be used for compressor loop 2160.According to each embodiment, the compressor 2162 of gas closed component and system 3000 can be contained in such as but not limited in gas-tight seal housing.Enclosure interior can be configured to be communicated with inert gas source fluid, for example, form the identical inert gas of the inert gas environment of gas closed component 1500.For each embodiment of compressor loop 2160, compressor 2162 can be controlled in constant speed to keep constant pressure.Do not using zero to enter in other embodiment of compressor loop 2160 of compressor, compressor 2162 can cut out and open when reaching minimum threshold pressure when reaching max-thresholds pressure.

At the Figure 39 for gas closed component and system 3100, air blast loop 2190 and blower vacuum loop 2550 show that it is contained in gas closed component 1500 for operating the substrate suspending bench 1054 of OLED print system 1050.As above, for as described in compressor loop 2160, air blast loop 2190 can be configured to pressurized inert gas to be supplied to continuously substrate suspending bench 54.

Can use the gas closed component of pressurized inert gas recirculating system and each embodiment of system can there is the various loops of using various pressurized-gas sources, for example at least one in compressor, air blast and combination thereof.At the Figure 39 for gas closed component and system 3100, compressor loop 2160 can be communicated with extraneous gas loop 2500 fluids, and it can be used for for the inert gas that is applied to high flow rate manifold 2525 and low consumption manifold 2513.For according to each embodiment of the gas closed component of this instruction and system, as shown in the Figure 39 for gas closed component and system 3000, high flow rate manifold 2525 can be used for inert gas to be supplied to various devices and equipment, such as but not limited to as lower one or more: substrate suspending bench, pneumatic robot, air bearing, air lining and Compressed Gas instrument and combination thereof.For according to each embodiment of the gas closed component of this instruction and system, low consumption manifold 2513 can be used for inert gas to be supplied to various devices and equipment, such as but not limited to as lower one or more: isolator and pneumatic actuator and combination thereof.

Each embodiment for gas closed component and system 3100, air blast loop 2190 can be used for pressurized inert gas to be supplied to each embodiment of substrate suspending bench 1054, and the compressor loop 2160 being communicated with extraneous gas loop 2500 fluids can for pressurized inert gas is supplied to such as but not limited to as lower one or more: pneumatic robot, air bearing, air lining and Compressed Gas instrument and combination thereof.Except supplied with pressurized inert gas, the substrate suspending bench 54 of OLED print system 1050 (it uses air bearing technology) is also used vacuum system 2550, and vacuum system 2550 is communicated with gas closed component 1500 by circuit 2552 when valve 2554 is in an open position.The housing 2192 in air blast loop 2190 can be by for being supplied to inert gas pressurized source the first air blast 2194 of substrate suspending bench 1054 and remaining on inert gas environment as the second air blast 2550 of the vacuum source of substrate suspending bench 1054.Can make air blast be suitable as the pressurized inert gas source of each embodiment of substrate suspending bench or the attribute of vacuum source comprise such as but not limited to: they have high reliability, make them have low maintenance; There is variable speed control; And the volume flow with wide region (can provide at about 100m ³/ h is to about 2500m ³each embodiment of volume flow between/h).Each embodiment in air blast loop 2190 also can have at first isolating valve 2193 at the arrival end place in air blast loop 2190 and at check-valves 2195 and second isolating valve 2197 at the port of export place of compressor loop 2190.Each embodiment in air blast loop 2190 can have adjustable valve 2196 (can be such as but not limited to gate valve, butterfly valve, needle valve or globe valve) and for the inert gas from blower assembly 2190 to substrate suspension system 1054 being remained on to the heat exchanger 2198 of limiting temperature.

Figure 39 shows also extraneous gas loop 2500 shown in Figure 38, for integrating and control inert gas source 2509 and clean dry air (CDA) source 2512 for the various aspects of the operation of the gas closed component of Figure 38 and the gas closed component of system 3000 and Figure 39 and system 3100.The extraneous gas loop 2500 of Figure 38 and Figure 39 can comprise at least four mechanical valve.These valves comprise the first mechanical valve 2502, the second mechanical valve 2504, the 3rd mechanical valve 2506 and the 4th mechanical valve 2508.These each valves are arranged in the position of each flow circuits, allow to control inert gas (for example,, such as nitrogen, any rare gas and any combination thereof) and air-source (for example, clean dry air (CDA)) both.Housing inert gas circuit 2510 extends from housing inert gas source 2509.Housing inert gas circuit 2510 continues to extend linearly as low consumption manifold line 2152, and low consumption manifold line 2152 is communicated with low consumption manifold 2513 fluids.Cross link First section 2514 is extended from the first mobile joint portion 2516, and the first mobile joint portion 2516 is positioned at the cross part place of housing inert gas circuit 2510, low consumption manifold line 2152 and cross link First section 2514.Cross link First section 2514 extends to the second mobile joint portion 2518.Compressor inert gas circuit 2520 extends and ends at second joint portion 2518 of flowing from the reservoir 2164 of compressor loop 2160.CDA circuit 2,522 2512 extends and continues as high flow rate manifold line 2524 from CDA source, and high flow rate manifold line 2524 is communicated with high flow rate manifold 2525 fluids.The 3rd flow combinations portion 2526 is positioned at the cross part place of second section 2528 of cross link, clean dry air circuit 2522 and high flow rate manifold line 2524.Second section 2528 of cross link extends to the 3rd flow combinations portion 2526 from the second mobile joint portion 2518.

In conjunction with the description in extraneous gas loop 2500 and with reference to Figure 40, be below the general introduction of some each operator schemes, Figure 40 is the form of valve position of each operator scheme of gas closed component and system.

The form of Figure 40 shows procedure schema, and wherein, valve state produces only inert gas compressor operator scheme.In procedure schema, as shown in figure 38 and as shown in the valve state of Figure 40, the first mechanical valve 2502 and the 3rd mechanical valve 2506 are in closing configuration.The second mechanical valve 2504 and the 4th mechanical valve 2508 are in opening configuration.Due to these concrete valves configurations, compressed inert be allowed to flow to low consumption manifold 2513 and high flow rate manifold 2525 both.Under normal operation, from the inert gas of housing inert gas source with from the clean dry air in CDA source, be prevented from flowing to any in low consumption manifold 2513 and high flow rate manifold 2525.

As shown in figure 40 and with reference to Figure 39, there is the series of valves state for safeguarding and recovering.The gas closed component of this instruction and each embodiment of system can safeguard every now and then, in addition need to be from system failure recovery.In this concrete pattern, the second mechanical valve 2504 and the 4th mechanical valve 2508 are in closing configuration.The first mechanical valve 2502 and the 3rd mechanical valve 2506 are in opening configuration.Housing inert gas source and CDA source provide inert gas, to be supplied in low consumption by low consumption manifold 2513 and also to have, are during restoration difficult to effectively those parts of the dead volume of purging.The example of this parts comprises pneumatic actuator.By contrast, those parts of consumption can be by means of high flow rate manifold 2525 supply CDA during safeguarding.Use valve 2504,2508,2530 isolation compressors to prevent from polluting the inert gas in compressor and reservoir such as the reactive materials of oxygen and steam.

After safeguarding or recovering to have completed, gas closed component must be by some cycle purge, until reached enough low-level for every kind of material such as the various reactive environments materials of oxygen G&W, for example 100ppm or lower, for example 10ppm or lower, 1.0ppm or lower or 0.1ppm or lower.As shown in figure 40 and with reference to Figure 39, during purge mode, the 3rd mechanical valve 2506 close and the 5th mechanical valve 2530 also in closing configuration.The first mechanical valve 2502, the second mechanical valve 2504 and the 4th mechanical valve 2508 are in opening configuration.Due to this concrete valve configuration, only housing inert gas be allowed to flow and be allowed to flow to low consumption manifold 2513 and high flow rate manifold 2525 both.

As shown in Figure 40 and with reference to Figure 38, " without " pattern that pattern and leak-testing pattern are both used as required that flows." without flowing, " pattern is the pattern with following valve state configuration: the first mechanical valve 2502, the second mechanical valve 2504, the 3rd mechanical valve 2506 and the 4th mechanical valve 2508 are all in closing configuration.This close configuration cause system " without flowing, " pattern wherein, all can not arrive low consumption manifold 2513 or high flow rate manifold 2525 from any gas in inert gas source, CDA source or compressor source.This " without flow pattern " may be useful when system is not used, and can extend the maintenance free time in the period.Leak-testing pattern can be used for the leakage in detection system.Leak-testing pattern is used compressed inert exclusively, and it is isolated system for example, to the low consumption parts of low consumption manifold 2513 (, isolator and pneumatic actuator) are carried out to leak test from the high flow rate manifold 2525 of Figure 39.In this leak-testing pattern, the first mechanical valve 2502, the 3rd mechanical valve 2506 and the 4th mechanical valve 2508 are all in closing configuration.Only the second mechanical valve 2504 is in opening configuration.As a result, compressed nitrogen can flow to low consumption manifold 2513 from compressor inert gas source 2519, and there is no the gas flow to high flow rate manifold 5525.

Each embodiment of suspending bench can be in the gas closed component of this instruction and each embodiment of system any in use, to stablize the load of carrying such as OLED flat display substrate.Can imagine, without friction suspending bench, can provide in any in each embodiment of the inert gas locking device of this instruction the stable conveying for the printing of the load such as oled substrate.

For example, in Fig. 1, gas closed component and system 2000 can comprise gas closed component 1500, and it has access hatch 1512 and goes out port strobe 1522, for the substrate such as OLED flat display substrate is moved into and shift out gas closed system 2000.In Figure 37, gas closed component and system 2400 can have the gas closed component 1500 on base portion 1200 that is supported on illustrating, and gas closed component 1500 can hold OLED print system 50.During the substrate suspending bench 54 of OLED print system 50 is limited to the inkjet printing of OLED flat display substrate, substrate (not shown) is removable by the stroke of inert gas closed component and system 2400.As above, with reference to as described in Figure 38, each embodiment of gas closed component and system can have external circuit, comprises such as but not limited to compressor loop and vacuum source, and it can provide pressurized inert gas and the vacuum of using in the operation of suspending bench.As above, with reference to as described in Figure 39, each embodiment of the external circuit of use air blast technology can be provided for operating pressurized inert gas and the vacuum source of suspending bench.

As mentioned before, the gas closed component of this instruction and each embodiment of system can process from being less than Gen 3.5 substrates (it has the size of about 61cm * 72cm) and the OLED flat display substrate of a series of sizes of the development of the size in higher generation.What can imagine is, each embodiment of gas closed component and system can process female glass size of Gen 5.5 (size with about 130cm * 150cm) and Gen 7.5 (size with about 195cm * 225cm), and each substrate can cut into the dull and stereotyped and larger of eight 42 " or six 47 ".As mentioned before, Gen 8.5 is about 220cm * 250cm, and its each substrate can cut into the flat board of six 55 " or eight 46 ".Yet substrate constantly increases for size, the current available Gen 10 that makes to have the size of about 285cm * 305cm seems not to be last substrate size in generation.In addition, come from and use size that the term of the substrate based on glass is recorded to can be applicable to be applicable to the substrate of any material that OLED prints.Therefore, exist various substrate sizes and material require to print in the gas closed component of this instruction and each embodiment of system during stable conveying.

In Figure 41, illustrated according to the suspending bench of each embodiment of this instruction.The suspending bench 700 of prior art can have district 710, wherein can exert pressure and vacuum by a plurality of ports.This district with pressure and vacuum control can provide fluid (fluidic) spring with two-way stiffness between district 710 and substrate (not shown) effectively, thereby forms the remarkable control to the gap between substrate and district 710.The gap existing between load and suspending bench surface is called as hoverheight.710 district, suspending bench 700 district such as Figure 41 can provide controlled hoverheight for the load such as substrate, in described district, use a plurality of pressure and vacuum ports to form the fluid spring with two-way stiffness.

Near district 710 be respectively First Transition district 720 and the second transition region 722, and near First Transition district 720 and the second transition region 722, be then respectively pressure area 740 and 742 only.In transition region, the ratio of pressure and vacuum nozzle court only increases pressure area gradually, to provide from the transition gradually of 710Xiang district, district 740 and 7422.As shown in figure 41, Figure 42 shows the enlarged drawing in Zhe Sange district.For each embodiment of for example substrate suspending bench as shown in figure 41, only pressure area 740,742 is depicted as by guide rail structure and forms.For each embodiment of substrate suspending bench, such as the only pressure area of the only pressure area 740,742 of Figure 41, can be formed by continuous plate, for example Figure 41 is shown for pressure-region of no pressure 710.

For each embodiment of suspending bench shown in Figure 41, in pressure-region of no pressure, transition region and only can have roughly height uniformly between pressure area, thereby in tolerance, Zhe Sange district is roughly arranged in a plane.Those of ordinary skill in the art will understand, and each district can change in length.Such as but not limited to, for the sensation of scale and ratio is provided, for each substrate, transition region can be about 400mm, and only pressure area can be about 2.5m, and pressure-region of no pressure can be about 800mm.

In Figure 41, only pressure area 740 and 742 does not provide the fluid spring with two-way stiffness, and does not therefore provide district 710 available control.Therefore, the hoverheight of load is conventionally than larger in the hoverheight of pressure-region of no pressure upper substrate on pressure area only, to allow enough height, thereby load will can only not collided with suspending bench in pressure area.Such as but not limited to, can expect to process oled panel substrate to there are about 150 μ in only pressure area that exceed such as district 740 and 742 to the hoverheight between about 300 μ, so and exceed pressure-region of no pressure such as district 710 at about 30 μ to the hoverheight between about 50 μ.

For each embodiment of suspending bench 700, there is the not same district of the hoverheight that provides variable and for all districts across suspending bench uniformly the result of the combination of height be, when substrate is advanced above suspending bench, curved substrate to occur.Figure 43 A and Figure 43 B show the curved substrate when substrate 760 is advanced above suspending bench 700.In Figure 43 A, when substrate 760 is advanced above suspending bench 700, the part that substrate 760 rests on 710 tops, pressure-region of no pressure has the first hoverheight FH ₁, and substrate 760 rests on the only part of 740 tops, pressure area, there is the second hoverheight FH ₂, and the part that substrate 760 rests on transition region 720 tops has variable hoverheight.In Figure 43 B, when substrate 760 is advanced in the opposite direction above suspending bench 700, the part that substrate 760 rests on 710 tops, pressure-region of no pressure has the first hoverheight FH ₁, and substrate 760 rests on the only part of 742 tops, pressure area, there is the second hoverheight FH ₂, and the part that substrate 760 rests on transition region 722 tops can have variable hoverheight.As a result, the bending in substrate 760 is all obvious on arbitrary direct of travel of the substrate 150 above suspending bench 200.

According to the holding for printing the gas closed component of print system and each embodiment of system such as but not limited to OLED panel substrate of this instruction, curved substrate to a certain degree can not have negative effect for goods.Yet for using according to each embodiment of the print procedure of the gas closed component of this instruction and system, curved substrate can have negative effect for goods.

Therefore, each embodiment of suspending bench shown in Figure 44 can have variable transition region height, to make when substrate moves above suspending bench, such as the load of OLED flat display substrate, keeps general planar.Figure 44 show in pressure-region of no pressure 810 respectively and first only pressure area 840 and second only between pressure area 842, there is First Transition district 820 and the second transition region 822 being in tilted layout.The only pressure area 820 and second that is in tilted layout in pressure-region of no pressure 810 and first of First Transition district 820 and the second transition region 822 only provides difference in height between pressure area 822.As shown in figure 44, in tolerance, first only pressure area 820 and second be only roughly arranged in same level in pressure area 822, and pressure-region of no pressure 810 is roughly arranged in and is parallel to the only plane of pressure area.By pressure-region of no pressure 810, with respect to the first planar offset difference in height of pressure area 820 and second almost parallel that only pressure area 822 limits only, this difference in height has compensated the difference in the hoverheight above each district.

As above, for as described in each embodiment of the suspending bench of substrate as shown in Figure 41, only pressure area 840,642 is shown in Figure 44 for to consist of guide rail structure.For each embodiment of substrate suspending bench, such as the only pressure area of the only pressure area 840,842 of Figure 44, can be formed by continuous plate, for example Figure 44 is shown for pressure-region of no pressure 810.

As shown in Figure 45 A and Figure 45 B, for according to each embodiment of the suspending bench 700 of this instruction, have the not same district of variable hoverheight is provided and for all districts the result across the combination of the different height of suspending bench be that substrate can keep the layout of general planar when it advances above suspending bench.

In Figure 45 A, when substrate 860 is advanced above suspending bench 800, the part that substrate 860 rests on 810 tops, pressure-region of no pressure has the first hoverheight FH ₁, and substrate 860 rests on the only part of 840 tops, pressure area, there is the second hoverheight FH ₂.Yet, transition region 820 has between 810He Jin pressure area, pressure-region of no pressure 840 provides being in tilted layout of difference in height, the hoverheight that this difference in height can compensate between 810He Jin pressure area, pressure-region of no pressure 840 is poor, and substrate 860 keeps the layout of general planar when it advances above these three different districts.In Figure 45 B, when substrate 860 is advanced above suspending bench 800, the part that substrate 860 rests on 810 tops, pressure-region of no pressure has the first hoverheight FH ₁, and substrate 860 rests on the only part of 842 tops, pressure area, there is the second hoverheight FH ₂.Yet, transition region 842 has between 810He Jin pressure area, pressure-region of no pressure 842 provides being in tilted layout of difference in height, the hoverheight that this difference in height can compensate between 810He Jin pressure area, pressure-region of no pressure 842 is poor, and substrate 860 keeps the layout of general planar when it advances above these three different districts.As a result, substrate 860 can keep the layout of general planar on arbitrary direct of travel of the substrate 860 above suspending bench 800.

Each embodiment of suspending bench 700 and suspending bench 800 can be contained in gas locking device, the gas closed component that comprises this instruction, such as but not limited to for Fig. 3, Figure 23 and Figure 29 is shown and describe those, its can with each system integration rising for function described in Figure 34.Each embodiment of gas locking device and each embodiment of gas locking device and system (it can have each embodiment that the external circuit of pressurized inert gas and vacuum can be provided, such as but not limited to for those described in Figure 38 and Figure 39) can use according to this instruction for carry each embodiment of the suspending bench of load at inert gas environment.

All publications, patent and the patent application of mentioning in this description all as each independent publication, patent and patent application be designated as specially and independently by reference to degree identical introducing on by reference to being incorporated herein.

Although show herein and described embodiment of the present disclosure, those skilled in the art are by clear, this embodiment only provides by way of example.In the case of not departing from the present disclosure, those skilled in the art will expect now many modification, variation and substitute.Should be appreciated that the various alternatives that can adopt described disclosure embodiment when putting into practice the disclosure herein.Claims are intended to limit the scope of the present disclosure, and are encompassed in thus the method and structure within the scope of these claims and equivalent thereof.

Claims

1. a combination for gas closed component and system, comprising:

Gas closed component, it has the inside that comprises inert gas environment, and wherein, described gas closed component comprises:

The first framing component assembly portion section, it limits the first internal capacity, and wherein, described the first framing component assembly portion section comprises a plurality of framing component assemblies, and each framing component assembly has a plurality of panel part sections;

The second framing component assembly portion section, it limits the second internal capacity, and wherein, described the second framing component assembly portion section comprises a plurality of framing component assemblies, and each framing component assembly has a plurality of panel part sections; And

At least one opening, it is in described first framing component assembly portion's section and the common panel part section of described the second framing component assembly portion section, wherein, described opening provides fluid to be communicated with between described first framing component assembly portion's section and described the second framing component assembly portion section;

Maintenance system, it is for safeguarding described print head assembly; Described maintenance system is contained in described the second framing component assembly portion section, wherein, and the closing described maintenance system and described the first framing component components apart of described opening.

2. the combination of gas closed component according to claim 1 and system, is characterized in that, also comprises:

The first framing component and the second relative framing component, wherein, described the first framing component is described first framing component assembly portion's section and the common framing component of described the second framing component assembly portion section with described the second relative framing component;

Base portion, it supports described print system and described maintenance system; Described base portion is crossed over by described the first framing component and described the second framing component; And

At the first base portion seal between described the first framing component and described base portion and the second base portion seal between described the second framing component and described base portion.

3. the combination of gas closed component according to claim 2 and system, it is characterized in that, the salable sealing of the described opening between described the first internal capacity and described the second internal capacity is combined with described the first base portion seal and described the second base portion seal and is isolated described the first internal capacity and described the second internal capacity.

4. a combination for gas closed component and system, comprising:

Gas closed component, it has the internal capacity that comprises inert gas environment, and wherein, described gas closed component comprises:

Print system, it comprises:

Print head assembly, it comprises at least one printhead;

Kinematic system, it is for being positioned at described print system in described gas closed component; And

Maintenance system, it is for safeguarding described print head assembly; Described maintenance system is contained in described the second framing component assembly portion section, and wherein, described kinematic system can be located described printhead to safeguarded by described maintenance system.

5. according to the gas closed component described in claim 1 or 4 and the combination of system, it is characterized in that, described the second internal capacity be less than or equal to described gas closed component internal capacity 1%.

6. according to the gas closed component described in claim 1 or 4 and the combination of system, it is characterized in that, described the second internal capacity be less than or equal to described gas closed component internal capacity 10%.

7. according to the gas closed component described in claim 1 or 4 and the combination of system, it is characterized in that, described the second internal capacity be less than or equal to described gas closed component internal capacity 20%.

8. according to the gas closed component described in claim 1 or 4 and the combination of system, it is characterized in that, also comprise gas purge system, described gas purge system is configured to be communicated with the internal gas closed component fluid that is selected from described gas closed component, described first framing component assembly portion's section and the second framing component assembly portion section.

9. the combination of gas closed component according to claim 8 and system, is characterized in that, the internal capacity of described gas purge system heap(ed) capacity based on described gas closed component.

10. the combination of gas closed component according to claim 9 and system, it is characterized in that, when described gas purge system is configured to be communicated with described the second framing component assembly portion section fluid, described gas purification heap(ed) capacity can be used for purifying described the second framing component assembly portion intersegmental part volume.

11. according to the gas closed component described in claim 1 or 4 and the combination of system, it is characterized in that, described print system has base plate supports equipment.

The combination of 12. gas closed components according to claim 11 and system, is characterized in that, it is removable by the stroke of described print system that described base plate supports equipment limits described substrate.

The combination of 13. gas closed components according to claim 11 and system, is characterized in that, described base plate supports equipment can support the substrate with the size between 130cm * 150cm to 285cm * 305cm.

The combination of 14. gas closed components according to claim 11 and system, is characterized in that, the printable oled substrate of print system, and wherein, described base plate supports equipment can support the substrate with the size between 60cm * 72cm to 220cm * 250cm.

15. according to the gas closed component described in claim 1 or 4 and the combination of system, it is characterized in that, the inert gas environment being included in described inside comprises all at 100ppm or with lower horizontal water and oxygen.