CN203720200U - Multi-axis capacitor accelerometer - Google Patents
Multi-axis capacitor accelerometer Download PDFInfo
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- CN203720200U CN203720200U CN201320800266.5U CN201320800266U CN203720200U CN 203720200 U CN203720200 U CN 203720200U CN 201320800266 U CN201320800266 U CN 201320800266U CN 203720200 U CN203720200 U CN 203720200U
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Abstract
The utility model provides a multi-axis capacitor accelerometer. The central anchor point of the X and Y axis accelerometer of the multi-axis capacitor accelerometer is a square with gaps, The stress caused by difference of the thermal expansion coefficients of the materials of a substrate and the central anchor point during temperature change is decreased, and therefore the deformation of the central anchor point is decreased, and further the temperature drift is decreased.
Description
Technical field
The utility model relates to a kind of micro electromechanical structure of surveying acceleration, relates in particular to a kind of multi-axis capacitive accelerometer.
Background technology
Adopting micro electronmechanical (Micro-Electro-Mechanic System is called for short MEMS) inertial sensor that surface treatment is made is to take silicon chip as matrix, by the three-dimensional micro mechanical structure that repeatedly prepared by thin-film deposition and figure processing.Conventional thin layer material comprises: polysilicon, silicon nitride, silicon dioxide and metal.Typical processing step comprises: substrate is prepared, once oxidation forms insulation course, deposit ground floor polysilicon, etch polysilicon forms electrode and interconnection line, and secondary oxidation forms sacrifice layer, oxide layer etching forms through hole, deposit second layer polysilicon, deposited metal, etching sheet metal forms interconnection line, etching second layer polysilicon forms physical construction figure, finally removes sacrifice layer and forms movable structure unit.
Accelerometer, acceleration induction device, is a kind of electronic equipment that can measure accelerating force, is one of conventional device of micro electronmechanical (MEMS) inertial sensor.Acceleration induction device is mainly used in location sensitive, displacement induction or motion state induction etc.As; on mobile phone, use acceleration induction device; just can detect the laying state of mobile phone; keep flat or inclination etc.; according to state, start different programs to reach certain effect; for another example; may be used on notebook computer; survey the moving state of notebook, and according to these data, system can select to close hard disk intelligently still allows it continue operation; can farthest protect due to vibration like this; such as the working environment jolting, or the hard disk infringement that computer causes, the farthest data of protection the inside have been fallen because of carelessness.In the digital camera that another one purposes is used at present and video camera, also adopt acceleration transducer, the vibration of the hand in the time of for detection of shooting, and automatically regulate the focusing of camera according to these vibrations.
Accelerometer mainly comprises twin-axis accelerometer and three axis accelerometer.Twin-axis accelerometer detects the accekeration of X-axis and Y direction.Three axis accelerometer detects the accekeration of X-axis, Y-axis and three directions of Z axis, wherein, X-axis with Y-axis accelerometer for detection of the acceleration acting in two mutually orthogonal directions parallel with principal plane, Z axis accelerometer for detection of act on principal plane vertical direction on acceleration.Conventionally, accelerometer is mainly comprised of movable mass, fixed anchor point, elastic construction and fixed electorde etc.Wherein, elastic construction one end is connected with fixed anchor point, and the other end is connected with movable mass, between fixed electorde and movable mass, forms variable capacitance.When acting on movable mass, external acceleration forms inertial force, this inertial force forms displacement to movable mass, capacitive accelerometer detects displacement variable by the capacitance variations between induction fixed electorde and movable mass, thereby determines external acceleration.
The leading indicator of multi-axis capacitive accelerometer has: sensitivity, the linearity, temperature drift and impact resistance.Yet, in practice, to find, the temperature drift of current multi-axis capacitive accelerometer and impact resistance performance still can not meet the demands.
Utility model content
The purpose of this utility model is, a kind of have stronger stress relief ability and the multi-axis capacitive accelerometer of less temperature drift are provided.
For solving the problems of the technologies described above, the utility model provides a kind of multi-axis capacitive accelerometer, comprise substrate and XY axle construction layer, described XY axle construction layer comprises movable mass, center anchor point, elastic construction and a plurality of detecting electrode, described a plurality of detecting electrode is for detection of the acceleration of directions X and Y-direction, described movable mass is connected with center anchor point and elastic construction, and described center anchor point is tool structure jaggy.
Optionally, in described multi-axis capacitive accelerometer, described center anchor point is cruciform, its right-angled intersection point place formation breach that caves inward.Described breach is square breach or trapeze cut.
Optionally, in described multi-axis capacitive accelerometer, described XY axle construction layer comprises eight detecting electrodes altogether, and described eight detecting electrodes are distributed in radially its surrounding centered by the anchor point of described center; Wherein four detecting electrodes are symmetrically distributed in the left and right sides of center anchor point, for detection of the acceleration of directions X; Other four detecting electrodes are symmetrically distributed in the both sides up and down of center anchor point, for detection of the acceleration of Y-direction.
Optionally, in described multi-axis capacitive accelerometer, described in each, detecting electrode includes the first detecting electrode and two the second detecting electrodes, and described the first detecting electrode is connected with the movable mass of XY axle construction layer, and described two the second detecting electrodes are fixed on described substrate surface.
Optionally, in described multi-axis capacitive accelerometer, described XY axle construction layer also comprises and is fixed on described suprabasil a plurality of scotch, described a plurality of scotch be uniformly distributed in described XY axle construction layer movable mass surrounding and be connected with the movable mass of described XY axle construction layer.
Optionally, in described multi-axis capacitive accelerometer, also comprise and be formed at described suprabasil wiring, the elastic construction of described XY axle construction layer and the described wiring setting of staggering.
Compared with prior art, the center anchor point of the XY axis accelerometer of multi-axis capacitive accelerometer of the present utility model adopts notched square, while having reduced temperature variation due to the different stress producing of material thermal expansion coefficient of substrate and center anchor point, thereby reduced the deformation of center anchor point, and then reduced temperature drift.
Accompanying drawing explanation
Fig. 1 is the overall schematic of the multi-axis capacitive accelerometer of the utility model embodiment mono-;
The schematic diagram of Fig. 2 a Shi Tu1Zhong center anchor point;
Fig. 2 b is the schematic diagram of another kind of center anchor point;
Fig. 3 is the schematic diagram of Fig. 1 Elastic structure;
Fig. 4 is the schematic diagram of Detection capacitance in Fig. 1;
Fig. 5 is the schematic diagram of the bottom wiring that in Fig. 1, Detection capacitance is corresponding;
Fig. 6 is the overall schematic of the multi-axis capacitive accelerometer of the utility model embodiment bis-;
When Fig. 7 is the substrate generation warpage of structure shown in Fig. 6 along the schematic cross-section of straight line a;
Fig. 8 is the schematic diagram of Z axis structural sheet in Fig. 6.
Embodiment
As stated in the Background Art, the temperature drift of existing multi-axis capacitive accelerometer and impact resistance performance still can not meet the demands.Through the applicant's utility model people discovery that studies for a long period of time, this is because the XY axle acceleration structure of traditional multi-axis capacitive accelerometer, and passive center anchor point is regular square, the more difficult release of stress producing in its process.For this reason, in multi-axis capacitive accelerometer of the present utility model, the center anchor point of XY axis accelerometer adopts notched square, while having reduced temperature variation due to the different stress producing of material thermal expansion coefficient of substrate and center anchor point, thereby reduced the deformation of center anchor point, and then reduced temperature drift.
Below in conjunction with schematic diagram, the utility model is described in more detail, wherein represented preferred embodiment of the present utility model, should be appreciated that those skilled in the art can revise the utility model described here, and still realize advantageous effects of the present utility model.Therefore, following description is appreciated that extensively knowing for those skilled in the art, and not as to restriction of the present utility model.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
[embodiment mono-]
The multi-axis capacitive accelerometer of the present embodiment is dual-axis capacitance type accelerometer, i.e. X and Y-axis accelerometer.Fig. 1 is the overall schematic of the multi-axis capacitive accelerometer of the present embodiment.As shown in Figure 1, described multi-axis capacitive accelerometer comprises substrate (not shown in figure 1) and XY axle construction layer, and described XY axle construction layer comprises movable mass 31, center anchor point 32, elastic construction 33 and detecting electrode 34a, 34b.
Continuation is with reference to figure 1, and in the present embodiment, XY axle construction layer 1a comprises eight detecting electrodes altogether, and eight detecting electrodes are symmetrically distributed in four drift angles of movable mass 31, and this modes of emplacement has effectively utilized chip area, is conducive to improve the sensitivity of accelerometer.Detailed, wherein four detecting electrode 34a are symmetrically distributed in the left and right sides of center anchor point 32, for detection of the acceleration of directions X; Other four detecting electrode 34b are symmetrically distributed in the both sides up and down of center anchor point 32, for detection of the acceleration of Y-direction.That is, described eight detecting electrodes are distributed in radially its surrounding centered by center anchor point 32.Certainly, the utility model does not limit quantity and the arrangement mode of detecting electrode, and for example four groups of detecting electrodes and take alternate manner to be for example equidistantly arranged in center anchor point 32 around centered by center anchor point 32 of other quantity also can be set.
The schematic diagram of Fig. 2 a Shi Tu1 center anchor point.As shown in Figure 2 a, XY axle construction Ceng1a center anchor point 32 is shaped as four jiaos of notched squares.Specifically, center anchor point 32 is roughly cruciform, and right-angled intersection point place caves inward and forms breach 41,42,43,44, and the shape of described breach 41,42,43,44 is identical, is all square.Find in practice, because substrate is different from the material of center anchor point 32, corresponding thermal expansivity is also different, for example substrate is monocrystalline silicon, and its thermal expansivity representative value is 2.5E-6 (1/K), and center anchor point 32 is polysilicon, its thermal expansivity representative value is 4.7E-6 (1/K), when the material of different heat expansion coefficient is in contact with one another and when temperature changes, can produces stress, thereby produce deformation.The multi-axis capacitive accelerometer of the present embodiment adopts notched central anchor dot structure, and this breach is conducive to discharge stress, thereby reduces deformation, and then reduces temperature drift.Be understandable that, the shape of center of the present utility model anchor point is not limited to cruciform, in the scope that other notched shape all comprises in creation spirit of the present utility model.For example, the shape of center anchor point 32 ' is similarly four jiaos of notched squares, and breach 41 ', 42 ', 43 ', 44 ' is all trapezoidal, as shown in Figure 2 b, also can realize the object that discharges stress.
Fig. 3 is the schematic diagram of Fig. 1 Elastic structure.As shown in Figure 3, the fan-folded girder construction that the elastic construction 33 of XY axle construction layer 1a successively decreases for middle length, both sides.This fan-folded girder construction has good stress relief ability on the one hand, do not affecting under the condition of elastic construction rigidity on the other hand, fan-folded girder construction entire length can be shorter than traditional strip folded beam structure length, so, during elastic construction 33 layout, can walk around the wiring in substrate 10, it is described elastic construction 33 and the wiring of its bottom setting of staggering, that is, ground floor polysilicon as wiring can be via under elastic construction 33, thereby greatly reduced in technique manufacturing process the impact on elastic construction rigidity of the step that forms due to bottom cloth line.
Fig. 4 is the schematic diagram of Detection capacitance in Fig. 1.Shown in Fig. 1 and Fig. 4, every group of detecting electrode comprises: the first detecting electrode 61 and the second detecting electrode 62 and 63.The first detecting electrode 61 is connected with movable mass 31, and movable mass 31Yu center anchor point 32 and elastic construction 33 are connected, and the second detecting electrode 62 and 63 is individually fixed on substrate 10 surfaces.When being subject to the acceleration of Y-direction, the first detecting electrode 61 moves together with movable mass 31, thereby first increase of capacitance between detecting electrode 61 and the second detecting electrode 62 and 63, one reduce, by output circuit, two capacitances are done to difference processing and can draw corresponding acceleration.Output circuit structure and difference processing method are techniques well known, do not repeat them here.
In the present embodiment, described multi-axis capacitive accelerometer also comprises a plurality of scotch 35, is uniformly distributed in the surrounding of described movable mass 31 and is connected with described movable mass 31.Preferably, comprise altogether four drift angles that 35, four scotch 35 of four scotch are symmetrically distributed in multi-axis capacitive accelerometer, for reducing the impact of external impact force on multi-axis capacitive accelerometer, avoid affecting its sensitivity.
In the present embodiment, described multi-axis capacitive accelerometer also comprises the wiring (electrode and interconnection line) being formed in substrate 10.Substrate 10 is for example silicon base, is wherein illustrated in the movable mass 31 in Fig. 1, center anchor point 32, elastic construction 33, the structure that detecting electrode 34a, 34b can be one of the forming by etch process.In addition, XY axle construction layer also comprises metal level (not shown), in order to by the sensing signal transmission producing to the wiring in substrate 10.
Concrete, described multi-axis capacitive accelerometer can comprise by following processing step: substrate is prepared, once oxidation forms insulation course, deposit ground floor polysilicon, etching ground floor polysilicon forms electrode and interconnection line, secondary oxidation forms sacrifice layer, sacrifice layer etching forms through hole, deposit second layer polysilicon, deposited metal, etching sheet metal forms interconnection line, and it is structural sheet that etching second layer polysilicon forms physical construction figure, and finally removing sacrifice layer formation movable structure unit is accelerometer.
Fig. 5 is the bottom line schematic diagram that in Fig. 1, Detection capacitance is corresponding.Shown in Fig. 1 and Fig. 5, in the present embodiment, center anchor point 32 is positioned at center, and four scotch 35 are uniformly distributed in four jiaos, and center anchor point 32 is connected with the scotch 35 that is positioned at four jiaos.Specifically, the wiring in described substrate 10 comprises four scotch lines 35 ' and four group of second detecting electrode line 62 ', 63 ' (totally eight the second detecting electrode lines).Center anchor point 32 and four scotch 35 all form by second layer polysilicon, the second detecting electrode line 62 ', 63 ' and scotch line 35 ' all by ground floor polysilicon, form.Four scotch 35 are connected with center anchor point 32 by four scotch lines 35 ', are roughly X-shaped and are distributed in substrate 10.The second detecting electrode line 62 ' and the second detecting electrode line 63 ' are to be all bent into the broken line of three sections, every group of second detecting electrode line 62 ', 63 ' be parallel is distributed in two substrate blank spaces between scotch line 35 ', the second detecting electrode line 62 ' is in inner side, the second detecting electrode line 63 ' is positioned at the second detecting electrode line 62 ' outside, and elastic construction 33 is right against the outside of the second detecting electrode line 63 '.That is, the second detecting electrode 62 and 63 line are not distributed under elastic construction 33, can avoid the elastic construction of line top in technique manufacturing process to form step, thereby eliminate its impact on elastic construction rigidity.
[embodiment bis-]
The multi-axis capacitive accelerometer of the present embodiment is three axle capacitive accelerometers,, comprises X and Y-axis accelerometer as described in embodiment mono-that is, also comprises Z axis accelerometer.Specifically as shown in Figure 6, described X and Y-axis accelerometer comprise XY axle construction layer 1a, described Z axis accelerometer comprises torsional pendulum type Z axis structural sheet 1b, the 1c that is positioned at XY axle construction layer 1a both sides, described XY axle construction layer 1a integral body is square, described Z axis structural sheet 1b, 1c integral body are rectangle, to save as far as possible area.
When Fig. 7 is the substrate generation warpage of structure shown in Fig. 6, along the schematic cross-section of straight line a, Fig. 8 is the schematic diagram of Z axis structural sheet 1b in Fig. 6.As shown in Figure 6 to 8, Z axis structural sheet 1b, 1c comprise: movable mass 17,18, fixed anchor point 15b, 15c, elastic construction 16b, 16c, fixed electorde 11,12,13,14.
Continuation is with reference to figure 6, Fig. 7 and Fig. 8, and fixed electorde 11,12,13,14 is individually fixed on substrate 10 surfaces.Fixed electorde 11 is identical with fixed electorde 12 width, and symmetrical about the elastic construction 16b of Z axis structural sheet 1b.Fixed electorde 13 is identical with fixed electorde 14 width, and symmetrical about the elastic construction 16c of Z axis accelerometer 1c.Elastic construction 16b is connected with movable mass 17 with fixed anchor point 15b, and so, movable mass 17 can be floated on substrate 10 tops, between fixed electorde 11,12 and movable mass 17, forms variable capacitance; Similarly, elastic construction 16c is connected with movable mass 18 with fixed anchor point 15c, and so, movable mass 18 can be floated on substrate 10 tops, between fixed electorde 13,14 and movable mass 18, forms variable capacitance.Described elastic construction 16b, 16c can be shell fragment or spring or and equivalent member.In the ground floor polysilicon electricity that the movable mass 17,18 that Z axis structural sheet 1b, 1c are corresponding passes through under fixed anchor point 15b, 15c, be connected, fixed electorde 11 is connected with in fixed electorde 13 electricity, and fixed electorde 12 is connected with in fixed electorde 14 electricity.
Preferably, the barycenter of the movable mass 17 of Z axis structural sheet 1b is not on elastic construction 16b, and the barycenter of the movable mass 18 of Z axis accelerometer 1c is not on elastic construction 16c.That is, the movable mass width of fixed anchor point 15b, the 15c left and right sides is different, thereby corresponding quality is different.Movable mass on the left of the quality of movable mass in the elastic construction 16b left side of Z axis structural sheet 1b and the elastic construction 16c of Z axis structural sheet 1c identical in quality, the movable mass on the quality of the movable mass on the elastic construction 16b right side of described Z axis structural sheet 1b and the elastic construction 16c right side of described Z axis structural sheet 1c identical in quality.That is to say, the Z axis movable mass wider portion in XY axis accelerometer left side is near XY axis accelerometer, and the Z axis movable mass narrower part on XY axis accelerometer right side is near XY axis accelerometer.
A kind of method that the present embodiment also provides multi-axis capacitive accelerometer to carry out acceleration detection, when exist along Z axis external acceleration time, the movable mass of two Z axis structural sheets is done torsional movement around connected elastic construction respectively, capacitance between a fixed electorde of the movable mass of one of them Z axis structural sheet and this Z axis structural sheet is C1, capacitance between a fixed electorde of the movable mass of another Z axis structural sheet and this Z axis structural sheet is C2, capacitance between another fixed electorde of the movable mass of described one of them Z axis structural sheet and this Z axis structural sheet is C3, capacitance between another fixed electorde of the movable mass of described another Z axis structural sheet and this Z axis structural sheet is C4, by detecting the difference of described capacitance C3 and C4 sum and described capacitance C1 and C2 sum, determine the external acceleration of Z axis.
Detailed, when exist along Z axis external acceleration time, under the effect of inertial force, movable mass 17,18 can be done torsional movement around elastic construction 16b, 16c.When if external acceleration is pointed to Z axis negative direction, movable mass 17 is near fixed electorde 12, away from fixed electorde 11, correspondingly, capacitance between movable mass 17 and fixed electorde 12 increases, and the capacitance between movable mass 17 and fixed electorde 11 reduces.Similarly, movable mass 18 is near fixed electorde 14, and away from fixed electorde 13, correspondingly, the capacitance between movable mass 18 and fixed electorde 14 increases, and the capacitance between movable mass 18 and fixed electorde 13 reduces.Fixed electorde 11 is connected with in 13 electricity, fixed electorde 12 is connected with in 14 electricity, if capacitance C2 sum is Ca between the capacitance C1 between movable mass 17 and fixed electorde 11 and movable mass 18 and fixed electorde 13, between capacitance C3 between movable mass 17 and fixed electorde 12 and movable mass 18 and fixed electorde 14, capacitance C4 sum is Cb, both difference Δ C=Cb-Ca=(C3+C4)-(C1+C2), by detection Δ, C can obtain external acceleration.
In more detail, when encapsulation equal stress is larger, substrate 10 may make progress or downsagging, take upturned is example, if the movable mass of Z axis accelerometer 17,18 is placed as shown in Figure 6, the capacitance variation amount Δ C3 that stress deformation between movable mass 17 and fixed electorde 12 causes is similar to the capacitance variation amount Δ C2 that the stress deformation between movable mass 18 and fixed electorde 13 causes; Similarly, the capacitance variation amount Δ C1 that stress deformation between movable mass 17 and fixed electorde 11 causes is similar to the capacitance variation amount Δ C4 that the stress deformation between movable mass 18 and fixed electorde 14 causes, Δ C=Cb-Ca=((C3+ Δ C3)+(C4+ Δ C4)) – ((C1+ Δ C1)+(C2+ Δ C2)) ≈ (C3+C4)-(C1+C2); Be that above-mentioned placement can be eliminated the Detection capacitance value variable quantity that basement warping causes substantially.
The movable mass 17 of described Z axis structural sheet, 18, fixed anchor point 15b, 15c, elastic construction 16b, (etching technics forms corresponding figure to the structure that 16c can be one of the forming by etching and fumigation process, fumigation process removes the sacrifice layer under movable mass), can with the movable mass 31 of XY axle construction layer, center anchor point 32, elastic construction 33, detecting electrode 34a, 34b together utilizes second layer polysilicon to form, described fixed electorde 11, 12, 13, 14 are both and utilize ground floor polysilicon to form with suprabasil wiring, described fixed electorde 11 with fixed electorde 13 by being connected in suprabasil fixed electorde line (not shown) electricity, described fixed electorde 12 with fixed electorde 14 by being connected in suprabasil fixed electorde line (not shown) electricity.Detailed, described fixed electorde 11,12,13,14 and fixed electorde line, the second detecting electrode line 62 ', 63 ' and scotch line 35 ' all by ground floor polysilicon, form.
It should be noted that, in this instructions, each embodiment adopts the mode of going forward one by one to describe, and each embodiment stresses is the difference with other embodiment, between each embodiment identical similar part mutually referring to.For the XY axle construction layer of embodiment bis-disclosed capacitive accelerometers, because the XY axle construction layer with embodiment mono-disclosed capacitive accelerometer is corresponding, so description is fairly simple, relevant part is referring to embodiment mono-corresponding part.
Foregoing description is only the description to the utility model preferred embodiment; the not any restriction to the utility model scope; any change, modification that the those of ordinary skill in the utility model field is done according to above-mentioned disclosure, all belong to the protection domain of claims.
Claims (6)
1. a multi-axis capacitive accelerometer, it is characterized in that, comprise substrate and XY axle construction layer, described XY axle construction layer comprises movable mass, center anchor point, elastic construction and a plurality of detecting electrode, described a plurality of detecting electrode is for detection of the acceleration of directions X and Y-direction, described movable mass is connected with elastic construction with described center anchor point, and described center anchor point is tool structure jaggy.
2. multi-axis capacitive accelerometer as claimed in claim 1, is characterized in that, described center anchor point is cruciform, its right-angled intersection point place formation breach that caves inward.
3. multi-axis capacitive accelerometer as claimed in claim 1, is characterized in that, described breach is square breach or trapeze cut.
4. multi-axis capacitive accelerometer as claimed in claim 1, is characterized in that, described XY axle construction layer comprises eight detecting electrodes, and described eight detecting electrodes are distributed in radially its surrounding centered by the anchor point of described center; Wherein four detecting electrodes are symmetrically distributed in the left and right sides of center anchor point, for detection of the acceleration of directions X; Other four detecting electrodes are symmetrically distributed in the both sides up and down of center anchor point, for detection of the acceleration of Y-direction.
5. multi-axis capacitive accelerometer as claimed in claim 4, it is characterized in that, described in each, detecting electrode includes the first detecting electrode and two the second detecting electrodes, described the first detecting electrode is connected with the movable mass of described XY axle construction layer, and described two the second detecting electrodes are fixed in described substrate.
6. multi-axis capacitive accelerometer as claimed in claim 1, it is characterized in that, described XY axle construction layer also comprises and is fixed on described suprabasil a plurality of scotch, described a plurality of scotch be uniformly distributed in described XY axle construction layer movable mass surrounding and be connected with the movable mass of described XY axle construction layer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201320800266.5U CN203720200U (en) | 2013-12-06 | 2013-12-06 | Multi-axis capacitor accelerometer |
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| CN201320800266.5U CN203720200U (en) | 2013-12-06 | 2013-12-06 | Multi-axis capacitor accelerometer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103645343A (en) * | 2013-12-06 | 2014-03-19 | 杭州士兰微电子股份有限公司 | Multiaxial capacitive accelerometer |
| CN111103436A (en) * | 2018-10-25 | 2020-05-05 | 美国亚德诺半导体公司 | Low noise multi-axis accelerometer and related methods |
| TWI765180B (en) * | 2018-09-21 | 2022-05-21 | 美商美國亞德諾半導體公司 | Three-axis accelerometer |
| US12146893B2 (en) | 2021-07-20 | 2024-11-19 | Analog Devices, Inc. | Low-noise multi-axis accelerometers and related methods |
-
2013
- 2013-12-06 CN CN201320800266.5U patent/CN203720200U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103645343A (en) * | 2013-12-06 | 2014-03-19 | 杭州士兰微电子股份有限公司 | Multiaxial capacitive accelerometer |
| CN103645343B (en) * | 2013-12-06 | 2016-07-13 | 杭州士兰微电子股份有限公司 | multi-axis capacitive accelerometer |
| TWI765180B (en) * | 2018-09-21 | 2022-05-21 | 美商美國亞德諾半導體公司 | Three-axis accelerometer |
| CN111103436A (en) * | 2018-10-25 | 2020-05-05 | 美国亚德诺半导体公司 | Low noise multi-axis accelerometer and related methods |
| US11099207B2 (en) | 2018-10-25 | 2021-08-24 | Analog Devices, Inc. | Low-noise multi-axis accelerometers and related methods |
| US12146893B2 (en) | 2021-07-20 | 2024-11-19 | Analog Devices, Inc. | Low-noise multi-axis accelerometers and related methods |
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