CN203720159U - Sampling device for analyzing concentration content of water in organic solution - Google Patents
Sampling device for analyzing concentration content of water in organic solution Download PDFInfo
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- CN203720159U CN203720159U CN201420019261.3U CN201420019261U CN203720159U CN 203720159 U CN203720159 U CN 203720159U CN 201420019261 U CN201420019261 U CN 201420019261U CN 203720159 U CN203720159 U CN 203720159U
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- organic solution
- concentration content
- sampling device
- moisture concentration
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Abstract
The utility model provides a sampling device for analyzing concentration content of water in an organic solution. A closed sampling bottle is connected with a closed titration cell through a sample conveying pipe, and thus the condition that water in air is introduced when a sample is taken out from the closed sampling bottle and is injected into the closed titration cell is prevented; a dryer is arranged at the lower side of an aurilave, and water in gas in the aurilave is prevented from being introduced into the closed sampling bottle. Therefore, the sampling device for analyzing the concentration content of the water in the organic solution has the relatively good leakproofness, and prevents the condition of contact with an outside environment, and thus the accuracy of analysis results of the concentration content of the water in the organic solution is improved.
Description
Technical field
The utility model relates to SIC (semiconductor integrated circuit) and manufactures field, refers more particularly to a kind of sampling device of analyzing moisture concentration content in organic solution.
Background technology
Along with constantly dwindling of critical size in integrated circuit (IC) manufacture, silicon chip surface before entering per pass technique must be clean, need be through cleaning step repeatedly, remove the contamination of the types such as particle, organic solution, metal and natural oxidizing layer of silicon chip surface, its wash number depends on the complicacy of wafer design and the number of plies of interconnection.At present, wet-chemical cleaning technology is the main cleaning technique of semiconducter IC industry, wet-chemical cleaning is mainly to utilize solution, soda acid, surfactant, water and composition thereof, by burn into dissolve, the method such as chemical reaction, realize certain functional requirement or remove the pollutant of wafer surface.
In the processing procedure of wafer, in organic solution used, moisture concentration can be directly or indirectly affect the effect of silicon wafer process different phase.In existing analysis organic solution, the sampling device of moisture concentration content is to draw a small amount of organic solution in enclosed sampling bottle by a needle tubing, and the organic solution of needle tubing absorption is injected to airtight titration cell and carry out the analytical calculation of organic solution moisture concentration content.
But when needle tubing is drawn the organic solution in enclosed sampling bottle, airborne moisture can enter sample bottle; At sample weighing and the organic solution that needle tubing is drawn is injected to the process of airtight titration cell, all can introduce airborne moisture and enter into the corresponding stage, thereby affect the accuracy of the analysis result of moisture concentration content in organic solution.
Utility model content
The purpose of this utility model is to provide a kind of sampling device of analyzing moisture concentration content in organic solution, to solve in prior art at needle tubing, draw organic solution, the sample weighing in enclosed sampling bottle and organic solution that needle tubing is drawn is injected the process of airtight titration cell, capital is introduced airborne moisture and is entered into the corresponding stage, while causing in to organic solution moisture concentration containing quantitative analysis, the problem that its analysis result accuracy is not high.
In order to solve the problems of the technologies described above, the utility model provides a kind of sampling device of analyzing moisture concentration content in organic solution, comprising: an enclosed sampling bottle, an airtight titration cell, an ear washing bulb;
Described enclosed sampling bottle is connected with described airtight titration cell by sample conveying tube;
Described ear washing bulb is connected with described enclosed sampling bottle by gas piping; Wherein, on described gas piping, be provided with the exsiccator being communicated with described ear washing bulb.
Optionally, in described analysis organic solution, in the sampling device of moisture concentration content, on described gas piping, be also provided with retaining valve; Wherein, described retaining valve is arranged at described exsiccator below.
Optionally, in described analysis organic solution, in the sampling device of moisture concentration content, the mouth of pipe of described gas piping is away from the organic solution in described enclosed sampling bottle.
Optionally, in described analysis organic solution, in the sampling device of moisture concentration content, the material of described ear washing bulb is rubber.
Optionally, in described analysis organic solution in the sampling device of moisture concentration content, the organic solution that the mouth of pipe of the described sample conveying tube in described enclosed sampling bottle immerses described enclosed sampling bottle.
Optionally, in described analysis organic solution in the sampling device of moisture concentration content, the mouth of pipe of the described sample conveying tube in airtight titration cell away from the liquid in described airtight titration cell.
Optionally, in described analysis organic solution, in the sampling device of moisture concentration content, the organic solute in described organic solution is benzene, toluene, isopropyl alcohol, cyclopentanone or N-methyl-2-nafoxidine ketone.
Optionally, in described analysis organic solution in the sampling device of moisture concentration content, be provided with stirrer at the bottom of the pond of described airtight titration cell.
In analysis organic solution provided by the utility model in the sampling device of moisture concentration content, by sample conveying tube, enclosed sampling bottle and airtight titration cell are connected, avoided at sample thief from enclosed sampling bottle and sample injected to the situation of moisture in air that airtight titration cell is introduced; At ear washing bulb downside, exsiccator is set, avoids the moisture in gas in ear washing bulb to be incorporated in enclosed sampling bottle.Thus, the sampling device of analyzing moisture concentration content in organic solution has good leakproofness, has avoided situation about contacting with external environment, has improved the accuracy of the analysis result of moisture concentration content in organic solution.
Accompanying drawing explanation
Fig. 1 is the structural representation that the utility model is analyzed the sampling device of moisture concentration content in organic solution.
Embodiment
Below in conjunction with the drawings and specific embodiments, the sampling device of moisture concentration content in the analysis organic solution the utility model proposes is described in further detail.According to the following describes and claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts very the form of simplifying and all uses non-ratio accurately, only in order to convenient, the object of aid illustration the utility model embodiment lucidly.
Please refer to Fig. 1, it is the structural representation of the sampling device of moisture concentration content in the analysis organic solution of the utility model embodiment.In analysis organic solution as shown in Figure 1, the sampling device of moisture concentration content comprises: the airtight titration cell 2 of an enclosed sampling bottle 1,, an ear washing bulb 3; Described enclosed sampling bottle 1 is connected with described airtight titration cell 2 by sample conveying tube 200; Described ear washing bulb 3 is connected with described enclosed sampling bottle 1 by gas piping 100; Wherein, on described gas piping 100, be provided with the exsiccator 101 being communicated with described ear washing bulb 3.
Specific works principle of the present utility model: by changing the volume of ear washing bulb 3 interior gases, gas flow drying device 101 in ear washing bulb 3 carries out dry (reduce air contained humidity in this link ear washing bulb 3 and enter into enclosed sampling bottle 1) of gas, under the effect of draught head, organic solution in enclosed sampling bottle 1 flow in airtight titration cell 2 through sample conveying tube 200, the process of whole sampling, sample can not contact with surrounding environment, avoid introducing airborne moisture, guaranteed to analyze the precision of analysis of moisture concentration content in organic solution.
Preferably, on described gas piping 100, be also provided with retaining valve 102; Wherein, described retaining valve 102 is arranged at described exsiccator 101 belows.The setting of retaining valve 102, has guaranteed that the sample in enclosed sampling bottle 1 can not enter in ear washing bulb 3 by suck-back, has guaranteed the degree of accuracy of sampling.
Preferably, the mouth of pipe of described gas piping 100 is away from the organic solution in described enclosed sampling bottle 1.In further reduction enclosed sampling bottle 1, organic solution is back to the probability of ear washing bulb 3.
Preferably, the material of described ear washing bulb 3 is rubber.Quality of rubber materials has shape-plastic, workable.
Preferably, the organic solution that the mouth of pipe of the described sample conveying tube 200 in described enclosed sampling bottle 1 immerses described enclosed sampling bottle 1.Guarantee that in enclosed sampling bottle 1, organic solution can flow in airtight titration cell 2 under the effect of draught head.Further, guarantee to analyze the normal work of the sampling device of moisture concentration content in organic solution.
Preferably, the mouth of pipe of the described sample conveying tube 200 in airtight titration cell 2 away from the liquid in described airtight titration cell 2.Further, make organic solution flow into completely in airtight titration cell with titration cell in liquid reactions, and not residual fraction organic solution in stopple coupon.
Preferably, the organic solute in described organic solution is benzene, toluene, isopropyl alcohol, cyclopentanone or N-methyl-2-nafoxidine ketone.Wherein, described sampling device is applicable to moisture concentration content rank for being more than or equal to ppm level.Further, this scope of application of analyzing the sampling device of moisture concentration content in organic solution is wider.
Preferably, at the bottom of the pond of described airtight titration cell 2, be provided with stirrer.Stirrer is conducive to the interior liquid of airtight titration cell 2 and fully mixes with the organic solution flowing in airtight titration cell 2, and then fully reaction.
To sum up, in analysis organic solution provided by the utility model in the sampling device of moisture concentration content, by sample conveying tube, enclosed sampling bottle and airtight titration cell are connected, avoided at sample thief from enclosed sampling bottle and sample injected to the situation of moisture in air that airtight titration cell is introduced; At ear washing bulb downside, exsiccator is set, avoids the moisture in gas in ear washing bulb to be incorporated in enclosed sampling bottle.Thus, the sampling device of analyzing moisture concentration content in organic solution has good leakproofness, has avoided situation about contacting with external environment, has improved the accuracy of the analysis result of moisture concentration content in organic solution.
Obviously, those skilled in the art can carry out various changes and modification and not depart from spirit and scope of the present utility model utility model.Like this, if within of the present utility model these are revised and modification belongs to the scope of the utility model claim and equivalent technologies thereof, the utility model is also intended to comprise these change and modification.
Claims (8)
1. a sampling device of analyzing moisture concentration content in organic solution, is characterized in that, comprising: an enclosed sampling bottle, an airtight titration cell, an ear washing bulb;
Described enclosed sampling bottle is connected with described airtight titration cell by sample conveying tube;
Described ear washing bulb is connected with described enclosed sampling bottle by gas piping; Wherein, on described gas piping, be provided with the exsiccator being communicated with described ear washing bulb.
2. the sampling device of moisture concentration content in analysis organic solution as claimed in claim 1, is characterized in that, is also provided with retaining valve on described gas piping; Wherein, described retaining valve is arranged at described exsiccator below.
3. the sampling device of moisture concentration content in analysis organic solution as claimed in claim 1, is characterized in that, the mouth of pipe of described gas piping is away from the organic solution in described enclosed sampling bottle.
4. the sampling device of moisture concentration content in analysis organic solution as claimed in claim 1, is characterized in that, the material of described ear washing bulb is rubber.
5. the sampling device of moisture concentration content in analysis organic solution as claimed in claim 1, is characterized in that the organic solution that the mouth of pipe of the described sample conveying tube in described enclosed sampling bottle immerses described enclosed sampling bottle.
6. the sampling device of moisture concentration content in analysis organic solution as claimed in claim 1, is characterized in that, the mouth of pipe of the described sample conveying tube in airtight titration cell away from the liquid in described airtight titration cell.
7. the sampling device of moisture concentration content in analysis organic solution as claimed in claim 1, is characterized in that, the organic solute in described organic solution is benzene, toluene, isopropyl alcohol, cyclopentanone or N-methyl-2-nafoxidine ketone.
8. the sampling device of moisture concentration content in the analysis organic solution as described in any one in claim 1-7, is characterized in that, is provided with stirrer at the bottom of the pond of described airtight titration cell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420019261.3U CN203720159U (en) | 2014-01-13 | 2014-01-13 | Sampling device for analyzing concentration content of water in organic solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420019261.3U CN203720159U (en) | 2014-01-13 | 2014-01-13 | Sampling device for analyzing concentration content of water in organic solution |
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| Publication Number | Publication Date |
|---|---|
| CN203720159U true CN203720159U (en) | 2014-07-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420019261.3U Expired - Fee Related CN203720159U (en) | 2014-01-13 | 2014-01-13 | Sampling device for analyzing concentration content of water in organic solution |
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| CN (1) | CN203720159U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105319148A (en) * | 2014-07-31 | 2016-02-10 | 上海梅山钢铁股份有限公司 | Measuring device and method of concentration of surfactant |
| CN109913374A (en) * | 2019-03-26 | 2019-06-21 | 中国科学院东北地理与农业生态研究所 | The method of adding liquid culture medium during algae culture |
-
2014
- 2014-01-13 CN CN201420019261.3U patent/CN203720159U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105319148A (en) * | 2014-07-31 | 2016-02-10 | 上海梅山钢铁股份有限公司 | Measuring device and method of concentration of surfactant |
| CN105319148B (en) * | 2014-07-31 | 2019-01-08 | 上海梅山钢铁股份有限公司 | A kind of surfactant concentration measurement device and measuring method |
| CN109913374A (en) * | 2019-03-26 | 2019-06-21 | 中国科学院东北地理与农业生态研究所 | The method of adding liquid culture medium during algae culture |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140716 Termination date: 20190113 |