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CN203432761U - Workpiece vacuumizing and vacuum back-filling system for thin-shelled container - Google Patents

Workpiece vacuumizing and vacuum back-filling system for thin-shelled container Download PDF

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Publication number
CN203432761U
CN203432761U CN201320538030.9U CN201320538030U CN203432761U CN 203432761 U CN203432761 U CN 203432761U CN 201320538030 U CN201320538030 U CN 201320538030U CN 203432761 U CN203432761 U CN 203432761U
Authority
CN
China
Prior art keywords
workpiece
vacuum
valve
vacuum tank
backfill
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN201320538030.9U
Other languages
Chinese (zh)
Inventor
张果
李健
瞿骑龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Orient Chengdu Co Ltd
Original Assignee
Ulvac Orient Chengdu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Orient Chengdu Co Ltd filed Critical Ulvac Orient Chengdu Co Ltd
Priority to CN201320538030.9U priority Critical patent/CN203432761U/en
Application granted granted Critical
Publication of CN203432761U publication Critical patent/CN203432761U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model relates to a workpiece vacuumizing and vacuum back-filling system for a thin-shelled container. The workpiece vacuumizing and vacuum back-filling system solves the problem that a workpiece is damaged due to the internal and external pressure difference of the workpiece during the vacuumizing and vacuum back-filling system of the thin-shelled container. A workpiece (2) is arranged in a vacuum chamber (1), a communicating valve (4) arranged outside the vacuum chamber (1) is respectively connected with the workpiece (2), the vacuum chamber (1) and a station valve (5), the vacuum chamber (1) is connected with a pump-out valve (3) and a vacuum back-filling valve (7) which are arranged outside the vacuum chamber (1), and the pump-out valve (3) is connected with a vacuum valve (6).

Description

Shell container workpiece vacuumizes and vacuum backfill system
technical field:
The utility model relate in shell container case vacuumize, leak detection, backfill system.
background technology:
For vacuum helium leak test, vacuumize and the backfill vacuum link that is absolutely necessary, but for shell container, traditional workpiece and vacuum tank independently vacuumize respectively and backfill vacuum, vacuum tank volume and workpiece volume are variant, vacuum tank return pump and workpiece return pump pumping speed are variant, vacuum tank vacuum backfill valve and workpiece air release backfill speed difference, therefore shell container workpiece inside and outside differential pressure is uncontrollable, and shell container bearing capacity is poor, General Requirements container inside and outside differential pressure all will be controlled at certain scope, therefore the tradition backfilling process of finding time is easy to cause measured workpiece to damage cannot to use.
utility model content:
The purpose of this utility model be to provide a kind of prevent shell container workpiece in backfill vacuum process because of vacuum tank in workpiece in the shell container workpiece of the deformed damaged that causes of pressure reduction vacuumize and vacuum backfill system.
The utility model is achieved in that
Shell container workpiece vacuumizes and vacuum backfill system, workpiece 2 is placed in vacuum tank 1, at vacuum tank, have coupling cock 4 to be connected with workpiece, vacuum tank and station valve 5 respectively outward, vacuum tank is connected with its outer evacuation valve 3, vacuum backfill valve 7, and evacuation valve is connected with vacuum pump 6.
The mouth of finding time of workpiece 2 is connected with the non-tight valve plate end interface of coupling cock 4, and vacuum tank 1 is connected with the sealing valve plate end of coupling cock 4.
Coupling cock place 4 is in opening,, station valve 5 and the workpiece mouthful UNICOM of finding time, station valve 5 is in closed condition, vacuum backfill valve 7 cuts out, and vacuum tank 1 is closed sealing, and vacuum pump 6 starts, evacuation valve 3 is opened, now workpiece 2, in by vacuum pump 6 evacuated together with vacuum tank 1, is evacuated to the vacuum tightness of workpiece demand, closes coupling cock 4, open station valve 5, now workpiece carry out pressurize detecting leakage, put nitrogen, balance, recovery process; Workpiece 2 leak detections are closed station valve 5 after having reclaimed, and open coupling cock 4, workpiece 2 and vacuum tank 1 UNICOM, and evacuation valve 3, in closed condition, is opened vacuum backfill valve 7, to vacuum tank and workpiece backfill simultaneously.
The utility model has the following advantages:
1, at the workpiece place of finding time mouthful, a coupling cock is installed, at the vacuum tank Shi Jiang UNICOM valve open of finding time, so just by workpiece volume and vacuum tank volume UNICOM, make inside workpiece and vacuum tank inner chamber form a volume, when finding time, workpiece inside and outside differential pressure is just effectively controlled, can control workpiece inside and outside differential pressure in certain scope, prevented shell container workpiece in vacuum because of in vacuum tank with workpiece in the deformed damaged that causes of pressure reduction.
2, when workpiece is done concerned process steps action, coupling cock, in closed condition, disconnects vacuum tank volume and workpiece volume, makes shell container workpiece in autonomous container state.
3, after workpiece leak detection recovery finishes, station valve cuts out, coupling cock is opened, vacuum tank inner chamber and workpiece lumen are connected as a single entity, and do together vacuum backfill, and when backfill, workpiece inside and outside differential pressure can be controlled effectively like this, can control workpiece inside and outside differential pressure in certain scope, prevented shell container workpiece in backfill vacuum process because of vacuum tank in workpiece in the deformed damaged that causes of pressure reduction.
accompanying drawing explanation:
Fig. 1 is the utility model structural drawing.
embodiment:
The utility model is comprised of shell container workpiece, vacuum tank, UNICOM's valve, backfill vacuum valve, the valve of finding time, return pump group, station valve, workpiece 2 is placed in vacuum tank 1, at vacuum tank, there is coupling cock 4 to be connected with workpiece, vacuum tank and station valve 5 respectively outward, vacuum tank is connected with its outer evacuation valve 3, vacuum backfill valve 7, and evacuation valve is connected with vacuum pump 6.
The door-plate of vacuum tank 18 is opened, workpiece 2 is positioned in vacuum tank 1, the mouth of finding time of workpiece 2 is connected with the non-tight valve plate end interface of coupling cock 4, close door-plate 8, vacuum tank 1 is connected with coupling cock 4 sealing valve plate ends, coupling cock place 4 is in opening, station valve 5 and the workpiece mouthful UNICOM of finding time, station valve 5 is in closed condition, vacuum backfill valve 7 cuts out, vacuum tank 1 is closed sealing, vacuum pump 6 starts, evacuation valve 3 is opened, now workpiece 2 together with vacuum tank 1 in by vacuum pump 6 evacuated, be evacuated to the vacuum tightness of workpiece demand, close coupling cock 4, open station valve 5, now workpiece can carry out concerned process steps work, workpiece 2 leak detections are closed station valve 5 after having reclaimed, and open coupling cock 4, workpiece 2 and vacuum tank 1 UNICOM, and evacuation valve 3, in closed condition, is opened vacuum backfill valve 7, to vacuum tank and workpiece backfill simultaneously, after backfill, opens door-plate 8.

Claims (3)

1. shell container workpiece vacuumizes and vacuum backfill system, it is characterized in that workpiece (2) is placed in vacuum tank (1), at vacuum tank, there is coupling cock (4) to be connected with workpiece, vacuum tank and station valve (5) respectively outward, vacuum tank is connected with its outer evacuation valve (3), vacuum backfill valve (7), and evacuation valve is connected with vacuum pump (6).
2. shell container workpiece according to claim 1 vacuumizes and vacuum backfill system, the mouth of finding time that it is characterized in that workpiece (2) is connected with the non-tight valve plate end interface of coupling cock (4), and vacuum tank (1) is connected with the sealing valve plate end of coupling cock (4).
3. shell container workpiece according to claim 2 vacuumizes and vacuum backfill system, it is characterized in that coupling cock place (4) is in opening, station valve (5) and the workpiece mouthful UNICOM of finding time, station valve (5) is in closed condition, vacuum backfill valve (7) cuts out, vacuum tank (1) is closed sealing, vacuum pump (6) starts, evacuation valve (3) is opened, now workpiece (2) together with vacuum tank (1) in by vacuum pump (6) evacuated, be evacuated to the vacuum tightness of workpiece demand, close coupling cock (4), open station valve (5), now workpiece carries out pressurize detecting leakage, put nitrogen, balance, recovery process, workpiece (2) leak detection is closed station valve (5) after having reclaimed, and opens coupling cock (40), workpiece (2) and vacuum tank (1) UNICOM, and evacuation valve (3), in closed condition, is opened vacuum backfill valve (7), to vacuum tank and workpiece backfill simultaneously.
CN201320538030.9U 2013-09-02 2013-09-02 Workpiece vacuumizing and vacuum back-filling system for thin-shelled container Expired - Lifetime CN203432761U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201320538030.9U CN203432761U (en) 2013-09-02 2013-09-02 Workpiece vacuumizing and vacuum back-filling system for thin-shelled container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201320538030.9U CN203432761U (en) 2013-09-02 2013-09-02 Workpiece vacuumizing and vacuum back-filling system for thin-shelled container

Publications (1)

Publication Number Publication Date
CN203432761U true CN203432761U (en) 2014-02-12

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201320538030.9U Expired - Lifetime CN203432761U (en) 2013-09-02 2013-09-02 Workpiece vacuumizing and vacuum back-filling system for thin-shelled container

Country Status (1)

Country Link
CN (1) CN203432761U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106979847A (en) * 2016-01-15 2017-07-25 赛多利斯史泰迪生物技术有限责任公司 The method and apparatus that integrity test is carried out on flexible test container
CN109189113A (en) * 2018-08-13 2019-01-11 北京卫星环境工程研究所 The control pressurer system and control method of small pressure difference spacecraft product in vacuum test
CN116493195A (en) * 2023-05-23 2023-07-28 苏州锐智航智能科技有限公司 Online vacuum glue filling machine and control method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106979847A (en) * 2016-01-15 2017-07-25 赛多利斯史泰迪生物技术有限责任公司 The method and apparatus that integrity test is carried out on flexible test container
CN109189113A (en) * 2018-08-13 2019-01-11 北京卫星环境工程研究所 The control pressurer system and control method of small pressure difference spacecraft product in vacuum test
CN116493195A (en) * 2023-05-23 2023-07-28 苏州锐智航智能科技有限公司 Online vacuum glue filling machine and control method thereof
CN116493195B (en) * 2023-05-23 2023-11-28 苏州锐智航智能科技有限公司 Online vacuum glue filling machine and control method thereof

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C14 Grant of patent or utility model
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CX01 Expiry of patent term

Granted publication date: 20140212

CX01 Expiry of patent term