CN202279867U - Carbon/carbon composite guide cylinder - Google Patents
Carbon/carbon composite guide cylinder Download PDFInfo
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- CN202279867U CN202279867U CN2011202196757U CN201120219675U CN202279867U CN 202279867 U CN202279867 U CN 202279867U CN 2011202196757 U CN2011202196757 U CN 2011202196757U CN 201120219675 U CN201120219675 U CN 201120219675U CN 202279867 U CN202279867 U CN 202279867U
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- carbon
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- guide shell
- density
- urceolus
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Abstract
The utility model discloses a carbon/carbon composite guide cylinder which is simple in production, good in heat insulation effect and high in strength. The carbon/carbon composite guide cylinder comprises a cylinder body and is characterized in that the cylinder body comprises an outer cylinder (2) and an inner cylinder (3), wherein one ends of the outer cylinder (2) and the inner cylinder (3) are connected through a flange (1), and the other ends of the outer cylinder (2) and the inner cylinder (3) are connected into a whole through a connecting ring (5); a carbon felt (4) is arranged between the outer cylinder (2) and the inner cylinder (3); and the outer cylinder (2), the inner cylinder (3), the flange (1) and the connecting ring (5) are all made of a carbon/carbon composite with the density of 1.0-1.4g/cm<3>. A manufacturing method of the carbon/carbon composite guide cylinder is simple and feasible; the prepared guide cylinder has stronger heat insulation property and mechanical property than a graphite guide cylinder; the erosion resistibility and the corrosion resistibility of the surface of the guide cylinder are improved; and the surface of the guide cylinder is prevented from scaling off.
Description
Technical field
The utility model relates to a kind of High Temperature Furnaces Heating Apparatus parts, and specifically a kind of monocrystalline silicon draw machines is used guide shell, particularly relates to a kind of carbon/carbon compound material guide shell.
Background technology
The thermal field system of monocrystalline silicon draw machines all has very big influence to the whole excellent rate of silicon single crystal and yield rate, pulling rate, silicon single crystal rod quality, and therefore, the thermal field system design receives much concern with the selection and the use of the interior key element of thermal field.Guide shell is one of key element of pulling single crystal silicon furnace thermal field system, is mainly used in the thermograde and guiding argon gas stream of control thermal field.At present, the monocrystalline silicon draw machines guide shell is generally processed by the combination of graphite piece and charcoal felt, promptly goes out inner core and urceolus with machining graphite, and the charcoal felt is filled in the middle of inner core and the urceolus, through fastening piece the three is combined again.From the effect of using, not enough below this guide shell existence: the one, the impurity that the easy absorption of charcoal felt volatilizes from the polysilicon of the fusing of seam crossing entering reduces heat-insulating property; The 2nd, graphite is the good conductor of heat, and heat insulation effect is relatively poor; The 3rd, graphite intensity is low, and is fragile in the use, and work-ing life is short; The 4th, the inside and outside tube of large size graphite is shaped difficult, and consumptive material is more.
In recent years, some silicon single-crystal manufacturers or material maker put forward to adopt carbon/carbon compound material to prepare the technical scheme of guide shell.Like the patent No. 200610043187.9; The applying date is on July 20th, 2006; Publication number is that the patent of CN1907915 discloses the preparation method of a kind of monocrystalline silicon draw machines with thermal field charcoal/charcoal draft tube; Its preparation method is at first to adopt charcoal cloth and thin carbon fibre web tread ring to become the guide shell precast body of accurate three-dimensional structure to winding back acupuncture; The densification process that combines through chemical vapour deposition and resin impregnating charing and the charing of hot isostatic pressing bituminizing then, densified makes the density>=1.83g/cm of guide shell goods for several times repeatedly
3, machining after under chlorine and the freonll-11 atmosphere guide shell goods being carried out high temperature purification at last, this guide shell intensity is high; High temperature thermal shock resistance can be good, but because guide shell density is too high, the guide shell good heat conductivity; Be unfavorable for the maintenance of single crystal rod radial symmetry gradient, can cause crystalizing interface uneven in the crystal pulling process, influence the monocrystalline quality; Simultaneously, highdensity carbon/carbon compound material manufacturing cost is also very high, is unfavorable for extensively promoting the use of.
The patent No. is 200810030750.8, and the applying date is on March 3rd, 2008, and publication number is that the patent of CN101311334 discloses a kind of single-crystal furnace guide shell and production technique thereof; Guide shell is made up of highdensity carbon/carbon compound material skin and low-density carbon/carbon compound material nexine, because the outer intensity of guide shell is high, the nexine thermal conductivity is low; Therefore; Alleviated the quality of guide shell, guide shell had both had enough intensity and wear resistance, had heat-shock resistance and heat-insulating property preferably again.But in actual production, the complicated process of preparation of the whole guide shell that this inside and outside layer density difference is very big, cost is high.
Summary of the invention
The purpose of the utility model provides simple, the high insulating effect of a kind of production, the carbon/carbon compound material guide shell that intensity is high.
The utility model is to adopt following technical scheme to realize its goal of the invention; A kind of carbon/carbon compound material guide shell, it comprises cylindrical shell, described cylindrical shell comprises urceolus, inner core; One end of urceolus, inner core connects through flange; The other end connects to form an integral body through shack, is provided with the charcoal felt between urceolus, the inner core, and said urceolus, inner core, flange and shack are 1.0g/cm by density
3～1.4g/cm
3The carbon/carbon compound material preparation, the density of said charcoal felt is 0.1g/cm
3～0.2g/cm
3
The surface of the utility model cylindrical shell is provided with the density coating, and the apparent density of density coating is 1.5g/cm
3～1.7g/cm
3, the density coat-thickness is 0.5 ㎜～1.5 ㎜.
Owing to adopt technique scheme; The utility model has been realized goal of the invention preferably; Its making method is simple, and heat-insulating property, the mechanical property of the guide shell of preparation are stronger than graphite guide shell, can guarantee the formation of axial-temperature gradient in the stove and stable better; Simultaneously; Because the guide shell surface is provided with the density coating; The impurity that volatilizes in the polysilicon that can prevent to melt corrodes the charcoal felt, has guaranteed the stable of charcoal felt heat-insulating property, has prolonged its work-ing life; And improved erosion resistibility, the corrosion resistance on guide shell surface, prevented that the guide shell surface from falling slag and fall piece.
Description of drawings
Fig. 1 is the structural representation of the utility model.
Embodiment
Below in conjunction with accompanying drawing and embodiment the utility model is described further.
Can know by Fig. 1; A kind of carbon/carbon compound material guide shell, it comprises cylindrical shell, described cylindrical shell comprises urceolus 2, inner core 3; One end of urceolus 2, inner core 3 connects through flange 1; The other end connects to form an integral body through shack 5, is provided with charcoal felt 4 between urceolus 2, the inner core 3, and said urceolus 2, inner core 3, flange 1 and shack 5 are 1.0g/cm by density
3～1.4g/cm
3The carbon/carbon compound material preparation, the density of said charcoal felt 4 is 0.1g/cm
3～0.2g/cm
3
Said charcoal felt 4 is the polyacrylonitrile base carbon felt, has the characteristic such as high temperature resistant, corrosion-resistant, not fusion of general block carbon material, have the volume density of fibrous carbon little again, soft, flexible, collapsible, cut out, performance such as available charcoal yarn stitching.
The utility model is provided with the density coating on the surface of cylindrical shell.During density, because the seam crossing of each part of guide shell also is filled with RESEARCH OF PYROCARBON, the impurity that volatilizes in the polysilicon that can prevent to melt gets into from the interface slit and corrodes charcoal felt 4, has guaranteed the stable of charcoal felt 4 heat-insulating properties, has prolonged its work-ing life.
The apparent density of the said density coating of the utility model is 1.5g/cm
3～1.7g/cm
3, the density coat-thickness is 0.5 ㎜～1.5 ㎜.
The working method of the utility model carbon/carbon compound material guide shell, it comprises the following steps:
⑴ shape: adopt the processing mode of near-net-shape, the preparation apparent density is 1.0g/cm
3～1.4g/cm
3(present embodiment is 1.29 g/cm
3) carbon/carbon compound material inner core 3, urceolus 2, flange 1 and shack 5 base substrates, on request the base substrate machining is shaped again;
⑵ assemble cylindrical shell: inner core 3, urceolus 2, flange 1, the shack 5 of step ⑴ preparation are combined through the fastening piece 6 (present embodiment is a screw) that is prepared by carbon/carbon compound material with charcoal felt 4, and density is 0.1g/cm
3～0.2g/cm
3(present embodiment is 0.12 g/cm
3) charcoal felt 4 be placed between inner core 3 and the urceolus 2;
The utility model fuses flange 1, urceolus 2 and shack 5 with fastening piece 6 earlier, charcoal felt 4 is layered in the urceolus 2 again, put into inner core 3 after, with fastening piece 6 inner core 3 and flange 1 and shack 5 are linked into an integrated entity at last.
⑶ purifying: the guide shell cylindrical shell of step ⑵ preparation is put into vacuum oven carry out pyroprocessing, remove metallic impurity and volatile matter, cleansing temp is 1800 ℃～2600 ℃, and soaking time is 1 h～10h.
Corrode charcoal felt 4 for the impurity that volatilizes in the polysilicon that prevents to melt gets into from the interface slit, guaranteed the stable of charcoal felt 4 heat-insulating properties, prolonged its work-ing life.The utility model carries out top coat to the guide shell cylindrical shell earlier behind step ⑵ handles, and carries out purification process then.
Described top coat is for putting into the CVD stove with the guide shell cylindrical shell of step ⑵ preparation; Vacuumize in the stove; Vacuum tightness is 100Pa～400Pa (present embodiment is 200Pa); In vacuum environment, furnace temperature is risen to 900 ℃～1200 ℃ (present embodiment is 1200 ℃), be incubated 3 hours～10 hours (present embodiment is 5 hours).
After vacuum-treat, do not come out of the stove, directly carry out the chemical vapour deposition density, make RESEARCH OF PYROCARBON be deposited on the surface of the seam crossing and the cylindrical shell of each part of guide shell.
Charge into carbon-source gas during vapour deposition; The present embodiment carbon-source gas is the Sweet natural gas through purifying; Stove internal gas pressure 1kPa～5kPa (present embodiment is 3kPa), 900 ℃～1200 ℃ of temperature (present embodiment is 1100 ℃), 50 hours～150 hours time (present embodiment is 120 hours); After this step, the surface preparation of guide shell cylindrical shell has fine and close pyrocarbon coating, and the apparent density of density coating is 1.5g/cm
3～1.7g/cm
3(present embodiment is 1.56 g/cm
3), the density coat-thickness is 0.5 ㎜～1.5 ㎜ (present embodiment is 1.1 ㎜).
The thermal conductivity of carbon/carbon compound material is lower than 50W/m.K; Be about 1/2nd of graphite; Be made up of the charcoal felt 4 of good heat insulating in the middle of the guide shell of preparation, guide shell integral heat insulation performance is better than graphite guide shell, can guarantee the formation of axial-temperature gradient in the stove and stable better; The bending strength of carbon/carbon compound material is about 90MPa, exceeds about one times in graphite, and mechanical property is stronger than graphite; Simultaneously; Because the guide shell surface is provided with the density coating; The impurity that volatilizes in the polysilicon that can prevent to melt corrodes charcoal felt 4, has guaranteed the stable of charcoal felt 4 heat-insulating properties, has prolonged its work-ing life; And improved erosion resistibility, the corrosion resistance on guide shell surface, prevented that the guide shell surface from falling slag and fall piece.
Claims (3)
1. carbon/carbon compound material guide shell; It comprises cylindrical shell; It is characterized in that described cylindrical shell comprises urceolus (2), inner core (3), an end of urceolus (2), inner core (3) connects through flange (1), and the other end connects to form an integral body through shack (5); Be provided with charcoal felt (4) between urceolus (2), the inner core (3), said urceolus (2), inner core (3), flange (1) and shack (5) are 1.0g/cm by density
3～1.4g/cm
3The carbon/carbon compound material preparation, the density of said charcoal felt (4) is 0.1g/cm
3～0.2g/cm
3
2. carbon/carbon compound material guide shell according to claim 1 is characterized in that the surface of cylindrical shell is provided with the density coating.
3. carbon/carbon compound material guide shell according to claim 2, the apparent density that it is characterized in that the density coating is 1.5g/cm
3～1.7g/cm
3, the density coat-thickness is 0.5 ㎜～1.5 ㎜.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202196757U CN202279867U (en) | 2011-06-27 | 2011-06-27 | Carbon/carbon composite guide cylinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202196757U CN202279867U (en) | 2011-06-27 | 2011-06-27 | Carbon/carbon composite guide cylinder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202279867U true CN202279867U (en) | 2012-06-20 |
Family
ID=46226042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202196757U Expired - Lifetime CN202279867U (en) | 2011-06-27 | 2011-06-27 | Carbon/carbon composite guide cylinder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202279867U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102296355A (en) * | 2011-06-27 | 2011-12-28 | 湖南金博复合材料科技有限公司 | Guide shell made from carbon/carbon composite material and production method |
| CN115323479A (en) * | 2022-08-16 | 2022-11-11 | 晶澳太阳能有限公司 | Guide cylinder and preparation method thereof |
| CN116219532A (en) * | 2023-05-08 | 2023-06-06 | 苏州晨晖智能设备有限公司 | Guide cylinder for single crystal furnace, preparation method and single crystal furnace |
-
2011
- 2011-06-27 CN CN2011202196757U patent/CN202279867U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102296355A (en) * | 2011-06-27 | 2011-12-28 | 湖南金博复合材料科技有限公司 | Guide shell made from carbon/carbon composite material and production method |
| CN102296355B (en) * | 2011-06-27 | 2013-12-11 | 湖南金博复合材料科技有限公司 | Guide shell made from carbon/carbon composite material and production method |
| CN115323479A (en) * | 2022-08-16 | 2022-11-11 | 晶澳太阳能有限公司 | Guide cylinder and preparation method thereof |
| CN116219532A (en) * | 2023-05-08 | 2023-06-06 | 苏州晨晖智能设备有限公司 | Guide cylinder for single crystal furnace, preparation method and single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20120620 Effective date of abandoning: 20131211 |
|
| RGAV | Abandon patent right to avoid regrant |