CN202277718U - Filtration unit - Google Patents
Filtration unit Download PDFInfo
- Publication number
- CN202277718U CN202277718U CN 201120376881 CN201120376881U CN202277718U CN 202277718 U CN202277718 U CN 202277718U CN 201120376881 CN201120376881 CN 201120376881 CN 201120376881 U CN201120376881 U CN 201120376881U CN 202277718 U CN202277718 U CN 202277718U
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- CN
- China
- Prior art keywords
- shell
- attaching parts
- filter
- filter core
- crossing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Filtration Of Liquid (AREA)
Abstract
The utility model discloses a filtration unit, which includes an outer housing, a filter element and a connecting piece arranged in the outer housing, a liquid inlet pipe and a liquid outlet pipe, wherein the connecting piece is connected with the filter element; one end of the liquid outlet pipe is connected with the connecting piece; the other end of the liquid outlet pipe extends outside the outer housing; the outer housing is a cylindrical container; and one end of the liquid inlet pipe is inserted into the outer housing from the outside of the outer housing along the tangential direction of the cross section of the outer housing. The filtration unit provided by the utility model can improve the flow rate of the liquid and accelerate the filtration of the liquid, thereby efficiently preventing formation of large crystalline particles.
Description
Technical field
The utility model relates to field of semiconductor manufacture, relates in particular to a kind of filter.
Background technology
In semiconductor fabrication, most technologies will be used chemicals, and these chemicals all directly contact with wafer mostly, and therefore, the article confrontation technology of chemicals plays crucial effects, influences the wafer crudy.
With cmp (CMP) technology is example; Use various lapping liquids (slurry) in the chemical mechanical milling tech in a large number, if contain impurity and large particle crystal in the lapping liquid, these impurity and large particle crystal can be in process of lapping the scratch crystal column surface; Thereby influence wafer processing; Therefore, most lapping liquids all will pass through filtration treatment before getting into the board use, to filter out impurity and the large particle crystal in the lapping liquid.
Shown in Figure 1 for being used to filter the filter of lapping liquid in the prior art; Said filter comprises shell 11, crosses filter core 12, attaching parts 13, lapping liquid inlet tube 14 and lapping liquid outlet 15, and said shell 11 is a hydrostatic column, and the said filter core 12 of crossing is arranged in the said shell 11; And it is coaxial with said shell 11; Said attaching parts 13 are arranged in the said shell 11, and are positioned at a said end of crossing filter core 12, and said attaching parts 13 are communicated with the said filter core 12 of crossing; One end of said lapping liquid inlet tube 14 inserts in the said shell 11 outside said shell 11 along the diametric(al) of shell 11; One end of said lapping liquid outlet 15 is connected with said attaching parts 13, and the other end of said lapping liquid outlet 15 stretches out outside the said shell 11, and said lapping liquid outlet 15 is communicated with said attaching parts 13.Because said lapping liquid inlet tube 14 is along the diametric(al) setting of said shell 11; Therefore; The lapping liquid to be filtered that flows out from said lapping liquid inlet tube 14 flows in the said shell 11 along the axis direction of shell 11, and the lapping liquids to be filtered in the said shell 11 flow to said the mistake in the filter core 12 along the diametric(al) of shell 11 again, saidly crosses filter core 12 filtrations; Therefore; Get into the said lapping liquid of crossing filter core 12 and be the lapping liquid through filtration treatment, the said lapping liquid of crossing in the filter core 12 flows in the said attaching parts 13 again, is transported to grinder station by said lapping liquid outlet 15.Lapping liquid at the flow direction in the said filter shown in the arrow among Fig. 1.
Because lapping liquid axis direction along shell 11 in shell 11 flows, therefore, the flow velocity of lapping liquid in shell 11 is very slow; Lapping liquid flowed into filter core 12 from shell 11 and will take a long time; In this long time, gatherings that can attract each other of the effective abrasive grains in the lapping liquid, formation large particle crystal; These large particle crystals will stop up filter, influence the filter operate as normal.
The utility model content
The purpose of the utility model is to provide a kind of filter, improves liquid flow rate, and accelerating liquid filters, thereby effectively prevents the formation of large particle crystal.
In order to reach above-mentioned purpose; The utility model provides a kind of filter, comprises shell, is arranged on filter core and attaching parts excessively in the said shell; Liquid inlet tube and liquid outlet tube; Said attaching parts are connected with the said filter core of crossing, and an end of said liquid outlet tube is connected with said attaching parts, and the other end of said liquid outlet tube stretches out outside the said shell; Said shell is a hydrostatic column, and an end of said liquid inlet tube inserts in the said shell outside said shell along the tangential direction of cross-sectional outer.
Above-mentioned filter, wherein, the internal diameter of said attaching parts is greater than the said internal diameter of crossing filter core.
Above-mentioned filter; Wherein, Said filter core excessively is a circular cylindrical cavity, and the said sidewall of crossing filter core is a screen pack, and the end that said filter core does not excessively connect said attaching parts is a blind end; The end that said filter core excessively connects said attaching parts is an openend, and the said filter core of crossing is communicated with said attaching parts through this openend.
Above-mentioned filter, wherein, said attaching parts are hydrostatic column, are provided with internal vent ports in said attaching parts away from an end of crossing filter core, said liquid outlet tube is connected with the sidewall of said attaching parts.
Above-mentioned filter wherein, is provided with the outer rows gas port at said shell near an end of liquid inlet tube, is provided with leakage fluid dram at said shell away from an end of liquid inlet tube.
The filter of the utility model is the tangential direction setting of liquid inlet tube along cross-sectional outer, make lapping liquid around the axis of shell in the shape of a spiral shape flow down, promptly lapping liquid is that rotation is flowed in the enclosure; Improve lapping liquid flow rate in the enclosure greatly, accelerated the lapping liquid rate of filtration, shortened filtration time; Can effectively prevent the formation of large particle crystal; Reduce filter and stop up risk, prolong the service time of filter, thereby improved operating efficiency.
Description of drawings
The filter of the utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the structural representation of the filter of prior art.
Fig. 2 is the structural representation of the filter of the utility model one embodiment.
Fig. 3 is the vertical view of the filter of the utility model one embodiment.
Fig. 4 is the sketch map that lapping liquid flows in the enclosure among the utility model one embodiment.
The specific embodiment
Below will combine Fig. 2～Fig. 4 that the filter of the utility model is done further to describe in detail.
Be example still with the filter that is used to filter lapping liquid:
Referring to Fig. 2 and Fig. 3, the filter of present embodiment comprises shell 210, crosses filter core 220, attaching parts 230, liquid inlet tube 240 and liquid outlet tube 250;
Said shell 210 is provided with outer rows gas port 211 and leakage fluid dram 212;
The said filter core 220 of crossing is arranged in the said shell 210, and coaxial with said shell 210, and the said filter core 22 of crossing is used for lapping liquid is carried out filtration treatment;
Said attaching parts 230 are arranged in the said shell 210, and are positioned at a said end of crossing filter core 220, are communicated with the said filter core 220 of crossing;
Said attaching parts 230 are provided with internal vent ports 231, and said internal vent ports 231 is stretched out outside the said shell 210;
Said shell 210 is a hydrostatic column, and the cross section of said shell 210 is circular, and an end of said liquid inlet tube 240 inserts in the shell 210 outside shell 210 along the tangential direction of shell 210 cross sections;
One end of said liquid outlet tube 250 is connected with said attaching parts 230; The other end of said liquid outlet tube 250 stretches out outside the said shell 210; Said liquid outlet tube 250 is communicated with said attaching parts 230, and said liquid outlet tube 250 is used for the lapping liquid after filtering is transported to grinder station.
Because said liquid inlet tube 240 is along the tangential direction setting of cross-sectional outer, around the axis of shell, shape flows down in the shape of a spiral, promptly lapping liquid is that rotation is flowed in said shell 210 to the lapping liquid that flows out from said liquid inlet tube 240 under the force effect; As shown in Figure 4; This has improved the flow rate of lapping liquid in said shell 210 greatly, has accelerated the lapping liquid rate of filtration, has shortened filtration time; Can effectively prevent the formation of large particle crystal; Reduce filter and stop up risk, prolong the service time of filter, thereby improved operating efficiency.
Continuation is referring to Fig. 2, and preferably, said filter core 220 excessively is a circular cylindrical cavity; The said sidewall of crossing filter core 220 is a screen pack; Said to cross the end that filter core 220 do not connect attaching parts 230 be blind end, and said to cross the end that filter core 220 connects attaching parts 230 be openend, and the said filter core 220 of crossing is communicated with said attaching parts 230 through this openend; Said screen pack is used for lapping liquid is carried out filtration treatment, stops impurity and large particle crystal in the lapping liquid to be filtered to get into the said filter core 20 of crossing.
Preferably; Said attaching parts 230 are hydrostatic column; The internal diameter of said attaching parts 230 is greater than the said internal diameter of crossing filter core 220; Said internal vent ports 231 is arranged on said attaching parts 230 away from an end of crossing filter core 220, and said liquid outlet tube 250 is connected with the sidewall of said attaching parts 230.
Preferably, said outer rows gas port 211 is arranged on the end of said shell 210 near liquid inlet tube 240, and said leakage fluid dram 212 is arranged on the end of said shell 210 away from liquid inlet tube 240.
For guaranteeing the filter operate as normal; After changing said filter core 220 excessively; Utilize said outer rows gas port 211 to drain the air in the said shell 210; Utilize said internal vent ports 231 to drain the air in said attaching parts 230 and the mistake filter core 220, utilize said leakage fluid dram 212 can drain remaining lapping liquid in the filter again, normally use in order to avoid the lapping liquid particle packing influences device in device.
Obviously, those skilled in the art can carry out various changes and modification to the utility model and not break away from the spirit and the scope of the utility model.Like this, belong within the scope of the utility model claim and equivalent technologies thereof if these of the utility model are revised with modification, then the utility model also is intended to comprise these changes and modification interior.
Claims (5)
1. filter comprises: shell is arranged on and crosses filter core and attaching parts in the said shell; Liquid inlet tube and liquid outlet tube, said attaching parts are connected with the said filter core of crossing, and an end of said liquid outlet tube is connected with said attaching parts; The other end of said liquid outlet tube stretches out outside the said shell; Said shell is a hydrostatic column, it is characterized in that, an end of said liquid inlet tube inserts in the said shell outside said shell along the tangential direction of cross-sectional outer.
2. filter as claimed in claim 1 is characterized in that, the internal diameter of said attaching parts is greater than the said internal diameter of crossing filter core.
3. filter as claimed in claim 1; It is characterized in that; Said filter core excessively is a circular cylindrical cavity, and the said sidewall of crossing filter core is a screen pack, and the end that said filter core does not excessively connect said attaching parts is a blind end; The end that said filter core excessively connects said attaching parts is an openend, and the said filter core of crossing is communicated with said attaching parts through this openend.
4. filter as claimed in claim 1 is characterized in that, said attaching parts are hydrostatic column, is provided with internal vent ports in said attaching parts away from an end of crossing filter core, and said liquid outlet tube is connected with the sidewall of said attaching parts.
5. filter as claimed in claim 1 is characterized in that, is provided with the outer rows gas port at said shell near an end of liquid inlet tube, is provided with leakage fluid dram at said shell away from an end of liquid inlet tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120376881 CN202277718U (en) | 2011-09-30 | 2011-09-30 | Filtration unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120376881 CN202277718U (en) | 2011-09-30 | 2011-09-30 | Filtration unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202277718U true CN202277718U (en) | 2012-06-20 |
Family
ID=46223905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201120376881 Expired - Fee Related CN202277718U (en) | 2011-09-30 | 2011-09-30 | Filtration unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202277718U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107970657A (en) * | 2018-01-24 | 2018-05-01 | 山东三禾环保节能科技有限公司 | Water automatic dedusting filter |
-
2011
- 2011-09-30 CN CN 201120376881 patent/CN202277718U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107970657A (en) * | 2018-01-24 | 2018-05-01 | 山东三禾环保节能科技有限公司 | Water automatic dedusting filter |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120620 Termination date: 20160930 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |