CN201945318U - Heartbeat type single structure three-axis micro-electromechanical gyroscope - Google Patents
Heartbeat type single structure three-axis micro-electromechanical gyroscope Download PDFInfo
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- CN201945318U CN201945318U CN2011200392669U CN201120039266U CN201945318U CN 201945318 U CN201945318 U CN 201945318U CN 2011200392669 U CN2011200392669 U CN 2011200392669U CN 201120039266 U CN201120039266 U CN 201120039266U CN 201945318 U CN201945318 U CN 201945318U
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Abstract
The utility model discloses a heartbeat type single structure three-axis micro-electromechanical gyroscope comprising a substrate and an axis structure, wherein the axis structure comprises horizontal axis structures and four groups of z-axis structures, the horizontal axis structures and the z-axis structure are mounted on the substrate respectively; the gyroscope adopts a radial shrinkage-expansion heartbeat type single driving mode, and each axis uses an independent induction structure; the horizontal axis structures are symmetrically arranged along the x-axis and y-axis; the four groups of z-axis structures are distributed among the horizontal axis structures and are symmetrical pairwise; a umbilical cord is used to connect the outer side between adjacent horizontal axis structure and z-axis structure so that a three-axis structure can obtain single driving, two mass blocks of each horizontal axis are connected by a cross connector and can achieve synchronous movement of opposite phases during induction; and four mass blocks of the z-axis are connected in sequence by four synchronous coordinators to realize the synchronous movement of the mass blocks during the induction. All the three axes of the x-axis, y-axis and z-axis realize the mutual decoupling of driving and detection.
Description
Technical field
The utility model relates to a kind of micro-electro-mechanical gyroscope, relates in particular to a kind of demonstrating heartbeat type single structure three axis microelectromechanicdevice gyroscopes with decoupling zero characteristic, belongs to MEMS (micro electro mechanical system) (MEMS) field.
Background technology
Micro-electro-mechanical gyroscope is based on the inertia device of MEMS (micro electro mechanical system), can be used to measure the angular velocity of moving object.Compare with traditional gyroscope, it is little that micro-electro-mechanical gyroscope has a volume, and light weight is cheap, is more suitable for characteristics such as production in enormous quantities.The tradition gyroscope comprises mechanical gyroscope, lasergyro, fibre optic gyroscope or the like, wide always model is applied to the stable control of aircraft, weapon navigational guidance, fields such as automotive safety, because these gyroscope volumes are big, cost is high and be not suitable for being applied to consumer electronics product.In recent years, along with the development of MEMS technology, micro-electro-mechanical gyroscope is applied to consumer electronics product just gradually, and is stable as digital image of camera, the joystick of game machine, cell-phone function control, and and the micro navigation instrument that constitutes of micro-acceleration sensor or the like.
Micro-electro-mechanical gyroscope mainly is made up of drive part and sensing part, because the complicacy of its design and manufacturing, what occur in the market mostly is one and two gyroscopes, the application of three-axis gyroscope generally is a plurality of one or two gyrostatic quadrature assemblings, perhaps a plurality of gyroscopes are integrated on the single chip, these all do not reach the purpose that the consumer electronics produce market is pursued miniaturization.Exploitation single structure three-axis gyroscope has become the important directions that micro-electro-mechanical gyroscope is researched and developed.
The utility model adopts the single structure design, wholely adopts the driving that is similar to the heartbeat mode, the differential output of condenser type static driven and electric capacity, and three are all used independently induction structure, have avoided intercoupling of induced signal between each.Structure is tightly short, has reduced the gyroscope volume, is fit to produce in enormous quantities, can realize good measuring accuracy and sensitivity.
The utility model content
The purpose of this utility model is to provide that a kind of structure is tightly short, with low cost, manufacture craft simple, has the higher quality factor, the coupling of the signal between each can structurally be inhibited and each can realize the demonstrating heartbeat type single structure three axis microelectromechanicdevice gyroscopes of the mobile decoupling that drives and detect.
Realize that the technical scheme that the utility model above-mentioned purpose is adopted is: a kind of demonstrating heartbeat type single structure three axis microelectromechanicdevice gyroscopes, it comprises substrate and axle construction, it is characterized in that: described axle construction comprises transverse axis structure and z axle construction, described transverse axis structure and z axle construction are installed in respectively on the described substrate, described transverse axis structure is used for measurement of x axis angular rate and y axis angular rate, described transverse axis structure is made up of with the cross connector that is positioned at transverse axis separation structure center and be connected with described four groups of transverse axis separation structures respectively four groups of transverse axis separation structures, described four groups of transverse axis separation structures lay respectively on the axis of x axle and y axle, are symmetry shape and distribute; Described z axle construction is used for measuring the z axis angular rate, described z axle construction is made up of four groups of z axle separation structures and four synchronization coordinator that are positioned at the described z axle separation structure outside, described four synchronization coordinator connect adjacent z axle separation structure respectively, described four groups of z axle separation structures and described four groups of transverse axis separation structures are interspersed, four groups of z axle separation structures lay respectively on the angle separated time of the coordinate axis that x axle and y axle constitute, be symmetry shape and distribute, described four groups of transverse axis separation structures are connected by eight umbilical cords successively with four groups of z axle separation structures.
Each group transverse axis separation structure in described four groups of transverse axis separation structures includes transverse axis drives structure, transverse axis induction structure and transverse axis elastic construction, described transverse axis drives structure comprises transverse axis driving arm and transverse axis driving comb electrode group, described transverse axis driving arm is suspended on the substrate, described transverse axis driving comb electrode group comprises transverse axis activity comb electrodes and transverse axis fixed fingers electrode, transverse axis activity comb electrodes is connected on the transverse axis driving arm, and transverse axis fixed fingers electrode is fixed on the substrate; Described transverse axis induction structure is made up of transverse axis mass and bottom crown, described transverse axis mass is suspended on the substrate, and link to each other with z axle separation structure by umbilical cord, described bottom crown is positioned at transverse axis mass below and be arranged in parallel with the transverse axis mass, and described bottom crown also is fixed on the substrate; Described transverse axis elastic construction comprises transverse axis outside spring device, the inboard spring device of transverse axis, the flank elastic hinge of central elastic hinge and two symmetrical distributions, totally two groups of described transverse axis outside spring devices, all be positioned at the outside of described transverse axis driving arm, one end of transverse axis outside spring device is connected on the transverse axis driving arm, the other end is fixed on the substrate by anchor point, one end of the inboard spring device of described transverse axis is connected in the inboard of transverse axis mass, the other end links to each other with described cross connector, the two ends of the flank elastic hinge of described central elastic hinge and two symmetrical distributions link to each other with the transverse axis driving arm with the transverse axis mass respectively, described cross connector comprises that the cross tie-beam is connected spring with cross, described cross tie-beam is suspended on the substrate, this cross tie-beam is connected with the inboard spring device of the transverse axis of four groups of transverse axis separation structures, cross connects the center that spring is positioned at the cross tie-beam, described cross connects spring fixedlys connected with the cross tie-beam on the x direction of principal axis, is fixed on the substrate by four anchor points on the y direction of principal axis.
Each group z axle separation structure in described four groups of z axle separation structures includes z axle drives structure, z axle induction structure and z axle elastic construction, described z axle drives structure is drawn together z axle driving arm and z axle driving comb electrode group, described z axle driving arm is suspended on the substrate, totally three groups of described z axle driving comb electrode groups, one group of inboard that is positioned at z axle separation structure, two groups of outsides that are symmetrically distributed in z axle separation structure in addition, each group z axle driving comb electrode group includes z axle driving activity comb electrodes and the z axle drives the fixed fingers electrode, z axle driving activity comb electrodes is connected on the described z axle driving arm, and z axle fixed fingers electrode is fixed on the substrate; Described z axle induction structure is made of z axoplasm gauge block and z axle induction comb electrodes group, described z axoplasm gauge block is suspended on the substrate, and link to each other with described transverse axis mass by umbilical cord, described z axle induction comb electrodes group is made up of z axle sensed activity comb electrodes and z axle induction fixed fingers electrode, z axle sensed activity comb electrodes is connected on the z axoplasm gauge block, and z axle induction fixed fingers electrode is fixedly installed on the substrate; Described z axle elastic construction comprises z axle outside spring device, the inboard spring device of z axle, the flank elasticity folding beam of central elastic straight beam and two symmetrical distributions, totally two groups of described z axle outside spring devices, all be positioned at the outside of described z axle driving arm, one end of described z axle outside spring device is connected in z axle driving arm, the other end is fixed on the substrate by anchor point, one end of the inboard spring device of described z axle is connected in the inboard of z axle driving arm, the other end is fixed on the substrate by anchor point, the two ends of the flank elasticity folding beam of described central elastic straight beam and two symmetrical distributions link to each other with z axle driving arm with described z axoplasm gauge block respectively, and four synchronization coordinator connect z axoplasm gauge block successively in the periphery.
Compared with prior art, the utlity model has following remarkable advantage: 1) can realize three single driving; 2) realize that three single structure is integrated, structure is tightly short, and manufacturing process is simple, is fit to produce in enormous quantities, and is cheap; 2) each adopts differential mode output, has increased output signal, has improved gyrostatic sensitivity, has suppressed undesired signal 4) induced signal is structurally realized not having and is coupled between each; 5) realized the full decoupled of each driving and induction.
Description of drawings
Below in conjunction with drawings and the specific embodiments the utility model is described in further detail.
Fig. 1 is the gyrostatic stereographic map of the utility model;
Fig. 2 is the gyrostatic front view of the utility model;
Fig. 3 is the stereographic map of transverse axis separation structure in the utility model gyroscope;
Fig. 4 is the front view of transverse axis separation structure in the utility model gyroscope;
Fig. 5 is the stereographic map of cross connector in the utility model gyroscope
Fig. 6 is the front view of cross connector in the utility model gyroscope
Fig. 7 is the stereographic map of z axle separation structure in the utility model gyroscope;
Fig. 8 is the front view of z axle separation structure in the utility model gyroscope;
Fig. 9 is the stereographic map of synchronization coordinator in the utility model gyroscope;
Figure 10 is the front view of synchronization coordinator in the utility model gyroscope;
Figure 11 is the stereographic map of umbilical cord in the utility model gyroscope;
Figure 12 is the front view of umbilical cord in the utility model gyroscope;
Figure 13 is the gyrostatic principle schematic of the utility model.
Embodiment
As Fig. 1 to demonstrating heartbeat type single structure three axis microelectromechanicdevice gyroscopes shown in Figure 12, it comprises substrate 10 and axle construction, axle construction comprises transverse axis structure and z axle construction, transverse axis structure and z axle construction are installed on the substrate respectively, the transverse axis structure is used for measurement of x axis angular rate and y axis angular rate, the transverse axis structure is made up of with the cross connector 30 that is positioned at transverse axis separation structure center and be connected with four groups of transverse axis separation structures respectively four groups of transverse axis separation structures 20, four groups of transverse axis separation structures 20 lay respectively on the axis of x axle and y axle, are symmetry shape and distribute; Z axle construction is used for measuring the z axis angular rate, z axle construction is made up of four groups of z axle separation structures 40 and four synchronization coordinator 50 that are positioned at the z axle separation structure outside, four synchronization coordinator 50 connect adjacent z axle separation structure respectively, four groups of z axle separation structures 40 and four groups of transverse axis separation structures 20 are interspersed, four groups of z axle separation structures 40 lay respectively on the angle separated time of the coordinate axis that x axle and y axle constitute, being symmetry shape distributes, four groups of transverse axis separation structures 20 are connected by eight umbilical cords 60 successively with four groups of z axle separation structures 40, two transverse axis masses that distribute along the x axle are used for responding to the y axis angular rate, and two transverse axis masses that distribute along the y axle are used for responding to the x axis angular rate.
Each group transverse axis separation structure in described four groups of transverse axis separation structures 20 includes transverse axis drives structure, transverse axis induction structure and transverse axis elastic construction, the transverse axis drives structure is drawn together transverse axis driving arm 22 and transverse axis driving comb electrode group, transverse axis driving arm 22 is suspended on the substrate 10, transverse axis driving comb electrode group comprises transverse axis activity comb electrodes 23 and transverse axis fixed fingers electrode 24, transverse axis activity comb electrodes 23 is connected on the transverse axis driving arm 22, and transverse axis fixed fingers electrode 24 is fixed on the substrate 10; The transverse axis induction structure is made up of transverse axis mass 21 and bottom crown 25, transverse axis mass 21 is provided with micropore, in order to reduce air damping, transverse axis mass 21 is suspended on the substrate 10, and link to each other with z axle separation structure by umbilical cord, bottom crown 25 is positioned at transverse axis mass 21 belows and be arranged in parallel with transverse axis mass 21, and bottom crown 25 also is fixed on the substrate 10, and the border of bottom crown 25 is within the projection of the z of transverse axis mass 21 direction of principal axis; The transverse axis elastic construction comprises the flank elastic hinge 29 of transverse axis outside spring device 26, the inboard spring device 27 of transverse axis, central elastic hinge 28 and two symmetrical distributions.Spring device 26 is totally two groups outside the transverse axis, all is positioned at the outside of transverse axis driving arm 22, and an end symmetry of transverse axis outside spring device 26 is connected transverse axis driving arm 22, and the other end is fixed on the substrate 10 by anchor point.One end of the inboard spring device 27 of transverse axis is connected in the inboard of transverse axis mass 21, and the other end links to each other with cross connector 30.The two ends of the flank elastic hinge 29 of central elastic hinge 28 and two symmetrical distributions respectively with transverse axis mass 21 and transverse axis driving arm 22, be used to connect transverse axis mass 21 and transverse axis driving arm 22.Cross connector 30 is positioned at the center of four groups of transverse axis separation structures, it comprises that cross tie-beam 31 is connected spring 32 with cross, cross tie-beam 31 is suspended on the substrate 10, this cross tie-beam is connected with the inboard spring device 27 of the transverse axis of four groups of transverse axis separation structures 20, cross connects the center that spring 32 is positioned at cross tie-beam 31, cross connects spring 32 fixedlys connected with cross tie-beam 31 on the x direction of principal axis, is being fixed on the substrate 10 by four anchor points on the y direction of principal axis.
Each group z axle separation structure 40 in described four groups of z axle separation structures 40 includes z axle drives structure, z axle induction structure and z axle elastic construction, the z drives structure is drawn together z axle driving arm 42 and z axle driving comb electrode group, z axle driving arm 42 is suspended on the substrate 10, totally three groups of z axle driving comb electrode groups, one group of inboard that is positioned at z axle separation structure, two groups of outsides that are symmetrically distributed in z axle separation structure in addition, each group z axle driving comb electrode group includes z axle driving activity comb electrodes 43 and the z axle drives fixed fingers electrode 44, z axle driving activity comb electrodes 43 is connected on the z axle driving arm 42, and the z axle drives fixed fingers electrode 44 and is fixed on the substrate 10.Z axle induction structure is made of z axoplasm gauge block 41 and z axle induction comb electrodes group, and z axoplasm gauge block 41 is suspended on the substrate 10, and links to each other with transverse axis mass 21 by umbilical cord 60, and z axoplasm gauge block 41 is provided with micropore, in order to reduce air damping.Z axle induction comb electrodes group is made up of z axle sensed activity comb electrodes 45 and z axle induction fixed fingers electrode 46, and z axle sensed activity comb electrodes 45 is connected on the z axoplasm gauge block 41, and z axle induction fixed fingers electrode 46 is fixedly installed on the substrate 10.Z axle elastic construction comprises the flank elasticity folding beam 410 of z axle outside spring device 47, the inboard spring device 48 of z, central elastic straight beam 49 and two symmetrical distributions.Spring device 47 is totally two groups outside the z axle, all is positioned at the outside of z axle driving arm 42, and an end symmetry of z axle outside spring device 47 is connected in z axle driving arm 42, and the other end is fixed in substrate by anchor point.One end of the inboard spring device 48 of z axle is connected in the inboard of z axle driving arm 42, and the other end is fixed on the substrate 10 by anchor point.The two ends of the flank elasticity folding beam 410 of a central elastic straight beam 49 and two symmetrical distributions link to each other with z axle driving arm 42 with z axoplasm gauge block 41 respectively, are used to connect z axoplasm gauge block 41 and z axle driving arm 42.Four synchronization coordinator 50 connect z axoplasm gauge block successively in the periphery.
Eight umbilical cords 60 couple together adjacent transverse axis separation structure 20 and z axle separation structure 40, the transverse axis axoplasm gauge block in the time of can realizing single driving the and the synchronous or the expansion of z axoplasm gauge block.
Demonstrating heartbeat type single structure three axis microelectromechanicdevice gyroscopes of the present utility model, the drive pattern that is similar to heartbeat that adopts the therefrom outside expansion of mind-set to shrink, the type of drive of each is the line vibration like this, Figure 13 is this gyrostatic principle schematic.System drives with certain frequency under the acting in conjunction of transverse axis drives structure and z axle drives structure, each axoplasm gauge block is the motion of demonstrating heartbeat type on the whole, the interior outside spring device of transverse axis and z axle can be done corresponding distortion, the distortion of umbilical cord has guaranteed the consistance of each axoplasm gauge block motion, and the instantaneous velocity of each axoplasm gauge block is V like this.When system was subjected to the x axis angular rate, two pairs of masses of corresponding transverse axis were subjected to taxi driver brother's formula power and are: F
x=-2m
xΩ
x* V, equal and opposite in direction, direction is opposite, the central elastic hinge, the inboard spring device of flank elastic hinge and transverse axis can be done corresponding distortion, and the mass of such two symmetries can be done the opposite seesaw movement of phase place, and the cross connector has guaranteed the pace of movement unanimity of two masses.The inductance capacitance of such side increases, and the inductance capacitance of opposite side reduces, and can realize differential output.Y axle situation is identical with the x axle.Passable when system is subjected to the z axis angular rate, each mass of z axle construction is subjected to being all clockwise or is all anticlockwise coriolis force, F
z=-2m
zΩ
zCentral elastic straight beam in such each z axle separation structure of * V, flank elasticity folding beam can be done corresponding distortion, and each z axoplasm gauge block can be done the translation that coordination is clockwise or coordination is counterclockwise, and synchronization coordinator has guaranteed the consistance of four mass motions.Each broach of z axle sensed activity comb electrodes in the induction structure of each z axle separation structure is between two fixed fingers, form two electric capacity with these two adjacent fixed fingers, like this when mass moves, an electric capacity increases, an electric capacity reduces, and forms differential capacitor output thus on the whole.When driving, transverse axis mass and bottom crown constant over against area, z axle induction fixed fingers electrode and z axle sensed activity comb electrodes also constant over against area so all there is not signal output, therefore, drives not influence of induced signal.When transverse axis structure or the induction of z axle construction, the not corresponding motion of transverse axis driving arm and z axle driving arm, therefore, induction is to driving not influence.Realize the full decoupling of driving and induction thus.Each axoplasm gauge block only has induction to the angular velocity of respective shaft, and this structurally is guaranteed, and realizes that thus the signal coupling between the axle suppresses.
It more than is a most preferred embodiment of the present utility model; those skilled in the art might make change or change to this design in not breaking away from protection domain of the present utility model, but these should be understood to still belong within the protection domain of the present utility model.
Claims (6)
1. demonstrating heartbeat type single structure three axis microelectromechanicdevice gyroscopes, it comprises substrate and axle construction, it is characterized in that: described axle construction comprises transverse axis structure and z axle construction, described transverse axis structure and z axle construction are installed in respectively on the described substrate, described transverse axis structure is made up of with the cross connector that is positioned at transverse axis separation structure center and be connected with described four groups of transverse axis separation structures respectively four groups of transverse axis separation structures, described four groups of transverse axis separation structures lay respectively on the axis of x axle and y axle, are symmetry shape and distribute; Described z axle construction is made up of four groups of z axle separation structures and four synchronization coordinator that are positioned at the described z axle separation structure outside, described four synchronization coordinator connect adjacent z axle separation structure respectively, described four groups of z axle separation structures and described four groups of transverse axis separation structures are interspersed, four groups of z axle separation structures lay respectively on the angle separated time of the coordinate axis that x axle and y axle constitute, be symmetry shape and distribute, described four groups of transverse axis separation structures are connected by eight umbilical cords successively with four groups of z axle separation structures.
2. demonstrating heartbeat type single structure three axis microelectromechanicdevice gyroscopes as claimed in claim 1, it is characterized in that: each the group transverse axis separation structure in described four groups of transverse axis separation structures includes the transverse axis drives structure, transverse axis induction structure and transverse axis elastic construction, described transverse axis drives structure comprises transverse axis driving arm and transverse axis driving comb electrode group, described transverse axis driving arm is suspended on the substrate, described transverse axis driving comb electrode group comprises transverse axis activity comb electrodes and transverse axis fixed fingers electrode, transverse axis activity comb electrodes is connected on the transverse axis driving arm, and transverse axis fixed fingers electrode is fixed on the substrate; Described transverse axis induction structure is made up of transverse axis mass and bottom crown, described transverse axis mass is suspended on the substrate, and link to each other with z axle separation structure by umbilical cord, described bottom crown is positioned at transverse axis mass below and be arranged in parallel with the transverse axis mass, and described bottom crown also is fixed on the substrate; Described transverse axis elastic construction comprises transverse axis outside spring device, the inboard spring device of transverse axis, the flank elastic hinge of central elastic hinge and two symmetrical distributions, totally two groups of described transverse axis outside spring devices, all be positioned at the outside of described transverse axis driving arm, one end of transverse axis outside spring device is connected on the transverse axis driving arm, the other end is fixed on the substrate by anchor point, one end of the inboard spring device of described transverse axis is connected in the inboard of transverse axis mass, the other end links to each other with described cross connector, the two ends of the flank elastic hinge of described central elastic hinge and two symmetrical distributions link to each other with the transverse axis driving arm with the transverse axis mass respectively, described cross connector comprises that the cross tie-beam is connected spring with cross, described cross tie-beam is suspended on the substrate, this cross tie-beam is connected with the inboard spring device of the transverse axis of four groups of transverse axis separation structures, cross connects the center that spring is positioned at the cross tie-beam, described cross connects spring fixedlys connected with the cross tie-beam on the x direction of principal axis, is fixed on the substrate by four anchor points on the y direction of principal axis.
3. demonstrating heartbeat type single structure three axis microelectromechanicdevice gyroscopes as claimed in claim 2, it is characterized in that: described transverse axis mass is provided with micropore.
4. demonstrating heartbeat type single structure three axis microelectromechanicdevice gyroscopes as claimed in claim 2 is characterized in that: the border of described bottom crown is within the projection of the z of transverse axis mass direction of principal axis.
5. as claim 2 or 3 or 4 described demonstrating heartbeat type single structure three axis microelectromechanicdevice gyroscopes, it is characterized in that: each the group z axle separation structure in described four groups of z axle separation structures includes z axle drives structure, z axle induction structure and z axle elastic construction, described z axle drives structure is drawn together z axle driving arm and z axle driving comb electrode group, described z axle driving arm is suspended on the substrate, totally three groups of described z axle driving comb electrode groups, one group of inboard that is positioned at z axle separation structure, two groups of outsides that are symmetrically distributed in z axle separation structure in addition, each group z axle driving comb electrode group includes z axle driving activity comb electrodes and the z axle drives the fixed fingers electrode, z axle driving activity comb electrodes is connected on the described z axle driving arm, and z axle fixed fingers electrode is fixed on the substrate; Described z axle induction structure is made of z axoplasm gauge block and z axle induction comb electrodes group, described z axoplasm gauge block is suspended on the substrate, and link to each other with described transverse axis mass by umbilical cord, described z axle induction comb electrodes group is made up of z axle sensed activity comb electrodes and z axle induction fixed fingers electrode, z axle sensed activity comb electrodes is connected on the z axoplasm gauge block, and z axle induction fixed fingers electrode is fixedly installed on the substrate; Described z axle elastic construction comprises z axle outside spring device, the inboard spring device of z axle, the flank elasticity folding beam of central elastic straight beam and two symmetrical distributions, totally two groups of described z axle outside spring devices, all be positioned at the outside of described z axle driving arm, one end of described z axle outside spring device is connected in z axle driving arm, the other end is fixed on the substrate by anchor point, one end of the inboard spring device of described z axle is connected in the inboard of z axle driving arm, the other end is fixed on the substrate by anchor point, the two ends of the flank elasticity folding beam of described central elastic straight beam and two symmetrical distributions link to each other with z axle driving arm with described z axoplasm gauge block respectively, and four synchronization coordinator connect z axoplasm gauge block successively in the periphery.
6. demonstrating heartbeat type single structure three axis microelectromechanicdevice gyroscopes as claimed in claim 5 is characterized in that: described z axoplasm gauge block is provided with micropore.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200392669U CN201945318U (en) | 2011-02-14 | 2011-02-14 | Heartbeat type single structure three-axis micro-electromechanical gyroscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200392669U CN201945318U (en) | 2011-02-14 | 2011-02-14 | Heartbeat type single structure three-axis micro-electromechanical gyroscope |
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| CN201945318U true CN201945318U (en) | 2011-08-24 |
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| CN2011200392669U Expired - Fee Related CN201945318U (en) | 2011-02-14 | 2011-02-14 | Heartbeat type single structure three-axis micro-electromechanical gyroscope |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10371521B2 (en) | 2016-05-26 | 2019-08-06 | Honeywell International Inc. | Systems and methods for a four-mass vibrating MEMS structure |
| US10696541B2 (en) | 2016-05-26 | 2020-06-30 | Honeywell International Inc. | Systems and methods for bias suppression in a non-degenerate MEMS sensor |
| CN115355898A (en) * | 2022-07-15 | 2022-11-18 | 瑞声开泰科技(武汉)有限公司 | Fully-decoupled three-axis MEMS gyroscope |
-
2011
- 2011-02-14 CN CN2011200392669U patent/CN201945318U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10371521B2 (en) | 2016-05-26 | 2019-08-06 | Honeywell International Inc. | Systems and methods for a four-mass vibrating MEMS structure |
| US10696541B2 (en) | 2016-05-26 | 2020-06-30 | Honeywell International Inc. | Systems and methods for bias suppression in a non-degenerate MEMS sensor |
| US11390517B2 (en) | 2016-05-26 | 2022-07-19 | Honeywell International Inc. | Systems and methods for bias suppression in a non-degenerate MEMS sensor |
| CN115355898A (en) * | 2022-07-15 | 2022-11-18 | 瑞声开泰科技(武汉)有限公司 | Fully-decoupled three-axis MEMS gyroscope |
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Granted publication date: 20110824 Termination date: 20150214 |
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