CN201772965U - Soi engine oil pressure sensor - Google Patents
Soi engine oil pressure sensor Download PDFInfo
- Publication number
- CN201772965U CN201772965U CN2009200484343U CN200920048434U CN201772965U CN 201772965 U CN201772965 U CN 201772965U CN 2009200484343 U CN2009200484343 U CN 2009200484343U CN 200920048434 U CN200920048434 U CN 200920048434U CN 201772965 U CN201772965 U CN 201772965U
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- resistor stripe
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- press welding
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- base
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Abstract
An SOI engine oil pressure sensor relates to the technical field of sensors and is provided with an insulation base. An axial cavity is arranged in the base, two circuit adapter plates are fixedly connected into the base, an outer end of the base is fixedly connected with an all-silicon pressure chip through a glass ring, the other end of the base is connected onto an insulation casing, and the all-silicon pressure chip comprises first, second, third and fourth resistor strips R1, R2, R3, R4 which form a piezoresistive wheatstone measuring bridge circuit. The SOI engine oil pressure sensor increases high frequency response property on vibration conditions, has the advantages of fine dynamical property, high temperature resistance, high precision, high frequency response, miniaturization, safe and reliable operation and strong adaptability, and widely meets requirements of high-precision pressure measurement under high temperature and high frequency in fields such as oil well logging, industrial automation, power equipment, national defense research and the like.
Description
Technical field
The utility model relates to sensor technical field, particularly the high-temperature-resistance pressure sensor technical field of high precision, high frequency sound.
Background technology
At present, industry such as China's petrochemical industry, automobile power equipment is used hydraulic pressure transducer in a large number.The overwhelming majority in these sensor sources relies on import, not only costs an arm and a leg, and, owing to do not have independent intellectual property right, probably hide potential threat.The emphasis that automobile industry has been greatly developed as China since founding the state, and the trend that develops to the intelligent direction of height of world today's automobile industry, therefore the pressure sensor design of oil pressure being measured as automotive interior make and the problem of industrialization most important.
At present, the oil pressure pressure transducer generally adopts piezoelectric type, strain-type, pressure resistance type structural principle.The output signal of piezoelectric pressure indicator is the charge variation amount, so follow-up signal processing circuit is more loaded down with trivial details and piezoelectric pressure indicator is not suitable for using under hot environment, and does not have the ability of high overload protection.Adopt the calibration device for high range pressure transducer of metal strain plate as sensitive element, the disadvantage that this kind sensor exists is exactly that output signal is too little, and under hot environment, temperature is bigger to the deformation effect of metal strain plate, influence the output of sensor, be not suitable for hot environment.In the piezoresistive pressure sensor, the most frequently used sensor construction is for filling silicone oil total silicon pressure transducer and dry type piezoresistive pressure sensor, and fill silicone oil total silicon piezoresistive pressure sensor, generally adopt PN joint isolation technology, cause its working temperature can only reach about 80 ℃, and because the influence of total silicon pressure chip structure, the pressure range is the highest at 40MPa; The dry type piezoresistive pressure sensor, although adopted more resistant to elevated temperatures quarantine measures and technology, have high temperature resistant and characteristics high range, but owing to be subjected to the influence (as structures such as beam membrane type, diaphragm types) of sensor package structure, cause sensor when high-tension measurement, have static errors such as bigger linearity, sluggishness.
In view of the complex environment of automobile engine oil inside, common single crystal silicon material and metal material can't satisfy at high temperature as the manufacturing materials substrate, under the vibration situation to the accuracy of hydraulic measurement.
The utility model content
The purpose of this utility model is to overcome the shortcoming of above-mentioned prior art, proposes the high-temperature-resistance pressure sensor of a kind of high precision, high frequency sound.
The utility model is provided with an insulating base, be provided with axial cavity in the pedestal, connect two circuit switch plates at the pedestal internal fixation, pass through the fixedly connected total silicon pressure chip of glass ring in an outer end of pedestal, the other end of described pedestal is connected on the insulation shell; Be provided with on the described total silicon pressure chip and comprise the first, second, third and the 4th resistor stripe R
1, R
2, R
3And R
4Form pressure drag Hui Sideng measuring bridge circuit, be furnished with the first resistor stripe R along horizontal crystal orientation [110] on the total silicon pressure chip
1With the 4th resistor stripe R
4, be furnished with the second resistor stripe R along vertical crystal orientation [120]
2With the 3rd resistor stripe R
3, the first resistor stripe R
1With the second resistor stripe R
2Connect the 3rd resistor stripe R by second a public press welding block
3With the 4th resistor stripe R
4Connect by another the 3rd public press welding block, first, fourth, five, six press welding blocks respectively with the first resistor stripe R
1, the 4th resistor stripe R
4, the 3rd resistor stripe R
3With the second resistor stripe R
2The other end link to each other, first press welding block and the 5th press welding block short circuit are on the positive source of 5V, the 4th press welding block is connected on power supply ground with the 6th press welding block short circuit, second welding block and the 3rd press welding block are the output terminal of electric bridge.
The utility model is isolated the little solid-state pressure drag chip of (SOI) silicon and glass ring with silicon and encapsulate the elasticity sensing unit that is combined as a whole as the pressure transducer of complete silicon structure under vacuum environment, solved the difficult problem of gaging pressure under the hot environment, thereby such chip can be used for hot environment (〉=200 ℃).Because the favorable mechanical characteristic of semiconductor silicon, be manufactured on the flat membrane structure of silicon square as the pressure drag Hui Sideng measuring bridge of sensor change-over circuit is integrated simultaneously, become one between the elasticity of sensor and sensitive element and the conversion circuit like this, greatly reduce sluggishness, the reproducibility error of sensor in measuring process, thereby improve the measuring accuracy of sensor.And flat film sensitive chip and glass ring are fallen to seal, improve the natural frequency of sensor.The utility model has improved the high frequency sound performance of sensor under the vibration situation, has dynamic perfromance good, high temperature resistant (〉=200 ℃), precision height, frequency response height, microminiaturization, safe and reliable, adaptable characteristics.The utility model can extensively be suitable for the high temperature in fields such as oil well logging, industrial automation, chain drive and national defence research, high frequency under the needs measured of high-precision pressure.
In order further to improve the stability of product, described two circuit switch plates are bonding by epoxide-resin glue and pedestal respectively; Pass through the electrostatic bonding sealing-in between described total silicon pressure chip and the glass ring; Sticking mutually between described glass ring and the pedestal by epoxide-resin glue; Be connected with spun gold by ultrasonic-thermocompression welding between each press welding block of total silicon pressure chip and the circuit switch plate.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is the structure principle chart of total silicon pressure chip of the present utility model.
Fig. 3 is pressure drag Hui Sideng measuring bridge circuit theory diagrams of the present utility model.
Embodiment
As shown in Figure 1, the utility model is provided with an insulating base 2, be provided with axial cavity in the pedestal 2, connect two circuit switch plates 3 and 3 ' at pedestal 2 internal fixation, glass ring 4 fixedly connected total silicon pressure chips 5 are passed through in an outer end at pedestal 2, and the other end of pedestal 2 is connected on the insulation shell 1.
As shown in Figure 2, be furnished with resistor stripe R along horizontal crystal orientation [110] on the total silicon pressure chip 5
1And R
4, be furnished with resistor stripe R along vertical crystal orientation [120]
2And R
3, resistor stripe R
1And R
2Connect resistor stripe R by a public press welding block 2
3And R
4Connect by another public press welding block 3, press welding block 1,4,5,6 respectively with resistor stripe R
1, R
4, R
3And R
2The other end link to each other.As shown in Figure 3, by resistor stripe R
1, R
2, R
3And R
4Form pressure drag Hui Sideng measuring bridge circuit, press welding block 1 and 5 short circuits are on the positive source of 5V, and press welding block 4 is connected on power supply ground with 6 short circuits, and welding block 2 and 3 is the output terminal of electric bridge.
More than two circuit switch plates 3 and 3 ' bonding by epoxide-resin glue and pedestal 2 respectively, pass through the electrostatic bonding sealing-in between total silicon pressure chip 5 and the glass ring 4, sticking mutually between glass ring 4 and the pedestal 2 by epoxide-resin glue, be connected by spun gold with the ultrasonic thermocompression soldering method between each press welding block of total silicon pressure chip 2 and the circuit switch plate 3 '.
Each parameter index of the present utility model:
Pressure sensor chip: 4300um * 4300um * 400um;
Pressure range: 500Kpa,
Sensitivity: 〉=7.0359mV/KPa;
The linearity :≤0.2%;
Precision: 0.5%Fs;
Strain limit: 〉=3000 μ ε;
Power supply: 1.5mADC;
Working temperature :-40～140 ℃;
Fatigue lifetime: 〉=6 * 10
4Inferior.
Claims (2)
1.SOI engine oil pressure pickup, it is characterized in that being provided with an insulating base, be provided with axial cavity in the pedestal, connect two circuit switch plates at the pedestal internal fixation, the fixedly connected total silicon pressure chip of glass ring is passed through in an outer end at pedestal, and the other end of described pedestal is connected on the insulation shell; Be provided with on the described total silicon pressure chip and comprise the first, second, third and the 4th resistor stripe R
1, R
2, R
3And R
4Form pressure drag Hui Sideng measuring bridge circuit, be furnished with the first resistor stripe R along horizontal crystal orientation [110] on the total silicon pressure chip
1With the 4th resistor stripe R
4, be furnished with the second resistor stripe R along vertical crystal orientation [120]
2With the 3rd resistor stripe R
3, the first resistor stripe R
1With the second resistor stripe R
2Connect the 3rd resistor stripe R by second a public press welding block
3With the 4th resistor stripe R
4Connect by another the 3rd public press welding block, first, fourth, five, six press welding blocks respectively with the first resistor stripe R
1, the 4th resistor stripe R
4, the 3rd resistor stripe R
3With the second resistor stripe R
2The other end link to each other, first press welding block and the 5th press welding block short circuit are on the positive source of 5V, the 4th press welding block is connected on power supply ground with the 6th press welding block short circuit, second welding block and the 3rd press welding block are the output terminal of electric bridge.
2. according to the described SOI engine oil pressure pickup of claim 1, it is characterized in that described two circuit switch plates are bonding by epoxide-resin glue and pedestal respectively; Pass through the electrostatic bonding sealing-in between described total silicon pressure chip and the glass ring; Sticking mutually between described glass ring and the pedestal by epoxide-resin glue; Be connected with spun gold by ultrasonic-thermocompression welding between each press welding block of total silicon pressure chip and the circuit switch plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200484343U CN201772965U (en) | 2009-10-22 | 2009-10-22 | Soi engine oil pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200484343U CN201772965U (en) | 2009-10-22 | 2009-10-22 | Soi engine oil pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201772965U true CN201772965U (en) | 2011-03-23 |
Family
ID=43752813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200484343U Expired - Lifetime CN201772965U (en) | 2009-10-22 | 2009-10-22 | Soi engine oil pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201772965U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102980692A (en) * | 2012-11-19 | 2013-03-20 | 西安微纳传感器研究所有限公司 | High-temperature impact-pressure-resistant sensor and production method thereof |
| CN110006584A (en) * | 2019-04-11 | 2019-07-12 | 西安培华学院 | A kind of high-temperature-resistance pressure sensor |
-
2009
- 2009-10-22 CN CN2009200484343U patent/CN201772965U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102980692A (en) * | 2012-11-19 | 2013-03-20 | 西安微纳传感器研究所有限公司 | High-temperature impact-pressure-resistant sensor and production method thereof |
| CN102980692B (en) * | 2012-11-19 | 2015-08-19 | 西安微纳传感器研究所有限公司 | Shock-resistant pressure transducer of a kind of high temperature and preparation method thereof |
| CN110006584A (en) * | 2019-04-11 | 2019-07-12 | 西安培华学院 | A kind of high-temperature-resistance pressure sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110323 |
|
| CX01 | Expiry of patent term |