CN201697614U - Measuring instrument for measuring surface profile and roughness of small machine parts - Google Patents
Measuring instrument for measuring surface profile and roughness of small machine parts Download PDFInfo
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- CN201697614U CN201697614U CN2010201204605U CN201020120460U CN201697614U CN 201697614 U CN201697614 U CN 201697614U CN 2010201204605 U CN2010201204605 U CN 2010201204605U CN 201020120460 U CN201020120460 U CN 201020120460U CN 201697614 U CN201697614 U CN 201697614U
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Abstract
A measuring instrument for measuring the surface profile and roughness of small machine parts consists of a base (1), a three-dimensional workbench (2), a sensor device (3), a cross arm case device (4), and an upright post device (5). An upright post DC motor drives a vertical belt pulley pair to rotate through a bevel gear pair and a worm gear pair so as to drive an upright post movable rail to move vertically along a migmatitic granite upright post; and the upright post movable rail and a cross arm case body are fixed relatively so as to realize the vertical movement and positioning of the sensor device. A DC motor is driven by a secondary belt pulley and a driving belt pulley and moves horizontally along a fixed rail together with a movable rail which is fixed with a synchronous belt relatively so as to drive the sensor device coupled with the movable rail to move horizontally and adjust the horizontal position of the sensor device; and horizontal movement is measured by noncontact and open grating. A measured profiled can be measured by moving a measuring head of a sensor in the sensor device to an initial position of the measured profile of a workpiece. The measuring instrument is featured with a simple, novel, and practical structure.
Description
Technical field
The utility model belongs to the measurement mechanism technical field, specially refers to a kind of measuring instrument that is used to measure small-sized machine piece surface profile and roughness.
Background technology
The measurement profile of present domestic use and the measuring instrument of roughness adopt the rectangular coordinate principle to come the contact type measurement workpiece, this measuring instrument exists certain defective on guide frame, adopt the column guide rail such as Z to measurement mechanism, and the column guide rail adopts the ball-screw transmission usually, owing to slide or the air-float guide rail guiding make the installation of ball-screw through being difficult to guarantee the parallel error with the guide rail spigot surface behind the pretension, the assembly difficulty height is difficult to the guiding accuracy that reaches high again; The guide pillar device lacks self-locking structure simultaneously, crawl occurs through regular meeting in measuring process, influences measuring accuracy.Directions X adopts the cog belt transmission in addition, rail plate guiding, and the sampling of enclosed grating; and the mobile guide of enclosed grating adopts elastic bearing; read head and moving guide rail can be interfered guiding accuracy after installing usually, not only be difficult to adjust, and the X that is difficult to reach high after the assembling are to measuring accuracy.
The measuring instrument of domestic use can not overcome in the problem of some technical elements because of each enterprise, and is difficult to reach user's real satisfaction all the time.The precision optical machinery product need just require to occur meeting on the market detecting instrument of this kind demand in the detection aspect the surface topography.
Summary of the invention
For solving the deficiencies in the prior art part, the utility model has designed a kind of measuring instrument that is used to measure small-sized machine piece surface profile and roughness, and this measuring instrument can be realized quick, the stably measured of small-sized machine piece surface high-accurate outline and roughness.
In order to realize the foregoing invention purpose, the utility model adopts following technical scheme:
Describedly be used to measure the measuring instrument of small-sized machine piece surface profile and roughness mainly by pedestal, three-dimensional working platform, sensor device, transverse arm case apparatus and stand column device constitute, three-dimensional working platform is arranged on the top of pedestal and by feather key three-dimensional working platform is positioned in the gathering sill of pedestal, top at pedestal also is fixed with stand column device, base plate in the stand column device is by being bolted on the pedestal, on stand column device, dispose the transverse arm case apparatus that moves up and down along the stand column device vertical direction, transverse arm casing in the transverse arm case apparatus is by being bolted on the moving guide rail of column in the stand column device, and the downside of transverse arm case apparatus is connected with sensor device.
The described measuring instrument that is used to measure small-sized machine piece surface profile and roughness, the transverse arm case apparatus is by secondary pulley, support plate, limit switch, decide guide rail, moving guide rail, open grating, be with synchronously, transverse arm case direct current generator, driving pulley and transverse arm casing constitute, the front end of transverse arm casing offers oval-shaped protrusion platform window, the support plate that abnormity is arranged at transverse arm casing internal fixation, the left end fixed joint belt wheel of support plate, the right-hand member of support plate is transverse arm case direct current generator fixedly, on transverse arm case direct current generator, connect driving pulley, driving pulley connects with secondary pulley by being with synchronously, one side of moving guide rail is connected and fixed with synchronous band, moving guide rail is by deciding the guide rail horizontal support, decide guide rail and be fixed on the support plate, two limit switches are set in the left and right sides of support plate; Open grating is made of grating chi and read head, and the grating chi is reflective steel band grating, and the grating chi sticks on to be decided the guide rail front end and can show that by the protrusion platform window of transverse arm casing read head is connected in the front end of moving guide rail.
The described measuring instrument that is used to measure small-sized machine piece surface profile and roughness, stand column device is by base plate, the grouan column, the belt wheel set, column moves guide rail, capacity eccentric bearing, nylon edge head, the column direct current generator, top board, worm couple, bevel gear pair and adjustment handle constitute, the upper end configuration top board of grouan column, the lower end configuration base plate of grouan column, by base plate stand column device is fixed on the pedestal, the front panel of grouan column is provided with groove, dispose the belt wheel set in the described groove, the belt wheel set is by upper belt-wheel, band and following belt wheel are formed synchronously, upper belt-wheel is fixed on the top board, following belt wheel is fixed on the lower end of grouan column groove, upper belt-wheel connects with following belt wheel by being with synchronously, be with synchronously and be connected with the moving guide rail of column, the moving guide rail of column is a clamping plate type frame shape rail plate, the moving guide rail of column be clipped in the grouan column before, on the rear panel, one group of nylon edge head respectively is installed at the moving guide rail two ends of the column of grouan column front panel, nylon edge head contacts with grouan column surface, on the moving guide rail of the column of grouan column rear panel one group of capacity eccentric bearing is installed; The hole size of offering on grouan column upper end vertical direction offers counterbore and described counterbore and top board is consistent, configuration column direct current generator in the described counterbore, the column direct current generator connects with drive bevel gear in the bevel gear pair, being meshed in the bevel gear pair by dynamic bevel gear and drive bevel gear, by the worm mesh in dynamic bevel gear and the worm couple, worm couple is made of worm gear and worm screw, and worm gear connects upper belt-wheel, the worm and wheel engagement is at the other adjustment handle that is provided with of worm screw.
The described measuring instrument that is used to measure small-sized machine piece surface profile and roughness, sensor device is made of horizontal cross bar and sensor chaining pin, and the sensor chaining pin is fixed on an end of horizontal cross bar, and horizontal cross bar connects with read head in the transverse arm case apparatus.
Owing to adopted aforesaid technical scheme, the utility model produces following good effect:
1, utilizes the surveying instrument of this new structure, can realize the high precision of small-sized machine piece surface profile and roughness and the measurement of fast and stable.
2, the grating in the transverse arm case apparatus adopts contactless open grating, and the belt wheel auxiliary structure is adopted in transmission in the transverse arm case apparatus, thereby is not interfered when having guaranteed the horizontal move left and right of moving guide rail.
3, adopt the form of the combination transmission of bevel gear pair, worm couple and belt wheel set in the stand column device, guaranteed that not only sensor device is not subjected to interference in the process of moving up and down, can also realize the auto-lock function of transverse arm case apparatus.
4, the adjustment handle in the stand column device is provided with, and can realize the manual adjustment function of transverse arm case apparatus upper and lower position.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is the structural drawing of transverse arm case apparatus.
Fig. 3 is the structural drawing of stand column device.
Fig. 4 is the left pseudosection of Fig. 3.
Among the above-mentioned figure: the 1-pedestal; The 2-three-dimensional working platform; The 3-sensor device; 4-transverse arm case apparatus; The 5-stand column device; The 6-secondary pulley; The 7-support plate; The 8-limit switch; 9-decides guide rail; 10-moves guide rail; The open grating of 11-; 12-is with synchronously; 13-transverse arm case direct current generator; The 14-driving pulley; 15-transverse arm casing; The 16-base plate; 17-grouan column; 18-belt wheel set; The 19-column moves guide rail; The 20-capacity eccentric bearing; 21-nylon edge head; 22-column direct current generator; The 23-top board; The 24-worm couple; The 25-bevel gear pair; 26-adjusts handle.
Embodiment
In conjunction with Fig. 1, the measuring instrument that is used to measure small-sized machine piece surface profile and roughness of the present utility model mainly is made of pedestal 1, three-dimensional working platform 2, sensor device 3, transverse arm case apparatus 4 and stand column device 5.Three-dimensional working platform 2 is arranged on the top of pedestal 1 and by feather key three-dimensional working platform is positioned in the gathering sill of pedestal, top at pedestal 1 also is fixed with stand column device 5, base plate in the stand column device 5 is by being bolted on the pedestal 1, on stand column device 5, dispose the transverse arm case apparatus 4 that moves up and down along the stand column device vertical direction, transverse arm casing in the transverse arm case apparatus is by being bolted on the moving guide rail of column in the stand column device, and the downside of transverse arm case apparatus 4 is connected with sensor device 3.Sensor device 3 is made of horizontal cross bar and sensor chaining pin, and the sensor chaining pin is fixed on an end of horizontal cross bar, and horizontal cross bar connects with read head in the transverse arm case apparatus.
In conjunction with Fig. 2, the transverse arm case apparatus by secondary pulley 6, support plate 7, limit switch 8, decide guide rail 9, moving guide rail 10, open grating 11, be with 12 synchronously, transverse arm case direct current generator 13, driving pulley 14 and transverse arm casing 15 constitute.Transverse arm casing 15 is the panel beating housing, and the front end of transverse arm casing 15 offers oval-shaped protrusion platform window, and this protrusion platform window can show the grating chi of open grating.The support plate 7 that abnormity is arranged at transverse arm casing internal fixation, the left end fixed joint belt wheel 6 of support plate, the right-hand member of support plate is transverse arm case direct current generator 13 fixedly, on transverse arm case direct current generator 13, connect driving pulley 14, transverse arm case direct current generator 13 adopts DC Transmission, it is little and can be conveniently realize speed change by transformation to have noise, driving pulley 14 is by being with 12 to connect with secondary pulley 6 synchronously, one side of moving guide rail 10 is connected and fixed with synchronous band, moving guide rail is a kind of rail plate, moving guide rail 10 is by deciding guide rail 9 horizontal supports, the groove of moving guide rail 10 is clipped in to be decided on the guide rail 9 and decides guide rail 9 and be fixed on the support plate 7, moving guide rail 10 moves deciding guide rail 9 left and right horizontal with 12 drive lower edge synchronously, two limit switches 8 are set in the left and right sides of support plate 7, two limit switches 8 of distance limit moving guide rail 10 by adjusting between left and right along deciding distance that guide rail 9 left and right horizontal move, can guarantee the high precision and the stability of measuring instrument by deciding sliding rail structure that guide rail 9 and moving guide rail 10 form.Open grating 11 is made of grating chi and read head, the grating chi is reflective steel band grating, this reflective steel band grating can not influence measuring accuracy, measuring accuracy and stability have been improved, the grating chi sticks on to be decided guide rail 9 front ends and can show that by the protrusion platform window of transverse arm casing 15 read head is connected in the front end of moving guide rail 10.
In conjunction with Fig. 3-4, stand column device is by base plate 16, grouan column 17, belt wheel set 18, column moves guide rail 19, capacity eccentric bearing 20, nylon edge 21, column direct current generator 22, top board 23, worm couple 24, bevel gear pair 25 and adjustment handle 26 constitute, the upper end configuration top board 23 of grouan column 17, the lower end configuration base plate 16 of grouan column 17, by base plate 16 stand column device 5 is fixed on the pedestal 1, the front panel of grouan column 17 is provided with groove, dispose belt wheel set 18 in the described groove, belt wheel set 18 is by upper belt-wheel, band and following belt wheel are formed synchronously, upper belt-wheel is fixed on the top board 23, following belt wheel is fixed on the lower end of grouan column 17 grooves, upper belt-wheel connects with following belt wheel by being with synchronously, be with synchronously and be connected with the moving guide rail 19 of column, the moving guide rail 19 of column is a clamping plate type frame shape rail plate, the moving guide rail 19 of column be clipped in the grouan column before, on the rear panel, one group of nylon edge 21 respectively is installed at the moving guide rail two ends of the column of grouan column front panel, nylon edge 21 contact with grouan column 17 surfaces, moves one group of capacity eccentric bearing 20 of installation on the guide rail at the column of grouan column rear panel; The hole size of offering on grouan column upper end vertical direction offers counterbore and described counterbore and top board 23 is consistent, configuration column direct current generator 22 in the described counterbore, column direct current generator 22 connects with drive bevel gear in the bevel gear pair 25, being meshed in the bevel gear pair by dynamic bevel gear and drive bevel gear, by the worm mesh in dynamic bevel gear and the worm couple 24, worm couple is made of worm gear and worm screw, worm gear connects upper belt-wheel, the worm and wheel engagement is adjusted handle 26 other being provided with of worm screw.It is level by vertical transition that bevel gear pair 25 in the above-mentioned drive disk assembly makes transmission direction, and worm couple 24 has realized that not only big retarding than transmission, also has auto-lock function, can guarantee the stability of sensor transverse arm case 4 in measuring process.Drive disk assembly connects by belt wheel set 18 with the moving guide rail of column, wherein the moving guide rail 19 of synchronous band in the belt wheel set 18 and column is fixed, drive the moving guide rail 19 of column when band rotates synchronously and move up and down, this structure can be so that drive disk assembly not be interfered the mobile accuracy of guideway.Adjust the upper-lower position that handle 26 is used for manual adjustment sensor transverse arm case 4.
During measurement, workpiece is placed on the three-dimensional working platform 2, by the probe location of process of measurement control sensor device 3.Column direct current generator 22 drives belt wheel set 18 and rotates by bevel gear pair 25, worm couple 24, and then drive the moving guide rail 19 of column along grouan column 17 vertical moving, moving guide rail 19 of column and transverse arm casing 15 relative fixed, thereby the vertical moving and the location of having realized sensor device; Transverse arm case direct current generator 13 moves horizontally along deciding guide rail 9 with being with 12 relatively-stationary moving guide rails 10 synchronously down by the drive of secondary pulley 6 and driving pulley 14, and then drive moves horizontally with the sensor device 3 that moving guide rail 10 connects, thereby realize adjusting the function of sensor device 3 horizontal levels, the amount of moving horizontally is measured by the open grating 11 of noncontact.The gauge head of sensor in the sensor device is moved to the tested profile initial position of workpiece, just can measure tested profile.
After measurement finished, the sampled signal of sensor device can obtain the measurement data of profile and roughness by the data composition two-dimensional measurement data of pre-process and AD conversion back and 11 samplings of open grating after data processing and evaluation
Measuring instrument is positioned the measurement of bearing industry or small-sized machine parts, transverse arm case apparatus horizontal survey range is 0-100mm, transverse arm case apparatus vertical survey range divides third gear, be respectively ± 30 μ m, ± 300 μ m, ± 3000 μ m, resolution is respectively 1nm, 10nm, 100nm, can carry out the measurement of profile and roughness.
Claims (4)
1. measuring instrument that is used to measure small-sized machine piece surface profile and roughness, it is characterized in that: this measuring instrument is mainly by pedestal (1), three-dimensional working platform (2), sensor device (3), transverse arm case apparatus (4) and stand column device (5) constitute, three-dimensional working platform (2) is arranged on the top of pedestal (1) and by feather key three-dimensional working platform is positioned in the gathering sill of pedestal, also be fixed with stand column device (5) on the top of pedestal (1), base plate in the stand column device (5) is by being bolted on the pedestal (1), on stand column device (5), dispose the transverse arm case apparatus (4) that moves up and down along the stand column device vertical direction, transverse arm casing in the transverse arm case apparatus is by being bolted on the moving guide rail of column in the stand column device, and the downside of transverse arm case apparatus (4) is connected with sensor device (3).
2. the measuring instrument that is used to measure small-sized machine piece surface profile and roughness as claimed in claim 1, it is characterized in that: transverse arm case apparatus (4) is by secondary pulley (6), support plate (7), limit switch (8), decide guide rail (9), moving guide rail (10), open grating (11), be with synchronously (12), transverse arm case direct current generator (13), driving pulley (14) and transverse arm casing (15) constitute, the front end of transverse arm casing (15) offers oval-shaped protrusion platform window, at transverse arm casing (15) internal fixation support plate (7), the left end fixed joint belt wheel (6) of support plate (7), the right-hand member of support plate (7) is transverse arm case direct current generator (13) fixedly, go up connection driving pulley (14) at transverse arm case direct current generator (13), driving pulley (14) connects with secondary pulley (6) by being with (12) synchronously, one side of moving guide rail (10) is connected and fixed with being with (12) synchronously, moving guide rail (10) is by deciding guide rail (9) horizontal support, decide guide rail (9) and be fixed on the support plate (7), two limit switches (8) are set in the left and right sides of support plate (7); Open grating (11) is made of grating chi and read head, and the grating chi is reflective steel band grating, and the grating chi sticks on to be decided guide rail (9) front end and can show that read head is connected in the front end of moving guide rail (10) by the protrusion platform window of transverse arm casing (15).
3. the measuring instrument that is used to measure small-sized machine piece surface profile and roughness as claimed in claim 1, it is characterized in that: stand column device (5) is by base plate (16), grouan column (17), belt wheel set (18), column moves guide rail (19), capacity eccentric bearing (20), nylon edge head (21), column direct current generator (22), top board (23), worm couple (24), bevel gear pair (25) and adjustment handle (26) constitute, the upper end configuration top board (23) of grouan column (17), the lower end configuration base plate (16) of grouan column (17), by base plate (16) stand column device (5) is fixed on the pedestal (1), the front panel of grouan column (17) is provided with groove, dispose belt wheel set (18) in the described groove, belt wheel set (18) is by upper belt-wheel, band and following belt wheel are formed synchronously, upper belt-wheel is fixed on the top board (23), following belt wheel is fixed on the lower end of grouan column (17) groove, upper belt-wheel connects with following belt wheel by being with synchronously, be with synchronously and be connected with the moving guide rail (19) of column, it is clamping plate type frame shape rail plate that column moves guide rail (19), column move guide rail (19) be clipped in grouan column (17) before, on the rear panel, at the moving guide rail two ends of the column of grouan column (17) front panel one group of nylon edge head (21) is installed respectively, nylon edge head (21) contacts with grouan column (17) surface, on the moving guide rail of the column of grouan column (17) rear panel one group of capacity eccentric bearing (20) is installed; The hole size of offering on grouan column (17) upper end vertical direction offers counterbore and described counterbore and top board (23) is consistent, configuration column direct current generator (22) in the described counterbore, column direct current generator (22) connects with drive bevel gear in the bevel gear pair (25), being meshed in the bevel gear pair (25) by dynamic bevel gear and drive bevel gear, by the worm mesh in dynamic bevel gear and the worm couple (24), worm couple (24) is made of worm gear and worm screw, worm gear connects upper belt-wheel, the worm and wheel engagement is adjusted handle (25) other being provided with of worm screw.
4. the measuring instrument that is used to measure small-sized machine piece surface profile and roughness as claimed in claim 1, it is characterized in that: sensor device (3) is made of horizontal cross bar and sensor chaining pin, the sensor chaining pin is fixed on an end of horizontal cross bar, and horizontal cross bar connects with read head in the transverse arm case apparatus.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201204605U CN201697614U (en) | 2010-03-01 | 2010-03-01 | Measuring instrument for measuring surface profile and roughness of small machine parts |
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| CN2010201204605U CN201697614U (en) | 2010-03-01 | 2010-03-01 | Measuring instrument for measuring surface profile and roughness of small machine parts |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102226812A (en) * | 2011-04-11 | 2011-10-26 | 天津市兰标电子科技发展有限公司 | Mechanical drive device of vitamin detector |
| CN102901477A (en) * | 2012-06-28 | 2013-01-30 | 深圳深蓝精机有限公司 | Shaft outer diameter and length detector |
| CN103322952A (en) * | 2013-05-20 | 2013-09-25 | 株洲易力达机电有限公司 | Digital detection machine for face runout of sliding block |
| CN104040288A (en) * | 2012-01-04 | 2014-09-10 | 株式会社东京精密 | Outline profile surface roughness measurement device and outline profile surface roughness measurement method |
| CN105371776A (en) * | 2015-12-09 | 2016-03-02 | 上海电机学院 | Device for detecting damage degree of electric welding electrode head |
| CN104154885B (en) * | 2014-07-24 | 2016-08-24 | 大连理工大学 | A kind of small circle ring part micro-warpage detection method |
| CN106952388A (en) * | 2017-02-16 | 2017-07-14 | 上海古鳌电子科技股份有限公司 | A kind of paper money discrimination frame and the paper currency detection magnetic devices with paper money discrimination frame |
| CN110455247A (en) * | 2019-09-18 | 2019-11-15 | 北京工业大学 | A Gear Fixture Suitable for Roughness Profiler |
| CN110542375A (en) * | 2018-08-02 | 2019-12-06 | 蓝思智能机器人(长沙)有限公司 | A positioning module |
| CN110940291A (en) * | 2019-12-30 | 2020-03-31 | 中船重工（西安）东仪精密测量科技有限公司 | Roughness profile measuring equipment |
| CN111721228A (en) * | 2019-03-18 | 2020-09-29 | 江苏理工学院 | Apparatus and method for measuring line profile of automotive composite molded parts |
| CN113310440A (en) * | 2021-05-08 | 2021-08-27 | 中国工程物理研究院材料研究所 | Curved surface roughness measuring equipment based on white light confocal sensor |
| CN114705152A (en) * | 2022-04-27 | 2022-07-05 | 潍坊裕元电子有限公司 | Measurement tool for measuring Dimple roughness of FCBGA radiating fin for semiconductor packaging |
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| CN117470165A (en) * | 2023-09-26 | 2024-01-30 | 中国航发南方工业有限公司 | A method for measuring the radius and cylindrical runout of rotor components |
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2010
- 2010-03-01 CN CN2010201204605U patent/CN201697614U/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102226812A (en) * | 2011-04-11 | 2011-10-26 | 天津市兰标电子科技发展有限公司 | Mechanical drive device of vitamin detector |
| CN104040288A (en) * | 2012-01-04 | 2014-09-10 | 株式会社东京精密 | Outline profile surface roughness measurement device and outline profile surface roughness measurement method |
| CN104040288B (en) * | 2012-01-04 | 2016-12-14 | 株式会社东京精密 | Contour shape surface roughness measurement device and contour shape surface roughness measurement method |
| CN102901477A (en) * | 2012-06-28 | 2013-01-30 | 深圳深蓝精机有限公司 | Shaft outer diameter and length detector |
| CN102901477B (en) * | 2012-06-28 | 2016-01-06 | 深圳深蓝精机有限公司 | Axle external diameter, length detection machine |
| CN103322952A (en) * | 2013-05-20 | 2013-09-25 | 株洲易力达机电有限公司 | Digital detection machine for face runout of sliding block |
| CN103322952B (en) * | 2013-05-20 | 2016-10-05 | 株洲易力达机电有限公司 | Slide block end face run-out digital measuring machine |
| CN104154885B (en) * | 2014-07-24 | 2016-08-24 | 大连理工大学 | A kind of small circle ring part micro-warpage detection method |
| CN105371776A (en) * | 2015-12-09 | 2016-03-02 | 上海电机学院 | Device for detecting damage degree of electric welding electrode head |
| CN106952388A (en) * | 2017-02-16 | 2017-07-14 | 上海古鳌电子科技股份有限公司 | A kind of paper money discrimination frame and the paper currency detection magnetic devices with paper money discrimination frame |
| CN110542375A (en) * | 2018-08-02 | 2019-12-06 | 蓝思智能机器人(长沙)有限公司 | A positioning module |
| CN111721228A (en) * | 2019-03-18 | 2020-09-29 | 江苏理工学院 | Apparatus and method for measuring line profile of automotive composite molded parts |
| CN110455247A (en) * | 2019-09-18 | 2019-11-15 | 北京工业大学 | A Gear Fixture Suitable for Roughness Profiler |
| CN110455247B (en) * | 2019-09-18 | 2021-08-06 | 北京工业大学 | A Gear Fixture for Roughness Profiler |
| CN110940291A (en) * | 2019-12-30 | 2020-03-31 | 中船重工（西安）东仪精密测量科技有限公司 | Roughness profile measuring equipment |
| CN113310440A (en) * | 2021-05-08 | 2021-08-27 | 中国工程物理研究院材料研究所 | Curved surface roughness measuring equipment based on white light confocal sensor |
| CN113310440B (en) * | 2021-05-08 | 2022-11-04 | 中国工程物理研究院材料研究所 | Curved surface roughness measuring equipment based on white light confocal sensor |
| CN114705152A (en) * | 2022-04-27 | 2022-07-05 | 潍坊裕元电子有限公司 | Measurement tool for measuring Dimple roughness of FCBGA radiating fin for semiconductor packaging |
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