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CN201556006U - Narrow-band pass adjustable guide-die resonance optical filter - Google Patents

Narrow-band pass adjustable guide-die resonance optical filter Download PDF

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Publication number
CN201556006U
CN201556006U CN2009201892621U CN200920189262U CN201556006U CN 201556006 U CN201556006 U CN 201556006U CN 2009201892621 U CN2009201892621 U CN 2009201892621U CN 200920189262 U CN200920189262 U CN 200920189262U CN 201556006 U CN201556006 U CN 201556006U
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China
Prior art keywords
optical filter
pdlc
liquid crystal
orientation
resonance optical
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Expired - Fee Related
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CN2009201892621U
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Chinese (zh)
Inventor
钟阳万
王�琦
吴军
方旺盛
徐中辉
肖庆生
邱鑫
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Jiangxi University of Science and Technology
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Jiangxi University of Science and Technology
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Abstract

The utility model discloses a method for manufacturing an adjustable guide-die resonance optical filter based on an oriented polymer dispersed liquid crystal material. The method applies oriented polymer dispersed liquid crystal (PDLC) with an electric control refractive characteristic to the guide-die resonance optical filter to realize adjustable optical filter, and changes the refractive index of the oriented PDLC material by adjusting applied voltage, thus achieving the purpose of adjusting the resonance wavelength of the optical fiber. Due to the action of oriented electric field in the process of photocuring phase separation, the liquid crystal director of the oriented PDLC material is parallel to ordered arrangement of the surface of a film layer of the optical filter, thus being capable of utilizing the anisotropy of the refractive index of the liquid crystal furthest, and increasing the regulation depth of the refractive index of the PDLC material; therefore, the adjustable guide-die resonance optical filter can realize larger adjusting range of resonance wavelength. The utility model has the characteristics of having simple structure, convenient implementation, high peak reflectivity, wide wavelength adjusting range, narrow-band light spectrum and fast adjusting wavelength, being beneficial to small-sized integration and the like, and can be widely applied to the fields of optical instrument, optical detection, optical measurement, biological medicine and the like.

Description

A kind of narrow bandpass adjustable guided-mold resonance optical filter
Technical field
The utility model is a kind of optical filter device, be specifically related to utilize automatically controlled a kind of adjustable narrow-band optical filter of selling off characteristic of oriented polymer dispersed liquid crystal material, application prospect arranged in fields such as optical instrument, optical detection, optical measurement and biomedicines.
Background technology
Tunable optical filter spare plays an important role in many optical systems, extensively be present in fields such as optical instrument, optical detection, optical information processing, optical measurement and biomedicine, generally include acousto-optic adjusting, electric light adjusting, three kinds of adjustable optical filtering principles of mechanical adjustment.It is to utilize the unusual Bragg diffraction effect of aeolotropic crystal under acoustic optic interaction to make adjustable system that acousto-optic is regulated, though have compact conformation, the characteristics that response speed is fast, deficiency such as cost an arm and a leg, assembly precision requirement height, clear aperture are little.Utilize the electrooptical effect of crystal to carry out the filtering device course of work that electric light regulates and require to apply high voltage, limited its range of application.The mechanical adjustment mode is physical parameter such as the thickness by device in the change system, angle etc., reach the purpose of regulating the filter system spectral characteristic, major defect is that response speed is slow, complex structure, power consumption, as Chinese invention patent " channel passband filter that relative position can independently be adjusted " (number of patent application: 200410067052.7), different with traditional narrow band pass filter and bandpass filter, this patent has adopted the symmetrical structure based on the Fabry-Perot etalon, realize adjusting by changing the optical filter thickness of several middle layers to optical filter, and the adjusting of passage is independently, regulate the position that a passage can not change another passage, has suitable advantage, but the process to optical filter several middle layers thickness adjusted in this patent is very complicated, and response speed is slow, power consumption.
Summary of the invention
Goal of the invention: the adjustable optical filter response speed is slow in order to overcome, complex structure, be unfavorable for shortcoming such as small-sized integrated, power consumption, it is a kind of simple in structure that the utility model provides, have high peak reflectivity and narrow-band spectrum, change the narrow bandpass adjustable optical filter that oriented polymer dispersed liquid crystal material layer refractive index regulated wavelength by regulating impressed voltage.Adjustable guided-mold resonance optical filter described in the utility model is based on oriented polymer dispersed liquid crystal material and guide mode resonance structure and a kind of brand-new adjustable guided-mold resonance optical filter that designs, have simple in structure, implement convenient, peak reflectivity is high, wavelength regulation wide ranges, narrow-band spectrum, adjusting wavelength fast, be beneficial to small-sized characteristics such as integrated.
Technical scheme: a kind of narrow bandpass adjustable guided-mold resonance optical filter, it comprises basalis, be positioned at the transparent conductive semiconductor film tin indium oxide ito thin film on the basalis, grating layer and orientation PDLC layer, base layer material is selected glass for use, the incident medium is an air, ito thin film adopts electron beam evaporation, the grating floor height, low-index material is respectively photoresist and orientation PDLC material, it is characterized in that: will have automatically controlled oriented polymer dispersed liquid crystal (the Polymer Dispersed Liquid Crystal:PDLC) material of selling off characteristic and be applied to and realize adjustable optical filter in the guide mode resonance optical filter, be orientated the refractive index of PDLC material by adding in the control voltage-regulation optical filter, thereby realize regulation and control the adjustable guided-mold resonance optical filter resonant wavelength.By computer optimization, rationally choose the thickness of each tunic, and on two transparency electrode ITO layers, connect control voltage, but adjusting control voltage can be realized the adjusting to the guide mode resonance optical filter resonant wavelength.To be the pre-polymerization potpourri be separated by illumination generation photopolymerization under the orientation electric field action to orientation PDLC solidifies the material that the back forms in the utility model, because when preparation pdlc film layer, have the orientation electric field to exist, so liquid crystal director also is that the parallel membrane laminar surface is arranged in order when no driving voltage is controlled, so just farthest utilized the refractive index anisotropy of liquid crystal, increased the refractive index regulation and control degree of depth of PDLC material, made adjustable guided-mold resonance optical filter that bigger resonant wavelength range of adjustment be arranged.
Described a kind of adjustable guided-mold resonance optical filter based on oriented polymer dispersed liquid crystal material, it is characterized in that: to be PDLC pre-polymerization potpourri be separated by illumination generation photopolymerization to solidify the material that the back forms being parallel to described orientation PDLC, liquid crystal director is parallel to the arrangement in order of grating layer surface among the PDLC because the existence of orientation electric field, curing back are orientated under not having the situation of electric field.
Described adjustable guided-mold resonance optical filter has farthest utilized the refractive index anisotropy of liquid crystal, has increased the refractive index regulation and control degree of depth of PDLC material, thereby has increased the range of adjustment of adjustable guided-mold resonance optical filter resonant wavelength.
The low-index regions of grating layer is an oriented polymer dispersed liquid crystal material in the described adjustable guided-mold resonance optical filter structure.
Described orientation PDLC layer forms nesa coating indium tin oxide layer (ITO) up and down, can apply voltage and make oriented polymer dispersed liquid crystal material produce the automatically controlled effect of selling off.
The ITO layer is not only as applying the electrode layer of voltage to orientation PDLC in the described adjustable guided-mold resonance optical filter structure, but also as the ducting layer of guide mode resonance optical filter.
The refractive index of oriented polymer dispersed liquid crystal material is used to regulate wavelength in the described adjustable guided-mold resonance optical filter structure.
The refractive index of described oriented polymer dispersed liquid crystal material is to be regulated by impressed voltage.
Compared with prior art, advantage of the present utility model and good effect are: that utilizes oriented polymer dispersed liquid crystal material automatically controlledly sells off a kind of adjustable narrow-band pass filter that characteristic and guide mode resonance optical filter combine and make, it is simple in structure, have high peak reflectivity, wide resonance wavelength regulation scope, narrow-band spectrum, adjusting resonant wavelength fast and be beneficial to small-sized advantage such as integrated, application prospect is arranged in fields such as optical instrument, optical detection, optical measurement and biomedicines.
Description of drawings
Fig. 1 is based on the adjustable guided-mold resonance optical filter structural representation of oriented polymer dispersed liquid crystal material, be followed successively by from top to bottom among the figure: the 1st, glass-based bottom, the 2nd, tin indium oxide (ITO) rete the 2, the 3rd, the photoresist of grating high index of refraction, the 4th, the orientation PDLC of the low refraction of grating, the 5th, orientation pdlc film layer, the 6th, tin indium oxide (ITO) rete, the 7th, incident medium;
Fig. 2 is 0 ° of incident angle in the air of utility model, the incident of TE polarization, the reflective spectral property curve of the adjustable guided-mold resonance optical filter during the corresponding different orientation PDLC of different control voltages refractive index shows refractive index respectively and is 1.5026,1.5530 and the reflective spectral property curve of 1.6034 o'clock optical filters among the figure.
Embodiment
Below in conjunction with drawings and Examples the utility model is described in detail, following examples are to explanation of the present utility model, be reasonable application form of the present utility model, and the utility model are not limited to following examples.
A kind of adjustable guided-mold resonance optical filter based on oriented polymer dispersed liquid crystal material, its structural representation as shown in Figure 1.Selected material is orientation PDLC, ITO, SiO 2, it comprises quartz substrate layer 1, ITO conductive electrode layer 2, grating layer, orientation PDLC layer 5, ITO conductive electrode layer 6 and incident medium layer 7, incident medium layer is an air; Concrete parameter is: grating cycle 460nm, dutycycle 0.5, grating depth 270nm, the high low-index material of grating is respectively photoresist and orientation PDLC, corresponding refractive index is respectively nH and nL, the nH value is 1.7, the nL value is between 1.5026 to 1.6034, change with impressed voltage changes (orientation PDLC refractive index changes with voltage is different), and ITO is not only as electrode layer but also as ducting layer, and refractive index n 1 is 2.0, orientation PDLC layer thickness d3 is 325nm, refractive index n 3 changes (orientation PDLC refractive index changes with voltage is different) with the change of impressed voltage between 1.5026 to 1.6034, concrete steps are as follows:
1. on quartz substrate layer 1, plate one deck thickness d 1 with the electronics evaporation method and be the nesa coating ITO layer 2 of 160nm;
2. on ITO layer 2, plate photoresist and the oven dry of one deck thickness d 2 with spin-coating method for 270nm;
3. on photoresist, the photoresist that is used for filling the zone of orientation PDLC material in the grating layer is removed, so that in this zone, fill PDLC pre-polymerization material grating layer with photoetching technique;
4. adopt spin-coating method to apply PDLC pre-polymerization material on grating layer, this coating procedure is not only populated with the PDLC pre-polymerization material of the low index ellipsoid of grating layer, and also forms one deck PDLC pre-polymerization material on the grating layer surface;
5. coated pre-polymerization material (comprising the PDLC pre-polymerization material of grating layer and the pre-polymerization material of orientation PDLC layer 5) is placed direction to be parallel in the middle of the electric field on grating layer surface, use the light-wave irradiation of Ar+ laser instrument 514nm simultaneously, pre-polymerization material generation photopolymerization is separated forms orientation PDLC material, orientation PDLC layer 5 and grating layer have just been manufactured like this, and orientation PDLC layer 5 thickness d 3 are 325nm;
6. plate one deck ITO layer 6 on orientation PDLC layer 5, thickness d 1 is 160nm.
Obtain adjustable guided-mold resonance optical filter as shown in Figure 1 like this.
By transparency electrode ITO layer the orientation PDLC in the adjustable guided-mold resonance optical filter structure is applied drive control voltage, can change the refractive index of orientation PDLC material, thereby change the resonant wavelength of optical filter, realize the adjustability of guide mode resonance optical filter resonant wavelength.Fig. 2 be light wave with 0 ° of incident angle, the incident of TE polarization, the reflective spectral property curve of adjustable optical filter during the corresponding different orientation PDLC of different voltages refractive index.The utility model has successfully been realized a kind of adjustable guided-mold resonance optical filter based on the oriented polymer dispersed liquid crystal material characteristic.
Adjustable guided-mold resonance optical filter based on oriented polymer dispersed liquid crystal material, it comprises basalis, be positioned at the transparent conductive semiconductor film tin indium oxide ITO layer on the basalis, grating layer and the stacked formation that adds of orientation PDLC, optical filter is by transparent conductive semiconductor film ITO layer, and grating layer and orientation PDLC layer multi-layer film are formed.Base material can be selected glass for use, and the incident medium is an air, and ito thin film adopts electron beam evaporation.The high low-index material of grating layer is respectively photoresist and orientation PDLC material.By computer optimization, rationally choose the thickness of each tunic, and on two transparency electrode ITO layers, connect control voltage, but adjusting control voltage can be realized the adjusting to the guide mode resonance optical filter resonant wavelength.To be the pre-polymerization potpourri be separated by illumination generation photopolymerization under the orientation electric field action to orientation PDLC solidifies the material that the back forms in the utility model, because when preparation pdlc film layer, have the orientation electric field to exist, so liquid crystal director also is that the parallel membrane laminar surface is arranged in order when no driving voltage is controlled, so just farthest utilized the refractive index anisotropy of liquid crystal, increased the refractive index regulation and control degree of depth of PDLC material, made the narrow bandpass adjustable optical filter that bigger resonant wavelength range of adjustment be arranged.
Described a kind of adjustable guided-mold resonance optical filter based on oriented polymer dispersed liquid crystal material, it is characterized in that: to be PDLC pre-polymerization potpourri be separated by illumination generation photopolymerization to solidify the material that the back forms being parallel to described orientation PDLC, liquid crystal director is parallel to the arrangement in order of grating layer surface among the PDLC because the existence of orientation electric field, curing back are orientated under not having the situation of electric field.
Described adjustable guided-mold resonance optical filter has farthest utilized the refractive index anisotropy of liquid crystal, has increased the refractive index regulation and control degree of depth of PDLC material, thereby has increased the range of adjustment of adjustable guided-mold resonance optical filter resonant wavelength.
The low-index regions of grating layer is an oriented polymer dispersed liquid crystal material in the described adjustable guided-mold resonance optical filter structure.
Described orientation PDLC layer forms nesa coating indium tin oxide layer (ITO) up and down, can apply voltage and make oriented polymer dispersed liquid crystal material produce the automatically controlled effect of selling off.
The ITO layer is not only as applying the electrode layer of voltage to orientation PDLC in the described adjustable guided-mold resonance optical filter structure, but also as the ducting layer of guide mode resonance optical filter.
The refractive index of oriented polymer dispersed liquid crystal material is used to regulate wavelength in the described adjustable guided-mold resonance optical filter structure.The refractive index of described oriented polymer dispersed liquid crystal material is to be regulated by impressed voltage.

Claims (3)

1. narrow bandpass adjustable guided-mold resonance optical filter, it comprises basalis, be positioned at the transparent conductive semiconductor film tin indium oxide ito thin film on the basalis, grating layer and orientation PDLC layer, base layer material is selected glass for use, the incident medium is an air, ito thin film adopts electron beam evaporation, the grating floor height, low-index material is respectively photoresist and orientation PDLC material, it is characterized in that: will have automatically controlled oriented polymer dispersed liquid crystal (the Polymer Dispersed Liquid Crystal:PDLC) material of selling off characteristic and be applied to and realize adjustable optical filter in the guide mode resonance optical filter, be orientated the refractive index of PDLC material by adding in the control voltage-regulation optical filter, thereby realize regulation and control the adjustable guided-mold resonance optical filter resonant wavelength.
2. a kind of narrow bandpass adjustable guided-mold resonance optical filter according to claim 1, it is characterized in that: to be PDLC pre-polymerization potpourri be separated by illumination generation photopolymerization to solidify the material that the back forms being parallel to described orientation PDLC, liquid crystal director is parallel to the arrangement in order of grating layer surface among the PDLC because the existence of orientation electric field, curing back are orientated under not having the situation of electric field.
3. a kind of narrow bandpass adjustable guided-mold resonance optical filter according to claim 1 is characterized in that: the low-index regions of grating layer is an oriented polymer dispersed liquid crystal material in the described adjustable guided-mold resonance optical filter structure.
CN2009201892621U 2009-09-22 2009-09-22 Narrow-band pass adjustable guide-die resonance optical filter Expired - Fee Related CN201556006U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102854557A (en) * 2012-10-15 2013-01-02 上海理工大学 Polarization independent narrow-band color filter and making method thereof
CN103424995A (en) * 2013-06-05 2013-12-04 上海理工大学 Optimization method for photoresist layer of guide mode resonance optical filter
CN106444177A (en) * 2016-10-28 2017-02-22 京东方科技集团股份有限公司 Display panel and display device
CN107390418A (en) * 2017-07-31 2017-11-24 京东方科技集团股份有限公司 A kind of filtering structure, display base plate, display panel and display device
CN113281929A (en) * 2021-03-04 2021-08-20 桂林电子科技大学 Electrotunable liquid crystal gap plasma structure color filter

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102854557A (en) * 2012-10-15 2013-01-02 上海理工大学 Polarization independent narrow-band color filter and making method thereof
CN103424995A (en) * 2013-06-05 2013-12-04 上海理工大学 Optimization method for photoresist layer of guide mode resonance optical filter
CN103424995B (en) * 2013-06-05 2015-02-11 上海理工大学 Optimization method for photoresist layer of guide mode resonance optical filter
CN106444177A (en) * 2016-10-28 2017-02-22 京东方科技集团股份有限公司 Display panel and display device
WO2018076859A1 (en) * 2016-10-28 2018-05-03 京东方科技集团股份有限公司 Display panel and display device
CN106444177B (en) * 2016-10-28 2019-03-15 京东方科技集团股份有限公司 Display panel and display device
US10502989B2 (en) 2016-10-28 2019-12-10 Boe Technology Group Co., Ltd. Display panel and display device
CN107390418A (en) * 2017-07-31 2017-11-24 京东方科技集团股份有限公司 A kind of filtering structure, display base plate, display panel and display device
US10976593B2 (en) 2017-07-31 2021-04-13 Boe Technology Group Co., Ltd. Filter structure, display substrate, display panel and display device
CN113281929A (en) * 2021-03-04 2021-08-20 桂林电子科技大学 Electrotunable liquid crystal gap plasma structure color filter
CN113281929B (en) * 2021-03-04 2022-07-12 桂林电子科技大学 Electrotunable liquid crystal gap plasma structure color filter

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Granted publication date: 20100818

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