CN201532193U - Device for detecting incidence angles of reflecting mirror - Google Patents
Device for detecting incidence angles of reflecting mirror Download PDFInfo
- Publication number
- CN201532193U CN201532193U CN2009202100884U CN200920210088U CN201532193U CN 201532193 U CN201532193 U CN 201532193U CN 2009202100884 U CN2009202100884 U CN 2009202100884U CN 200920210088 U CN200920210088 U CN 200920210088U CN 201532193 U CN201532193 U CN 201532193U
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- ray
- jiaos
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- 238000001514 detection method Methods 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims description 13
- 238000005259 measurement Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 6
- 230000005540 biological transmission Effects 0.000 abstract 2
- 238000005516 engineering process Methods 0.000 description 9
- 238000003384 imaging method Methods 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Abstract
The utility model provides a device for detecting incidence angles of a reflecting mirror. The device comprises a laser, a pantogonal beam splitter prism, a reflecting mirror and an angular instrument, wherein the pantogonal beam splitter prism is arranged between the laser and the reflecting mirror, and comprises an incidence surface and a reflecting surface, incidence light generated by the laser is injected into the incidence surface, the pantogonal beam splitter prism can divide the incidence light into transmission light and first reflecting light which is emitted after being reflected by the reflecting surface, the transmission light can be reflected by the reflecting mirror to generate the second reflecting light, and the angular instrument can measure an included angle between the first reflecting light and the second reflecting light. The device changes the problem of detecting the incidence angle of the light beam reflecting mirror into the problem of detecting the included angle of the light beam through introducing the pantogonal beam splitter prism, not only simplifies detection process, but also has higher detection precision.
Description
Technical field
The utility model relates to optical detective technology, is specifically related to a kind of device of detection of reflected mirror incident angle.
Background technology
The optics integration techno logy occupies very crucial status at optical field, and it is last procedure of realizing the optical instrument overall goal, and it combines the theory and the technology of design, check and processing.The performance quality of an optical instrument is decided by that to a great extent optics debugs technology, and optical detective technology then is equivalent to eyes and the ear that optics is debug technology, has only that accuracy of detection is enough high just might to reach the enough good level of debuging.
Debug in the technology, often determine to debug system by the method for detection of reflected mirror incident angle, catoptron is generally used for changing optical axis direction, obtains corresponding incident angle, for example optical axis direction is changed 90 degree, and requiring the incident angle of catoptron this moment is 45 degree.How guarantee high accuracy of detection in the incident angle of detection of reflected mirror, these problems all are that optics often runs into when debuging.For this way to solve the problem, conventional thinking is a size of directly judging incident angle by the incident light and the catoptrical relation of detection of reflected mirror.But the reflection angle that directly detects incident beam during practical operation is very difficult, and precision is also very low.
The utility model content
For solving the problems of the technologies described above, the utility model provides a kind of device of detection of reflected mirror incident angle, this device is by introducing five jiaos of Amici prisms, be converted to the problem that detects angle between the two bundle reflected light with detecting the problem of light beam at the mirror reflects angle, not only simplify testing process, and had very high accuracy of detection.
The device of a kind of detection of reflected mirror incident angle that the utility model provides comprises laser instrument, five jiaos of Amici prisms, catoptron and angle measuring instruments, and described five jiaos of Amici prisms place between described laser instrument and the described catoptron; Described five jiaos of Amici prisms have the plane of incidence and reflecting surface; The incident ray that described laser instrument produces is injected the described plane of incidence, and described five jiaos of Amici prisms can be divided into described incident ray first reflection ray of transmitted ray and ejaculation after described reflecting surface reflection; Described transmitted ray can be produced second reflection ray by described mirror reflects; Described angle measuring instrument can record the angle between described first reflection ray and described second reflection ray.
In said apparatus, the described transmitted ray of generation is vertical mutually with described first reflection ray.Described five jiaos of Amici prisms are insensitive with the rotation in the optical axis cross section, and the alignment error of described five jiaos of Amici prisms is 3 degree.The ranges of incidence angles of described catoptron is greater than 0 degree, less than 90 degree.The light intensity that described first reflection ray and described second reflection ray produce is within the measurement range of described angle measuring instrument.The size of described catoptron incident angle can be calculated by the angle between described first reflection ray and described second reflection ray.
Angle measuring instrument category described in the utility model is very wide, and for example Hartmann sensor, internal focusing telescope, autocollimator etc. can satisfy functional requirement of the present utility model.With respect to the existing method of directly measuring the catoptron incident angle, the utility model provides a kind of device of detection of reflected mirror incident angle, owing to introduce the strict five jiaos of vertical Amici prisms of two bundle emergent lights and survey the very high angle measuring instrument of school precision, therefore have measuring accuracy height, characteristics such as simple to operate.
Description of drawings
The device of a kind of detection of reflected mirror incident light that Fig. 1 the utility model proposes.
The synoptic diagram of the employed five jiaos of Amici prisms of Fig. 2 the utility model.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, the utility model is described in further detail below in conjunction with accompanying drawing.
As shown in Figure 1, a kind of device of detection of reflected mirror incident angle comprises that laser instrument 1, five jiaos of Amici prisms 2, catoptron 3 and 4, five jiaos of Amici prisms 2 of angle measuring instrument place between laser instrument 1 and the catoptron 3; Five jiaos of Amici prisms 2 have the plane of incidence 21 and reflecting surface 22, shown in five jiaos of Amici prisms of Fig. 2; The plane of incidence 21 that the incident ray 5 that laser instrument 1 produces is injected, and five jiaos of first reflection rays 7 that Amici prism 2 can be divided into incident ray 5 transmitted ray 6 and penetrate after reflecting surface 22 reflections; Transmitted ray 6 mirror 3 reflection that can be reflected produces second reflection ray 8; Angle measuring instrument 4 can record the angle between first reflection ray 7 and second reflection ray 8.
In said apparatus, the transmitted ray 6 of generation is vertical mutually with first reflection ray 7.Five jiaos of Amici prisms 1 are insensitive with the rotation in the optical axis cross section, and the alignment error of five jiaos of Amici prisms 1 is 3 degree.The ranges of incidence angles of catoptron 3 is greater than 0 degree, less than 90 degree.The light intensity that first reflection ray 7 and second reflection ray 8 produce is within the measurement range of angle measuring instrument 4.The size of catoptron 3 incident angles can be calculated by the angle between first reflection ray 7 and second reflection ray 8.
In the present embodiment, first reflected light 7 of five jiaos of Amici prisms 2 is 90 ° ± 2 with the angle of incident light 5 ", and the angle of transmitted light 6 and incident light 5 is 180 ° ± 2 ", therefore first reflected light 7 can be controlled in 90 ° ± 4 with the angle of transmitted light 6 ".And first reflected light 7 is insensitive with five jiaos of Amici prism 2 rotations in the optical axis cross section with the angle of transmitted light 6, therefore installs simple.
For the utility model being more readily understood and realizing,, the using method of detection of reflected mirror incident angle pick-up unit is described below in conjunction with accompanying drawing:
As shown in Figure 1, laser instrument 1 is the helium-neon laser through beam-expanding collimation, the accurate five jiaos of Amici prisms of the SP501 that five jiaos of Amici prisms 2 are certain company, its angular error of two bundle emergent lights in the optical axis cross section can reach 1 ", the angular error in the vertical optical axis cross section is 1 '; Detected catoptron 3 is a normal mirror; As angle measuring instrument 4 be JZC type auto-collimation collimator, its angle measurement accuracy is 1 ".It is as follows that it detects step:
1) utilizes level meter that the pedestal of laser instrument 1 and the pedestal of five jiaos of Amici prisms 2 are transferred to level earlier, light laser instrument 1 then;
2) light beam 5 that sends from laser instrument is injected from the plane of incidence 21 of five jiaos of Amici prisms, the reflected light 7 that is divided into transmitted light 6 and reflects to form through reflecting surface 22 by five jiaos of Amici prisms 2;
3) adjust catoptron 3, make transmitted light 6 mirror 3 that is reflected reflect to form folded light beam 8;
4) light beam 7 and light beam 8 all enter the auto-collimation collimator and the imaging respectively of angle measuring instrument 4, if two pictures overlap fully, illustrate that then two-beam 7 and 8 is parallel to each other, and that is to say that light beam 8 is vertical mutually with light beam 6, and the incident angle of promptly representing catoptron 3 is 45 degree; If light beam 7 and 8 do not overlap in angle measuring instrument 4 inner imagings, illustrate that then two-beam is not parallel, can calculate the angle of light beam 7 and 8 according to the focal length of the spacing of two imagings and angle measuring instrument 4, calculate the angle value of incident ray 6 and catoptron 3 then.
Under the situation that does not depart from spirit and scope of the present utility model, can also constitute many very embodiment of big difference that have.Should be appreciated that except as defined by the appended claims, the utility model is not limited at the specific embodiment described in the instructions.
Claims (5)
1. the device of a detection of reflected mirror incident angle comprises laser instrument, five jiaos of Amici prisms, catoptron and angle measuring instruments, it is characterized in that,
Described five jiaos of Amici prisms place between described laser instrument and the described catoptron;
Described five jiaos of Amici prisms have the plane of incidence and reflecting surface;
The incident ray that described laser instrument produces is injected the described plane of incidence, and described five jiaos of Amici prisms can be divided into described incident ray first reflection ray of transmitted ray and ejaculation after described reflecting surface reflection;
Described transmitted ray can be produced second reflection ray by described mirror reflects;
Described angle measuring instrument can record the angle between described first reflection ray and described second reflection ray.
2. pick-up unit according to claim 1 is characterized in that, the described transmitted ray of generation is vertical mutually with described first reflection ray.
3. pick-up unit according to claim 1 is characterized in that, described five jiaos of Amici prisms are insensitive with the rotation in the optical axis cross section, and the alignment error of described five jiaos of Amici prisms is 3 degree.
4. pick-up unit according to claim 1 is characterized in that, the ranges of incidence angles of described catoptron is greater than 0 degree, less than 90 degree.
5. pick-up unit according to claim 1 is characterized in that, the light intensity that described first reflection ray and described second reflection ray produce is within the measurement range of described angle measuring instrument.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202100884U CN201532193U (en) | 2009-09-25 | 2009-09-25 | Device for detecting incidence angles of reflecting mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009202100884U CN201532193U (en) | 2009-09-25 | 2009-09-25 | Device for detecting incidence angles of reflecting mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201532193U true CN201532193U (en) | 2010-07-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009202100884U Expired - Lifetime CN201532193U (en) | 2009-09-25 | 2009-09-25 | Device for detecting incidence angles of reflecting mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201532193U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107991506A (en) * | 2017-10-26 | 2018-05-04 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of device and test method for testing pendulum scarnning mirror speed and uniformity |
-
2009
- 2009-09-25 CN CN2009202100884U patent/CN201532193U/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107991506A (en) * | 2017-10-26 | 2018-05-04 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of device and test method for testing pendulum scarnning mirror speed and uniformity |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CX01 | Expiry of patent term |
Granted publication date: 20100721 |
|
| CX01 | Expiry of patent term |