CN201423220Y - Bag-type dust-removing device and system thereof - Google Patents
Bag-type dust-removing device and system thereof Download PDFInfo
- Publication number
- CN201423220Y CN201423220Y CN2008202233557U CN200820223355U CN201423220Y CN 201423220 Y CN201423220 Y CN 201423220Y CN 2008202233557 U CN2008202233557 U CN 2008202233557U CN 200820223355 U CN200820223355 U CN 200820223355U CN 201423220 Y CN201423220 Y CN 201423220Y
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- China
- Prior art keywords
- bag
- type dust
- pipeline
- gas
- steam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000000428 dust Substances 0.000 claims abstract description 24
- 239000007789 gas Substances 0.000 claims abstract description 24
- 239000000203 mixture Substances 0.000 claims abstract description 22
- 239000004744 fabric Substances 0.000 claims abstract description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 18
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 9
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 7
- 239000010959 steel Substances 0.000 claims abstract description 7
- 239000005046 Chlorosilane Substances 0.000 claims description 13
- 238000010926 purge Methods 0.000 claims description 10
- 238000005453 pelletization Methods 0.000 claims description 3
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 abstract description 4
- 239000005049 silicon tetrachloride Substances 0.000 abstract description 4
- 239000000843 powder Substances 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract description 3
- 229920001296 polysiloxane Polymers 0.000 abstract 3
- 238000007664 blowing Methods 0.000 abstract 1
- 230000001351 cycling effect Effects 0.000 abstract 1
- 238000007599 discharging Methods 0.000 abstract 1
- 239000002893 slag Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 24
- 239000000377 silicon dioxide Substances 0.000 description 12
- 235000013312 flour Nutrition 0.000 description 11
- 238000000034 method Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000011863 silicon-based powder Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
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- Filtering Of Dispersed Particles In Gases (AREA)
- Filtering Materials (AREA)
Abstract
The utility model discloses a bag-type dust-removing device and a system thereof. The bag-type dust-removing device comprises a chlorsilane gas-steam mixture outlet pipeline (1), a nitrogen blowing inlet pipeline (2), a pressure meter (3), a filter cloth (4), a chlorsilane gas-stem mixture inlet pipeline (5), a steam gas inlet (6), a silicone slag discharging pipeline (7), a steam gas outlet (8),a filter cylinder body (9), a pressure meter (10) and a steel plate (11). The bag-type dust-removing device can remove more than 90 percent silicone powder which is brought by the gas-steam mixture, so the silicone powder contained in the gas-steam mixture entering the wet dust removal can be greatly reduced, and a following cycling system for sprinkling silicon tetrachloride and a fine-still separation system can run normally.
Description
Technical field
The utility model relates to field polysilicon, in particular for bag-type dust collector in the polysilicon production process and system.
Background technology
By the synthetic chlorosilane gas vapour mixture of trichlorosilane synthetic furnace, after dry method dust, wet dedusting, deliver to rectifying column and carry out the rectifying separation.The cyclonic separation dry method dust mainly is to remove oarse-grained silica flour, after the former technology process cyclone dust removal operation, still contain a large amount of fine silica powders, to form solid-liquid mixture with silicon tetrachloride, silica flour deposits in system equipment, pipeline easily, thereby silts pipeline, equipment, pump up, and knockout tower still, king-post are caused serious silting up, can't normally move, cause the improper parking of system.
The utility model content
The purpose of this utility model is to take trickle silica flour out of for removing synthetic chlorosilane gas vapour mixture, a kind of bag-type dust collector is provided for this reason, and this device comprises chlorosilane gas vapour mixture outlet pipeline 1, purges nitrogen inlet pipeline 2, Pressure gauge 3, filter cloth 4, chlorosilane gas vapour mixture intake pipeline 5, steam inlet 6, white residue discharge line 7, steam gas outlet 8 and filter cylinder 9, Pressure gauge 10 and steel plate 11.
Chlorosilane gas vapour mixture outlet pipeline 1, purging nitrogen inlet pipeline 2 and Pressure gauge 10 are at the top of filter cylinder 9.Pressure gauge 10 is used to measure cylindrical shell 9 internal pressures.
There is one deck chuck cylindrical shell 9 outsides, and Pressure gauge 3 is used to measure the steam pressure in the chuck.Steel plate 11 is fixed on the inside of cylindrical shell 9, is used for fixing filter cloth 4.Filter cloth 4 is used to filter silica flour.
Chlorosilane gas vapour mixture enters cylindrical shell 9 inside by pipeline 5, after filter cloth 4 filters, enters next operation by hole 12 by pipeline 1.
Purge nitrogen and enter cylindrical shell 9 inside, take the white residue on the filter cloth 4 to white residue discharge line 7, make white residue enter one step of back treatment process by inlet pipeline 2.
Steam enters chuck by air inlet 6, is discharged by gas outlet 8, gives cylindrical shell 9 insulations by vapor recycle.
In order to obtain better filter effect, filter cloth can adopt multilayer, such as the 2-9 layer, and preferred 3 layers.
The silica flour more than 90 percent that bag-type dust collector in the utility model can be carried secretly gas vapour mixture is removed, reduced contained silica flour in the gas vapour mixture that enters wet dedusting significantly, the circulatory system and the rectifying piece-rate system of follow-up spray silicon tetrachloride can normally be moved, do not produce silica flour and stop up situations such as valve, pipeline.
The utility model also provides a dust pelletizing system, this system comprises the above-mentioned bag-type dust collector of two covers, two cover bag-type dust collectors are connected in parallel, switch by valve switches two covering devices, one opens one is equipped with, and when a covering device is in running order, another set of device is carried out purge operations, regularly the switch operating state is less with the silicon powder deposit of guaranteeing the cloth bag filtration.
Description of drawings
The utility model will illustrate by example and with reference to the mode of accompanying drawing, wherein:
Fig. 1 is the bag dust collector schematic diagram.
The specific embodiment
Disclosed all features in this specification, or the step in disclosed all methods or the process except mutually exclusive feature and/or step, all can make up by any way.
Disclosed arbitrary feature in this specification (comprising any accessory claim, summary and accompanying drawing) is unless special narration all can be replaced by other equivalences or the alternative features with similar purpose.That is, unless special narration, each feature is an example in a series of equivalences or the similar characteristics.
Fig. 1 is a bag-type dust collector of the present utility model, and this bag-type dust collector comprises chlorosilane gas vapour mixture outlet pipeline 1, purges nitrogen inlet pipeline 2, Pressure gauge 3, filter cloth 4, chlorosilane gas vapour mixture intake pipeline 5, steam inlet 6, white residue discharge line 7, steam gas outlet 8 and filter cylinder 9, Pressure gauge 10 and steel plate 11.
Chlorosilane gas vapour mixture outlet pipeline 1, purging nitrogen inlet pipeline 2 and Pressure gauge 10 are at the top of filter cylinder 9.Pressure gauge 10 is used to measure cylindrical shell 9 internal pressures.
There is one deck chuck cylindrical shell 9 outsides, and Pressure gauge 3 is used to measure the steam pressure in the chuck.Steel plate 11 is fixed on the inside of cylindrical shell 9, is used for fixing filter cloth 4.Filter cloth 4 is used to filter silica flour.
Chlorosilane gas vapour mixture enters cylindrical shell 9 inside by pipeline 5, after filter cloth 4 filters, enters next operation by hole 12 by pipeline 1.
Purge nitrogen and enter cylindrical shell 9 inside, take the white residue on the filter cloth 4 to white residue discharge line 7, make white residue enter one step of back treatment process by inlet pipeline 2.
Steam enters chuck by air inlet 6, is discharged by gas outlet 8, gives cylindrical shell 9 insulations by vapor recycle.
In order to obtain better filter effect, filter cloth can adopt multilayer, such as the 2-9 layer, and preferred 3 layers.
The silica flour more than 90 percent that bag-type dust collector in the utility model can be carried secretly gas vapour mixture is removed, reduced contained silica flour in the gas vapour mixture that enters wet dedusting significantly, the circulatory system and the rectifying piece-rate system of follow-up spray silicon tetrachloride can normally be moved, do not produce silica flour and stop up situations such as valve, pipeline.
Dust pelletizing system, this system comprises two cover bag-type dust collectors, two cover bag-type dust collectors are connected in parallel, switch by valve switches two covering devices, one opens one is equipped with, and when a covering device is in running order, another set of device is carried out purge operations, regularly the switch operating state is less with the silicon powder deposit of guaranteeing the cloth bag filtration.
The above only is preferred embodiment of the present utility model; not in order to restriction the utility model; all any modifications of within spirit of the present utility model and principle, being done, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.
Claims (4)
1, a kind of bag-type dust collector, this device comprise chlorosilane gas vapour mixture outlet pipeline (1), purge nitrogen inlet pipeline (2), Pressure gauge (3), filter cloth (4), chlorosilane gas vapour mixture intake pipeline (5), steam inlet (6), white residue discharge line (7), steam gas outlet (8) and filter cylinder (9), Pressure gauge (10) and steel plate (11);
Wherein chlorosilane gas vapour mixture outlet pipeline (1), purging nitrogen inlet pipeline (2) and Pressure gauge (10) are on the surface of filter cylinder (9); There is one deck chuck its middle cylinder body (9) outside;
Steel plate (11) is fixed on the inside of cylindrical shell (9), is used for fixing filter cloth (4).
2, bag-type dust collector as claimed in claim 1 is characterized in that: described filter cloth (4) adopts multilayer.
3, bag-type dust collector as claimed in claim 1 is characterized in that: described filter cloth (4) adopts 3 layers.
4, a dust pelletizing system, this system comprise two covers as the described bag-type dust collector of one of claim 1-3, and two overlap bag-type dust collectors is connected in parallel, and the switch by valve switches two covering devices.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008202233557U CN201423220Y (en) | 2008-12-12 | 2008-12-12 | Bag-type dust-removing device and system thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008202233557U CN201423220Y (en) | 2008-12-12 | 2008-12-12 | Bag-type dust-removing device and system thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201423220Y true CN201423220Y (en) | 2010-03-17 |
Family
ID=42022654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008202233557U Expired - Fee Related CN201423220Y (en) | 2008-12-12 | 2008-12-12 | Bag-type dust-removing device and system thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201423220Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102419294A (en) * | 2011-09-09 | 2012-04-18 | 柳州五菱宝马利汽车空调有限公司 | Impurity detection device for liquid storage drier |
| CN102815706A (en) * | 2012-08-10 | 2012-12-12 | 中国恩菲工程技术有限公司 | Trichlorosilane synthesis system |
| CN103570025A (en) * | 2013-11-06 | 2014-02-12 | 浙江富士特集团有限公司 | Silicon powder recycling device for producing silicon tetrachloride through direct method |
| CN103566669A (en) * | 2013-11-06 | 2014-02-12 | 浙江富士特集团有限公司 | Bag type dust collector for producing silicon tetrachloride by direct method |
| CN110947267A (en) * | 2018-09-27 | 2020-04-03 | 新特能源股份有限公司 | Gas-solid mixture dust removal system and dust removal method |
-
2008
- 2008-12-12 CN CN2008202233557U patent/CN201423220Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102419294A (en) * | 2011-09-09 | 2012-04-18 | 柳州五菱宝马利汽车空调有限公司 | Impurity detection device for liquid storage drier |
| CN102419294B (en) * | 2011-09-09 | 2013-04-24 | 柳州五菱宝马利汽车空调有限公司 | Impurity detection device for dehydrator |
| CN102815706A (en) * | 2012-08-10 | 2012-12-12 | 中国恩菲工程技术有限公司 | Trichlorosilane synthesis system |
| CN103570025A (en) * | 2013-11-06 | 2014-02-12 | 浙江富士特集团有限公司 | Silicon powder recycling device for producing silicon tetrachloride through direct method |
| CN103566669A (en) * | 2013-11-06 | 2014-02-12 | 浙江富士特集团有限公司 | Bag type dust collector for producing silicon tetrachloride by direct method |
| CN103570025B (en) * | 2013-11-06 | 2016-01-13 | 浙江富士特集团有限公司 | A kind of direct method produces the silica powder recovering device of silicon tetrachloride |
| CN110947267A (en) * | 2018-09-27 | 2020-04-03 | 新特能源股份有限公司 | Gas-solid mixture dust removal system and dust removal method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100317 Termination date: 20131212 |