CN201372204Y - Silicon-core clamping device for polysilicon reducing furnace - Google Patents
Silicon-core clamping device for polysilicon reducing furnace Download PDFInfo
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- CN201372204Y CN201372204Y CN200920002790U CN200920002790U CN201372204Y CN 201372204 Y CN201372204 Y CN 201372204Y CN 200920002790 U CN200920002790 U CN 200920002790U CN 200920002790 U CN200920002790 U CN 200920002790U CN 201372204 Y CN201372204 Y CN 201372204Y
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Abstract
The utility model relates to a silicon-core clamping device for a polysilicon reducing furnace, which comprises a threaded sleeve, a card core and a base. The card core presents in an olivary shape, and the middle part of the card core is of a cylindrical body, and the upper and the lower ends are respectively provided with a frustum, and the center of the card core is provided with a through hole, and the upper and the lower frustum are divided into a plurality of equant card sections; the threaded sleeve is of a hollow structure, and the lower end of a cavity body of the threaded sleeve is provided with a cylindrical hole with thread; the base is of a cylinder body, and the outer side wall on the upper part of the base is provided with thread, and the base is connected with the threaded sleeve through the threads, and the upper and the lower ends of the base are respectively provided with a groove. When in assembling, two ends of the card core are respectively sleeved into the threaded sleeve and the base, and the upper and the lower ends of the conical card sections are retracted to clamp and fix a silicon mandrel which is inserted into the card section, so that the falling of the silicon rods can be effectively avoided caused by the deflexion of the silicon core by restricting the translation and the rotation of the silicon core, thereby, the stable and high-efficient running of the device can be ensured.
Description
Technical field
The utility model relates to a kind of clamping device, refers in particular to a kind of polycrystalline silicon reducing furnace silicon core clamping device.
Background technology
The production technique of polysilicon is mainly the SiHCl3 reduction method, and its key equipment is a reduction furnace.Process gas is heated to about 1100 ℃ at the silicon wicking surface on the heating electrode in the production process, and SiHCl3 and H2 reaction generate polysilicon and be deposited on the silicon wicking surface.The clamping device of the silicon core on the present fixedly heating electrode only grips at the top, though can limit the silicon core on three orthogonal directionss translational degree of freedom and along the silicon mandrel to a rotational freedom, the rotational freedom of other both directions is not played restriction.Along with the growth of the polysilicon that reacts generation at the silicon wicking surface, the weight of silicon rod increases gradually, under the acting in conjunction of gas flowfield and silicon rod deadweight, is easy to cause silicon rod deflection in reduction furnace, cause the silicon core to fracture, cause industrial accident in the clamping device end.
The utility model content
The purpose of this utility model is to propose a kind of polycrystalline silicon reducing furnace silicon core clamping device, can be at the two ends up and down of clamping device fixing silicon core, limit the translation and the rotational freedom of silicon core with this, effectively prevent from the phenomenon that lodges to take place, guarantee the stable and high effective operation of equipment because of the deflection of silicon core causes silicon rod.
In order to realize the fastening effect of above-mentioned silicon core clamping device, the technical solution adopted in the utility model is: a kind of New Polycrystalline Si reduction stove silicon core clamping device, comprise swivel nut, the core of the card and base, described the core of the card integral body is olive shape, and the middle part is a right cylinder, and two ends respectively have a frustum up and down, there is a through hole at the core of the card center, and frustum respectively cuts into several card lobes of five equilibrium up and down; Described swivel nut is a hollow structure, and swivel nut cavity lower end is provided with threaded cylinder hole; Base is a right cylinder, its upper outside cornice has screw thread, adopt between base and the swivel nut and be threaded, base respectively is provided with groove in two ends up and down, the core of the card two ends are sheathed on respectively in swivel nut and the base, the upper end shape of swivel nut cavity matches with the shape of the core of the card upper end frustum, and the shape of base upper end groove matches with the core of the card lower end frustum shape.
The technical solution of the utility model can also further realize by following design:
The slot mutual dislocation of the frustum of two ends up and down of described the core of the card, the frustum up and down of described the core of the card respectively cuts into more than two and blocks lobe.
During assembling, the core of the card places in the middle of base and the swivel nut, and swivel nut is tightened on the base the core of the card is fixed, and tighten up simultaneously at the two ends up and down of the core of the card, and intermediary silicon core is fastening.The silicon plug is fixed by the two ends up and down of the core of the card, limits the translation and the rotational freedom of silicon core with this, can prevent effectively that the silicon core from deflecting, and guarantees the stable and high effective operation of equipment.
Description of drawings
Fig. 1 is the structural representation of polycrystalline silicon reducing furnace of the present utility model with silicon core clamping device;
Fig. 2 is the axle side sketch of taper card lobe of the present utility model.
Among the figure, 1-swivel nut, 2-the core of the card, 21-through hole, 22-card lobe, 3-base.
Embodiment
Below in conjunction with accompanying drawing concrete structure of the present utility model is further described.
As shown in Figure 1, polycrystalline silicon reducing furnace of the present utility model mainly comprises swivel nut 1 with silicon core clamping device, the core of the card 2 and base 3: the core of the card 2 integral body are olive shape, the middle part is a right cylinder, two ends respectively have a frustum up and down, there is a through hole 21 at the core of the card center, and frustum respectively cuts into four card lobes 22 of five equilibrium up and down; Swivel nut 1 is a hollow structure, and swivel nut 1 cavity lower end is provided with threaded cylinder hole; Base 3 is a right cylinder, its upper outside cornice has screw thread, adopt between base 3 and the swivel nut 1 and be threaded, base respectively is provided with groove in two ends about in the of 3, the core of the card 2 two ends are sheathed on respectively in swivel nut 1 and the base 3, the upper end shape of swivel nut 1 cavity matches with the shape of the core of the card 2 upper end frustums, and the shape of base 3 upper end grooves matches with the core of the card 2 lower end frustum shapes.
As shown in Figure 2, the slot mutual dislocation of the frustum of two ends up and down of the core of the card 2.
The above is a better embodiment of the present utility model only, is not to be used to limit protection domain of the present utility model.
Claims (3)
1, a kind of polycrystalline silicon reducing furnace comprises swivel nut (1) with silicon core clamping device, and the core of the card (2) and base (3) is characterized in that:
Described the core of the card (2) integral body is olive shape, and the middle part is a right cylinder, and two ends respectively have a frustum up and down, and there is a through hole (21) at the core of the card center, and frustum respectively cuts into several card lobes (22) of five equilibrium up and down;
Described swivel nut (1) is a hollow structure, and swivel nut (1) cavity lower end is provided with threaded cylinder hole;
Described base (3) is a right cylinder, and its upper outside cornice has screw thread, adopts between base and the swivel nut to be threaded, and base (3) two ends up and down respectively is provided with groove;
During assembling, the core of the card (2) two ends are sheathed on respectively in swivel nut (1) and the base (3), and the upper end shape of swivel nut (1) cavity matches with the shape of the core of the card (2) upper end frustum, and the shape of base (3) upper end groove matches with the core of the card (2) lower end frustum shape.
2, polycrystalline silicon reducing furnace according to claim 1 is characterized in that the slot mutual dislocation of the frustum of two ends up and down of described the core of the card (2) with silicon core clamping device.
3, polycrystalline silicon reducing furnace according to claim 1 and 2 is characterized in that with silicon core clamping device the frustum up and down of described the core of the card (2) respectively cuts into and blocks lobe (22) more than two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920002790U CN201372204Y (en) | 2009-03-13 | 2009-03-13 | Silicon-core clamping device for polysilicon reducing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920002790U CN201372204Y (en) | 2009-03-13 | 2009-03-13 | Silicon-core clamping device for polysilicon reducing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201372204Y true CN201372204Y (en) | 2009-12-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920002790U Expired - Fee Related CN201372204Y (en) | 2009-03-13 | 2009-03-13 | Silicon-core clamping device for polysilicon reducing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201372204Y (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101913211A (en) * | 2010-07-19 | 2010-12-15 | 常州天合光能有限公司 | Silicon single crystal rod line evolution clamp |
| CN102219217A (en) * | 2011-05-31 | 2011-10-19 | 四川新光硅业科技有限责任公司 | Silicon core clamping device for polysilicon reduction furnace |
| CN102336407A (en) * | 2011-09-26 | 2012-02-01 | 江西赛维Ldk光伏硅科技有限公司 | Graphite chuck capable of being repeatedly used |
| WO2012094182A2 (en) | 2011-01-03 | 2012-07-12 | Gtat Corporation | Chuck for chemical vapor deposition systems and related methods therefor |
| CN102586860A (en) * | 2011-11-28 | 2012-07-18 | 宁夏日晶新能源装备股份有限公司 | Single-crystal furnace crystal bar positioning device and single-crystal furnace using same |
| CN103517873A (en) * | 2011-05-09 | 2014-01-15 | 信越化学工业株式会社 | Silicon core wire holder and method for manufacturing polycrystalline silicon |
| CN105460939A (en) * | 2016-02-04 | 2016-04-06 | 洛阳金诺机械工程有限公司 | Hollow silicon core and silicon core assembly thereof |
| CN106998158A (en) * | 2017-05-11 | 2017-08-01 | 安徽易芯半导体有限公司 | Monocrystalline silicon growing furnace stops cooling down thermal field stage partial heat energy recycle device |
| CN109133065A (en) * | 2018-08-10 | 2019-01-04 | 上海硕余精密机械设备有限公司 | A kind of fastener clamping hollow combination silicon core |
| CN112276790A (en) * | 2020-11-13 | 2021-01-29 | 福建中策光电股份公司 | Novel anchor clamps and grinding device |
-
2009
- 2009-03-13 CN CN200920002790U patent/CN201372204Y/en not_active Expired - Fee Related
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101913211A (en) * | 2010-07-19 | 2010-12-15 | 常州天合光能有限公司 | Silicon single crystal rod line evolution clamp |
| WO2012094182A2 (en) | 2011-01-03 | 2012-07-12 | Gtat Corporation | Chuck for chemical vapor deposition systems and related methods therefor |
| US10494714B2 (en) | 2011-01-03 | 2019-12-03 | Oci Company Ltd. | Chuck for chemical vapor deposition systems and related methods therefor |
| JP2014504582A (en) * | 2011-01-03 | 2014-02-24 | ジーティーエイティー・コーポレーション | Chuck for chemical vapor deposition system and related method |
| EP2661516A4 (en) * | 2011-01-03 | 2015-11-18 | Gtat Corp | Chuck for chemical vapor deposition systems and related methods therefor |
| CN103517873B (en) * | 2011-05-09 | 2016-04-13 | 信越化学工业株式会社 | The manufacture method of silicon core wire holder and polysilicon |
| CN103517873A (en) * | 2011-05-09 | 2014-01-15 | 信越化学工业株式会社 | Silicon core wire holder and method for manufacturing polycrystalline silicon |
| CN102219217A (en) * | 2011-05-31 | 2011-10-19 | 四川新光硅业科技有限责任公司 | Silicon core clamping device for polysilicon reduction furnace |
| CN102219217B (en) * | 2011-05-31 | 2013-09-11 | 四川新光硅业科技有限责任公司 | Silicon core clamping device for polysilicon reduction furnace |
| CN102336407A (en) * | 2011-09-26 | 2012-02-01 | 江西赛维Ldk光伏硅科技有限公司 | Graphite chuck capable of being repeatedly used |
| CN102586860B (en) * | 2011-11-28 | 2015-02-11 | 宁夏日晶新能源装备股份有限公司 | Single-crystal furnace crystal bar positioning device and single-crystal furnace using same |
| CN102586860A (en) * | 2011-11-28 | 2012-07-18 | 宁夏日晶新能源装备股份有限公司 | Single-crystal furnace crystal bar positioning device and single-crystal furnace using same |
| CN105460939A (en) * | 2016-02-04 | 2016-04-06 | 洛阳金诺机械工程有限公司 | Hollow silicon core and silicon core assembly thereof |
| CN106998158A (en) * | 2017-05-11 | 2017-08-01 | 安徽易芯半导体有限公司 | Monocrystalline silicon growing furnace stops cooling down thermal field stage partial heat energy recycle device |
| CN106998158B (en) * | 2017-05-11 | 2023-09-08 | 安徽易芯半导体有限公司 | Partial heat energy recycling device in cooling stop thermal field stage of monocrystalline silicon growth furnace |
| CN109133065A (en) * | 2018-08-10 | 2019-01-04 | 上海硕余精密机械设备有限公司 | A kind of fastener clamping hollow combination silicon core |
| CN109133065B (en) * | 2018-08-10 | 2021-11-02 | 上海硕余精密机械设备有限公司 | Clamping piece for clamping hollow combined silicon core |
| CN112276790A (en) * | 2020-11-13 | 2021-01-29 | 福建中策光电股份公司 | Novel anchor clamps and grinding device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: SHANGHAI SENHE ENGINEERING INVESTMENT CO., LTD. Free format text: FORMER NAME: SHANGHAI SENHE INVESTMENT CO., LTD. |
|
| CP03 | Change of name, title or address |
Address after: 201323 Shanghai city Pudong New Area Zhuqiao gold smell Road No. 29 Patentee after: Shanghai Senhe Engineering Investment Co., Ltd. Address before: Nanhui District 201323 Shanghai Zhu Bridge Industrial Zone gold smell Road No. 29 Patentee before: Shanghai Senhe Investment Co., Ltd. |
|
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI MORIMATSU CHEMICAL EQUIPMENT CO., LTD. Free format text: FORMER OWNER: SHANGHAI SENHE ENGINEERING INVESTMENT CO., LTD. Effective date: 20140228 |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20140228 Address after: 201323 Shanghai city Pudong New Area Zhuqiao Airport Industrial Zone No. 29 gold smell Road Building 3 Patentee after: Shanghai Morimatsu Chemical Equipment Co., Ltd. Address before: 201323 Shanghai city Pudong New Area Zhuqiao gold smell Road No. 29 Patentee before: Shanghai Senhe Engineering Investment Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091230 Termination date: 20160313 |
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| CF01 | Termination of patent right due to non-payment of annual fee |