CN201097110Y

CN201097110Y - A measuring device for accurate aligning of up and down drone

Info

Publication number: CN201097110Y
Application number: CNU2007201487744U2007201487744U
Authority: CN
Inventors: 蔡宗霖
Original assignee: SYNPOWER CO Ltd
Current assignee: SYNPOWER CO Ltd
Priority date: 2007-06-06
Filing date: 2007-06-06
Publication date: 2008-08-06
Anticipated expiration: 2017-06-06

Abstract

The utility model relates to an alignment accuracy measuring device applied to upper and lower targets, which is used for performing measurement to the alignment accuracy and the deviation vector of the accuracy of a measured object, and performing analysis to the deviation vector of the upper and lower targets. The measuring device comprises a base, at least two image acquisition devices, at least an image identification unit, and at least an output unit, wherein a load bearing table is arranged on the base, the two image acquisition devices are oppositely arranged above and below the load bearing table on the base, the image identification unit comprises a host computer, and a detection program uploaded in the host computer, the host computer is electrically connected with the image acquisition devices, and the other image identification unit is electrically connected with at least an output unit. Through the structure, the alignment accuracy measuring device has the advantages of high efficiency, reduced defective rate, reduced cost and promoted overall competitive power.

Description

A kind of measuring equipment of target contraposition accuracy up and down that is applied in

Technical field

The utility model relates to a kind of measuring equipment of target contraposition accuracy up and down that is applied in, what be particularly related to is a kind ofly to obtain a pick-up image by image capture unit, and described pick-up image is supplied with the image identification unit judges learn a comparative result, and make operating personnel learn described comparative result by output unit, and reach efficient height, reduction fraction defective, reduce cost and promote the measuring equipment of the advantage of whole competitiveness.

Background technology

Present little shadow (Lithography) technology is to utilize light to pass through light shield (Mask) to be radiated on the photosensitive material, main pattern on the light shield is transferred to earlier on the photosensitive material (photoresistance), the part that be mapped to by illumination photosensitive material with solvent soaking is dissolved or is kept again, and photoresistance pattern meeting that so forms and light shield are identical or be complementary.

And micro-photographing process mainly is made up of three big steps such as photoresistance covering, exposure and developments, wherein, before exposing, must aim at the action of (Align) to light shield or egative film with treating the contraposition part earlier.See also Fig. 1, be illustrated as the exposure synoptic diagram of substrate, described substrate 1 ' top is respectively to be provided with a light shield 2 ', 3 ' (or being egative film) with the below, described light shield 2 ', 3 ' is the styles such as circuit diagram with wiring, and before exposure, earlier light shield 2 ', 3 ' is carried out alignment actions, treat that alignment actions is finished after, light shield 2 ', 3 ' moves inward near substrate 1 ', thus, just can carry out follow-up exposure program.And described alignment actions generally is that to give the aligning instrument of exposure machine performed at present, also has with manually-operated mode aligned mask certainly and carries out follow-up exposure program again.

The aligning instrument of aforementioned exposure machine can judge whether light shield is aimed at substrate in the use; But what know is, when light shield 2 ', 3 ' inwardly near substrate 1 ' when mobile, be bound to produce the error on the mechanical action, and light shield is subjected to the UV rayed also can produce certain breathing amount, and therefore when light shield and substrate generation skew, the operating personnel but can't perform an analysis at the side-play amount and the error problem of light shield and substrate, cause the product fraction defective to improve, and then cause cost to rise, on the other hand, make that also whole competitive power descends.And the operating personnel does not have method to improve.

Have in view of that, the utility model designer is based on user and dealer's demand, is being engaged in the experience accumulation that this industry designs for many years, and creates a kind of measuring equipment of target contraposition accuracy up and down that is applied in, for the industry utilization.

Summary of the invention

Prior art shortcoming in view of the above, fundamental purpose of the present utility model provide a kind of efficient height, reduce fraction defective, reduce cost and promote the being applied in measuring equipment of target contraposition accuracy up and down of whole competitive power.

For reaching above-mentioned purpose, the utility model provides a kind of measuring equipment of target contraposition accuracy up and down that is applied in, and is to carry out the measurement action of contraposition accuracy and offset vector in order to quilt is measured thing, and analytically to play the target offset vector, includes:

At least one pedestal, described pedestal are provided with a bearing platform, and the bearing platform is measured thing in order to bearing;

At least two image capture units are opposed upper and lower two sides of bearing platform that are arranged on aforementioned pedestal, and described image capture unit is respectively to include a video camera, and one is arranged on the outer camera lens of video camera, with a light source that is arranged on the camera lens lateral surface;

At least one image identification unit includes a main frame, and with a trace routine that is carried in the main frame, described main frame is to be electrically connected aforesaid image capture unit; And

At least one output unit is to be electrically connected aforesaid image identification unit.

Advantage of the present utility model is, can improve the prior art defective, has the efficient height, reduce fraction defective, reduces cost and promote whole competitive power.

Description of drawings:

Shown in Figure 1 is the exposure synoptic diagram of substrate;

The planimetric map that is measured thing shown in Figure 2;

The side view that is measured thing shown in Figure 3;

Shown in Figure 4 is the action synoptic diagram (timing) of the utility model first embodiment;

Shown in Figure 5 is the action synoptic diagram (during use) of the utility model first embodiment;

Shown in Figure 6 is pick-up image planimetric map of the present utility model;

Shown in Figure 7 is the front elevation of the utility model second embodiment; And

Shown in Figure 8 is the calcspar of the utility model first embodiment.

Description of reference numerals: 1 '-substrate; 2 '-egative film; 3 '-egative film; 4 '-light source; 5 '-light source; 9 '-correcting sheet; 91 '-upright opening; The 1-pedestal; 11-bearing platform; The 111-locating convex block; The 12-elevating mechanism; The 2-image capture unit; The 21-video camera; The 211-pick-up image; The 22-camera lens; The 23-light source; The 3-image capture unit; The 31-video camera; The 311-pick-up image; The 32-camera lens; The 33-light source; 4-image identification unit; The 41-main frame; The 42-trace routine; The 421-comparative result; The 5-output unit; The 6-image capture unit; The 61-video camera; The 62-camera lens; The 63-light source; The 7-image capture unit; The 71-video camera; The 72-camera lens; The 73-light source; 9-is measured thing; The 91-target.

Embodiment

Below in conjunction with accompanying drawing, to this novel above-mentionedly is described in more detail with other technical characterictic and advantage.

Please cooperate and consult Fig. 2 to Fig. 5 with shown in Figure 8, the measuring equipment that is applied in up and down target contraposition accuracy of the utility model first embodiment is to move in order to the measurement of the target 91 that is measured thing 9 two sides being carried out contraposition accuracy and offset vector, includes:

At least one pedestal 1, include one in order to bearing measured the bearing platform 11 and of thing 9 can be on a straight line direction (as upright up and down direction) mobile elevating mechanism 12, described bearing platform 11 all or the video camera capture measured thing 9 by transparent material is made in order to bearing, bearing platform 11 has at least two locating convex blocks 111 in addition, described locating convex block 111 is to be a straight line and can same moved further, to cooperate the position that is provided with of the different targets 91 that measured things 9;

At least two

image capture units

2,3, be opposed and be symmetricly set on bearing platform 11 upper and lower two sides of aforementioned pedestal 1, described image capture unit the 2, the 3rd respectively includes a

video camera

21,31, one is arranged on the

camera lens

22,32 outside the

video camera

21,31, with the

light source

23,33 that respectively is arranged on

camera lens

22,32 lateral surfaces, described

light source

23,33 emitted light are in order to expose on the target 91 that is measured thing 9 two sides,

light source

23,33 generally can use ring light or axis light to be arranged on

camera lens

22,32 lateral surfaces in addition, is not defined as which kind of light source;

At least one image identification unit 4, include a main frame 41, with a trace routine 42 that is carried in the main frame 41, described main frame 41 is to be electrically connected aforesaid

image capture unit

2,3, and main frame 41 is in order to store the image coordinate data and to calculate the image coordinate data;

At least one output unit 5 is to be electrically connected aforesaid image identification unit 4, in order to present the operation result of image identification unit 4.Wherein, the mode that presents the operation result of image identification unit 4 can present in order to modes such as demonstration, report and printings, and output unit 5 also can be made as devices such as display, printer and voice announcer.

Enforcement user mode relevant for above-mentioned member sees also Fig. 2 to Fig. 5 with shown in Figure 8, before the measuring equipment that is applied in target contraposition accuracy up and down of the present utility model uses, provide a correcting sheet 9 ' to be seated in (as Fig. 4) on the bearing platform 11 earlier, described correcting sheet 9 ' is drilled with the upright opening 91 ' of consistency from top to bottom, and by 2,3 pairs of upright opening 91 ' pick-up images of image capture unit, and whether the position of being judged

image capture unit

2,3 up and down and upright opening 91 ' by image identification unit 4 has the skew of generation, if the action of promptly being carried out revisal by trace routine 42 is arranged.

When the measuring equipment that is applied in target contraposition accuracy up and down of the present utility model uses, to be measured thing 9 to be placed on bearing platform 11, and will be by measurement thing 9 location by two locating convex blocks 111, make light source 23, the 33 light signals that sent are to expose on the target 91 on the two sides that is measured thing 9, and

video camera

21,31 acquisitions measure target 91 images on the two sides of thing 9, and obtain a pick-up image 211,311, by the 4 pairs of described pick-up images 211 in image identification unit, 311 carry out the measurement of contraposition accuracy and offset vector, and learn a comparative result 421, and be sent to output unit 5 by image identification unit 4 simulating images, and make operating personnel learn described comparative result 421 by output unit 5, so, operating personnel can learn easily whether target 91 has accurate contraposition; It is also important that, operating personnel can judge thus light shield 2 ', 3 ' or egative film whether present skew or breathing, and so analyze reason and carry out subsequent action.

Please cooperate and consult Fig. 6 and shown in Figure 7, the measuring equipment that is applied in target contraposition accuracy up and down of the utility model second embodiment is identical with the first embodiment array mode, and difference is in second embodiment and has four group

image capture devices

2,3,6,7, described image capture unit the 2,3,6, the 7th is bearing platform 11 upper and lower two sides that are oppositely arranged on aforementioned pedestal 1 in twos, and

light source

23,33,63,73 emitted light signals are symmetrical in twos setting up and down, and the light signal is in order to penetrate to the target 91 that is measured thing 9 two sides.The design of four group

image capture devices

2,3,6,7 by second embodiment, can judge whether accurately contraposition of target 91 except having, beyond the side-play amount and vector that present after the skew, also can be under the prerequisite of measuring once, measurement obtain with one side go up target 91 apart from d, make the efficient of second embodiment not bad.

What will specify in addition is that above-mentioned bearing platform 11 is transparent materials, and can make image capture unit 3 observe image from bottom to top by transparent material, and directly fixed focal length need not be adjusted in addition.And another image capture unit 2 can be adjusted focal length by the elevating mechanism 12 of pedestal 1, and then reaches the purpose of picked-up image

More than explanation is novel just illustrative for this; and it is nonrestrictive; those of ordinary skills understand; under the situation of the spirit and scope that do not break away from following claims and limited; can make many modifications; change, or equivalence, but all will fall in the protection domain of the present utility model.

Claims

1. one kind is applied in the measuring equipment of target contraposition accuracy up and down, in order to be carried out the measurement action of contraposition accuracy and offset vector to measuring thing, comes analytically to play the target offset vector, and it is characterized in that: it includes:

At least one pedestal includes a bearing platform, and the bearing platform is measured thing in order to bearing;

2. according to the measuring equipment that is applied in up and down target contraposition accuracy of claim 1, it is characterized in that: described bearing platform all or the video camera capture partly be made by transparent material.

3. according to the measuring equipment that is applied in up and down target contraposition accuracy of claim 1, it is characterized in that: described pedestal also includes an elevating mechanism that moves along rectilinear direction.

4. according to the measuring equipment that is applied in up and down target contraposition accuracy of claim 1, it is characterized in that: described bearing platform is put a correcting sheet, described correcting sheet is drilled with the upright opening of consistency from top to bottom, and by described image capture unit to the upright opening pick-up image.

5. according to the measuring equipment of target contraposition accuracy up and down that is applied in of claim 1, it is characterized in that: described light source axis light is arranged on the camera lens lateral surface.

6. according to the measuring equipment of target contraposition accuracy up and down that is applied in of claim 1, it is characterized in that: described light source ring light is arranged on the camera lens lateral surface.