CN209981187U - Full-automatic double-station silicon wafer inserting machine - Google Patents
Full-automatic double-station silicon wafer inserting machine Download PDFInfo
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- CN209981187U CN209981187U CN201920913985.5U CN201920913985U CN209981187U CN 209981187 U CN209981187 U CN 209981187U CN 201920913985 U CN201920913985 U CN 201920913985U CN 209981187 U CN209981187 U CN 209981187U
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- overturning
- silicon wafer
- conveying
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- basket
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 207
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 207
- 239000010703 silicon Substances 0.000 title claims abstract description 207
- 230000007306 turnover Effects 0.000 claims abstract description 75
- 210000000078 claw Anatomy 0.000 claims description 42
- 238000003780 insertion Methods 0.000 claims description 15
- 230000037431 insertion Effects 0.000 claims description 15
- 238000001514 detection method Methods 0.000 claims description 6
- 230000005012 migration Effects 0.000 claims 1
- 238000013508 migration Methods 0.000 claims 1
- 238000011084 recovery Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 163
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
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Abstract
The utility model relates to a silicon wafer inserting machine, in particular to a full-automatic double-station silicon wafer inserting machine, which comprises a frame and a basket conveying and overturning device, wherein the basket conveying and overturning device is arranged on one side of the frame; the second basket turnover device is arranged on one side of the frame and is positioned on one side of the basket conveying turnover device; the sheet inserting device is arranged on the other side of the frame and corresponds to the flower basket conveying and overturning device and the second flower basket overturning device respectively; and the flower basket grabbing and conveying device is arranged at the top of the frame and is used for transferring the silicon wafer flower basket. The insert machine can automatically distribute and install empty silicon wafer baskets to two insert stations, and can realize the recovery of full baskets of the two insert stations; when the inserting piece works, the full flower basket can be recovered by one station, the empty flower basket can be inserted into the other station, the two stations work alternately, waiting time is shortened, and the inserting piece is simple in structure, convenient to operate and high in production efficiency.
Description
Technical Field
The utility model relates to a silicon chip insert machine, especially full-automatic duplex position silicon chip insert machine.
Background
The silicon wafer inserting machine is mechanical equipment for conveying silicon wafers to the designated positions of a silicon wafer basket one by one, and when the silicon wafers are conveyed in a direction which is horizontally vertical to the silicon wafer basket at a constant speed and synchronously fed in a direction which is vertical to the conveying direction of the silicon wafers, the silicon wafers can be conveyed to the designated positions of the silicon wafer basket one by one.
In the prior art, single-station inserting pieces are adopted, after a flower basket is fully inserted, the recovery of the full flower basket needs to be waited, and the next empty flower basket needs to be waited for inserting pieces is installed, so that the inserting piece time is greatly occupied, and the inserting piece efficiency is influenced.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems, the utility model provides a full flower basket recycling device which can automatically distribute and install empty silicon wafer flower baskets to two insert stations and can realize the full flower basket recycling of the two insert stations; when one of them station is at the inserted sheet during operation, the recovery of full basket of flowers can be accomplished to another station to treat the empty basket of flowers of inserted sheet next and install into and treat the inserted sheet state, two stations work in turn, reduce latency, can improve production efficiency greatly, and simple structure, convenient operation's full-automatic duplex position silicon chip insert machine, concrete technical scheme is:
the full-automatic double-station silicon wafer inserting machine comprises a frame and a basket conveying and overturning device, wherein the basket conveying and overturning device is arranged on one side of the frame; the second basket overturning device is arranged on one side of the frame and is positioned on one side of the basket conveying and overturning device; the sheet inserting device is arranged on the other side of the frame and corresponds to the flower basket conveying and overturning device and the second flower basket overturning device respectively; and the flower basket grabbing and conveying device is arranged at the top of the frame and is used for transferring the silicon wafer flower basket.
Through adopting above-mentioned technical scheme, turning device is carried to the basket of flowers is used for carrying and upset silicon chip basket of flowers, and second basket of flowers turning device is used for overturning silicon chip basket of flowers, and wherein the upset is including overturning the basket of flowers of empty basket of flowers and inserting full silicon chip.
The basket grabbing and conveying device is used for transferring the silicon wafer baskets among the second basket overturning device, the basket conveying and overturning device and the full basket storage position.
The inserting piece device is used for inserting the silicon wafer into the empty silicon wafer basket.
Preferably, the flower basket conveying and overturning device comprises a conveying belt; the first overturning frame is rotatably arranged at one end of the conveying belt, which is positioned at the inserting piece device; the turnover clamping device is installed on the first turnover frame and used for clamping the silicon wafer basket on the first turnover frame; and the overturning driving device is connected with the overturning frame and is used for driving the first overturning frame to overturn.
Preferably, the first turnover frame comprises a turnover rod A, and the turnover rod A is positioned on one side of the conveying belt; the overturning rod B is positioned on the other side of the conveying belt; the overturning clamping device comprises a first overturning fixed baffle plate, and the first overturning fixed baffle plate is arranged on the overturning rod A; the first overturning longitudinal baffle is arranged at one end of the overturning rod A; the first overturning clamping cylinder is fixed at the bottom of the overturning rod B; the first overturning movable baffle is fixed on the first overturning clamping cylinder and corresponds to the first overturning fixed baffle; the turnover driving device comprises a first turnover shaft, the first turnover shaft is rotatably arranged below the conveying belt, and one ends of the turnover rod A and the turnover rod B are fixed on the first turnover shaft; one end of the first overturning connecting rod is fixed on the first overturning shaft; and one end of the first overturning cylinder is connected with the other end of the first overturning connecting rod.
Preferably, the conveying belt comprises a conveying chain, and the conveying chain is positioned between the turnover rod A and the turnover rod B; a conveying driving wheel; the conveying driving wheel and the conveying driven wheel are sleeved with the conveying chain; and the conveying driving motor is connected with the conveying driving wheel.
Preferably, the second basket turning device comprises a second turning support, and the second turning support is fixed on the frame; the second overturning shaft is rotatably arranged on the second overturning bracket; the second overturning seat is fixed on the second overturning shaft; one end of the second overturning frame is fixed on a second overturning shaft; the second overturning fixed baffle is fixed on one side of the second overturning frame; the second overturning longitudinal baffle is fixed on one side of the second overturning frame and is positioned at one end of the second overturning shaft; the second overturning clamping cylinder is fixed at the bottom of the other side of the second overturning frame; the second overturning movable baffle is fixed on the second overturning clamping cylinder and corresponds to the second overturning fixed baffle; one end of the second overturning connecting rod is fixed on the second overturning shaft; and one end of the second overturning cylinder is movably connected with the Likang of the second overturning connecting rod.
Preferably, the inserting device comprises an inserting sheet horizontal moving linear module, and the inserting sheet horizontal moving linear module is fixed at the bottom of the frame; the silicon wafer inserting devices are arranged and are all installed on a sliding table of the inserting piece horizontal moving linear module, each silicon wafer inserting device comprises an inserting piece lifting linear module, the inserting piece lifting linear module is vertically arranged, and the inserting piece lifting linear module is fixed on the sliding table of the inserting piece horizontal moving linear module; the silicon wafer conveying device is installed at the top of the insert lifting linear module; the insert rack is fixed on a sliding table of the insert lifting linear module; and the inserting piece clamping device is used for fixing the silicon wafer basket on the inserting piece frame.
Preferably, the inserting sheet clamping device comprises an upper pneumatic clamping jaw, and the upper pneumatic clamping jaw is fixed to the top of the inserting sheet frame; and the lower pneumatic clamping jaw is fixed at the bottom of the inserting piece frame.
Preferably, the silicon wafer inserting device comprises a silicon wafer conveying plate, and the silicon wafer conveying plate is fixed at the top of the insert lifting linear module; the silicon wafer conveying driving wheel is arranged at one end of the silicon wafer conveying plate; the silicon wafer conveying motor is connected with the silicon wafer conveying driving wheel; the silicon wafer conveying middle wheel is fixed at the middle position of the silicon wafer conveying plate; the silicon wafer inserting wheel is fixed at the other end of the silicon wafer conveying plate and is positioned in the wafer inserting frame; the driving conveying circular belt is sleeved on the silicon wafer conveying driving wheel and the silicon wafer conveying middle wheel; and the driven round conveying belt is sleeved on the silicon wafer conveying middle wheel and the silicon wafer inserting wheel.
Preferably, the flower basket grabbing and conveying device comprises a grabbing horizontal moving linear module, and the grabbing horizontal moving linear module is fixed at the top of the frame; the grabbing connecting seat is fixed on the sliding table of the grabbing horizontal moving linear module; the grabbing lifting device is fixed on the grabbing connecting seat; the grabbing cross beam is fixed on the grabbing lifting device; the lifting claw seats are arranged at the two ends of the grabbing cross beam in height; the lifting claw linear bearings are fixed at two ends of the lifting claw seat; the lifting claw slide rod is inserted on the lifting claw linear bearing in a sliding manner; and the flower basket hanging claw is arranged on the hanging claw sliding rod.
Preferably, the flower basket lifting claw device further comprises an anti-collision detection device, wherein the anti-collision detection device comprises a proximity switch or a travel switch, and the proximity switch or the travel switch is fixed on the lifting claw seat and corresponds to the flower basket lifting claw.
Compared with the prior art the utility model discloses following beneficial effect has:
the full-automatic double-station silicon wafer inserting machine provided by the utility model can automatically distribute and install empty silicon wafer baskets to two inserting station, and can realize the full basket recovery of the two inserting station; when one of the stations works on the inserting sheet, the other station can complete the recovery of the full flower basket, the next empty flower basket to be inserted is installed to be in the state of waiting for the inserting sheet, the two stations work alternately, the waiting time is shortened, the production efficiency can be greatly improved, and the structure is simple and the operation is convenient.
Drawings
FIG. 1 is a front view of a fully automatic double station silicon wafer inserting machine;
FIG. 2 is a top view of a fully automatic double station silicon wafer inserting machine;
FIG. 3 is a side view of a fully automatic double station silicon wafer inserter;
FIG. 4 is a front view of the silicon wafer basket conveying and overturning device;
FIG. 5 is a top view of the silicon wafer basket conveying and overturning device;
FIG. 6 is a cross-sectional view taken along line A-A of FIG. 1;
FIG. 7 is a schematic structural diagram of a silicon wafer basket in a horizontal state on a silicon wafer basket conveying and overturning device;
FIG. 8 is a schematic structural diagram of a silicon wafer basket conveying and overturning device for overturning the silicon wafer basket;
FIG. 9 is a top view of a second basket flipping mechanism;
FIG. 10 is a side view of a second basket flipping mechanism;
FIG. 11 is a front view of the tab device;
FIG. 12 is a side view of the tab device;
FIG. 13 is a schematic view of the structure of the card cage;
FIG. 14 is a schematic view of a silicon wafer basket mounted on the insert holder;
FIG. 15 is a schematic view of the structure of the stage;
FIG. 16 is a structural schematic of a flower basket mount;
FIG. 17 is a schematic cross-sectional view of a silicon wafer insertion device;
FIG. 18 is a front view of the flower basket gripping conveyor;
fig. 19 is a side view of the basket gripping conveyor.
Detailed Description
The present invention will now be further described with reference to the accompanying drawings.
As shown in fig. 1 to 19, the full-automatic double-station silicon wafer inserting machine comprises a frame 10 and further comprises a basket conveying and overturning device, wherein the basket conveying and overturning device is installed on one side of the frame 10; the second basket turnover device is arranged on one side of the frame 10 and is positioned on one side of the basket conveying turnover device; the sheet inserting device is arranged on the other side of the frame 10 and corresponds to the flower basket conveying and overturning device and the second flower basket overturning device respectively; and the flower basket grabbing and conveying device is arranged at the top of the frame 10 and is used for transferring the silicon wafer flower basket 100.
The flower basket conveying and overturning device comprises a conveying belt and a flower basket overturning device, the flower basket overturning device is installed at one end of the conveying belt, the flower basket overturning device comprises a first overturning frame, and the first overturning frame is rotatably installed at one end of the conveying belt; the turnover clamping device is arranged on the first turnover frame and is used for clamping the silicon wafer basket 100 on the first turnover frame; and the turnover driving device is connected with the first turnover frame and is used for driving the first turnover frame to turn over.
Specifically, the first turnover frame comprises a turnover rod A262, and the turnover rod A262 is positioned at one side of the conveying belt; and the turning rod B261 is arranged on the other side of the conveying belt, and the turning rod B261 is arranged on the other side of the conveying belt. The turnover rod A262 and the turnover rod B261 can be made of aluminum profiles and are arranged on two sides of the conveying belt, and the silicon wafer basket 100 is not interfered in transportation.
The overturning clamping device comprises a first overturning fixed baffle 263, and the first overturning fixed baffle 263 is installed on the overturning rod A262; a first turning longitudinal baffle 264, wherein the first turning longitudinal baffle 264 is arranged at one end of the turning rod A262 and is positioned at one side of the first turning shaft 273; a first overturning clamping cylinder 266, wherein the first overturning clamping cylinder 266 is fixed at the bottom of the overturning rod B261; and a first flipping flapper 265, the first flipping flapper 265 being fixed to the first flipping clamp cylinder 266 and corresponding to the first flipping fixed flapper 263.
The first flipping clamp cylinder 266 clamps the silicon wafer basket 100 to the first flipping fixed stop 263 through the first flipping movable stop 265.
The first flipping longitudinal baffle 264 prevents the wafer basket 100 from shifting along the axis of the flipping bar a 262.
The overturning driving device comprises a first overturning shaft 273, the first overturning shaft 273 is rotatably installed on an overturning bracket 275, and the overturning bracket 275 is installed on the machine frame; the first turnover seat 274 is fixed on the first turnover shaft 273, and the first turnover seat 274 is also respectively fixed at one end of the turnover rod A262 and one end of the turnover rod B261; a first flip link 272, one end of the first flip link 272 being fixed to the first flip shaft 273; and a first overturning cylinder 271, a piston rod of the first overturning cylinder 271 is connected with the other end of the first overturning connecting rod 272, and the first overturning cylinder 271 is fixed on the frame.
The first turning cylinder 271 drives the first turning shaft 273 to rotate through the first turning connecting rod 272, the first turning shaft 273 drives the first turning seat 274 to rotate, the first turning seat 274 drives the turning rod A262 and the turning rod B261 to rotate 90 degrees, and therefore the silicon wafer basket 100 is changed into a vertical state from a horizontal state.
The first turning seat 274 can enable the turning rod A262 and the turning rod B261 to rotate 90 degrees and then to avoid the end of the conveying belt, so that the silicon wafer flower basket 100 is just positioned at the station of the inserting device, and interference is avoided.
The conveying belts comprise two conveying chains, the two conveying chains are symmetrically arranged and are positioned between the turnover rod A262 and the turnover rod B261, and the conveying chains are positioned on two sides of the silicon wafer basket 100, namely on the edges of the two sides of the silicon wafer basket 100; the conveying driving wheel is fixed on the conveying driving shaft, the conveying driving shaft is arranged on a bearing seat, and the bearing seat is arranged on the rack; the conveying driven wheel is rotatably arranged on the first turnover shaft 273, and the conveying driving wheel and the conveying driven wheel are sleeved with the conveying chain; and the conveying driving motor is connected with the conveying driving wheel.
The conveying chain has simple structure, small friction with the flower basket and convenient use.
The second turn-over device comprises a second turn-over bracket 68, and the second turn-over bracket 68 is fixed on the frame 10; a second turning shaft 64, wherein the second turning shaft 64 is rotatably arranged on a second turning bracket 68; the second overturning seat 65, the second overturning seat 65 is fixed on the second overturning shaft 64; a second roll-over stand 61, one end of the second roll-over stand 61 is fixed on a second roll-over shaft 64; a second overturn fixing baffle 621, wherein the second overturn fixing baffle 621 is fixed on one side of the second overturn frame 61; a second turning longitudinal baffle 622, which is fixed at one side of the second turning frame 61 and is located at one end of the second turning shaft 64; a second overturning clamping cylinder 632, wherein the second overturning clamping cylinder 632 is fixed at the bottom of the other side of the second overturning frame 61; a second turnover baffle 631, wherein the second turnover baffle 631 is fixed on the second turnover clamping cylinder 632 and corresponds to the second turnover fixing baffle 621; a second flipping link 66, one end of the second flipping link 66 being fixed to the second flipping shaft 64; and one end of the second overturning cylinder 67 is movably connected with the Likang of the second overturning connecting rod 66.
The second roll-over stand 61 is an aluminum frame.
The inserting sheet device comprises an inserting sheet horizontal moving linear module 37, and the inserting sheet horizontal moving linear module 37 is fixed at the bottom of the frame 10; the silicon wafer inserting devices are arranged and are all installed on the sliding table of the inserting piece horizontal moving linear module 37, each silicon wafer inserting device comprises an inserting piece lifting linear module 36, the inserting piece lifting linear module 36 is vertically arranged, and the inserting piece lifting linear module 36 is fixed on the sliding table of the inserting piece horizontal moving linear module 37; the silicon wafer conveying device is arranged at the top of the insert lifting linear module 36; the insert frame 31, the insert frame 31 is fixed on the sliding table of the insert lifting linear module 36; and the inserting piece clamping device is used for fixing the silicon wafer basket 100 on the inserting piece frame 31.
The insert clamping device comprises an upper pneumatic clamping jaw 32, and the upper pneumatic clamping jaw 32 is fixed at the top of the insert frame 31; and a lower pneumatic clamping jaw 33, wherein the lower pneumatic clamping jaw 33 is fixed at the bottom of the card inserting frame 31.
The upper pneumatic clamping jaw 32 and the lower pneumatic clamping jaw 33 are used for fixing the silicon wafer basket 100 on the wafer inserting frame 31, and the position of the silicon wafer basket 100 is constant, so that silicon wafers can be conveniently inserted.
The silicon wafer inserting device comprises a silicon wafer conveying plate 91, and the silicon wafer conveying plate 91 is fixed at the top of the insert lifting linear module 36; the silicon wafer conveying driving wheel 92, the silicon wafer conveying driving wheel 92 is installed at one end of the silicon wafer conveying plate 91; a silicon wafer conveying motor connected with the silicon wafer conveying driving wheel 92; the silicon wafer conveying middle wheel 93 is fixed at the middle position of the silicon wafer conveying plate 91; a silicon wafer inserting wheel 94, wherein the silicon wafer inserting wheel 94 is fixed at the other end of the silicon wafer conveying plate 91 and is positioned in the wafer inserting frame 31; the driving conveying circular belt 95 is sleeved on the silicon wafer conveying driving wheel 92 and the silicon wafer conveying middle wheel 93; and a driven round conveyer belt 96, wherein the driven round conveyer belt 96 is sleeved on the silicon chip conveying intermediate wheel 93 and the silicon chip inserting wheel 94.
The silicon wafer conveying driving wheel 92, the silicon wafer conveying intermediate wheel 93 and the silicon wafer inserting wheel 94 are all provided with annular grooves, and the driving conveying circular belt 95 and the driven conveying circular belt 96 are all positioned in the annular grooves.
The silicon wafer conveying motor is connected with the silicon wafer conveying driving wheel 92 through a conveying circular belt.
An inserting piece table 35 is arranged between the inserting piece frame 31 and the inserting piece lifting linear module 36, the inserting piece table 35 is fixed on a sliding table of the inserting piece horizontal moving linear module 37, a flower basket seat 34 is installed at the top of the inserting piece table 35, the flower basket seat 34 is used for placing a silicon wafer flower basket 100, a U-shaped avoiding groove 341 is formed in the flower basket seat 34, the avoiding groove 341 facilitates the lifting of the flower basket seat 34, and the interference of the silicon wafer inserting wheel 94 is avoided. Two avoiding holes 342 are further formed in the basket seat 34, the avoiding holes 342 are located on two sides of the avoiding groove 341, and the avoiding holes 342 are matched with the basket positioning column 101.
The flower basket grabbing and conveying device comprises a grabbing horizontal moving linear module 41 and a grabbing connecting seat 42, wherein the grabbing connecting seat 42 is fixed on a sliding table of the grabbing horizontal moving linear module 41; the grabbing lifting device 43 is fixed on the grabbing connecting seat 42; the grabbing beam 44, the grabbing beam 44 is fixed on the grabbing lifting device 43; the lifting claw seats 45 are arranged at the two ends of the grabbing beam 44 in height; the lifting claw linear bearing 46, the lifting claw linear bearing 46 is fixed at two ends of the lifting claw seat 45; the lifting claw slide rod 47 is inserted on the lifting claw linear bearing 46 in a sliding manner; and the flower basket hanging claw 48, and the flower basket hanging claw 48 is arranged on the hanging claw slide rod 47.
The grabbing beam 44 is an aluminum profile.
One end of the hanging claw slide rod 47 is provided with a limiting ring 471, the other end is connected with the flower basket hanging claw 48, and the limiting ring 471 is positioned above the linear bearing 46. The limiting ring 471 is used to limit the position of the pawl slide 47 and prevent the pawl slide 47 from disengaging the linear bearing 46.
The grabbing lifting device 43 comprises a grabbing lifting cylinder or a grabbing electric cylinder, the grabbing lifting cylinder or the grabbing electric cylinder is fixed on the grabbing connecting seat 42, a piston rod of the grabbing lifting cylinder is connected with the grabbing cross beam 44, and a piston rod of the grabbing electric rod is connected with the grabbing cross beam 44.
The grabbing cylinder is convenient and quick to lift and has a simple structure. The lifting electric cylinder can accurately control the lifting of the basket lifting claw 48. The cylinder or the electric cylinder can be selected according to specific requirements.
Wherein, snatch the lift cylinder and be the biax cylinder. The double-shaft cylinder can prevent steering, a guide device is not needed, and the structure is simplified.
The flower basket lifting claw device further comprises an anti-collision detection device 49, wherein the anti-collision detection device 49 comprises a proximity switch or a travel switch, and the proximity switch or the travel switch is fixed on the lifting claw seat 45 and corresponds to the flower basket lifting claw 48. When the proximity switch senses the basket lifting claw 48, the proximity switch sends a signal, and the controller controls the grabbing lifting device 43 to ascend or stop descending. When the contact of the travel switch is triggered by the basket-to-basket hanging claw 48, the travel switch sends a signal, and the controller controls the grabbing lifting device 43 to ascend or stop descending.
The grabbing horizontal movement linear module 41 is used for driving the basket hanging claws 48 to be inserted from two ends of the silicon wafer basket 100, the basket hanging claws 48 hang the basket positioning columns 101 at two ends of the silicon wafer basket 100, and then the grabbing lifting devices 43 drive the basket hanging claws 48 to rise to transfer the silicon wafer basket 100.
When snatching silicon chip basket of flowers 100, basket of flowers 48 need descend earlier, when the position of silicon chip basket of flowers 100 is incorrect, basket of flowers 48 collides with silicon chip basket of flowers 100 easily, if it drives basket of flowers 48 and continues to descend to snatch elevating gear 43, can lead to silicon chip basket of flowers 100 or elevating gear damage, because basket of flowers 48 installs on pawl slide bar 47, basket of flowers 48 can freely go up and down, when basket of flowers 48 pressed the basket of flowers, basket of flowers 48 does not follow and snatch elevating gear 43 and descend, effectively prevent to crush the basket of flowers.
For clarity of description, the two silicon wafer insertion devices are a first silicon wafer insertion device 301 and a second silicon wafer insertion device 302, respectively. The first silicon wafer insertion device 301 and the second silicon wafer insertion device 302 are both mounted on a horizontal moving seat, and the horizontal moving seat is fixed on a sliding table of the insertion sheet horizontal moving linear module 37.
During operation, an empty silicon wafer basket 100 is conveyed to a conveying chain of a basket conveying turnover device from a conveying line, after the silicon wafer basket 100 enters a turnover position, namely when the silicon wafer basket 100 enters the turnover rod A262 and the turnover rod B261, the first turnover clamping cylinder 266 is started, the first turnover clamping cylinder 266 drives the first turnover movable baffle 265 to clamp the silicon wafer basket 100 on the first turnover fixed baffle 263, then the first turnover cylinder 271 is started, the first turnover cylinder 271 drives the first turnover shaft 273 to rotate through the first turnover connecting rod 272, the first turnover shaft 273 drives the first turnover seat 274 to rotate, the first turnover seat 274 drives the turnover rod A262 and the turnover rod B261 to rotate 90 degrees, so that the silicon wafer basket 100 is changed from a horizontal state to a vertical state, under the action of the first turnover seat 274, the silicon wafer basket 100 enters the insert rack 31 of the first silicon wafer insertion device 301, and then the first silicon wafer insertion device 301 lifts the linear module 36 to start, the silicon wafer basket seat 34 moves to the bottom of the silicon wafer basket 100, then the first overturning clamping cylinder 266 loosens the silicon wafer basket 100, the silicon wafer basket 100 stays on the basket seat 34, the upper pneumatic clamping jaw 32 and the lower pneumatic clamping jaw 33 are started simultaneously to press the silicon wafer basket 100 on the insert rack 31, the first overturning cylinder 271 resets, and the overturning rod A262 and the overturning rod B261 recover to a horizontal state; the silicon wafer horizontal moving linear module 37 drives a silicon wafer inserting device filled with an empty silicon wafer basket 100 to move to an inserting position, the silicon wafer separating and conveying device conveys the separated silicon wafers one by one to the silicon wafer conveying driving wheel 92, then a silicon wafer conveying motor is started, the silicon wafer conveying motor drives the silicon wafer conveying driving wheel 92, the silicon wafer conveying middle wheel 93 and the silicon wafer inserting wheel 94 to rotate, the silicon wafers are inserted into silicon wafer grooves of the silicon wafer basket 100 under the action of a driven conveying circular belt 96 and a driving conveying circular belt 95, and after one silicon wafer is inserted, the inserting lifting linear module 36 drives the silicon wafer inserting device to ascend for an inserting distance, and continuous inserting is carried out until the inserting is completed; after the inserting sheet is completed, the inserting sheet horizontal moving linear module 37 moves the silicon wafer inserting device fully inserted with silicon wafers to the first overturning frame, and overturns the first overturning frame to a vertical state, then the first overturning clamping cylinder 266 clamps the silicon wafer basket 100 fully inserted with silicon wafers, then the first overturning frame overturns to a horizontal state, the grabbing horizontal moving linear module 41 drives the basket hanging claw 48 to move to the upper side of the first overturning frame and not to be positioned right above the silicon wafer basket 100, then the grabbing lifting device 43 descends to enable the position of the basket hanging claw 48 to be lower than the basket positioning column 101 on the silicon wafer basket 100, then the grabbing horizontal moving linear module 41 drives the basket hanging claw 48 to move to the lower side of the silicon wafer basket 100, then the grabbing lifting device 43 ascends to lift the silicon wafer basket 100 fully inserted with silicon wafers, the grabbing horizontal moving linear module 41 drives the silicon wafer basket 100 fully inserted with silicon wafers to move to a full basket storage position, manually transported away from the transport line.
In the above inserting process, if the second silicon wafer inserting device 302 is provided with the silicon wafer basket 100 and is full of silicon wafers, the second silicon wafer inserting device just moves to one side of the second basket turnover device, the second basket turnover device clamps the silicon wafer basket 100 full of silicon wafers, the silicon wafer basket 100 is turned over by 90 degrees, the silicon wafer basket 100 is changed into a horizontal device from a vertical state, and then the basket grabbing and conveying device moves the silicon wafer basket 100 to a full basket storage position. If the second silicon wafer inserting device 302 is filled with the empty silicon wafer basket 100, the second silicon wafer inserting device 302 waits for the completion of the insertion of the first silicon wafer inserting device 301, and when the first silicon wafer inserting device 301 is moved to one end of the basket conveying and overturning device after the completion of the insertion to unload the silicon wafer basket 100 filled with silicon wafers, the second silicon wafer inserting device 302 performs insertion. If the second silicon wafer inserting device 302 does not have the silicon wafer basket 100, the silicon wafer conveying and overturning device continues to convey the silicon wafer basket 100, when the silicon wafer basket 100 enters the overturning position, the basket grabbing and conveying device conveys the empty silicon wafer basket 100 to the second basket overturning device, and then the second basket overturning device inserts the empty silicon wafer basket 100 into the insert frame 31 of the second silicon wafer inserting device 302.
Claims (10)
1. The full-automatic double-station silicon wafer inserting machine comprises a frame and is characterized by also comprising
The flower basket conveying and overturning device is arranged on one side of the frame;
the second basket overturning device is arranged on one side of the frame and is positioned on one side of the basket conveying and overturning device;
the sheet inserting device is arranged on the other side of the frame and corresponds to the flower basket conveying and overturning device and the second flower basket overturning device respectively; and
the flower basket grabbing and conveying device is installed at the top of the frame and used for transferring the silicon wafer flower basket.
2. The full-automatic double-station silicon wafer inserting machine according to claim 1,
the flower basket conveying and overturning device comprises
A conveyor belt;
the first overturning frame is rotatably arranged at one end of the conveying belt, which is positioned at the inserting piece device;
the turnover clamping device is installed on the first turnover frame and used for clamping the silicon wafer basket on the first turnover frame; and
the turnover driving device is connected with the turnover frame and used for driving the first turnover frame to turn over.
3. The full-automatic double-station silicon wafer inserting machine according to claim 2,
the first roll-over stand comprises
The overturning rod A is positioned on one side of the conveying belt;
the overturning rod B is positioned on the other side of the conveying belt;
the turning and clamping device comprises
The first overturning fixed baffle is arranged on the overturning rod A;
the first overturning longitudinal baffle is arranged at one end of the overturning rod A;
the first overturning clamping cylinder is fixed at the bottom of the overturning rod B; and
the first overturning movable baffle is fixed on the first overturning clamping cylinder and corresponds to the first overturning fixed baffle;
the turnover driving device comprises
The first overturning shaft is rotatably arranged below the conveying belt, and one ends of the overturning rod A and the overturning rod B are fixed on the first overturning shaft;
one end of the first overturning connecting rod is fixed on the first overturning shaft; and
and one end of the first overturning cylinder is connected with the other end of the first overturning connecting rod.
4. The full-automatic double-station silicon wafer inserting machine according to claim 3,
the conveying belt comprises
The conveying chain is positioned between the turnover rod A and the turnover rod B;
a conveying driving wheel;
the conveying driving wheel and the conveying driven wheel are sleeved with the conveying chain; and
and the conveying driving motor is connected with the conveying driving wheel.
5. The full-automatic double-station silicon wafer inserting machine according to claim 1,
the second basket turning device comprises
The second overturning bracket is fixed on the frame;
the second overturning shaft is rotatably arranged on the second overturning bracket;
the second overturning seat is fixed on the second overturning shaft;
one end of the second overturning frame is fixed on a second overturning shaft;
the second overturning fixed baffle is fixed on one side of the second overturning frame;
the second overturning longitudinal baffle is fixed on one side of the second overturning frame and is positioned at one end of the second overturning shaft;
the second overturning clamping cylinder is fixed at the bottom of the other side of the second overturning frame;
the second overturning movable baffle is fixed on the second overturning clamping cylinder and corresponds to the second overturning fixed baffle;
one end of the second overturning connecting rod is fixed on the second overturning shaft; and
and one end of the second overturning cylinder is movably connected with the Likang of the second overturning connecting rod.
6. The full-automatic double-station silicon wafer inserting machine according to claim 1,
the insert device comprises
The inserting sheet horizontal movement linear module is fixed at the bottom of the frame; and
silicon chip insertion device, silicon chip insertion device is equipped with two, and all installs on the slip table of inserted sheet horizontal migration sharp module, silicon chip insertion device includes
The insert lifting linear module is vertically arranged and fixed on a sliding table of the insert horizontal moving linear module;
the silicon wafer conveying device is installed at the top of the insert lifting linear module;
the insert rack is fixed on a sliding table of the insert lifting linear module;
and the inserting piece clamping device is used for fixing the silicon wafer basket on the inserting piece frame.
7. The full-automatic double-station silicon wafer inserting machine according to claim 6,
the insert clamping device comprises
The upper pneumatic clamping jaw is fixed at the top of the card inserting frame; and
the lower pneumatic clamping jaw is fixed at the bottom of the inserting piece frame.
8. The full-automatic double-station silicon wafer inserting machine according to claim 6,
the silicon wafer inserting device comprises
The silicon wafer conveying plate is fixed at the top of the insert lifting linear module;
the silicon wafer conveying driving wheel is arranged at one end of the silicon wafer conveying plate;
the silicon wafer conveying motor is connected with the silicon wafer conveying driving wheel;
the silicon wafer conveying middle wheel is fixed at the middle position of the silicon wafer conveying plate;
the silicon wafer inserting wheel is fixed at the other end of the silicon wafer conveying plate and is positioned in the wafer inserting frame;
the driving conveying circular belt is sleeved on the silicon wafer conveying driving wheel and the silicon wafer conveying middle wheel; and
the silicon wafer conveying middle wheel and the silicon wafer inserting wheel are sleeved on the driven conveying circular belt.
9. The full-automatic double-station silicon wafer inserting machine according to claim 1,
the basket grabbing and conveying device comprises
The grabbing horizontal moving linear module is fixed at the top of the frame;
the grabbing connecting seat is fixed on the sliding table of the grabbing horizontal moving linear module;
the grabbing lifting device is fixed on the grabbing connecting seat;
the grabbing cross beam is fixed on the grabbing lifting device;
the lifting claw seats are arranged at the two ends of the grabbing cross beam in height;
the lifting claw linear bearings are fixed at two ends of the lifting claw seat;
the lifting claw slide rod is inserted on the lifting claw linear bearing in a sliding manner; and
the flower basket hanging claw is arranged on the hanging claw sliding rod.
10. The full-automatic double-station silicon wafer inserting machine according to claim 9,
still include anticollision detection device, anticollision detection device includes proximity switch or travel switch, proximity switch or travel switch all fix on the lifting claw seat, and all correspond with the basket lifting claw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920913985.5U CN209981187U (en) | 2019-06-18 | 2019-06-18 | Full-automatic double-station silicon wafer inserting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920913985.5U CN209981187U (en) | 2019-06-18 | 2019-06-18 | Full-automatic double-station silicon wafer inserting machine |
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| Publication Number | Publication Date |
|---|---|
| CN209981187U true CN209981187U (en) | 2020-01-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920913985.5U Expired - Fee Related CN209981187U (en) | 2019-06-18 | 2019-06-18 | Full-automatic double-station silicon wafer inserting machine |
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| Country | Link |
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| CN (1) | CN209981187U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114999976A (en) * | 2022-04-27 | 2022-09-02 | 苏州博众智能机器人有限公司 | Silicon wafer inserting machine and silicon wafer inserting method |
| CN115565922A (en) * | 2022-09-22 | 2023-01-03 | 无锡荣能半导体材料有限公司 | Automatic alternating double-track sorting and feeding machine for silicon wafers |
| CN118335668A (en) * | 2024-04-28 | 2024-07-12 | 安徽美达伦光伏科技有限公司 | Full-automatic silicon wafer inserting machine |
| WO2024199504A1 (en) * | 2023-03-30 | 2024-10-03 | Tcl中环新能源科技股份有限公司 | Empty basket replacement mechanism for wafer inserting machine |
-
2019
- 2019-06-18 CN CN201920913985.5U patent/CN209981187U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114999976A (en) * | 2022-04-27 | 2022-09-02 | 苏州博众智能机器人有限公司 | Silicon wafer inserting machine and silicon wafer inserting method |
| CN115565922A (en) * | 2022-09-22 | 2023-01-03 | 无锡荣能半导体材料有限公司 | Automatic alternating double-track sorting and feeding machine for silicon wafers |
| WO2024199504A1 (en) * | 2023-03-30 | 2024-10-03 | Tcl中环新能源科技股份有限公司 | Empty basket replacement mechanism for wafer inserting machine |
| CN118335668A (en) * | 2024-04-28 | 2024-07-12 | 安徽美达伦光伏科技有限公司 | Full-automatic silicon wafer inserting machine |
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