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CN209803029U - Combined collimating lens for CCD camera in full-field X-ray fluorescence imaging - Google Patents

Combined collimating lens for CCD camera in full-field X-ray fluorescence imaging Download PDF

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Publication number
CN209803029U
CN209803029U CN201920509823.5U CN201920509823U CN209803029U CN 209803029 U CN209803029 U CN 209803029U CN 201920509823 U CN201920509823 U CN 201920509823U CN 209803029 U CN209803029 U CN 209803029U
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CN
China
Prior art keywords
ccd camera
telescopic unit
pinhole collimator
fluorescence imaging
ray
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Withdrawn - After Issue
Application number
CN201920509823.5U
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Chinese (zh)
Inventor
单卿
熊根超
张新磊
邵金发
贾文宝
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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Priority to CN201920509823.5U priority Critical patent/CN209803029U/en
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Abstract

A combined collimating lens for a CCD camera in full-field X-ray fluorescence imaging comprises a lens shell, a telescopic unit, a focal length adjusting knob, a pinhole collimator assembly, an X-ray window assembly and CCD camera coupling threads, wherein the pinhole collimator assembly and the X-ray window assembly are arranged in the telescopic unit in front and at the back and are used for collimating characteristic X-rays emitted from the surface of a sample and shielding visible light so as to realize full-field X-ray fluorescence imaging. The lens can ensure that the pinhole collimator and the CCD camera chip are parallel and coaxial, the shielding of visible light is ensured in multiple ways, the distance between the pinhole collimator and the sample and the CCD chip is effectively changed, the requirements of different analysis samples on different amplification rates are met, and the full-field X-ray fluorescence imaging effect and the system stability are improved.

Description

Combined collimating lens for CCD camera in full-field X-ray fluorescence imaging
Technical Field
The utility model belongs to X ray fluorescence imaging field, concretely relates to combination collimating lens that is arranged in full field of X ray fluorescence imaging CCD camera is a combination collimating lens that is arranged in full field of X ray fluorescence imaging research sample surface chemical element two-dimensional distribution to the CCD camera.
Background
X-ray fluorescence (XRF) analysis is a well established analytical technique that can perform qualitative and quantitative analyses of elements in a sample, and has many applications in various fields such as environment, archaeology, biology and forensic science, and industry. However, with the progress of scientific technology and the need for scientific research, it is more desirable to study the spatial distribution of chemical elements in substances. X-ray fluorescence imaging is a technique in which primary X-rays generated by an excitation source such as an X-ray tube are irradiated onto a sample surface to generate characteristic X-rays corresponding to the kind of an element, and energy (or wavelength), quantity, and positional information of the characteristic X-rays are recorded with a detector to image the element on the surface of the sample to be analyzed. With other research approaches: compared with electron probe X-ray microanalysis (EPMA), Secondary Ionization Mass Spectrometry (SIMS) and the like, X-ray fluorescence imaging has good application and development prospects due to the advantages of being non-destructive, free of complex sample pretreatment, capable of analyzing samples in various forms and the like.
Commonly used methods include two methods, a microbeam scanning method and a full-field method. Microbeam scanning generally has a high analytical accuracy, but it requires the sample to remain fairly static and it requires a very long analysis time as the accuracy increases. In recent years, with the development of two-dimensional array detector CCD cameras, the pixel size has been reduced to 13 μm, and large area samples can be imaged in a shorter time using matched collimators (microchannel plates, polycapillaries, pinholes, etc.). The thickness of the micro-channel plate is about 1mm generally, and the collimation effect is poor. Although the multi-capillary tube has high precision, the process requirement is high, and the price is expensive. In contrast, pinholes are inexpensive, easily accessible and the collimation effect can meet the imaging requirements. At present, a pinhole collimator is arranged at the front end fixed position of a CCD camera chip, and the distance between the pinhole collimator and the chip is not easy to adjust; or the collimator is independently arranged at the front end of the camera, and the pinhole collimator is difficult to adjust and is parallel and coaxial with the chip. In the field of X-ray, an X-ray window is used to block visible light and transmit X-ray, and an expensive and toxic Be window or a 1-coated polymer film with high manufacturing requirements may Be used.
Therefore, be used for full field X ray fluorescence imaging to the CCD camera and must be equipped with collimater and X ray window, consider the drawback of current mode of operation, the utility model designs a combine the two and the direct mount reliable camera lens on CCD camera chip front end shell.
SUMMERY OF THE UTILITY MODEL
The utility model provides a to the not enough among the prior art, provide a combination collimating lens that is arranged in full field X ray fluorescence formation of image CCD camera.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
A combination collimating lens for a CCD camera in full-field X-ray fluorescence imaging, comprising: the device comprises a lens shell, a telescopic unit fastening screw, a focal length adjusting knob, a telescopic unit, a pinhole collimator assembly fastening ring, an X-ray window assembly fastening ring and CCD camera coupling threads; the rear end of the lens shell is provided with a CCD camera coupling thread which is used for coupling connection with a CCD camera front end shell; the telescopic unit is arranged in the lens shell, and the focal length adjusting knob is connected with the lens shell and the telescopic unit and used for adjusting the telescopic unit to move back and forth in the lens shell; the side surface of the lens shell is provided with a threaded hole matched with the fastening screw of the telescopic unit, and the telescopic unit is fastened by screwing the fastening screw of the telescopic unit; the pinhole collimator assembly is fixed at the front end of the telescopic unit through a pinhole collimator assembly fastening ring and used for directionally guiding the characteristic X-rays emitted by the sample to the CCD chip pixel array to obtain position information; the X-ray window assembly is fixed at the rear end of the telescopic unit through an X-ray window assembly fastening ring and used for shielding visible light and enabling X-rays to pass through.
In order to optimize the technical scheme, the specific measures adopted further comprise:
Furthermore, the focus adjusting knob is arranged around the telescopic unit, the telescopic unit is provided with an external thread, and the focus adjusting knob is provided with an internal thread matched with the external thread of the telescopic unit; the rear end of the focal length adjusting knob is provided with an annular bulge, the annular bulge is provided with an external thread, and the front end of the lens shell is provided with an internal thread matched with the external thread of the annular bulge.
Furthermore, the external thread of the telescopic unit has a larger thread pitch than the external thread of the annular protrusion, and the telescopic unit moves back and forth in the lens shell by rotating the focal length adjusting knob, so that the distance between the pinhole collimator assembly and the CCD camera chip is changed.
Furthermore, stepped holes are formed in the front end and the rear end of the telescopic unit, and internal threads are formed in the stepped holes; the pinhole collimator assembly fastening ring is provided with an external thread matched with the thread in the front end stepped hole, so that the pinhole collimator assembly is fixed in the front end stepped hole; the X-ray window assembly fastening ring is provided with an external thread matched with the internal thread of the rear-end stepped hole, so that the X-ray window assembly is fixed in the rear-end stepped hole.
furthermore, the pinhole collimator assembly comprises a lower plate, a pinhole collimator, an upper plate and a shielding sheet which are sequentially arranged from back to front; the lower plate and the upper plate fix the pinhole collimator in the middle and ensure that the pinhole collimator is parallel and coaxial with the CCD camera chip; the pinhole collimator directionally guides the characteristic X-ray emitted by the surface of the sample to the CCD chip pixel array so as to acquire position information and realize full-field X-ray fluorescence imaging; the shielding sheet prevents characteristic X-rays from passing through from other positions.
Furthermore, the lower plate and the upper plate are made of hard polymer plastic plates; the diameter of a pinhole of the pinhole collimator is not more than 50 mu m, the thickness of the pinhole collimator is equivalent to the diameter of the pinhole, and the pinhole collimator is made of a high atomic number element metal sheet; the diameter of the hole at the center of the shielding sheet is 500 μm, the thickness is not less than 100 μm, and the material is a high atomic number element metal sheet.
Further, the X-ray window assembly includes an inner ring, a black polyimide film, and an outer ring; the inner ring and the outer ring are mutually nested and are used for fixing the black polyimide film and ensuring the black polyimide film to be flat; the black polyimide film is used for shielding visible light but ensuring that X-rays can pass through.
Furthermore, the inner ring and the outer ring are made of flexible polymer plastic plates; the black polyimide film had a thickness of 50 μm.
The utility model has the advantages that: the utility model discloses a focus adjust knob connects camera lens shell and flexible unit and adjusts flexible unit back-and-forth movement in the camera lens shell, integrates X ray window subassembly and pinhole collimator subassembly at flexible unit rear end and front end, forms the combined lens of compactification, both can realize sheltering from and carrying out the large tracts of land quick imaging research to the collimation of sample emission characteristic X ray to the visible light in order to acquire positional information, can be convenient for again the focus adjust realize carrying out the analysis sample on element two-dimensional distribution. The black polyimide film with the thickness of about 50 mu m can effectively shield visible light but X rays can pass through, the pinhole collimator is directly arranged at the front end of the CCD camera through the fixing component, the parallel and coaxial arrangement of the pinhole collimator and the CCD camera chip can be effectively guaranteed, the collimating effect and the certainty of a test area on an analysis sample are greatly improved, the distance between the pinhole collimator and the CCD camera chip and the distance between the pinhole collimator and the analysis sample can be effectively changed by controlling the telescopic unit to move back and forth through the focal length adjusting knob, and therefore the amplification rate of the full-field X-ray fluorescence imaging system is changed to meet the imaging requirements of different test areas. Meanwhile, the shielding sheet in the pinhole component is a thicker metal sheet with high atomic number elements and a slightly larger aperture, so that the higher-energy X-rays can be effectively shielded, the characteristic X-rays emitted by the sample can only pass through the pinhole, and the accuracy of photon position information and the stability of an imaging system are improved. In addition, the pinhole collimator and the shielding sheet are positioned at the front end of the X-ray window, firstly, the visible light at most positions is shielded, and multiple guarantee is provided for shielding the visible light by matching with the black polyimide film.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
FIG. 2 is a schematic diagram of a pinhole collimator assembly.
FIG. 3 is a schematic view of an X-ray window assembly.
fig. 4 is an XRF spectrum in an embodiment of the invention.
Fig. 5 is a two-dimensional distribution diagram of sample elements in an embodiment of the present invention.
The reference numbers are as follows: the camera comprises a lens shell 10, a telescopic unit fastening screw 20, a focal length adjusting knob 30, a telescopic unit 40, a pinhole collimator assembly 50, a pinhole collimator assembly fastening ring 60, an X-ray window assembly 70, an X-ray window assembly fastening ring 80, CCD camera coupling threads 90, an annular protrusion 301, a lower plate 501, a pinhole collimator 502, an upper plate 503, a shielding sheet 504, an inner ring 701, a black polyimide film 702 and an outer ring 703.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings.
The combined collimating lens for the CCD camera in full-field X-ray fluorescence imaging as shown in FIG. 1 comprises the following structures: the camera comprises a lens shell 10, a telescopic unit fastening screw 20, a focal length adjusting knob 30, a telescopic unit 40, a pinhole collimator assembly 50, a pinhole collimator assembly fastening ring 60, an X-ray window assembly 70, an X-ray window assembly fastening ring 80 and CCD camera coupling threads 90.
The focal length adjusting knob 30 is used for connecting the lens housing 10 and the telescopic unit 40 and adjusting the telescopic unit 40 to move back and forth in the lens housing 10; the telescopic unit fastening screw 20 is used for fastening the telescopic unit 40; the telescopic unit 40 is provided with two stepped holes at the front and the rear for placing the pinhole collimator assembly 50 and the X-ray window assembly 70 respectively; a pinhole collimator assembly fastening ring 60 for fixing the pinhole collimator assembly 50; a pinhole collimator assembly 50 for directionally directing characteristic X-rays emitted by the sample onto the CCD camera chip pixel array to obtain positional information; an X-ray window assembly securing ring 80 for securing the X-ray window assembly 70; an X-ray window assembly 70 for blocking visible light but allowing X-rays to pass therethrough; the CCD camera coupling thread 90 is used for coupling with the CCD camera front end housing. The lens can ensure that the pinhole collimator and the CCD camera chip are parallel and coaxial, the shielding of visible light is ensured in multiple ways, the distance between the pinhole collimator and the sample and the CCD chip is effectively changed, the requirements of different analysis samples on different amplification rates are met, and the full-field X-ray fluorescence imaging effect and the system stability are improved.
The focus adjusting knob 30 is connected to the lens housing 10 and the telescopic unit 40 through a coupling screw, the telescopic unit 40 moves back and forth in the lens housing 10 by rotating the focus adjusting knob 30, the distance between the pinhole collimator 502 and the CCD camera chip is changed, and the fixing position of the fastening screw 20 of the telescopic unit is tightened. Both the front and rear ends of the telescopic unit 40 are provided with stepped holes having internal threads, and the pinhole collimator assembly 50 and the X-ray window assembly 70 are respectively fixed between the stepped holes and the fastening rings of the front and rear ends of the telescopic unit 40 by screwing the pinhole collimator assembly fastening ring 60 and the X-ray window assembly fastening ring 80 having external threads.
As shown in fig. 2a, 2b and 2c, the pinhole collimator assembly 50 includes a lower plate 501, a pinhole collimator 502, an upper plate 503 and a shielding sheet 504. The lower plate 501 and the upper plate 503 are used for fixing the pinhole collimator 502 and ensuring that the pinhole collimator is parallel to and coaxial with the CCD camera chip, and the lower plate and the upper plate are made of hard polymer plastic plates such as polyether-ether-ketone (PEEK) and the like. The pinhole collimator 502 is used for directionally guiding the characteristic X-rays emitted from the surface of the sample to the CCD chip pixel array to obtain position information to realize full-field X-ray fluorescence imaging, the diameter of the pinhole is not more than 50 μm, the thickness of the pinhole is equivalent to the diameter of the pinhole, and the pinhole is made of high atomic number element metal sheets such as tungsten W, lead Pb and the like. The shielding sheet 504 is used for preventing characteristic X-rays from passing through other positions, the diameter of the hole is about 500 mu m, the thickness of the hole is not less than 100 mu m, and the material is a high atomic number element metal sheet such as tungsten W, lead Pb and the like.
As shown in fig. 3, the X-ray window assembly 70 includes an inner ring 701, a black polyimide film 702, and an outer ring 703. The inner ring 701 and the outer ring 703 are mutually nested and used for fixing the black polyimide film 702 and ensuring the flatness of the black polyimide film, and the black polyimide film is made of a high polymer plastic plate with soft texture such as polyformaldehyde POM and the like and is black in color. The black polyimide film 702 is used to block visible light but allows X-rays to pass therethrough, and has a thickness of about 50 μm.
The pinhole collimator assembly 50 is located on one side of the front end sample surface of the lens, the X-ray window assembly 70 is located on one side of the CCD camera chip on the rear end of the lens, the shielding sheet 504 and the pinhole collimator 502 firstly shield most of visible light, and a black polyimide film 702 is matched to provide multiple guarantees for shielding the visible light.
Example 1: composite sample of zirconium (Zr) metal on one side and molybdenum (Mo) metal on one side
Zr is element No. 40, K absorption limit is 17.998keV, KαThe characteristic X-ray energy is 15.774keV, Kβthe characteristic X-ray energy is 17.666 keV; mo is element No. 42, K absorption limit is 20.002keV, KαThe characteristic X-ray energy is 17.478keV, KβThe characteristic X-ray energy is 19.607 keV. Zr and Mo metal blocks with the side length of 50mm and the thickness of 5mm are erected on a sample table side by side.
According to the structure schematic diagram shown in FIG. 1, the combined collimating lens for imaging the Zr-Mo metal interface is provided by using the technical scheme.
In this embodiment, turning the focus adjusting knob 30 to adjust the telescopic unit 40 to move back and forth can change the distance between the pinhole collimator 502 and the CCD camera lens between 43mm and 49.7 mm; pinhole collimator assembly 50: the lower plate 501 is 25mm in outer diameter, 15mm in inner diameter, 2mm in thickness and 1mm in step height, is made of a Polyetheretherketone (PEEK) plastic plate, the pinhole collimator 502 is 20mm in diameter, 50 μm in thickness and 50 μm in central pinhole diameter and is made of a tungsten metal sheet, the upper plate 503 is 20mm in outer diameter, 15mm in inner diameter and 1mm in thickness and is made of a Polyetheretherketone (PEEK) plastic plate, the shielding sheet 504 is 25mm in diameter, 100 μm in thickness and 500 μm in central hole diameter and is made of a tungsten metal sheet; in X-ray window assembly 70: the inner ring 701 has an outer diameter of 12.7mm, an inner diameter of 11.7mm, a thickness of 1mm and a height of 11mm and is made of a Polyformaldehyde (POM) plastic plate, the outer ring 703 has an outer diameter of 13.8mm, an inner diameter of 12.8mm, a thickness of 1mm and a height of 11mm and is made of a Polyformaldehyde (POM) plastic plate, and the black polyimide film 702 is 50 micrometers thick.
The magnification M of the full-field X-ray fluorescence imaging system is the distance L between the pinhole and the CCD camera chip1Distance L from pinhole to sample surface2As shown in equation (1):
In this embodiment, L1And L2Both are 45mm, and the magnification M is 1.
Use the utility model discloses a camera lens that is equipped with carries out full field X ray fluorescence imaging to Zr and Mo metal interface, and W target X-ray tube is worked under 40kV-800 mu A, and CCD camera exposure time is 200s, and the image that obtains 20 times exposure carries out data processing and obtains X ray fluorescence spectrum as shown in figure 4 and sample element two-dimensional distribution image as shown in figure 5 (Zr Kbeta characteristic X ray energy and Mo Ka overlap, so use Zr Ka characteristic X ray and Mo Ka characteristic X ray to carry out position resolution). It can be seen that the utility model discloses enable the CCD camera and work effectively and carry out the collimation effectively to the characteristic X ray of sample transmission in X ray energy scope for full-field X ray fluorescence imaging is reliably gone on more portably.
It should be noted that, in the present invention, the terms "upper", "lower", "left", "right", "front", "back", etc. are used for the sake of clarity only, and are not used to limit the scope of the present invention, and the relative relationship changes or adjustments may be made without substantial technical changes.
Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, a plurality of modifications and decorations without departing from the principle of the present invention should be considered as the protection scope of the present invention.

Claims (8)

1. A combination collimating lens for a CCD camera in full-field X-ray fluorescence imaging, comprising: the device comprises a lens shell (10), a telescopic unit fastening screw (20), a focal length adjusting knob (30), a telescopic unit (40), a pinhole collimator assembly (50), a pinhole collimator assembly fastening ring (60), an X-ray window assembly (70), an X-ray window assembly fastening ring (80) and CCD camera coupling threads (90); the rear end of the lens shell (10) is provided with a CCD camera coupling thread (90) which is used for coupling connection with a CCD camera front end shell; the telescopic unit (40) is arranged in the lens shell (10), and the focal length adjusting knob (30) is connected with the lens shell (10) and the telescopic unit (40) and is used for adjusting the telescopic unit (40) to move back and forth in the lens shell (10); the side surface of the lens shell (10) is provided with a threaded hole matched with the telescopic unit fastening screw (20), and the telescopic unit (40) is fastened by screwing the telescopic unit fastening screw (20); the pinhole collimator assembly (50) is fixed at the front end of the telescopic unit (40) through a pinhole collimator assembly fastening ring (60) and used for directionally guiding characteristic X-rays emitted by a sample to the CCD chip pixel array so as to acquire position information; the X-ray window assembly (70) is fixed at the rear end of the telescopic unit (40) through an X-ray window assembly fastening ring (80) and used for blocking visible light but enabling X-rays to pass through.
2. The combined collimating lens for a CCD camera in full field X-ray fluorescence imaging as in claim 1, wherein: the focal length adjusting knob (30) is arranged around the telescopic unit (40), the telescopic unit (40) is provided with an external thread, and the focal length adjusting knob (30) is provided with an internal thread matched with the external thread of the telescopic unit (40); the rear end of focus adjust knob (30) is equipped with annular arch (301), annular arch (301) are equipped with the external screw thread, and the front end of camera lens shell (10) is equipped with the internal thread with annular arch (301) external screw thread looks adaptation.
3. The combined collimating lens for a CCD camera in full field X-ray fluorescence imaging as in claim 2, wherein: the external thread of the telescopic unit (40) has a larger thread pitch than that of the annular bulge (301), and the telescopic unit (40) moves back and forth in the lens shell (10) by rotating the focal length adjusting knob (30), so that the distance between the pinhole collimator assembly (50) and the CCD camera chip is changed.
4. The combined collimating lens for a CCD camera in full field X-ray fluorescence imaging as in claim 1, wherein: stepped holes are formed in the front end and the rear end of the telescopic unit (40), and internal threads are formed in the stepped holes; the pinhole collimator assembly fastening ring (60) is provided with an external thread matched with the thread in the front end stepped hole, so that the pinhole collimator assembly (50) is fixed in the front end stepped hole; the X-ray window assembly fastening ring (80) is provided with an external thread matched with the internal thread of the rear-end stepped hole, so that the X-ray window assembly (70) is fixed in the rear-end stepped hole.
5. The combined collimating lens for a CCD camera in full field X-ray fluorescence imaging as in claim 1, wherein: the pinhole collimator assembly (50) comprises a lower plate (501), a pinhole collimator (502), an upper plate (503) and a shielding sheet (504) which are sequentially arranged from back to front; the lower plate (501) and the upper plate (503) fix the pinhole collimator (502) in the middle and ensure that the pinhole collimator is parallel and coaxial with the CCD camera chip; the pinhole collimator (502) directs characteristic X-rays emitted by the sample surface onto the CCD chip pixel array directionally to acquire position information to realize full-field X-ray fluorescence imaging.
6. The combined collimating lens for a CCD camera in full-field X-ray fluorescence imaging as in claim 5, wherein: the lower plate (501) and the upper plate (503) are made of hard polymer plastic plates; the diameter of a pinhole of the pinhole collimator (502) is not more than 50 mu m, the thickness of the pinhole collimator is equivalent to the diameter of the pinhole, and the pinhole collimator is made of a high atomic number element metal sheet; the diameter of the hole at the center of the shielding sheet (504) is 500 μm, the thickness is not less than 100 μm, and the material is a high atomic number element metal sheet.
7. The combined collimating lens for a CCD camera in full field X-ray fluorescence imaging as in claim 1, wherein: the X-ray window assembly (70) comprises an inner ring (701), a black polyimide film (702), and an outer ring (703); the inner ring (701) and the outer ring (703) are nested with each other and used for fixing the black polyimide film (702) and ensuring the flatness of the black polyimide film; the black polyimide film (702) is used to block visible light but ensure that X-rays can pass through.
8. The combined collimating lens for a CCD camera in full field X-ray fluorescence imaging as in claim 7, wherein: the inner ring (701) and the outer ring (703) are made of flexible polymer plastic plates; the black polyimide film (702) had a thickness of 50 μm.
CN201920509823.5U 2019-04-15 2019-04-15 Combined collimating lens for CCD camera in full-field X-ray fluorescence imaging Withdrawn - After Issue CN209803029U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109991257A (en) * 2019-04-15 2019-07-09 南京航空航天大学 Combination for CCD camera in the imaging of whole audience x-ray fluorescence collimates camera lens

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109991257A (en) * 2019-04-15 2019-07-09 南京航空航天大学 Combination for CCD camera in the imaging of whole audience x-ray fluorescence collimates camera lens
CN109991257B (en) * 2019-04-15 2024-02-23 南京航空航天大学 Combined collimating lens for CCD camera in full-field X-ray fluorescence imaging

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