CN209783706U - Measurement correcting unit to gas flowmeter - Google Patents
Measurement correcting unit to gas flowmeter Download PDFInfo
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- CN209783706U CN209783706U CN201920609399.1U CN201920609399U CN209783706U CN 209783706 U CN209783706 U CN 209783706U CN 201920609399 U CN201920609399 U CN 201920609399U CN 209783706 U CN209783706 U CN 209783706U
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- gas flowmeter
- gas receiver
- intake pipe
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Abstract
the utility model provides a measurement correcting unit to gas flowmeter, including the gas receiver, the gas receiver is connected with heat exchanger and first pressure gauge respectively, and the gas receiver is connected with the vacuum pump through the separation valve, and the gas receiver is provided with a first intake pipe, and the end of giving vent to anger of first intake pipe is connected with the gas receiver, has set gradually first hand valve, first air-vent valve, second pressure gauge, first pneumatic valve, the gas flowmeter that awaits measuring, second pneumatic valve from the inlet end to the end of giving vent to anger in the first intake pipe. The utility model provides a measurement correcting unit to gas flowmeter can detect gas flowmeter's actual flow value, obtains its actual flow value and sets for the relation of flow value, makes gas flowmeter's actual flow reach the required flow of technology.
Description
Technical Field
The utility model relates to a measuring device especially relates to a be used for examining gas flowmeter actual flow value and whether unanimous measurement correcting unit of required flow value.
Background
The semiconductor equipment can use a plurality of different gas flowmeters, and the flow rate of a large number of newly-delivered flowmeters or repaired flowmeters on a machine table has deviation or poor linearity. In the semiconductor industry, the production task is heavy, the machine time is precious, and the machine output value is high and needs to be saved every minute and every second. Therefore, if a production tool is used to test and adjust the gas flow meter, much time is wasted on the production tool.
In addition, sometimes the process requirement is not met, the gas flowmeter is intentionally adjusted to be larger or smaller by people, which is impossible to realize on a production machine.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is to overcome current defect, provide a measurement correcting unit to gas flowmeter, make gas flowmeter's actual flow reach the required flow of technology.
In order to solve the technical problem, the utility model provides a following technical scheme:
The utility model provides a measurement correcting unit to gas flowmeter, includes the gas receiver, the gas receiver is connected with heat exchanger and first pressure gauge respectively, the gas receiver is connected with the vacuum pump through the separation valve, the gas receiver is provided with a first intake pipe, the end of giving vent to anger of first intake pipe with the gas receiver is connected, from the inlet end to the end of giving vent to anger in the first intake pipe set gradually first hand valve, first air-vent valve, second pressure gauge, first pneumatic valve, the gas flowmeter that awaits measuring, second pneumatic valve.
furthermore, the air storage cylinder is provided with a second air inlet pipe, the air outlet end of the second air inlet pipe is connected with the air storage cylinder, and a second hand valve and a second pressure regulating valve are sequentially arranged on the second air inlet pipe from the air inlet end to the air outlet end.
The utility model relates to a measurement correcting unit to gas flowmeter can detect gas flowmeter's actual flow value, obtains its actual flow value and sets for the relation of flow value, makes gas flowmeter's actual flow reach the required flow of technology.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
Fig. 1 is a schematic structural diagram of the present invention.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.
As shown in fig. 1, a measurement correcting unit to gas flowmeter, including gas receiver 1, gas receiver 1 is connected with heat exchanger 2 and first pressure gauge 3 respectively, gas receiver 1 is connected with vacuum pump 5 through separation valve 4, gas receiver 1 is provided with a first intake pipe, the end of giving vent to anger of first intake pipe is connected with gas receiver 1, from the inlet end to the end of giving vent to anger in the first intake pipe set gradually first hand valve 6, first pressure regulating valve 7, second pressure gauge 8, first pneumatic valve 9, the gas flowmeter 10 that awaits measuring, second pneumatic valve 11.
The working principle is as follows:
firstly, opening a separation valve, utilizing a vacuum pump to pump the interior of the air storage cylinder into a vacuum state, then closing the separation valve, recording the numerical value of a first pressure gauge, and then controlling a heat exchanger to maintain the temperature in the air storage cylinder at 20 ℃ (because the density of gas is related to the temperature); opening a first hand valve, adjusting the pressure regulating valve to required pressure according to different gases (a second pressure gauge is used for checking the accuracy of the pressure regulating valve), setting a flow value for the gas flowmeter to be tested, then opening a first pneumatic valve and a second pneumatic valve, enabling test gas to enter an air storage cylinder, closing the first pneumatic valve and the second pneumatic valve after a certain time, recording the numerical value of the first pressure gauge, calculating to obtain the mass of the gas according to the volume of the air storage cylinder and the difference value of the numerical values recorded in two times before and after the first pressure gauge, calculating to obtain an actual flow value according to the sectional area of the gas flowmeter to be tested, comparing to obtain the relation between the set flow value and the actual flow value, if the two are consistent, checking the gas flowmeter to be tested to be qualified, putting the gas flowmeter into use, if the two are not consistent, opening a blocking valve, vacuumizing the air storage cylinder, then repeatedly executing the operation and, and finishing the correction of the flowmeter to be measured until the actual flow value is consistent with the flow value required by the user, and putting the flowmeter to be measured into use.
The air storage cylinder 1 is provided with a second air inlet pipe, the air outlet end of the second air inlet pipe is connected with the air storage cylinder, and a second hand valve 12 and a second pressure regulating valve 13 are sequentially arranged on the second air inlet pipe from the air inlet end to the air outlet end. After the test is finished, the second hand valve is opened, the second pressure regulating valve is slowly opened, nitrogen is filled into the air storage cylinder, the air storage cylinder is enabled to be restored to the atmospheric pressure state, the internal and external pressure difference of the air storage cylinder is guaranteed, and meanwhile, the nitrogen is inert gas and can protect each part.
The utility model relates to a measurement correcting unit to gas flowmeter can detect gas flowmeter's actual flow value, obtains its actual flow value and sets for the relation of flow value, makes gas flowmeter's actual flow reach the required flow of technology.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (2)
1. A measurement correction device for a gas flowmeter, characterized in that: including the gas receiver, the gas receiver is connected with heat exchanger and first pressure gauge respectively, the gas receiver is connected with the vacuum pump through the separation valve, the gas receiver is provided with a first intake pipe, the end of giving vent to anger of first intake pipe with the gas receiver is connected, from the intake end to the end of giving vent to anger in the first intake pipe set gradually first hand valve, first air-vent valve, second pressure gauge, first pneumatic valve, the gas flowmeter that awaits measuring, second pneumatic valve.
2. A measurement correction device for a gas flow meter according to claim 1, characterized in that: the air storage cylinder is provided with a second air inlet pipe, the air outlet end of the second air inlet pipe is connected with the air storage cylinder, and a second hand valve and a second pressure regulating valve are sequentially arranged on the second air inlet pipe from the air inlet end to the air outlet end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920609399.1U CN209783706U (en) | 2019-04-29 | 2019-04-29 | Measurement correcting unit to gas flowmeter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920609399.1U CN209783706U (en) | 2019-04-29 | 2019-04-29 | Measurement correcting unit to gas flowmeter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209783706U true CN209783706U (en) | 2019-12-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920609399.1U Active CN209783706U (en) | 2019-04-29 | 2019-04-29 | Measurement correcting unit to gas flowmeter |
Country Status (1)
| Country | Link |
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| CN (1) | CN209783706U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112113639A (en) * | 2020-10-13 | 2020-12-22 | 常州艾恩希纳米镀膜科技有限公司 | Gas mass flow meter calibration system for CVD coating equipment |
-
2019
- 2019-04-29 CN CN201920609399.1U patent/CN209783706U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112113639A (en) * | 2020-10-13 | 2020-12-22 | 常州艾恩希纳米镀膜科技有限公司 | Gas mass flow meter calibration system for CVD coating equipment |
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