CN208634065U - A kind of anti-vibration molecular pump - Google Patents
A kind of anti-vibration molecular pump Download PDFInfo
- Publication number
- CN208634065U CN208634065U CN201821129505.8U CN201821129505U CN208634065U CN 208634065 U CN208634065 U CN 208634065U CN 201821129505 U CN201821129505 U CN 201821129505U CN 208634065 U CN208634065 U CN 208634065U
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- Prior art keywords
- ball bearing
- bearing
- impeller component
- vibration
- movable impeller
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- 238000005086 pumping Methods 0.000 claims abstract description 15
- 239000000919 ceramic Substances 0.000 claims description 21
- 230000000903 blocking effect Effects 0.000 claims description 11
- 238000013016 damping Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229920002430 Fibre-reinforced plastic Polymers 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 239000011151 fibre-reinforced plastic Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- 238000005457 optimization Methods 0.000 abstract description 6
- 238000005461 lubrication Methods 0.000 abstract description 4
- 230000036316 preload Effects 0.000 abstract description 2
- 239000003921 oil Substances 0.000 description 34
- 238000010586 diagram Methods 0.000 description 6
- 239000010687 lubricating oil Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000004918 carbon fiber reinforced polymer Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
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- Non-Positive Displacement Air Blowers (AREA)
- Support Of The Bearing (AREA)
Abstract
The utility model discloses a kind of anti-vibration molecular pumps, molecular pump includes pump case, left ball bearing assembly, right ball bearing assembly, left fulcrum bearing, motor stator, rotor, outer groove drum, movable impeller component, left stator blade, right stator blade, right fulcrum bearing, left end cap and right end cap, rotor and movable impeller component assembly are integral, motor stator and the assembly of left fulcrum bearing are integral, the movable impeller component left and right ends are respectively by left ball bearing assembly, right ball bearing assembly bearing, the rotor being fixed thereon is under motor stator Magnetic force tracting with movable impeller component high speed rotation.The utility model reduces the oscillating region of movable impeller component orbit of shaft center using the bearing lubrication, preload, vibration-proof structure of optimization, the double-turbine structure of design can be such that pumping performance doubles, to solve the problems such as vacuum systems such as portable instrument, vehicular instrument performance is insufficient, easy to damage.
Description
Technical field
The utility model belongs to technical field of vacuum, and in particular to a kind of overall structure of environment resistant vibration molecular pump.
Background technique
Molecular pump is the pumping equipment of mainstream, is the critical component of analysis instrument.Portable instrument and vehicle-mounted instrument
Application environment it is very severe, not only pumping performance requires high, and vibrate with impact by force, the temperature difference it is big, molecular pump allows for
Bear very high ambient vibration.Existing molecular pump cannot take into account pumping performance and anti-vibration, cause performance insufficient or easily send out
Raw failure.
Patent (bearing support structures of 200580021122.8 turbomolecular pumps) uses thermally conductive gel bearing support and will
Bearing heat conducts, and thermally conductive gel complex process is perfused, and cost is very high.(200810175827.0 is a kind of using leaf for patent
The miniature molecular pump of disc rotor) multilayer movable vane piece is used, it is limited by technique, breathing area is smaller to cause pumping speed not high.Patent
(200880104968.1 turbomolecular pump) reduces bear vibration using elastic vibrating rotating ring, and elastic vibration ring structure is more complex, and
And Iterative Design is wanted just to be able to satisfy damping requirements.
Utility model content
In order to improve the environmental suitability of molecular pump, the utility model provides a kind of knot of tenable environment vibration molecular pump
Structure.The movable impeller component both ends of molecular pump are supported by ball bearing assembly, by supporting parameter optimization, reduce circular runout and axis
To play, the ability of environment resistant vibration is improved.Double-turbine structure is used simultaneously, improves pumping performance.
To achieve the above objectives, the present invention provides the following technical solutions:
A kind of anti-vibration molecular pump, molecular pump include pump case, left ball bearing assembly, right ball bearing assembly, left fulcrum bearing, electricity
Machine stator, rotor, outer groove drum, movable impeller component, left stator blade, right stator blade, right fulcrum bearing, left end cap and right end cap,
Rotor and movable impeller component assembly are integral, and motor stator and the assembly of left fulcrum bearing are integral, left stator blade, outer groove drum,
Left fulcrum bearing, left ball bearing assembly are successively packed into pump case from left side and are fixed with left end cap, movable impeller component, right stator blade, the right side
Fulcrum bearing, right ball bearing assembly are packed into pump case from right side and are fixed with right end cap；The movable impeller component left and right ends difference
It is supported by left ball bearing assembly, right ball bearing assembly, the rotor being fixed thereon is under motor stator Magnetic force tracting with dynamic
Impeller assembly high speed rotation.
Preferably, left ball bearing assembly, right ball bearing assembly are respectively by oil transportation cone, oil storage felt, bearing block, bearing cap, more
Hole matter oil return column, ceramic ball bearing, oil return felt, cushion blocking are assembled, by Porous oil return column, oil return felt, cushion blocking, ceramics
Ball bearing is put into bearing block, is fixed with bearing cap；Movable impeller component is pressed into ceramic ball bearing, is bored and is fixed with oil transportation, be put into storage
Malthoid, the two gentle touchdown；When movable impeller component high speed rotation, oil transportation cone brings the lubricating oil in oil storage felt into Ceramic Balls axis
It holds, returns to oil storage felt by oil return felt, Porous oil return column, realize the circulation of lubricating oil.
Preferably, the rotatable pretightning force to adjust ceramic ball bearing of the bearing cap reaches reasonable value, extends the bearing longevity
Life.
Preferably, the movable impeller component both ends reduce ambient vibration to dynamic by ceramic ball bearing and vibration damping pad supports
The influence of impeller assembly；Cushion blocking uses high damping vibration attenuation material, and shore hardness takes 60~70, rigidity take 150N/mm~
300N/mm。
Preferably, the movable impeller component is made of movable vane wheel, pull cylinder and rotor；Pull cylinder is increased using carbon fiber
Strong plastics, with movable vane wheel elastic conjunction；Movable vane wheel is equipped with the twin turbines of angle symmetrical, and blade tilt takes 35 °~45 °, can incite somebody to action
Pumping performance doubles.
The utility model uses high damping vibration attenuation pad supports, effectively inhibits ambient vibration to movable impeller component orbit of shaft center
Influence.
Ceramic ball bearing uses micro- oil lubrication mode and pretightning force adjustable structure, extends service life.
Movable impeller component is supported using the double-turbine structure of optimization, further improves pumping performance.
The anti-vibration molecular pump beneficial effect of the utility model is: using bearing lubrication, preload, the vibration-proof structure drop of optimization
The low oscillating region of movable impeller component orbit of shaft center, the double-turbine structure of design can be such that pumping performance doubles, to solve
The problems such as certainly vacuum systems such as portable instrument, vehicular instrument performance is insufficient, easy to damage.
Detailed description of the invention
Fig. 1 is the anti-vibration molecular pump structural schematic diagram of the utility model；
Fig. 2 is the ball bearing assembly schematic diagram in Fig. 1；
Fig. 3 is the movable impeller component schematic diagram in Fig. 1；
In figure: 1. pump case, 3. outer 7. movable impeller component 9. of groove drum of left 4. motor stator of fulcrum bearing, 5. rotor 6.
12. oil storage felt, 13. bearing block, 14. bearing cap, 15. Porous oil return column, 16. ceramic ball bearing is bored in right 2. oil transportation of fulcrum bearing
17. 18. cushion blocking of oil return felt, 19. movable vane wheel, 20. pull cylinder, 21. right 23. whirlpool of ball bearing assembly of left ball bearing assembly 22.
Take turns 81. right 10. left end cap of stator blade, 11. right end caps of left stator blade 82..
Specific embodiment
Fig. 1 is the anti-vibration molecular pump structural schematic diagram of the utility model, and Fig. 2 is the ball bearing assembly schematic diagram in Fig. 1,
Fig. 3 is the movable impeller component schematic diagram in Fig. 1.
In Fig. 1,2,3, the anti-vibration molecular pump of the utility model, including pump case 1, left ball bearing assembly 21, right ball axis
Bearing assembly 22, left fulcrum bearing 3, motor stator 4, rotor 5, outer groove drum 6, movable impeller component 7, left stator blade 81, right stator blade
Piece 82, right fulcrum bearing 9, left end cap 10, right end cap 11.Its connection relationship is that rotor 5 and movable impeller component 7 are assembled into one
Body, motor stator 4 and left fulcrum bearing 3 are assembled integrally, left stator blade 81, outer groove drum 6, left fulcrum bearing 3, left ball bearing assembly 21
Successively pump case 1 and fixed, movable impeller component 7, right stator blade 82, right fulcrum bearing 9, right ball bearing with left end cap 10 are packed into from left side
Component 22 is packed into pump case 1 from right side and is fixed with right end cap 11.7 left and right ends of movable impeller component are respectively by left ball bearing
Component 21, right ball bearing assembly 22 support, and the rotor 5 being fixed thereon is under 4 Magnetic force tracting of motor stator with movable vane wheel
7 high speed rotation of component.
The indoor gas molecule of vacuum enters the cavity between pump case 1 and movable impeller component 7 from air inlet, in dynamic impeller sets
Exhaust outlet is reached along air flue under the action of double turbine and left stator blade 81, right stator blade 82, outer groove drum 6 on part 7, by prime
Pumping is discharged into atmosphere, to reduce the pressure of vacuum chamber.Arrow in figure indicates the direction of gas molecule migration.
Left ball bearing assembly 21, right ball bearing assembly 22 are respectively by oil transportation cone 11, oil storage felt 12 and bearing block 13, bearing cap
14, Porous oil return column 15, ceramic ball bearing 16, oil return felt 17, cushion blocking 18 are assembled.By Porous oil return column 15, return
Malthoid 17, cushion blocking 18, ceramic ball bearing 16 are put into bearing block 13, fixed with bearing cap 14.Movable impeller component 7 is pressed into and is made pottery
Porcelain ball bearing 16, it is fixed with oil transportation cone 11, it is put into oil storage felt 12, the two gentle touchdown.It is defeated when 7 high speed rotation of movable impeller component
Oil cone 11 brings the lubricating oil in oil storage felt 12 into ceramic ball bearing 16, returns to storage by oil return felt 17, Porous oil return column 15
Malthoid 12 realizes the circulation of lubricating oil.Cushion blocking 18 uses high damping material, can effectively reduce the vibration of ceramic ball bearing 16.
The pretightning force of 14 adjustable ceramic ball bearing 16 of swivel bearing lid reaches reasonable value, extends bearing life.Movable impeller component 7
Left and right ends are supported by left ball bearing assembly 21, right ball bearing assembly 22 respectively, reduce circular runout and axial float, therefore
Improve the ability of environment resistant vibration.Movable impeller component 7 is made of movable vane wheel 19, pull cylinder 20 and rotor 5.Pull cylinder
20 use carbon fibre reinforced plastic, with 19 elastic conjunction of movable vane wheel.Rotor 5 is bonded on movable vane wheel 19, with motor stator
4 collective effects drive 7 high speed rotation of movable impeller component.Movable vane wheel 19 devises twin turbines, blade tilt and quantity by calculating
Optimization, pumping performance can be doubled.
7 both ends of movable impeller component are supported by ceramic ball bearing 16 and cushion blocking 18, reduce ambient vibration to dynamic
The influence of 7 orbit of shaft center of impeller assembly.Cushion blocking 18 uses high damping vibration attenuation material, and shore hardness takes 60~70, and rigidity takes
150N/mm~300N/mm.
Lubricating oil needed for the ceramic ball bearing 16 brings ceramic ball bearing 16 into from oil storage felt 12, oil transportation cone 11, then
Oil storage felt 12 is returned by oil return felt 17, Porous oil return column 15, realizes the circulation of lubricating oil.
The rotatable pretightning force to adjust ceramic ball bearing 16 of the bearing cap 14 reaches reasonable value, extends the bearing longevity
Life.
The movable impeller component 7 is made of movable vane wheel 19, pull cylinder 20 and rotor 5.Pull cylinder 20 uses carbon fiber
Reinforced plastics is tieed up, with 19 elastic conjunction of movable vane wheel.Movable vane wheel 19 devises the twin turbines of angle symmetrical, blade tilt take 35 °~
45 °, pumping performance can be doubled.
The anti-vibration molecular pump working condition of the utility model be such that movable impeller component by ball bearing assembly bearing,
Motor stator drive high speed rotation, using gas molecule absorption reflection and viscous traction mechanism, using movable vane wheel turbine and
Pull cylinder constantly drives the indoor gas molecule of vacuum to exhaust outlet from air inlet, then is discharged into atmosphere by fore pump, to reduce
The indoor pressure of vacuum.Movable impeller component uses high damping vibration attenuation pad supports, effectively inhibits ambient vibration to movable impeller component
The influence of orbit of shaft center.Ceramic ball bearing uses micro- oil lubrication mode and pretightning force adjustable structure, extends service life.Bearing
Movable impeller component further improves pumping performance using the double-turbine structure of optimization.
Stability and environmental suitability are one of key performances of molecular pump, improve antivibration kinetic force, can satisfy portable
The rigors to molecular pump such as formula instrument and vehicle-mounted instrument.
The ability that the vibration of molecular pump tenable environment can be effectively improved using the utility model, significantly improves the pumping of molecular pump
Performance meets the requirement of portable instrument, vehicle-mounted instrument to vacuum system.
Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention, it is not limited to this
Utility model, although the utility model is described in detail with reference to the foregoing embodiments, for those skilled in the art
For, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic
It is equivalently replaced.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on,
It should be included within the scope of protection of this utility model.
Claims (5)
1. a kind of anti-vibration molecular pump, which is characterized in that including pump case (1), left ball bearing assembly (21), right ball bearing assembly
(22), left fulcrum bearing (3), motor stator (4), rotor (5), outer groove drum (6), movable impeller component (7), left stator blade
(81), right stator blade (82), right fulcrum bearing (9), left end cap (10) and right end cap (11), rotor (5) and movable impeller component
(7) assembly is integral, and integral, described movable impeller component (7) left and right ends are assembled in motor stator (4) and left fulcrum bearing (3)
It is supported respectively by left ball bearing assembly (21), right ball bearing assembly (22), the rotor (5) being fixed thereon is in motor stator
(4) with movable impeller component (7) high speed rotation under Magnetic force tracting.
2. a kind of anti-vibration molecular pump according to claim 1, it is characterised in that: left ball bearing assembly (21), right ball axis
Bearing assembly (22) respectively by oil transportation cone (2), oil storage felt (12), bearing block (13), bearing cap (14), Porous oil return column (15),
Ceramic ball bearing (16), oil return felt (17), cushion blocking (18) are assembled.
3. a kind of anti-vibration molecular pump according to claim 2, it is characterised in that: the bearing cap (14) it is rotatable with
The pretightning force for adjusting ceramic ball bearing (16) reaches reasonable value, extends bearing life.
4. a kind of anti-vibration molecular pump according to claim 2, it is characterised in that: movable impeller component (7) both ends by
Ceramic ball bearing (16) and cushion blocking (18) bearing, reduce influence of the ambient vibration to movable impeller component (7) orbit of shaft center；Subtract
Vibration pad (18) uses high damping vibration attenuation material, and shore hardness takes 60~70, and rigidity takes 150N/mm~300N/mm.
5. a kind of anti-vibration molecular pump according to claim 1, it is characterised in that: the movable impeller component (7) is by movable vane
Take turns (19), pull cylinder (20) and rotor (5) composition；Pull cylinder (20) uses carbon fibre reinforced plastic, with movable vane wheel (19)
Elastic conjunction；Movable vane wheel (19) is equipped with the twin turbines (23) of angle symmetrical, and blade tilt takes 35 °~45 °, can be by pumping performance
It doubles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821129505.8U CN208634065U (en) | 2018-07-17 | 2018-07-17 | A kind of anti-vibration molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821129505.8U CN208634065U (en) | 2018-07-17 | 2018-07-17 | A kind of anti-vibration molecular pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208634065U true CN208634065U (en) | 2019-03-22 |
Family
ID=65739137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821129505.8U Active CN208634065U (en) | 2018-07-17 | 2018-07-17 | A kind of anti-vibration molecular pump |
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| Country | Link |
|---|---|
| CN (1) | CN208634065U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108678975A (en) * | 2018-07-17 | 2018-10-19 | 中国工程物理研究院机械制造工艺研究所 | A kind of anti-vibration molecular pump |
| CN112343853A (en) * | 2020-11-09 | 2021-02-09 | 上海裕达实业有限公司 | Molecular pump high-speed bearing oil lubrication structure |
| CN113323909A (en) * | 2021-07-08 | 2021-08-31 | 中国工程物理研究院机械制造工艺研究所 | Damping bearing seat and turbo molecular pump |
-
2018
- 2018-07-17 CN CN201821129505.8U patent/CN208634065U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108678975A (en) * | 2018-07-17 | 2018-10-19 | 中国工程物理研究院机械制造工艺研究所 | A kind of anti-vibration molecular pump |
| CN112343853A (en) * | 2020-11-09 | 2021-02-09 | 上海裕达实业有限公司 | Molecular pump high-speed bearing oil lubrication structure |
| CN113323909A (en) * | 2021-07-08 | 2021-08-31 | 中国工程物理研究院机械制造工艺研究所 | Damping bearing seat and turbo molecular pump |
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