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CN208614257U - Linear motion platform - Google Patents

Linear motion platform Download PDF

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Publication number
CN208614257U
CN208614257U CN201821209600.9U CN201821209600U CN208614257U CN 208614257 U CN208614257 U CN 208614257U CN 201821209600 U CN201821209600 U CN 201821209600U CN 208614257 U CN208614257 U CN 208614257U
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mover
guide member
seat
axis direction
linear
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贺云波
王波
刘青山
刘凤玲
陈桪
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Guangdong Ada Semiconductor Equipment Co ltd
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Guangdong Ada Intelligent Equipment Co Ltd
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Abstract

The utility model discloses a kind of linear motion platforms, comprising: pedestal;First kinematic nest and foot guide cooperate, and the first kinematic nest can opposite base moved back and forth along first axle direction;Second kinematic nest is set to above the first kinematic nest, and the second kinematic nest and the first kinematic nest guiding cooperate, and the second kinematic nest can be moved back and forth with respect to the first kinematic nest along second axis direction, and second axis direction and first axle direction are arranged in angle;Mutually the first guide part and the second guide part of guiding cooperation, the first guide part are fixedly arranged in the second kinematic nest, and the second guide part is arranged along first axle direction;First mover is connect with the first kinematic nest, and the first mover can be moved back and forth along first axle direction;Second mover is connect with the second guide part, and the second mover can be moved back and forth along second axis direction.The mover of the linear motion platform of the utility model, the mover of the first driving mechanism and the second driving mechanism can be non-interference, and control precision is high.

Description

直线运动平台Linear motion platform

技术领域technical field

本实用新型涉及驱动装置技术领域,具体涉及一种直线运动平台。The utility model relates to the technical field of driving devices, in particular to a linear motion platform.

背景技术Background technique

随着机械加工过程中对加工精度的要求不断提高,对运动平台的控制精度要求也在不断的提高。With the continuous improvement of the requirements for machining accuracy in the machining process, the requirements for the control accuracy of the motion platform are also constantly improved.

传统的直线运动平台中,第一驱动机构的动子在沿第一轴线方向运动的过程中,会使得第二驱动机构的动子也会沿着第一轴线方向运动,导致第一驱动机构的负载变大,影响控制精度。In the traditional linear motion platform, when the mover of the first drive mechanism moves along the first axis, the mover of the second drive mechanism will also move along the first axis, resulting in the movement of the first drive mechanism. When the load becomes larger, the control accuracy is affected.

发明内容SUMMARY OF THE INVENTION

基于此,有必要提供一种直线运动平台,第一驱动机构的动子与第二驱动机构的动子能够互不干涉,控制精度高。Based on this, it is necessary to provide a linear motion platform, in which the mover of the first driving mechanism and the mover of the second driving mechanism can not interfere with each other, and the control precision is high.

其技术方案如下:Its technical solutions are as follows:

一种直线运动平台,包括:基座;第一运动座,所述第一运动座与所述基座导向配合,且所述第一运动座能够相对所述基座沿第一轴线方向往复运动;第二运动座,所述第二运动座设置于所述第一运动座上方,所述第二运动座与所述第一运动座导向配合,且所述第二运动座能够相对所述第一运动座沿第二轴线方向往复运动,所述第二轴线方向与所述第一轴线方向呈夹角设置;连接组件,所述连接组件包括相互导向配合的第一导向件和第二导向件,所述第一导向件固设于所述第二运动座上,且所述第二导向件沿所述第一轴线方向设置;第一驱动机构,所述第一驱动机构包括第一动子,所述第一动子与所述第一运动座连接,且所述第一动子能够沿所述第一轴线方向往复运动;及第二驱动机构,所述第二驱动机构包括第二动子,所述第二动子与所述第二导向件连接,且所述第二动子能够沿所述第二轴线方向往复运动。A linear motion platform, comprising: a base; a first motion seat, the first motion seat is guided and matched with the base, and the first motion seat can reciprocate relative to the base along a first axis direction ; a second motion seat, the second motion seat is arranged above the first motion seat, the second motion seat is guided and matched with the first motion seat, and the second motion seat can be opposite to the first motion seat A moving seat reciprocates along a second axis direction, and the second axis direction and the first axis direction are arranged at an angle; a connection assembly, the connection assembly includes a first guide member and a second guide member that guide and cooperate with each other , the first guide member is fixed on the second motion seat, and the second guide member is arranged along the first axis direction; the first drive mechanism, the first drive mechanism includes a first mover , the first mover is connected with the first motion seat, and the first mover can reciprocate along the first axis direction; and a second drive mechanism, the second drive mechanism includes a second mover The second mover is connected with the second guide member, and the second mover can reciprocate along the second axis direction.

上述直线运动平台使用时,第一驱动机构驱动第一动子沿第一轴线方向往复运动,从而带动第一运动座相对基座沿第一轴线方向往复运动,进而带动第二运动座沿第一轴线方向往复运动;由于第一导向件固设于第二运动座上且第一导向件与第二导向件导向配合,当第二运动座沿第一轴线方向往复运动时,仅仅带动第一导向件沿第二导向件的轨迹往复运动,而第二驱动机构的第二动子不会沿着第一轴线方向往复运动;只有当第二驱动机构驱动第二动子沿第二轴线方向往复运动时,才会带动第二运动座相对第一运动座沿第二轴线方向往复运动。本实用新型实施例的直线运动平台,第一动子沿第一轴线方向往复运动时,第二动子不会随之沿第一轴线方向运动,使得第一动子的运动与第二动子的运动互不干涉,提高了控制精度;同时,由于第二动子不会随着第一动子的运动而沿着第一轴线方向往复运动,可以大大的缩小第二驱动机构的尺寸,降低了成本,也降低了第一动子的负载,使得第一动子能够输出更大的加速度,提升了工作周期。When the above-mentioned linear motion platform is in use, the first drive mechanism drives the first mover to reciprocate along the first axis direction, thereby driving the first moving seat relative to the base to reciprocate along the first axis direction, and then driving the second moving seat along the first axis direction. Reciprocating movement in the axis direction; since the first guide member is fixed on the second movement seat and the first guide member is guided and matched with the second guide member, when the second movement seat reciprocates along the first axis direction, only the first guide member is driven The part reciprocates along the track of the second guide, while the second mover of the second drive mechanism will not reciprocate along the first axis direction; only when the second drive mechanism drives the second mover to reciprocate along the second axis direction only when the second movement seat is driven to reciprocate relative to the first movement seat along the second axis direction. In the linear motion platform of the embodiment of the present invention, when the first mover reciprocates along the first axis direction, the second mover will not move along the first axis direction, so that the movement of the first mover and the second mover The movements of the two motors do not interfere with each other, which improves the control accuracy; at the same time, since the second mover does not reciprocate along the first axis with the movement of the first mover, the size of the second drive mechanism can be greatly reduced, reducing the The cost is reduced, and the load of the first mover is also reduced, so that the first mover can output a greater acceleration, and the working cycle is improved.

下面进一步对技术方案进行说明:The technical solution is further described below:

在其中一个实施例中,所述第二导向件上设有第一安装部,所述第二动子上设有能够与所述第一安装部相配合的第二安装部,且所述第二安装部与所述第一安装部至少设有两个配合固定位置。使得第一动子与第二动子之间的移动更加灵活方便。In one embodiment, the second guide member is provided with a first mounting portion, the second mover is provided with a second mounting portion capable of matching with the first mounting portion, and the first mounting portion is The second mounting portion and the first mounting portion are provided with at least two matching and fixing positions. The movement between the first mover and the second mover is more flexible and convenient.

在其中一个实施例中,所述基座上设有沿所述第一轴线方向设置的第三导向件,所述第一运动座包括第一导向面,所述第一导向面上设有能够与所述第三导向件导向配合的第四导向件。利用第三导向件与第四导向件之间的导向配合,使得第一运动座在第一动子的带动下能够相对基板沿第一轴线方向往复运动。In one embodiment, the base is provided with a third guide member arranged along the first axis direction, the first motion seat includes a first guide surface, and the first guide surface is provided with a a fourth guide piece that is guided and matched with the third guide piece. Using the guiding cooperation between the third guide member and the fourth guide member, the first moving seat can reciprocate relative to the base plate along the first axis direction under the driving of the first mover.

在其中一个实施例中,所述第一运动座还包括第二导向面,所述第二导向面与所述第一导向面相对间隔设置,所述第二导向面上设有第五导向件,所述第二运动座上设有能够与所述第五导向件导向配合的第六导向件。利用第五导向件与第六导向件之间的导向配合,使得第二运动座在第二动子的带动下能够相对第一运动座沿第二轴线方向往复运动。In one embodiment, the first motion seat further includes a second guide surface, the second guide surface is spaced apart from the first guide surface, and a fifth guide member is provided on the second guide surface , a sixth guide member capable of guiding and matching with the fifth guide member is arranged on the second moving seat. The guide cooperation between the fifth guide member and the sixth guide member enables the second moving seat to reciprocate relative to the first moving seat along the second axis direction under the driving of the second mover.

在其中一个实施例中,所述第一驱动机构包括第一直线电机,所述第一直线电机上设有所述第一动子;所述第二驱动机构包括第二直线电机,所述第二直线电机上设有所述第二动子。使得直线运动平台能够平稳的运行,加速度大且控制精度和重复精度高,满足了设备对高精度的使用需求。In one of the embodiments, the first driving mechanism includes a first linear motor, and the first mover is provided on the first linear motor; the second driving mechanism includes a second linear motor, so The second mover is provided on the second linear motor. The linear motion platform can run stably, with large acceleration and high control accuracy and repeatability, which satisfies the high-precision use requirements of the equipment.

在其中一个实施例中,直线运动平台还包括第一标尺光栅和第一光栅读数头,所述第一标尺光栅设置于所述第一运动座上,所述第一光栅读数头设置于所述基座上,且所述第一光栅读数头与所述第一标尺光栅相对间隔设置,用于对所述第一运动座在所述第一轴线方向上的直线位移进行检测。利用第一标尺光栅和第一光栅读数头形成的闭环控制,能够准确的对第一运动座在第一轴线方向上的直线位移进行检测,提高了控制精度。In one embodiment, the linear motion platform further includes a first scale grating and a first grating reading head, the first scale grating is arranged on the first motion seat, and the first grating reading head is arranged on the on the base, and the first grating reading head and the first scale grating are relatively spaced apart for detecting the linear displacement of the first moving seat in the direction of the first axis. The closed-loop control formed by the first scale grating and the first grating reading head can accurately detect the linear displacement of the first moving seat in the direction of the first axis, thereby improving the control precision.

在其中一个实施例中,直线运动平台还包括第二标尺光栅和第二光栅读数头,所述第二标尺光栅设置于所述第二运动座上,所述第二光栅读数头设置于所述第一运动座上,且所述第二光栅读数头与所述第二标尺光栅相对间隔设置,用于对所述第二运动座在所述第二轴线方向上的直线位移进行检测。利用第二标尺光栅和第二光栅读数头形成的闭环控制,能够准确的对第二运动座在第二轴线方向上的直线位移进行检测,提高了控制精度。In one embodiment, the linear motion platform further comprises a second scale grating and a second grating reading head, the second scale grating is arranged on the second motion seat, and the second grating reading head is arranged on the on the first moving seat, and the second grating reading head and the second scale grating are relatively spaced apart for detecting the linear displacement of the second moving seat in the direction of the second axis. The closed-loop control formed by the second scale grating and the second grating reading head can accurately detect the linear displacement of the second moving seat in the direction of the second axis, thereby improving the control precision.

在其中一个实施例中,直线运动平台还包括第一辅助导向件和第二辅助导向件,所述第一辅助导向件与所述第一动子导向配合,所述第二辅助导向件与所述第二动子导向配合。如此,避免第一动子和第二动子在运动的过程中发生震动,保证了运行精度。In one of the embodiments, the linear motion platform further includes a first auxiliary guide member and a second auxiliary guide member, the first auxiliary guide member is guided and matched with the first mover, and the second auxiliary guide member is connected with the first auxiliary guide member. The second mover is guided and matched. In this way, vibration of the first mover and the second mover is avoided during the movement, and the running accuracy is ensured.

在其中一个实施例中,直线运动平台还包括第一散热装置和第二散热装置,所述第一散热装置用于对所述第一直线电机进行散热,所述第二散热装置用于对所述第二直线电机进行散热。保证了第一直线电机和第二直线电机在合适温度下正常工作。In one embodiment, the linear motion platform further includes a first heat dissipation device and a second heat dissipation device, the first heat dissipation device is used for heat dissipation of the first linear motor, and the second heat dissipation device is used for heat dissipation of the first linear motor. The second linear motor dissipates heat. It is ensured that the first linear motor and the second linear motor work normally under a suitable temperature.

在其中一个实施例中,所述第一动子及所述第二动子均设置为永磁体;所述第一直线电机的第一定子及所述第二直线电机的第二定子均设置为线圈。可以避免电线随第一动子或第二动子的运动而运动,从而不会影响其他部件的正常工作,也使得第一动子或第二动子在运行过程中的阻力可控,控制精度高。In one embodiment, the first mover and the second mover are both set as permanent magnets; the first stator of the first linear motor and the second stator of the second linear motor are both Set to coil. It can prevent the wire from moving with the movement of the first mover or the second mover, so as not to affect the normal operation of other components, and also make the resistance of the first mover or the second mover controllable during operation, and the control accuracy high.

附图说明Description of drawings

图1为一个实施例的直线运动平台一视角下的结构示意图;1 is a schematic structural diagram of a linear motion platform in one embodiment from a viewing angle;

图2为图1的直线运动平台的主视图;Fig. 2 is the front view of the linear motion platform of Fig. 1;

图3为图1的直线运动平台的俯视图;Fig. 3 is the top view of the linear motion platform of Fig. 1;

图4为图3的直线运动平台的A-A方向的剖视图;Fig. 4 is the sectional view of the A-A direction of the linear motion platform of Fig. 3;

图5为图1的直线运动平台的连接组件的结构示意图;5 is a schematic structural diagram of a connecting assembly of the linear motion platform of FIG. 1;

图6为图1的直线运动平台的爆炸示意图。FIG. 6 is an exploded schematic diagram of the linear motion platform of FIG. 1 .

附图标记说明:Description of reference numbers:

10、直线运动平台,110、基座,111、第三导向件,120、第一运动座,121、第五导向件,130、第二运动座,140、连接组件,141、第一导向件,142、第二导向件,150、第一驱动机构,151、第一动子,152、第一定子,160、第二驱动机构,161、第二动子,171、第一标尺光栅,172、第一光栅读数头,181、第二标尺光栅,182、第二光栅读数头,191、第一辅助导向件,192、第一散热装置,193、第二散热装置,1421、第一安装部。10. Linear motion platform, 110, base, 111, third guide, 120, first motion seat, 121, fifth guide, 130, second motion seat, 140, connecting assembly, 141, first guide , 142, the second guide, 150, the first drive mechanism, 151, the first mover, 152, the first stator, 160, the second drive mechanism, 161, the second mover, 171, the first scale grating, 172, first grating reading head, 181, second scale grating, 182, second grating reading head, 191, first auxiliary guide, 192, first heat sink, 193, second heat sink, 1421, first installation department.

具体实施方式Detailed ways

为使本实用新型的目的、技术方案及优点更加清楚明白,以下结合附图及具体实施方式,对本实用新型进行进一步的详细说明。应当理解的是,此处所描述的具体实施方式仅用以解释本实用新型,并不限定本实用新型的保护范围。In order to make the purpose, technical solutions and advantages of the present utility model more clearly understood, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, and do not limit the protection scope of the present invention.

需要说明的是,当元件被称为“设置于”、“固设于”另一个元件,它可以直接在另一个元件上或者也可以存在居中的元件。当元件被称为“固设于”另一个元件,或与另一个元件“固定连接”,它们之间可以是可拆卸固定方式也可以是不可拆卸的固定方式。当一个元件被认为是“连接”、“密封连接”另一个元件,它可以是直接连接到另一个元件或者可能同时存在居中元件。本文所使用的术语“垂直的”、“水平的”、“左”、“右”、“上”、“下”以及类似的表述只是为了说明的目的,并不表示是唯一的实施方式。It should be noted that when an element is referred to as being "disposed on" or "fixed on" another element, it can be directly on the other element or an intervening element may also be present. When an element is referred to as being "fixed to" another element, or "fixedly connected" to another element, it may be detachable or non-detachable. When an element is referred to as being "connected" or "sealingly connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," "upper," "lower," and similar expressions used herein are for illustrative purposes only and do not represent the only embodiment.

除非另有定义,本文所使用的所有的技术和科学术语与属于本实用新型的技术领域的技术人员通常理解的含义相同。本文中在本实用新型的说明书中所使用的术语只是为了描述具体的实施方式的目的,不是旨在于约束本实用新型。本文所使用的术语“及/或”包括一个或多个相关的所列项目的任意的和所有的组合。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which the present invention belongs. The terms used in the description of the present invention herein are only for the purpose of describing specific embodiments, and are not intended to limit the present invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

本实用新型中所述“第一”、“第二”、“第三”等类似用语不代表具体的数量及顺序,仅仅是用于名称的区分。Similar terms such as "first", "second", "third" and the like mentioned in the present utility model do not represent a specific quantity and order, but are only used for the distinction of names.

如图1至图3所示,本实用新型的一个实施例公开了一种直线运动平台10,包括:基座110;第一运动座120,第一运动座120与基座110导向配合,且第一运动座120能够相对基座110沿第一轴线方向往复运动;第二运动座130,第二运动座130设置于第一运动座120上方,第二运动座130与第一运动座120导向配合,且第二运动座130能够相对第一运动座120沿第二轴线方向往复运动,第二轴线方向与第一轴线方向呈夹角设置;连接组件140,连接组件140包括相互导向配合的第一导向件141和第二导向件142,第一导向件141固设于第二运动座130上,且第二导向件142沿第一轴线方向设置;第一驱动机构150,第一驱动机构150包括第一动子151,第一动子151与第一运动座120连接,且第一动子151能够沿第一轴线方向往复运动;及第二驱动机构160,第二驱动机构160包括第二动子161,第二动子161与第二导向件142连接,且第二动子161能够沿第二轴线方向往复运动。As shown in FIGS. 1 to 3 , an embodiment of the present invention discloses a linear motion platform 10 , comprising: a base 110 ; a first motion seat 120 , the first motion seat 120 is guided and matched with the base 110 , and The first motion seat 120 can reciprocate relative to the base 110 along the first axis direction; the second motion seat 130 is arranged above the first motion seat 120 , and the second motion seat 130 is guided with the first motion seat 120 The second moving seat 130 can reciprocate relative to the first moving seat 120 along the second axis direction, and the second axis direction and the first axis direction are arranged at an included angle; the connecting assembly 140, the connecting assembly 140 includes a second axis that guides and cooperates with each other. A guide member 141 and a second guide member 142, the first guide member 141 is fixed on the second motion seat 130, and the second guide member 142 is arranged along the first axis direction; the first driving mechanism 150, the first driving mechanism 150 It includes a first mover 151, the first mover 151 is connected with the first motion seat 120, and the first mover 151 can reciprocate along the first axis direction; and a second drive mechanism 160, the second drive mechanism 160 includes a second The mover 161 and the second mover 161 are connected to the second guide member 142 , and the second mover 161 can reciprocate along the second axis direction.

上述实施例的直线运动平台10使用时,第一驱动机构驱动第一动子151沿第一轴线方向往复运动,从而带动第一运动座120相对基座110沿第一轴线方向往复运动,进而带动第二运动座130沿第一轴线方向往复运动;由于第一导向件141固设于第二运动座130上且第一导向件141与第二导向件142导向配合,当第二运动座130沿第一轴线方向往复运动时,仅仅带动第一导向件141沿第二导向件142的轨迹往复运动,而第二驱动机构的第二动子161不会沿着第一轴线方向往复运动;只有当第二驱动机构驱动第二动子161沿第二轴线方向往复运动时,才会带动第二运动座130相对第一运动座120沿第二轴线方向往复运动。本实用新型实施例的直线运动平台10,第一动子151沿第一轴线方向往复运动时,第二动子161不会随之沿第一轴线方向运动,使得第一动子151的运动与第二动子161的运动互不干涉,提高了控制精度;同时,由于第二动子161不会随着第一动子151的运动而沿着第一轴线方向往复运动,可以大大的缩小第二驱动机构的尺寸,降低了成本,也降低了第一动子151的负载,使得第一动子151能够输出更大的加速度,提升了工作周期。When the linear motion platform 10 of the above embodiment is used, the first driving mechanism drives the first mover 151 to reciprocate along the first axis direction, thereby driving the first moving seat 120 to reciprocate relative to the base 110 along the first axis direction, thereby driving the first moving seat 120 to reciprocate along the first axis direction. The second movement seat 130 reciprocates along the first axis direction; since the first guide member 141 is fixed on the second movement seat 130 and the first guide member 141 and the second guide member 142 guide and cooperate, when the second movement seat 130 moves along the When the first axis direction reciprocates, only the first guide member 141 is driven to reciprocate along the trajectory of the second guide member 142, while the second mover 161 of the second drive mechanism does not reciprocate along the first axis direction; only when When the second driving mechanism drives the second mover 161 to reciprocate along the second axis direction, the second moving seat 130 is driven to reciprocate relative to the first moving seat 120 along the second axis direction. In the linear motion platform 10 of the embodiment of the present invention, when the first mover 151 reciprocates in the direction of the first axis, the second mover 161 will not move along the direction of the first axis, so that the movement of the first mover 151 is different from that of the first mover 151. The movements of the second mover 161 do not interfere with each other, which improves the control accuracy; at the same time, since the second mover 161 does not reciprocate along the first axis with the movement of the first mover 151, the first mover 161 can be greatly reduced. The size of the second drive mechanism reduces the cost, and also reduces the load of the first mover 151 , so that the first mover 151 can output greater acceleration and improve the working cycle.

需要进行说明的是,第一轴线方向与第二轴线方向之间的夹角为其中, It should be noted that the angle between the first axis direction and the second axis direction is in,

如图2及图3所示,在一个实施例中,第一导向件141设置为滑块,第二导向件142设置为能够与滑块导向配合的滑轨,滑块能够沿滑轨的长度方向往复运动。由第一动子151沿第一轴线方向往复运动,带动第二运动座130沿第一轴线方向往复运动,滑块沿滑轨的长度方向往复运动,即第一轴线方向往复运动,而与导轨连接的第二动子161保持静止,不会随第一动子151的运动而沿第一轴线方向运动。As shown in FIG. 2 and FIG. 3 , in one embodiment, the first guide member 141 is set as a sliding block, the second guide member 142 is set as a sliding rail that can guide and cooperate with the sliding block, and the sliding block can be along the length of the sliding rail. Direction reciprocating movement. The first mover 151 reciprocates in the direction of the first axis, which drives the second moving seat 130 to reciprocate in the direction of the first axis, and the slider reciprocates in the direction of the length of the slide rail, that is, the reciprocation in the direction of the first axis, and the reciprocating motion in the direction of the first axis, and the reciprocating movement of the slider along the length direction of the slide rail. The connected second mover 161 remains stationary and will not move in the direction of the first axis with the movement of the first mover 151 .

在其他实施例中,第一导向件141与第二导向件142之间的导向配合还可以是通过滚动配合的方式实现,例如通过导轨与滚轮的配合实现,只需满足能够使得第一导向件141能够沿第一轴线方向往复运动,即沿第二导向件142的长度方向往复运动即可。In other embodiments, the guide fit between the first guide member 141 and the second guide member 142 may also be achieved by rolling fit, for example, by the fit of the guide rail and the roller, as long as the first guide member 141 can be used to make the first guide member 142 fit. 141 can reciprocate along the first axis direction, that is, reciprocate along the length direction of the second guide member 142 .

可选地,第二导向件142上设有第一安装部1421,第二动子161上设有能够与第一安装部1421相配合的第二安装部(未示出),且第二安装部与第一安装部1421至少设有两个配合固定位置。通过第一安装部1421与第二安装部的配合从而实现第二导向件142与第二动子161的连接,进一步的,第二安装部与第一安装部1421至少设有两个配合固定位置,使得第二导向件142可以相对第二动子161在第一轴线方向上进行移动之后再进行安装固定,从而可以根据需要灵活的设置第一导向件141在第一轴线方向上的位移量,使得第一动子151与第二动子161之间的移动更加灵活方便。本实用新型实施例的第一安装部1421与第二安装部,可以是第一安装部1421为第一安装孔,第二安装部为沿第一轴线方向延伸的直槽,也可以是第一安装部1421为第二安装孔,第二安装部为至少两个沿第一轴线方向间隔设置的能够与第二安装孔相匹配的第三安装孔,只需满足使得第二导向件142安装时能够相对第二动子151在第一轴线方向上移动,移动到合适位置时能够进行相对固定即可。Optionally, the second guide member 142 is provided with a first mounting portion 1421, the second mover 161 is provided with a second mounting portion (not shown) that can cooperate with the first mounting portion 1421, and the second mounting portion 1421 is provided on the second guide member 142. The first mounting portion 1421 is provided with at least two matching and fixing positions. The connection between the second guide member 142 and the second mover 161 is realized through the cooperation between the first mounting portion 1421 and the second mounting portion. Further, the second mounting portion and the first mounting portion 1421 are provided with at least two matching and fixing positions. , so that the second guide member 142 can move relative to the second mover 161 in the first axis direction and then be installed and fixed, so that the displacement amount of the first guide member 141 in the first axis direction can be flexibly set as required, The movement between the first mover 151 and the second mover 161 is more flexible and convenient. The first mounting portion 1421 and the second mounting portion in the embodiment of the present invention may be that the first mounting portion 1421 is a first mounting hole, and the second mounting portion is a straight groove extending along the first axis direction, or the first mounting portion may be a first mounting hole. The mounting portion 1421 is a second mounting hole, and the second mounting portion is at least two third mounting holes spaced along the first axis direction that can be matched with the second mounting holes, and only needs to satisfy the requirement that the second guide member 142 is installed when the second guide member 142 is installed. It can move relative to the second mover 151 in the direction of the first axis, and can be relatively fixed when moved to an appropriate position.

在一个实施例中,基座110上设有沿第一轴线方向设置的第三导向件111,第一运动座120包括第一导向面,第一导向面上设有能够与第三导向件111导向配合的第四导向件(未示出)。其中,第一导向面正对基座110设置,利用第三导向件111与第四导向件之间的导向配合,使得第一运动座120在第一动子151的带动下能够相对基板沿第一轴线方向往复运动。本实用新型实施例的第三导向件111与第四导向件之间的导向配合,可以是滑动配合的方式实现,例如通过滑轨与滑块的配合实现,也可以是通过滚动配合的方式实现,例如通过导轨与滚轮的配合实现,只需满足能够使得第一运动座120能够相对基座110沿第一轴线方向往复运动即可。In one embodiment, the base 110 is provided with a third guide member 111 disposed along the first axis direction, the first motion seat 120 includes a first guide surface, and the first guide surface is provided with a third guide member 111 capable of being connected with the third guide member 111 . Guide the mating fourth guide (not shown). Wherein, the first guide surface is disposed facing the base 110, and the guide and cooperation between the third guide member 111 and the fourth guide member are used, so that the first moving seat 120 can be driven by the first mover 151 relative to the base plate along the first Reciprocating movement in one axis direction. The guide fit between the third guide piece 111 and the fourth guide piece in the embodiment of the present invention can be achieved by sliding fit, for example, by the fit between the slide rail and the slider, or by rolling fit. For example, it is realized by the cooperation of the guide rail and the roller, and it only needs to satisfy the requirement that the first moving seat 120 can reciprocate relative to the base 110 along the first axis direction.

在一个实施例中,第一运动座120还包括第二导向面,第二导向面与第一导向面相对间隔设置,第二导向面上设有第五导向件121,第二运动座130上设有能够与第五导向件121导向配合的第六导向件(未示出)。其中,第二导向面正对第二运动座130设置,利用第五导向件121与第六导向件之间的导向配合,使得第二运动座130在第二动子161的带动下能够相对第一运动座120沿第二轴线方向往复运动。本实用新型实施例的第五导向件121与第六导向件之间的导向配合,可以是滑动配合的方式实现,例如通过滑轨与滑块的配合实现,也可以是通过滚动配合的方式实现,例如通过导轨与滚轮的配合实现,只需满足能够使得第二运动座130能够相对第一运动座120沿第二轴线方向往复运动即可。In one embodiment, the first movement seat 120 further includes a second guide surface, the second guide surface and the first guide surface are arranged at a distance from each other, the second guide surface is provided with a fifth guide member 121 , and the second movement seat 130 is provided with a fifth guide member 121 . There is a sixth guide member (not shown) that can guide and cooperate with the fifth guide member 121 . Wherein, the second guide surface is disposed facing the second moving seat 130 , and the second moving seat 130 can be driven by the second mover 161 relative to the first moving seat 130 by using the guiding cooperation between the fifth guiding member 121 and the sixth guiding member. A moving seat 120 reciprocates along the second axis direction. The guide fit between the fifth guide piece 121 and the sixth guide piece in the embodiment of the present invention can be achieved by sliding fit, for example, by the fit between the slide rail and the slider, or by rolling fit. For example, it is realized by the cooperation of the guide rail and the roller, and it only needs to satisfy the requirement that the second moving seat 130 can reciprocate relative to the first moving seat 120 along the second axis direction.

在上述任一实施例的基础上,第一驱动机构150包括第一直线电机,第一直线电机上设有第一动子151;第二驱动机构160包括第二直线电机,第二直线电机上设有第二动子161。因此,使得直线运动平台10能够平稳的运行,加速度大且控制精度和重复精度高,满足了设备对高精度的使用需求,同时,结构简单,体积较小,使得直线运动平台10能够朝向小型化和集成化方向发展。本实用新型实施例的第一直线电机和第二直线电机,优选为音圈电机,其控制精度高。On the basis of any of the above embodiments, the first driving mechanism 150 includes a first linear motor, and the first linear motor is provided with a first mover 151; the second driving mechanism 160 includes a second linear motor, and the second linear motor A second mover 161 is provided on the motor. Therefore, the linear motion platform 10 can run stably, with large acceleration and high control accuracy and repeatability, which satisfies the high-precision use requirements of the equipment. At the same time, the structure is simple and the volume is small, so that the linear motion platform 10 can be miniaturized and integrated development. The first linear motor and the second linear motor in the embodiment of the present invention are preferably voice coil motors, which have high control precision.

在一个实施例中,直线运动平台10还包括第一标尺光栅171和第一光栅读数头172,第一标尺光栅171设置于第一运动座120上,第一光栅读数头172设置于基座110上,且第一光栅读数头172与第一标尺光栅171相对间隔设置,用于对第一运动座120在第一轴线方向上的直线位移进行检测。利用第一标尺光栅171和第一光栅读数头172形成的闭环控制,能够准确的对第一运动座120在第一轴线方向上的直线位移进行检测,提高了控制精度,也使得第一运动座120在第一轴线方向上的位移更加准确。In one embodiment, the linear motion platform 10 further includes a first scale grating 171 and a first grating reading head 172 , the first scale grating 171 is disposed on the first motion base 120 , and the first grating reading head 172 is disposed on the base 110 The first grating reading head 172 and the first scale grating 171 are relatively spaced apart and used to detect the linear displacement of the first moving seat 120 in the first axis direction. The closed-loop control formed by the first scale grating 171 and the first grating reading head 172 can accurately detect the linear displacement of the first moving seat 120 in the direction of the first axis, improve the control accuracy, and make the first moving seat 120 more accurate. The displacement of 120 in the direction of the first axis is more accurate.

在一个实施例中,直线运动平台10还包括第二标尺光栅181和第二光栅读数头182,第二标尺光栅181设置于第二运动座130上,第二光栅读数头182设置于第一运动座120上,且第二光栅读数头182与第二标尺光栅181相对间隔设置,用于对第二运动座130在第二轴线方向上的直线位移进行检测。利用第二标尺光栅181和第二光栅读数头182形成的闭环控制,能够准确的对第二运动座130在第二轴线方向上的直线位移进行检测,提高了控制精度,也使得第二运动座130在第二轴线方向上的位移更加准确。In one embodiment, the linear motion platform 10 further includes a second scale grating 181 and a second grating reading head 182 , the second scale grating 181 is disposed on the second motion seat 130 , and the second grating reading head 182 is disposed on the first moving The second grating reading head 182 and the second scale grating 181 are relatively spaced apart from the seat 120 , for detecting the linear displacement of the second moving seat 130 in the second axis direction. The closed-loop control formed by the second scale grating 181 and the second grating reading head 182 can accurately detect the linear displacement of the second moving seat 130 in the direction of the second axis, improve the control accuracy, and make the second moving seat 130 more accurate. The displacement of 130 in the direction of the second axis is more accurate.

在一个实施例中,直线运动平台10还包括第一辅助导向件191和第二辅助导向件(未示出),第一辅助导向件191与第一动子151导向配合,第二辅助导向件与第二动子161导向配合。利用第一辅助导向件191对第一动子151起到辅助支撑的作用,大大提升了第一动子151的刚性,避免第一动子151在运动的过程中发生震动,保证了第一动子151的运行精度;利用第二辅助导向件对第二动子161起到辅助支撑的作用,大大提升了第二动子161的刚性,避免第二动子161在运动的过程中发生震动,保证了第二动子161的运行精度。本实用新型实施例的第一辅助导向件191和第二辅助导向件,可以是导轨或滑轨,只需满足能够对第一动子151和第二动子161进行导向与支撑即可。In one embodiment, the linear motion platform 10 further includes a first auxiliary guide member 191 and a second auxiliary guide member (not shown), the first auxiliary guide member 191 guides and cooperates with the first mover 151, and the second auxiliary guide member Guide and cooperate with the second mover 161 . The first auxiliary guide 191 is used to assist the first mover 151, which greatly improves the rigidity of the first mover 151, prevents the first mover 151 from vibrating during the movement, and ensures the first mover 151. The running accuracy of the second mover 151 is improved; the second auxiliary guide is used to assist the second mover 161, which greatly improves the rigidity of the second mover 161 and prevents the second mover 161 from vibrating during the movement. The running accuracy of the second mover 161 is guaranteed. The first auxiliary guide member 191 and the second auxiliary guide member in the embodiment of the present invention may be guide rails or slide rails, as long as they can guide and support the first mover 151 and the second mover 161 .

在一个实施例中,直线运动平台10还包括第一散热装置192和第二散热装置193,第一散热装置192用于对第一直线电机进行散热,第二散热装置193用于对第二直线电机进行散热。利用第一散热装置192和第二散热装置193能够分别对第一直线电机和第二直线电机进行散热,保证第一直线电机和第二直线电机能够正常工作。本实用新型实施例的第一散热装置192和第二散热装置193可以是散热风扇、散热管或其他能够进行散热的装置。In one embodiment, the linear motion platform 10 further includes a first heat dissipation device 192 and a second heat dissipation device 193. The first heat dissipation device 192 is used for heat dissipation of the first linear motor, and the second heat dissipation device 193 is used for heat dissipation of the second heat dissipation device. The linear motor dissipates heat. Using the first heat dissipation device 192 and the second heat dissipation device 193 can dissipate heat to the first linear motor and the second linear motor respectively, so as to ensure that the first linear motor and the second linear motor can work normally. The first heat dissipation device 192 and the second heat dissipation device 193 in the embodiment of the present invention may be a heat dissipation fan, a heat dissipation pipe or other devices capable of dissipating heat.

在一个实施例中,第一动子151及第二动子161均设置为永磁体;第一直线电机的第一定子152及第二直线电机的第二定子(未示出)均设置为线圈。如此,可以避免电线随第一动子151或第二动子161的运动而运动,从而不会影响其他部件的正常工作,也使得第一动子151或第二动子161在运行过程中的阻力可控,控制精度高。In one embodiment, the first mover 151 and the second mover 161 are both configured as permanent magnets; the first stator 152 of the first linear motor and the second stator (not shown) of the second linear motor are both configured for the coil. In this way, the movement of the wires with the movement of the first mover 151 or the second mover 161 can be avoided, so that the normal operation of other components will not be affected, and the first mover 151 or the second mover 161 will not be affected during operation. The resistance is controllable and the control precision is high.

以上实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above embodiments are not described. However, as long as there is no contradiction in the combination of these technical features It is considered to be the range described in this specification.

以上实施例仅表达了本实用新型的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对实用新型专利范围的约束。应当指出的是,对于本领域的普通技术人员来说,在不脱离本实用新型构思的前提下,还可以做出若干变形和改进,这些都属于本实用新型的保护范围。因此,本实用新型专利的保护范围应以所附权利要求为准。The above embodiments only represent several embodiments of the present invention, and the descriptions thereof are specific and detailed, but should not be construed as a restriction on the scope of the patent of the present invention. It should be pointed out that for those of ordinary skill in the art, some modifications and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent for this utility model shall be subject to the appended claims.

Claims (10)

1.一种直线运动平台,其特征在于,包括:1. a linear motion platform, is characterized in that, comprises: 基座;pedestal; 第一运动座,所述第一运动座与所述基座导向配合,且所述第一运动座能够相对所述基座沿第一轴线方向往复运动;a first moving seat, the first moving seat is guided and matched with the base, and the first moving seat can reciprocate relative to the base along a first axis direction; 第二运动座,所述第二运动座设置于所述第一运动座上方,所述第二运动座与所述第一运动座导向配合,且所述第二运动座能够相对所述第一运动座沿第二轴线方向往复运动,所述第二轴线方向与所述第一轴线方向呈夹角设置;A second motion seat, the second motion seat is disposed above the first motion seat, the second motion seat is guided and matched with the first motion seat, and the second motion seat can be opposite to the first motion seat The moving seat reciprocates along a second axis direction, and the second axis direction and the first axis direction are arranged at an included angle; 连接组件,所述连接组件包括相互导向配合的第一导向件和第二导向件,所述第一导向件固设于所述第二运动座上,且所述第二导向件沿所述第一轴线方向设置;A connecting assembly, the connecting assembly includes a first guide member and a second guide member that guide and cooperate with each other, the first guide member is fixed on the second motion seat, and the second guide member is along the first guide member. One axis direction setting; 第一驱动机构,所述第一驱动机构包括第一动子,所述第一动子与所述第一运动座连接,且所述第一动子能够沿所述第一轴线方向往复运动;及a first drive mechanism, the first drive mechanism includes a first mover, the first mover is connected with the first motion seat, and the first mover can reciprocate along the first axis direction; and 第二驱动机构,所述第二驱动机构包括第二动子,所述第二动子与所述第二导向件连接,且所述第二动子能够沿所述第二轴线方向往复运动。A second driving mechanism, the second driving mechanism includes a second mover, the second mover is connected with the second guide member, and the second mover can reciprocate along the second axis direction. 2.根据权利要求1所述的直线运动平台,其特征在于,所述第二导向件上设有第一安装部,所述第二动子上设有能够与所述第一安装部相配合的第二安装部,且所述第二安装部与所述第一安装部至少设有两个配合固定位置。2 . The linear motion platform according to claim 1 , wherein a first mounting portion is provided on the second guide member, and a first mounting portion is provided on the second mover that can cooperate with the first mounting portion. 3 . The second mounting portion is provided with at least two matching and fixing positions with the first mounting portion. 3.根据权利要求1所述的直线运动平台,其特征在于,所述基座上设有沿所述第一轴线方向设置的第三导向件,所述第一运动座包括第一导向面,所述第一导向面上设有能够与所述第三导向件导向配合的第四导向件。3 . The linear motion platform according to claim 1 , wherein the base is provided with a third guide member arranged along the first axis direction, and the first motion seat comprises a first guide surface, 3 . A fourth guide member capable of guiding and matching with the third guide member is provided on the first guide surface. 4.根据权利要求3所述的直线运动平台,其特征在于,所述第一运动座还包括第二导向面,所述第二导向面与所述第一导向面相对间隔设置,所述第二导向面上设有第五导向件,所述第二运动座上设有能够与所述第五导向件导向配合的第六导向件。4 . The linear motion platform according to claim 3 , wherein the first motion seat further comprises a second guide surface, the second guide surface and the first guide surface are relatively spaced apart, and the first guide surface is 4. 5 . A fifth guide member is arranged on the two guide surfaces, and a sixth guide member capable of guiding and cooperating with the fifth guide member is arranged on the second moving seat. 5.根据权利要求1至4任一项所述的直线运动平台,其特征在于,所述第一驱动机构包括第一直线电机,所述第一直线电机上设有所述第一动子;所述第二驱动机构包括第二直线电机,所述第二直线电机上设有所述第二动子。5. The linear motion platform according to any one of claims 1 to 4, wherein the first driving mechanism comprises a first linear motor, and the first linear motor is provided with the first moving The second driving mechanism includes a second linear motor, and the second linear motor is provided with the second mover. 6.根据权利要求5所述的直线运动平台,其特征在于,还包括第一标尺光栅和第一光栅读数头,所述第一标尺光栅设置于所述第一运动座上,所述第一光栅读数头设置于所述基座上,且所述第一光栅读数头与所述第一标尺光栅相对间隔设置,用于对所述第一运动座在所述第一轴线方向上的直线位移进行检测。6 . The linear motion platform according to claim 5 , further comprising a first scale grating and a first grating reading head, the first scale grating is arranged on the first motion seat, and the first The grating reading head is arranged on the base, and the first grating reading head is relatively spaced from the first scale grating, and is used for linear displacement of the first moving seat in the direction of the first axis test. 7.根据权利要求5所述的直线运动平台,其特征在于,还包括第二标尺光栅和第二光栅读数头,所述第二标尺光栅设置于所述第二运动座上,所述第二光栅读数头设置于所述第一运动座上,且所述第二光栅读数头与所述第二标尺光栅相对间隔设置,用于对所述第二运动座在所述第二轴线方向上的直线位移进行检测。7. The linear motion platform according to claim 5, further comprising a second scale grating and a second grating reading head, the second scale grating is arranged on the second motion seat, the second scale grating The grating reading head is arranged on the first moving seat, and the second grating reading head is relatively spaced from the second scale grating, and is used for checking the movement of the second moving seat in the direction of the second axis. Linear displacement is detected. 8.根据权利要求5所述的直线运动平台,其特征在于,还包括第一辅助导向件和第二辅助导向件,所述第一辅助导向件与所述第一动子导向配合,所述第二辅助导向件与所述第二动子导向配合。8 . The linear motion platform according to claim 5 , further comprising a first auxiliary guide member and a second auxiliary guide member, the first auxiliary guide member is guided and matched with the first mover, and the The second auxiliary guide member is guided and matched with the second mover. 9.根据权利要求5所述的直线运动平台,其特征在于,还包括第一散热装置和第二散热装置,所述第一散热装置用于对所述第一直线电机进行散热,所述第二散热装置用于对所述第二直线电机进行散热。9 . The linear motion platform according to claim 5 , further comprising a first heat dissipation device and a second heat dissipation device, the first heat dissipation device is used for heat dissipation of the first linear motor, and the The second heat dissipating device is used for dissipating heat to the second linear motor. 10.根据权利要求5所述的直线运动平台,其特征在于,所述第一动子及所述第二动子均设置为永磁体;所述第一直线电机的第一定子及所述第二直线电机的第二定子均设置为线圈。10 . The linear motion platform according to claim 5 , wherein the first mover and the second mover are both set as permanent magnets; the first stator of the first linear motor and the The second stators of the second linear motor are all configured as coils.
CN201821209600.9U 2018-07-27 2018-07-27 Linear motion platform Active CN208614257U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108772718A (en) * 2018-07-27 2018-11-09 广东阿达智能装备有限公司 linear motion platform

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108772718A (en) * 2018-07-27 2018-11-09 广东阿达智能装备有限公司 linear motion platform
CN108772718B (en) * 2018-07-27 2024-12-17 广东阿达半导体设备股份有限公司 Linear motion platform

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