CN208420749U - A kind of x-ray imaging device - Google Patents
A kind of x-ray imaging device Download PDFInfo
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- CN208420749U CN208420749U CN201820650691.3U CN201820650691U CN208420749U CN 208420749 U CN208420749 U CN 208420749U CN 201820650691 U CN201820650691 U CN 201820650691U CN 208420749 U CN208420749 U CN 208420749U
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Abstract
The utility model provides a kind of x-ray imaging device, the apparatus may include: turntable is set on the base and the longitudinal axis when being driven on vertical direction rotates；Detector is connected to pedestal via the first support construction of the mesoporous for passing through turntable；Sample stage is connected to turntable via the second support construction；And radiographic source, it is set to and is connected to pedestal via third support construction.The device can support simultaneously include computerized tomography and computer tomography various modes.
Description
Technical field
The utility model relates generally to x-ray imaging field, and more particularly to a kind of x-ray imaging device,
Can support simultaneously include computerized tomography and computer tomography various modes.
Background technique
X-ray imaging has been widely used in the fields such as medical diagnosis, industrial nondestructive testing, safety check, scientific research.Medicine
The object of computer tomography (CT) the device detection of diagnosis is usually human or animal, and the structure of device is relatively fixed.Phase
Than detecting in medicine, the object of industry CT detection is not fixed, and the structure of the CT imaging device for industrial nondestructive testing is not according to
With detection demand and it is different.
The X-ray three-dimensional chromatography imaging technique for being exclusively used in plate-shaped body as such as chip can not destroy plate object
Three-dimensional imaging is carried out to the internal structure of plate-shaped body in the case where body.Such computerized tomography (CL) technology can have
Effect ground is solved to plate-shaped body appliance computer tomograph imaging method since incident X-ray is in vertical sample table
Problem caused by face is excessive with the light path difference of parallel sample surfaces both direction.
In order to be compatible with traditional CT mode and fully using existing radiographic source and detector, for using CL technology
Device generally requires the additional lateral turntable of addition, and needs to install in the case where switching between CL and CT both of which
Or remove turntable.
Utility model content
As it was noted above, existing CL imaging device can not efficiently be supported to include computerized tomography and calculating simultaneously
The various modes such as machine tomographic imaging.
In order to solve the above-mentioned technical problem, the application is proposed.
Embodiments herein provides a kind of x-ray imaging device, which includes: turntable, is set on the base
And the longitudinal axis rotation when being driven on vertical direction；Detector, via the first of the mesoporous for passing through turntable
Support construction is connected to pedestal；Sample stage is connected to turntable via the second support construction；And radiographic source, be set to through
Pedestal is connected to by third support construction.
In one embodiment, the first support construction includes elevating mechanism, transverse arm and bracket, and elevating mechanism passes through turntable
Mesoporous simultaneously connects pedestal and transverse arm, and bracket is movably disposed on transverse arm and connects detector and transverse arm.
In one embodiment, detector is connected to bracket via the shaft on bracket, with by enclose rotate around the axis come
Change pitch angle.
In one embodiment, mobile range of the bracket on transverse arm is asymmetric relative to longitudinal axis.
In one embodiment, the second support construction is the mechanical arm that one end is fixed on turntable.
In one embodiment, sample stage is connected to the second support construction via the rotating mechanism in the second support construction,
Rotating mechanism drives center axis rotation of the sample stage around rotating mechanism when being driven.
In one embodiment, the central axis and longitudinal axis orthogonal of rotating mechanism.
In one embodiment, third support construction is the mechanical arm that one end is fixed on the base.
In one embodiment, the pitch angle of detector is configured such that the center of focus and detector by radiographic source
Surface of the identified straight line perpendicular to the reception ray of detector.
In one embodiment, x-ray imaging device further includes control unit, and control unit passes through wired or wireless side
Formula be connected to one in turntable, detector, radiographic source, the first support construction, the second support construction and third support construction or
It is multiple.
Compared with prior art, x-ray imaging device according to an embodiment of the present application can be adopted for different samples
With different imaging patterns, such as multi-angle projection imaging, CT imaging, CL imaging etc..Every kind of imaging pattern is free to
Amplification ratio, visual field etc. are adjusted, so as to realize different spatial resolutions.Different imaging patterns can share identical
Sample stage support construction, so as to effectively save the cost, and be conducive to being switched fast between different imaging patterns.
In addition, during CL scanning, only turntable revolves in x-ray imaging device according to an embodiment of the present application
Turn, the freedom degree of movement is low, so as to control and realize high-precision scanning and detection；Moreover, it is also possible to by adjusting sample
Any area-of-interest of sample is imaged in the position of product, therefore has very high flexibility.
Detailed description of the invention
Fig. 1 shows the structural schematic diagram of x-ray imaging device according to an embodiment of the present application.
Specific embodiment
Method and system according to an embodiment of the present application described with reference to the accompanying drawing.It should be appreciated that described real
A part of the embodiment that example is only the application is applied, instead of all the embodiments.
Fig. 1 shows the structural schematic diagram of x-ray imaging device according to an embodiment of the present application.As shown in Figure 1, according to this
The x-ray imaging device of the embodiment of application may include radiographic source 2, detector 4, turntable 6 and sample stage 7.In addition, the X is penetrated
Ray imaging device can also include control unit 10.
Radiographic source 2 can be any device appropriate that can generate such as X-ray.
In one embodiment, radiographic source 2 can be connected by corresponding control line or connecting line with control unit 10, and
And control instruction and parameter from control unit 10 can be received by corresponding control line or connecting line to generate concurrently
It penetrates and meets the X-ray that expectation requires (for example, with desired intensity and/or angle).In a further embodiment, radiographic source 2
It can also wirelessly be communicated with control unit 10.
Radiographic source 2 can be connected by corresponding support construction 3 with the pedestal 1 of device.According to different embodiments, ray
The spatial position in source 2 can be fixed, and can also move in three dimensions.
Correspondingly, fixed shape or structure be can have for connecting the support construction 3 of radiographic source 2 and pedestal 1, it can also
To have deformable or adjustable structure as such as mechanical arm.
In the case where support construction 3 has variable shape or adjustable structure, can be made by manually mode
The shape of support construction 3 changes.In a further embodiment, support construction 3 can also be designed to inside it include appropriate
Control mechanism and driving mechanism, so as to change for example, by the different driving method such as hydraulic, air pressure, electrical, machinery
Become outer shape, and then radiographic source 2 is enable to move and/or navigate at desired position in three dimensions.For example, in this way
The example of support construction 3 may include multi-degree-of-freemechanical mechanical arm.
Sample stage 7 can be thin plate or can clamp or carry sample 9 so as to wear from the ray that radiographic source 2 emits
Any mechanism appropriate or structure of saturating sample 9.
As shown in Figure 1, sample stage 7 may be coupled to one end of support construction 8.Support construction 8 can have such as mechanical
The shape or adjustable structure that can be changed as arm, so as to adjust the position of sample stage 7 in three dimensions.
In one embodiment, sample stage 7 can be connected to support via the rotating mechanism 13 in the end of support construction 8
Structure 8.Rotating mechanism 13 when being driven can surround rotating mechanism 13 center axis rotation, thus drive sample stage 7 and its
On sample 9 rotate.In one embodiment, the central axis of rotating mechanism 13 can be vertical with the longitudinal axis Z of vertical direction,
That is, corresponding to horizontal direction.Support construction 8 can also include other driving mechanisms, real in three dimensions to control sample stage 7
Existing any position is adjusted, and such support construction 8 can easily be realized using multi-degree-of-freemechanical mechanical arm.
The other end of support construction 8 can be fixed on turntable 6, and can surround vertical direction together with turntable 6
On longitudinal axis Z rotation.
In one embodiment, support construction 8 may include control mechanism appropriate and driving mechanism.For example, control machine
Structure can receive control instruction and/or control parameter from control unit 10, and according to the received instruction of institute and/or parameter
Driving mechanism work is controlled, so that support construction 8 carries out desired movement or generates desired form.
Turntable 6 can be set on pedestal 1, and can appoint for example under the driving of electric power around longitudinal axis Z rotation
Angle of anticipating or angle within a predetermined range.In one embodiment, for turntable 6 and the support being fixed on turntable 6
The power supply line of structure 8 and/or control route can be connected for example, by slip ring with power supply (not shown) and/or controller 10.
Turntable 6 can receive control instruction and parameter from control unit 10 by corresponding control line or connecting line, so as to according to
Specified speed and/or angular turn；Support construction 8 can also be received single from control by corresponding control line or connecting line
The control instruction and parameter of member 10, so that sample stage 7 to be moved to specified position.
Detector 4 can receive the ray for being generated by radiographic source 2 and passing through sample stage 7 and sample 9 thereon, and will be connect
The ray received is converted into electric signal.It can be cone as shown in Figure 1, generating from radiographic source 2 and eventually arriving at the ray of detector 4
The pencil of forms.
Detector 4 and radiographic source 2 can be respectively arranged at the two sides of the horizontal plane where sample stage 7, so that ray
The ray that source 2 generates can pass through sample stage 7 and sample 9 thereon, and finally be received by detector 4.For example, in sample stage 7
In the case where the lower section (for example, directly below or obliquely below) of such as radiographic source 2, detector 4 can be set to sample stage 7
Lower section (for example, directly below or obliquely below).
Detector 4 may be mounted in support construction 5, and the central part that support construction 5 may pass through turntable 6 is installed to pedestal
On 1.Support construction 5 may include transverse arm and elevating mechanism.As shown in Figure 1, transverse arm and elevating mechanism can be set mutual vertically
It sets.As shown in figure 1 shown in four-headed arrow in the vertical direction, which can pass through the mesoporous of turntable 6 and connect pedestal 1
With the transverse arm of support construction 5, and can raise and reduce, thus adjust the transverse arm of support construction 5 to the distance of pedestal 1, from
And adjust the relative positional relationship of the detector 4 on the transverse arm of support construction 5 and pedestal 1 or radiographic source 2.
Support construction 5 can also include the bracket being arranged on transverse arm, and the both ends of bracket are separately connected transverse arm and detector
4.As shown in figure 1 shown in four-headed arrow in the horizontal direction, bracket can on transverse arm along the extending direction of transverse arm (that is, water
Square to) move back and forth.For example, in the example of fig. 1, bracket on transverse arm can from the position A of the left end close to transverse arm to
It moves right to the position B of the right end close to transverse arm, to adjust the relative position of detector 4 and radiographic source 2 in the horizontal direction
Relationship.
In one embodiment, the range that bracket can move on transverse arm can not be symmetrically relative to longitudinal axis Z
's.For example, being located at radiographic source 2 vertical for two endpoints of the range that regulation bracket can move on transverse arm on transverse arm
It can be set to the endpoint of the same side of axis Z in the underface of radiographic source 2, and arrive longitudinal axis Z compared to the endpoint
Distance, the distance positioned at another endpoint to the longitudinal axis Z of the other side of longitudinal axis Z can be greater or lesser.It is such
Design is conducive to the phase for supporting easily to control radiographic source 2, sample 9 and detector 4 in the case where a variety of scan patterns at the same time
To positional relationship.
In the other end of bracket, detector 4 can be connected via the shaft 11 being arranged on bracket with bracket.As shown in figure 1
Form of arcs four-headed arrow shown in, detector 4 can pass around imaging plane shaft 11 rotate, thus adjust or change
Become the pitch angle on the surface for receiving the beam from radiographic source 2 of detector 4.In one embodiment, shaft 11
Extending direction can be perpendicular to the extending direction of transverse arm.
In one embodiment, the inside of support construction 5 may include control mechanism appropriate and driving mechanism.For example,
Control mechanism can receive control instruction and/or control parameter from control unit 10, and according to the received instruction of institute and/
Or the work of state modulator driving mechanism, so that support construction 5 executes lifting, transverse shifting and/or adjusting pitching as escribed above
The movement such as angle, to adjust the amplification ratio of imaging, visual field etc. under various scan patterns.
Support construction 5 can be controlled by control unit 10, detector 4 be controlled or regulated to locate in any position
Towards radiographic source 2, enable the ray launched from radiographic source 2 along by radiographic source 2 focus and 4 center of detector determine
Straight line and be vertically irradiated to detector 4 reception ray surface on.For example, control unit 10 can be according to corresponding control
Parameter processed determines the position of the position of radiographic source 2, the angle of the ray to be issued of radiographic source 2 and sample stage 7, then by simple
Geometric operation determine the height of support construction 5, the lateral position of detector 4 and pitch angle, and then example is executed to support construction 5
Such as lifting, transverse shifting and/or adjusting pitch angle movement, so that detector 4 is towards radiographic source 2.
The supply lines and data line of detector 4 can be connected respectively to power supply and control unit 10.In order to avoid winding, example
Such as, the supply lines of detector 4 and data line can be connected respectively to power supply and control unit 10 by the mesoporous of turntable 6.
Control unit 10 can have any processing unit appropriate or processing component of data analysis and process ability, example
Such as include the general or specialized computer of general or specialized processor, and can be configured as the movement control for realizing imaging process
System is (for example, the deformation and/or adjusting and/or movement and/or movement of any deformable or adjustable support construction in device
And/or rotation etc.), ray control (for example, intensity and/or angle etc. of control 2 divergent-ray of radiographic source), data acquire (example
Such as, by control detector 2, support construction 5 and 8 and turntable 6, come time and frequency for controlling data acquisition etc. and detection
The fineness etc. of the acquisition data of device 2), data for projection show, the various function such as tomographic image reconstructing and display, data analysis and process
Energy.
According in different embodiments, control unit 10 can pass through wired (for example, passing through previously described control line)
Or wirelessly with the other component (for example, radiographic source 2, detector 4, turntable 6, support construction 3,5,8 etc.) in device
It is communicated, to receive data and transmission instruction and/or control parameter etc..
For example, control unit 10 can be communicated wirelessly with support construction 5, to send to support construction 5
Such as parameter related with lifting, mobile transverse arm, the rotation of axis 11, to control to adjust position of the detector 4 relative to radiographic source 2
It sets and/or angle.
In addition, device can also include power supply (not shown), with into device all parts (for example, control unit 10,
Radiographic source 2 etc.) power supply.In a further embodiment, all parts in device can have individual power supply (such as battery),
Can also be powered using all parts of the wire-free electric power technology into device, enable all parts in device more from
It is moved by ground without being limited by physical connection, and the isostructural setting of such as slip ring can be saved.
X-ray imaging device according to an embodiment of the present application can support different imaging patterns, such as projection imaging
Mode, CT imaging pattern and CL imaging pattern.
Under projection imaging mode, for example, detector 4 can be automatically regulated manually or by control unit 10
Position and pitch angle enable the ray generated by radiographic source 2 to pass through the sample 9 on sample stage 7 in different directions, from
And acquire data for projection from different perspectives.
Under CT imaging pattern, for example, can manually adjust detector 4 to the underface of radiographic source 2, or pass through
Control unit 10 automatically controls the underface that detector 4 moves to radiographic source 2, the position B of example as shown in figure 1.In the mistake of scanning
Cheng Zhong can control support construction 8 and rotate around lateral shaft, so that the sample 9 on sample stage 7 be driven to rotate around lateral shaft.In energy
In the case where enough ensuring that sample 9 is not collided with other mechanical structures, sample 9 can be made to rotate arbitrary angle.
During CT scan, sample 9 can be made to be rotated by 360 °, and control detector 4 and use continous way or step-by-step movement
Data acquisition modes.In the case where the acquisition of continous way data, sample 9 can be made to remain rotation status.In step-by-step movement
In the case that data acquire, sample 9 can be made to rotate, and stopping rotating after predetermined angular, then control detector 4 and adopt
Collect data；Then, sample 9 is made to continue to rotate, and by with stop rotating after previously identical or different predetermined angular, then
It controls detector 4 and acquires data；Repeatedly, until sample 9 is rotated by 360 °.
In order to avoid collision, during CT scan, total rotation angle of sample 9 can also be made less than 360 degree, thus
Realize limited angle sweep.
Then, control unit 10 can receive through the collected data for projection of CT scan and execute image reconstruction algorithm,
To obtain CT image.
If sample 9 is plate-shaped body as such as chip, the operating mode of device can be switched to CL imaging
Mode.
Under CL imaging pattern, as shown in Figure 1, can control support construction 8 so that the position of sample 9 is regulated so that sample
The center of the area-of-interest of product 9 is overlapped with longitudinal axis Z or is located at longitudinal axis Z nearby (for example, arriving longitudinal axis Z
Distance is less than predetermined threshold).It is then possible to adjust position and the pitch angle of detector 4 so that by radiographic source 2 focus and
The straight line and longitudinal axis Z at detector center form angle, the position A of example as shown in figure 1.The angle be can control greater than 0 degree and
Less than 90 degree.Meanwhile the pencil-beam of the ray generated by radiographic source 2 can be enable at least to cover the area-of-interest of sample.
In CL scanning process, it can control radiographic source 2 and detector 4 remain stationary, and make sample stage 7 and sample stage 7
On sample 9 with turntable 6 rotate.Total rotation angle can be 360 degree.In a further embodiment, total rotation angle
It can be less than 360 degree or greater than 360 degree.
As needed, in CL scanning process, it can control detector 4 and use continous way or step-type data acquisition side
Formula.In the case where the acquisition of continous way data, sample 9 can be made to remain rotation status.In the feelings of step-by-step movement data acquisition
Under condition, sample 9 can be made to rotate, and stopping rotating after predetermined angular, then control detector 4 and acquire data；Then,
Make sample 9 continue to rotate, and by with stop rotating after previously identical or different predetermined angular, then control detector 4
Acquire data；Repeatedly, until sample 9 rotates to total rotation angle.
Then, control unit 10 can receive by CL scanning collection to data for projection and execute image reconstruction algorithm,
To obtain CL image.
Some embodiments of the present application have been described.However, described embodiment is only a part of the application
Embodiment, instead of all the embodiments.It can be in the case where not departing from scope of the present application, to side described herein
Method and system make various omissions, substitutions and changes in form.
Claims (10)
1. a kind of x-ray imaging device, which is characterized in that the x-ray imaging device includes:
Turntable, is set on the base and the longitudinal axis when being driven on vertical direction rotates；
Detector is connected to the pedestal via the first support construction of the mesoporous for passing through the turntable；
Sample stage is connected to the turntable via the second support construction；And
Radiographic source is set to and is connected to the pedestal via third support construction.
2. x-ray imaging device according to claim 1, which is characterized in that first support construction includes elevator
Structure, transverse arm and bracket, the elevating mechanism pass through the mesoporous of the turntable and connect the pedestal and the transverse arm, the bracket
It is movably disposed on the transverse arm and connects the detector and the transverse arm.
3. x-ray imaging device according to claim 2, which is characterized in that the detector is via on the bracket
Shaft is connected to the bracket, to change pitch angle by rotating around the shaft.
4. x-ray imaging device according to claim 2, which is characterized in that the bracket is removable on the transverse arm
Dynamic range is asymmetric relative to the longitudinal axis.
5. x-ray imaging device according to claim 1, which is characterized in that second support construction is that one end is fixed
Mechanical arm on the turntable.
6. x-ray imaging device according to claim 1, which is characterized in that the sample stage is via second support
Rotating mechanism in structure is connected to second support construction, and the rotating mechanism drives the sample stage to enclose when being driven
Around the center axis rotation of the rotating mechanism.
7. x-ray imaging device according to claim 6, which is characterized in that the central axis of the rotating mechanism with it is described
Longitudinal axis orthogonal.
8. x-ray imaging device according to claim 1, which is characterized in that the third support construction is that one end is fixed
Mechanical arm on the base.
9. x-ray imaging device according to claim 1, which is characterized in that the pitch angle of the detector is configured as
So that the straight line determined by the focus of the radiographic source and the center of the detector is penetrated perpendicular to the reception of the detector
The surface of line.
10. according to claim 1 to x-ray imaging device described in any one of 9, which is characterized in that the x-ray imaging
Device further include:
Control unit is connected to the turntable, detector, the radiographic source, described by wired or wireless mode
One or more of first support construction, second support construction and described third support construction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820650691.3U CN208420749U (en) | 2018-05-03 | 2018-05-03 | A kind of x-ray imaging device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820650691.3U CN208420749U (en) | 2018-05-03 | 2018-05-03 | A kind of x-ray imaging device |
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| CN208420749U true CN208420749U (en) | 2019-01-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108535289A (en) * | 2018-05-03 | 2018-09-14 | 中国科学院高能物理研究所 | A kind of x-ray imaging device |
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- 2018-05-03 CN CN201820650691.3U patent/CN208420749U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108535289A (en) * | 2018-05-03 | 2018-09-14 | 中国科学院高能物理研究所 | A kind of x-ray imaging device |
| CN108535289B (en) * | 2018-05-03 | 2024-05-24 | 中国科学院高能物理研究所 | X-ray imaging device |
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