CN208378989U - The on-line monitoring system of Pvd equipment vacuum pump rotor - Google Patents
The on-line monitoring system of Pvd equipment vacuum pump rotor Download PDFInfo
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- CN208378989U CN208378989U CN201821012036.1U CN201821012036U CN208378989U CN 208378989 U CN208378989 U CN 208378989U CN 201821012036 U CN201821012036 U CN 201821012036U CN 208378989 U CN208378989 U CN 208378989U
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- vacuum pump
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Abstract
The utility model discloses a kind of on-line monitoring systems of Pvd equipment vacuum pump rotor, including the first acceleration transducer, the second acceleration transducer and main control module；Wherein, the first acceleration transducer is fixedly connected on axial monitoring surface, for monitoring the axial acceleration of vacuum pump to be measured；Second acceleration transducer is fixedly connected on radial monitoring surface, for monitoring the radial acceleration of vacuum pump to be measured；Main control module is connect with the first acceleration transducer and the second acceleration transducer respectively, axial acceleration signal for being sent according to the first acceleration transducer, and second acceleration transducer send radial acceleration signal, judge whether the vacuum pump rotor of vacuum pump to be measured damages.The utility model monitors the working condition real-time perfoming of vacuum pump, vacuum pump exception can be found in time, so that the reliability of vacuum pump greatly improves.
Description
Technical field
The utility model relates to technical field of physical vapor deposition more particularly to a kind of Pvd equipment vacuum pumps
The on-line monitoring system of rotor.
Background technique
Physical vapour deposition (PVD) (PVD), which refers to, realizes that substance shifts using physical process, and atom or molecule are transferred to by source
Process on substrate surface.For the competitiveness for realizing scale effect to reduce cost, increase product, more and more factories exist
Production Pvd equipment is pushed, and vacuum pump (dry pump, screw pump, molecular pump etc.) is wherein critically important a part.
Vacuum pump is generally made of motor, main shaft, rotor, pump and bearing, and in order to protect vacuum pump, current vacuum pump is all
Premature beats, overtemperture control etc. protection system can be set.
It is whole however, current protection system is not monitored the moving component in vacuum pump, and due to vacuum pump
Body life time and bearing and other moving component working lives are closely related, when vacuum pump long-play, mutation loaded, work
The influence of the factors such as temperature rise, motor speed, mechanical wear, failure occur have very big uncertainty.Once failure is sent out suddenly
It is raw, it will lead to overload shutdown, inner body breakage and complete production line and stop production.
In order to avoid the damage bring of vacuum pump is lost, has begun at present and reality is carried out in use to vacuum pump
When monitor, and currently used on-line monitoring method mainly include monitor vacuum pump electric current, voltage and power etc., but at present
Monitoring method cannot achieve precisely reaction vacuum pump rotor operating status, cannot repair and prevent in advance.
Utility model content
The purpose of this utility model is to provide a kind of on-line monitoring system of Pvd equipment vacuum pump rotor,
To solve the above problems, in the vacuum pump course of work, real-time monitoring is carried out to vacuum pump, can find that in time vacuum pump is different
Often, so that the reliability of vacuum pump greatly improves.
The on-line monitoring system of Pvd equipment vacuum pump rotor provided by the utility model, for to be measured true
Sky pump is monitored on-line, wherein the axial position of vacuum pump to be measured is provided with axial monitoring surface, the radial position of vacuum pump to be measured
It installs and is equipped with radial monitoring surface；The on-line monitoring system of the Pvd equipment vacuum pump rotor includes:
First acceleration transducer is fixedly connected on the axial monitoring surface, for monitoring the vacuum pump to be measured
Axial acceleration；
Second acceleration transducer is fixedly connected on the radial monitoring surface, for monitoring the vacuum pump to be measured
Radial acceleration；
Main control module, the main control module are passed with first acceleration transducer and second acceleration respectively
Sensor connection, axial acceleration signal and second acceleration for being sent according to first acceleration transducer
The radial acceleration signal that sensor is sent, judges whether the vacuum pump rotor of the vacuum pump to be measured damages.
The on-line monitoring system of Pvd equipment vacuum pump rotor as described above, wherein preferably, described
First acceleration transducer is fixed by bolts on the axial monitoring surface.
The on-line monitoring system of Pvd equipment vacuum pump rotor as described above, wherein preferably, described
Second acceleration transducer is fixed by bolts on the radial monitoring surface.
The on-line monitoring system of Pvd equipment vacuum pump rotor as described above, wherein preferably, described
First acceleration transducer is fixed on the axial monitoring surface by magnet.
The on-line monitoring system of Pvd equipment vacuum pump rotor as described above, wherein preferably, described
Second acceleration transducer is fixed on the radial monitoring surface by magnet.
The on-line monitoring system of Pvd equipment vacuum pump rotor as described above, wherein preferably, described
The both ends of the axial position of the vacuum pump to be measured are arranged in axial monitoring surface, are provided on the two axial monitoring surfaces described
First acceleration transducer；
The radial direction monitoring surface is arranged in the both ends of the radial position of the vacuum pump to be measured, on the two radial monitoring surfaces
It is provided with second acceleration transducer.
The on-line monitoring system of Pvd equipment vacuum pump rotor as described above, wherein preferably, described
First acceleration transducer is located at the center of the axial monitoring surface；Second acceleration transducer is located at the radial direction
The center of monitoring surface.
The on-line monitoring system of Pvd equipment vacuum pump rotor as described above, wherein preferably, also wrap
Electromagnetism interference device is included, one end of the electromagnetism interference device is connected with the main control module, and the other end is respectively with described
One acceleration transducer is connected with second acceleration transducer.
The on-line monitoring system of Pvd equipment vacuum pump rotor as described above, wherein preferably, also wrap
Include filter, one end of the filter is connected with the main control module, the other end respectively with first acceleration sensing
Device is connected with second acceleration transducer.Pvd equipment vacuum pump rotor provided by the utility model it is online
Monitoring system, including the first acceleration transducer, the second acceleration transducer and main control module；Wherein, the first acceleration passes
Sensor is fixedly connected on axial monitoring surface, for monitoring the axial acceleration of vacuum pump to be measured；Second acceleration transducer is solid
Surely it is connected on radial monitoring surface, for monitoring the radial acceleration of vacuum pump to be measured；Main control module accelerates with first respectively
It spends sensor and the second acceleration transducer connects, the axial acceleration signal for being sent according to the first acceleration transducer,
And second acceleration transducer send radial acceleration signal, judge whether vacuum pump to be measured damages.The utility model pair
The working condition real-time perfoming of vacuum pump monitors, and vacuum pump exception can be found in time, so that the reliability of vacuum pump greatly mentions
It is high.
Detailed description of the invention
Fig. 1 is the on-line monitoring system of Pvd equipment vacuum pump rotor provided by the embodiment of the utility model
Structural schematic diagram；
Fig. 2 is the on-line monitoring system of Pvd equipment vacuum pump rotor provided by the embodiment of the utility model
Structural block diagram.
Description of symbols:
10- vacuum pump 11- axial direction monitoring surface 12- radial direction monitoring surface
20- the first acceleration transducer 30- the second acceleration transducer 40- main control module
50- filter
Specific embodiment
The embodiments of the present invention are described below in detail, the example of embodiment is shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, and is only used for explaining the utility model, and cannot be construed to limitations of the present invention.
Vacuum pump rotor in the process of running, will drive vacuum pump and integrally generate vibration, therefore set on the outside of vacuum pump
The state of vacuum pump rotor can be reflected in real time by setting the first acceleration transducer 20 and the second acceleration transducer 30 then.
The on-line monitoring system of Pvd equipment vacuum pump rotor provided by the embodiment of the utility model, for pair
Vacuum pump 10 to be measured is monitored on-line, wherein the axial position of vacuum pump 10 to be measured is provided with axial monitoring surface 11, to be measured true
The radial position of sky pump 10 is provided with radial monitoring surface 12；And the on-line monitoring system of Pvd equipment vacuum pump rotor
Including the first acceleration transducer 20, the second acceleration transducer 30 and main control module 40.
Wherein, the first acceleration transducer 20 is fixedly connected on axial monitoring surface 11, for monitoring vacuum pump 10 to be measured
Axial acceleration.
Second acceleration transducer 30 is fixedly connected on radial monitoring surface 12, for monitoring the radial direction of vacuum pump 10 to be measured
Acceleration.
Main control module 40 is connect with the first acceleration transducer 20 and the second acceleration transducer 30 respectively, is used for basis
The radial acceleration that the axial acceleration signal and the second acceleration transducer 30 that first acceleration transducer 20 is sent are sent
Signal, judges whether the vacuum pump rotor of vacuum pump 10 to be measured damages.
In the present embodiment, using the first acceleration transducer 20 and the second acceleration transducer 30 vacuum pump 10 rotor
Rotation work during, the vibrating state of real time on-line monitoring vacuum pump 10, and by the axial acceleration of the vibrating state believe
Number and radial acceleration signal be sent to main control module 40, main control module 40 can be by the axial acceleration signal and radial direction
Acceleration signal is compared with the setting acceleration signal range of the vacuum pump 10, so that it is determined that the vacuum pump of vacuum pump 10 turns
Whether son damages, such as: by taking 2000L/S molecular pump as an example, judge whether axial acceleration signal and radial acceleration signal are equal
In 0.1mm/s2~0.8mm/s2Between, if it is, the vacuum pump rotor of vacuum pump 10 is normal, otherwise vacuum pump 10 is true
Empty pump rotor then damages.
In the present embodiment, the working condition real-time perfoming of vacuum pump 10 is monitored, can find the true of vacuum pump 10 in time
Empty pump rotor is abnormal, so that the reliability of vacuum pump 10 greatly improves.
Further, the first acceleration transducer 20 and the second acceleration transducer 30 can be solid by conventional fastener
It is scheduled on vacuum pump 10, such as: it is fixed on vacuum pump 10 to be measured using bolt etc..
In a preferred embodiment, for the ease of arranging or dismantle the first acceleration transducer 20 and the second acceleration
First acceleration transducer 20 and the second acceleration transducer 30 can be separately fixed at axial prison using magnet by sensor 30
On survey face 11 and radial monitoring surface 12.
It is of course also possible to which the mode combined using fasteners such as bolts with magnet, is caused to avoid the vibration of vacuum pump 10
First acceleration transducer 20 and the second acceleration transducer 30 fall off.
In order to improve monitoring result levels of precision, the vibration signal of vacuum pump 10 is precisely obtained, it is preferable that the first acceleration
Sensor 20 is located at the center of axial monitoring surface 11；Second acceleration transducer 30 is located at the centre bit of radial monitoring surface 12
It sets.
To further increase monitoring result accuracy, axis can be respectively provided at the both ends of the axial position of vacuum pump 10 to be measured
To monitoring surface 11, the first acceleration transducer 20 is respectively provided on two axial monitoring surfaces 11；In the radial position of vacuum pump 10 to be measured
Both ends be respectively provided with radial monitoring surface 12, be respectively provided with the second acceleration transducer 30 on two radial monitoring surfaces 12.So, in determination
When the degree of impairment of vacuum pump 10, whether vacuum pump 10 can be determined according to the vibration signal of any one in four sensors
Damage, so that it is guaranteed that remaining sensor can continue to real-time monitoring vacuum pump 10 when there is one or two sensor failures
Vacuum pump rotor, it is ensured that the vacuum pump rotor of vacuum pump 10 is not at no monitor state.
Further, main control module 40 can be wireless with the first acceleration transducer 20 and the second acceleration transducer 30
Connection, in order to guarantee to transmit the stability of signal, in the present embodiment, it is preferred to use conducting wire connection, that is, main control module 40 with
First acceleration transducer 20 is connected by conducting wire with the second acceleration transducer 30；And in order to avoid being produced in monitoring process
The signals such as raw electromagnetic wave interfere the work of physical vapour deposition (PVD) (PVD) equipment, also for avoiding physical vapour deposition (PVD)
(PVD) work of signal interferences first acceleration transducers 20 and the second acceleration transducer 30 such as the electromagnetism generated when equipment works
Make, it is preferable that shielded layer is coated on the outside of conducting wire.
It further, further include electromagnetism interference device, electromagnetism interference device is connected to main control module 40 and is connected to
In the conducting wire of one acceleration transducer 20 and the second acceleration transducer 30.That is, one end and the main control of electromagnetism interference device
Module 40 be connected, and the other end of electromagnetism interference device then respectively with the first acceleration transducer 20 and the second acceleration transducer
30 are connected.The electromagnetism interference device can more preferably shield electromagnetic interference signal, to further increase monitoring result
Levels of precision.
It preferably, further include filter 50, filter 50 is connected to main control module 40 and is connected to the first acceleration sensing
In the conducting wire of device 20 and the second acceleration transducer 30.That is, one end of filter 50 is connected with main control module 40, the other end
It is connected respectively with the first acceleration transducer 20 and the second acceleration transducer 30.The filter 50 is to the first acceleration transducer
20 and second acceleration transducer 30 acquire signal be filtered, to better ensure that the levels of precision of vibration signal.
In one embodiment, main control module 40 can be computer, and computer can receive the first acceleration sensing
The signal that device 20 and the second acceleration transducer 30 are sent, and be compared and show, to remind the vacuum of user's vacuum pump 10
The damage of pump rotor.
The structure, features, and effects of the present invention is described in detail based on the embodiments shown in the drawings, with
Upper is only the preferred embodiment of the utility model, but the present invention does not limit the scope of implementation as shown in the drawings, all according to this
Change or equivalent example modified to equivalent change made by the conception of utility model, still without departing from specification and diagram institute
When the spirit covered, it should be within the protection scope of the present utility model.
Claims (9)
1. a kind of on-line monitoring system of Pvd equipment vacuum pump rotor, for being supervised online to vacuum pump to be measured
It surveys, wherein the axial position of vacuum pump to be measured is provided with axial monitoring surface, and the radial position of vacuum pump to be measured is provided with radial prison
Survey face；It is characterised by comprising:
First acceleration transducer is fixedly connected on the axial monitoring surface, for monitoring the axial direction of the vacuum pump to be measured
Acceleration；
Second acceleration transducer is fixedly connected on the radial monitoring surface, for monitoring the radial direction of the vacuum pump to be measured
Acceleration；
Main control module, the main control module respectively with first acceleration transducer and second acceleration transducer
Connection, axial acceleration signal and second acceleration sensing for being sent according to first acceleration transducer
The radial acceleration signal that device is sent, judges whether the vacuum pump rotor of the vacuum pump to be measured damages.
2. the on-line monitoring system of Pvd equipment vacuum pump rotor according to claim 1, which is characterized in that
First acceleration transducer is fixed by bolts on the axial monitoring surface.
3. the on-line monitoring system of Pvd equipment vacuum pump rotor according to claim 1, which is characterized in that
Second acceleration transducer is fixed by bolts on the radial monitoring surface.
4. the on-line monitoring system of Pvd equipment vacuum pump rotor according to claim 1, which is characterized in that
First acceleration transducer is fixed on the axial monitoring surface by magnet.
5. the on-line monitoring system of Pvd equipment vacuum pump rotor according to claim 1, which is characterized in that
Second acceleration transducer is fixed on the radial monitoring surface by magnet.
6. the on-line monitoring system of Pvd equipment vacuum pump rotor according to claim 1, which is characterized in that
The both ends of the axial position of the vacuum pump to be measured are arranged in the axial direction monitoring surface, are provided on the two axial monitoring surfaces
First acceleration transducer；
The both ends of the radial position of the vacuum pump to be measured are arranged in the radial direction monitoring surface, are all provided on the two radial monitoring surfaces
It is equipped with second acceleration transducer.
7. the on-line monitoring system of Pvd equipment vacuum pump rotor according to claim 1, which is characterized in that
First acceleration transducer is located at the center of the axial monitoring surface；Second acceleration transducer is located at described
The center of radial monitoring surface.
8. the on-line monitoring system of Pvd equipment vacuum pump rotor according to any one of claim 1 to 7,
It is characterized in that, further including electromagnetism interference device, one end of the electromagnetism interference device is connected with the main control module, another
End is connected with first acceleration transducer and second acceleration transducer respectively.
9. the on-line monitoring system of Pvd equipment vacuum pump rotor according to claim 8, which is characterized in that
Further include filter, one end of the filter is connected with the main control module, the other end respectively with first acceleration
Sensor is connected with second acceleration transducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821012036.1U CN208378989U (en) | 2018-06-28 | 2018-06-28 | The on-line monitoring system of Pvd equipment vacuum pump rotor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821012036.1U CN208378989U (en) | 2018-06-28 | 2018-06-28 | The on-line monitoring system of Pvd equipment vacuum pump rotor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208378989U true CN208378989U (en) | 2019-01-15 |
Family
ID=64965873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821012036.1U Active CN208378989U (en) | 2018-06-28 | 2018-06-28 | The on-line monitoring system of Pvd equipment vacuum pump rotor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208378989U (en) |
-
2018
- 2018-06-28 CN CN201821012036.1U patent/CN208378989U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 102299 room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. Address before: 102299 room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY (BEIJING) Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211027 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: 102299 room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |