CN208282597U - A kind of combined type microwave sintering device being used to prepare oxide ceramics target - Google Patents
A kind of combined type microwave sintering device being used to prepare oxide ceramics target Download PDFInfo
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- CN208282597U CN208282597U CN201721697554.7U CN201721697554U CN208282597U CN 208282597 U CN208282597 U CN 208282597U CN 201721697554 U CN201721697554 U CN 201721697554U CN 208282597 U CN208282597 U CN 208282597U
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- 238000009768 microwave sintering Methods 0.000 title claims abstract description 27
- 229910052574 oxide ceramic Inorganic materials 0.000 title claims abstract description 8
- 239000011224 oxide ceramic Substances 0.000 title claims abstract description 7
- 238000005245 sintering Methods 0.000 claims abstract description 72
- 238000010438 heat treatment Methods 0.000 claims abstract description 67
- 238000000034 method Methods 0.000 claims abstract description 23
- 238000005485 electric heating Methods 0.000 claims abstract description 22
- 230000008569 process Effects 0.000 claims abstract description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 18
- 238000001816 cooling Methods 0.000 claims description 11
- 239000010410 layer Substances 0.000 claims description 10
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 239000003063 flame retardant Substances 0.000 claims description 8
- 239000011241 protective layer Substances 0.000 claims description 8
- 239000011449 brick Substances 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 210000000038 chest Anatomy 0.000 claims description 2
- 230000006698 induction Effects 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 abstract description 2
- 239000002131 composite material Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 239000000843 powder Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 229910006295 Si—Mo Inorganic materials 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 206010037660 Pyrexia Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000567 combustion gas Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
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Abstract
本实用新型公开了一种用于制备氧化物陶瓷靶材的复合式微波烧结装置，烧结装置包括电加热控制系统(1)、微波加热控制系统(2)和烧结炉(3)，其中电加热控制系统(1)用于控制电加热过程；微波加热控制系统(2)用于控制微波加热过程；烧结炉(3)用于放置、烧结氧化物陶瓷靶材；电加热控制系统(1)和微波加热控制系统(2)可以设置为同时工作，也可以设置为分时段工作。通过两者加热方式的相互辅助作用，达到降低能耗，快速有效烧结的效果，能够控制升温速度，能够实现对温度的精确控制，使得微波加热技术在烧结领域能够大规模推广应用，可以得到大尺寸、结构完整、性能良好的陶瓷材料。
The utility model discloses a composite microwave sintering device for preparing oxide ceramic targets. The sintering device comprises an electric heating control system (1), a microwave heating control system (2) and a sintering furnace (3), wherein the electric heating The control system (1) is used to control the electric heating process; the microwave heating control system (2) is used to control the microwave heating process; the sintering furnace (3) is used to place and sinter oxide ceramic targets; the electric heating control system (1) and The microwave heating control system (2) can be set to work at the same time, or can be set to work in different periods of time. Through the mutual assistance of the two heating methods, the effect of reducing energy consumption, rapid and effective sintering can be achieved, the heating rate can be controlled, and the temperature can be precisely controlled, so that the microwave heating technology can be widely used in the sintering field and can be obtained. Ceramic materials with complete size, structural integrity and good performance.
Description
Technical field
The utility model belongs to oxide ceramic material Preparation equipment field, and in particular to one kind is used to prepare oxide pottery
The combined type microwave sintering device of porcelain target.
Background technique
Sintering is an important link of ceramic field material preparation process, to powder or the base made of powder
Body is heated by certain program and temperature, so that gap is reduced between powder, powder is assembled, internal microstructure hair
Raw apparent variation, leads to densifying materials, improves the performance of material, or even can obtain some new physicochemical properties.
The quality of sintering process can directly affect the final performance of ceramics, therefore the selection of sintering processing is for the preparation process of ceramics
Seem of crucial importance.
Sintering furnace common in sintering process is resistance-type sintering furnace at present, and heating method is mainly that electric current flows through high electricity
The heating component of resistance rate generates a large amount of heat in furnace interior, these heats are transmitted by way of heat radiation and convection current
The outside of material in furnace, heat are internally shifted by material outer by way of heat transfer again, are finally made in material
External heat distribution reaches dynamic equilibrium, to achieve the purpose that heating material.Resistance-type sintering furnace uses electric energy production heat
Amount can obtain combustion gas or the coal-fired high temperature being not achieved, successfully instead of heating method more original in early days.However,
The acquisition of sintering process high temperature needs to consume a large amount of electric energy, the mistake that the heat generated is shifted from heating component to material
Cheng Zhong will cause and be largely lost, and only some heat is directly used in material heating, cause great waste to the energy, and
Conduction pattern due to heat in material bodies from outer to inner easily generates temperature gradient in material internal, causes material each section
Heating is uneven, generates thermal stress, causes the cracking of material, at the same pattern to material internal and structure can also cause it is very big
It influences, to influence the performance of product.
Summary of the invention
In order at least solve one of technical problem of the existing technology mentioned above, the utility model discloses a kind of use
In the combined type microwave sintering device for preparing oxide ceramics target, which includes that electric-heating control system 1, microwave add
Thermal control system 2 and sintering furnace 3, electric-heating control system 1 therein is for controlling electric heating process, microwave heating control system
System 2 for controlling microwave heating process, sintering furnace 3 for placing, sintered ceramic oxide target.
As alternative embodiment disclosed by the utility model, 1 He of electric-heating control system of combined type microwave sintering device
Microwave heating control system 2 can be set to work at the same time, and may be set to be and works at times.
As alternative embodiment disclosed by the utility model, the electric-heating control system 1 of combined type microwave sintering device can
To include:
Heating unit 11 is arranged in sintering furnace 3, for utilizing electric energy heating sintering furnace 3；
Temperature sensing unit 12, for the temperature in induction sintering furnace 3；
Temperature recording unit 13 is connect with temperature sensing unit 12, for detecting the temperature in record sintering furnace；
Procedure control unit 14 is connected with temperature recording unit 13, for control heating temperature, heat temperature raising speed,
Temperature hold-time, cooling rate；
Computer heating control switch 15 is connected with procedure control unit 14, for start heating unit 11 heating process and
Terminate heating process；
Vacuum control unit 16, including vacuum pump 161, vacuum control knob 162 and vacuum inspective meter 163, wherein
Vacuum pump 161 is connected with sintering furnace 3, for providing vacuum for sintering furnace 3；Vacuum inspective meter 163 is connected with sintering furnace 3
It connects, for detecting the vacuum degree in sintering furnace 3；Vacuum control knob 162 is connected with vacuum pump 161 and vacuum inspective meter 163
It connects, for starting or stoping vacuum pump 161.
As the utility model alternative embodiment, the microwave heating control system 2 of combined type microwave sintering device can be set
It sets and includes:
Microwave emitter 21 is set to 3 top of sintering furnace；
Microwave control unit 22 is connected with microwave emitter 21, for controlling microwave emitter 21.
As the utility model alternative embodiment, the microwave emitter 21 that combined type microwave sintering device includes can be set
It is set to multiple.
As the utility model alternative embodiment, combined type microwave sintering fills 21 phase of multiple microwave emitters centered
Together.
As the utility model alternative embodiment, the sintering furnace 3 that combined type microwave sintering device includes can be set to more
Layer structure.
As the utility model alternative embodiment, the multilayered structure of sintering equipment may include in combined type microwave agglomerating furnace
Flame retardant coating 31, insulating layer 32, protective layer 33 and the external stiffening formation 34 set gradually from inside to outside.
As the utility model alternative embodiment, multilayered structure is formed in combined type microwave sintering device sintering furnace 3
Interior thorax is positive cube shape or cuboid.
As the utility model alternative embodiment, combined type microwave sintering device can also include being arranged on sintering furnace
Cooling unit 4, for 3 cooling down of sintering furnace.
As the utility model alternative embodiment, the flame retardant coating 31 that combined type microwave sintering device includes, which can be set, serves as reasons
The flame retardant coating that high purity aluminium oxide refractory brick is constituted, the heat preservation that insulating layer 32 can be set to be made of high purity aluminium oxide foamed brick
Layer, protective layer 33 can be set as the protective layer made of stainless steel plate, and external stiffening formation 34 can be set to be located at sintering
The support construction of 3 bottom of furnace.
Combined type microwave agglomerating furnace disclosed by the invention is integrated with traditional resistive heating and microwave heating two ways,
By the mutual booster action of the two heating method, reach reduction energy consumption, the effect being quickly and effectively sintered can control heating speed
Degree, can be realized the accurate control to temperature, enable microwave heating technique in sintering art large-scale promotion application, can be with
Obtain large scale, structural integrity, ceramic material of good performance.
Detailed description of the invention
Fig. 1 combined type microwave sintering device composed structure schematic diagram
Appended drawing reference
1 electric-heating control system, 11 heating unit, 12 temperature sensing unit
13 temperature recording unit, 14 procedure control unit, 15 computer heating control switch
16 vacuum control unit, 161 vacuum pump, 162 vacuum control knob
163 vacuum inspective meter, 2 microwave heating control system, 21 microwave emitter
22 microwave control unit, 3 sintering furnace, 31 flame retardant coating
32 insulating layer, 33 protective layer, 34 external stiffening formation
4 cooling units
Specific embodiment
Dedicated word " embodiment " herein, should not necessarily be construed as being better than as any embodiment illustrated by " exemplary " or
It is better than other embodiments.It should be understood that it is to describe special embodiment that term described in the invention, which is only, not use
In limitation present disclosure.
Unless otherwise stated, technical and scientific terms used herein has the invention technical field
The normally understood identical meanings of those of ordinary skill.
In order to better illustrate the content of the utility model, given in specific embodiment below numerous specific thin
Section.It will be appreciated by those skilled in the art that without certain details, the present invention equally be can be implemented.In embodiment, for
Certain methods well known to those skilled in the art, means, instrument, equipment, raw material composition, molecular structure etc. are not described in detail,
In order to highlight purport of the invention.
The utility model is interpreted in detail below in conjunction with attached drawing, is implemented convenient for relatively sharp description the utility model
The technical solution of example.Fig. 1 is the combined type microwave sintering device disclosed by the utility model for being used to prepare oxide ceramics target
Composed structure schematic diagram.
Combined type microwave sintering device disclosed in the embodiment includes electric-heating control system 1, microwave heating control system 2
With sintering furnace 3, wherein electric-heating control system 1 includes the heating unit 11 being arranged in sintering furnace 3, and heating unit 11 can be set
It is set to two or multiple, and the setting position of heating unit can be in the side of sintering furnace, can also be in bottom, such as it can
To be equipped with four groups of Si-Mo rods as electric heating component in burner hearth four sides inner wall, high-power electric current flows through Si-Mo rod, can produce
Raw amount of heat heats the material in burner hearth；Temperature sensing unit 12 usually can be set to one or multiple,
Setting position also can choose in bottom, top, side or other positions, such as may include two traditional high temperature thermoelectrics
One infrared temperature sensor of even summation, two conventional thermocouples are located at furnace roof and burner hearth side, for measuring in burner hearth
Temperature, infrared temperature sensor can be set in furnace roof, sample stage is directed toward, for measuring the temperature of sample itself；Temperature passes
The sense setting of unit 12 is connected with temperature recording unit 13 and procedure control unit 14, for detecting the temperature in record sintering furnace simultaneously
Control the cooling rate of electrical heating temperature, electric heating heating rate, the temperature hold-time in sintering furnace, sintering furnace；Program control
Unit 14 processed can also be arranged including information display component, for example, the temperature of detection can be shown.The computer heating control of setting switchs
15, it is connected with procedure control unit 14, for starting the heating process of heating unit 11 and terminating heating process.
Vacuum control unit 16 includes vacuum pump 161, vacuum control knob 162 and vacuum inspective meter 163, wherein true
Sky pump 161 is connected with sintering furnace 3, can be used for providing vacuum for sintering furnace 3；Vacuum inspective meter 163 is connected with sintering furnace 3
It connects, for detecting the vacuum degree in sintering furnace 3；Vacuum control knob 162 is connected with vacuum pump 161 and vacuum inspective meter 163
It connects, for starting or stoping vacuum pump 161.If necessary to be sintered in specific gas atmosphere, vacuum pump, gas supply can be filled
It sets and is connected with sintering furnace by threeway, only need for feeder to be connected with sintering furnace at this time, can be logical in sintering furnace
Enter the gas of needs.
The microwave heating control system 2 being arranged in the present embodiment includes microwave emitter 21 and microwave control unit 22.It is micro-
Wave launcher 21 can be set to one, may be set to be multiple, and multiple microwave emitters facilitate temperature when microwave heating
Be uniformly distributed, such as can the top of sintering furnace 3 be arranged 8 identical microwave emitters 21, the cavity of microwave emitter
It can be directly embedded into the microwave interface on furnace roof top, and with sealing material that sealing joint is tight.Pass through microwave control unit 22
It controls the power of microwave, start and stop, runing time etc..Microwave is by promoting material internal molecular vibration to generate heat, material
It is outwardly spread again after the whole fever of material, so that material be made to reach heating effect.This heating method can effectively solve electricity and add
Material internal temperature gradient and the problem of thermal stress in thermal process, while shorten heating time substantially, improve the benefit of thermal energy
With rate, the waste of the energy is reduced.
Microwave heating control system 2 and electric-heating control system 1 in the utility model embodiment can be set to simultaneously
Work, may be set to be and work at times, can also connect starting at times.It is, for example, possible to use electric-heating control systems 1
Sintering furnace is heated to certain temperature, such as 1000 degrees Celsius, then starts microwave heating control system 2, two heating systems are same
When work, until the sintering temperature that is needed, such as 1500 degrees Celsius, 1600 degrees Celsius or other temperature.
As in embodiment disclosed by the utility model, sintering furnace burner hearth is cuboid, and dischargeable capacity reaches 90 centimetres
× 70 70 centimetres of cm x.Sintering furnace 3 includes the flame retardant coating 31 being made of high purity aluminium oxide refractory brick, by high purity aluminium oxide foam
The insulating layer 32 that brick is constituted, protective layer 33 made of stainless steel plate, the support construction 34 positioned at 3 bottom of sintering furnace.
Cooling device 4 is circulating water cooling system, can be set outside sintering furnace, also can be set inside furnace wall, example
Such as, circulating water pipe can be set in furnace wall inner wrap, is passed through cooling water in water pipe, takes away what burner hearth distributed outward by water flow
Heat, water inlet are provided with water pressure gauge, and for detecting water feeding pressure, water outlet is equipped with temperature alarm, for preventing out water temperature
Height is spent, the hot water of outflow can continue cycling through use after cooling treatment, and any exception occurs in cooling water, and alarm can be automatic
Starting, while electric-heating control system is fed back to, stove stops heating.
Microwave heating control system provided by the utility model can control heating rate, can be realized to the accurate of temperature
Control, enables microwave heating technique in sintering art large-scale promotion application, available large scale, structural integrity, property
It can good ceramic material.
The foregoing is merely schematical specific embodiments disclosed by the utility model, are not departing from the use of the new type structure
Under the premise of thinking with principle, the equivalent changes and modifications that any those skilled in the art is made, or to the utility model skill
The technical solution that any combination of art feature obtains should belong to the claimed range of the utility model.
Claims (10)
1. a kind of combined type microwave sintering device for being used to prepare oxide ceramics target, which is characterized in that the sintering equipment packet
Include electric-heating control system (1), microwave heating control system (2) and sintering furnace (3), in which:
The electric-heating control system (1) is for controlling electric heating process；
The microwave heating control system (2) is for controlling microwave heating process；
The sintering furnace (3) for place, sintered ceramic oxide target；
The electric-heating control system (1) and the microwave heating control system (2) can be set to work at the same time, and can also set
It is set to and works at times.
2. combined type microwave sintering device according to claim 1, which is characterized in that the electric-heating control system (1)
Include:
Heating unit (11) is arranged in sintering furnace (3), for utilizing electric energy heating sintering furnace (3)；
Temperature sensing unit (12), for the temperature in induction sintering furnace (3)；
Temperature recording unit (13) is connect with the temperature sensing unit (12), for detecting the temperature in record sintering furnace；
Procedure control unit (14) is connected with the temperature recording unit (13), for controlling heating temperature, heat temperature raising speed
Degree, temperature hold-time, cooling rate；
Computer heating control switchs (15), is connected with described program control unit (14), for starting the heating of heating unit (11)
Process and termination heating process；
Vacuum control unit (16), including vacuum pump (161), vacuum control knob (162) and vacuum inspective meter (163),
In:
The vacuum pump (161) is connected with the sintering furnace (3), for providing vacuum for the sintering furnace (3)；
The vacuum inspective meter (163) is connected with sintering furnace (3), for detecting the vacuum degree in sintering furnace；
The vacuum control knob (162) is connected with the vacuum pump (161) and the vacuum inspective meter (163), is used for
Start or stop vacuum pump.
3. combined type microwave sintering device according to claim 1, which is characterized in that the microwave heating control system
(2) include:
Microwave emitter (21) is set to sintering furnace (3) top；
Microwave control unit (22) is connected with the microwave emitter (21), for controlling microwave emitter (21).
4. combined type microwave sintering device according to claim 3, which is characterized in that microwave emitter (21) setting
It is multiple.
5. combined type microwave sintering device according to claim 4, which is characterized in that the multiple microwave emitter (21)
It is identical.
6. combined type microwave sintering device according to claim 1, which is characterized in that the sintering furnace (3) is set as more
Layer structure.
7. combined type microwave sintering device according to claim 6, which is characterized in that the multilayer knot of the sintering furnace (3)
Structure includes the flame retardant coating (31) set gradually from inside to outside, insulating layer (32), protective layer (33) and external stiffening formation (34).
8. combined type microwave sintering device according to claim 6, which is characterized in that the sintering that the multilayered structure is formed
The interior thorax of furnace (3) is positive cube shape or cuboid.
9. combined type microwave sintering device according to claim 1, which is characterized in that the sintering equipment further includes setting
Cooling unit (4) on sintering furnace, for the sintering furnace cooling down.
10. combined type microwave sintering device according to claim 7, which is characterized in that the flame retardant coating (31) is set as
The flame retardant coating being made of high purity aluminium oxide refractory brick, the insulating layer (32) are set as the guarantor being made of high purity aluminium oxide foamed brick
Warm layer, the protective layer (33) are set as the protective layer made of stainless steel plate, and the external stiffening formation (34) is set as position
Support construction in sintering furnace (3) bottom.
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| CN201721697554.7U CN208282597U (en) | 2017-12-08 | 2017-12-08 | A kind of combined type microwave sintering device being used to prepare oxide ceramics target |
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| CN201721697554.7U CN208282597U (en) | 2017-12-08 | 2017-12-08 | A kind of combined type microwave sintering device being used to prepare oxide ceramics target |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111906303A (en) * | 2020-08-10 | 2020-11-10 | 河南荣泰耐火材料有限公司 | Sintering furnace and hard alloy sintering method based on same |
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2017
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111906303A (en) * | 2020-08-10 | 2020-11-10 | 河南荣泰耐火材料有限公司 | Sintering furnace and hard alloy sintering method based on same |
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