CN207313693U - Composite thick film based on DLC film - Google Patents
Composite thick film based on DLC film Download PDFInfo
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- CN207313693U CN207313693U CN201720460707.XU CN201720460707U CN207313693U CN 207313693 U CN207313693 U CN 207313693U CN 201720460707 U CN201720460707 U CN 201720460707U CN 207313693 U CN207313693 U CN 207313693U
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Abstract
The utility model discloses the composite thick film based on DLC film, including the metal back layer, transition zone and diamond-like rock layers outwards sequentially formed by substrate surface, transition zone is to work at the same time the mixture layer that the two kinds of film layers to be formed are staggeredly stacked using magnetron sputtering and reinforced cathode arc technology, and the thickness of the diamond-like rock layers is between 1 ~ 10 μm.The utility model deft design, it is simple in structure, pass through the structure for making transition zone use two kinds of film layers to be alternately stacked, the internal stress for giving full play to magnetron sputtering film layer is small and the advantages of the hardness of reinforced cathode electric arc film layer is big, realize effective combination that transition zone hardness is big and internal stress is small, and hardness is big and the small increase for both contributing to realize diamond-like layer thickness of stress, the thickness of finally formed composite thick film reaches more than 20 μm, and it can effectively buffer the huge stress that thick film functional layer is brought, so as to ensure the combination power of composite thick film and base material, the surface defect of composite thick film can be effectively reduced at the same time.
Description
Technical field
It the utility model is related to a kind of composite thick film, especially a kind of composite thick film based on DLC film.
Background technology
DLC film is a kind of metastable state amorphous carbon film containing a large amount of sp3 keys, mainly with sp3 between carbon atom
Combined with sp2 hybrid bonds, performance is close to diamond, and diamond-like has and diamond characteristic about the same, due to
High rigidity and high elastic modulus, low friction coefficient, wear-resistant and good vacuum tribological property, is well suited for as wear-resisting
Coating, thus by gas-phase deposition obtain DLC film it is numerous have obtained on wear-resisting, hardness requirement part
Extensive use.
Conventional DLC film prepares often auxiliary using single arc technology, magnetron sputtering technique or ion beam
Deposition technique is helped, and there are diamond-like prepared by certain defect, main performance when preparing Diamond-like Carbon coating for single technology
The thickness of stone coating is only capable of between 2 ~ 4 μm.
However, either used on which type of part, in general, on the premise of accessory size requirement is met,
The thickness of whole coating, especially wherein the thickness of DLC film be often it is more thick better, the wearability of such part and
Hardness can be improved accordingly, but when using the single technique to prepare, once the thickness increase of whole coating, especially wherein diamond-like
The thickness increase of stone film, may result in whole coating internal stress increase, influences the combination power of coating and base material, cause coating easy
To be peeled off with base material, this just has an impact the service life and efficiency of coating, therefore, the contradiction of coating layer thickness and film-substrate cohesion
Reconciliation become urgent problem to be solved.
Meanwhile with the increase of coating and DLC film thickness, the defects of coating surface produces, increases, coating table
The roughness increase in face, friction coefficient can also increase.
Utility model content
The purpose of this utility model is exactly to solve the above-mentioned problems in the prior art, there is provided one kind is based on eka-gold
The composite thick film and its film plating process of hard rock film.
The purpose of this utility model is achieved through the following technical solutions：
Composite thick film based on DLC film, including outwards sequentially formed by substrate surface metal back layer, transition
Layer and diamond-like rock layers, the transition zone are to work at the same time to be formed two kinds using magnetron sputtering and reinforced cathode arc technology
The mixture layer that film layer is staggeredly stacked, the thickness of the diamond-like rock layers is between 1 ~ 10 μm.
Preferably, the composite thick film based on DLC film, wherein：The metal back layer is Cr layers, Ti layers
Or one kind in Ni layers, and generated by magnetron sputtering technique, its thickness is between 0.2 ~ 1 μm.
Preferably, the composite thick film based on DLC film, wherein：The thickness of the transition zone is at 1 ~ 10 μm
Between.
Preferably, the composite thick film based on DLC film, wherein：Two kinds of film layers in the transition zone are
C layers and Cr layers or WC layers or Ti layers.
Preferably, the composite thick film based on DLC film, wherein：The diamond-like rock layers are hydrogen-free eka-gold
Hard rock layer, and generated by reinforced cathode arc technology.
The advantages of technical solutions of the utility model, is mainly reflected in：
The utility model deft design, it is simple in structure, by the structure for making transition zone use two kinds of film layers to be alternately stacked, fill
The internal stress that magnetron sputtering film layer is waved in distribution is small and the advantages of the hardness of reinforced cathode electric arc film layer is big, realizes that transition zone is hard
Greatly and the small effective combination of internal stress, and hardness is greatly and the small increase for both contributing to realize diamond-like layer thickness of stress for degree, most
End form into the thickness of composite thick film reach more than 20 μm, and can effectively buffer the huge stress that thick film functional layer is brought,
So as to ensure the combination power of composite thick film and base material, while it can effectively reduce the surface defect of composite thick film.
The utility model combines multiple coating films method, overcomes magnetron sputtering and reinforced cathode arc technology work at the same time
The pollution produced each other when making, whole process is pollution-free, environmentally protective.
Brief description of the drawings
Fig. 1 is the membrane structure schematic diagram of the utility model.
Embodiment
The purpose of this utility model, advantage and feature, will carry out figure by the non-limitative illustration of preferred embodiment below
Show and explain.These embodiments are only the prominent examples using technical solutions of the utility model, all to take equivalent substitution or wait
Effect conversion and formed technical solution, all fall within the requires of the utility model protection within the scope of.
The utility model discloses the composite thick film based on DLC film, including by the outside shape successively in 4 surface of base material
Into metal back layer 1, transition zone 2 and diamond-like rock layers 3, wherein, the metal back layer 1 is one in Cr layers, Ti layers or Ni layers
Kind, and generated by magnetron sputtering technique, for its thickness between 0.2 ~ 1 μm, it is whole compound that metal Cr, Ti or Ni are conducive to enhancing
The combination power of thick film and base material.
The transition zone 2 is to work at the same time the two kinds of film layers to be formed using magnetron sputtering and reinforced cathode arc technology to hand over
The mixture layer that mistake stacks, described two film layers are C layer and Cr layers or WC layers or Ti layers, the transition zone 2 of their formation
Thickness is between 1 ~ 10 μm.
Also, due to when DLC coatings are used for water environment, having the protium in hydrogen DLC by water environmental impact, and then influence
To the performance of composite thick film, therefore, the diamond-like rock layers 3 are preferably non-hydrogen diamond layer, and pass through reinforced cathode electricity
Arc technology generates, and the thickness of the diamond-like rock layers 3 is between 1 ~ 10 μm.
So the gross thickness of the composite thick film based on DLC film finally obtained can reach 20 μm, relative to
Conventional DLC film, the thickness of the utility model, which realizes, significantly to be increased, meanwhile, the compound thickness of the utility model
The combination power of film and base material is good, reaches more than 120N, realizes the thickness increase and film-substrate cohesion raising of composite thick film
It is effectively unified.
The utility model further discloses a kind of film plating process of the above-mentioned composite thick film based on DLC film,
Include the following steps：
S1, is put into vacuum chamber after base material is cleaned, and carries out plasma clean；
It is specific and includes the following steps：
S11, is put into ultrasonic oscillation in alkaline solution by base material and cleans；
S12, by the base material by the cleaning of S11 steps, ultrasonic oscillation cleans in pure water is filtered；
S13, will complete drying by the base material of S12 steps cleaning in drying baker；
S14, by after the base material of S13 steps is put into vacuum chamber, starts to vacuumize vacuum chamber, reaches 5 × 10-3Pa's
After vacuum, heater heating reaches 100 DEG C, then passes to the high-purity argon gas that purity is 99.999%, controls the logical of argon gas
Inbound traffics are 10 ~ 70sccm, and continue to vacuumize, and it is 0.5 ~ 3.0Pa to keep technique vacuum, then, open anode layer ion
Beam, voltage are 1000V ~ 2000V, open grid bias power supply, and grid bias power supply is set in 800V ~ 2000V, and 30 ~ 90min is carried out to base material
Plasma clean.
S2, under the technique vacuum of 0.5 ~ 3.0Pa, using Cr, Ti or Ni as target, in the substrate surface magnetic through over cleaning
Control one layer of metal back layer 1 of sputtering, in magnetron sputtering process, the power control of the magnetron sputtering power supply of Cr, Ti or Ni target
System between 1 ~ 4kW, and on workpiece application -30V ~ -1000V back bias voltage, sedimentation time is 3 ~ 50min, so that on base material 4
Form metal back layer 1 of the thickness between 0.2 μm ~ 1 μm.
S3,5.0 × 10 are extracted into vacuum-3During Pa, the high-purity argon gas that purity is 99.999% is passed through into vacuum chamber, and
The flow that is passed through for controlling argon gas is 20 ~ 120sccm, and under the technique vacuum of 0.5 ~ 3.0Pa, while open Cr, WC or Ti
The magnetron sputtering shielding power supply of target and the arc power of C targets, and control the electricity of magnetron sputtering shielding power supply and C targets
The power ratio of arc power is 2:1-4:1, it is specific for, control the magnetron sputtering power of Cr, WC or Ti target
For 2 ~ 4kW；The arc power power of the C targets is 1 ~ 2KW, is controlled described using magnetron sputtering and reinforced cathode electric arc skill
The time that art deposits at the same time is 60 ~ 200min, so as to form above-mentioned transition of the thickness between 1 ~ 10 μm on 1 surface of metal back layer
Layer 2.
Study and find through inventor, it is obtained to be based on after magnetron sputtering and reinforced cathode arc technology are combined
The adhesion of the composite thick film of DLC film improves, this is because the combination of magnetron sputtering and reinforced cathode electric arc causes
The structure of multiple-layer stacked is presented in film layer in preparation process, wherein, film layer prepared by magnetron sputtering（Soft film layer）Hardness is opposite
Relatively low, about 18GPa or so, internal stress is smaller, and the film layer that reinforced cathode arc system is standby（Hard film layer）Hardness it is higher,
More than 25GPa, but there are larger internal stress, but both be alternately stacked after the advantages of being effectively combined two kinds of film layers, realize
The high rigidity and low internal stress of composite thick film.
Specifically, it is due to that transition zone 2 grows up to columnar crystal structure in growth course, can goes out in column crystal growth course
The defects of existing bulky grain etc, so as to cause the internal stress of bigger, is staggeredly stacked by soft film layer, hard film layer, can interrupted
The longitudinal growth of column crystal, the defects of reducing between crystal grain or room, and then reduce the internal stress that column crystal self-defect produces.
On the other hand, the combination of this soft film layer and hard film layer causes transition zone 2 also so that the planted agent of hard film layer
Power is released, this is because the toughness of soft film layer is preferable, can produce larger deformation, when hard film layer is deposited on above,
Stress inside hard film layer by and the combination of soft film layer be released so that playing further reduces whole transition zone
The purpose of 2 internal stress.
And the hardness of transition zone improves, be conducive to the diamond-like rock layers after depositing more on it, while the planted agent of transition zone
Power reduces so that the stress inside whole composite thick film reduces, and then improves the adhesion of whole composite thick film and base material；Together
When, since the internal stress of whole composite thick film reduces so that composite thick film will not be grown in growth course along a direction,
Effectively reduce the surface defect of film layer.
In addition inventor also found：Pollution when magnetron sputtering and reinforced cathode arc technology work at the same time mainly shows
Work at the same time for two row targets, since the difference on power can make one of which target material surface another target elements occur, lead
Cause two kinds of elements ratio occur it is abnormal, for such a situation, inventor further study show that：Pass through the electricity to two kinds of targets
Source power is adjusted, and makes power ratio control 2:1-4:In the range of 1, the ratio of two kinds of materials can be controlled in this scope
Interior, performance caused by prepares coating structure does not make a difference.
Also, if their power ratio is more than 4:1, the hardness of the composite thick film of acquisition can reduce；If they
Power ratio is less than 2:1, the internal stress of the composite thick film of acquisition is larger, causes the adhesive force of composite thick film and base material to decline.
S4, using graphite target as carbon source, forms on transition zone 21 ~ 10 μm of eka-gold using reinforced cathode arc technology
Hard rock layer 3, in deposition process, the power that controls the arc power of the graphite target is 800 ~ 2000W, sedimentation time 60
~200min。
The utility model still has numerous embodiments, all technologies formed using equivalents or equivalent transformation
Scheme, all falls within the scope of protection of the utility model.
Claims (5)
1. the composite thick film based on DLC film, it is characterised in that：Including by base material（4）The gold that surface outwards sequentially forms
Belong to bottom（1）, transition zone（2）And diamond-like rock layers（3）, the transition zone（2）It is using magnetron sputtering and reinforced cathode electricity
Arc technology works at the same time the mixture layer that the two kinds of film layers to be formed are staggeredly stacked, the diamond-like rock layers（3）Thickness in 1 ~ 10 μ
Between m.
2. the composite thick film according to claim 1 based on DLC film, it is characterised in that：The metal back layer
（1）It is one kind in Cr layers, Ti layers or Ni layers, and is generated by magnetron sputtering technique, its thickness is between 0.2 ~ 1 μm.
3. the composite thick film according to claim 2 based on DLC film, it is characterised in that：The transition zone（2）
Thickness between 1 ~ 10 μm.
4. the composite thick film according to claim 3 based on DLC film, it is characterised in that：The transition zone（2）
In two kinds of film layers be C layers and Cr layers or WC layers or Ti layers.
5. according to any composite thick films based on DLC film of claim 1-4, it is characterised in that：The eka-gold
Hard rock layer（3）For non-hydrogen diamond layer, and generated by reinforced cathode arc technology.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720460707.XU CN207313693U (en) | 2017-04-28 | 2017-04-28 | Composite thick film based on DLC film |
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|---|---|---|---|
| CN201720460707.XU CN207313693U (en) | 2017-04-28 | 2017-04-28 | Composite thick film based on DLC film |
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| CN207313693U true CN207313693U (en) | 2018-05-04 |
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| CN201720460707.XU Ceased CN207313693U (en) | 2017-04-28 | 2017-04-28 | Composite thick film based on DLC film |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107022761A (en) * | 2017-04-28 | 2017-08-08 | 星弧涂层新材料科技（苏州）股份有限公司 | Composite thick film and its film plating process based on DLC film |
| CN109023362A (en) * | 2018-07-09 | 2018-12-18 | 中国人民解放军空军勤务学院 | A kind of hydraulic valve stem surface impact-resistant abrasion-proof lubricates composite coating and preparation method thereof |
| CN110760798A (en) * | 2018-07-27 | 2020-02-07 | 比亚迪股份有限公司 | Electronic product shell and preparation method thereof |
| CN111088478A (en) * | 2019-12-27 | 2020-05-01 | 季华实验室 | Superhard DLC coating, aluminum alloy, preparation equipment and preparation method |
| CN111690898A (en) * | 2019-03-15 | 2020-09-22 | 纳峰真空镀膜（上海）有限公司 | Improved coating process |
| CN112210752A (en) * | 2019-07-12 | 2021-01-12 | 王福贞 | Magnetron sputtering technology for depositing DLC film and film coating machine |
| CN113278929A (en) * | 2021-05-28 | 2021-08-20 | 安徽纯源镀膜科技有限公司 | Multilayer conductive nano coating and production process thereof |
-
2017
- 2017-04-28 CN CN201720460707.XU patent/CN207313693U/en not_active Ceased
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107022761A (en) * | 2017-04-28 | 2017-08-08 | 星弧涂层新材料科技（苏州）股份有限公司 | Composite thick film and its film plating process based on DLC film |
| CN109023362A (en) * | 2018-07-09 | 2018-12-18 | 中国人民解放军空军勤务学院 | A kind of hydraulic valve stem surface impact-resistant abrasion-proof lubricates composite coating and preparation method thereof |
| CN110760798A (en) * | 2018-07-27 | 2020-02-07 | 比亚迪股份有限公司 | Electronic product shell and preparation method thereof |
| CN111690898A (en) * | 2019-03-15 | 2020-09-22 | 纳峰真空镀膜（上海）有限公司 | Improved coating process |
| CN111690898B (en) * | 2019-03-15 | 2024-04-26 | 纳峰真空镀膜（上海）有限公司 | Improved coating process |
| CN112210752A (en) * | 2019-07-12 | 2021-01-12 | 王福贞 | Magnetron sputtering technology for depositing DLC film and film coating machine |
| CN111088478A (en) * | 2019-12-27 | 2020-05-01 | 季华实验室 | Superhard DLC coating, aluminum alloy, preparation equipment and preparation method |
| CN113278929A (en) * | 2021-05-28 | 2021-08-20 | 安徽纯源镀膜科技有限公司 | Multilayer conductive nano coating and production process thereof |
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Decision date of declaring invalidation: 20200923 Decision number of declaring invalidation: 46215 Granted publication date: 20180504 |