CN207081672U - A kind of EBSD fixture for testing - Google Patents
A kind of EBSD fixture for testing Download PDFInfo
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- CN207081672U CN207081672U CN201720976716.4U CN201720976716U CN207081672U CN 207081672 U CN207081672 U CN 207081672U CN 201720976716 U CN201720976716 U CN 201720976716U CN 207081672 U CN207081672 U CN 207081672U
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Abstract
The utility model provides a kind of EBSD fixture for testing, and the EBSD fixture for testing includes：Sample stage, the sample stage are used for bearing test sample；In sample receiving portion of the top of the sample stage along the axially arranged oriented lower recess of the sample stage, the sample receiving portion is surrounded and formed by two side walls and an inclined L-type bottom surface；Form in the first of the inclined L-type bottom surface that inclined end face is orthogonal in inclined end face and second, wherein the angle that inclined end face is formed with horizontal direction in described first is 70 °；And stud, the stud are fixed on the bottom of the sample stage, the stud is detachably arranged in the sample fixed position of SEM.The fixture can solve low mirco structure observation resolution ratio during large deformation thin plate sample EBSD analysis tests, image drift, the problem of sample preparation difficulty, particularly can aid in the tiny microstructure of high-resolution, multi-direction observation sample interior and residual stress tissue.
Description
Technical field
A kind of test instrument is the utility model is related to, it is more particularly to a kind of to be used for large deformation thin plate sample EBSD analysis surveys
Fixture on probation.
Background technology
Since the 1990s, electron backscattered style (the Electron Back-scattering that are assemblied on SEM
Patterns, abbreviation EBSP) crystal microcell is orientated and the analytical technology of crystal structure achieves larger development, and in material
Extensive use during heterogeneous microstructure and micro- texture characterize.The technology is also referred to as EBSD (Electron
Backscattered Diffraction, abbreviation EBSD) or orientation mapping microtechnic (Orientation Imaging
Microscopy, abbreviation OIM) etc..EBSD's is mainly characterized by entering while the conventional feature of SEM is retained
The diffraction (data for providing crystallography) of row spatial resolution submicron order.
The determination of material inside organization structure state, including grain size, misorientation, stress state, phase structure type, knot
The determination of structure type, recrystallization etc., it is the emphasis of researcher concern, and to be that by material structure state complete by EBSD
One very effective instrument of face synthesis measuring, and have been widely used for ferrous materials, hydronalium, ceramic material
In the analysis test industry of material, geomaterial etc..
In existing EBSD measuring technologies, the fixing means of sample is typically that sample is fixed on support with elargol, so
EBSD analysis tests are carried out afterwards, are to carry out large deformation, fine microstructures, residual stress larger sample high power the shortcomings that this method
During rate analysis test, can usually occur that photo resolution is low, and even drifting about occur in picture in test process.This
Outside, if the patent application of Application No. 201511022163.0 is the phenomenon for image drift, a kind of EBSD points are also developed
Analyse the sample stage of test, but the technology mainly solves the occurrence of causing image drift the reason for weight, and for
The thin plate of very thin thickness is difficult to realize multi-direction analysis test；In addition, high magnification EBSD analysis test large deformation light sheet material groups
Another method knitted is formed into transmission electron microscope film sample, and thickness is about tens microns, is then fixed on sample with elargol
On platform, but this method is less applicable for thin plate of the thickness less than 5mm, and one side reason is that lamella thickness is too small, in sample preparation
The tissue at thin sheet surface is caused not observe in process of lapping, another aspect reason is when lamella thickness very little, very
A diameter of 3mm disk is made in difficulty, and it is low can not to carry out being electrolysed double spray samples, success rate.
Accordingly, it is desirable to provide a kind of improved technology scheme for above-mentioned prior art deficiency.
The content of the invention
The purpose of this utility model is to realize the High Resolution Observations of large deformation thin plate sample, solves sample preparation difficulty and success rate
The problem of low aspect, propose a kind of large deformation thin plate sample EBSD fixture for testing.
To achieve these goals, the utility model provides following technical scheme：
A kind of EBSD fixture for testing, including：
Sample stage, the sample stage are used for bearing test sample；In axle of the top of the sample stage along the sample stage
To the sample receiving portion being provided with to lower recess, the sample receiving portion is surrounded by two side walls and an inclined L-type bottom surface
Formed；Form in the first of the inclined L-type bottom surface that inclined end face is orthogonal in inclined end face and second, wherein in described first
The angle that inclined end face is formed with horizontal direction is 70 °；And
Stud, the stud are fixed on the bottom of the sample stage, and the stud is detachably arranged in scanning electron microscopy
The sample fixed position of mirror.
In above-mentioned EBSD fixture for testing, as a kind of preferred embodiment, two of the sample receiving portion are formed
Side wall is set in parallel；Two side walls are respectively the first side wall and second sidewall；The inner peripheral surface of the sample receiving portion
By inclined end face in inclined end face in the internal face of the first side wall, described first, the internal face of the second sidewall, second successively
Connection is around composition.
In above-mentioned EBSD fixture for testing, as a kind of preferred embodiment, the top end face of the first side wall by
Two mutually perpendicular end face compositions, two mutually perpendicular end faces are respectively the first outer inclined-plane and the second outer inclined-plane；It is described
Second outer inclined-plane is close to inclined end face in described first, and the first outer inclined-plane is away from inclined end face in described first, and described first
Inclined end face is parallel to each other in outer inclined-plane and described first.
In above-mentioned EBSD fixture for testing, as a kind of preferred embodiment, the shape of the second sidewall, specification chi
It is very little consistent with the first side wall.
In above-mentioned EBSD fixture for testing, as a kind of preferred embodiment, the test sample is arranged on described the
On one outer inclined-plane or the second outer inclined-plane.
In above-mentioned EBSD fixture for testing, as a kind of preferred embodiment, the phase of the tested surface of the test sample
Opposite is arranged on the described first outer inclined-plane or on the second outer inclined-plane by colloid bonding.
In above-mentioned EBSD fixture for testing, as a kind of preferred embodiment, the test sample is arranged on the sample
The inside of product receiving portion, and the opposite face of the tested surface of the test sample is close in described first on inclined end face.
In above-mentioned EBSD fixture for testing, as a kind of preferred embodiment, in the first side wall or second sidewall
On be provided with multiple through holes；The set-up mode of the through hole is to run through the thickness of whole side wall since the outside wall surface of side wall and prolong
Extend in the sample receiving portion, be easy to multiple fasteners to pass through and fixed with its one-to-one multiple through hole and then block
The test sample of installation settings in the sample receiving portion.
In above-mentioned EBSD fixture for testing, as a kind of preferred embodiment, the fastener is by nut and screw rod group
Into the length dimension of the screw rod is adjusted according to the thickness of the test sample in the sample receiving portion；Institute
It is thread circle hole to state through hole.
In above-mentioned EBSD fixture for testing, as a kind of preferred embodiment, in addition to：Pad, pad, for fixing
Sample, it is arranged between the test sample and the sample receiving portion.
Compared with immediate prior art, technical scheme provided by the utility model has following excellent effect：
Mirco structure is seen when technical scheme provided by the utility model can solve large deformation thin plate sample EBSD analysis tests
Low resolution ratio, image drift, the problem of sample preparation difficulty are examined, particularly can aid in high-resolution, multi-direction observation sample interior
Tiny microstructure and residual stress tissue.
Brief description of the drawings
Fig. 1 is that (left figure is for the structural representation of the sample stage for rectangular cross-section that the utility model embodiment provides a kind of
Front view, right figure are left view)；
Fig. 2 is that (left figure is for structural representation that a kind of section that the utility model embodiment provides is circular sample stage
Front view, right figure are left view)；
Fig. 3 is to be detected after implementing the EBSD fixture for testing in the utility model embodiment through severe plastic deformation (von
Mises strain stressvM=12) the EBSD crystal grain orientation maps after；
Fig. 4 is to detect the Ni-based of compressed 65% deformation after implementing the EBSD fixture for testing in the utility model embodiment
High temperature alloy EBSD orientation maps；
Label in figure：The first outer inclined-planes of 1-；The second outer inclined-planes of 2-；Inclined end face in 3- second；4- fasteners；5- through holes；6-
Stud；Inclined end face in 7- first.
Embodiment
The technical scheme in the embodiment of the utility model will be clearly and completely described below, it is clear that described
Embodiment is only part of the embodiment of the present utility model, rather than whole embodiments.Based on the reality in the utility model
Example is applied, the every other embodiment that those of ordinary skill in the art are obtained, belongs to the scope that the utility model is protected.
Describe the utility model in detail below with reference to the accompanying drawings and in conjunction with the embodiments.It should be noted that do not conflicting
In the case of, the feature in embodiment and embodiment in the utility model can be mutually combined.
In description of the present utility model, term " longitudinal direction ", " transverse direction ", " on ", " under ", "front", "rear", "left", "right",
The orientation or position relationship of the instruction such as " vertical ", " level ", " top ", " bottom " be based on orientation shown in the drawings or position relationship,
It is for only for ease of description the utility model rather than requires that the utility model must be with specific azimuth configuration and operation, therefore
It is not intended that to limitation of the present utility model.The term " connected " that is used in the utility model, " connection " should be interpreted broadly,
For example, it may be it is fixedly connected or is detachably connected；Can be joined directly together, can also be indirect by intermediate member
It is connected, for the ordinary skill in the art, the concrete meaning of above-mentioned term can be understood as the case may be.
As Figure 1-Figure 4, the utility model provides a kind of large deformation thin plate sample EBSD that is used for and analyzes test clamp
Tool.The EBSD fixture for testing includes：Sample stage, sample stage are used for bearing test sample；On the top of sample stage along sample stage
Axially arranged oriented lower recess sample receiving portion, i.e., sample stage with sample receiving portion is used to placing EBSD tests with thin
Plate sample.Sample receiving portion comprises at least two side walls and an inclined L-type bottom surface around composition；Form inclined L-type bottom
Inclined end face 3 is orthogonal in inclined end face 7 and second in the first of face, wherein the folder that inclined end face 7 is formed with horizontal direction in first
Angle is 70 °, then the angle that inclined end face 3 is formed with horizontal direction in second is 20 °.Stud 6, stud 6 are fixed on the bottom of sample stage
Portion, the stud 6 are detachably arranged in the sample fixed position of SEM.I.e. stud 6 is used to consolidate sample stage
It is scheduled in the sample room of ESEM, the sample in the appearance and size of the stud 6 and the sample deposition domain of SEM
Receiving portion size matches.
In specific embodiment of the utility model, two side walls of composition sample receiving portion are parallel arrangement；Should
Two side walls are respectively the first side wall and second sidewall.The medial surface (or being inner peripheral surface) of sample receiving portion is by the first side wall
Internal face, inclined end face 7 in first, the internal face of second sidewall, inclined end face 3 is sequentially connected around composition, and the first side in second
The internal face of wall and the internal face of second sidewall are parallel to each other, and inclined end face 3 is mutually perpendicular in inclined end face 7 and second in first.
In specific embodiment of the utility model, the height for forming inclined end face 7 in the first of inclined L-type bottom surface is higher than
The height of inclined end face 3 in second, and the angle of inclined end face 3 is 90 ° in inclined end face 7 and second in first.The first side wall and second
The height of side wall is higher than the height of inclined end face 7 in first.
In specific embodiment of the utility model, as depicted in figs. 1 and 2, the top end face of the first side wall is mutual by two
Perpendicular end face composition, two mutually perpendicular end faces are respectively the first outer 1 and second outer inclined-plane 2 of inclined-plane.Outside second tiltedly
Inclined end face 7 in face 2 close to first, the first outer inclined-plane 1 is away from inclined end face 7 in first, and inclined end face in the first outer inclined-plane 1 and first
7 are parallel to each other, i.e., the angle that inclined end face 7 is formed with horizontal direction in the first outer inclined-plane 1 and first is 70 °.
Further preferably, the shape of second sidewall, specification are consistent with the first side wall, i.e. the top of second sidewall
End face is also made up of two mutually perpendicular end faces.
In embodiment of the present utility model, according to the specification size of test sample, test sample may be selected to place
In on the first outer 1 or second outer inclined-plane 2 of inclined-plane；It is also an option that it is positioned over the inside of the sample receiving portion of sample stage.
In a specific embodiment of the present utility model, test sample is arranged on the first outer 1 or second outer inclined-plane 2 of inclined-plane
On.Preferably, test sample is arranged on the first outer 1 or second outer inclined-plane 2 of inclined-plane by colloid bonding, i.e. test sample
The back (i.e. opposite face) of tested surface is arranged on the first outer inclined-plane 1 or on the second outer inclined-plane 2 by colloid bonding, the test
The selection of sample installation site is applied to the surface microstructure of observation large deformation material.Colloid in the present embodiment is preferably silver
Glue or conducting resinl.
In another specific embodiment of the present utility model, test sample is arranged on the inside of sample receiving portion.Test specimens
When product are placed, (i.e. the opposite face) of the tested surface of test sample is close on the inclined L-type bottom surface in sample receiving portion.It is preferred that
Ground, the back of the tested surface of test sample are close in first in sample receiving portion on inclined end face 7 so that the quilt of test sample
Survey face and the first outer perfect parallelism of inclined-plane 1 of the first side wall, ensure that the tested surface of test sample and the angle of horizontal direction are
70°.Further preferably, the test sample in sample receiving portion needs fastener 4 to be fixed.In the present embodiment in the first side wall
Or multiple through holes 5 are provided with second sidewall；The set-up mode of through hole 5 is through whole side wall since the outside wall surface of side wall
Thickness is simultaneously extended in sample receiving portion, is easy to multiple fasteners 4 to pass through and its one-to-one multiple through hole 5 and then fixed sample
The test sample of installation settings in product receiving portion.I.e. multiple through holes 5 run through the first side wall or second sidewall, are easy to fastener 4
Entered through through hole 5 in sample receiving portion and then fix test sample.More preferably, the number of through hole 5 is 2, fastener 4
Number be 2.Further preferably, the set-up mode of two through holes 5 is that the central point line of two through holes 5 is an oblique line, should
Oblique line and horizontal angle are 70 °, the test sample that the set-up mode can be fixed preferably in sample receiving portion, so as to solve
During EBSD analysis tests the problem of image drift.
Further preferably, fastener 4 is made up of nut and screw rod, and the length dimension of screw rod is according in sample receiving portion
The thickness of test sample is adjusted；
Preferably, through hole 5 is thread circle hole, and screw rod passes through thread circle hole, then is used for making on screw rod by nut driving
For block test sample, so as to realize the fixation of test sample.Fastener 4 is used to fix sample, and the length control of screw rod is being closed
In the size of reason, there is wider adjusting range so that the thin plate sample of the measurable different-thickness of the fixture for testing and general
Logical sample.
Further preferably, in addition to：Pad.By adding different-thickness, pad of different shapes inclined end face 7 in first
Between test sample or test sample is fixed in test sample periphery with fastener 4 again, reduces the length of screw rod with this.
I.e. in order that fastener 4 fixes more stable and survivable tested sample with test sample, reduces the length of screw rod, the application
Added between the outer inclined-plane being in contact with it by the test sample in sample receiving portion suitable quantity and size pad or
After other appropriate moulds of person's size, then test sample is firmly fixed to sample receiving portion by the method fixed with fastener 4
Interior, test sample can place so that laterally disposed, placed longitudinally, oblique placement etc. is any, be easy to the thin plate from multi-direction horizontal
Section structure structure.
Sum it up, the structure of fixture for testing of the present utility model is mainly reflected in the structure of sample receiving portion.Should
The medial surface of sample receiving portion at least has two orthogonal inclined-planes, and the angle of an inclined-plane and horizontal direction is 70 °, separately
One inclined-plane and the angle of horizontal direction are 20 °.Test sample is close to the internal face on the inclined-plane being placed in sample receiving portion
Or test sample is close to be placed in the end face of the side wall of composition sample receiving portion, the angle of the end face and horizontal direction
For 70 °.Fixture for testing of the present utility model is not only applicable to the EBSD tests of large deformation thin plate sample, can be also used for
Common sample test.And indirectly the use of the sample stage can realize the more planes of sample, multidirectional observation.Particularly may be used
The sample observation of large deformation thin slice (thickness is less than 3mm) is realized, and loading and unloading clamp is very convenient.And on sample stage at least
There can be 3 positions to fix sample, three positions are respectively in the inner chamfer of sample receiving portion, form sample receiving portion
Side wall two mutually perpendicular end chamfers on.
In specific embodiment of the utility model, the profile of sample stage can be arbitrary shape, but its height and horizontal chi
It is very little that filament must can not be touched during test.Preferably, sample topography can be cylinder, cuboid and other polyhedrons
Deng that is, the cross section of sample stage can be circular, rectangle and other polygons etc..Further preferably, in order that the shape of sample stage
Simple processing, the profile of sample stage is cuboid and cylinder, and section is when sample stage body contours as shown in Figure 1 are cuboid
The sample stage of rectangle, section is circular sample stage when sample stage body contours as shown in Figure 2 are cylinder.In the present embodiment
The shape of sample stage is more preferably cuboid.Particularly, for the sample stage of cylinder, the side wall of fixation fastener 4 one is being needed
Face need to be processed into a plane, ensure that fastener 4 fully fastens test sample.The second of inclined L-type bottom surface is offered in addition
The lower section of interior inclined end face 3 should also be processed into a plane, to reduce and avoid EBSD signal receiving devices and sample stage to touch
Hit.
In specific embodiment of the utility model, special instruction is due to that sample receiving portion is arranged at sample stage top, is contained
Irregular main part be can be regarded as in the part for having sample receiving portion, and the part of the middle and lower part n.s receiving portion of sample stage then be can be regarded as
It is regulatory body.The size range of the sample stage meets：The body contours height dimension scope of sample stage is 18-33mm, wherein
The altitude range of regulatory body is 13-23mm, and the length of the main body of sample stage and wide size are respectively less than 15mm.Sample stage bottom stud
6 length is 4-6mm, a diameter of 2mm of stud 6.Sample stage top set through hole 5 a diameter of 2-3mm, the first side wall or
The height dimension scope of second sidewall (irregular main part) is 5~10mm.
In specific embodiment of the utility model, the material of sample stage is conductive metallic material or conductive non-metals material
Material.Preferably, the material of sample stage can use the metal materials such as conductive aluminium alloy and copper alloy and nonmetallic materials manufacture.Again
Preferably, the higher aluminium alloy of the material selection intensity of sample stage, the material thermal expansion coefficient is relatively low, in single test sample
Sample stage will not occur in long-time measurement process the phenomenon that measuring accuracy reduces is caused because of deformation, on the other hand the material
Density is low, and weight is small, and in addition using the material when sample is fixed with fastener 4, sample stage is less likely to occur what is threaded off
Phenomenon.
In order to further appreciate that the concrete structure of fixture for testing of the present utility model, the utility model will be explained further
The specifically used method of the device is released, the application method comprises at least following two embodiments.
Embodiment one：
As shown in figure 1, the utility model provides a kind of large deformation thin plate sample EBSD detection sample stages, the sample stage
For the agent structure of cuboid, the sample stage of its rectangular cross-section.Specifically, before EBSD tests are carried out, first according to sample
The test sample of suitable dimension is made in the size of the sample receiving portion size of sample platform, it is desirable to which the profile rule of test sample is as follows：
The surface and section of sample are rectangle, or ensure sample detection faces with its back to side be parallel to each other and with its phase
The adjacent rectangular relation in another section.The method that the cutting of sample can use wire cutting, emery wheel cuts or manual cutting,
Then sample surface to be seen (tested surface) is ground with varigrained sand paper, then polished.In order to avoid material
Grinding causes stress to remain in the surface of material, needs progressively to be polished with the different polishing agent of material particle size in polishing, successively
Order be by the big polishing fluid of granularity, gradually the selection less polishing fluid of granularity is polished, or using electrobrightening
Method carry out sample preparation.
Test sample in the utility model have selected Maraging steel, the steel (strain stress after intense plastic strainvM
=12) fixture, designed using the utility model and suitable EBSD acquisition parameters set more traditional method of testing to have more
High resolution ratio and demarcation rate.
Concrete operation step is by polished sample, is clamped with tweezers, avoids tweezers from contacting (tweezers with sample detection face
Deeper cut can be formed by being contacted with detection faces).During placement, thickness of sample direction is set to be put into sample stage with horizontal direction parallel
In sample receiving portion first at inclined end face 7, and make sample detection face parallel with the first outer inclined-plane 1 of the first side wall, method
To make fully to contact inclined end face 3 in the second of sample receiving portion with another section of the rectangular relation in sample detection face, due to
Inclined end face 3 is an inclined-plane in the sample stage sample receiving portion second, and this in second inclined end face 3 and the angle of horizontal direction be
20 °, the angle that sample detection face and horizontal direction are ensured that after being arranged so that is 70 °, phosphorus fluorescent screen pair when helping to detect
EBSD diffraction is effectively detected caused by sample.
In addition, during installation sample, detected sample surfaces preferably with first in the flush of inclined end face 7, it is or convex slightly
Go out inclined end face 7 in first, during avoiding sample from being placed on sample receiving portion and easily cause sample stage to collide in detection process
The situation of signal receiving device occurs.After the placement location of alignment sample, while the position of sample is maintained with tweezers, while twisting
Dynamic fastener 4 so that fastener 4 tightly fix sample, and ensure sample measured surface and the first inclined-plane perfect parallelism；Separately
It can also can be also put into outside by adding the sample blocks or pad of suitable dimension by thickness of sample direction is vertical with horizontal direction
Cause that incident beam direction and the surface of sample are in 70 ° in sample receiving portion.And so on, test sample is tilted different
Angle, can be with the orientation measurement sample with electron beam different angle.
Alternatively, it is also possible to which thin plate sample is put into a mould with certain hole, the void shape of the mould is
Circle, the appearance and size of mould are suitable with above-mentioned sample stage sample receiving portion size.Preferably, during detection, sample is put into band
Have in the mould of hole, then the method fixed with fastener 4 fixes sample, by rotating mould, can make electron beam incidence
The longitudinal direction or surface of direction and sample obtain different testing results into different angle.
Further, it is also possible to the first inclined-plane phase by the different surfaces of test sample and the first side wall on above-mentioned sample stage top
Parallel, method is to rotate sample and add suitable pad or be fixed in the mould of suitable dimension, can use this sample stage
EBSD detects the institutional framework of sample different surfaces.
After test sample is fixed, stud 6 is inserted on the sample fixing device in surface sweeping electron microscopic sample room, then uses screw
Tighten, be fixed.Vacuumize, making alive, selection observation position, arrange parameter, detected.
Detection is through severe plastic deformation (von Mises after implementing the EBSD fixture for testing in the utility model embodiment
Strain stressvM=12) the EBSD crystal grain orientation maps after are as shown in Figure 3, it can be deduced that still have under about 10,000 times of multiplication factor higher
Resolution ratio.
Embodiment two：
Present embodiment can fix test sample or simultaneously solid respectively on the first outer 1 and second outer inclined-plane 2 of inclined-plane
Random sample product, then detect the surface direction and cross-wise direction of large deformation thin plate sample.
Specifically, before EBSD tests are carried out, conjunction is made according to the size of the sample receiving portion size of sample stage first
The sample of suitable size, ensure that sample can be fixed on the first outer 1 and second outer inclined-plane 2 of inclined-plane, but the size of sample can not
It is excessive, to avoid the sample in installation or test process from being collided with filament.Preferably, the size of sample and sample stage first
The outer profile size on inclined-plane or the second inclined-plane is suitable.The cutting of sample can use wire cutting, emery wheel cuts or cut manually
The method cut, then sample surface to be seen (tested surface) is ground with varigrained sand paper, then polished.In order to
The surface for avoiding material grinding from causing stress to remain in material, need progressively to be thrown with the different polishing agent of material particle size in polishing
Light, sequencing be by the big polishing fluid of granularity, gradually selection the less polishing fluid of granularity be polished, or using electricity
The method of solution polishing carries out the preparation of sample.
Test sample in the utility model have selected nickel-base high-temperature alloy material, and the material first is carried out into hot compression change
Shape, deflection 65%, the thickness of water cooling sample is 5mm after compression, then observes sample, parallel to compressional axis kernel of section area
The tissue in domain.
Concrete operation step is by polished sample, is clamped with tweezers, avoids tweezers from contacting (tweezers with sample detection face
Deeper cut can be formed by being contacted with detection faces).During placement, elargol is coated at the back side of the tested surface of sample, is then attached to
On first outer inclined-plane 1 or on the second outer inclined-plane 2, and after 1 hour of solidification, EBSD tests are proceeded by.After being arranged so that just
The angle that sample detection face and horizontal direction can be ensured is 70 °, contributes to phosphorus fluorescent screen during detection to spread out EBSD caused by sample
Inject row effectively detection.
After test sample is fixed, stud 6 is inserted on the sample fixing device in surface sweeping electron microscopic sample room, then uses screw
Tighten, be fixed.Vacuumize, making alive, selection observation position, arrange parameter, detected.
Compressed 65% nickel-base high-temperature deformed is detected after implementing the EBSD fixture for testing in the utility model embodiment
Alloy EBSD orientation maps are as shown in Figure 4, it can be deduced that deformable material is recrystallized, and the grain boundary of different orientation is clear
Clear, availability of data is stronger.
To sum up analyze, the utility model has following advantageous effects：
1st, technical scheme provided by the utility model can solve mirco structure during large deformation thin plate sample EBSD analysis tests
The problem that resolution ratio is low, image drift, sample preparation are difficult is observed, particularly can aid in high-resolution, in multi-direction observation sample
The tiny microstructure in portion and residual stress tissue.
2nd, fixture for testing of the present utility model is not only applicable to the EBSD tests of large deformation thin plate sample, can be with
For common sample test.Can also again indirectly using the sample stage when realize the more planes of sample, multidirectional observation, especially
It is the sample observation that large deformation thin slice (thickness is less than 3mm) can be achieved, and loading and unloading clamp is very convenient.And on sample stage
There can be 3 positions to fix sample.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model
Within the spirit and principle of utility model, any modification, equivalent substitution and improvements made etc., in the pending power of the utility model
Within the scope of profit is claimed.
Claims (10)
1. a kind of EBSD fixture for testing, it is characterised in that the EBSD fixture for testing includes：
Sample stage, the sample stage are used for bearing test sample；Set in axial direction of the top of the sample stage along the sample stage
The sample receiving portion to lower recess is equipped with, the sample receiving portion is surrounded and formed by two side walls and an inclined L-type bottom surface；
Form in the first of the inclined L-type bottom surface that inclined end face is orthogonal in inclined end face and second, wherein wedged bottom in described first
The angle that face is formed with horizontal direction is 70 °；
Stud, the stud are fixed on the bottom of the sample stage, and the stud is detachably arranged in SEM
Sample fixed position.
2. EBSD fixture for testing as claimed in claim 1, it is characterised in that form two side walls of the sample receiving portion
Set in parallel；Two side walls are respectively the first side wall and second sidewall；
The inner peripheral surface of the sample receiving portion is by the internal face of the first side wall, inclined end face, second side in described first
The internal face of wall, inclined end face is sequentially connected around composition in second.
3. EBSD fixture for testing as claimed in claim 2, it is characterised in that the top end face of the first side wall is by two
Mutually perpendicular end face composition, two mutually perpendicular end faces are respectively the first outer inclined-plane and the second outer inclined-plane；
The second outer inclined-plane close to inclined end face in described first, the first outer inclined-plane away from inclined end face in described first, and
Inclined end face is parallel to each other in the first outer inclined-plane and described first.
4. EBSD fixture for testing as claimed in claim 3, it is characterised in that the shape of the second sidewall, specification
It is consistent with the first side wall.
5. EBSD fixture for testing as claimed in claim 3, it is characterised in that the test sample is arranged on outside described first
On inclined-plane or the second outer inclined-plane.
6. EBSD fixture for testing as claimed in claim 5, it is characterised in that the opposite face of the tested surface of the test sample
It is arranged on by colloid bonding on the described first outer inclined-plane or on the second outer inclined-plane.
7. EBSD fixture for testing as claimed in claim 2, it is characterised in that the test sample is held installed in the sample
Receive the inside in portion, and the opposite face of the tested surface of the test sample is close in described first on inclined end face.
8. EBSD fixture for testing as claimed in claim 7, it is characterised in that set on the first side wall or second sidewall
It is equipped with multiple through holes；
The set-up mode of the through hole is to run through the thickness of whole side wall since the outside wall surface of side wall and extend to the sample
In receiving portion, it is easy to multiple fasteners to pass through and fixes the sample with its one-to-one multiple through hole and then block and accommodate
The test sample of installation settings in portion.
9. EBSD fixture for testing as claimed in claim 8, it is characterised in that the fastener is made up of nut and screw rod,
The length dimension of the screw rod is adjusted according to the thickness of the test sample in the sample receiving portion；
The through hole is thread circle hole.
10. EBSD fixture for testing as claimed in claim 9, it is characterised in that also include：Pad, for fixing sample, if
Put between the test sample and the sample receiving portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111157562A (en) * | 2020-01-17 | 2020-05-15 | 胜科纳米（苏州）有限公司 | Method for eliminating interference signal in narrow-side-wall sample photoelectron spectroscopy test and sample clamp |
| CN111521627A (en) * | 2020-04-30 | 2020-08-11 | 中国航发成都发动机有限公司 | EBSD test sample platform |
| CN111812134A (en) * | 2020-07-21 | 2020-10-23 | 山东省分析测试中心 | Detection table for obtaining cladding metal three-dimensional organization information and operation method thereof |
| CN111982943A (en) * | 2020-08-05 | 2020-11-24 | 上海大学 | EBSD test sample platform and application thereof |
| CN115128109A (en) * | 2022-09-02 | 2022-09-30 | 北京化工大学 | EBSD sample stage based on orientation calibration and correction and image acquisition method |
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2017
- 2017-08-07 CN CN201720976716.4U patent/CN207081672U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111157562A (en) * | 2020-01-17 | 2020-05-15 | 胜科纳米（苏州）有限公司 | Method for eliminating interference signal in narrow-side-wall sample photoelectron spectroscopy test and sample clamp |
| CN111521627A (en) * | 2020-04-30 | 2020-08-11 | 中国航发成都发动机有限公司 | EBSD test sample platform |
| CN111812134A (en) * | 2020-07-21 | 2020-10-23 | 山东省分析测试中心 | Detection table for obtaining cladding metal three-dimensional organization information and operation method thereof |
| CN111812134B (en) * | 2020-07-21 | 2023-07-21 | 山东省分析测试中心 | Detection table for acquiring three-dimensional tissue information of cladding metal and operation method thereof |
| CN111982943A (en) * | 2020-08-05 | 2020-11-24 | 上海大学 | EBSD test sample platform and application thereof |
| CN115128109A (en) * | 2022-09-02 | 2022-09-30 | 北京化工大学 | EBSD sample stage based on orientation calibration and correction and image acquisition method |
| CN115128109B (en) * | 2022-09-02 | 2022-11-25 | 北京化工大学 | EBSD sample stage based on orientation calibration and correction and image acquisition method |
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