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CN206751571U - A kind of ultra-pure water process units - Google Patents

A kind of ultra-pure water process units Download PDF

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Publication number
CN206751571U
CN206751571U CN201621412981.1U CN201621412981U CN206751571U CN 206751571 U CN206751571 U CN 206751571U CN 201621412981 U CN201621412981 U CN 201621412981U CN 206751571 U CN206751571 U CN 206751571U
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CN
China
Prior art keywords
filter
reverse osmosis
ultra
pure water
process units
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201621412981.1U
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Chinese (zh)
Inventor
郭春江
伍欣
沈勇
胡明
张海涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHENGDU GANWEI TECHNOLOGY Co Ltd
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CHENGDU GANWEI TECHNOLOGY Co Ltd
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Priority to CN201621412981.1U priority Critical patent/CN206751571U/en
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Publication of CN206751571U publication Critical patent/CN206751571U/en
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Anticipated expiration legal-status Critical

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Abstract

Primary improvements of the present utility model are a kind of ultra-pure water process units, including mechanism body, in addition to the cartridge filter inside the mechanism body, the water inlet connection pretreatment module of the cartridge filter, the reverse osmosis unit, including one or more reverse osmosis membrane assemblies;The water filtered from the cartridge filter enters the reverse osmosis unit by high-pressure pump;Electrodeionization module, water inlet connect the delivery port of the reverse osmosis unit;Resistivity detecting device, connect the delivery port of the electrodeionization module.After ultrapure water production device provided by the utility model has used pretreatment module to pre-process raw water, water enters cartridge filter, and ultra-pure water process units detection number provided by the utility model is few, the ultra-pure water process units of miniaturization and water quality reaching standard.

Description

A kind of ultra-pure water process units
Technical field
It the utility model is related to a kind of field of water treatment equipment, and in particular to a kind of ultrapure water production device.
Background technology
Ultra-pure water, it is the water that resistivity reaches 18M Ω * cm (25 DEG C).It is usually used in being used for semiconductor in integrated circuit industry Steam in the cleaning of raw material and vessel used, the preparation of lay photoetching mask plate and silicon chip or some chemical industry preparation process Source etc..
Urea for vehicle is an essential reagent in diesel vehicle tail gas processor, in the mixture and system of urea for vehicle During standby, it is necessary to ultra-pure water, because containing substantial amounts of metal ion and chloride in general water, can influence at tail gas The sensitivity of the inductor probe of reason device even results in the damage of equipment.
Prepare ultra-pure water in the prior art generally all can carry out Multi-channel filtering by raw water, and detect in the water after per pass filtering The parameters such as ion concentration, resistivity, electrical conductivity, cause that parts that device includes and mechanism are excessive, and volume is excessively huge, unfavorable In the miniaturization of product.
Utility model content
In view of this, a kind of detection project of the utility model offer is few, the ultra-pure water production dress of miniaturization and water quality reaching standard Put.
To solve above technical problem, the technical solution of the utility model is to use a kind of ultra-pure water process units, including Mechanism body, in addition to the cartridge filter inside the mechanism body, the water inlet connection of the cartridge filter are pre- Processing module,
The reverse osmosis unit, including one or more reverse osmosis membrane assemblies;The water filtered from the cartridge filter The reverse osmosis unit is entered by high-pressure pump;
Electrodeionization module, water inlet connect the delivery port of the reverse osmosis unit;
Resistivity detecting device, connect the delivery port of the electrodeionization module.
Preferably, in addition to conductivity detector, for detecting the electrical conductivity of the reverse osmosis unit water outlet saliva.
Preferably, the pretreatment module includes the first filter mechanism, the second filter mechanism being sequentially connected by pipeline With the 3rd filter mechanism;
The top of one or more filter mechanisms in first filter mechanism, the second filter mechanism and the 3rd filter mechanism It is provided with back purge system.
Preferably, in addition to raw water pump, the delivery port of the raw water pump are connected with the water inlet of first filter mechanism; It is also connected with the back purge system simultaneously.
Preferably, in addition to discharge of wastewater pipeline, one end and first filter mechanism, the second filter mechanism, the 3rd mistake The top connection of one or more of filter structure filter mechanism, the other end are connected with wastewater collection tapping equipment.
Preferably, first filter mechanism is quartz filter;Second filter mechanism is active carbon filter; 3rd filter mechanism is demineralizer.
Preferably, in addition to salt box, the 3rd filter mechanism is connected.
Preferably, the reverse osmosis unit includes multiple reverse osmosis membrane assemblies in parallel;The water filtered through cartridge filter Enter the multiple reverse osmosis membrane assembly in parallel through multiple high-pressure pumps.
Preferably, in addition to the first return line, the first return line one end connection reverse osmosis unit are another End connects the pretreatment module.
Preferably, in addition to the second return line, described second return line one end connect the electrodeionization module, separately One end connects the pretreatment module.
Primary improvements of the present utility model are a kind of ultra-pure water process units, including mechanism body, in addition to are located at Cartridge filter inside the mechanism body, the water inlet connection pretreatment module of the cartridge filter, the counter-infiltration Device, including one or more reverse osmosis membrane assemblies;Described in the water filtered from the cartridge filter is entered by high-pressure pump Reverse osmosis unit;Electrodeionization module, water inlet connect the delivery port of the reverse osmosis unit;Resistivity detecting device, connection The delivery port of the electrodeionization module.Ultrapure water production device provided by the utility model has used pretreatment module to raw water After being pre-processed, water enters cartridge filter, and the fine particles that wherein turbidity is more than 1 degree are removed by cartridge filter. Shared simultaneously using multiple counter-infiltrations and electrodeionization module (EDI), the most of organic matter and inorganic matter in water can be removed, Enable water to reach ultrapure water quality standard.And because ultra-pure water process units provided by the utility model is preferred for miniaturization , it is necessary to more compact and small body type equipment in urea production equipment.So need to detect and control alleviation to lack as far as possible, by Raw water is handled according to processing sequence in above-mentioned cartridge filter, reverse osmosis unit, EDI modules and pretreatment module, energy Enough reach the standard of ultra-pure water, only set Resistivity testing can to meet the detection of ultra-pure water, section in ultra-pure water exit Cost is saved.
Brief description of the drawings
The front view schematic diagram for the ultra-pure water process units that Fig. 1 the utility model one embodiment provides;
The side view schematic diagram for the ultra-pure water process units that Fig. 2 the utility model one embodiment provides;
The structural representation of ultrapure water pretreatment module shown in Fig. 3 the utility model one embodiment;
Fig. 4 is the ultra-pure water process units and pretreatment module connection diagram shown in the utility model one embodiment.
Embodiment
In order that those skilled in the art more fully understands the technical solution of the utility model, with reference to specific implementation The utility model is described in further detail for mode.
The utility model provides a kind of ultra-pure water process units, including mechanism body, in addition to is located at the mechanism sheet The cartridge filter in internal portion, the water inlet connection pretreatment module of the cartridge filter, the reverse osmosis unit, including one Individual or multiple reverse osmosis membrane assemblies;The water filtered from the cartridge filter enters the reverse osmosis unit by high-pressure pump; Electrodeionization module, water inlet connect the delivery port of the reverse osmosis unit;Resistivity detecting device, connect the electrodeionization The delivery port of module.
Specifically in one of the embodiments as shown in figure 1, the ultra-pure water process units includes:Cartridge filter A1, high-pressure pump A2, reverse osmosis unit A3, cartridge filter water inlet A5, instrument box A6, EDI modules A 7, ultrapure water out A8, It is preferred that it is provided with resistivity detecting device on the ultrapure water out.And utility model preferably uses resistivity sensor conduct Resistivity data is transferred to the processing unit in instrument box by the detection means of ultra-pure water resistivity, the resistivity sensor, And it is shown on the display panel of instrument box resistance instrument.
According to the utility model, in order to control the state of EDI work and working time, the utility model also includes electricity Conductance detection means, for detecting the electrical conductivity of the reverse osmosis unit water outlet saliva.Detection electrical conductivity is shown in the instrument On the display panel of the conductivity gauge of case.As shown in Fig. 2 the instrument box preferably includes conductivity gauge A61, resistance instrument A62, pressure gauge A63 and flowmeter A64.It is the conventional detecting instrument in ultrapure water production device above.According to the present invention, EDI work Process, for the ion exchange resin that is filled in membrane stack can answer be divided into two parts, a part is referred to as work and reported, and it regenerates journey To spend relatively low, mainly play a part of to pass to ion, another part is referred to as polishing and reported, and not only plays a part of passing to ion, and Also play a part of ion exchange, the another boundary for planting resin is work forward position.Work report carry remove sodium ion, chlorine from The task of most of ions such as son, calcium ion, magnesium ion sulfate radical, and polish resin and then carry removal carbonic acid, ammoniacal liquor, silicic acid Deng the task of weak electrolyte.On the positive and negative electrode at both ends, chlorine can be produced, the electrode reaction product such as oxygen and hydrogen, these Product must take EDI out of by pole water.So in order to give full play to the palingenesis of the fast transferring of ion and resin, EDI is more suitable Together in processing low saline salinity who, and directly produce pure water and high purity water.
In order to further reach the processing standard of ultra-pure water, pretreatment module preferably is added in ultra-pure water production process, The pretreatment module that the utility model one embodiment provides is as shown in figure 3, the pretreatment module is included by pipeline successively The first filter mechanism B1, the second filter mechanism B2 and the 3rd filter mechanism B3 of connection;First filter mechanism, the second filtering One or more filter mechanisms are provided with back purge system B5 in mechanism and the 3rd filter mechanism.Also include raw water pump B4, institute The delivery port for stating raw water pump is connected with the water inlet of the first filter mechanism B1;It is also connected with the back purge system simultaneously.Also Including discharge of wastewater pipeline, one end and one in the first filter mechanism B1, the second filter mechanism B2, the 3rd filter mechanism B3 The top connection of individual or multiple filter mechanisms, the other end are connected with wastewater collection tapping equipment B7.First filter mechanism is Quartz filter;Second filter mechanism is active carbon filter;3rd filter mechanism is demineralizer.Also include salt Case B6, connect the 3rd filter mechanism B3.Because B3 is demineralizer, so in order that the demineralizer can regenerate, it is necessary to By extracting the salt solution in salt box the metal ion that is adsorbed in finger ring demineralizer.
In another specific embodiment of the present utility model, ultrapure water treating device mainly includes front and rear connect as described in Figure 4 Pretreatment module and ultra-pure water process units, simply schematic diagram in figure, the part ratio in figure do not have strict restriction. Wherein pretreatment module includes raw water pump 2, is sequentially connected in series the more medium filter 3 of connection, charcoal filter and softened Filter 5, ultrapure water treating module include be sequentially communicated cartridge filter 7, the first high-pressure pump 9, first order reverse osmosis unit 10, Second high-pressure pump 11, second level reverse osmosis unit 12, water pump 13 and EDI (continuous electric desalination) module.Described multi-medium filtering Device 3, active carbon filter 4 and softening filter 5 are controlled using automatically controlling first 18, described to automatically control first 18 as on the market Buying, more medium filter 3 and charcoal filter of the present utility model are using the new full-automatic F71F67 type strainer valves of profit, softening Filter 5 is using the new full-automatic F65 type time flow softener valves of profit.More medium filter 3 and active carbon filter 4 are respectively equipped with Flushing line (not shown) automatically controls first 18 and connected with described, and positive negative side can be achieved in the case where automatically controlling first 18 control To flushing back and forth.The softening filter 5 is connected with salt box 6, and salt solution is pumped into from salt box 6 in the case where automatically controlling first 18 control It is regenerated softening filter 5.
According to embodiment, the first order reverse osmosis unit 10 of the ultrapure water treating module is two reverse osmosis membranes in parallel Component, the water into first order reverse osmosis unit 10 are divided into two while simultaneously anti-from two again into two reverse osmosis membrane assemblies Outflow, which merges, in permeable membrane element flows into second level reverse osmosis unit 12.Second level reverse osmosis unit 12 is a reverse osmosis membrane group Part.The first high-pressure pump 9, the reverse osmosis unit 12 in the second level are provided with after cartridge filter 7 before first order reverse osmosis membrane assembly Before be provided with the second high-pressure pump 11, first high-pressure pump 9 is that first order reverse osmosis unit 10 provides the necessary hydraulic pressure of work, described Second high-pressure pump 11 is that second level reverse osmosis unit 12 provides the necessary hydraulic pressure of work.Connect after the second level reverse osmosis unit 12 EDI modules 14 are connect, water pump 13 is provided with before EDI modules 14.The ultrapure water tank 15 of current direction after being handled through EDI stores standby.
According to the present embodiment, raw water pump 2 is connected with before described pretreatment module, for having running water area, running water Pretreatment module is directly entered by raw water pump 2, for condition deficiency area, raw water box 1 can be added before raw water pump 2 and is stored up Water.The water extracted out through raw water pump 2 enters more medium filter 3, and flow direction is from top to bottom, red more medium filter 3 filters Water stay in the bottom of more medium filter 3, then be extracted into the top of active carbon filter 4 and filtered by active carbon filter 4, after filtering again Flowed into by the filtering of softening filter 5 in the cartridge filter 7 of ultrapure water treating module.The more medium filter 3 is used as this One embodiment of utility model can use quartz sand and/or manganese husky, and preferable top uses quartz sand, and bottom is husky using manganese, For except degranulation big impurity and iron.The active carbon filter 4 is used for deodorization, the softening filter 5 be used for deliming from Son and silicon ion, to reduce the destruction to reverse osmosis membrane.Water after pretreatment enters cartridge filter 7, through cartridge filter 7 Water after filtering enters the first high-pressure pump 9, and pressure difference switch and manually control are sequentially provided with towards sample tap direction on sampling line 8 Valve, for sampling the time cleaned with determination to the pretreatment module.Water is pressed into first order reverse osmosis through the first high-pressure pump 9 Saturating device 10, is provided with pressure gauge and pressure difference switch between the first high-pressure pump 9 and first order reverse osmosis unit 10.It is anti-through the first order Water after permeability apparatus 10 filters enters the second high-pressure pump 11, the edge between the high-pressure pump 11 of first order reverse osmosis unit 10 and second Water (flow) direction is sequentially provided with flowmeter, conductivity gauge, pressure gauge and pressure difference switch.The water that second high-pressure pump 11 extrudes enters the second level Reverse osmosis unit 12, flowmeter, conductivity gauge and pressure difference switch are provided with after second level reverse osmosis unit 12.Through second level counter-infiltration Remaining water flow back into water tank through the first return line 16 after the processing of device 12, any that can also be flow back into pretreatment module Position.Current excess of imports pure water tank 15 after the processing of EDI modules 14, stream is provided with the pipeline between EDI and ultrapure water tank 15 Gauge and conductivity gauge, remaining water flow back into raw water box 1 through the second return line 17 after EDI is handled, and can also flow back into pre- Any position in processing module.
Why first order reverse osmosis unit 10 uses two reverse osmosis membrane assemblies in parallel, is because such as reverse osmosis above Permeable membrane because the reason such as pressure instability, breakage, blocking or fouling is destroyed, will soon cause reverse osmosis membrane below and EDI modules 14 are destroyed.Two reverse osmosis membrane assemblies in parallel are used in first order reverse osmosis unit 10, main one slow Punching acts on.If on the one hand a reverse osmosis membrane assembly is broken, the electrical conductivity behind first order reverse osmosis unit 10 can be caused to occur Change, is detected through conductivity gauge, it is possible thereby to rapidly fix a breakdown;If on the other hand a reverse osmosis membrane assembly is broken, also There is an energy normal work, very big influence will not be caused to rear production.It should be noted that the utility model uses two, this The technical staff in field can be extended as needed, as used two or more in parallel in first order reverse osmosis membrane apparatus Reverse osmosis membrane assembly.
The first order reverse osmosis unit 10 that the utility model is made up of two counter-infiltration membrane modules in parallel is system event Barrier processing provides a buffer time, and in handling failure, system can also be run, and thereby ensure that the stability of system.Pass through Increase automatically controls first 18 and realizes itself clean on more medium filter 3, active carbon filter 4 and softening filter 5, prolongs The service life of pretreatment system is grown.By setting the first return line 16 after the second reverse osmosis unit, after EDI modules 14 If the second return line 17, remaining water backflow raising water resource utilizes after the second reverse osmosis unit and EDI modules 14 are handled Rate.
In one embodiment of the present utility model, the production procedure of the ultra-pure water process units is specially:Raw water is led to After raw water pump is crossed by milipore filter progress first time filtering, the first filter mechanism, the second filter mechanism and the 3rd mistake are continuously entered Filter structure, first filter mechanism, the second filter mechanism and the 3rd filter mechanism are controlled by Full-automatic flushing valve, energy Enough to realize backwash, the purpose of backwash is to wash away the filter residue remained in filter mechanism, the filtering in filter mechanism is situated between Matter regenerates.There is the salting liquid containing potassium, sodium ion in other salt box, for being lived again to the medium of the 3rd filter mechanism. Cartridge filter is entered by pretreated raw water, after cartridge filter removes the particle that turbidity is more than 1, passes through high pressure Pump enters reverse osmosis unit and carries out osmosis filtration, and after detection electrical conductivity is no more than preset value, water is divided into EDI modules From pole water, concentrated water and fresh water being separated, pole water and concentrated water enter wastewater treatment equipment by the second return line, and fresh water passes through It is up to standard after Resistivity testing, obtain ultra-pure water.
It the above is only preferred embodiment of the present utility model, it is noted that above-mentioned preferred embodiment should not regard For that should be defined to limitation of the present utility model, the scope of protection of the utility model by claim limited range.For For those skilled in the art, do not departing from spirit and scope of the present utility model, can also make some Improvements and modifications, these improvements and modifications also should be regarded as the scope of protection of the utility model.

Claims (10)

1. a kind of ultra-pure water process units, including mechanism body, it is characterised in that also include inside the mechanism body Cartridge filter, the water inlet connection pretreatment module of the cartridge filter,
Reverse osmosis unit, including one or more reverse osmosis membrane assemblies;The water filtered from the cartridge filter passes through high pressure Pump enters the reverse osmosis unit;
Electrodeionization module, water inlet connect the delivery port of the reverse osmosis unit;
Resistivity detecting device, connect the delivery port of the electrodeionization module.
2. ultra-pure water process units according to claim 1, it is characterised in that also including conductivity detector, be used for Detect the electrical conductivity of the reverse osmosis unit water outlet saliva.
3. ultra-pure water process units according to claim 1, it is characterised in that the pretreatment module includes passing through pipeline The first filter mechanism, the second filter mechanism and the 3rd filter mechanism being sequentially connected;
The top of one or more filter mechanisms is all provided with first filter mechanism, the second filter mechanism and the 3rd filter mechanism It is equipped with back purge system.
4. ultra-pure water process units according to claim 3, it is characterised in that also including raw water pump, the raw water pump Delivery port is connected with the water inlet of first filter mechanism;It is also connected with the back purge system simultaneously.
5. ultra-pure water process units according to claim 3, it is characterised in that also including discharge of wastewater pipeline, one end with The top connection of one or more of first filter mechanism, the second filter mechanism, the 3rd filter mechanism filter mechanism, separately One end is connected with wastewater collection tapping equipment.
6. the ultra-pure water process units according to any one in claim 3~5, it is characterised in that first filtering Mechanism is quartz filter;Second filter mechanism is active carbon filter;3rd filter mechanism is demineralizer.
7. ultra-pure water process units according to claim 6, it is characterised in that also including salt box, connect the 3rd mistake Filter structure.
8. ultra-pure water process units according to claim 1, it is characterised in that the reverse osmosis unit includes multiple parallel connections Reverse osmosis membrane assembly;The water filtered through cartridge filter enters the multiple reverse osmosis membrane group in parallel through multiple high-pressure pumps Part.
9. ultra-pure water process units according to claim 1, it is characterised in that also including the first return line, described One return line one end connects the reverse osmosis unit, and the other end connects the pretreatment module.
10. ultra-pure water process units as claimed in claim 1, it is characterised in that also including the second return line, described second Return line one end connects the electrodeionization module, and the other end connects the pretreatment module.
CN201621412981.1U 2016-12-21 2016-12-21 A kind of ultra-pure water process units Expired - Fee Related CN206751571U (en)

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CN201621412981.1U CN206751571U (en) 2016-12-21 2016-12-21 A kind of ultra-pure water process units

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106517609A (en) * 2016-12-21 2017-03-22 成都乾威科技有限公司 Production device for ultrapure water

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106517609A (en) * 2016-12-21 2017-03-22 成都乾威科技有限公司 Production device for ultrapure water

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20171215

Termination date: 20191221