CN206747166U - A kind of supercriticality purging system - Google Patents
A kind of supercriticality purging system Download PDFInfo
- Publication number
- CN206747166U CN206747166U CN201621473872.0U CN201621473872U CN206747166U CN 206747166 U CN206747166 U CN 206747166U CN 201621473872 U CN201621473872 U CN 201621473872U CN 206747166 U CN206747166 U CN 206747166U
- Authority
- CN
- China
- Prior art keywords
- pipeline
- purge chamber
- buffer tank
- supercriticality
- carbon dioxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000010926 purge Methods 0.000 title claims abstract description 72
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims abstract description 102
- 229910002092 carbon dioxide Inorganic materials 0.000 claims abstract description 54
- 238000004140 cleaning Methods 0.000 claims abstract description 45
- 239000001569 carbon dioxide Substances 0.000 claims abstract description 37
- 238000009530 blood pressure measurement Methods 0.000 claims description 17
- 235000011089 carbon dioxide Nutrition 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000011084 recovery Methods 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 241000790917 Dioxys <bee> Species 0.000 claims 1
- 239000007789 gas Substances 0.000 description 19
- 239000003921 oil Substances 0.000 description 12
- 238000010791 quenching Methods 0.000 description 10
- 230000000171 quenching effect Effects 0.000 description 10
- 239000007788 liquid Substances 0.000 description 9
- 239000004215 Carbon black (E152) Substances 0.000 description 8
- 229930195733 hydrocarbon Natural products 0.000 description 8
- 239000002904 solvent Substances 0.000 description 8
- 150000002430 hydrocarbons Chemical class 0.000 description 7
- 238000003860 storage Methods 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000004064 recycling Methods 0.000 description 4
- 239000012459 cleaning agent Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000007791 liquid phase Substances 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000013556 antirust agent Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000001183 hydrocarbyl group Chemical group 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 239000003209 petroleum derivative Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 238000003911 water pollution Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
It the utility model is related to a kind of supercriticality purging system, including purge chamber (4), gas pressurized device (11), first heater (5) and appliance for applying carbon dioxide, described purge chamber (4) is connected with first heater (5) and appliance for applying carbon dioxide respectively, characterized in that, described purge chamber (4) is connected with vacuum pump group (1).Compared with prior art, the air that band is come in when workpiece is entered purge chamber by the utility model is drained only, prevents CO2With the mixing of air, cleaning performance is improved.
Description
Technical field
A kind of cleaning device of Equipment for Heating Processing product is the utility model is related to, it is clear more particularly, to a kind of supercriticality
Wash system.
Background technology
Heat treatment industry cleaning equipment on sale, typically Aqueous cleaning machine, only a few is hydrocarbon solvent cleaning
Machine.
Aqueous cleaning machine is by the use of water as cleansing medium, because water is unable to dissolved oil, and most of Aqueous cleaning machine
In the case of all be clean oil quenching after workpiece, in order to improve cleaning performance, it has to adjust the temperature of water and added inside water
Cleaning agent (or antirust agent).
The greatest drawback of Aqueous cleaning machine is water pollution, because after cleaning machine works long hours, contains oil emulsion inside water,
There is considerable influence to cleaning performance, so needing to regularly replace water.The waste oil (quenching oil) washed down, is also intended to pass through
Qualified processing processed in units, it is impossible to recycling, also greatly improved thereby using cost.After Aqueous cleaning machine cleaning
Workpiece can also have the problem of cleannes are unqualified, have blind hole or tiny gap for some workpiece, substantially wash
Less than this also prevents Aqueous cleaning machine from being applied inside the industry that is required in high cleanliness.
Hydrocarbon solvent cleaning machine is by the use of hydrocarbon solvent as cleansing medium, and hydrocarbon solvent is the mixture of petroleum hydrocarbon, energy
Quenching oil is dissolved, cleaning performance is very good, and the workpiece surface after cleaning is very clean.Using be hydrocarbon solvent flash-point it is low, lead to
The mode of heating is crossed, hydrocarbon solvent is distilled, the quenching oil left can also continue recycling.
Hydrocarbon solvent cleaning machine cleaning performance is good, and does not pollute, but hydrocarbon solvent is flammable and explosive substance, therefore
It need to be protected when using the equipment in user, not be optimal selection.
Application No. 200810226688X Chinese patent discloses a kind of semiconductor carbon dioxide supercritical sweeping cleaning
Machine, including purge chamber and separation chamber, purge chamber are connected with separation chamber by the carbon dioxide escape pipe of sealing, and purge chamber is with spray
Mouth, carbon dioxide are directly injected on the silicon chip to be cleaned of purge chamber bottom by nozzle.But the purge chamber is in the course of work
In may be mixed into air, be unfavorable for ensure cleaning performance.
Utility model content
The purpose of this utility model is exactly to provide a kind of safety the defects of overcoming above-mentioned prior art to exist without dirt
Contaminate, cleaning performance is good, cleaning agent reusable edible supercriticality purging system.
The purpose of this utility model can be achieved through the following technical solutions：
A kind of supercriticality purging system, including purge chamber, gas pressurized device, first heater and carbon dioxide
Feedway, described purge chamber are connected with heater and appliance for applying carbon dioxide respectively, and described purge chamber is connected with very
Empty pump group.
Described appliance for applying carbon dioxide includes the holding vessel and buffer tank being connected with each other, described gas pressurized device
It is arranged on the pipeline between buffer tank and purge chamber, carbon dioxide flows into buffer tank from holding vessel, increases through gas pressurized device
Enter purge chamber after pressure.
Pipeline in described system includes：Both ends are divided with holding vessel and tank connected 5th pipeline of caching, both ends respectively
The 3rd pipeline that is not connected with buffer tank and purge chamber, both ends respectively with purge chamber and tank connected second pipeline of caching and two
End is divided with buffer tank and tank connected 4th pipeline of storage, described gas pressurized device and the 3rd pipeline and the 4th pipeline respectively
Do not connect, the second pipeline, the 3rd pipeline, the 4th pipeline, be each provided with valve on the 5th pipeline,
Before cleaning, carbon dioxide exports from holding vessel, enters by the 5th pipeline, buffer tank and the 3rd pipeline clean successively
Room, after cleaning, carbon dioxide exports from purge chamber, enters holding vessel by the second pipeline, buffer tank and the 4th pipeline successively.
Described system also includes the first pressure measurement apparatus being connected with purge chamber.
Described system is also included with caching tank connected Second device for pressure measurement.
Described system also includes filling with the described tank connected secondary heating mechanism of storage and the 3rd pressure measxurement respectively
Put.
Dry ice adding mouth is provided with above described buffer tank.
Described caching pot bottom is provided with devil liquor recovery mouth.
Compared with prior art, the utility model has advantages below：
(1) purge chamber is connected with vacuum pump group, and the air that band is come in when workpiece is entered into purge chamber is drained only, prevents CO2With
The mixing of air, improve cleaning performance, workpiece surface noresidue cleaning agent.
(2) carbon dioxide flows into buffer tank from holding vessel, and buffer tank provides carbon dioxide buffer space, made in purge chamber
Air pressure change be easily controlled.
(3) after cleaning preceding and cleaning, carbon dioxide is circulated by different pipelines respectively, realizes what is cleaned and reclaim
Separate, using buffer tank as intermediate node, reach the effect of carbon dioxide recycling；Due to gas pressurized device and the 3rd pipeline
Connected respectively with the 4th pipeline, can before cleaning with carbon dioxide is in different physical states after cleaning, meet respectively
Cleaning requirement and storage request, structure are simplified；Valve is each provided with four pipelines, pipeline opening and closing is easily controllable, is independent of each other.
(4) purge chamber is connected with device for pressure measurement, ensures that the carbon dioxide in purge chamber is critical condition.
(5) buffer tank is connected with device for pressure measurement, ensures that the carbon dioxide in buffer tank be gaseous state, beneficial to waste liquid and
The separation of carbon dioxide.
(6) holding vessel is connected with device for pressure measurement and secondary heating mechanism, and may be such that carbon dioxide therein is liquid, section
Province storage area.
(7) dry ice adding mouth is provided with above buffer tank, the loss of carbon dioxide in use can be made up.
(8) caching pot bottom is provided with devil liquor recovery mouth, can periodically open recovery port and reclaim quenching oil, prevent in buffer tank
Excessive quenching oily pollution carbon dioxide.
Brief description of the drawings
Fig. 1 is the structural representation of this hair embodiment purging system；
Reference：
1 is vacuum pump group；2 be the first pipeline；3 be first pressure measurement apparatus；4 be purge chamber；5 be that the first heating fills
Put；6 be target workpiece；7 be the second pipeline；8 be the 3rd pipeline；9 be the 4th pipeline；10 be the 5th pipeline；11 be gas boosting
Device；12 be the 6th valve；13 be the 7th valve；14 be Second device for pressure measurement；15 be buffer tank；16 be that the 3rd pressure is surveyed
Measure device；17 be secondary heating mechanism.
Embodiment
The utility model is described in detail with specific embodiment below in conjunction with the accompanying drawings.The present embodiment is with the utility model
Implemented premised on technical scheme, give detailed embodiment and specific operating process, but guarantor of the present utility model
Shield scope is not limited to following embodiments.
Embodiment
A kind of supercriticality purging system, the system using carbon dioxide can dissolve in the supercritical state it is nonpolar or
The relatively low organic matter of polarity, to clean heat treated part；Cleansing medium, regulation temperature are used as by the use of cheap carbon dioxide (dry ice)
Degree and pressure, make switching of the carbon dioxide in liquid, gaseous state and supercriticality, reach the cleaning requirement of heat treated part.
CO2When temperature is more than 31.1 DEG C and pressure and is more than 73bar, be at supercriticality, supercritical fluid it is close
Degree is bigger than the density of gas hundreds times, and its numerical value is worked as with liquid phase, and small two orders of magnitude of ratio of viscosities liquid, its numerical value and gas
Quite, diffusion coefficient is about the 1/100 of gas between gas and liquid, bigger than liquid hundreds times.It follows that super face
Boundary's fluid has the density worked as with liquid phase, therefore has the characteristics of with can dissolve solute as liquid phase, while has gas easy again
In the diffusion the characteristics of, its low viscosity, high diffusibility, be advantageous to be dissolved in material diffusion therein and oozing to solid matrix
Thoroughly.Under the supercriticality of material, as long as pressure and temperature varies slightly, density just significantly changes, and correspondingly shows
For the change of solubility, this patent is exactly to utilize these characteristics, reaches the purpose of this patent.
This patent is from a kind of State Transferring to another state, to realize the purpose of cleaning workpiece by CO2.From
CO2 is non-flammable explosive, nontoxic, the non-corrosiveness of safety because CO2 is present in nature, and realize as cleansing medium
CO2 supercriticality condition is simple.
Pumped vacuum systems must be installed on cleaning equipment, the air that band is come in when workpiece is entered into stove is drained only, prevent CO2 with
The mixing of air, does not reach cleaning performance.After exhausting vacuum, carbon dioxide is added to inside purge chamber, utilizes pressure charging system
Pressure inside purge chamber is increased into more than 73bar, then the CO2 inside purge chamber is heated again, kept the temperature at
More than 31.1 DEG C, at this moment CO2 is at supercriticality.The CO2 of supercriticality, which can dissolve, nonpolar or relatively low polarity to be had
Machine thing, the quenching oil that also can just adhere to workpiece surface dissolve.
After cleaning terminates, the CO2 inside purge chamber is discharged into inside a specific buffer tank, controls this caching
Pressure inside tank so that CO2 is in gaseous state, and the quenching oil dissolved when thus can be by supercriticality discharges.Finally
Gaseous state CO2 is transported to inside storage tank by pressure charging system, waits the work in next cycle.
Cleaning process is had suffered, other gases and liquid will not be adulterated, perfect recycling, the energy is saved, also can
Reach best cleaning performance, economic benefit is brought to user.
As shown in figure 1, system includes purge chamber 4, gas pressurized device 11, first heater 5 and carbon dioxide supply
Device, purge chamber 4 are connected with first heater 5 and appliance for applying carbon dioxide respectively, and purge chamber 4 is connected with vacuum pump group 1, and two
Person is connected by the first pipeline 2, and the first pipeline 2 is provided with the first valve 21.
Appliance for applying carbon dioxide includes the holding vessel 17 and buffer tank 15 being connected with each other, and gas pressurized device 11 is arranged on
On pipeline between buffer tank 15 and purge chamber 4, carbon dioxide flows into buffer tank 15 from holding vessel 17, through gas pressurized device 11
Enter purge chamber 4 after supercharging.
Pipeline in system includes：The 5th pipeline 10 that both ends are connected with holding vessel 17 and buffer tank 15 respectively, both ends point
The second pipe that the 3rd pipeline 8 that is not connected with buffer tank 15 and purge chamber 4, both ends are connected with purge chamber 4 and buffer tank 15 respectively
The 4th pipeline 9 that road 7 and both ends are connected with buffer tank 15 and holding vessel 17 respectively, the pipeline 8 of gas pressurized device 11 and the 3rd
Connected with the 4th pipeline 9, gas pressurized device is arranged on the middle part of buffer tank 15, ensures in the 3rd pipeline 8 and the 4th pipeline 9
Not comprising waste liquid impurity.Second pipeline 7, the 3rd pipeline 8, the 4th pipeline 9, valve is each provided with the 5th pipeline 10,
Before cleaning, carbon dioxide exports from holding vessel 17, successively by the 5th pipeline 10, the pipeline 8 of buffer tank 15 and the 3rd
Into purge chamber 4, after cleaning, carbon dioxide exports from purge chamber 4, successively by the second pipeline 7, the pipeline of buffer tank 15 and the 4th
9 enter holding vessel 17.
First pressure measurement apparatus 3 is connected with purge chamber 4, buffer tank 14 is connected with Second device for pressure measurement 14.Storage
Deposit and the device for pressure measurement 16 of secondary heating mechanism 18 and the 3rd is connected with tank 17.
The top of buffer tank 15 is provided with dry ice adding mouth 13, and bottom is provided with devil liquor recovery mouth 12.
Specific operation process is as follows：
Target workpiece 6 is encased in the inside of purge chamber 4 first, then starts the valve and vacuum pump group on the first pipeline 2
1, vacuumize process is carried out to purge chamber 4, in order to remove the air that the band of target workpiece 6 is come in so that later step adds
The CO entered2It is not contaminated, also for the CO ensured inside whole purging system2Cleanliness factor.
After first pressure measurement apparatus 3 detects that the vacuum of the inside of purge chamber 4 reaches the requirement of setting, first is closed
Valve and vacuum pump group 1 on pipeline 2.Then the valve on the 5th pipeline 10, the valve on the 3rd pipeline 8 and gas is opened to increase
Pressure device 11, by the CO of the inside of holding vessel 172The inside of purge chamber 4 is transported to by buffer tank 15, cleans target workpiece 6.
When first pressure measurement apparatus 3 detects that the pressure of the inside of purge chamber 4 reaches the pressure (being more than 73bar) of setting
Afterwards, conveying CO is stopped2, restart first heater 5, the temperature of the inside of control purge chamber 4 (is more than 31.1 in design temperature
DEG C), at this moment ensure the CO inside purge chamber 42It is in a supercritical state, reaches the requirement of cleaning target workpiece 6.
After cleaning, the valve on the second pipeline 7, valve and gas pressurized device 11 on the 4th pipeline 9 are opened, will
The CO of the inside of purge chamber 42By being transported to the inside of holding vessel 17 by buffer tank 15, cleaning terminates.
In order to save space, the device for pressure measurement 16 of secondary heating mechanism 18 and the 3rd is controlled so that CO2In holding vessel 17
The inside is in liquid.
And the CO of the inside of buffer tank 15 is controlled by Second device for pressure measurement 142It is to be in gaseous state, such CO2From cleaning
The supercriticality of the inside of room 4 changes to the gaseous state of the inside of buffer tank 15, and the quenching oil dissolved during by supercriticality is discharged into
The inside of buffer tank 15, periodically opens the 6th valve 12, quenching oil is reclaimed.After equipment is run for a long time, in order to make up CO2
Loss during use, it can complete to feed by the 7th valve 13.
Claims (8)
1. a kind of supercriticality purging system, including purge chamber (4), gas pressurized device (11), first heater (5) and
Appliance for applying carbon dioxide, described purge chamber (4) respectively with gas pressurized device (11), first heater (5) and dioxy
Change the connection of carbon supply device, it is characterised in that described purge chamber (4) is connected with vacuum pump group (1).
A kind of 2. supercriticality purging system according to claim 1, it is characterised in that described carbon dioxide supply
Device includes the holding vessel (17) and buffer tank (15) being connected with each other, and described gas pressurized device (11) is arranged on buffer tank
(15) on the pipeline between purge chamber (4), carbon dioxide flows into buffer tank (15) from holding vessel (17), through gas pressurized device
(11) purge chamber (4) are entered after being pressurized.
A kind of 3. supercriticality purging system according to claim 2, it is characterised in that the pipeline in described system
Including：The 5th pipeline (10) that both ends are connected with holding vessel (17) and buffer tank (15) respectively, both ends respectively with buffer tank (15)
The second pipeline (7) that the 3rd pipeline (8), both ends with purge chamber (4) connection are connected with purge chamber (4) and buffer tank (15) respectively
And the 4th pipeline (9) that both ends are connected with buffer tank (15) and holding vessel (17) respectively, described gas pressurized device (11)
It is connected respectively with the 3rd pipeline (8) and the 4th pipeline (9), the second pipeline (7), the 3rd pipeline (8), the 4th pipeline (9), the 5th pipe
Road is each provided with valve on (10),
Before cleaning, carbon dioxide exports from holding vessel (17), successively by the 5th pipeline (10), buffer tank (15) and the 3rd pipeline
(8) purge chamber (4) are entered, after cleaning, carbon dioxide exports from purge chamber (4), successively by the second pipeline (7), buffer tank
(15) and the 4th pipeline (9) enters holding vessel (17).
A kind of 4. supercriticality purging system according to claim 1, it is characterised in that described system also include with
The first pressure measurement apparatus (3) of purge chamber (4) connection.
A kind of 5. supercriticality purging system according to claim 2, it is characterised in that described system also include with
The Second device for pressure measurement (14) of buffer tank (14) connection.
A kind of 6. supercriticality purging system according to claim 2, it is characterised in that also include respectively with it is described
The secondary heating mechanism (18) and the 3rd device for pressure measurement (16) of holding vessel (17) connection.
7. a kind of supercriticality purging system according to claim 2, it is characterised in that on described buffer tank (15)
Side is provided with dry ice adding mouth (13).
A kind of 8. supercriticality purging system according to claim 2, it is characterised in that described buffer tank (15) bottom
Portion is provided with devil liquor recovery mouth (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621473872.0U CN206747166U (en) | 2016-12-30 | 2016-12-30 | A kind of supercriticality purging system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621473872.0U CN206747166U (en) | 2016-12-30 | 2016-12-30 | A kind of supercriticality purging system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206747166U true CN206747166U (en) | 2017-12-15 |
Family
ID=60607274
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621473872.0U Expired - Fee Related CN206747166U (en) | 2016-12-30 | 2016-12-30 | A kind of supercriticality purging system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206747166U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106733945A (en) * | 2016-12-30 | 2017-05-31 | 上海颐柏热处理设备有限公司 | A kind of supercriticality purging system and method |
| CN115540527A (en) * | 2022-09-29 | 2022-12-30 | 浙江大学 | Supercritical fluid drying system and drying method |
-
2016
- 2016-12-30 CN CN201621473872.0U patent/CN206747166U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106733945A (en) * | 2016-12-30 | 2017-05-31 | 上海颐柏热处理设备有限公司 | A kind of supercriticality purging system and method |
| CN115540527A (en) * | 2022-09-29 | 2022-12-30 | 浙江大学 | Supercritical fluid drying system and drying method |
| CN115540527B (en) * | 2022-09-29 | 2024-02-27 | 浙江大学 | Supercritical fluid drying system and drying method |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171215 |
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| CF01 | Termination of patent right due to non-payment of annual fee |