CN206337174U - Hard composite membrane and touch panel - Google Patents
Hard composite membrane and touch panel Download PDFInfo
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- CN206337174U CN206337174U CN201621346408.5U CN201621346408U CN206337174U CN 206337174 U CN206337174 U CN 206337174U CN 201621346408 U CN201621346408 U CN 201621346408U CN 206337174 U CN206337174 U CN 206337174U
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- composite membrane
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Abstract
The utility model discloses a kind of hard composite membrane and touch panel, wherein hard composite membrane is deposited on matrix surface, wherein hard composite membrane is made up of DLC film and antireflective film, the refractive index of described matrix is less than the refractive index of the DLC film, described matrix includes relative inner surface and outer surface, the DLC film is deposited on the outer surface side of matrix, and the antireflective film is deposited between the inner surface of described matrix and/or DLC film and matrix.The utility model solves the problems, such as that DLC film is deposited on refractive index less than the transmitance on the matrix of its refractive index.
Description
Technical field
The utility model is related to optical material technical field, more particularly to a kind of hard composite membrane and touch panel.
Background technology
DLC (diamond-like carbon, abbreviation DLC) film is a kind of amorphous carbon-film, and it contains class simultaneously
It is similar to the sp of diamond3Hybrid bond and the sp similar to graphite2Hybrid bond, defines DLC film and exceedes for hardness in the world
The insulating rigid amorphous carbon film of diamond hardness 20%.It has the property of class dimantine, including high rigidity, high resiliency mould
Amount, low-friction coefficient, high-wearing feature, high thermal conductivity and resistivity, chemical inertness and biocompatibility, therefore it is deposited onto glass
Glass surface can the effectively hardness of reinforcing glass, wearability, scratch resistance and corrosion resistance, and with low surface can, from
And the hydrophobicity of glass surface is improved to a certain extent.
The glass of touch panel typically uses chemical toughening process, i.e., lift self-strength by sodium potassium ion, reach
To glass reinforced purpose, the indexs such as its impact resistance, case hardness are lifted.In order to improve the portability for touching panel glass, lead to
Frequently with the soda-lime glass of below 1mm ultra-thin safety glass, such as conventional 0.7mm.But the ultra-thin glass of chemical tempering by
Very shallow in bearing stress layer, only tens microns, its surface damage is very prominent to intensity effect, light when glass surface
Micro-damage is more than tens microns, then the enhanced effect of chemical tempering will not exist.Therefore the ultra-thin touch screen glass of Chemical enhancement
Glass is necessary to deposit the DLC film of one layer of hard on surface.
The high-quality measured DLC film of hardness, the relatively low (H of contained hydrogen content<30at.%), because protium pair
Hardness, wearability and the scratch resistance of film have infringement.But protium is conducive to the visible light-transmissive performance of film, therefore contain
There is the high-quality DLC film of less protium, exist in visible light wave range and absorb.Usually contain the eka-gold of relatively low protium
Diamond thin film is about 1.9~2.3 in 550nm refractive index, and extinction coefficient is about 0.1~0.2.It is plated on touch panel glass table
Face will influence screen viewing effect.
In the prior art, to be mostly used for Si based thin film solar cells and ZnS, Ge system etc. infrared for DLC film
Window material.The refractive index of Si, Ge, ZnS system glass is respectively 4.08,5.23,2.37, is all higher than the refraction of DLC film
Rate, and DLC film in near-infrared and the extinction coefficient of far infrared close to zero, i.e., in near-infrared and far infrared wave
Section, which is not present, to be absorbed.According to Fresnel formula, the material of low-refraction low absorption is deposited in the material surface of high index of refraction, can
Surface reflection is reduced, therefore using Si, Ge or ZnS as matrix, DLC film can play anti-reflection effect.
But in the application for touching panel glass, the refractive index of DLC film is more than glass basis, while visible
Optical band, which exists, to be absorbed, therefore DLC film will shadow when being used to touch the relatively small matrix surface of the refractive indexes such as panel glass
Entirety visible light transmissivity is rung, screen viewing effect is reduced.
If carried out according to Fresnel formula in the prior art anti-reflection, it is necessary to deposit other on the surface of DLC film
The less film layer of refractive index, but this necessarily lowers the hardness of product surface, the durability of product can be reduced.Therefore, for class
Diamond thin is used to touch transmitance problem during the relatively small matrix surface of the refractive indexes such as panel glass, and this area there is no preferably
Method solve.
Utility model content
In view of this, the utility model embodiment provides a kind of hard composite membrane and touch panel, and main purpose is solution
Certainly the refractive index of DLC film is more than transmitance problem when touching the refractive indexes of matrix such as panel glass.
To reach above-mentioned purpose, the utility model mainly provides following technical scheme：
On the one hand, the utility model provides a kind of hard composite membrane, is deposited on matrix surface, wherein hard composite membrane by
DLC film and antireflective film composition, the refractive index of described matrix are less than the refractive index of the DLC film, the base
Body includes relative inner surface and outer surface, and the DLC film is deposited on the outer surface side of matrix, the antireflective film
It is deposited between the inner surface of described matrix and/or DLC film and matrix.
Preferably, the material of the antireflective film is selected from following SiO2、MgF2And SiNxIn at least one,
Preferably, SiO2The thickness of antireflective film is 5-200nm, and the refractive index at 550nm wavelength is 1.4-1.5, is disappeared
Backscatter extinction logarithmic ratio is 0.SiO2The refractive index of antireflective film is preferably 1.45.SiO2Film can use physical vapour deposition (PVD) and chemical gaseous phase
Prepared by deposition process, including but not limited to magnetron sputtering, plasma enhanced chemical vapor deposition, ion beam depositing, evaporation plating
Embrane method etc..
Preferably, MgF2The thickness of antireflective film is 5-200nm, and the refractive index at 550nm wavelength is 1.3-1.4, is disappeared
Backscatter extinction logarithmic ratio is 0.MgF2The refractive index of antireflective film is preferably 1.38.MgF2Antireflective film can be using physical vapour deposition (PVD) and chemical gas
Prepared by phase deposition process, including but not limited to magnetron sputtering, plasma enhanced chemical vapor deposition, ion beam depositing, evaporation
Coating method etc..
Preferably, SiNxThe x of antireflective film is 1-1.35, and thickness is 5-200nm, and the refractive index at 550nm wavelength is
1.9-2.2, extinction coefficient is 0-1 × 10-5。SiNxThe refractive index of antireflective film is 2.0, and extinction coefficient is preferably 0.SiNxAnti-reflection
Film can be prepared using physical vapour deposition (PVD) with chemical gaseous phase depositing process, and including but not limited to magnetron sputtering, plasma increase
Extensive chemical vapour deposition, ion beam depositing, evaporation coating method etc..
Preferably, described matrix is common float glass, quartz glass, ultra-clear glasses or pattern glass.
Preferably, the thickness of the DLC film is 5-50nm, the refractive index at 550nm wavelength is 1.9-
2.3, extinction coefficient is 0.1-0.2.The refractive index of DLC ganoine thin film is preferably 2.0, and extinction coefficient is preferably 0.1.
Preferably, the DLC film can be prepared using physical vapour deposition (PVD) with chemical gaseous phase depositing process,
Including but not limited to magnetron sputtering, plasma enhanced chemical vapor deposition, pulsed cathode arc technology, ion beam depositing etc..
On the other hand, the utility model embodiment provides a kind of touch panel, including matrix and is deposited on matrix table
The hard composite membrane in face, the hard composite membrane is the hard composite membrane described in any of the above-described embodiment.
The utility model has advantage and beneficial effect as is evident below compared with prior art：
The utility model further devises antireflective film on the basis of DLC hard coating, is ensureing DLC
Film in outermost layer realize protective effect while, reached good anti-reflection effect, significantly improved visible light transmissivity.
Brief description of the drawings
Fig. 1 is the structural representation of the hard composite membrane of the utility model embodiment 1；
Fig. 2 is the light transmittance curve contrast before and after the anti-reflection of embodiment 1, and wherein curve 1 is glass basis+10nm DLCs
Film；Curve 2 is glass basis+56.3nmSiO2Antireflective film+10nm DLC films；
Fig. 3 is the structural representation of the hard composite membrane of the utility model embodiment 2；
Fig. 4 is the light transmittance curve contrast before and after the anti-reflection of embodiment 2, and wherein curve 1 is glass basis+30nm DLCs
Film；Curve 2 is 85.6nmMgF2Antireflective film+glass basis+30nm DLC films；
Fig. 5 is the structural representation of the hard composite membrane of the utility model embodiment 3；
Fig. 6 is the light transmittance curve contrast before and after the anti-reflection of embodiment 3, and wherein curve 1 is glass basis+5nm DLCs
Film；Curve 2 is 69.7nm MgF2Antireflective film+glass basis+85.0nmMgF2Antireflective film+5nm DLC films.
Embodiment
The utility model is described in further detail with reference to specific embodiment, but not as to of the present utility model
Limit.In the following description, what different " embodiment " or " embodiment " referred to is not necessarily same embodiment.In addition, one or
Special characteristic, structure or feature in multiple embodiments can be combined by any suitable form.
Embodiment 1
Anti-reflection Film Design is done for the thick DLC films of 10nm.
Using hard structure of composite membrane as shown in Figure 1, wherein matrix 1 is 0.7mm soda-lime glass, by chemical steel
Change is handled.Outermost layer hard films are 10nm DLC film 3, and refractive index is 2.0, and extinction coefficient is 0.1.The anti-reflection of design
Film 2 uses SiO2Film, antireflective film 2 is deposited between diamond-film-like 3 and matrix 1, and the refractive index of antireflective film is 1.45, delustring system
Number is 0, and the thickness of antireflective film is 56.3nm.
The specific preparation process of the present embodiment is as follows：Glass substrate is surpassed in IPA solution and deionized water respectively
Sound wave is cleaned, and each cleaning is put into chemical tempering solution pool after 10 minutes, and solution formula is technical pure KNO3+ 0.5wt.% is analyzed
Pure Al2O3, steel process be 450 DEG C be incubated 5 hours.Sheet glass after tempering is cooled in room temperature, immersion deionized water and soaked
12 hours, ultrasonic wave in IPA solution is put into after immersion and is cleaned 5 minutes, placed into ultrasonic wave in deionized water and clean 5 minutes.Will
Sheet glass after cleaning is put into electron beam evaporation deposition chamber deposition, and back end vacuum is 2 × 10-4Pa, plating material is Si, electron gun
Voltage 7.6kV, line size 30mA, ion gun auxiliary dissociation O2Flow 30sccm, anodic bias 120V, electric current 2A, during deposition
Between 0.9 minute.Static cooling is transmitted into pecvd process chamber again after 5 minutes, radio-frequency power
200W, methane flow 15sccm, pressure control 10mtorr, sedimentation time 3.4 minutes.Anti-reflection effect is as shown in Fig. 2 curve 1 is represented only
Deposit the coated glass of 10nm DLC films；Curve 2 represents and deposited above-mentioned 56.3nmSiO2Antireflective film+10nm diamond-likes
The coated glass of stone film.As can be seen that increase SiO2Increased in whole visible light wave range transmissivity after antireflective film.
At the most sensitive 550nm of human eye, transmitance is improved to the 88.05% of curve 2 by the 86.96% of curve 1, illustrates the present embodiment
While DLC film outermost layer protective effect is kept, the visible light permeability of coated glass is improved.
Embodiment 2
Anti-reflection Film Design is done for the thick DLC films of 30nm.
The present embodiment uses hard structure of composite membrane as shown in Figure 3, and wherein matrix 1 is 0.7mm soda-lime glass, warp
Cross chemical tempering processing.Outermost layer hard films are 30nm DLC film 3, and refractive index is 2.0, and extinction coefficient is 0.1.If
The antireflective film 2 of meter uses MgF2Film, deposition position is the offside of diamond-film-like 3, in the inner surface of matrix 1, the folding of antireflective film 2
It is 1.38 to penetrate rate, and extinction coefficient is 0, and optimization thickness is 85.6nm.
The specific preparation process of the present embodiment is as follows：Glass substrate is subjected to ultrasound in IPA solution and deionized water respectively
Ripple is cleaned, and each cleaning is put into chemical tempering solution pool after 10 minutes, and solution formula is technical pure KNO3+ 0.5wt.% analyses are pure
Al2O3, steel process be 450 DEG C be incubated 5 hours.Sheet glass after tempering is cooled in room temperature, immersion deionized water and soaks 12
Hour, ultrasonic wave in IPA solution is put into after immersion and is cleaned 5 minutes, ultrasonic wave in deionized water is placed into and cleans 5 minutes.Will be clear
Sheet glass after washing is put into electron beam evaporation deposition chamber deposition, and back end vacuum is 2 × 10-4Pa, plating material is MgF2, electron gun
Voltage 7.6kV, line size 20mA, ion gun auxiliary dissociation Ar flow 20sccm, anodic bias 120V, electric current 2A, during deposition
Between 1.78 minutes.Static cooling is overturn to another side again after 5 minutes, is transmitted to pecvd process chamber
In, radio-frequency power 200W, methane flow 15sccm, pressure control 10mtorr, sedimentation time 10.2 minutes.
Anti-reflection effect is as shown in figure 4, curve 1 represents the coated glass for only depositing 30nm DLC films；Curve 2 is represented
The back side that deposited of the present embodiment increases plating 85.6nmMgF2The coated glass of film.As can be seen that increase MgF2Whole after antireflective film
Visible light wave range transmissivity increases.At the most sensitive 550nm of human eye, transmitance is improved by the 76.18% of curve 1
To the 78.27% of curve 2, illustrate that the present embodiment while DLC film outermost layer protective effect is kept, improves plating
The visible light permeability of film glass.
Embodiment 3
Anti-reflection Film Design is done for the thick DLC films of 5nm.
The present embodiment uses hard structure of composite membrane as shown in Figure 5, and wherein matrix 1 is 0.7mm soda-lime glass, warp
Cross chemical tempering processing.Outermost layer hard films are 5nm DLC film 3, and refractive index is 2.0, and extinction coefficient is 0.1.If
The antireflective film 2 of meter uses MgF2Film, antireflective film 2 is respectively deposited at the inner surface of matrix 1 and outer surface, and the refractive index of antireflective film 2 is
1.38, extinction coefficient is 0.Homonymy MgF2The optimization thickness of film is 69.7nm, offside MgF2The optimization thickness of film is 85.0nm.
The specific preparation process of the present embodiment is as follows：Glass substrate is surpassed in IPA solution and deionized water respectively
Sound wave is cleaned, and each cleaning is put into chemical tempering solution pool after 10 minutes, and solution formula is technical pure KNO3+ 0.5wt.% is analyzed
Pure Al2O3, steel process be 450 DEG C be incubated 5 hours.Sheet glass after tempering is cooled in room temperature, immersion deionized water and soaked
12 hours, ultrasonic wave in IPA solution is put into after immersion and is cleaned 5 minutes, placed into ultrasonic wave in deionized water and clean 5 minutes.Will
Sheet glass after cleaning is put into electron beam evaporation deposition chamber deposition, and back end vacuum is 2 × 10-4Pa, plating material is MgF2, electronics
Rifle voltage 7.6kV, line size 20mA, ion gun auxiliary dissociation Ar flow 20sccm, anodic bias 120V, electric current 2A, deposition
1.45 minutes time.Static cooling is overturn to another side again after 5 minutes, and plating material is still MgF2, electron gun voltage 7.6kV, beam
Size 20mA is flowed, ion gun auxiliary dissociation Ar flow 20sccm, anodic bias 120V, electric current 2A, sedimentation time 1.77 minutes are quiet
Only cool down 5 minutes.Transmit again into pecvd process chamber, radio-frequency power 200W, methane flow
15sccm, pressure control 10mtorr, sedimentation time 1.7 minutes.
Anti-reflection effect is as shown in fig. 6, curve 1 represents the coated glass for only depositing 5nm DLC films；Curve 2 is represented
69.7nmMgF has been plated in the homonymy increasing that deposited of the present embodiment2Film, offside, which increases, has plated 85.0nmMgF2The coated glass of film.It can see
Go out, both sides increase MgF2Increased in whole visible light wave range transmissivity after antireflective film.It is most sensitive in human eye
At 550nm, transmitance is improved to the 94.54% of curve 2 by the 89.52% of curve 1, illustrates that the present embodiment is keeping DLC
While film outermost layer protective effect, the visible light permeability of coated glass is improved.And increase plating antireflective film in both sides
In the case of, the best results of anti-reflection.
The pretreatment such as tempering processing, cleaning of matrix 1 and specific coating process are only in the utility model embodiment
Exemplary illustration, selects for those skilled in the art, is not limitation of the utility model.As DLC film can be used
Physical vapour deposition (PVD) is prepared with chemical gaseous phase depositing process, including but not limited to magnetron sputtering, PECVD
The technique such as deposition, pulsed cathode arc technology, ion beam depositing.Equally, antireflective film can also be using physical vapour deposition (PVD) and chemistry
It is prepared by CVD method.Such as SiO2Film can be sunk using magnetron sputtering, plasma enhanced chemical vapor deposition, ion beam
Product, evaporation coating method etc..MgF2Antireflective film can be sunk using magnetron sputtering, plasma enhanced chemical vapor deposition, ion beam
Product, evaporation coating method etc..SiNxAntireflective film can be sunk using magnetron sputtering, plasma enhanced chemical vapor deposition, ion beam
Product, evaporation coating method etc..This is no longer going to repeat them for concrete technology.
Antireflective film in the utility model embodiment can be monofilm, such as embodiment 1 and embodiment 2.Also can be as implemented
Shown in example 3, antireflective film is multilayer, when antireflective film is multilayer, and every layer of material can be with identical also different.
The above, embodiment only of the present utility model, but protection domain of the present utility model do not limit to
In this, any one skilled in the art can readily occur in change in the technical scope that the utility model is disclosed
Or replace, it should all cover within protection domain of the present utility model.Therefore, protection domain of the present utility model should be with the power
The protection domain that profit is required is defined.
Claims (9)
1. hard composite membrane, it is characterised in that be deposited on matrix surface, wherein hard composite membrane is by DLC film and anti-reflection
Film is constituted, and the refractive index of described matrix is less than the refractive index of the DLC film, and described matrix includes relative inner surface
And outer surface, the DLC film is deposited on the outer surface side of matrix, and the antireflective film is deposited on the interior of described matrix
Between surface and/or DLC film and matrix.
2. hard composite membrane according to claim 1, it is characterised in that the antireflective film is selected from following SiO2、MgF2With
SiNxIn a kind of formation monofilm or the composite membrane of at least one formation.
3. hard composite membrane according to claim 2, it is characterised in that SiO2The thickness of antireflective film is 5-200nm,
Refractive index at 550nm wavelength is 1.4-1.5, and extinction coefficient is 0.
4. hard composite membrane according to claim 2, it is characterised in that MgF2The thickness of antireflective film is 5-200nm,
Refractive index at 550nm wavelength is 1.3-1.4, and extinction coefficient is 0.
5. hard composite membrane according to claim 2, it is characterised in that SiNxThe x of antireflective film is 1-1.35, and thickness is 5-
200nm, the refractive index at 550nm wavelength is 1.9-2.2, and extinction coefficient is 0-1 × 10-5。
6. hard composite membrane according to claim 1, it is characterised in that described matrix is common float glass, quartzy glass
Glass, ultra-clear glasses or pattern glass.
7. hard composite membrane according to claim 1, it is characterised in that the thickness of the DLC film is 5-
50nm, the refractive index at 550nm wavelength is 1.9-2.3, and extinction coefficient is 0.1-0.2.
8. hard composite membrane according to claim 1, it is characterised in that the DLC film is heavy using physical vapor
It is prepared by product or chemical gaseous phase depositing process.
9. touch panel, including matrix and the hard composite membrane for being deposited on matrix surface, the hard composite membrane will for right
Seek the hard composite membrane described in any one of 1-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621346408.5U CN206337174U (en) | 2016-12-09 | 2016-12-09 | Hard composite membrane and touch panel |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621346408.5U CN206337174U (en) | 2016-12-09 | 2016-12-09 | Hard composite membrane and touch panel |
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| CN206337174U true CN206337174U (en) | 2017-07-18 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106746721A (en) * | 2016-12-09 | 2017-05-31 | 北京航玻新材料技术有限公司 | Hard composite membrane, touch panel and preparation method thereof |
| CN108385059A (en) * | 2018-01-17 | 2018-08-10 | 维达力实业(深圳)有限公司 | Highlighted hard ornament film and preparation method thereof and application |
| CN109704596A (en) * | 2019-03-01 | 2019-05-03 | 昆山福钻新材料科技有限公司 | A kind of antireflective conductive film of index matching and preparation method thereof |
-
2016
- 2016-12-09 CN CN201621346408.5U patent/CN206337174U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106746721A (en) * | 2016-12-09 | 2017-05-31 | 北京航玻新材料技术有限公司 | Hard composite membrane, touch panel and preparation method thereof |
| CN108385059A (en) * | 2018-01-17 | 2018-08-10 | 维达力实业(深圳)有限公司 | Highlighted hard ornament film and preparation method thereof and application |
| CN109704596A (en) * | 2019-03-01 | 2019-05-03 | 昆山福钻新材料科技有限公司 | A kind of antireflective conductive film of index matching and preparation method thereof |
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