CN206132015U - Etalon that multisensor measuring engine coordinate is unified and precision is examined and determine - Google Patents
Etalon that multisensor measuring engine coordinate is unified and precision is examined and determine Download PDFInfo
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- CN206132015U CN206132015U CN201620676563.7U CN201620676563U CN206132015U CN 206132015 U CN206132015 U CN 206132015U CN 201620676563 U CN201620676563 U CN 201620676563U CN 206132015 U CN206132015 U CN 206132015U
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Abstract
The utility model provides an etalon that multisensor measuring engine coordinate is unified and precision is examined and determine, is the demarcation that is used for an album image sensor, contact type senser and non -contact displacement sensor combined type coordinate measuring machine as an organic whole, including base and the fixed different demarcation ware of 2 above structure looks co -altitudes that sets up on the base. The utility model discloses can realize two liang of coordinates of contact type senser, image sensor, non -contact displacement sensor unifies or the unity of three's coordinate. And measurement accuracy examination in the measuring engine overall situation measurement space, easy operation is convenient, and calibration efficiency is high. The utility model discloses can obtain errors such as circularity, cylindricity, axiality, the straightness that hangs down is less than other finished piece of tens nanometers. Image sensor is polaroid to the frustum tip circle, and the circle is surveyed to the contact type senser two dimension, has reduced the influence that multidimensional movement brought into. By more than 2 the etalon constituteed of demarcation ware, be applicable to the precision examination of the overall measurement space or the local measurement space of high accuracy duplex measurement machine.
Description
Technical field
This utility model is related to a kind of coordinate unification and precision verification standard.More particularly to a kind of collection image sensing
The multisensor measuring machine coordinate unification of the multiple sensors such as device, touch sensor and non-contact displacement sensor and precision inspection
Fixed standard.
Background technology
Coordinate measuring machine is the important means of workpiece size measurement, is extensively applied in multiple industries.At present, due to workpiece
More precise treatment, specialization, structure are also exquisite complicated all the more, and traditional contact single-sensor is difficult to meet in many cases
The demand of measurement.Multisensor duplex measurement machine can realize that conventional single sensor is difficult to the measurement work for completing.By image
Multiple sensors such as sensor, touch sensor and non-contact displacement sensor etc. are integrated on same measuring machine, can
The measurement of different characteristic, the competitive type of size, cooperation type and complementary type is realized, the purpose of measurement is optimal.For example：Using image
The diameter of measurement micropore, measures free form surface of camera lens etc. using non-contact displacement sensor.
The duplex measurement of multisensor is realized, needs multiple sensors are carried out the unification of coordinate, will multiple coordinate systems
It is unified to arrive under same coordinate system.Generally there is the material standard device conduct of certain geometric properties or certain several geometric properties combination
The medium of multisensor coordinate fusion (registration), such as traditional coordinate machine examination regularly the most long standard ball for using.Only using
On the measuring machine of single touch sensor, very good effect is shown as material standard device using standard ball, widely industry receives.
In theory, touch sensor many places in the standard ball take a little, can measure the three-dimensional coordinate of the centre of sphere；Imageing sensor is measured
The equatorial circle of standard ball can solve centre of sphere two-dimensional coordinate；Noncontact range sensor captures the zenith limit of standard ball, also may be used
Know centre of sphere two-dimensional coordinate.But when required precision is higher, such as in the high accuracy duplex measurement of submicron order, how will be multiple
The different coordinates unification of sensor is arrived under same coordinate system, above-mentioned traditional method Shortcomings.With noncontact Distance-sensing
As a example by device capture zenith limit, power restriction is differentiated by range sensor, sensor obtains limit, when numerical value no longer changes,
X --- corresponding on Y plane is not a unique point, but a region.For another example, imageing sensor is in standard ball equatorial circle
During upper sampling site, very high request is proposed to light source lighting quality.Additionally, the processing of sphere needs special process, when needs and other objects
With reference to or reprocessing when all there is technology difficulty.
How by the different coordinates of multiple sensors high-precision unification to same in submicron order duplex measurement
In coordinate system, to realize the high-acruracy survey of measuring machine；How standard ball that conventional contact coordinate measuring machine used is solved
Unworthiness in multisensor coordinate unification；How to examine and determine the multiple problems of the certainty of measurement of combined type measuring machine, etc. needs
Solve.
The content of the invention
Technical problem to be solved in the utility model is to provide a kind of multisensor measuring machine coordinate unification and precision inspection
Fixed standard.
The technical scheme adopted by this utility model is：A kind of mark of multisensor measuring machine coordinate unification and precision verification
Quasi- device, is the combined type measurement of coordinates for integrating imageing sensor, touch sensor and non-contact displacement sensor
The demarcation of machine, it is characterised in that the highly different mark identical with more than 2 structures being fixedly installed on base that includes base
Determine device.
The standard of multisensor measuring machine coordinate unification of the present utility model and precision verification, is capable of achieving contact-sensing
Device, imageing sensor, the coordinate unification two-by-two of non-contact displacement sensor or three's coordinate unification.And measuring machine global measuring
In space, certainty of measurement calibrating, simple to operation, demarcates efficiency high.Calibration device in this utility model is with cylindrical base material, Jing
Allusion quotation turning process, it is made up of microstoning equipment clamped one time, technical maturity；And can obtain circularity, cylindricity, axiality, hang down
Product of the straight degree equal error less than tens Nano grades.Imageing sensor is Polaroid to frustum tip circle, touch sensor two
Dimension surveys circle, reduces the impact that multi-dimensional movement is brought into.The standard being made up of 2 above-described calibration devices, it is adaptable to high-precision
The precision verification in the global measuring space or local measurement space of degree duplex measurement machine.
Description of the drawings
Fig. 1 is the structural representation of the standard of this utility model multisensor measuring machine coordinate unification and precision verification；
Fig. 2 is the top view of Fig. 1；
Fig. 3 is the structural representation of calibration device in this utility model；
Fig. 4 is the side view of calibration device in this utility model；
Fig. 5 is the top view of Fig. 4；
Fig. 6 is the structural representation of combined type coordinate measuring machine；
Fig. 7 is schematic diagram when calibration device is demarcated in this utility model；
Fig. 8 is the model schematic that combined type coordinate measuring machine demarcates XY directions；
Fig. 9 is the model schematic that combined type coordinate measuring machine demarcates Z-direction.
In figure
1：Base 2：Calibration device
21：Cylinder 22：The frustum of a cone
3：Combined type coordinate measuring machine frame 4：Combined type coordinate measuring machine X-axis
5：Combined type coordinate measuring machine Z axis 6：Workbench (Y-axis)
7：Standard V：Imageing sensor
P：Touch sensor L：Non-contact displacement sensor
Specific embodiment
With reference to embodiment and accompanying drawing to multisensor measuring machine coordinate unification of the present utility model and precision verification
Standard is described in detail.
As shown in Figure 1, Figure 2, shown in Fig. 6, Fig. 7, multisensor measuring machine coordinate unification of the present utility model and precision verification
Standard, is for integrating the survey of the combined type coordinate of imageing sensor, touch sensor and non-contact displacement sensor
The demarcation of amount machine and precision verification, height identical with more than 2 structures for being fixedly installed on base on 1 is different to include base 1
Calibration device 2.As shown in Figure 2 between the central shaft of each two calibration device 2 apart from l for known.Each calibration device 2 can be independent
Complete the coordinate unification of multisensor.
As shown in Fig. 3, Fig. 4, Fig. 5, described calibration device 2 includes cylinder 21, and the upper surface of the cylinder 21 is fixed
The frustum of a cone 22 is provided with, the frustum of a cone 22 is coaxially disposed with the cylinder 22.Wherein：
As shown in fig. 7, the diameter lv of 22 upper surface Zs of the frustum of a cone is passed less than the image on combined type coordinate measuring machine
Sensor measures field range.On bus (inclined-plane) Zm and cylinder 1 of the frustum of a cone 22, the size of the angle theta of top surface Zx is multiple
In the angular range that non-contact displacement sensor on box-like coordinate measuring machine can be measured, or the upper surface of the frustum of a cone 22 with
Lower surface vertical dimension hlIn the measurement range of non-contact displacement sensor.
Calibration device of the present utility model 2 is formed by microstoning, and precision is better than submicron order.It is complete using single calibration device 2
Into the coordinate unification of imageing sensor, touch sensor and non-contact displacement sensor.By the XYZ axle realities of moving coordinate machine
The level of the existing standard of imageing sensor, touch sensor and non-contact displacement sensor to being made up of multiple calibration devices 2,
The measurement of vertical dimension, completes precision verification of the duplex measurement machine in measurement space.
The scaling method of the standard of use multisensor measuring machine coordinate unification of the present utility model and precision verification, adopts
Coordinate unification demarcation is carried out to the multisensor of combined type coordinate measuring machine with any one calibration device 2 in standard, it is described
Demarcation comprises the steps：
1) imageing sensor V, touch sensor P shown in Fig. 4 and non-contact displacement sensor L is respectively adopted to mark
Determine device to measure, wherein
The measurement of imageing sensor V includes：
(1) imageing sensor V is focused, make after focusing is clear the 22 upper surface Zs of the frustum of a cone of calibration device generally in
In the visual field of imageing sensor V；
(2) round edge circle of 22 upper surface Zs of the calibration device frustum of a cone is obtained by imageing sensor V；
(3) center of circle V of 22 upper surface of the frustum of a cone is obtained by round edge circle0；
(4) center of circle V that step (3) is obtained0The position on combined type coordinate measuring machine or seat as imageing sensor V
Mark.
Center of circle V now0Acquisition be it is Polaroid in imageing sensor, it is complete under combined type coordinate measuring machine mechanical displacement
Into, therefore be not in mechanical movement error.
The measurement of touch sensor P includes：
(1) multiple points of the cross-sectional periphery of 21 same position Ysc of cylinder are measured using touch sensor P；
(2) extract the center of circle P in section0, the center of circle P0As touch sensor P on combined type coordinate measuring machine
Position or coordinate.
Now combined type coordinate measuring machine Z axis are in the lock state, and are only moved by 2 maintenance and operations of X-axis and Y-axis and realize that data are obtained
Take, compare and measure the commonly required 3-dimensional motion of sphere centre coordinate, reduce mechanical movement error.
The demarcation of non-contact displacement sensor includes：
(1) frustum of a cone 22 is scanned with Y-direction in X direction respectively using non-contact displacement sensor L；
(2) center of symmetrical centre or axis of symmetry as 22 upper surface of the frustum of a cone of the frustum of a cone 22 is found out according to scanning result
L0；
(3) by the center L of 22 upper surface of the frustum of a cone0As non-contact displacement sensor L on combined type coordinate measuring machine
Position or coordinate.
2) top surface for measuring cylinder using touch sensor obtains height Zp；
3) upper surface for measuring the frustum of a cone 22 using non-contact displacement sensor obtains height Zl；
4) position or coordinate points V of X/Y plane hypograph sensor in the same coordinate system are found out0, touch sensor
Location point P0With the location point L of non-contact displacement sensor0Between deviation, and the upper surface height Zp and circle of cylinder 21
The upper surface height Z of frustum 22lDifference, so as to obtain imageing sensor, touch sensor and non-contact displacement sensor
Position relationship, completes the triangular coordinate unification of imageing sensor, touch sensor and non-contact displacement sensor or demarcation.
Should be same point under the X/Y plane of the same coordinate system (its Z axis is parallel with the axis of symmetry of calibration device), but,
Step 1) the location point V of imageing sensor as shown in Figure 8 is obtained using calibration device of the present utility model 20, touch sensor
Location point P0With the location point L of non-contact displacement sensor0Between difference, find out three location point V0、P0And L0Between
Alternate position spike △ YVL, △ YPV, △ YPL, △ XVP, △ XPL, △ XVL, obtains imageing sensor V, contact by described difference
The position relationship in x/y plane between sensor P and non-contact displacement sensor L three；Obtain Z-direction coordinate as shown in Figure 9
Difference △ Z.
The standard of use multisensor measuring machine coordinate unification of the present utility model and precision verification is to combined type coordinate
The accuracy checking method of measuring machine, is to being combined based on imageing sensor, touch sensor and non-contact displacement sensor
The detection of formula coordinate measuring machine certainty of measurement, wherein：
Certainty of measurement detection based on imageing sensor comprises the steps：
1) 22 upper surface of the frustum of a cone of any one calibration device 2 in imageing sensor V alignment criteria devices is focused, is adjusted
22 upper surface of the frustum of a cone of burnt clear rear calibration device 2 is in the visual field of imageing sensor V；
2) round edge circle of 22 upper surface of the frustum of a cone of the calibration device 2 is obtained by imageing sensor V；
3) center of circle of 22 upper surface of the frustum of a cone of the calibration device 2 is obtained by round edge circle；
4) repeat step 1)～step 3) respectively obtain standard in other calibration devices the frustum of a cone 22 upper surface circle
The heart；
5) solve the center of circle centre-to-centre spacing between 22 upper surface of the frustum of a cone of each two calibration device 2, and with the standard for being used
Given value in device between 22 upper surface of the frustum of a cone of two corresponding calibration devices 2 asks difference to obtain difference, and the difference is base
In the measurement error of the combined type coordinate measuring machine of imageing sensor.
Certainty of measurement detection based on touch sensor comprises the steps：
1) cylinder 21 of each calibration device 2 in extraction standard device X, Y in the setting regions are distinguished using touch sensor
The central coordinate of circle in direction；
2) centre-to-centre spacing between each two calibration device 2 is obtained according to the central coordinate of circle of resulting each calibration device 2；
3) by step 2) described in each two calibration device 2 between centre-to-centre spacing it is corresponding with the standard for being used two
Between individual calibration device 2, the given value of centre-to-centre spacing asks poor, obtains difference, completes to survey the combined type coordinate based on touch sensor
The precision verification of amount machine X, Y-direction in the setting regions；
4) measure the top of the cylinder 21 of each calibration device 2 in setting regions internal standard device using touch sensor respectively
Face ZX, obtain height measurements Zp of the cylinder 21 of each calibration device 2；
5) by step 4) height measurements Zp of the cylinder 21 of each calibration device 2 that obtain and each calibration device 2 in standard
The top surface known altitude value of cylinder 21 ask poor, obtain Z-direction measurement error, complete to being combined based on touch sensor
Precision verification of the formula coordinate measuring machine in setting regions Z-direction.
Certainty of measurement detection based on non-contact displacement sensor comprises the steps：
1) apical side height of the cylinder 21 of each calibration device 2 in measurement standard device is distinguished using non-contact displacement sensor L
ZX, obtain height measurements Z of the cylinder 21 of each calibration device 2l；
2) by step 1) obtained by height measurements ZlAsk with the 21 known altitude value of cylinder of each calibration device 2 in standard
Difference, the difference is the combined type coordinate measuring machine Z-direction measurement error based on non-contact displacement sensor.
Change position of the described standard in combined type coordinate measuring machine measurement space, repeat based on imageing sensor
Certainty of measurement the step of detect, the certainty of measurement detecting step based on touch sensor and based on non-contact displacement sensor
Certainty of measurement detecting step, complete to combined type coordinate measuring machine difference local space certainty of measurement calibrating.
For standard entirety Z-direction change in location is the padded described mark of parallel plane by using precision satisfaction requirement
Quasi- device is realized, is such as realized using gauge block group.
Thus the certainty of measurement inspection being capable of achieving in combined type measuring machine multisensor coordinate unification and measuring machine measurement space
It is fixed.
Claims (1)
1. the standard of a kind of multisensor measuring machine coordinate unification and precision verification, is for collecting imageing sensor, contact
The demarcation of the multisensor measuring machine that sensor and non-contact displacement sensor are integrated, it is characterised in that include base（1）
Be fixedly installed on base（1）On the identical highly different calibration device of more than 2 structures（2）, described calibration device（2）Including
Cylinder（21）, the cylinder（21）Upper surface be fixedly installed the frustum of a cone（22）, the frustum of a cone（22）With the circle
Cylinder（21）It is coaxially disposed, the frustum of a cone（22）The diameter of upper surface is measured less than the imageing sensor of multisensor measuring machine
Field range, the frustum of a cone（22）Bus and cylinder（21）The size of upper top surface angle is on multisensor measuring machine
In the angular range of non-contact displacement sensor measurement, the frustum of a cone（22）Upper surface connect non-with lower surface vertical dimension
In the measurement range of tactile displacement transducer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620676563.7U CN206132015U (en) | 2016-06-28 | 2016-06-28 | Etalon that multisensor measuring engine coordinate is unified and precision is examined and determine |
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|---|---|---|---|
| CN201620676563.7U CN206132015U (en) | 2016-06-28 | 2016-06-28 | Etalon that multisensor measuring engine coordinate is unified and precision is examined and determine |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107202556A (en) * | 2017-06-16 | 2017-09-26 | 东莞市奥铭测控智能科技有限公司 | A kind of method that Z axis motion vertical degree error is adjusted based on image |
| CN108444419A (en) * | 2018-02-01 | 2018-08-24 | 阿尔特汽车技术股份有限公司 | Realize three coordinate arrangement on-line measurement systems and method |
| CN109341471A (en) * | 2018-10-22 | 2019-02-15 | 天津大学 | The identification method of three axis lathe geometric errors detection is realized based on ball row |
| CN109405779A (en) * | 2018-11-20 | 2019-03-01 | 天津大学 | The three coordinate measuring machine error of perpendicularity detection device and method of L-type ball row |
| CN109556548A (en) * | 2018-11-27 | 2019-04-02 | 重庆市计量质量检测研究院 | For detecting the standard and joint error detection method of joint error |
| CN112388388A (en) * | 2020-09-30 | 2021-02-23 | 成都飞机工业（集团）有限责任公司 | Machine tool geometric error detection method based on standard ball array |
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2016
- 2016-06-28 CN CN201620676563.7U patent/CN206132015U/en not_active Withdrawn - After Issue
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107202556A (en) * | 2017-06-16 | 2017-09-26 | 东莞市奥铭测控智能科技有限公司 | A kind of method that Z axis motion vertical degree error is adjusted based on image |
| CN107202556B (en) * | 2017-06-16 | 2019-09-06 | 东莞市奥铭测控智能科技有限公司 | A method of Z axis motion vertical degree error is adjusted based on image |
| CN108444419A (en) * | 2018-02-01 | 2018-08-24 | 阿尔特汽车技术股份有限公司 | Realize three coordinate arrangement on-line measurement systems and method |
| CN109341471A (en) * | 2018-10-22 | 2019-02-15 | 天津大学 | The identification method of three axis lathe geometric errors detection is realized based on ball row |
| CN109405779A (en) * | 2018-11-20 | 2019-03-01 | 天津大学 | The three coordinate measuring machine error of perpendicularity detection device and method of L-type ball row |
| CN109556548A (en) * | 2018-11-27 | 2019-04-02 | 重庆市计量质量检测研究院 | For detecting the standard and joint error detection method of joint error |
| CN112388388A (en) * | 2020-09-30 | 2021-02-23 | 成都飞机工业（集团）有限责任公司 | Machine tool geometric error detection method based on standard ball array |
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