CN205785496U - Measuring system for vibration parameters of scanning galvanometer - Google Patents
Measuring system for vibration parameters of scanning galvanometer Download PDFInfo
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- CN205785496U CN205785496U CN201620608690.3U CN201620608690U CN205785496U CN 205785496 U CN205785496 U CN 205785496U CN 201620608690 U CN201620608690 U CN 201620608690U CN 205785496 U CN205785496 U CN 205785496U
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- scanning galvanometer
- axis parabolic
- parabolic mirror
- point detector
- sinusoidal grating
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- 238000005259 measurement Methods 0.000 claims abstract description 37
- 238000003384 imaging method Methods 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 230000036962 time dependent Effects 0.000 description 2
- 210000004087 cornea Anatomy 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
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Abstract
The utility model relates to a measurement system of scanning galvanometer vibration parameter to solve that prior art angle measurement scope is little, the frequency response is low, the precision hangs down the scheduling problem. The measuring system comprises an integrating sphere light source, a first off-axis parabolic reflector, a second off-axis parabolic reflector, a single-point detector, a signal acquisition unit and time-series equipment. A sinusoidal grating is arranged at the light outlet of the integrating sphere light source; the first off-axis parabolic reflector is positioned on an emergent light path of the integrating sphere light source; the second off-axis parabolic reflector is positioned on an emergent light path of the first off-axis parabolic reflector; the scanning galvanometer to be detected is positioned on an emergent light path of the second off-axis parabolic reflector; the single-point detector is positioned at the convergence point of the reflected light beams of the scanning galvanometer to be detected so as to receive the sinusoidal grating image; the time system equipment is used for synchronizing the signal acquisition time of a motor of the scanning galvanometer to be detected and a single-point detector and giving the corresponding time of each angular position of the scanning galvanometer to be detected; the signal acquisition unit is used for reading the output signal of the single-point detector.
Description
Technical field
This utility model belongs to photoelectric measurement field, relates to the measurement system of a kind of scanning galvanometer vibration parameters.
Background technology
Scanning galvanometer is called for short galvanometer, is mainly made up of control motor and reflecting mirror, by controlling driven by motor reflecting mirror around it
High speed reciprocating rotation is made in rotating shaft.Galvanometer is widely used in swashing processing, medical field, is used for controlling the laser action time to realize swashing
Light energy is controlled.In the recent period, galvanometer is also used to compensate for the picture shifting that image camera introduces because of scene or displacement, makes image camera
The imaging effect being equivalent to stare is obtained in motor process.And the inaccurate image blur that will cause of galvanometer angular velocity of vibration,
Greatly affect the imaging effect of camera.
The vibration parameters such as the angular velocity of vibration of galvanometer, linear effective angle f obliquity, frequency of vibration are the masters in galvanometer application process
Want performance assessment criteria, be also the key index evaluating its performance.
Mostly the measurement of existing galvanometer vibration parameters is based on high-precision tracking system, it is achieved non-cpntact measurement, but is
The measurable angle range of system is little, and frequency response is relatively low；And other measurement based on precision angle principle system, although measure speed
Degree is fast, precision is high, environment resistant interference performance is strong, but typically requires installation auxiliary device on galvanometer, and the intervention of auxiliary device
The dynamic property of galvanometer itself can be affected.
Utility model content
For solving the problem being previously mentioned in background technology, this utility model provides that a kind of measurable angle range is big, frequency response
Hurry up, the measurement system of certainty of measurement is high, capacity of resisting disturbance is strong scanning galvanometer vibration parameters.
The technical solution of the utility model is:
The measurement system of scanning galvanometer vibration parameters, it includes single point detector, signal gathering unit and timing equipment；Institute
State timing equipment for the signals collecting time synchronized by the motor of scanning galvanometer to be measured Yu single point detector, and provide to be measured sweeping
Retouch galvanometer and vibrate the moment corresponding during each Angle Position；Described signal gathering unit is for reading and analyze the defeated of single point detector
Go out signal；It is characterized in that this measurement system also include integrating sphere light source, the first off-axis parabolic mirror and second from
Axle parabolic mirror；Being placed with sinusoidal grating at the light-emitting window of described integrating sphere light source, the direction of sinusoidal grating is swept with to be measured
The direction of vibration retouching galvanometer is parallel；Described first off-axis parabolic mirror is positioned on the emitting light path of integrating sphere light source, with long-pending
Bulb separation light source composition collimator；Described second off-axis parabolic mirror is positioned at the emergent light of the first off-axis parabolic mirror
Lu Shang；Scanning galvanometer to be measured is positioned on the emitting light path of the second off-axis parabolic mirror, by the second off-axis parabolic mirror
Outgoing beam turn back；Described single point detector is positioned at the convergent point of scanning galvanometer to be measured reflection light beam, is used for receiving sine
Grating image；The vibration of scanning galvanometer to be measured can cause the movement of described sinusoidal grating picture；
The focal length of described first off axis paraboloid mirror and the second off axis paraboloid mirror meets
In formula, L is the lateral dimension of sinusoidal grating, f1It is the focal length of the first off-axis parabolic mirror, f2It is second off-axis
The focal length of parabolic mirror, l be the single point detector vertical wheelbase away from scanning galvanometer vibration plane from, W is scanning galvanometer to be measured
The maximum vibration angle range of vibration plane；
The front end of described single point detector arranges the adjustable slit of seamed width, and the width d of slit meets
In formula, K is the cycle of sinusoidal grating；
Based on above basic technical scheme, this utility model is also made and being optimized as follows:
In order to ensure effective utilization of energy, above-mentioned first off-axis parabolic mirror and the second off-axis parabolic mirror
Bore identical.
Relative to other light sources, white light source energy is higher, and therefore the requirement to single point detector can be relatively low, required sine
The lateral dimension of grating is less, samples faster, therefore above-mentioned integrating sphere light source uses integrating sphere white light source.
For measuring system, this utility model additionally provides another technical scheme, can realize utility model purpose equally: will
The first off-axis parabolic mirror and the second off-axis parabolic mirror in technique scheme are overall by a lens replacement；Phase
Answer, sinusoidal grating after these lens on single point detector formed sinusoidal grating picture be conjugated with described sinusoidal grating；Described
The image distance of lens and object distance meet
The width d of described slit meets
In formula, fThingFor the object distance of lens, fPictureImage distance for lens；
The utility model has the advantages that:
1, this utility model achieves the non-cpntact measurement of scanning galvanometer parameter；By selecting the lateral dimension of sinusoidal grating
And screen periods, it is applicable to the measurement of the scanning galvanometer of different angle of throw scope and angular velocity, applied widely, measurable angle range
Greatly；Use two off-axis parabolic mirrors to match to sinusoidal grating image, be easily directed at during debugging light path, and optical path knot
Structure is the most stable, and certainty of measurement is high, and capacity of resisting disturbance is strong；Use the first off-axis parabolic mirror as the transmitting unit of target
Part, the second off-axis parabolic mirror is as the reception element of target, it is easy to obtain the sinusoidal grating picture of high-contrast, improves
The sensitivity of the system of measurement；Single point detector has the relaxation time reaching nanosecond, therefore this utility model is applicable to dither
Scanning galvanometer.
2, this utility model is when measuring, and without installation auxiliary device in scanning array mirror to be measured, does not affect galvanometer itself
Dynamic property.
When 3, using integrating sphere white light source, the lateral dimension of required sinusoidal grating is less, and sampling faster, is measured accordingly
Speed is the most faster.
4, another technical scheme of the present utility model uses lens to substitute two off-axis parabolic mirrors, also can reach
Identical technique effect, simply this scheme is the most complicated when light path is debugged.
Accompanying drawing explanation
Fig. 1 is the composition schematic diagram of measurement system of the present utility model；
Fig. 2 is the schematic diagram of the output signal of single point detector of the present utility model；
Fig. 3 is the schematic diagram of sinusoidal grating of the present utility model；
Detailed description of the invention
With detailed description of the invention, this utility model is described in detail below in conjunction with the accompanying drawings.
As it is shown in figure 1, the measurement system of scanning galvanometer vibration parameters provided by the utility model is by measuring light emission end
With measurement light-receiving, analysis end composition.
One, light emission end is measured
Measure light emission end and include integrating sphere white light source 11 and the first off-axis parabolic mirror 13；Integrating sphere white light light
Being placed with sinusoidal grating 12 at the light-emitting window in source 11, the direction of sinusoidal grating 12 is parallel with the direction of vibration of scanning galvanometer 3 to be measured；
First off-axis parabolic mirror 13 is positioned on the emitting light path of integrating sphere white light source 11, forms with integrating sphere white light source 11
Collimator, images in infinite point by sinusoidal grating 12.
Two, measure light-receiving, analyze end
Measure light-receiving, analysis end includes the second off-axis parabolic mirror 21, single point detector 23, signal gathering unit
24 and timing equipment 25；
Second off-axis parabolic mirror 21 is positioned on the emitting light path of the first off-axis parabolic mirror 13, receive from
The directional light of the first off-axis parabolic mirror 13, and Jiao that sinusoidal grating images in the second off-axis parabolic mirror 21 puts down
On face；
Scanning galvanometer 3 to be measured is positioned on the emitting light path of the second off-axis parabolic mirror 21, by the second off axis paraboloid mirror
The outgoing beam of reflecting mirror 21 is turned back；
Single point detector 23 is positioned at scanning galvanometer 3 to be measured and reflects at the convergent point of light beam, is used for receiving sinusoidal grating picture；Separately
Outward, it is contemplated that the target surface size of single point detector 23 is limited, arranges adjustable slit 22 in the front end of single point detector 23, to improve
The spatial sampling ability of single point detector 23, improves the single point detector 23 ability to energy response simultaneously；
The vibration of scanning galvanometer 3 to be measured can cause the movement of the sinusoidal grating picture that single point detector 23 received, Jin Erdan
The output signal of point probe 23 changes；
Timing equipment 25 is used for the signals collecting time synchronized of the motor of scanning galvanometer 3 to be measured with single point detector 23,
And provide scanning galvanometer 3 to be measured vibration to the moment corresponding during each Angle Position；
Signal gathering unit 24 is for reading the output signal of single point detector 23；
Three, each component parameters in measurement system
1, for ensure within the whole vibration period of scanning galvanometer 3 to be measured, single point detector 23 can receive sinusoidal light
Grid picture, the focal length of the first off axis paraboloid mirror and the second off axis paraboloid mirror meets
In formula, L is the lateral dimension of sinusoidal grating, f1It is the focal length of the first off-axis parabolic mirror, f2It is second off-axis
The focal length of parabolic mirror, l be the single point detector vertical wheelbase away from scanning galvanometer vibration plane from, W is scanning galvanometer to be measured
The maximum vibration angle range of vibration plane.
2, when the requirement meeting energy response, the width d of slit meets
In formula, K is the cycle of sinusoidal grating.
Note: by whole to the first off-axis parabolic mirror 13 in above-mentioned measurement system and the second off-axis parabolic mirror 21
Body is substituted by lens, also can complete utility model purpose, reach identical technique effect.
Accordingly, in former measurement system with the first off-axis parabolic mirror 13 and the second off-axis parabolic mirror 21 phase
Position and the parameter closed are substituted by position and the parameter of described lens the most therewith, and the newest position relationship and parameter be: sinusoidal
Grating 12 after these lens on single point detector 23 formed sinusoidal grating picture be conjugated with sinusoidal grating 12；The image distance of lens and
Object distance meets
The width d of adjustable slit 22 meets
In formula, fThingFor the object distance of lens, fPictureImage distance for lens.
The method utilizing above-mentioned measurement systematic survey scanning galvanometer vibration parameters comprises the following steps:
1) parameter of measurement system components is determined；
1.1) if the system of measurement uses off-axis parabolic mirror, then determine respectively according to above-mentioned formula 1 and formula 2
The parameter of assembly；
1.2) if the system of measurement uses lens, then the parameter of each assembly is determined according to above-mentioned formula 5 and formula 6；
2), after sinusoidal grating being removed measurement system, adjust measurement system, make measurement optical axis beat at scanning galvanometer 3 to be measured
The centre of oscillation；
2.1) opening integrating sphere white light source 11, the light-emitting window at integrating sphere white light source 11 places punctate opacity of the cornea or cross
Silk；
2.2) open scanning galvanometer 3 to be measured and adjust its position, when the hot spot fallen on scanning galvanometer 3 to be measured or cross picture
When not translating with galvanometer when galvanometer vibrates, i.e. show that measuring optical axis beats in the centre of oscillation of scanning galvanometer 3 to be measured；
3) sinusoidal grating 12 is cut measurement system, adjust sinusoidal grating 12 and make the direction of sinusoidal grating 12 and scanning to be measured
The direction of vibration of galvanometer 3 is parallel；
4) single point detector 23, timing equipment 25 and signal gathering unit 24 are opened, according to the output of single point detector 23
Signal judges whether to need to adjust the position of sinusoidal grating 12:
4.1) if the output signal of the single point detector 23 time dependent sinusoidal signal that is amplitude, single point detector is shown
The signal acquisition point of 23 falls at the peak value or valley of sinusoidal grating picture, and (now the output signal of single point detector 23 is sinusoidal
Grating image is fallen into oblivion), then adjust the position of sinusoidal grating 12；
4.2) if the output signal of single point detector 23 is the time dependent quasi sine signal of amplitude as shown in Figure 2,
Show that the signal acquisition point of single point detector 23 does not falls within peak value or the valley of sinusoidal grating picture, be not required to adjust sinusoidal grating 12
Position, perform step 5)；Otherwise, step 4.1 is performed)
5) the space angle w corresponding to peak-to-peak value of the output signal of single point detector 23 is calculatedc；
5.1) when the system of measurement uses off-axis parabolic mirror:
5.2) when the system of measurement uses off-axis parabolic mirror:
6) within a vibration period of scanning galvanometer 3 to be measured, scanning galvanometer 3 to be measured is reverse after moving to maximum vibration angle
Time, single point detector 23 output signal then shows as having two adjacent turning points A and turning point B, turning point A and turning to
The Space Angle putting the signal between B corresponding is 2W, and W is the most good angle range of galvanometer vibration plane, as shown in Figure 2；
7) by the signals collecting time synchronized of the motor of scanning galvanometer 3 to be measured Yu single point detector 23, scanning to be measured is obtained
Galvanometer 3 is in zero-bit w0Time corresponding single point detector 23 output signal in position；
8) output signal between turning point A and turning point B is converted into scanning galvanometer 3 to be measured within a vibration period
Angle Position wtTime dependent relation:
wt=w0+wc× t formula 4
In formula, t=0,1,2 ...
9) to above-mentioned formula 4 differential, i.e. obtain the angular velocity of vibration curve of scanning galvanometer to be measured, this curve can be treated
Survey the vibration parameters of scanning galvanometer.
Claims (5)
1. the measurement system of scanning galvanometer vibration parameters, including single point detector, signal gathering unit and timing equipment；Time described
System equipment is for the signals collecting time synchronized by the motor of scanning galvanometer to be measured with single point detector, and provides scanning to be measured and shake
Mirror vibrates the moment corresponding during each Angle Position；Described signal gathering unit is for reading the output signal of single point detector；Its
It is characterised by:
Also include integrating sphere light source, the first off-axis parabolic mirror and the second off-axis parabolic mirror；
It is placed with sinusoidal grating, the direction of sinusoidal grating and the vibration of scanning galvanometer to be measured at the light-emitting window of described integrating sphere light source
Direction is parallel；
Described first off-axis parabolic mirror is positioned on the emitting light path of integrating sphere light source, forms directional light with integrating sphere light source
Pipe；Described second off-axis parabolic mirror is positioned on the emitting light path of the first off-axis parabolic mirror；Scanning galvanometer to be measured
It is positioned on the emitting light path of the second off-axis parabolic mirror, the outgoing beam of the second off-axis parabolic mirror is turned back；Institute
State single point detector to be positioned at the convergent point of scanning galvanometer to be measured reflection light beam, be used for receiving sinusoidal grating picture；Scanning to be measured is shaken
The vibration of mirror can cause the movement of described sinusoidal grating picture；
The focal length of described first off axis paraboloid mirror and the second off axis paraboloid mirror meets
In formula, L is the lateral dimension of sinusoidal grating, f1It is the focal length of the first off-axis parabolic mirror, f2It it is the second off-axis parabolic
The focal length of face reflecting mirror, l be the single point detector vertical wheelbase away from scanning galvanometer vibration plane from, W is the vibration of scanning galvanometer to be measured
The maximum vibration angle range in face；
The front end of described single point detector arranges the adjustable slit of seamed width, and the width d of slit meets
In formula, K is the cycle of sinusoidal grating.
The measurement system of scanning galvanometer vibration parameters the most according to claim 1, it is characterised in that: described first throws off axis
The bore of parabolic mirror and the second off-axis parabolic mirror is identical.
The measurement system of scanning galvanometer vibration parameters the most according to claim 1 and 2, it is characterised in that: described integrating sphere
Light source is integrating sphere white light source.
The measurement system of scanning galvanometer vibration parameters the most according to claim 1 and 2, it is characterised in that: described first from
Axle parabolic mirror and the second off-axis parabolic mirror are overall by a lens replacement；
Accordingly, described sinusoidal grating after described lens on single point detector imaging and described sinusoidal grating be conjugated；
The image distance of described lens and object distance meet
The width d of described slit meets
In formula, fThingFor the object distance of lens, fPictureImage distance for lens.
The measurement system of scanning galvanometer vibration parameters the most according to claim 3, it is characterised in that: described first throws off axis
Parabolic mirror and the second off-axis parabolic mirror are overall by a lens replacement；
Accordingly, described sinusoidal grating after described lens on single point detector imaging and described sinusoidal grating be conjugated；
The image distance of described lens and object distance meet
The width d of described slit meets
In formula, fThingFor the object distance of lens, fPictureImage distance for lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620608690.3U CN205785496U (en) | 2016-06-20 | 2016-06-20 | Measuring system for vibration parameters of scanning galvanometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620608690.3U CN205785496U (en) | 2016-06-20 | 2016-06-20 | Measuring system for vibration parameters of scanning galvanometer |
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| Publication Number | Publication Date |
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| CN205785496U true CN205785496U (en) | 2016-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620608690.3U Withdrawn - After Issue CN205785496U (en) | 2016-06-20 | 2016-06-20 | Measuring system for vibration parameters of scanning galvanometer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106092302A (en) * | 2016-06-20 | 2016-11-09 | 中国科学院西安光学精密机械研究所 | System and method for measuring vibration parameters of scanning galvanometer |
-
2016
- 2016-06-20 CN CN201620608690.3U patent/CN205785496U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106092302A (en) * | 2016-06-20 | 2016-11-09 | 中国科学院西安光学精密机械研究所 | System and method for measuring vibration parameters of scanning galvanometer |
| CN106092302B (en) * | 2016-06-20 | 2022-03-25 | 中国科学院西安光学精密机械研究所 | System and method for measuring vibration parameters of scanning galvanometer |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20161207 Effective date of abandoning: 20220325 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20161207 Effective date of abandoning: 20220325 |