CN205506202U - Infrasonic wave detector - Google Patents
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- CN205506202U CN205506202U CN201620131406.8U CN201620131406U CN205506202U CN 205506202 U CN205506202 U CN 205506202U CN 201620131406 U CN201620131406 U CN 201620131406U CN 205506202 U CN205506202 U CN 205506202U
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Abstract
Description
技术领域technical field
本实用新型设备检测仪领域,尤其涉及一种次声波检测器。The utility model relates to the field of equipment detectors, in particular to an infrasonic wave detector.
背景技术Background technique
在工程应用上,红外测距仪测量时,测量某点到测量仪之间的距离时,若中间有障碍物,红外会遇到障碍物就会返回,测量得到的距离会变成测量仪到障碍物的距离,导致无法测量;超声波测距时,超声波遇到物体就会反射,所以被测量物体前有障碍物时,会使得检测数据无法正确得到。In engineering applications, when the infrared rangefinder measures the distance between a certain point and the measuring instrument, if there is an obstacle in the middle, the infrared will return when it encounters the obstacle, and the measured distance will become the distance between the measuring instrument and the measuring instrument. The distance of obstacles makes it impossible to measure; during ultrasonic ranging, ultrasonic waves will reflect when they encounter objects, so when there are obstacles in front of the measured object, the detection data cannot be obtained correctly.
转动设备或管道在运行中均会由于摩擦而发出各类噪声,该噪声中既包含超低频的次声波,也包含可听频段声波和超高频的超声波,由于声波信号的传输距离随着频率的增加而快速降低,如:频率为1000Hz的声波信号传输距离在达到7Km后能量衰减90%,而1Hz的次声波则是要在传输距离超过3000Km后能量才会衰减90%。因此通过次声波频段可以实现对设备运行异常状态的远距离非接触式故障诊断。Rotating equipment or pipelines will emit various noises due to friction during operation. The noise includes not only ultra-low frequency infrasonic waves, but also audible frequency band sound waves and ultra-high frequency ultrasonic waves. Since the transmission distance of sound wave signals increases with the frequency Increase and decrease rapidly, for example: the transmission distance of the sound wave signal with a frequency of 1000Hz is 90% energy attenuation after reaching 7Km, while the energy of the 1Hz infrasound wave is attenuated by 90% only after the transmission distance exceeds 3000Km. Therefore, the remote non-contact fault diagnosis of the abnormal state of the equipment can be realized through the infrasonic frequency band.
目前国内和国际上对设备运行异常状态的在线声波诊断主要集中在超声波探伤和声发射诊断领域。At present, domestic and international on-line acoustic diagnosis of abnormal equipment operation is mainly concentrated in the field of ultrasonic flaw detection and acoustic emission diagnosis.
目前,鲜有基于PVDF薄膜的次声波传感器记录。近几十年来,对次声波的检测已取得一定的成就,研制出了一些性能优良的次声波传感器,基本都是电容式次声波传感器。然而电容式传感器也存在一些问题。例如在高温、高湿及高激励的条件下检测结果会受影响。因此,此处提出采用新的结构、新型敏感元件来提高次声波传感器的测量灵敏度,减小了杂波干扰,可有效防止高温、高湿及高激励等环境的影响。Currently, there are few records of infrasonic sensors based on PVDF films. In recent decades, some achievements have been made in the detection of infrasonic waves, and some infrasonic wave sensors with excellent performance have been developed, which are basically capacitive infrasonic wave sensors. However, capacitive sensors also have some problems. For example, the test results will be affected under the conditions of high temperature, high humidity and high excitation. Therefore, a new structure and new sensitive elements are proposed here to improve the measurement sensitivity of the infrasonic sensor, reduce clutter interference, and effectively prevent the influence of high temperature, high humidity, and high excitation environments.
实用新型内容Utility model content
本实用新型为解决目前次声波传感器的测量灵敏度不高,稳定不强,检测数据无法正确得到的技术问题而提供一种次声波检测器。The utility model provides an infrasonic wave detector for solving the technical problems that the measurement sensitivity of the current infrasonic wave sensor is not high, the stability is not strong, and the detection data cannot be obtained correctly.
本实用新型为解决公知技术中存在的技术问题所采取的技术方案是:The technical scheme that the utility model takes for solving the technical problem existing in the known technology is:
一种次声波检测器,该次声波检测器包括信号放大电路、低通滤波电路、信号衰减电路、程控增益放大电路、直流偏置电路、控制器;所述信号放大电路将信号进行放大并将信号输入至低通滤波电路,所述低通滤波电路将信号进行低通滤波并将滤波后的信号输入至信号衰减电路,所述信号衰减电路将信号进行衰减并将衰减后的信号输入至程控增益放大电路,所述程控增益放大电路将信号进行增益放大并将放大后的信号分别输入至控制器和直流偏置电路;An infrasonic wave detector, comprising a signal amplifying circuit, a low-pass filter circuit, a signal attenuating circuit, a program-controlled gain amplifying circuit, a DC bias circuit, and a controller; the signal amplifying circuit amplifies the signal and inputs the signal To a low-pass filter circuit, the low-pass filter circuit performs low-pass filtering on the signal and inputs the filtered signal to the signal attenuation circuit, and the signal attenuation circuit attenuates the signal and inputs the attenuated signal to the programmable gain amplifier circuit, the program-controlled gain amplifier circuit performs gain amplification on the signal and inputs the amplified signal to the controller and the DC bias circuit respectively;
该次声波检测器还设置有次声波传感器;所述次声波传感器将实时检测的次声波信号输入至信号放大电路;The infrasonic wave detector is also provided with an infrasonic wave sensor; the infrasonic wave sensor inputs the real-time detected infrasonic wave signal to the signal amplification circuit;
所述次声波传感器包括外壳、接收平膜片、采集平膜片、接收平膜片箍、采集平膜片箍、基座、PVDF压电薄膜,外壳固定在基座上,接收平膜片和采集平膜片通过接收平膜片箍和采集平膜片箍固定在外壳的两截面端上,PVDF压电薄膜阵列设置在采集平膜片的靠近基座的一侧;所述次声波检测器还包括A/D转换电路、显示屏和报警装置;所述直流偏置电路将信号进行偏置并将信号输入至A/D转换电路,所述A/D转换电路将信号进行A/D转换并将信号输入至控制器,所述控制器将信号进行整理并将信号反馈至显示屏;显示屏和报警装置电连接,所述显示屏为智能触控显示屏。The infrasonic sensor comprises a shell, a receiving flat diaphragm, a collecting flat diaphragm, a receiving flat diaphragm hoop, a collecting flat diaphragm hoop, a base, a PVDF piezoelectric film, and the housing is fixed on the base, receiving the flat diaphragm and collecting The flat diaphragm is fixed on the two cross-sectional ends of the housing by receiving the flat diaphragm hoop and collecting the flat diaphragm hoop, and the PVDF piezoelectric film array is arranged on the side of the collecting flat diaphragm close to the base; the infrasonic wave detector also includes A/D conversion circuit, display screen and alarm device; the DC bias circuit biases the signal and inputs the signal to the A/D conversion circuit, and the A/D conversion circuit performs A/D conversion on the signal and The signal is input to the controller, and the controller sorts the signal and feeds the signal back to the display screen; the display screen is electrically connected to the alarm device, and the display screen is an intelligent touch display screen.
进一步,所述的外壳为圆柱形,其两截面端边缘带有螺纹;接收平膜片箍、采集平膜片箍和基座为同心圆状,接收平膜片箍和采集平膜片箍内沿带有螺纹,接收平膜片箍和采集平膜片箍内沿螺纹与外壳两截面端边缘螺纹相匹配。Further, the shell is cylindrical, and its two cross-sectional end edges are threaded; the receiving flat diaphragm ferrule, the collecting flat diaphragm ferrule and the base are concentric circles, and the receiving flat diaphragm ferrule and the collecting flat diaphragm ferrule There are threads along the inner edge of the receiving flat diaphragm hoop and the collection flat diaphragm hoop to match the threads on the edges of the two sections of the housing.
进一步,所述的接收平膜片和采集平膜片间的空腔内注满绝缘润滑油;基座上设置有固定孔和信号线引出孔。Further, the cavity between the receiving flat diaphragm and the collecting flat diaphragm is filled with insulating lubricating oil; the base is provided with fixing holes and signal wire lead-out holes.
进一步,所述程控增益放大电路包括程控增益放大器和第一运放,所述程控增益放大器的IN+端脚通过第一电阻与信号衰减电路的输出端连接,所述程控增益放大器的OUT端脚与直流偏置电路和控制器连接,所述程控增益放大器的REF端脚与第一运放的输出端连接,所述第一运放的同相端通过第六电阻接地并通过依次串联的第七电阻和第八电阻接入电源,所述第一运放的反相端与自身的输出端连接。Further, the programmable gain amplification circuit includes a programmable gain amplifier and a first operational amplifier, the IN+ terminal pin of the programmable gain amplifier is connected to the output terminal of the signal attenuation circuit through a first resistor, and the OUT terminal pin of the programmable gain amplifier is connected to the output terminal of the signal attenuation circuit. The DC bias circuit is connected to the controller, the REF terminal pin of the programmable gain amplifier is connected to the output terminal of the first operational amplifier, and the non-inverting terminal of the first operational amplifier is grounded through the sixth resistor and passed through the seventh resistor connected in series in sequence and the eighth resistor are connected to the power supply, and the inverting terminal of the first operational amplifier is connected to its own output terminal.
本实用新型具有的优点和积极效果是:本实用新型通过次声波传感器实时检测次声波信号;同时,通过信号放大电路、低通滤波电路、信号衰减电路、程控增益放大电路、直流偏置电路和A/D转换电路实现信号的调理;并且,通过显示屏实现信息的显示,当检测异常通过报警装置进行报警,本新型操作方便,具有很强的实用性。The advantages and positive effects of the utility model are: the utility model detects the infrasonic signal in real time through the infrasonic sensor; at the same time, through the signal amplification circuit, the low-pass filter circuit, the signal attenuation circuit, the program-controlled gain amplification circuit, the DC bias circuit and the A/ The D conversion circuit realizes the conditioning of the signal; moreover, the display of the information is realized through the display screen, and the alarm device is used to alarm when the abnormality is detected. The present invention is easy to operate and has strong practicability.
本实用新型提供的次声波传感器,采用次声波接收平膜片和次声波采集平膜片,实现了次声波接收平膜片与信号采集平膜片的有效隔离,有利于接收信号的均匀稳定的传递。此外,绝缘润滑油的填注可以增加传感的阻尼系数,以增强传感器防杂波干扰的能力;本实用新型次声波传感器,采用PVDF新型压电薄膜,利用其低频性能好的特点,拓宽了PVDF压电薄膜次声波传感器的低频范围,增强检测信号和减小检测信号的误差;本实用新型提供的次声波传感器,采用PVDF新型压电薄膜,利用其不易受高温、高湿等因素影响的特点,提高了次声波传感器的测量灵敏度,对低频和超低频响应效果好,减小了杂波干扰,实现了次声波传感器在高温、高湿条件下的正常使用。The infrasonic wave sensor provided by the utility model adopts the infrasonic wave receiving flat diaphragm and the infrasonic wave collecting flat diaphragm, realizes the effective isolation of the infrasonic wave receiving flat diaphragm and the signal collecting flat diaphragm, and is conducive to the uniform and stable transmission of the received signal. In addition, the filling of insulating lubricating oil can increase the damping coefficient of the sensor to enhance the ability of the sensor to prevent clutter interference. The low-frequency range of the piezoelectric film infrasonic sensor can enhance the detection signal and reduce the error of the detection signal; the infrasonic sensor provided by the utility model adopts PVDF new piezoelectric film, and utilizes its characteristics that are not easily affected by factors such as high temperature and high humidity to improve The measurement sensitivity of the infrasonic wave sensor is improved, the response effect to low frequency and ultra-low frequency is good, the clutter interference is reduced, and the normal use of the infrasonic wave sensor under high temperature and high humidity conditions is realized.
附图说明Description of drawings
图1是本实用新型实施例提供的次声波检测器结构示意图;Fig. 1 is a schematic structural diagram of an infrasonic wave detector provided by an embodiment of the present invention;
图2是本实用新型提供的次声波传感器的俯视结构示意图;Fig. 2 is a top view structural schematic diagram of the infrasonic wave sensor provided by the utility model;
图3是本实用新型提供的次声波传感器的次声波采集平膜片和PVDF压电薄膜阵列的结构示意图;Fig. 3 is the structural representation of the infrasonic wave acquisition flat diaphragm and PVDF piezoelectric film array of the infrasonic wave sensor provided by the utility model;
图4是本实用新型提供的控制器连接图;Fig. 4 is a controller connection diagram provided by the utility model;
图中:1、次声波传感器;1-1、外壳;1-2、接收平膜片;1-3、采集平膜片;1-4、接收平膜片箍;1-5、采集平膜片箍;1-6、基座;1-7、PVDF压电薄膜;1-8、固定孔;1-9、信号线引出孔;1-10、绝缘润滑油;2、信号放大电路;3、低通滤波电路;4、信号衰减电路;5、程控增益放大电路;6、直流偏置电路;7、A/D转换电路;8、显示屏;9、控制器;10、报警装置。In the figure: 1, infrasonic sensor; 1-1, shell; 1-2, receiving flat diaphragm; 1-3, collecting flat diaphragm; 1-4, receiving flat diaphragm hoop; 1-5, collecting flat diaphragm hoop; 1-6, base; 1-7, PVDF piezoelectric film; 1-8, fixing hole; 1-9, signal wire lead-out hole; 1-10, insulating lubricating oil; 2, signal amplification circuit; 3, Low-pass filter circuit; 4. Signal attenuation circuit; 5. Program-controlled gain amplifier circuit; 6. DC bias circuit; 7. A/D conversion circuit; 8. Display screen; 9. Controller; 10. Alarm device.
图5是本实用新型实施例提供的程控增益放大电路的电路结构示意图Fig. 5 is a schematic diagram of the circuit structure of the programmable gain amplifier circuit provided by the embodiment of the utility model
具体实施方式detailed description
为能进一步了解本实用新型的发明内容、特点及功效,兹例举以下实施例,并配合附图详细说明如下。In order to further understand the invention content, characteristics and effects of the present utility model, the following examples are given, and detailed descriptions are given below in conjunction with the accompanying drawings.
如图1至图4所示,本实施例提供的次声波检测器,该次声波检测器包括信号放大电路2、低通滤波电路3、信号衰减电路4、程控增益放大电路5、直流偏置电路6、控制器9;信号放大电路2将信号进行放大并将信号输入至低通滤波电路3,低通滤波电路3将信号进行低通滤波并将滤波后的信号输入至信号衰减电路4,信号衰减电路4将信号进行衰减并将衰减后的信号输入至程控增益放大电路5,程控增益放大电路5将信号进行增益放大并将放大后的信号分别输入至控制器9和直流偏置电路6;As shown in Figures 1 to 4, the infrasonic wave detector provided in this embodiment includes a signal amplification circuit 2, a low-pass filter circuit 3, a signal attenuation circuit 4, a programmable gain amplification circuit 5, and a DC bias circuit 6 , controller 9; the signal amplification circuit 2 amplifies the signal and inputs the signal to the low-pass filter circuit 3, and the low-pass filter circuit 3 performs low-pass filtering on the signal and inputs the filtered signal to the signal attenuation circuit 4, and the signal attenuation The circuit 4 attenuates the signal and inputs the attenuated signal to the programmable gain amplifier circuit 5, and the programmable gain amplifier circuit 5 amplifies the signal and inputs the amplified signal to the controller 9 and the DC bias circuit 6 respectively;
该次声波检测器还设置有次声波传感器1;所述次声波传感器1将实时检测的次声波信号输入至信号放大电路2;The infrasonic wave detector is also provided with an infrasonic wave sensor 1; the infrasonic wave sensor 1 inputs the real-time detected infrasonic wave signal to the signal amplification circuit 2;
次声波传感器1实时检测次声波信号并将检测到的信号输入至信号放大电路2,次声波传感器包括圆柱形外壳1-1、接收平膜片1-2、采集平膜片1-3、接收平膜片箍1-4、采集平膜片箍1-5、基座1-6、PVDF压电薄膜1-7,外壳1-1固定在基座1-6上,接收平膜片1-2和采集平膜片1-3通过接收平膜片箍1-4和采集平膜片箍1-5固定在外壳1-1的两截面端上,用于在次声波作用下产生形变,8片PVDF压电薄膜1-7阵列设置在采集平膜片1-3的靠近基座1-6的一侧,并用于增强压电信号和减少信号输出误差;其中外壳1-1为圆柱形,其两截面端外表面设置有螺纹;接收平膜片箍1-4、采集平膜片箍1-5和基座1-6为同心圆状,同心圆的内径和圆柱形外壳1-1的内径一致;接收平膜片箍1-4和采集平膜片箍1-5内沿带有螺纹,接收平膜片箍1-4和采集平膜片箍1-5内沿螺纹与外壳1-1两截面端边缘螺纹相匹配,通过将次声波接收平膜片箍1-4和采集平膜片箍1-5分别旋入圆柱形外壳1-1的两截面端,以达到固定和密封整个传感器内部结构之目的;接收平膜片1-2和采集平膜片1-3间的空腔内注满绝缘润滑油1-10,有利于实现接收平膜片1-2和采集平膜片1-3隔离的有效隔离,使信号传递更平稳和增加系统的阻尼性;并要保持绝对密封,不得有空气;基座1-6上设置有4个固定孔1-8用于固定次声波传感器,基座上设置有信号引线出孔1-9,用于引出粘贴于次声波采集平膜片1-3上的PVDF压电薄膜7阵列的输出信号线。The infrasonic wave sensor 1 detects the infrasonic wave signal in real time and inputs the detected signal to the signal amplification circuit 2. The infrasonic wave sensor includes a cylindrical shell 1-1, a receiving flat diaphragm 1-2, a collecting flat diaphragm 1-3, and a receiving flat diaphragm Hoop 1-4, collection flat diaphragm hoop 1-5, base 1-6, PVDF piezoelectric film 1-7, shell 1-1 fixed on the base 1-6, receiving flat diaphragm 1-2 and collection The flat diaphragm 1-3 is fixed on the two cross-sectional ends of the housing 1-1 by receiving the flat diaphragm hoop 1-4 and collecting the flat diaphragm hoop 1-5, and is used to generate deformation under the action of infrasonic waves. Eight pieces of PVDF piezoelectric The thin film 1-7 array is arranged on the side of the collection flat diaphragm 1-3 close to the base 1-6, and is used to enhance the piezoelectric signal and reduce the signal output error; wherein the shell 1-1 is cylindrical, and its two cross-sectional ends The outer surface is provided with threads; the receiving flat diaphragm hoop 1-4, the collection flat diaphragm hoop 1-5 and the base 1-6 are concentric circles, and the inner diameter of the concentric circles is consistent with the inner diameter of the cylindrical shell 1-1; the receiving The inner edge of the flat diaphragm ferrule 1-4 and the collection flat diaphragm ferrule 1-5 are threaded, the inner edge of the receiving flat diaphragm ferrule 1-4 and the collection flat diaphragm ferrule 1-5 are threaded and the two cross-sectional ends of the shell 1-1 The edge threads are matched, and the infrasonic wave receiving flat diaphragm hoop 1-4 and the collecting flat diaphragm hoop 1-5 are respectively screwed into the two cross-sectional ends of the cylindrical shell 1-1 to achieve the purpose of fixing and sealing the internal structure of the entire sensor ; The cavity between the receiving flat diaphragm 1-2 and the collection flat diaphragm 1-3 is filled with insulating lubricating oil 1-10, which is conducive to realizing the isolation of the receiving flat diaphragm 1-2 and the collection flat diaphragm 1-3 Effective isolation to make signal transmission more stable and increase the damping of the system; and to keep absolutely sealed without air; there are four fixing holes 1-8 on the base 1-6 for fixing the infrasonic sensor, and the base is set There are signal lead wire outlet holes 1-9, which are used to lead out the output signal lines of the PVDF piezoelectric film 7 array pasted on the infrasonic wave collection flat diaphragm 1-3.
所述次声波检测器还包括A/D转换电路7、显示屏8和报警装置10;所述直流偏置电路6将信号进行偏置并将信号输入至A/D转换电路7,所述A/D转换电路7将信号进行A/D转换并将信号输入至控制器9,所述控制器9将信号进行整理并将信号反馈至显示屏8;显示屏和报警装置10电连接,所述显示屏10为智能触控显示屏。The infrasonic wave detector also includes an A/D conversion circuit 7, a display screen 8 and an alarm device 10; the DC bias circuit 6 biases the signal and inputs the signal to the A/D conversion circuit 7, and the A/D The D conversion circuit 7 performs A/D conversion on the signal and inputs the signal to the controller 9, and the controller 9 organizes the signal and feeds the signal back to the display screen 8; the display screen is electrically connected to the alarm device 10, and the display Screen 10 is an intelligent touch display.
本实施例通过次声波传感器1实时检测次声波信号;同时,通过信号放大电路2、低通滤波电路3、信号衰减电路4、程控增益放大电路5、直流偏置电路6和A/D转换电路7实现信号的调理;并且,检测到的次声波信号通过显示屏8进行信号显示,从而方便用户得知周边次声波信号的强弱。In this embodiment, the infrasonic wave signal is detected in real time by the infrasonic wave sensor 1; at the same time, it is realized by the signal amplification circuit 2, the low-pass filter circuit 3, the signal attenuation circuit 4, the program-controlled gain amplification circuit 5, the DC bias circuit 6 and the A/D conversion circuit 7. Signal conditioning; and, the detected infrasound signal is displayed on the display screen 8, so that the user can easily know the strength of the surrounding infrasound signal.
本实施例的程控增益放大电路5可采用如图5所示的电路结构,包括程控增益放大器U1和第一运放A1,程控增益放大器U1的IN+端脚通过第一电阻R1与信号衰减电路4的输出端连接,程控增益放大器U1的OUT端脚与直流偏置电路6和控制器9连接,程控增益放大器U1的REF端脚与第一运放A1的输出端连接,第一运放A1的同相端通过第六电阻R6接地并通过依次串联的第七电阻R7和第八电阻R8接入电源,第一运放A1的反相端与自身的输出端连接。为优化系统,本实施例的显示屏8为智能触控显示屏,用户可直接进行触控进行工作的调节,当检测异常通过报警装置10进行报警。The program-controlled gain amplifier circuit 5 of this embodiment can adopt the circuit structure shown in Figure 5, including the program-controlled gain amplifier U1 and the first operational amplifier A1, the IN+ terminal pin of the program-controlled gain amplifier U1 and the signal attenuation circuit 4 through the first resistor R1 The output terminal of the program-controlled gain amplifier U1 is connected with the DC bias circuit 6 and the controller 9, the REF terminal of the program-controlled gain amplifier U1 is connected with the output terminal of the first operational amplifier A1, and the output terminal of the first operational amplifier A1 The non-inverting terminal is grounded through the sixth resistor R6 and connected to the power supply through the seventh resistor R7 and the eighth resistor R8 connected in series in sequence, and the inverting terminal of the first operational amplifier A1 is connected to its own output terminal. In order to optimize the system, the display screen 8 of this embodiment is an intelligent touch display screen, the user can directly touch to adjust the work, and when the detection is abnormal, the alarm device 10 will give an alarm.
本实用新型提供的次声波传感器的工作原理如下:在外界次声波作用下,次声波接收平膜片1-2上发生形变,硅油1-10将形变稳定传递至次声波采集平膜片1-3,次声波采集平膜片1-3上的PVDF压电薄膜阵列将次声波引起的形变转化成电荷信号,其输出的电荷量与所受到的应变量成正比,得到的电荷量由信号线从信号线引出孔1-9引出,通过外界电荷放大等处理后可以得到外界次声波的信息。The working principle of the infrasonic wave sensor provided by the utility model is as follows: under the action of external infrasonic waves, deformation occurs on the infrasonic wave receiving flat diaphragm 1-2, and the silicone oil 1-10 transmits the deformation stably to the infrasonic wave collecting flat diaphragm 1-3, and the infrasonic wave collecting The PVDF piezoelectric film array on the flat diaphragm 1-3 converts the deformation caused by the infrasonic wave into a charge signal, and the output charge is proportional to the strain received, and the obtained charge is drawn from the signal line to hole 1 -9 leads out, and the information of the external infrasound wave can be obtained after processing such as external charge amplification.
以上所述仅是对本实用新型的较佳实施例而已,并非对本实用新型作任何形式上的限制,凡是依据本实用新型的技术实质对以上实施例所做的任何简单修改,等同变化与修饰,均属于本实用新型技术方案的范围内。The above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the present utility model in any form. Any simple modifications made to the above embodiments according to the technical essence of the present utility model are equivalent to changes and modifications. All belong to the scope of the technical solution of the utility model.
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CN106323455A (en) * | 2016-08-18 | 2017-01-11 | 中国地震局地壳应力研究所 | Difference type infrasonic wave monitor based on MEMS microbarometer |
CN110579269A (en) * | 2019-08-14 | 2019-12-17 | 中国地震局地壳应力研究所 | infrasonic wave sensor for rarefied atmosphere space and sound detection load cabin |
US11399231B2 (en) * | 2019-09-27 | 2022-07-26 | United States Of America As Represented By The Administrator Of Nasa | Extreme low frequency microphone/hydrophone for exploration of oceanic and atmospheric dynamics |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106323455A (en) * | 2016-08-18 | 2017-01-11 | 中国地震局地壳应力研究所 | Difference type infrasonic wave monitor based on MEMS microbarometer |
CN106323455B (en) * | 2016-08-18 | 2018-12-04 | 中国地震局地壳应力研究所 | Differential type monitored by infrasonic wave instrument based on MEMS micromanometer |
CN110579269A (en) * | 2019-08-14 | 2019-12-17 | 中国地震局地壳应力研究所 | infrasonic wave sensor for rarefied atmosphere space and sound detection load cabin |
CN110579269B (en) * | 2019-08-14 | 2022-05-31 | 中国地震局地壳应力研究所 | Infrasonic wave sensor for rarefied atmosphere space and sound detection load cabin |
US11399231B2 (en) * | 2019-09-27 | 2022-07-26 | United States Of America As Represented By The Administrator Of Nasa | Extreme low frequency microphone/hydrophone for exploration of oceanic and atmospheric dynamics |
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