CN205029171U - Narrow linewidth excimer laser resonant cavity - Google Patents
Narrow linewidth excimer laser resonant cavity Download PDFInfo
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- CN205029171U CN205029171U CN201520575379.9U CN201520575379U CN205029171U CN 205029171 U CN205029171 U CN 205029171U CN 201520575379 U CN201520575379 U CN 201520575379U CN 205029171 U CN205029171 U CN 205029171U
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Abstract
The utility model discloses a narrow linewidth excimer laser resonant cavity, including discharge cavity, the mirror that is all -trans, prism and grating, the discharge cavity has two relative exit ends, and the mirror that is all -trans is placed in one of them exit end, and the prism apex angle is 39-45, and prism and grating place in another exit end of discharge cavity to place in proper order along the light path. The carry out bit of this resonant cavity in the surface reflection department of prism. The both ends of discharge cavity are placed and to be placed a slit respectively, and the discharge cavity emitting laser passes through the slit outgoing. Still can include the etalon, it is located in the output light path of resonant cavity or be arranged in the resonant cavity light path. The utility model discloses the output of excimer laser narrow linewidth not only can be realized, the energy and the stability of output laser can also be improved. Just the utility model discloses simple structure is favorable to reduce cost and harmonious convenience.
Description
Technical field
The utility model belongs to field of laser device technology, is specifically related to a kind of excimer laser resonant cavity that can export narrow linewidth intensity laser.
Background technology
The developing of application promotes the development of excimer laser technology.Excimer laser is usually used in the light source of the capital equipment mask aligner that large scale integrated circuit manufactures, along with the raising of large scale integrated circuit many-sided demand such as high integration, more low cost, higher requirement be it is also proposed to the performance of the excimer laser as photolithography light source, require that excimer laser has the Laser output of narrow linewidth, macro-energy.Utilize traditional linewidth narrowing module, usually to sacrifice energy for cost, obtain the Laser output of narrow linewidth.In order to obtain the output of higher-energy, while needing to design the output of a kind of structure acquisition narrow-linewidth laser, improve laser energy and stability thereof, to obtain the excimer laser of satisfied actual photoetching demand.
For the excimer laser of certain special requirement, the excimer laser requiring it to export has the characteristic of macro-energy and narrow linewidth simultaneously, but utilize traditional laser to add the combination of linewidth narrowing module, the output of narrow linewidth is is cost with the loss of laser energy.
Fig. 7 is the structural representation of traditional excimer laser linewidth narrowing resonant cavity.Traditional excimer laser linewidth narrowing module utilizes prism grating to carry out the technology of spectrum control, and as shown in Figure 7,71 is discharge cavity, and 74 is Littrow grating.Laser through linewidth narrowing is exported by the output coupling mirror 72 with partial reflectance (PR), in this structure, can lose, be unfavorable for the output of high energy laser from the light of prism 73 surface reflection.
Utility model content
(1) technical problem that will solve
The technical problem that the utility model solves under the constant prerequisite of live width, improves lasing efficiency and exports energy, namely reaching while narrow-linewidth laser exports, how to put forward high power output and stability.
(2) technical scheme
For solving the problems of the technologies described above, the utility model proposes a kind of excimer laser resonant cavity, comprising discharge cavity, total reflective mirror, prism and grating, described discharge cavity has two relative exit ends; Described total reflective mirror is positioned over one of them exit end of described discharge cavity; Described prism vertex angle is 39 ° ~ 45 °; Described prism and described grating are positioned over another exit end of described discharge cavity, and place successively along light path; The output of described excimer laser resonant cavity is positioned at the surface reflection place of described prism.
According to embodiment of the present utility model, described total reflective mirror is high reflective mirror.
According to embodiment of the present utility model, the two ends of described discharge cavity are placed and are placed a slit respectively, and the laser of discharge cavity outgoing is by described slit outgoing.
According to embodiment of the present utility model, also comprise etalon, it is positioned on the output light path of described resonant cavity.
According to embodiment of the present utility model, also comprise etalon, this etalon is arranged in the light path of this resonant cavity.
According to embodiment of the present utility model, described standard instruments is between described prism and described grating.
According to embodiment of the present utility model, the incidence angle of light beam on described prism is 72 ° ~ 76 °.
(3) beneficial effect
Compared with prior art, the utility model not only can realize the output of excimer laser narrow linewidth, can also improve energy and the stability of Output of laser.The utility model structure is simple, is conducive to reducing costs and tuning convenience.
Accompanying drawing explanation
Fig. 1 is the structural representation of the first embodiment of narrow linewidth excimer laser resonant cavity of the present utility model;
Fig. 2 is the structural representation of the second embodiment of narrow linewidth excimer laser resonant cavity of the present utility model;
Fig. 3 is the structural representation of the 3rd embodiment of narrow linewidth excimer laser resonant cavity of the present utility model;
Fig. 4 is the structural representation of the 4th embodiment of narrow linewidth excimer laser resonant cavity of the present utility model;
Fig. 5 is the structural representation of the 5th embodiment of narrow linewidth excimer laser resonant cavity of the present utility model;
Fig. 6 is the structural representation of the 6th embodiment of narrow linewidth excimer laser resonant cavity of the present utility model;
Fig. 7 is the structural representation of traditional excimer laser linewidth narrowing resonant cavity.
Embodiment
The utility model is in order to overcome the shortcoming and defect of prior art, be directed to gas laser, particularly excimer laser resonant cavity, improve lasing efficiency and power output, under the prerequisite that live width is constant, improve the energy of Output of laser, finally can obtain the Laser output of high-energy, narrow linewidth.
For making the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the utility model is described in further detail.
Fig. 1 is the structural representation of the first embodiment of narrow linewidth excimer laser resonant cavity of the present utility model.As shown in Figure 1, discharge cavity 1 has two relative exit ends, and one of them exit end places total reflective mirror 2, and another exit end places prism 3 and grating 4 successively along light path.Discharge cavity 1 for excimer laser can produce Ultra-Violet Laser under pumping condition, and now, the resonant cavity of laser is made up of the optical element in the light path between total reflective mirror 2 and grating 4, and the output of resonant cavity is positioned at the surface reflection place of prism 3.
In this embodiment, total reflective mirror 2 is high reflective mirror (HR), and high reflective mirror is a kind of planar lens with high reflectivity, and reflectivity is greater than 90% usually.Prism 3 is for expanding the laser of laser cavity outgoing and reflecting, and prism material can be the good material of ultraviolet-grade fused silica material or ultraviolet light transmission, as CaF
2, MgF
2deng.Prism 3 can be isosceles right-angle prism or the prism with special angle, if drift angle is the prism of 39 ° ~ 45 °.The incidence angle of light beam on prism 3 needs strict design, and what incident angle affected prism expands multiple
wherein, M
1, M
2, M
3what be respectively first piece, second piece, the 3rd piece prism expands multiple, i
1, i '
1be respectively incidence angle and the angle of emergence of first piece of prism, i
2, i '
2be respectively incidence angle and the angle of emergence of second piece of prism, expand multiple and then the change of Output of laser live width can be caused; On the other hand, the transmitance in the prism of light beam and the reflectivity of prism surface relevant with incidence angle:
In above formula, T
prepresent the transmitance of P polarised light,
represent the light intensity of P polarized light transmission,
represent the light intensity of P polarised light in incident light, n
1represent the refractive index of incident light place medium, θ
1represent incidence angle, n
2represent the refractive index of the medium that light incides, θ
2represent refraction angle.
Visible, incidence angle is larger, and transmitance is less, expands multiple larger, and the reflectivity of prism surface is also larger.Therefore, the incidence angle of light beam on prism is the result of calculation after live width and the balance of Output of laser energy, is probably 72 ° ~ 76 ° by calculating the angle of design.Grating 4 is Littrow gratings, and is an echelle grating, can realize the dispersion to light beam.
The essence of narrow linewidth excimer laser cavity resonator structure design of the present utility model is the while of devising an acquisition narrow linewidth output, make use of the mechanism of the output energy of prism surface laser reflection loss, for in some application, require that the laser of excimer laser outgoing has the requirement of macro-energy and narrow linewidth output simultaneously, realize the energy improving Output of laser while narrow linewidth exports.
According to the operation principle of conventional linewidth narrowing module, utilize the linewidth narrowing module be made up of prism beam expander 3 and grating 4 shown in Fig. 1 can realize exporting the narrow linewidth of excimer laser.The process of linewidth narrowing is such: the reciprocating vibration between total reflective mirror 2 and grating 4 of the fluorescence in discharge cavity produces laser, the Laser output of some is understood time each laser incides prism 3 surface, another part continues through the linewidth narrowing module of prism grating, the effect of the output coupling mirror with certain reflectivity is served as on the surface being equivalent to prism 3 thus, instead of traditional effect being positioned at the output coupling mirror of laser cavity opposite side, make use of the reflection loss of prism surface simultaneously.When the fluorescence in discharge cavity incides the hypotenuse of prism, expand multiple from the light beam of right-angle side outgoing relative to incident light and be about about 4 times, light beam after expanding with the blaze angle of grating 4 for incidence angle projects on grating, because grating 4 is that Littrow autocollimatic is placed, the Guang Yuanlu of the generation dispersion be reflected back from grating 4 returns, now, optical element in light path between grating 4 and high reflective mirror 2 constitutes a resonant cavity, and this resonant cavity is the laser of narrow linewidth from the laser that prism surface exports.
Fig. 2 is the structural representation of the second embodiment of narrow linewidth excimer laser resonant cavity of the present utility model.This second embodiment adds two slits 5 at the two ends of laser discharge cavity, slit 5 for suppressing the angle of divergence of light beam, to obtain the output of more narrow linewidth.
The linewidth narrowing mechanism that the utility model adopts also can comprise prism, grating, etalon etc., and multiple prism can be utilized to coordinate grating to use.
Fig. 3 is the structural representation of the 3rd embodiment of narrow linewidth excimer laser resonant cavity of the present utility model.As shown in Figure 3, the spectrum utilizing the linewidth narrowing module of a prism and grating combination can obtain about 0.8pm exports, in order to obtain the output of more narrow-linewidth laser, the etalon 6 that the live width for Output of laser narrows further is added at output, etalon 6 is utilized to realize narrowing further to laser linewidth, and the selection of centre wavelength.Etalon 6 can produce certain energy loss, but the laser linewidth of this structure output and energy are all better than traditional linewidth narrowing module resonant cavity.
Equally, the architecture basics of the 3rd embodiment improves, also can insert two slits, 5 pairs of beam divergence angles at laser discharge cavity 1 two ends and control, the Laser output of more narrow linewidth can be obtained, be i.e. the 4th embodiment of the present utility model as shown in Figure 4.
Fig. 5 is the structural representation of the 5th embodiment of narrow linewidth excimer laser resonant cavity of the present utility model.As shown in Figure 5, etalon 6 pairs of light beams are utilized to carry out spectrum control equally, etalon 6 is placed between prism 3 and grating 4, in this structure, because etalon 6 is placed within resonant cavity, the energy density that laser incides on etalon is higher, but the designing requirement of the etalon 6 of this laying method, as Free Spectral Range and fineness coefficient, low relative to the etalon designing requirement in the 3rd embodiment, cost is also relatively low.
The architecture basics of the 5th embodiment also can improve, namely insert two slits, 5 pairs of beam divergence angles at laser discharge cavity two ends and control, the Laser output of more narrow linewidth can be obtained, the 6th embodiment as shown in Figure 6.
Narrow linewidth excimer laser cavity resonator structure of the present utility model can improve the energy of Output of laser, thus improves the lasing efficiency of narrow linewidth.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any amendment made, equivalent replacement, improvement etc., all should be included within protection range of the present utility model.
Claims (7)
1. an excimer laser resonant cavity, comprises discharge cavity, total reflective mirror, prism and grating,
Described discharge cavity has two relative exit ends;
Described total reflective mirror is positioned over one of them exit end of described discharge cavity;
Described prism vertex angle is 39 ° ~ 45 °;
Described prism and described grating are positioned over another exit end of described discharge cavity, and place successively along light path;
The output of described excimer laser resonant cavity is positioned at the surface reflection place of described prism.
2. excimer laser resonant cavity as claimed in claim 1, it is characterized in that, described total reflective mirror is high reflective mirror.
3. excimer laser resonant cavity as claimed in claim 1, it is characterized in that, a slit is placed at the two ends of described discharge cavity respectively, and the laser of discharge cavity outgoing is by described slit outgoing.
4. excimer laser resonant cavity as claimed any one in claims 1 to 3, it is characterized in that, also comprise etalon, it is positioned on the output light path of described resonant cavity.
5. excimer laser resonant cavity as claimed any one in claims 1 to 3, it is characterized in that, also comprise etalon, this etalon is arranged in the light path of this resonant cavity.
6. excimer laser resonant cavity as claimed in claim 5, it is characterized in that, described etalon is between described prism and described grating.
7. excimer laser resonant cavity as claimed in claim 1, is characterized in that, the incidence angle of laser beam on described prism that described discharge cavity produces is 72 ° ~ 76 °.
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| CN201520575379.9U CN205029171U (en) | 2015-08-03 | 2015-08-03 | Narrow linewidth excimer laser resonant cavity |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109845054A (en) * | 2016-10-17 | 2019-06-04 | 西默有限公司 | Control to the spectral characteristic of pulsed light beam |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109845054A (en) * | 2016-10-17 | 2019-06-04 | 西默有限公司 | Control to the spectral characteristic of pulsed light beam |
| CN109845054B (en) * | 2016-10-17 | 2022-03-15 | 西默有限公司 | Control of spectral characteristics of pulsed light beam |
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Effective date of registration: 20200824 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences Effective date of registration: 20200824 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |
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Effective date of registration: 20210315 Address after: 100176 building 10, 156 Jinghai 4th Road, Daxing Economic and Technological Development Zone, Beijing Patentee after: BEIJING RSLASER OPTO-ELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics of the Chinese Academy of Sciences |