CN204799926U - Base plate oozes metal plant - Google Patents
Base plate oozes metal plant Download PDFInfo
- Publication number
- CN204799926U CN204799926U CN201520359681.0U CN201520359681U CN204799926U CN 204799926 U CN204799926 U CN 204799926U CN 201520359681 U CN201520359681 U CN 201520359681U CN 204799926 U CN204799926 U CN 204799926U
- Authority
- CN
- China
- Prior art keywords
- upper plate
- substrate
- bin
- vacuum pressure
- driver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Crucibles And Fluidized-Bed Furnaces (AREA)
Abstract
The utility model discloses a base plate oozes metal plant, include: base, upper plate, vacuum pressure storehouse, sliding closure driving piece, sliding closure, apron, vacuum valve, inflation valve, driver, removal subassembly and module cover, the upper plate is established on the base and is equipped with and holds the chamber, holds the intracavity and is equipped with a crucible and a heating device, and the diapire of crucible is equipped with the opening, vacuum pressure establishes in the storehouse on the lower surface of upper plate and the inside bin of prescribing a limit to and holding the chamber intercommunication, is equipped with the 2nd heating device in the bin, the sliding closure driving piece links to each other with the sliding closure with drive sliding closure horizontal migration, the apron is established and hold the chamber with the closing cap on the upper plate, is equipped with feedstock channel and feed valve on the apron, vacuum valve and inflation valve establish on apron or upper plate and with hold chamber intercommunication, the driver is established on the base, it can be reciprocated between the primary importance and the second place by the driver drive to remove the subassembly, held the base plate and established on removing the subassembly in the module cover. The utility model discloses a base plate oozes metal plant is efficient, and is with low costs, and the dependable performance.
Description
Technical field
The present invention relates to technical field of metallurgy industry, particularly relate to a kind of substrate metallic cementation equipment.
Background technology
Along with the development of metallurgical industry, implantation technique metallic atom being penetrated into substrate surface layer obtains to be applied comparatively widely.In correlation technique, carry out pressure by the body of heater of upper lower leaf and ooze, after the metal melt of upper strata, add malleation, and continue heating, until metal closures is melted, allow molten metal flow down along pipeline, then melt encapsulant, carry out pressure above metal liquid stream to mould and ooze, such molten metal flows to the process of lower floor from upper strata, has circulated metal closures and encapsulant, has had pollution to molten metal, directly can affect the performance of product, and metal molten and casting mould all heat in body of heater, and the time is long, and efficiency is low.
In other technology, body digs out a large cylinder cavity, body upper part has the molten metal geat be communicated with cavity, body lower part has the vacuum orifice be communicated with cavity, low punch rises to body upper surface, the skeleton loading onto mould drops to molten metal geat note molten metal, then continue lower to vacuum orifice, upper punch presses down simultaneously and is sealed by molten metal geat, vacuumize, after having taken out vacuum, low punch rises and blocks vacuum orifice, form airtight space, upper punch declines to molten metal applying pressure, molten metal is allowed to infiltrate skeleton, such note molten metal passage is in body, be difficult to its insulation, molten metal easily solidifies blocks reservoir channel, and easily molten metal is drawn into vacuum passage when vacuumizing, vacuum passage can be blocked time serious, unstable properties.
Summary of the invention
The present invention is intended to solve one of technical problem in correlation technique at least to a certain extent.For this reason, the present invention proposes a kind of substrate metallic cementation equipment, and not only efficiency is high for this substrate metallic cementation equipment, and cost is low, and dependable performance, and the properties of product of production are stablized.
According to the substrate metallic cementation equipment of the embodiment of the present invention, comprising: pedestal; Upper plate, described upper plate is located on described pedestal, and described upper plate is provided with the container cavity that top is opened wide, and be provided with crucible and the first heater for heating described crucible in described container cavity, the diapire of described crucible is provided with opening; Vacuum pressure storehouse, described vacuum pressure storehouse is located on the lower surface of described upper plate, and limit bin in described vacuum pressure storehouse, be provided with secondary heating mechanism in described bin, described bin is communicated with described container cavity; Slip lid actuator and the slip lid being used to open or close described opening, described slip lid actuator is connected with described slip lid to drive described slip lid to be located at moving horizontally in described upper plate; Cover plate, described cover plate is located at container cavity described in capping on described upper plate, and described cover plate is provided with feeding-passage and is used to open or close the inlet valve of described feeding-passage; Vacuum valve and charge valve, described vacuum valve to be located on described cover plate or described upper plate and to be communicated with described container cavity, and described charge valve to be located on described cover plate or described upper plate and to be communicated with described container cavity; Driver, described driver is located on described pedestal; Moving assembly, described moving assembly can be located at up or down between the first position and the second position on described pedestal and to be positioned at the below in described vacuum pressure storehouse, and described moving assembly is connected to be moved by described driver drives with described driver; Be contained with the module cover of substrate, described module cover is removably located on described moving assembly, in primary importance, described module cover is positioned at described bin and described moving assembly contacts to seal described bin with described vacuum pressure storehouse, in the described second place, described module cover is positioned at the below of described bin; Module is arranged with the basin mouth of bearing metal liquid, described basin mouth has basin mouth opening.
According to the substrate metallic cementation equipment of the embodiment of the present invention, by module is set on moving assembly, driver drives moving assembly is utilized to move up and down between the first position and the second position, and the opening opened or closed by slip lid actuator driving slip lid on crucible diapire, utilize first heater and secondary heating mechanism respectively to the module cover heating in crucible and bin, simultaneously, the feeding-passage on cover plate is controlled by inlet valve, and utilize vacuum valve and charge valve to control the pressure in bin, not only efficiency is high, cost is low, and dependable performance, the properties of product of producing are stablized.
Particularly, described moving assembly comprises dynamic plate and lower shrouding, and described lower shrouding is located on the upper surface of described dynamic plate, and described driver is connected with described dynamic plate, and in described primary importance, described lower shrouding contacts with described vacuum pressure storehouse.
Further, also comprise limited post, described limited post to be located on described upper plate and to be positioned at the outside in described vacuum pressure storehouse, and the lower end of described limited post is positioned at the below of the lower surface in described vacuum pressure storehouse.
Particularly, described cover plate is provided with bleeding point and inflation inlet, and described bleeding point is communicated with described container cavity respectively with described inflation inlet, and described vacuum valve is connected with described inflation inlet with described bleeding point respectively with described charge valve.
Alternatively, described first heater is electromagnetic induction coil.
Alternatively, described secondary heating mechanism is electromagnetic induction coil.
Preferably, described driver is hydraulic press.
Alternatively, described substrate is IGBT substrate.
Preferably, described cover plate is provided with funnel to limit described feeding-passage.
Particularly, described crucible and described first heater are removably located in described container cavity respectively.
Accompanying drawing explanation
Fig. 1 is the sectional view of the substrate metallic cementation equipment according to the embodiment of the present invention;
Fig. 2 is the sectional view of the substrate metallic cementation equipment according to the embodiment of the present invention;
Fig. 3 is the stereogram of the substrate metallic cementation equipment according to the embodiment of the present invention;
Fig. 4 is the structural representation overlapped according to the module of the substrate metallic cementation equipment of the embodiment of the present invention; And
Fig. 5 is the partial schematic diagram of the basin mouth overlapped according to the module of the substrate metallic cementation equipment of the embodiment of the present invention.
Reference numeral:
100: substrate metallic cementation equipment;
1: pedestal; 2: upper plate;
21: container cavity; 22: crucible; 221: opening; 23: first heater;
3: vacuum pressure storehouse; 31: bin; 32: secondary heating mechanism;
4: slip lid actuator; 5: slip lid;
6: cover plate; 61: feeding-passage; 62: inlet valve; 63: funnel;
7: vacuum valve; 71: bleeding point; 8: charge valve; 81: inflation inlet; 9: driver; 10: moving assembly; 11: module cover; 12: substrate; 13: dynamic plate; 14: lower shrouding; 16: limited post; 17: basin mouth; 18: basin mouth opening.
Detailed description of the invention
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings.Be exemplary below by the embodiment be described with reference to the drawings, be intended to for explaining the present invention, and can not limitation of the present invention be interpreted as.
In describing the invention, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", " counterclockwise ", " axis ", " radial direction ", orientation or the position relationship of the instruction such as " circumference " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore limitation of the present invention can not be interpreted as.
In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise at least one this feature.In describing the invention, the implication of " multiple " is at least two, such as two, three etc., unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, the term such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or integral; Can be mechanical connection, also can be electrical connection or each other can communication; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals or the interaction relationship of two elements, unless otherwise clear and definite restriction.For the ordinary skill in the art, above-mentioned term concrete meaning in the present invention can be understood as the case may be.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be that the first and second features directly contact, or the first and second features are by intermediary mediate contact.And, fisrt feature second feature " on ", " top " and " above " but fisrt feature directly over second feature or oblique upper, or only represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " below " and " below " can be fisrt feature immediately below second feature or tiltedly below, or only represent that fisrt feature level height is less than second feature.
The substrate metallic cementation equipment 100 according to the embodiment of the present invention is described in detail below with reference to Fig. 1-Fig. 5.
As shown in Figure 1, can comprise according to the substrate metallic cementation equipment 100 of the embodiment of the present invention: pedestal 1, upper plate 2, vacuum pressure storehouse 3, slip lid actuator 4, slip lid 5, cover plate 6, vacuum valve 7, charge valve 8, driver 9, moving assembly 10 and module cover 11.
Specifically, as depicted in figs. 1 and 2, upper plate 2 can be located on pedestal 1, upper plate 2 can be provided with the container cavity 21 that top is opened wide, crucible 22 can be provided with in container cavity 21 and for the first heater 23 to the METAL HEATING PROCESS in crucible 22, and the diapire of crucible 22 can be provided with opening 221, thus need the metal infiltrated can be placed in crucible 22 to be heated by first heater 23, and subsequent device can be flowed to from the opening 221 diapire of crucible 22, to complete infiltration.
As Fig. 1 and shown in composition graphs 2, vacuum pressure storehouse 3 can be located on the lower surface of upper plate 2, bin 31 can be limited in vacuum pressure storehouse 3, secondary heating mechanism 32 can be provided with in bin 31, and bin 31 can be communicated with container cavity 21, like this, need the metal of infiltration after first heater 23 heats, bin 31 can be flowed to, carry out subsequent treatment.
Slip lid 5 to be located on upper plate 2 and to be positioned at the below of crucible 22, be used to open or close the opening 221 on crucible 22 diapire, as depicted in figs. 1 and 2, slip lid 5 can be connected with slip lid actuator 4, and drive slip lid 5 by slip lid actuator 4, slip lid 5 can be moved horizontally, and not only structure is simple, and can realize automation.
As depicted in figs. 1 and 2, cover plate 6 is located on upper plate 2, for capping container cavity 21, cover plate 6 can be provided with feeding-passage 61 and inlet valve 62, inlet valve 62 can be used for opening and closing feeding-passage 61, like this, can control unlatching or the closedown of feeding-passage 61 by controlling inlet valve 62 easily.
Vacuum valve 7 can be located on cover plate 6 or upper plate 2, as depicted in figs. 1 and 2, vacuum valve 7 is communicated with container cavity 21, further, charge valve 8 is also established on cover plate 6 or upper plate 2, and charge valve 8 is communicated with container cavity 21, like this, container cavity 21 can be vacuumized by vacuum valve 7, can container cavity 21 insufflation gas be given, for follow-up metallic cementation is prepared by charge valve 8.
Driver 9 can be located on pedestal 1, for driving moving assembly 10.As shown in Figure 1, Figure 2 also shown in composition graphs 3, moving assembly 10 can be located at below pedestal 1 being positioned at vacuum pressure storehouse 3, and moving assembly 10 is connected with driver 9, and, drive moving assembly 10 to move up and down between the first position and the second position by driver 9.Thus, moving assembly 10 can be made easily to move up and down, to complete the movement of module cover 11.
As shown in Figure 1, Figure 2 and Figure 4, substrate 12 is contained with in module cover 11, and module cover 11 is removably located on moving assembly 10, in primary importance, module cover 11 can be positioned at bin 31, and moving assembly 10 contacts to seal bin 31 with vacuum pressure storehouse 3, thus can to operations such as bin 31 vacuumize, to complete the metallic cementation operation to substrate 12.In the second place, module cover 11 can be positioned at the below of bin 31, and like this, can take out finished product easily or change substrate 12, structure is simple, and efficiency is high.
When needs carry out metallic cementation operation to substrate 12, first will need the METAL HEATING PROCESS of infiltrating, and make it melt, and the module cover 11 being contained with substrate 12 will be heated.Operation slip lid actuator 4, by the opening 221 on slip lid 5 shutoff crucible 22 diapire.Open inlet valve 62, and the molten metal of molten condition is poured into from feeding-passage 61 crucible 22 in container cavity 21, close inlet valve 62, and open first heater 23, the metal in crucible 22 is heated, make molten metal keep molten condition.Then be placed on moving assembly 10 by module cover 11, utilize driver 9 to drive moving assembly 10 to move to primary importance, deliver in bin 31 by module cover 11, meanwhile, moving assembly 10 contacts with vacuum pressure storehouse 3, is sealed by bin 31.Open secondary heating mechanism 32, utilize secondary heating mechanism 32 pairs of module covers 11 to continue heating.Metal of the present invention is first smelted into molten condition in outside, then enters in vacuum pressure storehouse and continues insulation, heats the substrate in module cover simultaneously, makes metal and substrate composite effect better, improves the radiating effect of substrate, and improve production efficiency.
Secondly, open vacuum valve 7, bin 31 is vacuumized, take away in module cover 11 with the most of gas being melted into molten metal, complete after vacuumizing and close vacuum valve 7.Control slip lid actuator 4 to be moved horizontally by slip lid 5, open the opening 221 on the diapire of crucible 22, molten metal can flow in module cover 11 from opening 221.Then close first heater 23 and secondary heating mechanism 32, and open charge valve 8, in sealing bin 31, be filled with nitrogen, make the pressure in bin 31 remain on higher scope interior and continue for some time, molten metal is penetrated in substrate 12 fully shaping.To bin 31 pressure release after finally waiting module cover 11 to lower the temperature, control and drive system 9 makes moving assembly 10 get back to the second place, takes out module cover 11, completes the metallic cementation operation to substrate 12.The present invention, before compound, vacuumizes molten condition metal and module cover simultaneously and contributes to eliminating the bubble that metal inside exists after compound, thus make metal and substrate meet better effects if, the radiating effect of raising substrate further.
According to the substrate metallic cementation equipment 100 of the embodiment of the present invention, by module cover 11 is located on moving assembly 10, driver 9 is utilized to drive moving assembly 10 to move up and down between the first position and the second position, thus close by moving assembly 10 or open vacuum pressure storehouse 3, contact to seal bin 31 with vacuum pressure storehouse 3 when moving assembly 10 is positioned at primary importance, make the seal process of bin 31 simple, increase work efficiency.Open or close the opening 221 on crucible 22 diapire by slide block 5, when opening 221 is opened, the molten metal in crucible 22 can flow in module cover 11, can not there is pollution problem in the flow process of molten metal simultaneously.Again due to when adopting vacuum valve 7 pairs of container cavities 21 and bin 31 to vacuumize, molten metal is contained in crucible 22, therefore in vacuum, can avoid being taken away by molten metal and blocking vacuum passage, can improve the reliability of device.Simultaneously by adopting first heater 23 pairs of crucibles 22 to heat, adopting secondary heating mechanism 32 pairs of module covers 11 to heat, ensure that and can be incubated the molten metal of molten condition.
In brief, according to the substrate metallic cementation equipment 100 of the embodiment of the present invention, production efficiency is high, dependable performance, and production properties of product are stablized.
In a concrete example of the present invention, driver 9 can be hydraulic press, by hydraulic oil as working media, utilize hydraulic pump as power source, the pressure energy of hydraulic oil is converted into kinetic energy, drive moving assembly 10 to move between the first position and the second position, not only structure is simple, and reliable operation, easy to operate, thus the reliability of substrate metallic cementation equipment 100 can be improved to a certain extent.
According to some embodiments of the present invention, as depicted in figs. 1 and 2, moving assembly 10 can comprise dynamic plate 13 and lower shrouding 14, wherein, lower shrouding 14 can be located on the upper surface of dynamic plate 13, and, driver 9 can be connected with dynamic plate 13, when primary importance, lower shrouding 14 can contact with vacuum pressure storehouse 3, thus can be sealed by lower shrouding 14 pairs of vacuum pressure storehouses 3.
Preferably, the upper surface of lower shrouding 14 can be provided with sealing ring (not shown), thus when lower shrouding 14 contacts with vacuum pressure storehouse 3, sealing ring can be close to the lower edge in vacuum pressure storehouse 3, makes sealing effectiveness better.
As Figure 1-3, substrate metallic cementation equipment 100 can also comprise limited post 16, and limited post 16 can be located on upper plate 2 and to be positioned at the outside in vacuum pressure storehouse 3, and the lower end of limited post 16 can be positioned at the below of the lower surface in vacuum pressure storehouse 3.Be understandable that, when substrate metallic cementation equipment 100 normally runs, when shrouding 14 contacts to seal bin 31 with vacuum pressure storehouse 3 instantly, the lower end of limited post 16 can contact with the upper surface of dynamic plate 13 or have gap.When driver breaks down, be only against by limited post 16 on the upper surface of dynamic plate 13, moving assembly 10 can be avoided to move excessively and cause vacuum pressure storehouse 3 to be damaged, thus the security reliability of substrate metallic cementation equipment 100 can be improved.
Particularly, as depicted in figs. 1 and 2, cover plate 6 can be provided with bleeding point 71 and inflation inlet 81, bleeding point 71 can be communicated with container cavity 21 respectively with inflation inlet 81, such as, as depicted in figs. 1 and 2, bleeding point 71 can be positioned at the right side of feeding-passage 61, and vacuum valve 7 is connected with bleeding point 71, inflation inlet 81 can be positioned at the left side of feeding-passage 61, and charge valve 8 is connected with inflation inlet 81.Thus make the structure of substrate metallic cementation equipment 100 simple and compact.
It should be noted that, bleeding point 71 and vacuum valve 7, all need between inflation inlet 81 and charge valve 8 to arrange sealing ring (not shown), to ensure complete the sealing after bleeding or inflating, the quality of product is guaranteed.
In a concrete example of the present invention, first heater 23 can be electromagnetic induction coil, by being magnetic energy by electric energy conversion, be converted into heat energy again, heat the metal in crucible 22, not only the efficiency of heating surface is high, and can economize energy to a certain extent.Secondary heating mechanism 32 can be also electromagnetic induction coil, utilizes electromagnetic induction coil to heat the module cover 11 in bin 31, makes it be incubated.Certainly, the present invention is not limited to this, and first heater 23 and secondary heating mechanism 32 can also adopt other forms of heater.
Preferably, crucible 22 and first heater 23 are removably located in container cavity 21 respectively, thus when crucible 22 and/or first heater 23 break down, can change, and without the need to changing whole substrate metallic cementation equipment 100, reduce maintenance cost.
Preferably, as Fig. 1 and Fig. 2 and and composition graphs 3 shown in, cover plate 6 can be provided with funnel 63, to limit feeding-passage 61, thus the metal liquid of molten condition can flow into crucible 22 along funnel 63, because the charging aperture of funnel 63 is larger, not only charging is convenient, and not easily spills.
In a concrete example of the present invention, substrate 12 can be IGBT (InsulatedGateBipolarTransistor, insulated gate bipolar transistor) substrate, because IGBT substrate has the advantages such as thermal conductivity is high, specific stiffness is high, the coefficient of expansion is low, density is little, so increasingly extensive in the application in the field such as encapsulation, Aero-Space of high density integrated circuit having.
As shown in Figure 4, IGBT substrate can be contained in mould draw-in groove, form a module, then several module is come module and overlap 11 li, as shown in Figure 5, module cover 11 has the basin mouth 17 of bearing metal liquid, further, basin mouth 17 has basin mouth opening 18, as shown in Figure 5, further, basin mouth opening 18 is communicated with module.Like this, when molten metal flows down from the opening 221 crucible 22 diapire, basin mouth 17 can be flowed into, then can flow into module from basin mouth opening 18, complete metallic cementation work, thus molten metal can be allowed to infiltrate IGBT substrate completely, pore-free, solves the uniform problem of finished product density, allows molten metal infiltrate IGBT substrate to in-mold molding simultaneously, allow the area of dissipation of finished product strengthen, improve finished product heat dispersion.
Describe the course of work according to the substrate metallic cementation equipment 100 of the specific embodiment of the invention below in conjunction with Fig. 1-Fig. 4, in order to be described clearly, schematically illustrate to infiltrate metallic aluminium in IGBT substrate.
First, the module cover 11 that module is housed is placed in high-temperature heater and is heated to more than 800 DEG C, aluminium block is also placed in resistance furnace simultaneously and heats, aluminium block is heated to molten condition.Operation slip lid actuator 4, utilizes the opening 221 on the diapire of slip lid 5 shutoff crucible 22.
Then, opened by inlet valve 62, and pour aluminium liquid into funnel 63, aluminium liquid can flow into crucible 22 due to the effect of gravity along feeding-passage 61, opens first heater 23, heats crucible 22, makes aluminium liquid keep molten condition, is closed by inlet valve 62.Now, dynamic plate 13 is in open mode, and vacuum valve 7 and charge valve 8 are all in closed condition, as shown in Figure 2.
Then, special-purpose high temperature charging & discharging machine is utilized to be placed on dynamic plate 13 by the module cover 11 being heated to more than 800 DEG C, utilize hydraulic press that dynamic plate 13 is risen to primary importance, the module cover 11 dynamic plate 13 being equipped with module can be sent in bin 31, and lower shrouding 14 contacts with vacuum pressure storehouse 3, is sealed by bin 31.Meanwhile, module cover 11 continues heating with secondary heating mechanism 32, makes it be incubated.Now, the sealing ring of the upper surface of lower shrouding 14 can be close to the lower edge in vacuum pressure storehouse 3, and bin 31 is sealed, as shown in Figure 3.
Secondly, open vacuum valve 7, vacuumize with vacuum valve 7 to airtight bin 31, the pressure in bin 31 to be extracted into, lower than 20pa, is closed vacuum valve 7, is stopped vacuumizing.Now, the gas in module cover 11 is almost all pumped with the gas being melted into aluminium liquid.Control slip lid actuator 4 to be moved horizontally by slip lid 5, open the opening 221 on the diapire of crucible 22, aluminium liquid is flow in module cover 11 by opening 221 and covers module, then closes first heater 23 and secondary heating mechanism 32.
Finally open charge valve 8, nitrogen is filled with in airtight bin 31, make pressure in bin 31 between 5 ~ 8MPa, and pressurize 10 ~ 20min, aluminium liquid is allowed to infiltrate fully in IGBT substrate, and by shaping in IGBT substrate to mould, Deng module cover 11 temperature drop to 500 DEG C after, release the gas in airtight bin 31, air pressure is dropped to the air pressure consistent with the external world, control hydraulic press, plate 13 is made to get back to the second place, take out module cover 11, take out product after cooling, complete the aluminising operation of IGBT substrate.
In sum, according to the substrate metallic cementation equipment 100 of the embodiment of the present invention, by module cover 11 is located on moving assembly 10, hydraulic press is utilized to drive dynamic plate 13 to move between the first position and the second position, so that module cover 11 is moved into or shifts out vacuum pressure storehouse 3, and drive slip lid 5 to open or close opening 221 on crucible 22 diapire by slip lid actuator 4, first heater 23 pairs of crucibles 22 are utilized to heat, simultaneously, secondary heating mechanism 32 pairs of module covers 11 are utilized to heat, and first heater 23 and secondary heating mechanism 32 are set to electromagnetic induction heating coil, the feeding-passage 61 that funnel 63 limits is controlled by inlet valve 62, the pressure in vacuum valve 7 and charge valve 8 pairs of bins 31 is utilized to control, properties of product are guaranteed to a certain extent, and it is spacing to utilize limited post 15 pairs of moving assemblies 10 to carry out, dynamic plate 13 is avoided excessively to be shifted when moving to primary importance, simultaneously module cover 11 and aluminium block heat in high-temperature heater outside, can heat in batches, thus not only security is good, efficiency is high, and it is with low cost, the properties of product of producing are stablized.
In the description of this description, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present invention or example.In this manual, to the schematic representation of above-mentioned term not must for be identical embodiment or example.And the specific features of description, structure, material or feature can combine in one or more embodiment in office or example in an appropriate manner.In addition, when not conflicting, the feature of the different embodiment described in this description or example and different embodiment or example can carry out combining and combining by those skilled in the art.
Although illustrate and describe embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, and those of ordinary skill in the art can change above-described embodiment within the scope of the invention, revises, replace and modification.
Claims (10)
1. a substrate metallic cementation equipment, is characterized in that, comprising:
Pedestal;
Upper plate, described upper plate is located on described pedestal, and described upper plate is provided with the container cavity that top is opened wide, and be provided with crucible and the first heater for heating described crucible in described container cavity, the diapire of described crucible is provided with opening;
Vacuum pressure storehouse, described vacuum pressure storehouse is located on the lower surface of described upper plate, and limit bin in described vacuum pressure storehouse, be provided with secondary heating mechanism in described bin, described bin is communicated with described container cavity;
Slip lid actuator and the slip lid being used to open or close described opening, described slip lid actuator is connected with described slip lid to drive described slip lid to be located at moving horizontally in described upper plate;
Cover plate, described cover plate is located at container cavity described in capping on described upper plate, and described cover plate is provided with feeding-passage and is used to open or close the inlet valve of described feeding-passage;
Vacuum valve and charge valve, described vacuum valve to be located on described cover plate or described upper plate and to be communicated with described container cavity, and described charge valve to be located on described cover plate or described upper plate and to be communicated with described container cavity;
Driver, described driver is located on described pedestal;
Moving assembly, described moving assembly can be located at up or down between the first position and the second position on described pedestal and to be positioned at the below in described vacuum pressure storehouse, and described moving assembly is connected to be moved by described driver drives with described driver;
Be contained with the module cover of substrate, described module cover is removably located on described moving assembly, in primary importance, described module cover is positioned at described bin and described moving assembly contacts to seal described bin with described vacuum pressure storehouse, in the described second place, described module cover is positioned at the below of described bin; Module is arranged with the basin mouth of bearing metal liquid, described basin mouth has basin mouth opening.
2. substrate metallic cementation equipment according to claim 1, it is characterized in that, described moving assembly comprises dynamic plate and lower shrouding, described lower shrouding is located on the upper surface of described dynamic plate, described driver is connected with described dynamic plate, in described primary importance, described lower shrouding contacts with described vacuum pressure storehouse.
3. substrate metallic cementation equipment according to claim 2, it is characterized in that, also comprise limited post, described limited post to be located on described upper plate and to be positioned at the outside in described vacuum pressure storehouse, and the lower end of described limited post is positioned at the below of the lower surface in described vacuum pressure storehouse.
4. substrate metallic cementation equipment according to claim 1, it is characterized in that, described cover plate is provided with bleeding point and inflation inlet, and described bleeding point is communicated with described container cavity respectively with described inflation inlet, and described vacuum valve is connected with described inflation inlet with described bleeding point respectively with described charge valve.
5. substrate metallic cementation equipment according to claim 1, is characterized in that, described first heater is electromagnetic induction coil.
6. substrate metallic cementation equipment according to claim 1, is characterized in that, described secondary heating mechanism is electromagnetic induction coil.
7. substrate metallic cementation equipment according to claim 1, is characterized in that, described driver is hydraulic press.
8. substrate metallic cementation equipment according to claim 1, is characterized in that, described substrate is IGBT substrate.
9. substrate metallic cementation equipment according to claim 1, is characterized in that, described cover plate is provided with funnel to limit described feeding-passage.
10. substrate metallic cementation equipment according to claim 1, is characterized in that, described crucible and described first heater are removably located in described container cavity respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520359681.0U CN204799926U (en) | 2015-05-29 | 2015-05-29 | Base plate oozes metal plant |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520359681.0U CN204799926U (en) | 2015-05-29 | 2015-05-29 | Base plate oozes metal plant |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204799926U true CN204799926U (en) | 2015-11-25 |
Family
ID=54584817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520359681.0U Active CN204799926U (en) | 2015-05-29 | 2015-05-29 | Base plate oozes metal plant |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204799926U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106282909A (en) * | 2015-05-29 | 2017-01-04 | 比亚迪股份有限公司 | Substrate metallic cementation equipment |
| CN106694859A (en) * | 2016-12-19 | 2017-05-24 | 湖南顶立科技有限公司 | Impregnating equipment |
-
2015
- 2015-05-29 CN CN201520359681.0U patent/CN204799926U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106282909A (en) * | 2015-05-29 | 2017-01-04 | 比亚迪股份有限公司 | Substrate metallic cementation equipment |
| CN106694859A (en) * | 2016-12-19 | 2017-05-24 | 湖南顶立科技有限公司 | Impregnating equipment |
| CN106694859B (en) * | 2016-12-19 | 2019-02-26 | 湖南顶立科技有限公司 | A kind of impregnating equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106424637B (en) | A kind of bulk amorphous alloy high vacuum die casting former and technique | |
| CN105073302B (en) | Casting device | |
| CN104028729A (en) | Vacuum low-pressure casting forming device for titanium alloy component | |
| CN102773448A (en) | Vacuum die casting machine | |
| CN103805825A (en) | Vacuum-induction smelting and rapid hardening equipment for rare-earth permanent-magnet alloy | |
| CN204182873U (en) | Heated launder plug-in type for vacuum drying oven waters steel device | |
| CN204799926U (en) | Base plate oozes metal plant | |
| CN108788094A (en) | A kind of multidigit parallel connection compression casting device and method for large aluminum alloy casting | |
| CN201644754U (en) | Heat insulation liquid guide system for casting and low-pressure casting machine | |
| CN101296769A (en) | Diecasting process and diecasting device | |
| CN202945304U (en) | Vacuum-induction smelting and rapid hardening equipment for rare-earth permanent-magnet alloy | |
| CN108817343A (en) | A kind of copper rotor vacuum die-casting mould | |
| CN110508777A (en) | A kind of amorphous alloy vertical die-casting machine and pressure casting method | |
| US3845808A (en) | Apparatus for casting directionally solidified articles | |
| CN103752789A (en) | Centrifugal smelting casting furnace | |
| CN108637218A (en) | A kind of three-in-one counter-pressure casting machine of new-energy automobile aluminium alloy | |
| CN205324701U (en) | Device and have its system of infiltrating infiltrates | |
| CN204672921U (en) | A kind of apparatus of metal molding | |
| CN108941514A (en) | A kind of casting method for large-scale corrosion resistant aluminium magnesium alloy component | |
| CN103394674B (en) | The method of casting thin foundry goods vaccum sensitive stove and casting thin-wall titanium alloy foundry goods | |
| CN201124226Y (en) | Magnesium alloy low pressure casting furnace | |
| CN106890983A (en) | Device of impregnation and the infiltration system with it | |
| CN106282909B (en) | Substrate metallic cementation equipment | |
| CN108788093A (en) | A kind of melt for multidigit parallel connection compression casting device rises liquid device | |
| CN105251962A (en) | Hot chamber die casting machine of vacuum pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191128 Address after: 518119 No.1 Yan'an Road, Kuiyong, Kuiyong street, Dapeng New District, Shenzhen City, Guangdong Province Patentee after: SHENZHEN BYD MICROELECTRONICS Co.,Ltd. Address before: 516083 Guangdong city of Huizhou province Dayawan xiangshuihe Patentee before: HUIZHOU BYD INDUSTRIAL Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CP03 | Change of name, title or address |
Address after: 518119 1 Yanan Road, Kwai Chung street, Dapeng New District, Shenzhen, Guangdong Patentee after: BYD Semiconductor Co.,Ltd. Address before: 518119 No.1 Yan'an Road, Kuiyong, Kuiyong street, Dapeng New District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN BYD MICROELECTRONICS Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200916 Address after: 516083 Guangdong city of Huizhou province Dayawan xiangshuihe Patentee after: HUIZHOU BYD INDUSTRIAL Co.,Ltd. Address before: 518119 1 Yanan Road, Kwai Chung street, Dapeng New District, Shenzhen, Guangdong Patentee before: BYD Semiconductor Co.,Ltd. |
|
| TR01 | Transfer of patent right |