CN204264992U - A kind of silicon chip diffusion transport device - Google Patents
A kind of silicon chip diffusion transport device Download PDFInfo
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- CN204264992U CN204264992U CN201420720689.0U CN201420720689U CN204264992U CN 204264992 U CN204264992 U CN 204264992U CN 201420720689 U CN201420720689 U CN 201420720689U CN 204264992 U CN204264992 U CN 204264992U
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Abstract
The utility model discloses a kind of silicon chip diffusion transport device, belong to photovoltaic element Fabricating machinery field.This utility model comprises silicon chip and places plate and quartz boat, quartz boat is horizontally set on silicon chip and places plate side, silicon chip is placed plate side and is vertically provided with lifting mechanism, lifting mechanism side has been horizontally disposed with translation mechanism, lifting mechanism comprises lifting support, lifting motor, elevating screw, lifting pilot bar and elevator, lifting motor drives elevating screw, the side that silicon chip places plate is horizontally set in translation sleeve, silicon chip is placed between plate and translation sleeve and is provided with bolt of rear end plate, translation mechanism comprises translating bracket, translation motor, translation screw mandrel, guided in translation bar and translational block, translation motor drives translation screw mandrel, silicon chip is placed plate side and is respectively arranged with positioning plate and hold-down mechanism.The utility model structure is simple, rapidly and efficiently silicon chip conveying can be carried out High temperature diffusion, improve silicon chip work efficiency, meet the needs of production.
Description
Technical field
The utility model relates to a kind of feedway, and especially a kind of silicon chip diffusion transport device, belongs to photovoltaic element Fabricating machinery field.
Background technology
In the production process of crystal-silicon solar cell, wafer high temperature diffusing procedure is that silicon chip is put into high temperature dispersing furnace, pass to the gas such as nitrogen and tri-chlorination polonium, the objects such as phosphorus nitrogen knot are formed at silicon chip surface after at high temperature decomposing, existing silicon chip is delivered in the process of high temperature dispersing furnace, silicon wafer conveying device complex structure, troublesome poeration, existing silicon chip is placed plate and is fixed on translation mechanism side, be difficult to be elevated according to the needs of silicon chip conveying, after silicon chip places the dimensions change of the quartz boat on plate, place plate due to silicon chip can not be elevated as required, causing silicon chip to be placed, plate is difficult to precise and high efficiency that silicon chip is delivered to high temperature dispersing furnace, and quartz boat is being lain in a horizontal plane in after on silicon chip placement plate, silicon chip placement plate does not arrange fixed mechanism quartz boat is fixed, the silicon chip making quartz boat be difficult to firmly place is placed on plate, easily generation skew is crooked in the process of translation to cause quartz boat, reduce the High temperature diffusion quality of silicon chip, be difficult to meet the needs of production.
Utility model content
Technical problem to be solved in the utility model overcomes above-mentioned deficiency existing in prior art, and provide a kind of reasonable in design, rapidly and efficiently silicon chip can be carried the silicon chip diffusion transport device carrying out High temperature diffusion.
In order to solve the problems of the technologies described above, the technical scheme that the utility model adopts is: a kind of silicon chip diffusion transport device, comprise silicon chip and place plate and quartz boat, quartz boat is horizontally set on silicon chip and places plate side, it is characterized in that: described silicon chip is placed plate side and is vertically provided with lifting mechanism, and lifting mechanism side has been horizontally disposed with translation mechanism; Described lifting mechanism comprises lifting support, lifting motor, elevating screw, lifting pilot bar and elevator, elevator is horizontally set in lifting support, lifting pilot bar passes vertically through elevator, lifting motor is arranged on the upside of lifting support straight down, elevating screw passes vertically through lifting support and is threaded with elevator, lifting motor drives elevating screw, elevator side has been horizontally disposed with translation sleeve, the side that silicon chip places plate is horizontally set in translation sleeve, and silicon chip is placed between plate and translation sleeve and is provided with bolt of rear end plate; Described translation mechanism comprises translating bracket, translation motor, translation screw mandrel, guided in translation bar and translational block, translational block is horizontally set on lifting support side, guided in translation bar is horizontal through translational block, translation motor is horizontally set on translating bracket side, translation screw mandrel is threaded with translational block horizontal through translating bracket, and translation motor drives translation screw mandrel; Described silicon chip is placed plate side and is respectively arranged with positioning plate and hold-down mechanism, and positioning plate is arranged on one end that silicon chip places plate, and the silicon chip that hold-down mechanism is arranged on quartz boat side is placed on the upside of plate.
Further, described hold-down mechanism comprises compression support and keep plate, compressing support level is arranged on the upside of silicon chip placement plate, keep plate is horizontally set on and compresses in support, compress support both sides and be horizontally disposed with translation bar, keep plate both sides are horizontally disposed with the translation groove suitable with translation bar, compress between support and keep plate and are vertically provided with lock plunger.
Further, described silicon chip is placed plate side and has been horizontally disposed with metering scale.
The utility model compared with prior art, have the following advantages and effect: the utility model structure is simple, place plate side by silicon chip and be respectively arranged with positioning plate and hold-down mechanism, positioning plate is arranged on one end that silicon chip places plate, the silicon chip that hold-down mechanism is arranged on quartz boat side is placed on the upside of plate, makes the quartz boat being placed with silicon chip firmly can be fixed on silicon chip and places on plate; Drive elevating screw to rotate by lifting motor, elevating screw is threaded with elevator, and making silicon chip place plate can be elevated according to the level that needs of silicon chip diffusion; Drive translation screw mandrel to rotate by translation motor, translation screw mandrel is threaded with translational block, and translational block is horizontally set on lifting support side, guarantees that the quartz boat of silicon chip placement plate side steadily carries out moving in high temperature dispersing furnace efficiently; Translation sleeve has been horizontally disposed with by elevator side, silicon chip is placed between plate and translation sleeve and is provided with bolt of rear end plate, silicon chip is placed plate side and has been horizontally disposed with metering scale, can according to wafer high temperature diffusion need silicon chip is placed plate level and moves along translation sleeve, improve efficiency and the quality of silicon chip conveying, make silicon chip can carry out High temperature diffusion by special quality, meet the needs of production.
Accompanying drawing explanation
Fig. 1 is the front view of a kind of silicon chip diffusion transport of the utility model device.
Fig. 2 is the birds-eye view of a kind of silicon chip diffusion transport of the utility model device.
Detailed description of the invention
In order to further describe the utility model, set forth a kind of detailed description of the invention of silicon chip diffusion transport device below in conjunction with accompanying drawing further, following examples are that the utility model is not limited to following examples to explanation of the present utility model.
As shown in Figure 1, a kind of silicon chip diffusion transport of the utility model device, it comprises silicon chip and places plate 1 and quartz boat 2, and quartz boat 2 is horizontally set on silicon chip and places plate 1 side, silicon chip is placed plate 1 side and is vertically provided with lifting mechanism, and lifting mechanism side has been horizontally disposed with translation mechanism.Lifting mechanism of the present utility model comprises lifting support 3, lifting motor 4, elevating screw 5, lifting pilot bar 6 and elevator 7, elevator 7 is horizontally set in lifting support 3, lifting pilot bar 6 passes vertically through elevator 7, lifting motor 4 is arranged on the upside of lifting support 3 straight down, elevating screw 5 passes vertically through lifting support 3 and is threaded with elevator 7, lifting motor 4 drives elevating screw 5, elevator 7 side has been horizontally disposed with translation sleeve 8, the side that silicon chip places plate 1 is horizontally set in translation sleeve 8, silicon chip is placed between plate 1 and translation sleeve 8 and is provided with bolt of rear end plate 9.Translation mechanism of the present utility model comprises translating bracket 10, translation motor 11, translation screw mandrel 12, guided in translation bar 13 and translational block 14, translational block 14 is horizontally set on lifting support 3 side, guided in translation bar 13 is horizontal through translational block 14, translation motor 11 is horizontally set on translating bracket 10 side, translation screw mandrel 12 is threaded with translational block 14 horizontal through translating bracket 10, translation motor 11 drives translation screw mandrel 12, lifting motor 4 is utilized to drive elevating screw 5 to rotate, make silicon chip place plate 1 to be elevated according to the level that needs of silicon chip diffusion, translation motor 11 is utilized to drive translation screw mandrel 12 to rotate, the quartz boat 2 making silicon chip place plate 1 side steadily carries out moving in high temperature dispersing furnace efficiently, elevator 7 side is utilized to be horizontally disposed with translation sleeve 8, can according to wafer high temperature diffusion need silicon chip is placed plate 1 level and moves along translation sleeve 8.
Silicon chip of the present utility model is placed plate 1 side and is respectively arranged with positioning plate 15 and hold-down mechanism, positioning plate 15 is arranged on one end that silicon chip places plate 1, the silicon chip that hold-down mechanism is arranged on quartz boat 2 side is placed on the upside of plate 1, makes the quartz boat 2 being placed with silicon chip firmly can be fixed on silicon chip and places on plate 1.As shown in Figure 2, hold-down mechanism of the present utility model comprises compression support 16 and keep plate 17, compressing support 16 is horizontally set on the upside of silicon chip placement plate 1, keep plate 17 is horizontally set on and compresses in support 16, compress support 16 both sides and be horizontally disposed with translation bar, keep plate 17 both sides are horizontally disposed with the translation groove suitable with translation bar, compress between support 16 and keep plate 17 and are vertically provided with lock plunger 18.Silicon chip of the present utility model is placed plate 1 side and has been horizontally disposed with metering scale 19, and making silicon chip place plate 1 can move along translation sleeve 8 accurately.
Adopt technique scheme, a kind of silicon chip diffusion transport of the utility model device when in use, place plate 1 side by silicon chip and be respectively arranged with positioning plate 15 and hold-down mechanism, positioning plate 15 is arranged on one end that silicon chip places plate 1, the silicon chip that hold-down mechanism is arranged on quartz boat 2 side is placed on the upside of plate 1, making the quartz boat 2 being placed with silicon chip firmly can be fixed on silicon chip places on plate 1, lifting motor 4 is utilized to drive elevating screw 5 to rotate, elevating screw 5 is threaded with elevator 7, make silicon chip place plate 1 to be elevated according to the level that needs of silicon chip diffusion, translation motor 11 is utilized to drive translation screw mandrel 12 to rotate, translation screw mandrel 12 is threaded with translational block 14, translational block 14 is horizontally set on lifting support 3 side, the quartz boat 2 making silicon chip place plate 1 side steadily carries out moving in high temperature dispersing furnace efficiently, elevator 7 side is utilized to be horizontally disposed with translation sleeve 8, silicon chip is placed between plate 1 and translation sleeve 8 and is provided with bolt of rear end plate 9, silicon chip is placed plate 1 side and has been horizontally disposed with metering scale 19, can according to wafer high temperature diffusion need silicon chip is placed plate 1 level and moves along translation sleeve 8.By such structure, the utility model structure is simple, easy to operate, rapidly and efficiently can be carried accurately by silicon chip and carry out High temperature diffusion, improves efficiency and the quality of silicon chip conveying, meets the needs of production.
Above content described in specification sheets is only to the explanation of the utility model example.The utility model person of ordinary skill in the field can make various amendment or supplements or adopt similar mode to substitute to described specific embodiment; only otherwise depart from the content of the utility model specification sheets or surmount this scope as defined in the claims, protection domain of the present utility model all should be belonged to.
Claims (3)
1. a silicon chip diffusion transport device, comprise silicon chip and place plate and quartz boat, quartz boat is horizontally set on silicon chip and places plate side, it is characterized in that: described silicon chip is placed plate side and is vertically provided with lifting mechanism, and lifting mechanism side has been horizontally disposed with translation mechanism; Described lifting mechanism comprises lifting support, lifting motor, elevating screw, lifting pilot bar and elevator, elevator is horizontally set in lifting support, lifting pilot bar passes vertically through elevator, lifting motor is arranged on the upside of lifting support straight down, elevating screw passes vertically through lifting support and is threaded with elevator, lifting motor drives elevating screw, elevator side has been horizontally disposed with translation sleeve, the side that silicon chip places plate is horizontally set in translation sleeve, and silicon chip is placed between plate and translation sleeve and is provided with bolt of rear end plate; Described translation mechanism comprises translating bracket, translation motor, translation screw mandrel, guided in translation bar and translational block, translational block is horizontally set on lifting support side, guided in translation bar is horizontal through translational block, translation motor is horizontally set on translating bracket side, translation screw mandrel is threaded with translational block horizontal through translating bracket, and translation motor drives translation screw mandrel; Described silicon chip is placed plate side and is respectively arranged with positioning plate and hold-down mechanism, and positioning plate is arranged on one end that silicon chip places plate, and the silicon chip that hold-down mechanism is arranged on quartz boat side is placed on the upside of plate.
2. a kind of silicon chip diffusion transport device according to claim 1, it is characterized in that: described hold-down mechanism comprises compression support and keep plate, compressing support level is arranged on the upside of silicon chip placement plate, keep plate is horizontally set on and compresses in support, compress support both sides and be horizontally disposed with translation bar, keep plate both sides are horizontally disposed with the translation groove suitable with translation bar, compress between support and keep plate and are vertically provided with lock plunger.
3. a kind of silicon chip diffusion transport device according to claim 1, is characterized in that: described silicon chip is placed plate side and has been horizontally disposed with metering scale.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420720689.0U CN204264992U (en) | 2014-11-27 | 2014-11-27 | A kind of silicon chip diffusion transport device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420720689.0U CN204264992U (en) | 2014-11-27 | 2014-11-27 | A kind of silicon chip diffusion transport device |
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| Publication Number | Publication Date |
|---|---|
| CN204264992U true CN204264992U (en) | 2015-04-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420720689.0U Expired - Fee Related CN204264992U (en) | 2014-11-27 | 2014-11-27 | A kind of silicon chip diffusion transport device |
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| Country | Link |
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| CN (1) | CN204264992U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108711788A (en) * | 2018-06-28 | 2018-10-26 | 芜湖明智自动化科技有限公司 | Automatic laying equipment for overland cable |
| CN108832545A (en) * | 2018-06-28 | 2018-11-16 | 芜湖明智自动化科技有限公司 | A kind of overland cable automatic laying device |
| CN108832546A (en) * | 2018-06-28 | 2018-11-16 | 芜湖明智自动化科技有限公司 | Overland cable automatic laying vehicle |
-
2014
- 2014-11-27 CN CN201420720689.0U patent/CN204264992U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108711788A (en) * | 2018-06-28 | 2018-10-26 | 芜湖明智自动化科技有限公司 | Automatic laying equipment for overland cable |
| CN108832545A (en) * | 2018-06-28 | 2018-11-16 | 芜湖明智自动化科技有限公司 | A kind of overland cable automatic laying device |
| CN108832546A (en) * | 2018-06-28 | 2018-11-16 | 芜湖明智自动化科技有限公司 | Overland cable automatic laying vehicle |
| CN108832545B (en) * | 2018-06-28 | 2021-01-15 | 国网浙江省电力有限公司绍兴供电公司 | Automatic laying device of land cable |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150415 Termination date: 20151127 |