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CN204177736U - The trace gas detection device in chamber is swung based on two-way light decay - Google Patents

The trace gas detection device in chamber is swung based on two-way light decay Download PDF

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CN204177736U
CN204177736U CN201420656737.4U CN201420656737U CN204177736U CN 204177736 U CN204177736 U CN 204177736U CN 201420656737 U CN201420656737 U CN 201420656737U CN 204177736 U CN204177736 U CN 204177736U
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ring
optical
chamber
fiber
light
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常建华
郭跃
王志丹
朱成刚
桂诗信
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Nanjing University of Information Science and Technology
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Abstract

本实用新型公开了一种基于双路光衰荡腔的痕量气体检测装置,属于气体检测技术领域。该痕量气体检测装置包括光源单元、光衰荡单元以及信号接收与处理单元,所述光源单元包括相互连接的光源、光分束器,所述光衰荡模块包括两个相同的光衰荡腔,所述信号接收与处理单元包括两个光探测器以及与两个光探测器分别连接的计算模块,所述两个光衰荡腔的光输入端与光分束器的两个输出端分别连接,两个光衰荡腔的衰荡光信号输出端与两个光探测器分别连接。相比现有技术,本实用新型利用双路光衰荡腔同时获取两条衰荡曲线,从而可方便快捷地获得待测气体的浓度。

The utility model discloses a trace gas detection device based on a double-path optical ring-down cavity, which belongs to the technical field of gas detection. The trace gas detection device includes a light source unit, an optical ring-down unit, and a signal receiving and processing unit, the light source unit includes an interconnected light source and an optical beam splitter, and the optical ring-down module includes two identical optical ring-down cavity, the signal receiving and processing unit includes two optical detectors and computing modules respectively connected to the two optical detectors, the optical input ends of the two optical ring-down cavities and the two output ends of the optical beam splitter are respectively connected, and the ring-down optical signal output ends of the two optical ring-down cavities are respectively connected with the two optical detectors. Compared with the prior art, the utility model uses a dual optical ring-down cavity to obtain two ring-down curves at the same time, so that the concentration of the gas to be measured can be obtained conveniently and quickly.

Description

基于双路光衰荡腔的痕量气体检测装置Trace gas detection device based on dual optical ring-down cavity

技术领域 technical field

本实用新型涉及一种基于光衰荡腔的痕量气体检测装置,尤其涉及一种基于双路光衰荡腔的痕量气体检测装置,属于气体检测技术领域。 The utility model relates to a trace gas detection device based on an optical ring-down cavity, in particular to a trace gas detection device based on a two-way optical ring-down cavity, which belongs to the technical field of gas detection.

背景技术 Background technique

随着石油、煤炭、化工、汽车工业的不断发展,人类生产活动过程中产生了大量污染环境、有毒有害、易燃易爆的废气。这些气体虽然浓度很低,但是对人类的健康、大气环境等方面有不同程度的影响,所以痕量气体分析检测技术在诸多领域存在广泛的应用需求。 With the continuous development of petroleum, coal, chemical industry, and automobile industry, a large amount of polluting, toxic, harmful, flammable and explosive waste gas is produced in the process of human production activities. Although the concentration of these gases is very low, they have varying degrees of impact on human health and the atmospheric environment. Therefore, trace gas analysis and detection technology has a wide range of application requirements in many fields.

光腔衰荡光谱技术(Cavity Ring Down Spectroscopy, CRDS)是近20年来迅速发展起来的一种高灵敏度的吸收光谱检测技术,具有极高的灵敏度和分辨率,且不受光源光强波动的影响,适用于微弱吸收光谱的测量。自1998年O’Keefe等人提出脉冲光腔衰荡光谱技术后,光腔衰荡技术在光谱测量方面的研究日益广泛。 Cavity Ring Down Spectroscopy (CRDS) is a high-sensitivity absorption spectrum detection technology developed rapidly in the past 20 years. It has extremely high sensitivity and resolution, and is not affected by light intensity fluctuations of the light source. , suitable for the measurement of weak absorption spectra. Since O’Keefe et al. proposed pulsed cavity ring-down spectroscopy in 1998, the research on optical cavity ring-down technology in spectral measurement has become increasingly extensive.

最初,CRDS建立在两个高反射镜形成的光学谐振腔之上,通过测量谐振腔内的光强衰减速率来获得腔内的损耗信息。由于必须保证谐振腔的高反射低损耗特性,即要求对两个反射镜进行高反射率涂覆并保证腔镜精确对准,CRDS在某些特定环境条件下的应用发展受到了限制。2001年之后相继出现了光纤环衰荡腔、纤端涂覆衰荡腔和光纤布喇格光栅对衰荡腔,这些光纤型衰荡腔不仅改善了上述传统衰荡腔的局限性,而且各具有独特的优越性,已用于各种气体液体的吸收探测、传感领域。2001年,Stewart等人首次提出了一种有源光纤环腔衰荡光谱技术,系统采用DFB激光器作光源,激发用耦合器连接光纤所形成的光纤环获得衰荡信号,在光纤环内引入气体吸收池来对示踪气体进行检测。由于吸收池的插入损耗很大(约1dB),导致腔内的衰荡时间很小(约100ns),因此在光纤环内增加了一段980nm激光泵浦的掺铒增益光纤对环内过度损耗的光信号进行补偿,得到了微米量级的衰荡时间。但其缺陷是在提高检测精度的同时增加了系统的复杂性,且很难控制并实现波长1550nm附近稳定的增益补偿。2002年,Brown等人提出一种无源光纤环衰荡腔,将一段多模光纤弯曲成环并用光纤连接器进行连接,通过照射光纤的弯曲处将光脉冲耦合入光纤环,用光电倍增管接收另一弯曲处的透射信号,得到了双指数衰荡信号,分别对应环内光脉冲在光纤包层和纤芯中的衰减,该装置直接将光纤弯曲成环,在对准的光纤端面间或微腔中引入有机染料进行传感,系统总损耗较低,衰荡时间大,结构简单,可实现对光纤通信系统损耗机理的分析和对微量流体的高精度感测。但其缺陷是衰荡时间不够长,因而检测范围较小。2004年,Tarsa和Lehmann等人在光纤环衰荡腔中引入一段双锥形光纤作为传感单元,通过检测光纤双锥所泄漏倏逝场的吸收来测辛炔溶液的浓度,获得结果优于其他倏逝波吸收探测方法。他们还将其应用于弯曲、轴向应变测量,将一段单模双锥型光纤接入2.2Km的单模光纤环,通过步进电机控制的转换平台施加轴向应变。由于光纤双锥设计不合理,衰荡时间相对轴向位移呈现非线性响应,而且灵敏度也不够高,需要进一步优化设计。2007年,Andachi等人利用可调谐皮秒脉冲激光分别激励布喇格光栅衰荡腔和光纤环衰荡腔,在光纤环内开一个100μm的微隙用于引入亚甲基蓝燃料进行吸收检测,得到了较低的最小检测限。 Initially, CRDS was built on an optical resonant cavity formed by two high-reflection mirrors, and the loss information in the cavity was obtained by measuring the light intensity decay rate in the resonant cavity. Due to the need to ensure the high reflection and low loss characteristics of the resonator, that is to say, it is required to coat the two mirrors with high reflectivity and ensure the precise alignment of the cavity mirrors, the application development of CRDS in some specific environmental conditions is limited. After 2001, fiber ring ring-down cavity, fiber-end coated ring-down cavity and fiber Bragg grating pair ring-down cavity appeared successively. These fiber-type ring-down cavity not only improved the limitations of the above-mentioned traditional With unique advantages, it has been used in the fields of absorption detection and sensing of various gases and liquids. In 2001, Stewart et al. first proposed an active optical fiber ring cavity ring-down spectroscopy technology. The system uses a DFB laser as a light source to excite the optical fiber ring formed by connecting the optical fiber with a coupler to obtain a ring-down signal, and introduces gas into the optical fiber ring. The absorption cell is used to detect the tracer gas. Because the insertion loss of the absorption pool is very large (about 1dB), the ring-down time in the cavity is very small (about 100ns), so a 980nm laser-pumped erbium-doped gain fiber is added in the fiber ring to prevent excessive loss in the ring. The optical signal is compensated, and the ring-down time of micron level is obtained. But its disadvantage is that it increases the complexity of the system while improving the detection accuracy, and it is difficult to control and achieve stable gain compensation near the wavelength of 1550nm. In 2002, Brown et al. proposed a passive fiber ring ring down cavity, which bends a section of multimode fiber into a ring and connects it with a fiber connector, and couples the light pulse into the fiber ring by illuminating the bend of the fiber, and uses a photomultiplier tube to Receive the transmitted signal at another bend, and get the double exponential ringdown signal, which respectively correspond to the attenuation of the optical pulse in the fiber cladding and fiber core in the ring. The device directly bends the fiber into a ring, and between the aligned fiber end faces or Organic dyes are introduced into the microcavity for sensing, the total loss of the system is low, the ring-down time is long, and the structure is simple, which can realize the analysis of the loss mechanism of the optical fiber communication system and the high-precision sensing of microfluidics. But its defect is that the ring down time is not long enough, so the detection range is small. In 2004, Tarsa and Lehmann et al. introduced a section of bitapered optical fiber into the optical fiber ring ring cavity as a sensing unit, and measured the concentration of octyne solution by detecting the absorption of the evanescent field leaked by the optical fiber bicone, and obtained results better than Other evanescent absorption detection methods. They also applied it to bending and axial strain measurement, connecting a section of single-mode double-tapered optical fiber to a 2.2Km single-mode optical fiber ring, and applying axial strain through a conversion platform controlled by a stepping motor. Due to the unreasonable design of the fiber optic bicone, the ring-down time has a nonlinear response to the axial displacement, and the sensitivity is not high enough, so further optimization of the design is needed. In 2007, Andachi et al. used a tunable picosecond pulse laser to excite the Bragg grating ring-down cavity and the fiber ring ring-down cavity respectively, and opened a 100 μm micro-gap in the fiber ring for the introduction of methylene blue fuel for absorption detection, and obtained Lower minimum detection limit.

以上所述的现有基于CRDS的痕量气体检测装置各有其优缺点,然而,现有的这些检测装置都是使用单个衰荡腔先后测量出两次衰荡时间,当测完无待测气体的衰荡时间后,引入被测气体不易操作,容易引入掺杂气体,降低检测精度,无法方便快捷的同时测出两次衰荡曲线。 The above-mentioned existing CRDS-based trace gas detection devices have their own advantages and disadvantages. However, these existing detection devices use a single ring-down cavity to measure the ring-down time twice. After the ring-down time of the gas, the introduction of the measured gas is not easy to operate, and it is easy to introduce dopant gas, which reduces the detection accuracy, and it is impossible to measure two ring-down curves at the same time conveniently and quickly.

实用新型内容 Utility model content

本实用新型所要解决的技术问题在于克服现有技术不足,提供一种基于双路光衰荡腔的痕量气体检测装置,利用双路光衰荡腔同时获取两条衰荡曲线,从而可方便快捷地获得待测气体的浓度。 The technical problem to be solved by the utility model is to overcome the deficiencies in the prior art, and provide a trace gas detection device based on a dual-channel optical ring-down cavity, which can obtain two ring-down curves at the same time by using a dual-channel optical ring-down cavity, so that it can be conveniently Quickly obtain the concentration of the gas to be measured.

本实用新型具体采用以下技术方案解决上述技术问题: The utility model specifically adopts the following technical solutions to solve the above-mentioned technical problems:

基于双路光衰荡腔的痕量气体检测装置,包括光源单元、光衰荡单元以及信号接收 A trace gas detection device based on a dual-channel optical ring-down cavity, including a light source unit, an optical ring-down unit, and a signal receiving unit

与处理单元,所述光源单元包括相互连接的光源、光分束器,所述光衰荡模块包括两个相同的光衰荡腔,所述信号接收与处理单元包括两个光探测器以及与两个光探测器分别连接的计算模块,所述两个光衰荡腔的光输入端与光分束器的两个输出端分别连接,两个光衰荡腔的衰荡光信号输出端与两个光探测器分别连接。 and a processing unit, the light source unit includes an interconnected light source and an optical beam splitter, the optical ring-down module includes two identical optical ring-down cavities, and the signal receiving and processing unit includes two photodetectors and a A computing module connected to two optical detectors respectively, the optical input ends of the two optical down-down cavities are respectively connected to the two output ends of the optical beam splitter, and the down-down optical signal output ends of the two optical down-down cavities are connected to the The two photodetectors are connected separately.

上述技术方案中的光衰荡腔可采用两个高反射镜形成的光学谐振腔,或者光纤衰荡腔等现有或将有技术,考虑到光纤衰荡腔所具有的各种优点,优选地,所述光衰荡腔为光纤衰荡腔。 The optical ring-down cavity in the above-mentioned technical scheme can adopt the optical resonant cavity formed by two high-reflection mirrors, or the existing or future technologies such as the optical fiber ring-down cavity. Considering the various advantages of the optical fiber ring-down cavity, preferably , the optical ring-down cavity is an optical fiber ring-down cavity.

相比现有技术,本实用新型具有以下有益效果: Compared with the prior art, the utility model has the following beneficial effects:

本实用新型利用两路并联的光衰荡腔可同时获取两条衰荡曲线,从而可方便快捷地对待侧气体进行测量;本实用新型进一步采用光纤衰荡腔,解决了传统的高反射镜式衰荡腔由于来回反射的光程不够大,衰荡时间小的问题,测量精度更高。 The utility model can obtain two ring-down curves at the same time by using two parallel optical down-down cavities, so that the side gas can be measured conveniently and quickly; the utility model further adopts an optical fiber down-down cavity to solve the traditional Because the optical path of the ring-down cavity is not long enough and the ring-down time is small, the measurement accuracy is higher.

附图说明 Description of drawings

图1为本实用新型一个优选实施例的结构示意图;图中各标号含义如下: Fig. 1 is the structural representation of a preferred embodiment of the present utility model; The meaning of each label among the figure is as follows:

1、光源;2、                                                光纤耦合器(分光比为50:50);3和4、隔离器;5、6、9和10、光纤布拉格光栅;7和8、光子晶体光纤;11和12、聚焦透镜;13和14、光电探测器;15和16、数据采集卡;17、计算机。 1. Light source; 2. Fiber coupler (split ratio 50:50); 3 and 4, isolator; 5, 6, 9 and 10, fiber Bragg grating; 7 and 8, photonic crystal fiber; 11 and 12, focusing lens; 13 and 14, Photoelectric detector; 15 and 16, data acquisition card; 17, computer.

具体实施方式 Detailed ways

下面结合附图对本实用新型的技术方案进行详细说明: Below in conjunction with accompanying drawing, technical scheme of the present utility model is described in detail:

本实用新型基于双路光衰荡腔的痕量气体检测装置,包括光源单元、光衰荡单元以及信号接收与处理单元,所述光源单元包括相互连接的光源、光分束器,所述光衰荡模块包括两个相同的光衰荡腔,所述信号接收与处理单元包括两个光探测器以及与两个光探测器分别连接的计算模块,所述两个光衰荡腔的光输入端与光分束器的两个输出端分别连接,两个光衰荡腔的衰荡光信号输出端与两个光探测器分别连接。 The utility model is a trace gas detection device based on a dual-channel optical down-down cavity, which includes a light source unit, an optical down-down unit, and a signal receiving and processing unit. The light source unit includes a light source and an optical beam splitter connected to each other. The ring-down module includes two identical optical ring-down cavities, and the signal receiving and processing unit includes two photodetectors and computing modules respectively connected to the two photodetectors, and the optical input of the two optical ring-down cavities The two output ends of the optical beam splitter are respectively connected to each other, and the ring-down optical signal output ends of the two optical ring-down cavities are respectively connected to the two optical detectors.

本实用新型中的光衰荡腔可采用各种现有或将有技术,本实用新型优选采用光纤衰荡腔,尤其是其中的光纤环衰荡腔、纤端涂覆衰荡腔或光纤光栅衰荡腔。 The optical ring-down cavity in the utility model can adopt various existing or future technologies, and the utility model preferably adopts an optical fiber ring-down cavity, especially an optical fiber ring ring-down cavity, a fiber-end coated ring-down cavity or an optical fiber grating R&D cavity.

为了防止光衰荡腔中的光对光源及光分束器产生影响,本实用新型进一步在每个光衰荡腔与所述光分束器的连接光路中均设置有一个可使光由光分束器向光衰荡腔传输的光隔离器,从而可有效防止光衰荡腔中的光进入光分束器及光源。 In order to prevent the light in the optical ring-down cavity from having an impact on the light source and the optical beam splitter, the utility model is further provided with a device in the connecting optical path between each optical ring-down cavity and the optical beam splitter, which can make the light The optical isolator transmitted from the beam splitter to the optical drop-down cavity can effectively prevent the light in the optical drop-down cavity from entering the optical beam splitter and the light source.

本实用新型中的光源优选光纤脉冲激光器,光分束器优选50:50光分束器。 The light source in the utility model is preferably a fiber pulse laser, and the optical beam splitter is preferably a 50:50 optical beam splitter.

图1显示了本实用新型的一个优选实施例,该测量装置包括光源单元、光衰荡单元以及信号接收与处理单元。如图1所示,光源单元包括光源1和光纤耦合器(或称光分束器)2;光衰荡单元包括一对由光子晶体光纤7连接的光纤布拉格光栅(FBG)5、9,和一对由光子晶体光纤8连接的光纤布拉格光栅6、10,光子晶体光纤可以在很宽的带宽范围内只支持一个模式传输,具有高的非线性系数,有利于减少光源在光纤中传输时的散色损耗,并且有孔径较大的光子晶体光纤,作为气室能够增加反射次数,有效的提高测量精度;如图所示,光纤耦合器2的两个输出端分别经由光隔离器3、光隔离器4与光纤布拉格光栅5、布拉格光栅6连接;信号接收与处理单元包括分别设置于光纤布拉格光栅9、光纤布拉格光栅10之后的光电探测器13、光电探测器14,分别与光电探测器13、光电探测器14连接的数据采集卡15、数据采集卡16,以及与数据采集卡15、数据采集卡16连接的计算机17;为了增强光信号采集,本实施例中在光纤布拉格光栅9与电探测器13之间以及光纤布拉格光栅10与探测器14之间还分别设置有聚焦透镜11和聚焦透镜12。 Fig. 1 shows a preferred embodiment of the present invention, the measuring device includes a light source unit, an optical ring down unit and a signal receiving and processing unit. As shown in Figure 1, the light source unit includes a light source 1 and Fiber coupler (or optical beam splitter) 2; the optical ring down unit includes a pair of fiber Bragg gratings (FBG) 5, 9 connected by photonic crystal fiber 7, and a pair of fiber Bragg gratings connected by photonic crystal fiber 8 6, 10, photonic crystal fiber can only support one mode transmission in a wide bandwidth range, has a high nonlinear coefficient, and is beneficial to reduce the dispersion loss when the light source is transmitted in the fiber, and has a photonic crystal with a larger aperture The optical fiber, as an air chamber, can increase the number of reflections and effectively improve the measurement accuracy; as shown in the figure, The two output ends of the fiber coupler 2 are respectively connected to the fiber Bragg grating 5 and the Bragg grating 6 via the optical isolator 3 and the optical isolator 4; The photodetector 13, the photodetector 14, the data acquisition card 15, the data acquisition card 16 that are connected with the photodetector 13, the photodetector 14 respectively, and the computer 17 that is connected with the data acquisition card 15, the data acquisition card 16; In order to enhance optical signal collection, in this embodiment, a focusing lens 11 and a focusing lens 12 are respectively arranged between the fiber Bragg grating 9 and the electrical detector 13 and between the fiber Bragg grating 10 and the detector 14 .

光纤布拉格光栅5、光子晶体光纤7、光纤布拉格光栅9构成一路光纤光栅衰荡腔,光纤布拉格光栅6、光子晶体光纤8、光纤布拉格光栅10构成另一路光纤光栅衰荡腔。两个光纤光栅衰荡腔的各构成部件的材料、长度、直径等参数完全相同。 Fiber Bragg grating 5, photonic crystal fiber 7, and fiber Bragg grating 9 form a fiber Bragg grating ring-down cavity, and fiber Bragg grating 6, photonic crystal fiber 8, and fiber Bragg grating 10 form another fiber Bragg grating ring-down cavity. The materials, lengths, diameters and other parameters of the components of the two fiber grating ring-down cavities are exactly the same.

光源1发出的光经光纤耦合器2等分为两路,分别经由光隔离器3、光隔离器4进入两个光纤光栅衰荡腔并在其中形成振荡,光电探测器13、光电探测器14分别接收经由聚焦透镜11和聚焦透镜12汇聚后的衰荡光信号并将其转换为电信号,经由数据采集卡15、数据采集卡16采集后输入计算机17,计算机17根据所采集的信号可绘制出两个光纤光栅衰荡腔中的衰荡曲线,进而反演出待测气体的浓度信息。 The light emitted by light source 1 is The fiber coupler 2 is equally divided into two paths, which respectively enter into two fiber grating ring-down cavities via the optical isolator 3 and the optical isolator 4 and form oscillations therein. The photodetector 13 and the photodetector 14 respectively receive the The down-down optical signal converged by the focusing lens 12 and converted into an electrical signal, is collected by the data acquisition card 15 and the data acquisition card 16 and then input into the computer 17, and the computer 17 can draw two fiber grating attenuation signals according to the collected signals. The ring-down curve in the oscillating chamber can be used to invert the concentration information of the gas to be measured.

根据光腔衰荡光谱技术的基本原理和吸收光谱的比尔定律,随着光波的衰荡,在腔外可以探测到随指数衰减的光强信号为: According to the basic principle of optical cavity ring-down spectroscopy and Beer's law of absorption spectroscopy, with the ring-down of the light wave, the light intensity signal that decays with the exponential can be detected outside the cavity for:

式中,是入射到腔中的初始光强,是在腔中的衰荡时间。通过计算推导出衰荡时间为: In the formula, is the initial light intensity incident on the cavity, is the ring-down time in the cavity. The ring down time is derived by calculation for:

式中,是腔长,是光速,是气体的吸收系数,是被测气体的浓度,为两腔镜的反射率。再通过拟合两个光纤衰荡腔的衰荡时间,反演得到痕量气体浓度。 In the formula, is the cavity length, is the speed of light, is the absorption coefficient of the gas, is the concentration of the measured gas, is the reflectivity of the two-cavity mirror. Then by fitting the ring-down time of the two optical fiber ring-down cavities and , inversion to obtain the trace gas concentration.

使用以上装置进行痕量气体的检测时,其具体流程如下: When using the above device for trace gas detection, the specific process is as follows:

1)、光源1启动后,发出的激光经过分光比为50:50的光纤耦合器,由光纤耦合器将光源分成光强为原始光强一半的两路强度相等的光; 1) After the light source 1 is started, the emitted laser passes through the laser with a split ratio of 50:50 fiber optic coupler, by The optical fiber coupler divides the light source into two equal-intensity lights whose light intensity is half of the original light intensity;

2)、在上路(或下路)光纤衰荡腔内冲入浓度已知的高浓度标定气体,令此光路为通道Ⅰ,在下路(或上路)光纤衰荡腔内冲入待测气体,令此光路为通道Ⅱ,初始光源被分成两路光源后,同时通过通道Ⅰ和通道Ⅱ中的隔离器,并且同时进入两个光纤衰荡腔中,分别在其中形成振荡; 2) Pour a high-concentration calibration gas with a known concentration into the upper (or lower) optical fiber ring-down cavity, let this optical path be channel I, and inject the gas to be measured into the lower (or upper) optical fiber ring-down cavity, Let this optical path be channel II. After the initial light source is divided into two light sources, it passes through the isolators in channel I and channel II at the same time, and enters two optical fiber ring-down cavities at the same time, forming oscillations in them respectively;

3)、光电探测器13和14分别接收经过聚焦透镜11和12聚焦后的两个光纤衰荡腔输出的衰荡光信号,并将其转换为电信号后,由数据采集卡15和16进行数据采集并输出至计算机17,得到标定气体的衰荡曲线和待测气体的衰荡曲线; 3) The photodetectors 13 and 14 respectively receive the ring-down optical signals output by the two optical fiber ring-down cavities focused by the focusing lenses 11 and 12, and convert them into electrical signals, which are then processed by the data acquisition cards 15 and 16. The data is collected and output to the computer 17 to obtain the ring-down curve of the calibration gas and the ring-down curve of the gas to be measured;

4)设得到的标定气体的衰荡曲线,及待测气体的衰荡曲线,根据标定气体的衰荡曲线计算推导出标定气体的衰荡时间,以及根据待测气体的衰荡曲线计算推导出待测气体的衰荡时间。由衰荡时间表达式可知,衰荡时间是关于气体吸收系数的函数,标定气体浓度已知,测量系统确定以后,光程和光纤布拉格光栅的反射率都为定值,则可以通过拟合的方法,反演出待测气体的浓度4) Set the ring-down curve of the calibration gas obtained , and the ring-down curve of the gas to be measured , calculate and deduce the ring-down time of the calibration gas according to the ring-down curve of the calibration gas , and calculate and deduce the ring-down time of the gas to be measured according to the ring-down curve of the gas to be measured . by the ring down time and The expression shows that the ring-down time is about the gas absorption coefficient function of calibration gas concentration Known, after the measurement system is determined, the optical path and the reflectivity of the fiber Bragg grating If both are fixed values, the concentration of the gas to be measured can be inverted by the fitting method .

需要特别说明的是,上述测量过程中所涉及的信号采集、信号处理、衰荡曲线绘制以及根据衰荡曲线反演待测气体的浓度等均为现有成熟技术,并非本实用新型对现有技术作出的贡献。本实用新型对现有技术所作出的贡献在于检测装置硬件结构的改进。 It should be noted that the signal acquisition, signal processing, ring-down curve drawing and inversion of the concentration of the gas to be measured according to the ring-down curve involved in the above-mentioned measurement process are all existing mature technologies, and the utility model is not an improvement on the existing contribution of technology. The contribution of the utility model to the prior art lies in the improvement of the hardware structure of the detection device.

Claims (7)

1. the trace gas detection device in chamber is swung based on two-way light decay, comprise light source cell, light decay swings unit and Signal reception and processing unit, it is characterized in that, described light source cell comprises interconnective light source, beam splitter, described light decay swings module and comprises two identical light decays and swing chamber, the computing module that described Signal reception and processing unit comprise two photo-detectors and be connected respectively with two photo-detectors, two output terminals of light input end and beam splitter that described two light decays swing chamber are connected respectively, two light decays swing declining of chamber and swing light signal output end and be connected respectively with two photo-detectors.
2. trace gas detection device as claimed in claim 1, is characterized in that, it is that optical fiber declines and swings chamber that described light decay swings chamber.
3. trace gas detection device as claimed in claim 2, is characterized in that, described optical fiber decline swing chamber be fiber optic loop decline swing chamber, the coating of fine end declines and swings chamber or fiber grating and decline and swing chamber.
4. trace gas detection device as claimed in claim 3, is characterized in that, described optical fiber declines and swings chamber is that fiber grating declines and swings chamber, comprises the Fiber Bragg Grating FBG connected by photonic crystal fiber for a pair.
5. trace gas detection device as claimed in claim 1, it is characterized in that, described beam splitter is 50:50 beam splitter.
6. trace gas detection device as claimed in claim 1, it is characterized in that, described light source is fiber pulse laser.
7. trace gas detection device as claimed in claim 1, is characterized in that, swings in the connection light path of chamber and described beam splitter to be provided with one light can be made to light decay by beam splitter to be swung the optoisolator transmitted in chamber at each light decay.
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CN105319173A (en) * 2015-11-25 2016-02-10 上海禾赛光电科技有限公司 Gas remote sensing detection device and method
CN105319173B (en) * 2015-11-25 2018-07-20 上海禾赛光电科技有限公司 Gas remote measurement device and method
CN106018205A (en) * 2016-07-15 2016-10-12 中国科学技术大学先进技术研究院 Measurement device and measurement method for particle size and content of aerosol
CN106680218A (en) * 2016-12-29 2017-05-17 中国人民解放军国防科学技术大学 Optical fiber ring-down cavity for gas concentration measuring system, and gas concentration measuring system and method
CN109682777A (en) * 2019-02-28 2019-04-26 山东非金属材料研究所 A kind of system based on trace amounts of methane content in cavity ring down spectroscopy technology detection ultra-pure gases
CN109682777B (en) * 2019-02-28 2024-01-23 山东非金属材料研究所 System for detecting trace methane content in ultra-high purity gas based on cavity ring-down spectroscopy
CN111103260A (en) * 2020-01-21 2020-05-05 江苏师范大学 System and method for detecting intermediate infrared all-fiber cavity ring-down trace gas

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