CN1818666A - Capacitor-style microfluid angular accelerometer - Google Patents
Capacitor-style microfluid angular accelerometer Download PDFInfo
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- CN1818666A CN1818666A CN 200610024506 CN200610024506A CN1818666A CN 1818666 A CN1818666 A CN 1818666A CN 200610024506 CN200610024506 CN 200610024506 CN 200610024506 A CN200610024506 A CN 200610024506A CN 1818666 A CN1818666 A CN 1818666A
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Abstract
A microfluid angular accelerometer of capacity type consists of top and bottom shell, fluid chamber, active and static counter electrode. It is featured as charging heavy density liquid full in said chamber, generating incline of baffle under inertia force action of sealing liquid when angular accelerometer is existed at vertical direction for driving differential capacity active counter electrode to move by flexible chamber external wall, detecting variation of differential capacity by control circuit then deriving out angular acceleration value inputted from outside .Its preparing process also disclosed.
Description
Technical field
What the present invention relates to is a kind of device of micro-electromechanical system field, specifically is a kind of capacitor-style microfluid angular accelerometer.
Background technology
Accelerometer is commonly used to the second derivative of Displacement Measurement to the time.The displacement of angular accelerometer measured angular is to the second derivative of time, and it can be used in the fields such as vehicle safety control system, hd anti-strike vibration.When carrier had an angular acceleration input on certain direction, angular accelerometer can be exported and the proportional electric signal of input angle acceleration (as voltage) by testing circuit.For example, the angular acceleration signal of sensing can be used for judging whether automobile will tumble, thereby in time takes corresponding measure.Angular accelerometer can also be used to controlling the read/write head of disk, disk control system can be remedied because the angular acceleration that severe impact or vibration cause can be stablized and the constant speed rotation disk.Angular accelerometer can also be used for the shockproof control of test board, the fields such as dynamics Controlling of robot arm.
Find that through literature search United States Patent (USP) U.S.Pat.No.5 has proposed a kind of angular accelerometer in 251,484 rotary accelerometers (" Rotational Accelerometer ") to prior art.This accelerometer middle body has the annular axle center that is fixed on the matrix, and what link to each other with annular axle center is the cantilever spoke electrode of radial arrangement, and when there was angular acceleration in carrier, plastic deformation can take place the spoke electrode.The spoke electrode and the fixed reference electrode that are distributed in outer rim form difference parallel plate capacitor signal extraction scheme, will differential output voltage in the time of spoke movable plate electrode off-center position.The sensing ability of this angular accelerometer is limited by flexible spokes electrode displacement amount.Have the rotatable cantilever design high structure matching of needs usually, with gain, the phase place of guaranteeing to estimate and linear corresponding.Linear sensitivity and intersecting axle sensitivity (gain) highly depend on the matching of structure.Discrete in addition capacitor plate lead-in wire can increase the complicacy and the manufacturing cost of structure.
Also find in the retrieval, United States Patent (USP), U.S.Pat.No.6,257,062 angular accelerometer (" AngularAccelerometer "), in a kind of angular accelerometer that this patent is mentioned, rotatory inertia quality and matrix form by a series of brace summer and connect, and inertial mass is suspended on the top of chamber.This angular accelerometer can obtain more preceding a kind of higher precision.Yet this angular accelerometer requires that high structural symmetry is arranged, and this has higher requirement to fine machining method.
Summary of the invention
The present invention is directed to the deficiency of above-mentioned angular accelerometer, proposed a kind of capacitor-style microfluid angular accelerometer.The present invention, simple in structure, be fit to the MEMS processing technology and make, fluid almost is sealed in the cavity space; Owing to be, therefore very wide frequency response bandwidth is arranged by almost sealed fluid flow inertial force work; Capacitance detecting device is not strong to operating ambient temperature susceptibility, and operating temperature range is big.
The present invention is achieved by the following technical solutions, capacitor-style microfluid angular accelerometer of the present invention comprises: upper shell, fluid chamber, differential capacitance movable plate electrode, differential capacitance fixed plate and lower house, wherein fluid chamber is made up of following structure: chamber internal ring wall, chamber external annulus, baffle plate, the chamber external annulus is surrounded jointly by rigid chamber external annulus and flexible chamber external annulus, what the outside was connected with the flexible chamber external annulus is the differential capacitance movable plate electrode, and what be in the lower house outer rim is the differential capacitance fixed plate.
On lower house, be distributed with differential capacitance movable plate electrode, chamber internal ring wall, chamber external annulus, П shape fixed plate, L shaped fixed plate, baffle plate, rigid chamber outer wall, flexible chamber outer wall, movable plate electrode linking arm, П shape movable plate electrode, П shape movable plate electrode.Chamber internal ring wall and lower house form and are fixedly connected, and the chamber external annulus is surrounded jointly by rigid chamber outer wall and flexible chamber outer wall, and the rigid chamber outer wall is more much bigger than the width of flexible chamber outer wall.When angular acceleration was imported, rigid baffle can drive the distortion of flexible chamber outer wall.The flexible chamber outer wall drives the motion of П shape movable plate electrode by the movable plate electrode linking arm.Can detect the rotation of П shape movable plate electrode by the interdigital differential capacitance that forms of L shaped fixed plate, П shape fixed plate and П shape movable plate electrode.The differential capacitance fixed plate forms by its lower surface and lower house and is fixedly connected.
When the present invention works, be full of by big density liquid in the fluid chamber.When there is angular acceleration on the vertical direction in the carrier that links to each other with total, because the effect of fluid inertia force, little displacement bias can take place in baffle plate, and the flexible chamber external annulus deforms thereupon, thus with the rigidly connected differential capacitance movable plate electrode of flexible chamber external annulus generation angular displacement.By detecting the numerical value change of differential capacitance, can measure the angular acceleration that carrier takes place.
By as can be known above-mentioned, the fluid among the present invention almost is sealed in the chamber, very big displacement can not take place.Simultaneously, because differential capacitance pole plate quality is very little, their mass inertia effect can be ignored.Therefore, the present invention is operated under the quasistatic situation, has very wide corresponding frequencies.Difference refers to that formula differential capacitance testing agency can detect the atomic little angular displacement of electric capacity movable plate electrode, so the present invention can obtain higher measuring accuracy.The condenser type angular accelerometer that the present invention proposes can improve measuring accuracy, raising frequency response range and the suitable environment temperature range of conventional angular accelerometer, improves the performance of angular accelerometer, and then promotes the range of application of angular accelerometer.
Description of drawings
Fig. 1 is a general structure synoptic diagram of the present invention;
Fig. 2 is the 3-D view that the present invention goes structure behind the upper shell;
Fig. 3 is the vertical view that the present invention goes structure behind the upper shell;
Fig. 4 is the partial view at A-A visual angle among Fig. 3;
Fig. 5 is the side view of upper shell.
Embodiment
As shown in Figure 1, the present invention includes: upper shell 1, fluid chamber 2, differential capacitance movable plate electrode 3, differential capacitance fixed plate 4, lower house 5.Upper shell 1 and lower house 5 adopt binding material to be fixedly connected, wherein fluid chamber 2 is surrounded by chamber internal ring wall 6, chamber external annulus 7 and baffle plate 10, differential capacitance movable plate electrode 3 is bound up on the lower house 5 by chamber external annulus 7, differential capacitance fixed plate 4 and lower house 5 are fixedly connected, and being full of in fluid chamber 2 has highdensity fluid.
As Fig. 2, shown in Figure 3, on lower house 5, be distributed with differential capacitance movable plate electrode 3, chamber internal ring wall 6, chamber external annulus 7, П shape fixed plate 8, L shaped fixed plate 9, baffle plate 10, rigid chamber outer wall 11, flexible chamber outer wall 12, movable plate electrode linking arm 13, П shape movable plate electrode 14, П shape movable plate electrode 15.Chamber internal ring wall 6 and lower house 5 form and are fixedly connected, and chamber external annulus 7 is surrounded jointly by rigid chamber outer wall 11 and flexible chamber outer wall 12, and rigid chamber outer wall 11 is bigger three to five times than the width of flexible chamber outer wall 12.When angular acceleration was imported, rigid baffle 10 can drive 12 distortion of flexible chamber outer wall.Flexible chamber outer wall 12 drives 14 motions of П shape movable plate electrode by movable plate electrode linking arm 13.The differential capacitance that is formed by L shaped fixed plate 9, П shape fixed plate 8 and П shape movable plate electrode interdigital 15 can detect the rotation of П shape movable plate electrode 14.Differential capacitance fixed plate 4 forms by its lower surface and lower house 5 and is fixedly connected.
As shown in Figure 4, baffle plate 10 and flexible chamber outer wall 12 are for being fixedly connected, and baffle plate 10 and upper cavity 1, lower chamber 5 and chamber internal ring wall 6 all have certain clearance.Whole differential capacitance movable plate electrode 3 forms by movable plate electrode linking arm 13 and flexible chamber outer wall 12 and is fixedly connected.There is certain clearance between differential capacitance movable plate electrode 3 and upper shell 1, lower house 5, the differential capacitance fixed plate 4, to guarantee their mobility.All П shape movable plate electrodes interdigital 15 all are coupled to each other by П shape movable plate electrode root 16.
When the angular acceleration input is arranged on the little angular accelerometer axis direction of the present invention, the fluid that is full of in the fluid chamber 2 can promote baffle plate 10 and tilt, thereby drive differential capacitance movable plate electrode 3 motions that link with flexible chamber outer wall 12, changing value by testing circuit measurement differential capacitance draws the input angle acceleration value.
As shown in Figure 5, have chamber 17 in the upper shell 1, the height of the chamber 17 just in time height with differential capacitance fixed plate 4, chamber internal ring wall 6, chamber external annulus 7 is identical, thereby guarantees the fluid chamber space of sealing.
Entire device is of a size of between several millimeters to several centimetres and changes, and structure of the present invention and principle of work also are applicable to macroscopical large scale structure.Differential capacitance movable plate electrode 3, differential capacitance fixed plate 4, chamber internal ring wall 6, chamber external annulus 7, baffle plate 10 all are high aspect ratio structures, wherein there are certain clearance in baffle plate 10, differential capacitance movable plate electrode 3 with lower house 5, and differential capacitance fixed plate 4, chamber internal ring wall 6, chamber external annulus 7 and lower house 5 are for being fixedly connected.These structures adopt identical metal material to be made, as, copper, nickel etc.Employing standard LIGA/ is accurate, and LIGA technology is made the structure that is connected with bottom crown, adopts SLIGA or is called the movable structure that sacrifice layer LIGA technology is made high-aspect-ratio.
The material of upper shell 1 and lower house 5 is crystalline silicon or glass, and the inner cavity chamber 17 of upper shell 1 adopts precise machine machining to make, and also can adopt wet etching method processing.
Adopt differential capacitance comparatively ripe in the prior art to read numerical value and the variable quantity thereof that circuit obtains differential capacitance, convert capacitance signal to voltage signal.
Claims (8)
1, a kind of capacitor-style microfluid angular accelerometer, comprise: upper shell (1), fluid chamber (2), differential capacitance movable plate electrode (3), differential capacitance fixed plate (4), lower house (5), it is characterized in that: fluid chamber (2) is by chamber internal ring wall (6), chamber external annulus (7) and baffle plate (10) surround, upper shell (1) and lower house (5) adopt binding material to be fixedly connected, differential capacitance movable plate electrode (3) is bound up on the lower house (5) by chamber external annulus (7), differential capacitance fixed plate (4) and lower house (5) are fixedly connected, and being full of in fluid chamber (2) has highdensity fluid.
2, capacitor-style microfluid angular accelerometer according to claim 1, it is characterized in that, on lower house (5), be distributed with differential capacitance movable plate electrode (3), chamber internal ring wall (6), chamber external annulus (7), ∏ shape fixed plate (8), L shaped fixed plate (9), baffle plate (10), rigid chamber outer wall (11), flexible chamber outer wall (12), movable plate electrode linking arm (13), ∏ shape movable plate electrode (14), ∏ shape movable plate electrode (15), chamber internal ring wall (6) and lower house (5) form and are fixedly connected, chamber external annulus (7) is surrounded jointly by rigid chamber outer wall (11) and flexible chamber outer wall (12), and rigid chamber outer wall (11) wants big three to five times than the width of flexible chamber outer wall (12).
3, capacitor-style microfluid angular accelerometer according to claim 2 is characterized in that, baffle plate (10) and flexible chamber outer wall (12) are for being fixedly connected, and baffle plate (10) and upper cavity (1), lower chamber (5) and chamber internal ring wall (6) are all gapped.
4, capacitor-style microfluid angular accelerometer according to claim 2 is characterized in that, all ∏ shape movable plate electrodes interdigital (15) all pass through ∏ shape movable plate electrode root (16) and are coupled to each other.
According to claim 1 or 2 described capacitor-style microfluid angular accelerometers, it is characterized in that 5, whole differential capacitance movable plate electrode (3) forms by movable plate electrode linking arm (13) and flexible chamber outer wall (12) and is fixedly connected.
According to claim 1 or 2 described capacitor-style microfluid angular accelerometers, it is characterized in that 6, there are the gap in differential capacitance movable plate electrode (3) and upper shell (1), lower house (5), differential capacitance fixed plate between (4).
7, according to claim 2 or 3 described capacitor-style microfluid angular accelerometers, it is characterized in that, when angular acceleration is imported, rigid baffle (10) can drive flexible chamber outer wall (12) distortion, flexible chamber outer wall (12) drives ∏ shape movable plate electrode (14) motion by movable plate electrode linking arm (13), the differential capacitance that is formed by L shaped fixed plate (9), ∏ shape fixed plate (8) and ∏ shape movable plate electrode interdigital (15) can detect the rotation of ∏ shape movable plate electrode (14), and differential capacitance fixed plate (4) forms by its lower surface and lower house (5) and is fixedly connected.
8, capacitor-style microfluid angular accelerometer according to claim 1, it is characterized in that, there is chamber (17) in the upper shell (1), the height of chamber (17) the just in time height with differential capacitance fixed plate (4), chamber internal ring wall (6), chamber external annulus (7) is identical, thereby guarantees the fluid chamber space of sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100245061A CN100401070C (en) | 2006-03-09 | 2006-03-09 | Capacitor-style microfluid angular accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100245061A CN100401070C (en) | 2006-03-09 | 2006-03-09 | Capacitor-style microfluid angular accelerometer |
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| Publication Number | Publication Date |
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| CN1818666A true CN1818666A (en) | 2006-08-16 |
| CN100401070C CN100401070C (en) | 2008-07-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100245061A Expired - Fee Related CN100401070C (en) | 2006-03-09 | 2006-03-09 | Capacitor-style microfluid angular accelerometer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105865324A (en) * | 2016-05-12 | 2016-08-17 | 全普光电科技(上海)有限公司 | Capacitance sensing device |
| CN106033089A (en) * | 2015-03-17 | 2016-10-19 | 北京自动化控制设备研究所 | Small-volume digital molecular electronic angle accelerometer |
| CN106324281A (en) * | 2015-07-02 | 2017-01-11 | 北京自动化控制设备研究所 | Molecular electronic angle accelerometer electromagnetism conversion unit |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5251484A (en) * | 1992-04-03 | 1993-10-12 | Hewlett-Packard Company | Rotational accelerometer |
| DE19938206A1 (en) * | 1999-08-12 | 2001-02-15 | Bosch Gmbh Robert | Micro-mechanical rotational acceleration sensor has an oscillating mass fixed at its center with an array of differential measurement capacitors for determination of acceleration directly rather than using time differentiation |
| US6257062B1 (en) * | 1999-10-01 | 2001-07-10 | Delphi Technologies, Inc. | Angular Accelerometer |
| US6393914B1 (en) * | 2001-02-13 | 2002-05-28 | Delphi Technologies, Inc. | Angular accelerometer |
| US6718826B2 (en) * | 2002-02-28 | 2004-04-13 | Delphi Technologies, Inc. | Balanced angular accelerometer |
-
2006
- 2006-03-09 CN CNB2006100245061A patent/CN100401070C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106033089A (en) * | 2015-03-17 | 2016-10-19 | 北京自动化控制设备研究所 | Small-volume digital molecular electronic angle accelerometer |
| CN106324281A (en) * | 2015-07-02 | 2017-01-11 | 北京自动化控制设备研究所 | Molecular electronic angle accelerometer electromagnetism conversion unit |
| CN105865324A (en) * | 2016-05-12 | 2016-08-17 | 全普光电科技(上海)有限公司 | Capacitance sensing device |
| CN105865324B (en) * | 2016-05-12 | 2019-02-01 | 全普光电科技(上海)有限公司 | Capacitive sensing apparatus |
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| CN100401070C (en) | 2008-07-09 |
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Granted publication date: 20080709 Termination date: 20110309 |