CN1878962A - Multi-stage friction vacuum pump - Google Patents
Multi-stage friction vacuum pump Download PDFInfo
- Publication number
- CN1878962A CN1878962A CNA2004800334295A CN200480033429A CN1878962A CN 1878962 A CN1878962 A CN 1878962A CN A2004800334295 A CNA2004800334295 A CN A2004800334295A CN 200480033429 A CN200480033429 A CN 200480033429A CN 1878962 A CN1878962 A CN 1878962A
- Authority
- CN
- China
- Prior art keywords
- level
- turbocompressor
- rotor
- stator
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/10—Centrifugal pumps for compressing or evacuating
- F04D17/12—Multi-stage pumps
- F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The invention relates to a multi-stage vacuum pump comprising at least one turbocompressor stage (11) and equipped with a circular compressor stage (33) on the pressure side of the turbocompressor stage. Said pump has small axial dimensions, enabling the compression to be increased without significantly increasing the space requirement.
Description
Technical field
The present invention relates to a kind of multi-stage friction vacuum pump, it has the turbocompressor level of at least one axial compression, and described turbocompressor level has one around its rotor rotated, and described rotor has each outstanding rotor disc between each fixing stator disc.
Background technique
Turbomolecular pump belongs to the drag vacuum pump series that can produce high vacuum, for example is used on the container that is used for the semiconductor manufacturing or is used in mass spectrometer.Multi-stage friction vacuum pump described in DE 100 04 271 A1 (Leybold Vacuum GmbH) has one or more turbocompressor levels, and it is made up of a rotor and the stator with radially-protruding stator disc with radially-protruding rotor disc respectively.Rotor disc and stator disc mesh together with the shape of comb, and span therebetween is very little.They cause along the axial Molecular flow of rotor shaft.Except the turbocompressor level, a recycle compressor level (circular compressor stage) can also be set, it has a rotor and a stator, rotor has the axially outstanding rotor blade that is provided with on circular trace, stator has the axially outstanding stator vane that is provided with on circular trace.Rotor blade and stator vane alternately mesh together, and Molecular flow is axially flowed towards the other places inwardly or axially by rotor sense of rotation and blade incidence.
Summary of the invention
The objective of the invention is, a multi-stage friction vacuum pump with at least one turbocompressor utmost point is provided, wherein be arranged on the flow path these compressor utmost point polyphones, and should form higher compression.
The feature that has claim 1 by multi-stage friction vacuum pump of the present invention.Vacuum pump comprises a turbocompressor utmost point and a recycle compressor level that is positioned at the downstream on flow path.The turbocompressor level is fit to be used for producing high vacuum, and the recycle compressor level in downstream is used for improving pressure.Because compression has reduced gas volume, so the size of recycle compressor level can be very little.The axial dimension of recycle compressor level is little, because it is mainly diametrically by through-flow.The overall dimensions of Wesco pump can obviously not increase because of the recycle compressor level, but compares the one pole drag vacuum pump, and its compression is able to remarkable enhancing.By the present invention, the combination of the turbocompressor level of a upstream and the recycle compressor level in a downstream provides such advantage, and promptly the space that needs under the situation of high compression ability is little.
By a preferable configuration of the present invention, turbocompressor level and recycle compressor level are incorporated in the mutual group zoarium that is made of rotor and stator.This means that the rotor of two compressor stages is made of single combined rotor, the stator of two compressor stages also is made of single combined stator.Therefore, size and weight can both further reduce.
Drag vacuum pump of the present invention is preferably designed to multiple entry pump (multiple inlet pump).It comprises at least two turbocompressor levels axially spaced, that polyphone compresses, and a middle inlet is arranged between them.One recycle compressor level is arranged on the compression end of the first turbocompressor level and/or the second turbocompressor level, and such pump is particularly suitable for being applied to situation about linking to each other with mass spectrometer.Because the air-flow of the middle ingress that mass spectrometric analytical equipment connected improves, the air-flow of middle ingress is improved, and can the air pressure of high vacuum ingress not had a negative impact.Raising at middle ingress air-flow means the sensitivity that improves velocitron.
According to compression ratio, the recycle compressor level may be used different models and structure, for example described in DE 100 94 271 A1 like that.
Description of drawings
Below describe embodiments of the invention in detail by accompanying drawing.These embodiments should not regard limiting the scope of the invention as.It would be better to say that its protection domain is determined by claim and equivalence thereof.
Wherein:
Fig. 1 shows the longitudinal sectional view by a drag vacuum pump of the present invention;
One view of Fig. 2 recycle compressor level;
The Fig. 3 and the different embodiments' of 4 recycle compressor levels longitudinal sectional view.
Embodiment
Drag vacuum pump shown in Fig. 1 comprises one and is configured to columniform housing 10 basically, its at one end portion have a high vacuum port HV.Shell body wall is provided with the middle inlet ZE1 of a lateral opening.Inlet ZE1 gets up by fishplate bar 18 bridge joints in the middle of this, and fishplate bar is connected to each other each stator component.
A first turbocompressor level 11 that is made of stator 12 and rotor 13 is arranged at the anterior 10a place of housing 10.Stator 12 has a plurality of stator discs 15 that are provided with from a peripheral wall 14 radial inward.Rotor 13 has a plurality of rotor discs 16 that radial outward is given prominence between stator disc 15.Driver 17 with an atwirl electric motor is with 30,000 to 60, and the rotating speed between the 000rpm drives rotor 13.
One second turbocompressor level 21 is arranged on the compression end of the first turbocompressor level 11, and an inlet that is connected with middle inlet ZE1 is arranged.This turbocompressor level 21 is made of a stator 22 and a rotor 23.Stator 22 has a plurality of stator discs 25 that are provided with from a peripheral wall 22 radial inward.Rotor 23 has a plurality of rotor discs 26 that radial outward is given prominence between stator disc 25.Rotor 13 and 23 is fixedly connected to each other is in the same place, and is driven by driver 17 together.
On housing 10, and then the second turbocompressor level 21 is another compressor stage 30, and this compressor stage additionally is connected with inlet ZE2 in the middle of.For example, this compressor stage 30 is a Holweck level (Holweck stage) or other molecular pump, for example a Gaede pump (Gaede pump), siegbahn's pump (Siegbahn pump), England pump (Engl nderpump) or a side channel pump.
In the present embodiment, and then be provided with a recycle compressor level 33 after the first turbocompressor level 11.Recycle compressor level 33 has a rotor disc 34, and it is the part of the rotor 13 of turbocompressor level 11; Also have a stator disc 32, it is the part of stator 12.This rotor disc 34 includes and is each rotor blade 35 that concentric circle is arranged, and stator disc 32 has each stator vane 36, and it also is concentric circle arranges, and is embedded in the slit between each rotor circle, as shown in Figure 2.Stator vane and rotor blade tilt on the contrary with respect to radial direction.According to the sense of rotation of rotor, recycle compressor level 33 or radial outward are carried, or radial inward is carried.In the present embodiment, throughput direction identifies by arrow 37.Gas delivery by turbocompressor level 11, is passed through recycle compressor level 33 from its circumference radial inward from high vacuum inlet HV again, and inlet ZE1 in the middle of arriving by a gap 38 therefrom.Turbocompressor level 21 is transported to compressor stage 30 to gas from centre inlet ZE1.Inlet ZE2 also feeds in the compressor stage 30 in the middle of second.Compressor stage 30 is transferred to an outlet (not shown).
One in the rotor disc 16 of turbocompressor level 11 is the supports disc of the rotor blade of recycle compressor level 33.The stator disc of recycle compressor disc has constituted the end wallboard of the compressed side end of turbocompressor level 11 simultaneously.
A special advantage is that recycle compressor level 33 is incorporated in the turbocompressor level 11 to a certain extent.Unique necessary ancillary cost is rotor blade and stator vane 35,36, and they are additionally provided on the rotor and stator of turbocompressor level.
As the alternative form of present embodiment, a recycle compressor level 33 also can be arranged on the back of the second turbocompressor level 21.Be arranged on recycle compressor level on the compression end of respective turbine compressor stage, that be incorporated in the turbocompressor level and improved the air-flow on the compression end.In addition, this means the raising of sensitivity for mass spectrometer.
Fig. 3 shows air-flow 40, and it passes through recycle compressor level 33 radially by flowing outward inwardly.
In the embodiment of Fig. 4, the blade surface of rotor disc 34 is conical.Rotor blade 35 has an axial length, and it reduces along with reducing of circular trace radius.
Also can use one to have a plurality of discs and have alternately outwardly and the recycle compressor level of air flow path inwardly, as it usually shown in Figure 7 among DE 100 04 271 A1.
Claims (8)
1. multi-stage friction vacuum pump, turbocompressor level (11 with at least one axial compression, 21), described turbocompressor level has one around its rotor rotated (13), described rotor has each outstanding rotor disc (16) between each fixing stator disc (15), it is characterized in that, the recycle compressor level (33) of one radial compression is set on the compression end of turbocompressor level (11), described recycle compressor level comprises a rotor (34) and a stator (39), described rotor (34) has the axially outstanding rotor blade (35) that is provided with on circular trace, described stator (39) has the axially outstanding stator vane (36) that is provided with on circular trace.
2. by the described drag vacuum pump of claim 1, it is characterized in that each rotor blade (35) of recycle compressor level is arranged in the rotor subject of a supporting rotor disc (16) of turbocompressor level (11).
3. by claim 1 or 2 described drag vacuum pumps, it is characterized in that each stator vane (36) is arranged on one of turbocompressor level (11) and supports in the stator body of stator disc (15).
4. by one of claim 1 to 3 described drag vacuum pump, it is as a multiple entry pump, it is characterized in that, at least two turbocompressor levels (11,21) axially spaced, that polyphone compresses are set, inlet (ZE1) in the middle of between them, being provided with one, and a recycle compressor level (33) is arranged on the compression end of the first turbocompressor level (11).
5. by one of claim 1 to 3 described drag vacuum pump, it is as a multiple entry pump, it is characterized in that, at least two turbocompressor levels (11,21) axially spaced, that polyphone compresses are set, inlet (ZE1) in the middle of between them, being provided with one, and a recycle compressor level (33) is arranged on the compression end of the second turbocompressor level (21).
6. by one of claim 1 to 5 described drag vacuum pump, it is characterized in that the compression of recycle compressor level (33) radial inward.
7. by one of claim 1 to 6 described drag vacuum pump, it is characterized in that recycle compressor level (33) constitutes two-stage at least, alternately radial inward and radially outward compression (or with opposite order).
8. by one of claim 1 to 7 described drag vacuum pump, it is characterized in that rotor blade (35) has an axial length, it is tapered on the direction of compression.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10353034A DE10353034A1 (en) | 2003-11-13 | 2003-11-13 | Multi-stage friction vacuum pump |
| DE10353034.7 | 2003-11-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1878962A true CN1878962A (en) | 2006-12-13 |
| CN100453817C CN100453817C (en) | 2009-01-21 |
Family
ID=34559626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004800334295A Expired - Fee Related CN100453817C (en) | 2003-11-13 | 2004-10-28 | Multi-stage friction vacuum pump |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20070081889A1 (en) |
| EP (1) | EP1706645B1 (en) |
| JP (1) | JP2007510853A (en) |
| CN (1) | CN100453817C (en) |
| CA (1) | CA2545566A1 (en) |
| DE (2) | DE10353034A1 (en) |
| WO (1) | WO2005047707A1 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101392749B (en) * | 2008-10-31 | 2012-05-23 | 东北大学 | Vortex vacuum pump |
| CN101828040B (en) * | 2007-10-11 | 2012-05-30 | 厄利孔莱博尔德真空技术有限责任公司 | Multistage pump rotor for a turbomolecular pump |
| CN102933853A (en) * | 2010-07-02 | 2013-02-13 | 埃地沃兹日本有限公司 | Vacuum pump |
| CN103629146A (en) * | 2012-08-24 | 2014-03-12 | 株式会社岛津制作所 | Vacuum pump |
| CN108105121A (en) * | 2017-12-29 | 2018-06-01 | 东北大学 | A kind of multistage composite high vacuum dry pump |
| CN110177950A (en) * | 2017-01-20 | 2019-08-27 | 爱德华兹有限公司 | Multistage turbine molecular pump with entrance between grade |
| CN112160919A (en) * | 2020-09-28 | 2021-01-01 | 东北大学 | Turbo molecular pump and composite molecular pump comprising same |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
| GB0901872D0 (en) * | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
| DE102009011082A1 (en) * | 2009-02-28 | 2010-09-02 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
| GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
| EP2620649B1 (en) | 2012-01-27 | 2019-03-13 | Edwards Limited | Gas transfer vacuum pump |
| JP6435338B2 (en) | 2013-10-16 | 2018-12-05 | エーエスエムエル ネザーランズ ビー．ブイ． | Radiation source, lithographic apparatus, device manufacturing method, sensor system, and sensing method |
| DE102014105582A1 (en) * | 2014-04-17 | 2015-10-22 | Pfeiffer Vacuum Gmbh | vacuum pump |
| WO2021102583A1 (en) * | 2019-11-28 | 2021-06-03 | Laminar Lift Systems Inc. | Tesla turbine pump and associated methods |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2224009A5 (en) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
| US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
| DE4314418A1 (en) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Friction vacuum pump with differently designed pump sections |
| DE29516599U1 (en) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Friction vacuum pump with intermediate inlet |
| GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
| DE19821634A1 (en) * | 1998-05-14 | 1999-11-18 | Leybold Vakuum Gmbh | Friction vacuum pump with staged rotor and stator |
| GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
| US6508631B1 (en) * | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
| DE10004263A1 (en) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Seal between stationary and rotating component in vacuum pump consists of blades arranged in herringbone pattern attached to each component |
| DE10004271A1 (en) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Friction vacuum pump has component parts supporting rotor and stator blade rows extending radially and longitudinal axes of blades extend axially, and medium flows through pump from outside inwards |
| FR2859250B1 (en) * | 2003-08-29 | 2005-11-11 | Cit Alcatel | VACUUM PUMP |
-
2003
- 2003-11-13 DE DE10353034A patent/DE10353034A1/en not_active Withdrawn
-
2004
- 2004-10-28 CN CNB2004800334295A patent/CN100453817C/en not_active Expired - Fee Related
- 2004-10-28 EP EP04790966A patent/EP1706645B1/en not_active Expired - Lifetime
- 2004-10-28 WO PCT/EP2004/012196 patent/WO2005047707A1/en active Application Filing
- 2004-10-28 JP JP2006538704A patent/JP2007510853A/en active Pending
- 2004-10-28 CA CA002545566A patent/CA2545566A1/en not_active Abandoned
- 2004-10-28 US US10/578,989 patent/US20070081889A1/en not_active Abandoned
- 2004-10-28 DE DE502004008709T patent/DE502004008709D1/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101828040B (en) * | 2007-10-11 | 2012-05-30 | 厄利孔莱博尔德真空技术有限责任公司 | Multistage pump rotor for a turbomolecular pump |
| CN101392749B (en) * | 2008-10-31 | 2012-05-23 | 东北大学 | Vortex vacuum pump |
| CN102933853A (en) * | 2010-07-02 | 2013-02-13 | 埃地沃兹日本有限公司 | Vacuum pump |
| CN102933853B (en) * | 2010-07-02 | 2015-11-25 | 埃地沃兹日本有限公司 | Vacuum pump |
| US9217439B2 (en) | 2010-07-02 | 2015-12-22 | Edwards Japan Limited | Vacuum pump |
| CN103629146A (en) * | 2012-08-24 | 2014-03-12 | 株式会社岛津制作所 | Vacuum pump |
| CN103629146B (en) * | 2012-08-24 | 2016-08-10 | 株式会社岛津制作所 | Vacuum pump |
| CN110177950A (en) * | 2017-01-20 | 2019-08-27 | 爱德华兹有限公司 | Multistage turbine molecular pump with entrance between grade |
| CN110177950B (en) * | 2017-01-20 | 2021-12-28 | 爱德华兹有限公司 | Multistage turbomolecular pump with interstage inlet |
| CN108105121A (en) * | 2017-12-29 | 2018-06-01 | 东北大学 | A kind of multistage composite high vacuum dry pump |
| CN108105121B (en) * | 2017-12-29 | 2020-03-24 | 东北大学 | Multistage composite high-vacuum dry pump |
| CN112160919A (en) * | 2020-09-28 | 2021-01-01 | 东北大学 | Turbo molecular pump and composite molecular pump comprising same |
Also Published As
| Publication number | Publication date |
|---|---|
| DE10353034A1 (en) | 2005-06-09 |
| US20070081889A1 (en) | 2007-04-12 |
| CN100453817C (en) | 2009-01-21 |
| EP1706645A1 (en) | 2006-10-04 |
| EP1706645B1 (en) | 2008-12-17 |
| DE502004008709D1 (en) | 2009-01-29 |
| WO2005047707A1 (en) | 2005-05-26 |
| CA2545566A1 (en) | 2005-05-26 |
| JP2007510853A (en) | 2007-04-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090121 Termination date: 20101028 |