[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

CN1725042B - Scanning Grating Writing Method Based on Talbot Interferometer and Scanning Talbot Interferometer - Google Patents

Scanning Grating Writing Method Based on Talbot Interferometer and Scanning Talbot Interferometer Download PDF

Info

Publication number
CN1725042B
CN1725042B CN200510010888.8A CN200510010888A CN1725042B CN 1725042 B CN1725042 B CN 1725042B CN 200510010888 A CN200510010888 A CN 200510010888A CN 1725042 B CN1725042 B CN 1725042B
Authority
CN
China
Prior art keywords
translation stage
optical fiber
talbot interferometer
horizontal translation
plane mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200510010888.8A
Other languages
Chinese (zh)
Other versions
CN1725042A (en
Inventor
李川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kunming University of Science and Technology
Original Assignee
Kunming University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kunming University of Science and Technology filed Critical Kunming University of Science and Technology
Priority to CN200510010888.8A priority Critical patent/CN1725042B/en
Publication of CN1725042A publication Critical patent/CN1725042A/en
Application granted granted Critical
Publication of CN1725042B publication Critical patent/CN1725042B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)

Abstract

本发明涉及一种基于Talbot干涉仪的扫描式光栅写入方法及扫描式Talbot干涉仪,属光学技术领域。使用Talbot干涉仪,使入射光束依次经过反射、衍射、反射后,在光纤上形成干涉条纹,同时使形成的干涉条纹沿光纤水平移动,从而在光纤上扫描写入光栅。扫描式Talbot干涉仪由平面镜、水平平移台、相位掩模、零级阻断遮光板,以及垂直平移台及固定在其上的光纤组成。具有可方便地调谐写入的Bragg波长、对写入光源的脉冲能量和相干性要求低,Talbot干涉仪的平面镜的长度小等优点。The invention relates to a scanning grating writing method based on a Talbot interferometer and a scanning Talbot interferometer, belonging to the field of optical technology. Using a Talbot interferometer, the incident beam is reflected, diffracted, and reflected in sequence to form interference fringes on the optical fiber, and at the same time, the formed interference fringes are moved horizontally along the optical fiber to scan and write the grating on the optical fiber. The scanning Talbot interferometer consists of a plane mirror, a horizontal translation stage, a phase mask, a zero-order blocking mask, a vertical translation stage and an optical fiber fixed on it. It has the advantages of conveniently tuning the Bragg wavelength for writing, low requirements on the pulse energy and coherence of the writing light source, and the small length of the plane mirror of the Talbot interferometer.

Description

基于Talbot干涉仪的扫描式光栅写入法及扫描式Talbot干涉仪 Scanning Grating Writing Method Based on Talbot Interferometer and Scanning Talbot Interferometer

技术领域:本发明涉及一种基于Talbot干涉仪的扫描式光栅写入方法及扫描式Talbot干涉仪,属光学技术领域。Technical field: The present invention relates to a scanning grating writing method based on a Talbot interferometer and a scanning Talbot interferometer, belonging to the field of optical technology.

技术背景:自从1993年,K.O.Hill等人首次验证了光纤被直接放置于经相位掩模衍射而产生的紫外近场干涉区,该写入方法已广泛应用于制作光纤光栅。但在相位掩模的接触式写入法中,光纤光栅的写入Bragg波长对应于相位掩模的光栅周期,Bragg波长不能够根据需要变化。为使写入的Bragg波长能够改变并大于2nm,有一种Talbot干涉仪,通过调整平面镜的角度实现改变光纤光栅的写入波长;但这种Talbot干涉仪写入的光栅长度受限于平面镜的长度和写入光源的相干性,制作窄带宽的光栅往往需要较长的平面镜(满足紫外干涉的>60mm的平面镜难以制作),写入光栅对紫外光束的脉冲能量密度要求也高(如写制I型光栅,能量密度必须>100mJ/cm2/pulse,累积能量密度必须>500J/cm2);此外,光源的相干性对写入光栅的影响也较大。Technical background: Since 1993, KOHill et al. verified for the first time that the optical fiber was directly placed in the ultraviolet near-field interference region generated by phase mask diffraction, and this writing method has been widely used in the production of fiber gratings. However, in the contact writing method of the phase mask, the writing Bragg wavelength of the fiber grating corresponds to the grating period of the phase mask, and the Bragg wavelength cannot be changed as required. In order to change the written Bragg wavelength and be greater than 2nm, there is a Talbot interferometer, which can change the writing wavelength of the fiber grating by adjusting the angle of the plane mirror; but the length of the grating written by this Talbot interferometer is limited by the length of the plane mirror With the coherence of the writing light source, making a narrow-bandwidth grating often requires a longer plane mirror (it is difficult to make a >60mm plane mirror that satisfies ultraviolet interference), and writing a grating has high requirements for the pulse energy density of the ultraviolet beam (such as writing I type grating, the energy density must be >100mJ/cm 2 /pulse, and the cumulative energy density must be >500J/cm 2 ); in addition, the coherence of the light source also has a great influence on writing the grating.

发明内容:本发明的目的在于克服现有技术之不足,提供一种可方便地调谐写入的Bragg波长、对写入光源的脉冲能量和相干性要求低的基于Talbot干涉仪的扫描式光栅写入方法,以及用于该方法的扫描式Talbot干涉仪。Summary of the invention: The object of the present invention is to overcome the deficiencies of the prior art, to provide a scanning grating writing system based on a Talbot interferometer that can easily tune the written Bragg wavelength and have low requirements on the pulse energy and coherence of the writing light source. input method, and a scanning Talbot interferometer for this method.

本发明的技术方案是:该基于Talbot干涉仪的扫描式光栅写入方法,是使用Talbot干涉仪,使入射光束依次经过反射、衍射、反射后,在光纤上形成干涉条纹,同时使形成的干涉条纹沿光纤水平移动,从而在光纤上扫描写入光栅。The technical solution of the present invention is: the scanning grating writing method based on the Talbot interferometer is to use the Talbot interferometer to make the incident light beam undergo reflection, diffraction and reflection in sequence to form interference fringes on the optical fiber, and at the same time make the formed interference fringes The fringe is moved horizontally along the fiber, thereby scanning and writing the grating across the fiber.

采用具有水平平移台和垂直平移台结构的Talbot干涉仪,使入射光束依次通过水平平移台2上的平面镜1、支架上的相位掩模3、水平平移台2上的衍射反射镜5和6,以及遮光板4阻断相位掩模3所产生零级衍射光,进行反射、衍射、反射,在垂直平移台8上的光纤7上形成干涉条纹,同时水平移动水平平移台2,使干涉条纹沿光纤运动,在光纤上扫描写入光栅;也可使入射光束依次通过支架上的平面镜1、水平平移台2上的相位掩模3、支架上的衍射反射镜5和6,以及遮光板(4)阻断相位掩模(3)所产生零级衍射光,进行反射、衍射、反射,在固定在水平平移台2上的垂直平移台8上的光纤7上形成干涉条纹,同时水平移动水平平移台2,使干涉条纹沿光纤7运动,从而在光纤上扫描写入光栅。Using a Talbot interferometer with a horizontal translation stage and a vertical translation stage structure, the incident light beam passes through the plane mirror 1 on the horizontal translation stage 2, the phase mask 3 on the bracket, and the diffraction mirrors 5 and 6 on the horizontal translation stage 2 in sequence. And the light-shielding plate 4 blocks the zero-order diffracted light generated by the phase mask 3, performs reflection, diffraction, and reflection, and forms interference fringes on the optical fiber 7 on the vertical translation stage 8, and simultaneously moves the horizontal translation stage 2 horizontally to make the interference fringes along the The optical fiber moves, scans and writes the grating on the optical fiber; the incident light beam can also pass through the plane mirror 1 on the support, the phase mask 3 on the horizontal translation stage 2, the diffraction mirrors 5 and 6 on the support, and the shading plate (4 ) block the zero-order diffracted light generated by the phase mask (3), perform reflection, diffraction, and reflection, and form interference fringes on the optical fiber 7 on the vertical translation platform 8 fixed on the horizontal translation platform 2, and simultaneously move the horizontal translation Stage 2 moves the interference fringes along the optical fiber 7, so as to scan and write the grating on the optical fiber.

该扫描式光栅写入法所使用的扫描式Talbot干涉仪,由平面镜1、水平平移台2、相位掩模3、实现零级阻断的遮光板4、衍射反射镜5、衍射反射镜6,以及垂直平移台8及固定在其上的光纤7组成,相位掩模3位于平面镜1与衍射反射镜5、6之间,零级阻断遮光板4位于衍射反射镜5、6之间。根据扫描写入方式的需要,可采用将平面镜1、零级阻断遮光板4、衍射反射镜(平面镜)5、衍射反射镜(平面镜)6固定在水平平移台2上,相位掩模3由支架支撑,垂直平移台8与水平平移台2分离的结构,通过干涉条纹运动实现扫描式写入。也可采用将相位掩模3和垂直平移台8固定在水平平移台2上,平面镜1、衍射反射镜(平面镜)5、衍射反射镜(平面镜)6、零级阻断遮光板4由支架支撑,垂直平移台8放置于水平平移台2上的结构;水平平移台2做水平平移时,会带动垂直平移台8,从而使位于垂直平移台8上的光纤实现水平移动,实现扫描式写入。The scanning Talbot interferometer used in the scanning grating writing method consists of a plane mirror 1, a horizontal translation stage 2, a phase mask 3, a light shield 4 for zero-order blocking, a diffraction mirror 5, and a diffraction mirror 6. And the vertical translation stage 8 and the optical fiber 7 fixed on it, the phase mask 3 is located between the plane mirror 1 and the diffraction mirrors 5, 6, and the zero-order blocking light shield 4 is located between the diffraction mirrors 5, 6. According to the needs of the scanning and writing method, the plane mirror 1, the zero-order blocking light shield 4, the diffraction mirror (plane mirror) 5, and the diffraction mirror (plane mirror) 6 can be fixed on the horizontal translation stage 2, and the phase mask 3 is formed by Supported by the bracket, the vertical translation stage 8 is separated from the horizontal translation stage 2, and scanning writing is realized through interference fringe movement. It is also possible to fix the phase mask 3 and the vertical translation stage 8 on the horizontal translation stage 2, and the plane mirror 1, the diffraction mirror (plane mirror) 5, the diffraction mirror (plane mirror) 6, and the zero-order blocking shading plate 4 are supported by the bracket , the structure in which the vertical translation platform 8 is placed on the horizontal translation platform 2; when the horizontal translation platform 2 performs horizontal translation, it will drive the vertical translation platform 8, so that the optical fiber on the vertical translation platform 8 can move horizontally and realize scanning writing .

在该扫描式Talbot干涉仪中,5、6两个平面镜(衍射反射镜)的转动对改变光纤光栅的写入Bragg波长起着决定作用。根据反射原理,当反射平面镜的角度变化δ时,反射光束的方向变化Δ等于2δ。因此,当两平面镜相向旋转δ时,在给定Bragg条件下,Bragg响应波长为:In the scanning Talbot interferometer, the rotation of the two plane mirrors (diffraction mirrors) 5 and 6 plays a decisive role in changing the Bragg wavelength written in the fiber grating. According to the principle of reflection, when the angle of the reflective plane mirror changes δ, the direction of the reflected beam changes Δ equal to 2δ. Therefore, when the two plane mirrors rotate δ towards each other, under the given Bragg condition, the Bragg response wavelength is:

λλ BB == 22 nno effeff ΛΛ == nno effeff λλ uvuv sinsin (( θθ // 22 ++ 22 δδ )) -- -- -- (( 11 ))

同时,若5、6两平面镜(衍射反射镜)的旋转轴与入射的±1级衍射光束的重合,则两写入干涉光束的干涉区的菱脊将移动到:At the same time, if the rotation axes of the two plane mirrors (diffraction mirrors) of 5 and 6 coincide with the incident ±1st-order diffracted beams, the ridges of the interference area of the two writing interference beams will move to:

ΔL=(Ws/2)[cot(θ/2+2δ)-cot(θ/2)]      (2)ΔL=(W s /2)[cot(θ/2+2δ)-cot(θ/2)] (2)

因此,当扫描式Talbot干涉仪用于调谐写入光栅Bragg波长时,只要放置光纤的平移台8应作相应的平移就能使得待写光纤位于写入干涉区,即在光纤中写入光栅。Therefore, when the scanning Talbot interferometer is used to tune the Bragg wavelength of the writing grating, as long as the translation stage 8 on which the optical fiber is placed should be translated accordingly, the optical fiber to be written can be located in the writing interference area, that is, the grating is written in the optical fiber.

本发明由于采用了可方便调节的运动结构和扫瞄式写入方式,因而较具有如下优点:Since the present invention adopts a conveniently adjustable movement structure and a scanning writing method, it has the following advantages:

1、能够根据需要方便地调节写入光栅Bragg的波长,且写入光栅的长度范围宽;1. The wavelength of the written grating Bragg can be easily adjusted according to the needs, and the length range of the written grating is wide;

2、大大减小了Talbot干涉仪中平面镜的长度,对平面镜的尺寸要求仅需大于激光光斑的大小(>1mm);2. The length of the plane mirror in the Talbot interferometer is greatly reduced, and the size of the plane mirror only needs to be larger than the size of the laser spot (> 1mm);

3、对光源相干长度的要求显著降低,降低了对写入光源相干性的要求;3. The requirements for the coherence length of the light source are significantly reduced, and the requirements for the coherence of the written light source are reduced;

4、显著降低了对激光脉冲能量的要求。4. Significantly reduces the requirement for laser pulse energy.

附图说明:下面结合附图和实施例对本发明作进一步说明。BRIEF DESCRIPTION OF THE DRAWINGS: The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

图1为本发明干涉条纹运动型结构示意图,Fig. 1 is a schematic diagram of the structure of the interference fringe movement of the present invention,

图2为本发明光纤运动型结构示意图,Fig. 2 is a schematic diagram of the optical fiber movement structure of the present invention,

图3为本发明Bragg波长随平面镜旋转的角度变化的曲线图,Fig. 3 is the graph that Bragg wavelength of the present invention changes with the angle of plane mirror rotation,

图4为本发明两写入干涉光束的干涉区的菱脊移动随平面镜旋转的角度变化的曲线图。FIG. 4 is a graph showing the movement of the ridges in the interference region of the two writing interference beams as a function of the rotation angle of the plane mirror according to the present invention.

具体实施方式:Detailed ways:

例1:该基于Talbot干涉仪的扫描式光栅写入方法,是使用Talbot干涉仪,使入射光束依次经过反射、衍射、反射后,在光纤上形成干涉条纹,同时使形成的干涉条纹沿光纤水平移动,从而在光纤上扫描写入光栅。采用具有水平平移台和垂直平移台结构的Talbot干涉仪,使入射光束依次通过水平平移台上的平面镜、支架上的相位掩模、水平平移台上的衍射反射镜,以及插入遮光板4对相位掩模3产生的零级衍射光进行阻断,进行反射、衍射、反射,在垂直平移台上的光纤上形成干涉条纹,同时水平移动水平平移台,使干涉条纹沿光纤运动,在光纤上扫描写入光栅。Example 1: The scanning grating writing method based on the Talbot interferometer is to use the Talbot interferometer to make the incident beam undergo reflection, diffraction and reflection in sequence to form interference fringes on the optical fiber, and at the same time make the formed interference fringes along the horizontal direction of the optical fiber Move to scan and write the grating on the fiber. Using a Talbot interferometer with a horizontal translation stage and a vertical translation stage structure, the incident light beam passes through the plane mirror on the horizontal translation stage, the phase mask on the bracket, the diffraction mirror on the horizontal translation stage, and 4 pairs of phases inserted into the light shield The zero-order diffracted light generated by the mask 3 is blocked, reflected, diffracted, and reflected to form interference fringes on the optical fiber on the vertical translation stage, and at the same time move the horizontal translation stage horizontally to make the interference fringes move along the optical fiber and scan on the optical fiber Write raster.

如图1所示,该扫描式光栅写入法所使用的扫描式Talbot干涉仪,由平面镜1、水平平移台2、相位掩模3、零级阻断遮光板4、衍射反射镜5和6,以及垂直平移台8及固定在其上的光纤7组成。平面镜1、零级阻断遮光板4、衍射反射镜(平面镜)5和6固定在水平平移台2上,相位掩模3由支架支撑,相位掩模3位于平面镜1与衍射反射镜5、6之间,零级阻断遮光板4位于衍射反射镜5、6之间,垂直平移台8与水平平移台2分离。As shown in Figure 1, the scanning Talbot interferometer used in the scanning grating writing method consists of a plane mirror 1, a horizontal translation stage 2, a phase mask 3, a zero-order blocking light shield 4, and diffraction mirrors 5 and 6 , and a vertical translation stage 8 and an optical fiber 7 fixed thereon. The plane mirror 1, the zero-order blocking shading plate 4, the diffraction mirrors (plane mirrors) 5 and 6 are fixed on the horizontal translation stage 2, the phase mask 3 is supported by a bracket, and the phase mask 3 is located between the plane mirror 1 and the diffraction mirrors 5 and 6 Between them, the zero-order blocking shading plate 4 is located between the diffractive mirrors 5 and 6, and the vertical translation stage 8 is separated from the horizontal translation stage 2.

工作时,通过水平平移台2同时带动其上起反射入射光束作用的平面镜1,和起反射±1级衍射光作用的两个平面镜5、6在水平方向做平移,使干涉条纹沿光纤7运动,从而扫描写入光栅。When working, the plane mirror 1 which reflects the incident beam and the two plane mirrors 5 and 6 which reflect the ±1st-order diffracted light are simultaneously driven by the horizontal translation platform 2 to move in the horizontal direction, so that the interference fringes move along the optical fiber 7 , thus scanning and writing the raster.

例2:该基于Talbot干涉仪的扫描式光栅写入方法,是使用Talbot干涉仪,使入射光束依次经过反射、衍射、反射后,在光纤上形成干涉条纹,同时使形成的干涉条纹沿光纤水平移动,从而在光纤上扫描写入光栅。采用具有水平平移台和垂直平移台结构的Talbot干涉仪,使入射光束依次通过支架上的平面镜、水平平移台上的相位掩模、支架上的衍射反射镜,以及插入遮光板对相位掩模产生的零级衍射光进行阻断,进行反射、衍射、反射,在固定在水平平移台上的垂直平移台上的光纤上形成干涉条纹,同时水平移动水平平移台,使干涉条纹沿光纤运动,在光纤上扫描写入光栅。Example 2: The scanning grating writing method based on the Talbot interferometer is to use the Talbot interferometer to make the incident light beam undergo reflection, diffraction and reflection in sequence to form interference fringes on the optical fiber, and at the same time make the formed interference fringes along the horizontal direction of the optical fiber Move to scan and write the grating on the fiber. A Talbot interferometer with a horizontal translation stage and a vertical translation stage structure is used to make the incident beam pass through the plane mirror on the support, the phase mask on the horizontal translation stage, the diffraction mirror on the support, and insert the light shield to generate the phase mask. The zero-order diffracted light is blocked, reflected, diffracted, and reflected, and interference fringes are formed on the optical fiber fixed on the vertical translation stage on the horizontal translation stage. At the same time, the horizontal translation stage is moved horizontally to make the interference fringes move along the optical fiber. Scanning write gratings on fiber optics.

如图2所示,该扫描式光栅写入法所使用的扫描式Talbot干涉仪,由平面镜1、水平平移台2、相位掩模3、零级阻断遮光板4、衍射反射镜5和6,以及垂直平移台8及固定在其上的光纤7组成。相位掩模3和垂直平移台8固定在水平平移台2上,平面镜1、衍射反射镜(平面镜)5和6、零级阻断遮光板4由支架支撑,相位掩模3位于平面镜1与衍射反射镜5、6之间,零级阻断遮光板4位于衍射反射镜5、6之间,垂直平移台8放置于水平平移台2上。As shown in Figure 2, the scanning Talbot interferometer used in the scanning grating writing method consists of a plane mirror 1, a horizontal translation stage 2, a phase mask 3, a zero-order blocking light shield 4, and diffraction mirrors 5 and 6 , and a vertical translation stage 8 and an optical fiber 7 fixed thereon. The phase mask 3 and the vertical translation stage 8 are fixed on the horizontal translation stage 2, the plane mirror 1, the diffraction mirrors (plane mirrors) 5 and 6, and the zero-order blocking light shield 4 are supported by the bracket, and the phase mask 3 is located between the plane mirror 1 and the diffraction Between the mirrors 5 and 6 , the zero-order blocking shading plate 4 is located between the diffractive mirrors 5 and 6 , and the vertical translation stage 8 is placed on the horizontal translation stage 2 .

工作时,通过水平平移台2同时带动其上起衍射作用的相位掩模3,和待写入光栅的光纤7在水平方向做平移,使光纤沿干涉条纹运动,从而扫描写入光栅。When working, the horizontal translation stage 2 simultaneously drives the phase mask 3 on which the diffraction function is performed, and the optical fiber 7 to be written in the grating is translated in the horizontal direction, so that the optical fiber moves along the interference fringes, thereby scanning and writing the grating.

在该改变写入Bragg波长的扫描式Talbot干涉仪中,相位掩模的光栅周期Δpm是1084nm,当若紫外写入光束的波长λuv是248nm时,则±1级衍射光的衍射角θ/2=13.225°;两平面镜之间的间距Ws为10mm,作为公式(2)的结果,相位模板到写入干涉区的距离L为42.6mm;在光纤的纤芯中,有效反射率neff是1.46。In the scanning Talbot interferometer that changes the writing Bragg wavelength, the grating period Δpm of the phase mask is 1084nm, when the wavelength λuv of the ultraviolet writing beam is 248nm, the diffraction angle θ of the ±1st order diffracted light /2=13.225°; the distance W s between the two plane mirrors is 10mm, as a result of formula (2), the distance L from the phase template to the writing interference area is 42.6mm; in the core of the optical fiber, the effective reflectivity n eff is 1.46.

将上述数据代入公式(1),可得表示Bragg波长与5、6两平面镜角度变化关系的图3。与此同时,放置光纤的平移台8应按式(2)的规律进行平移才能使得待写光纤位于写入干涉区,两写入干涉光束的干涉区的菱脊移动随平面镜旋转的角度变化的曲线见图4。Substituting the above data into formula (1), we can get Figure 3, which shows the relationship between the Bragg wavelength and the angle change of the 5 and 6 plane mirrors. At the same time, the translation stage 8 on which the optical fiber is placed should be translated according to the rule of formula (2) so that the optical fiber to be written is located in the writing interference area, and the movement of the rhombic ridges in the interference area of the two writing interference beams varies with the angle of rotation of the plane mirror The curve is shown in Figure 4.

Claims (4)

1.一种基于Talbot干涉仪的扫描式光栅写入方法,其特征在于采用具有水平平移台(2)和垂直平移台(8)结构的Talbot干涉仪,使入射光束依次通过水平平移台上的平面镜(1)、支架上的相位掩模(3)、水平平移台上的两衍射反射镜(5、6),以及遮光板(4)阻断相位掩模(3)所产生零级衍射光,进行反射、衍射、反射,在垂直平移台(8)上的光纤(7)上形成干涉条纹,同时水平移动水平平移台(2),使干涉条纹沿光纤运动,从而在光纤上扫描写入光栅。1. a scanning type grating writing method based on Talbot interferometer, it is characterized in that adopting the Talbot interferometer with horizontal translation platform (2) and vertical translation platform (8) structure, incident light beam is passed through on the horizontal translation platform successively The plane mirror (1), the phase mask (3) on the bracket, the two diffraction mirrors (5, 6) on the horizontal translation stage, and the light shield (4) block the zero-order diffracted light generated by the phase mask (3) , perform reflection, diffraction, and reflection, and form interference fringes on the optical fiber (7) on the vertical translation stage (8), and move the horizontal translation stage (2) horizontally at the same time, so that the interference fringes move along the optical fiber, thereby scanning and writing on the optical fiber raster. 2.一种基于Talbot干涉仪的扫描式光栅写入方法,其特征在于采用具有水平平移台(2)和垂直平移台(8)结构的Talbot干涉仪,使入射光束依次通过支架上的平面镜(1)、水平平移台上的相位掩模(3)、支架支撑的两衍射反射镜(5、6),以及遮光板(4)阻断相位掩模(3)所产生零级衍射光,进行反射、衍射、反射,在固定在水平平移台上的垂直平移台(8)中的光纤(7)上形成干涉条纹,同时水平移动水平平移台(2),使干涉条纹沿光纤运动,从而在光纤上扫描写入光栅。2. a scanning type grating writing method based on Talbot interferometer, it is characterized in that adopting the Talbot interferometer with horizontal translation platform (2) and vertical translation platform (8) structure, incident light beam is passed through the plane mirror on the support successively ( 1), the phase mask (3) on the horizontal translation stage, the two diffraction mirrors (5, 6) supported by the bracket, and the light shield (4) block the zero-order diffracted light generated by the phase mask (3), and carry out Reflection, diffraction, reflection, form interference fringes on the optical fiber (7) in the vertical translation stage (8) fixed on the horizontal translation stage, and move the horizontal translation stage (2) horizontally at the same time, so that the interference fringes move along the optical fiber, thus in Scanning write gratings on fiber optics. 3.一种权利要求1所述扫描式光栅写入法用扫描式Talbot干涉仪,其特征在于它由平面镜(1)、水平平移台(2)、相位掩模(3)、零级阻断遮光板(4)、两衍射反射镜(5、6),以及垂直平移台(8)及固定在其上的光纤(7)和支架组成,平面镜(1)、零级阻断遮光板(4)、两衍射反射镜(5、6)固定在水平平移台(2)上,相位掩模(3)由支架支撑,相位掩模(3)位于平面镜(1)与两衍射反射镜(5、6)之间,零级阻断遮光板(4)位于两衍射反射镜(5、6)之间,垂直平移台(8)与水平平移台(2)分离,水平平移台(2)能完成左右水平自由移动,垂直平移台(8)能完成上下自由移动。3. a scanning type Talbot interferometer for the scanning type grating writing method described in claim 1 is characterized in that it is made of plane mirror (1), horizontal translation stage (2), phase mask (3), zero order blocking The shading plate (4), two diffraction mirrors (5, 6), and the vertical translation stage (8) and the optical fiber (7) fixed on it and the bracket are composed of a plane mirror (1), a zero-order blocking shading plate (4 ), two diffraction mirrors (5, 6) are fixed on the horizontal translation platform (2), the phase mask (3) is supported by a bracket, and the phase mask (3) is located between the plane mirror (1) and the two diffraction mirrors (5, 6), the zero-order blocking shading plate (4) is located between the two diffractive mirrors (5, 6), the vertical translation stage (8) is separated from the horizontal translation stage (2), and the horizontal translation stage (2) can complete Left and right can move freely horizontally, and the vertical translation platform (8) can complete free movement up and down. 4.根据权利要求2所述的扫描式光栅写入法用扫描式Talbot干涉仪,其特征在于它由平面镜(1)、水平平移台(2)、相位掩模(3)、零级阻断遮光板(4)、两衍射反射镜(5、6),以及垂直平移台(8)及固定在其上的光纤(7)和支架组成,将相位掩模(3)和垂直平移台(8)固定在水平平移台(2)上,平面镜(1)、两衍射反射镜(5、6)、零级阻断遮光板(4)由支架支撑,相位掩模(3)位于平面镜(1)与两衍射反射镜(5、6)之间,零级阻断遮光板(4)位于两衍射反射镜(5、6)之间,垂直平移台(8)放置于水平平移台(2)上。4. the scanning type grating writing method according to claim 2 uses scanning type Talbot interferometer, it is characterized in that it is made of plane mirror (1), horizontal translation stage (2), phase mask (3), zero-order blocking The light shielding plate (4), two diffractive mirrors (5, 6), and the vertical translation stage (8) and the optical fiber (7) fixed on it and the bracket are composed, and the phase mask (3) and the vertical translation stage (8 ) is fixed on the horizontal translation platform (2), the plane mirror (1), two diffractive mirrors (5, 6), and the zero-order blocking light shield (4) are supported by the bracket, and the phase mask (3) is located on the plane mirror (1) Between the two diffractive mirrors (5, 6), the zero-order blocking shading plate (4) is located between the two diffractive mirrors (5, 6), and the vertical translation stage (8) is placed on the horizontal translation stage (2) .
CN200510010888.8A 2005-06-30 2005-06-30 Scanning Grating Writing Method Based on Talbot Interferometer and Scanning Talbot Interferometer Expired - Fee Related CN1725042B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200510010888.8A CN1725042B (en) 2005-06-30 2005-06-30 Scanning Grating Writing Method Based on Talbot Interferometer and Scanning Talbot Interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200510010888.8A CN1725042B (en) 2005-06-30 2005-06-30 Scanning Grating Writing Method Based on Talbot Interferometer and Scanning Talbot Interferometer

Publications (2)

Publication Number Publication Date
CN1725042A CN1725042A (en) 2006-01-25
CN1725042B true CN1725042B (en) 2010-11-24

Family

ID=35924593

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200510010888.8A Expired - Fee Related CN1725042B (en) 2005-06-30 2005-06-30 Scanning Grating Writing Method Based on Talbot Interferometer and Scanning Talbot Interferometer

Country Status (1)

Country Link
CN (1) CN1725042B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2828253C1 (en) * 2024-03-21 2024-10-08 Открытое Акционерное Общество "Российские Железные Дороги" Device for forming fibre bragg grating with possibility of tuning reflection wavelength

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8384997B2 (en) 2008-01-21 2013-02-26 Primesense Ltd Optical pattern projection
EP2235584B1 (en) 2008-01-21 2020-09-16 Apple Inc. Optical designs for zero order reduction
JP5588310B2 (en) 2009-11-15 2014-09-10 プライムセンス リミテッド Optical projector with beam monitor
US20110187878A1 (en) 2010-02-02 2011-08-04 Primesense Ltd. Synchronization of projected illumination with rolling shutter of image sensor
US9036158B2 (en) 2010-08-11 2015-05-19 Apple Inc. Pattern projector
CN103053167B (en) 2010-08-11 2016-01-20 苹果公司 Scanning projector and the image capture module mapped for 3D
EP2643659B1 (en) 2010-11-19 2019-12-25 Apple Inc. Depth mapping using time-coded illumination
US9131136B2 (en) 2010-12-06 2015-09-08 Apple Inc. Lens arrays for pattern projection and imaging
US8908277B2 (en) 2011-08-09 2014-12-09 Apple Inc Lens array projector
US8749796B2 (en) 2011-08-09 2014-06-10 Primesense Ltd. Projectors of structured light
CN104221059B (en) 2012-03-22 2017-05-10 苹果公司 Diffraction-based sensing of mirror position
US9528906B1 (en) 2013-12-19 2016-12-27 Apple Inc. Monitoring DOE performance using total internal reflection
US10012831B2 (en) 2015-08-03 2018-07-03 Apple Inc. Optical monitoring of scan parameters
US10073004B2 (en) 2016-09-19 2018-09-11 Apple Inc. DOE defect monitoring utilizing total internal reflection
US11422292B1 (en) 2018-06-10 2022-08-23 Apple Inc. Super-blazed diffractive optical elements with sub-wavelength structures
US12124170B2 (en) * 2019-03-27 2024-10-22 Eulitha Ag Method and apparatus for printing a periodic pattern with a varying duty cycle
US11681019B2 (en) 2019-09-18 2023-06-20 Apple Inc. Optical module with stray light baffle
US11506762B1 (en) 2019-09-24 2022-11-22 Apple Inc. Optical module comprising an optical waveguide with reference light path
US11754767B1 (en) 2020-03-05 2023-09-12 Apple Inc. Display with overlaid waveguide
CN111584408B (en) * 2020-06-01 2021-01-12 广东工业大学 Micro-LED bulk transfer device and method based on phase mask interference
WO2022197339A1 (en) 2021-03-17 2022-09-22 Apple Inc. Waveguide-based transmitters with adjustable lighting

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2828253C1 (en) * 2024-03-21 2024-10-08 Открытое Акционерное Общество "Российские Железные Дороги" Device for forming fibre bragg grating with possibility of tuning reflection wavelength

Also Published As

Publication number Publication date
CN1725042A (en) 2006-01-25

Similar Documents

Publication Publication Date Title
CN1725042B (en) Scanning Grating Writing Method Based on Talbot Interferometer and Scanning Talbot Interferometer
JP4512266B2 (en) Optical grating manufacturing apparatus and manufacturing method
US6548225B1 (en) Method and apparatus for writing gratings
JPH1054914A (en) Method for forming grating at optical waveguide
JP2002529762A (en) Wavelength tuning of light-induced diffraction grating
CN104765099A (en) Device and method for inscribing fiber period adjustable fiber grating
CN103698836B (en) The method in accurate adjustment interference fringe direction in scan exposure light path
KR20060015415A (en) Writing of photo-induced structures
WO2022001436A1 (en) Fiber grating inscribing apparatus and fiber grating inscribing method
US8828624B2 (en) Method and device for fabricating volume Bragg gratings
JP2008191004A (en) Encoder
AU711106B2 (en) Ring interferometer configuration for writing gratings
US6633385B2 (en) System and method for recording interference fringes in a photosensitive medium
EP2606541A1 (en) Method and device for fabricating volume bragg gratings
CN112558216A (en) Reflection compensation type high-density multi-core fiber grating preparation system
JP2001154040A (en) Method and apparatus for manufacturing optical waveguide type diffraction grating
US6778733B2 (en) Lithographic fabrication of phase mask for fiber Bragg gratings
CN115793117A (en) Holographic exposure optical path system for manufacturing reflective volume Bragg grating and writing method thereof
KR100639038B1 (en) Bragg Grating Forming Apparatus and Reflective Units Used Therein
JP2002214455A (en) Phase grating mask, method of manufacturing optical waveguide type diffraction grating element, and optical waveguide type diffraction grating element
Smith et al. Demonstration of inscription and ablation of phase masks for the production of 1st, 2nd, and 3rd order FBG gratings using a femtosecond laser
US20080094711A1 (en) Methods and apparatus for recording holographic gratings
JP4543128B2 (en) Manufacturing method and manufacturing apparatus for optical waveguide Bragg grating
JPH08286009A (en) Chirp grid forming device
US20020135833A1 (en) Method and apparatus for increasing the effective efficiency of holograms

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20101124

Termination date: 20110630