CN1799133A - Hermetically sealed product and related methods of manufacture - Google Patents
Hermetically sealed product and related methods of manufacture Download PDFInfo
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- CN1799133A CN1799133A CN 200480015220 CN200480015220A CN1799133A CN 1799133 A CN1799133 A CN 1799133A CN 200480015220 CN200480015220 CN 200480015220 CN 200480015220 A CN200480015220 A CN 200480015220A CN 1799133 A CN1799133 A CN 1799133A
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Abstract
Embodiments of the invention include a method for sealing a container. The method includes, providing at least two components of the container, positioning a crushable material between the at least two components, positioning a reactive multilayer material between the at least two components, deforming the crushable material so as to form a seal between the at least two components, chemically transforming the reactive multilayer material so as to join the at least two components.
Description
Technical field
The present invention includes by using deformable material to be connected material sealed package element airtightly with reactive (reactive) multilayer.Reactive multilayer connects material can comprise reactive multilayer paper tinsel and fusible material (fusible material).
Background technology
Gas-tight seal is used to protect many sensitive device, makes it to avoid being exposed to hostile environment and damaged.The example of this sensitive device comprises optics, photonic device, optical fiber, MEMS and biomedical articles.Usually, realize sealing in the airtight encapsulation, effectively element and environment are isolated by sensor is enclosed in.
The straightforward procedure that is used to seal sensitive device and element exists multiple.In these methods, use bonding agent, epoxy resin and machanical fastener.But all there is the shortcoming that hinders effective sealing in each of these methods.For example, in the time of in being exposed to heat and moisture, bonding agent and epoxy resin can wear out.In another example, strict machining tolerance of machanical fastener and reliability lower (that is, not providing fully airtight encapsulation) potentially.
For high-end applications, preferred encapsulating method comprises laser welding, electron beam welding and thermistor welding.When careful application, stronger, airtight substantially, welding uniformly that these methods can obtain, thus very effectively breakthrough rate is restricted to very little value.But these methods are defectiveness also.For example, realize that these methods need strict tolerance and fund cost very high.Other defective comprises needs surface treatment (for example, after the enforcement encapsulation process, encapsulation is polished and machining), and encapsulation process causes fire damage to the encapsulating material that connects, even under extreme case, causes encapsulating and be arranged on the possibility of the loss of element wherein.Therefore, need be used for sealing airtightly the improved more effective device of sensor and device.
A kind of the improving one's methods that is used for sealing airtightly sensor and device is that reactive multilayer is connected.It is newer interconnection technique relatively that reactive multilayer connects, and it then, lights paper tinsel based on the reactive multilayer paper tinsel being clipped between two-layer fusible material and two elements that will connect.Lighting of paper tinsel starts self propagation (self-propagating) reaction, and it causes the temperature of reactive foil to raise rapidly.The heat fusing fusible-material layers that reaction discharges, and when cooling, two elements are bonded together.
Reactive multilayer connect known for a long time.This technology is in U.S. Patent No. 5,381, has a detailed description in 944, and the full content of this application is incorporated herein by reference at this.The U.S. Provisional Patent Application No.60/201 that submits on May 2nd, 2000, be entitled as " Reactive Joining Using Multilayer Materials (using the reactivity of multilayer material to connect) ", disclose in 292 for U.S. Patent No. 5,381, several improvement of the technology in 944, the full content of this application is incorporated herein by reference at this.Connecting the reactive multilayer that uses in the technology in reactivity is nano structural material, it generally makes formation by the hundreds of nano level layer of gas deposition, these nano level layers have bigger mixing negative reaction heat such as the element of Ni and Al between alternately.Various being implemented in following the disclosing of these methods discloses, and it all is incorporated herein by reference at this: U.S. Patent number No.5,538,795; U.S. Patent number No.5,547,715; The article of " Deposition and Characterization of aself-Propagating CuOx/Al Thermite Reaction in Multilayer Foil Geometry (deposition and the sign of self propagation CuOx/Al thermit reaction in the multilayer paper tinsel geometry) " is rolled up, is entitled as to " Applied Physics (Applied Physics) " magazine 94 (5) of publishing on September 1st, 2003; The U.S. Patent application No.09/846 that submit to May 1 calendar year 2001,486 (U.S. Patent application No.20020182436); Article with being entitled as in 1998 versions of " the Handbook of Thin Film ProcessTechnology (film treatment technology handbook) " that edit by D.A.Glocker and S.l.Shah " Self-PropagatingReactions in Multilayer Materials (the self propagation reaction in the multilayer material) ".Other method that is used to make the nanostructure reactive multilayer comprises U.S. Patent No. 6,543, machine work (full content of this application is incorporated herein by reference at this) and the electrochemical deposition described in 194.
But the sealed package that connects with reactive multilayer can not be produced has the required encapsulation of accepting low seepage speed of high-end element.This failure can be traced to two kinds of known effects: (i) because the densification of the reactive foil that causes of reaction and the (ii) contraction of paper tinsel during cooling from the reaction temperature to the room temperature.These two kinds of effects cause forming the crack along paper tinsel, and these cracks use slicken solder (molten solder) or brazing (braze) to fill subsequently.As a result, reactive syndeton is made of the fragile material (through the paper tinsel of reaction) with ductile scolder or the sealing of brazing dot matrix.Although this result that can confirm with light microscope is essential for forming strong connection of machinery, but because does not fill with fusible material fully in some cracks that form in reaction, so sealing may be lost efficacy, and perhaps can not realize the breakthrough rate of target.Therefore, reactive at present the connection do not provide the suitable device that can form high-end hermetic consistently.
Summary of the invention
Embodiments of the invention comprise the method that is used for airtight container.This method comprises: at least two elements that described container is provided; But between described two elements, settle crushable material (crushablematerial) at least; Between described two elements, settle the reactive multilayer material at least; But make described crushable material distortion, thereby between described two elements, form sealing at least; With the described reactive multilayer material of chemical transformation, thereby connect described at least two elements.
In various embodiments, the present invention can comprise one or more in the following feature: settle fusible material between described at least two elements; The step of described chemical transformation reactive multilayer material can comprise the described fusible material of transformation, thereby connects described at least two elements; Described reactive multilayer material can comprise the reactive multilayer paper tinsel; Described reactive multilayer material can comprise fusible material; Described sealing can be gas-tight seal; The step of described chemical transformation reactive multilayer material can form another sealing at least between described two elements; Described another sealing can be gas-tight seal; But the described step that makes crushable material distortion can comprise in described at least two elements at least one and apply power; Determine the quality of described sealing; The step of the quality of described definite sealing can comprise the breakthrough rate of determining described sealing; The predetermined quality parameter of described sealing is provided; The step of the quality of described definite sealing can comprise that the quality of determining described sealing is whether in described predetermined quality parameter; The step of described chemical transformation reactive multilayer material can comprise at least a portion of lighting described reactive multilayer material; But the described step of crushable material distortion that makes can separate described internal tank and external environment condition sealing; Can select described reactive multilayer material based on the expectation strength of described sealing; But permanent deformation can take place in described crushable material; But reversible deformation can take place in described crushable material; But described crushable material can comprise the soft metal; But described crushable material can comprise in copper, gold, aluminium, stainless steel, Kovar alloy and the slicken solder at least one; But described crushable material can comprise compressible polymer; But described crushable material can comprise in buna, silicon rubber and the fluorubber at least one; But described crushable material external environment condition relatively is positioned at the inboard of described reactive multilayer material; One groove is set at least on one of described two elements; But the step of described arrangement crushable material can comprise but described crushable material is placed in the described groove; One projection is set at least on one of described two elements; But the described step that makes crushable material distortion can comprise but described crushable material is out of shape against described projection; On another of described at least two elements, another projection is set; But the described step that makes crushable material distortion can comprise but described crushable material is out of shape against described another projection; One groove is set at least on one of described two elements; But the described step of crushable material distortion that makes can comprise that but described crushable material is out of shape enters described groove; One bight is set at least on one of described two elements; But the step of described arrangement crushable material can comprise but described crushable material is placed on the described bight; One bight is set at least on one of described two elements; But the described step of crushable material distortion that makes comprises that but described crushable material is out of shape enters described bight; One in described at least two elements can be a lid, and in described at least two elements another can be a container body.
Another embodiment of the present invention comprises a kind of sealed product.The sealing product comprises: at least two elements that limit a container; But be arranged on the crushable material between described at least two elements, but should crushable material be in deformation state, and between described two elements, form a sealing at least; And be arranged between described at least two elements and connect the residue of chemical transformation of the reactive multilayer material of described at least two elements.
In various embodiments, the present invention can comprise one or more in the following feature: described reactive multilayer material can comprise the reactive multilayer paper tinsel; Described reactive multilayer material can comprise fusible material; Described fusible material can connect described at least two elements; Can between described at least two elements, fusible material be set; But described crushable material can be positioned at the inboard of residue of the chemical transformation of described reactive multilayer material; But the residue of described crushable material and described chemical transformation can acting in conjunction between described two elements, to form a gas-tight seal at least; But permanent deformation can take place in described crushable material; But reversible deformation can take place in described crushable material; But described crushable material can comprise the soft metal; But described crushable material can comprise in copper, gold, aluminium, stainless steel, Kovar alloy and the slicken solder at least one; But described crushable material can comprise compressible polymer; But described crushable material can comprise in buna, silicon rubber and the fluorubber at least one; But described crushable material can be at least partially disposed in the groove of one of described two elements at least; But described crushable material can be at least partially disposed in described two elements in another another groove at least; But described crushable material can be facing to the projection setting on one of described at least two elements; But described crushable material can be provided with facing to another projection on another of described two elements at least; But described crushable material can be arranged on the bight of one of described two elements at least; One in described at least two elements can be a lid, and in described at least two elements another can be a container body.
An alternative embodiment of the invention comprises a kind of complete utensil that is used to form airtight container.This complete utensil comprises: at least two elements that limit described container when being connected; But be configured to the crushable material between described at least two elements; Be configured to the reactive multilayer material between described at least two elements.But the described crushable material of deformation state is used for fully forming a sealing between described at least two elements.At least a portion of described reactive multilayer material is by chemical transformation, to connect described at least two elements.
In various embodiments, the present invention can comprise one or more in the following feature: described reactive multilayer material can comprise the reactive multilayer paper tinsel; Described reactive multilayer material can comprise fusible material; Described fusible material can connect described at least two elements; Can between described at least two elements, fusible material be set; But described crushable material can be positioned at the inboard of residue of the chemical transformation of described reactive multilayer material; But the residue of described crushable material and described chemical transformation can acting in conjunction between described two elements, to form a gas-tight seal at least; But permanent deformation can take place in described crushable material; But reversible deformation can take place in described crushable material; But described crushable material can comprise the soft metal; But described crushable material can comprise in copper, gold, aluminium, stainless steel, Kovar alloy and the slicken solder at least one; But described crushable material can comprise compressible polymer; But described crushable material can comprise in buna, silicon rubber and the fluorubber at least one; But one in described at least two elements can comprise a groove that receives described crushable material at least in part; But another in described at least two elements can comprise another groove that receives described crushable material at least in part; But one in described at least two elements can comprise a projection that is provided with facing to described crushable material; But another in described at least two elements can comprise another projection that is provided with facing to described crushable material; But one in described at least two elements can comprise a bight that receives described crushable material; One in described at least two elements can be a lid, and in described at least two elements another can be a container body.
An alternative embodiment of the invention comprises a kind of sealing test device.The sealing testing apparatus comprises: a chamber; One is used for the apparatus of exerting pressure to a container that is arranged on described chamber; One port that is used to provide gas and discharges gas from described chamber; One is used to start the trigger of the chemical transformation of described reactive multilayer material; With a leak detector that is used to detect from the seepage of described container.
In various embodiments, the present invention can comprise one or more in the following feature: described reactive multilayer material can be the reactive multilayer paper tinsel; Described apparatus can be a push rod; Described chamber can be a vacuum chamber; Described port can be used for forming vacuum at described chamber; Described port can be connected to a source of the gas; Described port can be connected to a vacuum source.
Should be appreciated that above general introduction and the following detailed description only are exemplary with illustrative, and claimed the present invention is not had restriction.
Be combined in accompanying drawing interior and that constitute this specification part and show one (several) embodiment of the present invention, itself and specification one are used from sets forth principle of the present invention.
Description of drawings
Figure 1A-1B is the different schematic diagrames of the element of the part of sealed product and sealed product according to another embodiment of the present invention;
Fig. 2 A-2B is the different schematic diagrames of the element of the part of sealed product and sealed product according to another embodiment of the present invention;
Fig. 3 A-3B is the different schematic diagrames of element of the part of the sealed product of another the embodiment according to the present invention and sealed product;
Fig. 4 A-4B is the different schematic diagrames of element of the part of the sealed product of another the embodiment according to the present invention and sealed product;
Fig. 4 C is the schematic diagram of the part of the sealed product of another embodiment according to the present invention;
Fig. 4 D is the schematic diagram of the part of the sealed product of another embodiment according to the present invention;
Fig. 5 A-5B is the different schematic diagrames of the element of the part of sealed product and sealed product according to another embodiment of the present invention;
Fig. 6 A-6B is the different schematic diagrames of the element of the part of sealed product and sealed product according to another embodiment of the present invention;
Fig. 7 A-7B is the different schematic diagrames of element of the part of the sealed product of another the embodiment according to the present invention and sealed product;
Fig. 7 C-7D is the different schematic diagrames of the element of the part of sealed product and sealed product according to another embodiment of the present invention;
Fig. 8 is the schematic diagram of sealing test device according to another embodiment of the present invention.
Embodiment
Referring now to illustrated example in the accompanying drawing, explain exemplary embodiment of the present invention in detail.As possible, identical Reference numeral refers to same or similar parts in institute's drawings attached.
Fig. 1-8 illustrates the various exemplary embodiments of airtight sealed product and relative manufacturing process.Airtight sealed product can comprise the wisdom combination that mechanical seal is connected with reactive multilayer.Particularly, airtight sealed product comprises following combination: (1) " crushable " or " softness " material, when it under stress fully is out of shape, between device and environment, produce higher quality seal, (2) reactive multilayer connects, after the power (for example, pressure) that makes " crushable " or " softness " material deformation that is applied was removed, this reactive multilayer connected the mechanical integrity that keeps sealing.
The method exemplary embodiment that is used to make airtight sealed product comprises: but (a) settle one or more crushable material between two or more elements of encapsulated space limiting, (b) (for example at described two or more elements, lid and container) between settle one or more reactive multilayer paper tinsels, (c) (for example at assembly, at least one element in described two or more element) exerts pressure on, but so that make the crushable material distortion, thereby encapsulated space and external environment condition sealing are separated, (d) light described one or more reactive multilayer paper tinsel, connect to form reactive multilayer.
But crushable material can be line, liner, pad and/or the form of deformable any other suitable material under stress.Distortion can be permanent or reversible, but it is feasible when exerting pressure on crushable material, but forms sealing between two or more elements and/or on crushable material.The diameter range of line, liner, pad and/or any other suitable material is from 1 millimeter to 1 centimetre, and/or the length range of these materials can be from several millimeters to greater than one meter.But those of ordinary skill in the art understands, but crushable material can have any suitable shape, cross section etc., and/or can have any suitable dimensions.
But some crushable material can permanent deformation (that is, plastic deformation), still keeps enough mechanical strengths to keep sealing simultaneously, is included in when having pressure differential between encapsulated space and the external environment condition.But the example of crushable material that can permanent deformation comprises the soft metal, for example copper, gold and/or aluminium.But other example of crushable material that can permanent deformation can comprise hard core (for example, stainless steel) and bladder (for example, copper and/or aluminium).
But other crushable material can reversibly be out of shape at pressure dwell (that is, in case pressure remove, but crushable material returns to its prototype structure basically).But this reversible crushable material comprises polymeric material (for example, buna, silicon rubber and/or fluorubber).But reversible crushable material has the advantage that can re-use after distortion.
But other crushable material can comprise round shell spring-like material (for example, stainless steel), that yielding material (for example, copper and/or aluminium) constitutes.But some crushable material in this proposition can be reused, and other material only is used for the single use.
The method of making the gas-tight seal product can comprise one or more reactive multilayer methods of attachment, in U.S. Patent No. 5,381,944, the U.S. Patent application No.09/846 that submit to May 1 calendar year 2001, the U.S. Provisional Patent Application No.60/201 that 486 (US patent application publication No.20020182436) and on May 2nd, 2000 submit to, disclose the example of this method of attachment in 292, the full content of above-mentioned all applications is incorporated herein by reference at this.
The method of making the gas-tight seal product can also comprise one or more methods that are used for obtaining enough bonding strengths between two or more elements.But since act on the potted element, before be used to keep the pressure of the distortion of crushable material to be released after, but need to connect the distortion that can keep crushable material, so can increase for the required intensity of sealing.For example, the intensity of connection should be enough to withstand to gas-tight seal product collision or other external force, and simultaneously after pressure is removed from potted element, but the distortion that keeps crushable material, thus keep sealing.
The fusible material (for example, scolder or brazing) that is used for reactive connection processing can be selected based on one or more relevant factors.In these factors some can comprise requirement of strength (for example, but because the type of the crushable material of using), thermal fatigue resistance, corrosion resistance, low (splatter) and/or the vapor evolution disturbed.If air locking in use stands high temperature usually, then preferably use brazing as fusible material.
Figure 1A and 1B show the exemplary embodiment of gas-tight seal product 10 and relative manufacturing process.Shown in Figure 1A and 1B, line liner (wire gasket) 11 and other crushable (that is deformability) material 11 can be arranged in the part (for example covering 13 groove 12) of one of potted element.Groove 12 can utilize any suitable method to form in potted element (for example, lid 13).Reactive multilayer paper tinsel 14 can be positioned in two and a plurality of potted elements (for example, lid 13 and container 17) one and a plurality of surperficial 15,16 and/or between the surface 15,16.Potted element 13,17 can limit wherein can mask placement device 21 encapsulated space 18.Reactive multilayer paper tinsel 14 also can be on one or more layers fusible material 20 and/or between one or more layers fusible material 20.But 11 of crushable material can apply pressure on any suitable part (for example, the top of lid 13) of one of potted element by for example utilizing suitable method, distortion between the surface 16 of the groove 12 of a potted element 13 and another potted element 17.But this distortion of crushable material 11 can be from external environment condition sealed package space 18 and/or device 21.Then, can light reactive multilayer paper tinsel 14, between potted element, for example cover 13 and container 17 between form very strong mechanical connection.This very strong mechanical connection can form by fusible material 20 being connected to potted element 13,17 or directly connecting potted element 13,17.Then, can remove the pressure on described one or more potted element, obtain sealed package 10, it is configured to the abundant airtight sealing that maintenance has abundant integrality in considerable time.
In various embodiments, reactive multilayer paper tinsel, connection material and/or other suitable " fusible " material can be positioned at any side and/or the arbitrary portion of reactive multilayer.Fusible-material layers can be any suitable form, for example, freestanding, pre-deposition to the potted element (for example, container and/or lid) layer and/or pre-deposition to the lip-deep layer of paper tinsel.U.S. Patent No. 5,381,944, the U.S. Patent application No.09/846 that submits to May 1 calendar year 2001, the U.S. Provisional Patent Application No.60/201 that 486 (US patent application publication No.20020182436) and on May 2nd, 2000 submit to, 292 disclose these and other suitable form.The example of fusible material comprises the scolder brazing.Scolder and/or brazing can be deposited on the potted element, can be freestanding between paper tinsel and/or potted element, and/or can be deposited on the paper tinsel surface.
Fig. 2 A and 2B illustrate another exemplary embodiment of gas-tight seal product 30 and relative manufacturing process.This embodiment and Figure 1A are similar substantially with the embodiment that 1B sets forth, just one of potted element (for example, container 31) but the surface can comprise the crushable material 33 interactional projections 32 (for example, convex ridge) that are configured to and are arranged on another potted element 34.For example, projection 32 can be arranged to basically with another potted element (for example, top cover 34) on groove 35 relative.Projection 32 can have any suitable shape and/or size, for example, and the ridge-shape shown in Fig. 2 A and 2B, and can be formed on the surface 36 of potted element 31 with any suitable method.Be arranged on interaction between crushable material 33 and the projection 32 in the potted element or on it on but the advantage of this structure is, but it is little to make crushable material (for example, the line liner 33) be out of shape the structure of required pressure ratio Fig. 1.
Fig. 3 A and 3B illustrate the another exemplary embodiment of gas-tight seal product 50 and relative manufacturing process.This embodiment is similar substantially with the embodiment that Fig. 2 A-2B sets forth to Figure 1A-1B, just but crushable material (for example, line liner 51) (for example is arranged on one of potted element, top cover 53) in the groove 52, and before distortion, be arranged on another potted element (for example, container 55) the relative groove 54 on (for example, groove) is roughly relative.Groove 54 or groove 54 can be arranged on the surface 56 of potted element 55, and this surface 56 exceeds another surface 57, for example reactive foil 58 can be set on described surperficial 57.In deformation process, but crushable material 51 is out of shape between groove 52 and groove 54.The advantage of this structure is that groove 54 or groove 54 are than the 32 easier processing of the projection among Fig. 2 A-2B, and in processing procedure, than the 32 more difficult damaged of the projection among the smooth surface among Figure 1A-1B 16 or Fig. 2 A-2B.But make similar (that is, be lower than in the structure that impose on Figure 1A-1B pressure) of crushable material 51 distortion to form that the required pressure of sealing and structure in Fig. 2 A-2B apply.
Those of ordinary skill in the art recognize any feature of any embodiment set forth herein can put upside down, exchange and/or with any further feature combination set forth herein.For example, Fig. 4 A and 4B illustrate the structure with Figure 1A and 1B structural similarity, but just crushable material 71 is arranged in the groove 72 of container 73, and the respective surfaces of lid constitutes and the reactive multilayer interaction.In another example, Fig. 4 C illustrates the structure with Fig. 2 A and 2B structural similarity, but just crushable material 81 is arranged on groove 82 on the container 83, and projection 84 is arranged on and covers on 85.In another example, Fig. 4 D illustrates the structure with Fig. 3 A and 3B structural similarity, but just crushable material 91 is arranged on groove 92 on the container 93, and relative groove 94 or groove 94 are positioned at and cover on 95.
Fig. 5 A and 5B illustrate the another exemplary embodiment of airtight sealed product 100 and relative manufacturing process.In this embodiment, but crushable material (that is line liner 101) be arranged in one of potted element (for example, container 103) in the bight 102 of machine work (or other processing).Therefore, different with other embodiment set forth herein, need on one or more potted elements, carry out extra machining (or other processing) step, but so that make crushable material 101 and/or reactive multilayer 104 realize satisfied cooperation.When pressure is applied on one or more potted elements, but crushable material 101 in the part of another potted element (for example, surface 105 on the lid 106) distortion in bight 102 under the effect, thereby the encapsulation inner space 107 that sealing is limited by potted element (for example, lid 106 and container 103).Then, trigger and/or light the reactive multilayer paper tinsel 108 of reactive multilayer 104, so that connect the basic adjacent part (for example, the outer lip of lid 106 and container 103) of potted element, and/or fusible material 109 is engaged to potted element 103,106.Thereby, realize the long-term integrity that seals.The realization of this hermetically-sealed construction and/or method is favourable, because it requires littler sealing load (for example, but be used to make the crushable material distortion) than the structure of setting forth at Figure 1A-4D and/or method.Another advantage of this structure is the same with structure and/or method that Figure 1A-4D sets forth, promptly, but the distortion in crushable material does not have to form under the situation of fully sealing, (for example triggering, light) before the reactive multilayer paper tinsel, can remove deformable material, but can repeat sealing process with other crushable material.
Fig. 6 A and 6B illustrate the another exemplary embodiment of airtight sealed product 120 and relative manufacturing process.In this embodiment, but the apparent surface 121,122 of two or more potted element 123,124 comprise and being configured to and crushable material 127 interactional projections 125,126 (for example, sharp keen edge convex ridge).In order to keep the sharp keen of them, but before placing crushable material 127, need protect convex ridge 125,126.To on time, their corresponding convex ridges 125,126 basically toward each other before two or more potted elements 123,124 are sealing.But convex ridge 125,126 liner, pad and/or other suitable crushable material 127 at least relatively is hard materials.Liner, pad or any other suitable more soft (for example, convex ridge 125,126 and/or potted element 123,124) relatively but and/or crushable material 127 can be placed between the corresponding convex ridge 125,126.Liner 127 and/or pad 127 need correctly be placed on the convex ridge 125,126, so that form effective seal when distortion.Sealing can be undertaken by apply enough pressure on one or more potted elements 123,124, thereby but harder sharpened edge convex ridge 125,126 suitably makes 127 distortion of softer crushable material.The potential advantages of this method comprise that (1) compare with other material, simple liner and/or the easier processing of pad, (2) (for example to surface planarity and surface smoothness, potted element) requirement lower, and/or (3) other embodiment relatively for example set forth herein, but make the crushable material distortion and form the required pressure of suitable sealing less.
Fig. 7 A and 7D illustrate other exemplary embodiment of airtight sealed product 140,160 and relative manufacturing process.In these embodiments, but can obsolete soft pad, the crushable material of pad or other separation, as an alternative, can use sharpened edge convex ridge 141,161 or projection 141,161 on one of potted element 142,162, directly press to and/or be pressed into the softer surface of another potted element 143,163.Preferably, to selecting, to avoid electric coupling (galvanic couple) than soft material or relatively hard materials.The sharpened edge convex ridge that Fig. 7 A and 7B illustrate container 142 is directly pressed to and/or is pressed into than the embodiment in the lid 143 of soft material.Fig. 7 C and 7D illustrate and cover 162 sharpened edge convex ridge and directly press to and/or be pressed into than the embodiment in the container 163 of soft material.Will be understood by those skilled in the art that, between potted element, realize sealing necessary be for example only the part of each potted element make by harder and/or softer material.Some advantages of these designs comprise lower machining active force (that is easier processing) but and the crushable material that does not need line, liner, pad and/or other separation.An additional advantage of the configuration of this embodiment, especially Fig. 7 A and 7B is, if find that sealing is insufficient, can remove and/or change the potted element (for example, the lid 143 in Fig. 7 A and 7B, or the container in Fig. 7 C and 7D 163) that does not have the special geometric feature.Other element can be reused.Another advantage is, but because (for example by softer and/or potted element that crushable material is made, lid 143 in Fig. 7 A and 7B, or the container in Fig. 7 C and 7D 163) do not comprise the special geometric feature, it is comparatively cheap to process and/or change these potted elements other potted element set forth herein relatively.
Be in this advantage of the present invention of having set forth its exemplary embodiment; but the sensor that is positioned at the encapsulated space of container obtains the protection of sealing surfaces and/or crushable material; avoid being used for the influence of flowing of the fusible material (for example, scolder or brazing) of reactive connection processing.Particularly, but former method is not used sealing surfaces and/or crushable material, and the fusible material of molten state has hourglass to advance the encapsulated space of container, thereby damages the sensor that is mounted in it.But, among the disclosed here embodiment, because but sealing surfaces and/or crushable material are positioned at the fusible material inboard, promptly, between fusible material and encapsulated space, even, also reduced this possibility greatly so be not to have eliminated fusible material effectively to flow into the possibility that encapsulated space also damages the sensor that is mounted in it.The fusible material (for example, scolder or brazing) of fusing but sealed surface and/or crushable material (for example, line, liner, pad and its support or by the sharpened edge convex ridge) are held back.This is the advantage with respect to the reactive method of attachment of tradition.
Be in this another advantage of the present invention of having set forth its exemplary embodiment, sealing is permanent form before (for example, connecting) by reactivity, can determine and guarantee (for example, but owing to sealing surfaces and/or crushable material cause) airtight quality.This is because light and before reactive the connection at paper tinsel, but can obtain to seal by exerting pressure to one or more elements and sealing surfaces and/or crushable material being out of shape.If think that the quality of the sealing that obtains by exerting pressure is dissatisfied, then can adjust one or more parts of package assembling, and not have to lose the risk of the sensor that is positioned at container.This adjustment comprises more thread-changing, liner, pad and/or other suitable material, polishes one or more potted elements () surface for example, lid and/or container, or process the defect part of package assembling again.This ability of determining airtight quality before permanent seal encapsulation is to surpass great majority by permanent or irreclaimable change realizes the substantial advantage of the alternative of sealing to assembly.The example of described alternative comprises laser welding, welding or brazing and the method for using screw or machanical fastener.
In various embodiment of the present invention, utilize sealing test device can before forever being connected to form, realize the airtight quality affirmation.The example of this sealing test device 200 is shown in Figure 8.As shown in Figure 8, device 200 comprises one or more vacuum chambers 201; The push rod 202 or the similar means that are used for one of relative another potted element top of container 204 (for example) location potted element (for example, lid 203) and/or exert pressure in one or more parts of encapsulation; The one or more inlets 205 that are used for gas (for example, inert gas He or Ar) or admixture of gas (noble gas mixtures that for example, contains He) filled chamber 201; Be used for discharging one or more outlets 206 of gas (for example, inert gas He or Ar) or admixture of gas (noble gas mixtures that for example, contains He) from chamber 201; And the device 207 that is used to light reactive multilayer 208 (for example, having or do not have reactive multilayer paper tinsel fusible and/or the connection material).Push rod 202 for example comprises telescoping tube (bellow) 212, the interface between the wall of the chamber 201 that its help mobile putter 202 and/or sealing push rod 202 and push rod 202 are extended through.Entrance and exit also can be identical port (that is, gas or admixture of gas can be filled in the chamber and/or from chamber by identical inlet, outlet and/or mouth and discharge).The example that is used to light the device 207 of reactive multilayer 208 comprises internal components that electricity, heat or mechanical excitation can be provided and/or such as the external devices of laser.At the device that is used to light reactive multilayer is under the situation of laser, and light path can be arranged to pass the wall of vacuum chamber 201.
In various embodiments, one or more during the processing of making airtight sealed product may further comprise the steps: (1) (for example locatees two or more potted elements in chamber 201, container and lid), (2) utilize appropriate device well known in the art, for example be connected to the vacuum pump of outlet 206, chamber 201 is vacuumized (particularly removing air and moisture), (3) utilize appropriate device well known in the art (for example with gas or admixture of gas backfill chamber 201, with inert gas through 205 filled chambers 201 that enter the mouth), (4) another potted element (is for example settled one of potted element relatively, lid 203 is placed on the top of container 204), and (for example exert pressure to one of potted element at least, impose on through push rod 202 and to cover 203), so that internal chamber 209 and/or device 210 (are for example sealed with remaining chamber 201, but by making the crushable material distortion, the sharpened edge convex ridge of one of potted element is inserted in another potted element, and/or any distortion of embodiment set forth herein), (5) utilize appropriate device well known in the art, for example be connected to the vacuum pump of outlet 206, chamber 201 is vacuumized, (6) utilize any appropriate device well known in the art and/or method (for example, being connected to the leak detector 211 of outlet 206) measurement/check breakthrough rate.If measured breakthrough rate is satisfied, then light paper tinsel and/or reactive multilayer 208, thus sealed package for good and all.If measured breakthrough rate is dissatisfied, finds out one or more defectives and repeat one or more processing steps.An advantage of the invention is the loss of in seal process, eliminating or minimize sensor.
Those of ordinary skill in the art should be realized that any aforesaid aspect of any embodiment can combine with any aspect of any other embodiment.And those of ordinary skill in the art recognizes, does not deviate from actual range of the present invention, can remove aforementioned any aspect from any embodiment.In addition, those of ordinary skill in the art recognizes, only is exemplary at this disclosed embodiment of any list of references that is incorporated herein by reference, although write in specification, does not under any circumstance limit the present invention.
Consider detailed description of the invention disclosed herein and application, other embodiments of the invention are apparent to those skilled in the art.Should be appreciated that detailed description and example only are considered to exemplary, actual range of the present invention and spirit are defined by claims.
The application requires to enjoy the U.S. Provisional Patent Application No.60/461 that submitted on April 9th, 2003,196 priority, this application is entitled as " METHOD OF HERMETIC SEALINGAND RESULTING PRODUCTS (method for hermetic sealing and the product that obtains) ", the applicant is David P.VAN HEERDEN, Dale DEGER, Timothy P.WEIHS and Omar M.KNIO, it all is incorporated herein by reference at this.
Claims (76)
1. method that is used for airtight container, it comprises:
At least two elements of described container are provided;
But between described two elements, settle crushable material at least;
Between described two elements, settle the reactive multilayer material at least;
But make described crushable material distortion, thereby between described two elements, form sealing at least; With
The described reactive multilayer material of chemical transformation, thus described at least two elements connected.
2. the method for claim 1, wherein also be included between described at least two elements and settle fusible material;
Wherein, the step of described chemical transformation reactive multilayer material comprises the described fusible material of transformation, thereby connects described at least two elements.
3. the method for claim 1, wherein described reactive multilayer material comprises the reactive multilayer paper tinsel.
4. the method for claim 1, wherein described reactive multilayer material comprises fusible material.
5. the method for claim 1, wherein described sealing is gas-tight seal.
6. the step of the method for claim 1, wherein described chemical transformation reactive multilayer material forms another sealing at least between described two elements.
7. the step of the method for claim 1, wherein described chemical transformation reactive multilayer material makes the described sealing between described at least two elements stable.
8. method as claimed in claim 6, wherein, described another sealing is gas-tight seal.
9. but the method for claim 1, wherein described step that makes crushable material distortion comprises in described at least two elements at least one and applies power.
10. the method for claim 1, wherein also comprise the quality of determining described sealing.
11. method as claimed in claim 10, wherein, the step of the quality of described definite sealing comprises the breakthrough rate of determining described sealing.
12. method as claimed in claim 10 wherein, also comprises the predetermined quality of described sealing parameter is provided,
Wherein, the step of the quality of described definite sealing comprises that the quality of determining described sealing is whether in described predetermined quality parameter.
13. the step of the method for claim 1, wherein described chemical transformation reactive multilayer material comprises at least a portion of lighting described reactive multilayer material.
14. but the method for claim 1, wherein described step of crushable material distortion that makes separates described internal tank and external environment condition sealing.
15. the method for claim 1, wherein also comprise based on the expectation strength of described sealing and select described reactive multilayer material.
16. but the method for claim 1, wherein described crushable material generation permanent deformation.
17. but the method for claim 1, wherein described crushable material generation reversible deformation.
18. but the method for claim 1, wherein described crushable material comprises the soft metal.
19. method as claimed in claim 18, wherein, described soft metal comprises at least one in copper, gold, aluminium, stainless steel, Kovar alloy and the slicken solder.
20. but the method for claim 1, wherein described crushable material comprises compressible polymer.
21. method as claimed in claim 20, wherein, described compressible polymer comprises at least one in buna, silicon rubber and the fluorubber.
22. method as claimed in claim 14, wherein, but the relative external environment condition of described crushable material is positioned at the inboard of described reactive multilayer material.
23. the method for claim 1, wherein also be included in a groove is set at least on one of described two elements;
Wherein, but the step of described arrangement crushable material comprise but described crushable material be placed in the described groove.
24. the method for claim 1, wherein also be included in a projection is set at least on one of described two elements;
Wherein, but the described step that makes crushable material distortion comprise but described crushable material be out of shape against described projection.
25. method as claimed in claim 24 wherein, also is included on another of described two elements another projection is set at least,
Wherein, but the described step that makes crushable material distortion comprise but described crushable material be out of shape against described another projection.
26. the method for claim 1, wherein also be included in a groove is set at least on one of described two elements,
Wherein, but but the described step that makes crushable material distortion comprise and make described crushable material distortion enter described groove.
27. the method for claim 1, wherein also be included in a bight is set at least on one of described two elements,
Wherein, but the step of described arrangement crushable material comprise but described crushable material be placed on the described bight.
28. the method for claim 1, wherein also be included in a bight is set at least on one of described two elements,
Wherein, but but the described step that makes crushable material distortion comprise and make described crushable material distortion enter described bight.
29. one in the method for claim 1, wherein described at least two elements is a lid, and in described at least two elements another is a container body.
30. a sealed product, it comprises:
Limit at least two elements of a container;
But be arranged on the crushable material between described at least two elements, but should crushable material be in deformation state, and between described two elements, form a sealing at least; With
Be arranged between described at least two elements and connect the residue of chemical transformation of the reactive multilayer material of described at least two elements.
31. sealed product as claimed in claim 30, wherein, described reactive multilayer material comprises the reactive multilayer paper tinsel.
32. sealed product as claimed in claim 30, wherein, described reactive multilayer material comprises fusible material.
33. sealed product as claimed in claim 32, wherein, described fusible material connects described at least two elements.
34. sealed product as claimed in claim 30 wherein, also comprises the fusible material that is arranged between described at least two elements.
35. sealed product as claimed in claim 34, wherein, described fusible material connects described at least two elements.
36. sealed product as claimed in claim 30, wherein, but described crushable material is positioned at the inboard of residue of the chemical transformation of described reactive multilayer material.
37. sealed product as claimed in claim 30, wherein, but the residue acting in conjunction of described crushable material and described chemical transformation is to form a gas-tight seal at least between described two elements.
38. sealed product as claimed in claim 30, wherein, but described crushable material generation permanent deformation.
39. sealed product as claimed in claim 30, wherein, but described crushable material generation reversible deformation.
40. sealed product as claimed in claim 30, wherein, but described crushable material comprises the soft metal.
41. sealed product as claimed in claim 40, wherein, described soft metal comprises at least one in copper, gold, aluminium, stainless steel, Kovar alloy and the slicken solder.
42. sealed product as claimed in claim 30, wherein, but described crushable material comprises compressible polymer.
43. sealed product as claimed in claim 42, wherein, described compressible polymer comprises at least one in buna, silicon rubber and the fluorubber.
44. sealed product as claimed in claim 30, wherein, but described crushable material is at least partially disposed in the groove of one of described two elements at least.
45. sealed product as claimed in claim 44, wherein, but described crushable material is at least partially disposed in described two elements in another another groove at least.
46. sealed product as claimed in claim 30, wherein, but described crushable material is facing to the projection setting on one of described at least two elements.
47. sealed product as claimed in claim 30, wherein, but described crushable material is provided with facing to another projection on another of described two elements at least.
48. sealed product as claimed in claim 30, wherein, but described crushable material is arranged on the bight of one of described two elements at least.
49. sealed product as claimed in claim 30, wherein, one in described at least two elements is a lid, and in described at least two elements another is a container body.
50. a complete utensil that is used to form airtight container, it comprises:
When being connected, limit at least two elements of described container;
But be configured to the crushable material between described at least two elements;
Be configured to the reactive multilayer material between described at least two elements;
Wherein, but the described crushable material of deformation state is used for fully forming a sealing between described at least two elements,
Wherein, at least a portion of described reactive multilayer material is by chemical transformation, to connect described at least two elements.
51. complete utensil as claimed in claim 50, wherein, described reactive multilayer material comprises the reactive multilayer paper tinsel.
52. complete utensil as claimed in claim 50, wherein, described reactive multilayer material comprises fusible material.
53. complete utensil as claimed in claim 52, wherein, described fusible material is used to connect described at least two elements.
54. complete utensil as claimed in claim 50 wherein, also comprises the fusible material that is arranged between described at least two elements.
55. complete utensil as claimed in claim 54, wherein, described fusible material is used to connect described at least two elements.
56. complete utensil as claimed in claim 50, wherein, but the relative external environment condition of described crushable material is positioned at the inboard of described reactive multilayer material.
57. complete utensil as claimed in claim 50, wherein, but the residue acting in conjunction of the chemical transformation of described crushable material and described reactive multilayer material, between described two elements, to form a gas-tight seal at least.
58. complete utensil as claimed in claim 50, wherein, but described crushable material generation permanent deformation.
59. complete utensil as claimed in claim 50, wherein, but described crushable material generation reversible deformation.
60. complete utensil as claimed in claim 50, wherein, but described crushable material comprises the soft metal.
61. complete utensil as claimed in claim 60, wherein, described soft metal comprises at least one in copper, gold, aluminium, stainless steel, Kovar alloy and the slicken solder.
62. complete utensil as claimed in claim 50, wherein, but described crushable material comprises compressible polymer.
63. complete utensil as claimed in claim 62, wherein, described compressible polymer comprises at least one in buna, silicon rubber and the fluorubber.
64. complete utensil as claimed in claim 50, wherein, but in described at least two elements one comprises a groove that receives described crushable material at least in part.
65. as the described complete utensil of claim 64, wherein, but in described at least two elements another comprises another groove that receives described crushable material at least in part.
66. complete utensil as claimed in claim 50, wherein, but a projection that comprises facing to described crushable material setting in described at least two elements.
67. complete utensil as claimed in claim 50, wherein, but in described at least two elements another comprises another projection that is provided with facing to described crushable material.
68. complete utensil as claimed in claim 50, wherein, but in described at least two elements one comprises a bight that receives described crushable material.
69. complete utensil as claimed in claim 50, wherein, one in described at least two elements is a lid, and in described at least two elements another is a container body.
70. a sealing test device, it comprises:
One chamber;
One is used for the apparatus of exerting pressure to a container that is arranged on described chamber;
One port that is used to provide gas and discharges gas from described chamber;
One is used to start the trigger of the chemical transformation of described reactive multilayer material; With
One is used to detect the leak detector from the seepage of described container.
71. as the described sealing test device of claim 70, wherein, described reactive multilayer material is the reactive multilayer paper tinsel.
72. as the described sealing test device of claim 70, wherein, described apparatus is a push rod.
73. as the described sealing test device of claim 70, wherein, described chamber is a vacuum chamber.
74. as the described sealing test device of claim 70, wherein, described port is used for forming vacuum at described chamber.
75. as the described sealing test device of claim 70, wherein, described port is connected to a source of the gas.
76. as the described sealing test device of claim 70, wherein, described port is connected to a vacuum source.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US46119603P | 2003-04-09 | 2003-04-09 | |
| US60/461,196 | 2003-04-09 | ||
| US10/814,243 | 2004-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1799133A true CN1799133A (en) | 2006-07-05 |
Family
ID=36819252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200480015220 Pending CN1799133A (en) | 2003-04-09 | 2004-04-06 | Hermetically sealed product and related methods of manufacture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1799133A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102216201A (en) * | 2008-09-19 | 2011-10-12 | 赫瑞瓦特大学 | Encapsulation method |
| EP2382152A2 (en) * | 2009-01-29 | 2011-11-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Microstructure, method for producing the same, device for bonding a microstructure and microsystem |
| CN106451038A (en) * | 2015-08-12 | 2017-02-22 | 发那科株式会社 | Vacuum container of laser oscillator |
-
2004
- 2004-04-06 CN CN 200480015220 patent/CN1799133A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102216201A (en) * | 2008-09-19 | 2011-10-12 | 赫瑞瓦特大学 | Encapsulation method |
| EP2382152A2 (en) * | 2009-01-29 | 2011-11-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Microstructure, method for producing the same, device for bonding a microstructure and microsystem |
| CN106451038A (en) * | 2015-08-12 | 2017-02-22 | 发那科株式会社 | Vacuum container of laser oscillator |
| CN106451038B (en) * | 2015-08-12 | 2020-08-14 | 发那科株式会社 | Vacuum vessel of laser oscillator |
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