CN1781657A - Cutting device - Google Patents
Cutting device Download PDFInfo
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- CN1781657A CN1781657A CN 200510127038 CN200510127038A CN1781657A CN 1781657 A CN1781657 A CN 1781657A CN 200510127038 CN200510127038 CN 200510127038 CN 200510127038 A CN200510127038 A CN 200510127038A CN 1781657 A CN1781657 A CN 1781657A
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- smear metal
- cutting
- wet part
- cutting fluid
- reception
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- 238000005520 cutting process Methods 0.000 title claims abstract description 81
- 239000002184 metal Substances 0.000 claims description 167
- 229910052751 metal Inorganic materials 0.000 claims description 167
- 239000002173 cutting fluid Substances 0.000 claims description 75
- 210000000078 claw Anatomy 0.000 claims description 57
- 230000007246 mechanism Effects 0.000 claims description 31
- 238000012546 transfer Methods 0.000 claims description 29
- 239000007788 liquid Substances 0.000 abstract description 17
- 238000007599 discharging Methods 0.000 abstract description 9
- 238000011084 recovery Methods 0.000 abstract description 4
- 238000007790 scraping Methods 0.000 abstract 2
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- 230000037303 wrinkles Effects 0.000 description 12
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- Auxiliary Devices For Machine Tools (AREA)
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- Processing Of Solid Wastes (AREA)
Abstract
The invention provides a cutting device with a cutting debris disposing device which is capable of separating cutting liquid from cutting debris and discharging and disposing the cutting debris without stopping the cutting device, with simple structure and low price. The cutting debris disposing device of the cutting device is provided with a catching carrier member (68) arranged in proximity of a chuck table (40), to receive the cutting debris scattered by cutting a work piece and the cutting liquid used for cutting and to move the cutting debris and the cutting liquid to an end part; a catching dewatering member (70) to catch the cutting debris dropping from the end part (68a) of the catching carrier member (68) and flow down the cutting liquid, a cutting liquid recovery container (81) to recover the cutting liquid flowed down from the catching dewatering member (70); a scraping member (90) to manually scrape out the cutting debris residing on the catching dewatering member (70) to the side of a discharge end part (70a) of the catching dewatering member (70); and a cutting debris recovery container (82) to recover the cutting debris scraped out by the scraping member (90) and dropped from the discharge end part (70a) of the catching dewatering member (70).
Description
Technical field
The present invention relates to a kind of topping machanism, particularly relate to a kind of topping machanism with smear metal treating apparatus that smear metal that cutting is produced during machined object handled.
Background technology
Recently, the semiconductor devices as the compact electronic device that is fit to be used in mobile phone and notebook type home computer etc. practicably provides CSP (Chip Size Package).This CSP sets the chip as IC, LSI and forms usually in each rectangular area of being divided by the Cutting Road on the substrate that is arranged in synthetic resin substrate etc. with being clathrate.Generally the substrate that forms a plurality of CSP on this substrate is called csp substrate.This csp substrate cuts along Cutting Road (cutting ス ト リ one ト), is divided into each CSP.
As topping machanism, as patent documentation 1 record like that, be generally and possess clamping platform that keeps machined object and the device that cuts the cutting mechanism of machined object along the machined object of Cutting Road cutting csp substrate etc.In this topping machanism, clamp platform and be set on cutting direction, can move back and forth, cutting mechanism has the cutting knife of the roughly ring-type that is made of diamond abrasive grain etc.In addition, on cutting mechanism, set up the cutting fluid injection equipment of the cutting fluid of spraying pure water etc., when cutting, by the injection of cutting fluid, cooling cutting knife and machined object.In this kind topping machanism, maintenance moves back and forth in cutting direction as the clamping platform of the csp substrate of machined object, and the cutting knife of rotation carries out machining along the Cutting Road effect of this csp substrate at a high speed.
In this machining, because of the direction of rotation of cutting knife, smear metal of the csp substrate that is cut (sapwood etc.) and cutting fluid can be splashed to the cutting zone periphery.For example, on processing stand, cutting knife is (cutting downwards) when clamping the vibration-direction rotation of platform, and smear metal and cutting fluid are splashed to the vibration-direction that clamps platform.In addition, the part of cutting fluid is a mist, also can splash to the direction opposite with the reciprocating motion that clamps platform.
In the topping machanism of above-mentioned patent documentation 1 record, be provided with the smear metal treating apparatus that the smear metal of will splash because of this machining and cutting fluid are discharged processing.In this smear metal treating apparatus, the smear metal and the cutting fluid of splashing because of above-mentioned machining, channel form reception transfer unit (water tank) by the both sides that are located at reciprocating clamping platform is caught and is carried, and drops on the endless belt from the end of this reception transfer unit.Perforation is formed with a plurality of holes on this endless belt, and cutting fluid is flowed down, and piles up smear metal.Thereby, drop to the smear metal on this endless belt, automatically carrying by the endless belt removing under the water state, and at the direction variation portion of endless belt, drop in the smear metal collection container and be recovered.
Patent documentation 1: TOHKEMY 2002-239888 communique
Summary of the invention
But, in above-mentioned smear metal treating apparatus in the past, the extended state of endless belt in order to keep being stretched, if a plurality of holes are set on this endless belt, then intensity will die down.Thereby, the hole of sufficient amount can not be set on the endless belt for cutting fluid is flowed down, its result can not dewater cutting fluid fully with the endless belt, cutting fluid occurs and passes to the endless belt and inject problem in the smear metal collection container.
In addition,,, smear metal occurs and stop up driving mechanism, the problem that the driving mechanism of endless belt is stopped so smear metal also can enter the driving mechanism of endless belt because of in the endless belt, using driving mechanism.So, consider its security, after topping machanism being stopped and interrupting machining, the action of smear metal treating apparatus is handled with the discharge of carrying out smear metal, but, then had the problem that production efficiency reduces if do like this.
Have, according to user's behaviour in service, also have the few situation of frequency of utilization of smear metal treating apparatus, also the smear metal treating apparatus is provided with driving mechanism in this case, has the complex structure along with device, and price can inappropriate problem.
For this reason, the present invention proposes in view of the above-mentioned problems, and its objective is provides a kind of topping machanism with smear metal treating apparatus, and this smear metal treating apparatus can separate cutting fluid well from smear metal, can not stop topping machanism ground and discharge the processing smear metal, and simple in structure and cheap.
In order to solve the above problems, according to viewpoint of the present invention, provide a kind of clamping platform that keeps machined object that has, by the cutting mechanism of cutting knife cutting machined object and the topping machanism of smear metal treating apparatus.In this topping machanism, it is characterized in that, the smear metal treating apparatus has: receive transfer unit, this reception transfer unit and described clamping platform are in abutting connection with setting, catch smear metal of splashing and the cutting fluid that is used to cut, and described smear metal and described cutting fluid are moved to the end because of the cutting of described machined object; Receive and remove wet part, this reception removes wet part and catches the described smear metal that falls from the described end of described reception transfer unit, and described cutting fluid is flowed down; The cutting fluid returnable, this cutting fluid returnable reclaims from described reception and removes the described cutting fluid that wet part flows down; Claw parts, this claws parts and will remain in the described smear metal that described reception removes on the wet part and remove the discharge end side of wet part by manually clawing described reception; The smear metal returnable, this smear metal returnable will be reclaimed by the described described smear metal that claws that parts claw and remove from described reception under the described outlet side clan of wet part.
Adopt structure like this,, after catching, fall reception from the end that receives transfer unit and remove on the wet part by the reception transfer unit because of smear metal and the cutting fluid that cutting is splashed.Receive except that in the wet part at this, cutting fluid flows down and is reclaimed by the cutting fluid returnable, and smear metal is then residual and be deposited in reception except that on the wet part.In addition, remain in reception and manually claw, and it is removed under the outlet side clan of wet part from receiving, be recovered in the smear metal returnable except that the smear metal on the wet part claws parts by operator's use.
Like this, in above-mentioned smear metal treating apparatus,, therefore do not use former endless belt, remove wet part and use to receive owing to cutting fluid being flowed down and smear metal being dewatered.This receive to remove wet part, because of available than the endless belt more the material of hard form, so enough sizes and a plurality of liquid communication gap (for example through hole) can be set.So, can discharge cutting fluid fully and dewater, and cutting fluid can not flow in the smear metal returnable.
In addition, because be to be stacked into the smear metal that receive to remove on the wet part with clawing the moving structure that claws and discharge to the smear metal returnable of parts armrest, driving mechanism is set so not be used in the chip conveyor structure of smear metal treating apparatus.So, because smear metal can not stopped up driving mechanism, therefore need not stop topping machanism, in machining, use the smear metal treating apparatus just can discharge smear metal.Therefore, handle, can not reduce production efficiency, in addition, can implement smear metal desirable any time the operator and discharge processing by the discharge of smear metal.In addition, because need not above-mentioned driving mechanism, so also can make the simple structure of smear metal treating apparatus and with low cost.
In addition, above-mentionedly claw being characterized as of parts, have: when described smear metal claws, remove the elastomeric element that the bottom of wet part contacts with described reception; Support the support unit of described elastomeric element; One end is connected with described support unit, and the other end forms handled arm member.
According to this structure, the operator claws parts by the handle and the operation of control arm parts, can easily claw and receive the smear metal that removes on the wet part.In addition, by the elastomeric element with flexibility being set clawing on parts and the part that the bottom of receive removing wet part contact, when clawing, it is good to have a slip that claws parts that receives on the feature bottom that dewaters, the advantage of noise reduction.In addition, by elastomeric element, can also with low impact take out hold under the arm receive remove wet part circulating liquid with the smear metal in gap (for example through hole), can prevent to claw parts and receive the breakage that removes wet part.Have again,, also can will remain in the cutting fluid that receives the feature bottom that dewaters, be directed to circulating liquid with in the gap by this elastomeric element.
In addition, the above-mentioned reception bottom of removing wet part can tilt to discharge the mode that end side be in the top.In view of the above, because of cutting fluid is receiving except that mobile on the bottom of wet part, and flow to circulating liquid easily with in the gap, so can make cutting fluid flow down well and discharge.In addition, be inclined upwardly towards smear metal returnable direction because of receiving the bottom of removing wet part, so can prevent reliably that cutting fluid from flowing in the smear metal returnable.
Have again, can form a plurality of through holes that cutting fluid is flowed down in the bottom that receives except that wet part.In view of the above, receive the bottom energy circulating liquid that removes wet part, can make cutting fluid flow down well and discharge.In addition, receive and remove wet part, because of different with above-mentioned endless belt, the material of available hard forms, and therefore can form a plurality of enough big through holes.
The effect of invention
As mentioned above, according to the present invention, remove wet part replacement endless belt owing to use to receive, so can make cutting fluid flow down well and discharge, cutting fluid can not flow in the smear metal returnable.
In addition, owing to be to be deposited in to receive the smear metal that removes on the wet part with clawing the structure that parts armrest trend smear metal returnable is discharged, so, driving mechanism need not be set also can finish as the chip conveyor structure of smear metal treating apparatus.For this reason, because smear metal can not filled in stifled driving mechanism, use the smear metal treating apparatus to discharge smear metal so can not stop topping machanism ground.In addition, also can make the simple structure and the low cost of smear metal treating apparatus.
Description of drawings
Fig. 1 is the general perspective that the topping machanism of the 1st embodiment of the present invention is shown.
Fig. 2 is the key diagram that illustrates with the sectional fixture of the csp substrate of embodiment and topping machanism.
Fig. 3 is the overall perspective that illustrates with the smear metal treating apparatus of the topping machanism of embodiment.
Fig. 4 illustrates the perspective view that reception with the smear metal treating apparatus of embodiment removes wet part, cutting fluid returnable, smear metal returnable and claws parts.
Fig. 5 is that the reception that illustrates with the smear metal treating apparatus of embodiment removes wet part, and claws the vertical view of parts.
Fig. 6 is in the smear metal treating apparatus that is illustrated in embodiment, receive to remove the profile of piling up the state that smear metal, cutting fluid flow down on the wet part.
Fig. 7 is in the smear metal treating apparatus that is illustrated in embodiment, with clawing the profile that parts claw the state of smear metal.
The specific embodiment
With reference to the accompanying drawings, most preferred embodiment of the present invention is described in detail.In addition, in this specification and accompanying drawing,, represent, omit its repeat specification with prosign for the member that has same functional structure in fact.
The present invention relates to a kind of being arranged on the topping machanism, be used to discharge and reclaim the smear metal treating apparatus because of the smear metal (sapwood etc.) that machining produces, the machined object of described topping machanism machining csp substrate etc. also is divided into each chip (CSP (Chip Size Package) etc.).
At first, according to Fig. 1, the topping machanism 10 of the 1st embodiment of the present invention and the summary of stock removal action thereof are described.Fig. 1 is the perspective view of summary that the topping machanism 10 of present embodiment is shown.
As shown in Figure 1, topping machanism 10 has pinch zones 4, adjusts district 5 and cutting region 6 on housing 2.Have again, also have smear metal treatment region 8 in the side of housing 2 as the feature of present embodiment.This topping machanism 10 has cutting mechanism 20 and clamps platform 40, can be clathrate with the machined object machining of csp substrate etc., is divided into a plurality of CSP.
At this, according to Fig. 2, the csp substrate 50 of an example of machined object that is used as the cutting object of topping machanism 10 illustrates simply.As shown in Figure 2, for example, csp substrate 50 is for being formed with the substrate of a plurality of CSP on the synthetic resin substrate of rectangular shape.On csp substrate 50, Cutting Road 51 is arranged in clathrate, marks off a plurality of rectangular areas 52 with this Cutting Road 51.On this each rectangular area 52, form CSP, have the circumference 53 that does not form CSP in the end of csp substrate 50.
Csp substrate 50 is moved into topping machanism 10 in mounting under the state that is used to be installed on the sectional fixture 60 that clamps on the platform 40.Sectional fixture 60 for example is made of metallic plate, for than bigger rectangular-shaped of csp substrate 50.Central portion on sectional fixture 60 is arranged with to clathrate groove 61, divides a plurality of rectangular areas 62 by groove 61.Rectangular area 62 is arranged to corresponding with the rectangular area 52 of csp substrate 50 respectively, and the planar dimension of rectangular area 62 is roughly the same with the planar dimension of rectangular area 52.
In addition, on each rectangular area 62, perforation is formed with and attracts hole 63, is formed with the attraction groove (not shown) that connects all attraction holes 63 at the back side of sectional fixture 60.Csp substrate 50, on sectional fixture 60, so the sectional fixture 60 of mounting csp substrate 50 is moved into topping machanism 10 with mode mounting that rectangular area 52 is integrated into rectangular area 62.
The sectional fixture of moving into 60 as shown in Figure 1, is positioned on the clamping platform 40 that is arranged at pinch zones 4.Clamp platform 40 and have the rectangular magnetic chuck 41 bigger than sectional fixture 60, opening 42 vacuum attractions of the suction pipe that forms by central portion from sucker 41, the sectional fixture 60 of mounting csp substrate 50 is being clamped on the platform 40 by vacuum suction.
When sectional fixture 60 is so being clamped on the platform 40 by vacuum suction, clamp platform 40 and move in the X-direction feeding, the sectional fixture 60 of mounting csp substrate 50 is configured in to be adjusted in the district 5.In adjusting district 5, be provided with camera mechanism 55, take pictures by the surface of 55 pairs of csp substrates 50 of this camera mechanism.And then, by resolving this photographs, confirm the configuration status of csp substrate 50 and the position of Cutting Road 51, in addition, identification clamps the X-direction of platform 40 or the position and the inclination of Y direction.The photographs that is generated by camera mechanism 55 is presented on the monitor 56, confirms the configuration status of above-mentioned csp substrate 50 etc. by the operator.
Next, clamp platform 40 and move, by cutting mechanism 20 cutting csp substrates 50 to cutting region 6.Cutting mechanism 20 has the cutting knife (rotary cut-off knife) that is installed in front-end of spindle.This cutting knife can use the cutoff tool of the thin-walled ring-type that contains diamond abrasive grain etc.In addition, cutting mechanism 20, the cutting fluid injection equipment that for example has the cutting fluid (for example cutting water) that is used to spray pure water etc.When machining, spray cutting fluid by this cutting fluid injection equipment to csp substrate 50 and cutting knife, cooling processing stand and cutting knife.
The machining of being undertaken by the topping machanism 10 of present embodiment, for example, on Y direction every interval Cutting Road 51 ground send cutting mechanism 20 on one side, move back and forth in X-direction on one side and clamp platform 40 ground and carry out as cutting direction.In view of the above, at a high speed the cutting knife of rotation is along each Cutting Road 51 effect of csp substrate 50 and carry out machining, and final, csp substrate 50 is cut off into clathrate, and is divided into each CSP.
When so csp substrate 50 being divided into each CSP, the circumference 53 (with reference to Fig. 2) of above-mentioned csp substrate 50 etc. becomes sapwood, thereby produces smear metal.This smear metal and above-mentioned cutting fluid owing to splash to cutting region 6 and periphery thereof by machining, therefore are provided with smear metal treatment region 8 in order to reclaim and discharge these smear metals of processing and cutting fluid.The topping machanism 10 of present embodiment has feature aspect the smear metal treating apparatus 80 of smear metal treatment region 8 being arranged at, and the back will be described in detail this smear metal treating apparatus 80.
So, if csp substrate 50 is cut into clathrate and be divided into each CSP chip, then clamp platform 40 and return pinch zones 4 (with reference to Fig. 1).Afterwards, the sectional fixture 60 of divided each CSP on clamping platform 40 is contained and is transported to the receiver, finishes a series of cutting process.
Next, according to Fig. 3, explain the structure of clamping platform 40 peripheries in the topping machanism 10.As shown in Figure 3, clamping platform 40 is mounted between position at one end (clamping platform 40 is in than adjusting district 5 also towards the position of X-axis positive direction) and other end position (clamping platform 40 is in than cutting mechanism 20 also towards the reciprocal position of X-axis) and freely moves back and forth.And, clamping on the platform 40, be equipped with and make its reciprocating device that moves back and forth usefulness (not shown).This reciprocating device for smear metal P that protects in 6 kinds of generations of cutting region and the cutting fluid of spraying in cutting region 6, covers with wrinkle guard block 66.
For further protecting this wrinkle guard block 66, on a plurality of protuberances of wrinkle guard block 66, be separately installed with a plurality of plate member 67 (with reference to 2004～No. 186361 communiques of TOHKEMY).This plate member 67; the above length of width (perpendicular to the width of the flexible direction of wrinkle guard block 66) with wrinkle guard block 66; with the protuberance of adjacency and the big width in interval of protuberance under the state that extends than wrinkle guard block 66; the one side is installed on the protuberance, and opposite side overlaps slidably with the surface of the plate member 67 of adjacency.By so covering wrinkle guard block 66, can prevent that wrinkle guard block 66 is because of breakages such as smear metal P by plate member 67.
Below, according to Fig. 3～Fig. 7, explain smear metal treating apparatus 80 as the feature of present embodiment.
As Fig. 3～shown in Figure 5, the smear metal treating apparatus 80 of present embodiment, for example, have and be adjacent to the reception transfer unit 68 that the both sides that clamp platform 40 were provided with, caught the smear metal of splashing because of cutting csp substrate 50 and cutting fluid and the smear metal caught and cutting fluid are moved to its end 68a; Catch smear metal and the cutting water that falls from the end 68a of this reception transfer unit 68, the reception that makes cutting fluid wherein flow down and make smear metal to pile up removes wet part 70; Recovery is from receiving the cutting fluid returnable 81 of the cutting fluid that flows down except that wet part 70; Claw parts 90 with manually remaining in the smear metal that receive to remove on the wet part 70 to what receive that the discharge end 70a side of removing wet part 70 claws; To claw that parts 90 claw and from receiving the smear metal returnable 82 that smear metal that the discharge end 70a that removes wet part 70 falls is reclaimed by this.Below, each one that constitutes this smear metal treating apparatus 80 is described in detail.
At first, describe receiving transfer unit 68.Receive transfer unit 68 as shown in Figure 3, the water tank (ウ オ one one ケ one ス) that receives for the smear metal that will splash because of machining and cutting fluid.This reception transfer unit 68 is provided with in the mode of surrounding the periphery that clamps platform 40 and reciprocating device thereof.Specifically, this receives transfer unit 68, is being used for moving the wrinkle guard block 66 of above-mentioned clamping platform 40 and the Y direction both sides of reciprocating device, that is, setting is extended to X-direction in the both sides of the track that clamping platform 40 moves back and forth.This reception transfer unit 68 for example has from the side, bottom of wrinkle guard block 66 and reciprocating device roughly the base plate 681 that stretches out towards horizontal direction and 2 sidewalls 682 that extend upward from the both side edges of this base plate 681.By this reception transfer unit 68 is set, can form groove in the both sides of wrinkle guard block 66 and reciprocating device 66.
So receive transfer unit 68, the mode of the both sides of the clamping platform 40 that moves back and forth with covering is provided with, and can catch the cutting fluid and the smear metal of splashing because of machining, perhaps smear metal and the cutting fluid that flows down from wrinkle guard block 66.This reception transfer unit 68 flows to receiving the end 68a that removes wet part 70 sides because of making the cutting fluid caught and smear metal, so remove wet part 70 sides (negative direction of X-axis) and tilt a little downwards for well towards receiving.
Have again,, in receiving transfer unit 68, can be arranged on the direction that moves back and forth that clamps platform 40 and see, produce the liquid jet mechanism (not shown) of the liquid stream that points to the downstream for making flowing of this cutting fluid and smear metal reliable.In view of the above, the liquid (for example water) that liquid jet mechanism sprays is owing to remove wet part 70 sides (negative direction of X-axis) and flow to receiving in receiving transfer unit 68, so can clean mobile forcibly with being deposited in the smear metal that receives in the transfer unit 68 etc.
Next, the reception parts 70 that dewater are described.Receive to remove wet part 70 as Fig. 3～shown in Figure 5, it for example is the tank shapes of containers of opening above, on the end of its inboard (the negative direction side of Y-axis), be provided with sidewall and sealing, on the discharge end 70a of front side (the positive direction side of Y-axis), sidewall be not set and open.This receive to remove wet part 70, to move back and forth the vertical direction of direction (Y direction) as under 2 end 68a that longitudinally are arranged on reception transfer unit 68 with respect to what clamp platform 40.For this reason, the smear metal and the cutting fluid of carrying in above-mentioned reception transfer unit 68 are fallen reception from 2 end 68a and are removed in the wet part 70.Receive and remove wet part 70, catch the smear metal and the accumulation that so fall, and the cutting fluid that falls from the end 68a that receives transfer unit 68 is flow to the cutting fluid returnable 81 from the end 68a that receives transfer unit 68.
In order catching on one side in this wise,, to receive the negotiable liquid ground, bottom that removes wet part 70 and constitute Yi Bian only flow down cutting fluid from receiving the smear metal that transfer unit 68 falls.Specifically, receiving the bottom of removing wet part 70, for example, forming a plurality of through holes 74 regularly with the interval of stipulating.The size of this through hole 74 is the size that smear metal does not fall degree downwards.The material of endless belt reason softness in the past forms, and uses under extended state, so when considering the life-span of endless belt, a plurality of through holes can not be set.To this, the reception of present embodiment removes wet part 70, for example can form by the hard material of metal species such as stainless steel, synthetic resin etc., and, owing to be provided with the through hole 74 of the abundant size of Duoing in its bottom, so cutting fluid can flow down fully and discharge from this through hole 74 than the endless belt number.
In addition, receive to remove wet part 70 as shown in Figure 6 and Figure 7, be obliquely installed with being in the top with its front side (smear metal returnable 82 sides, that is, Y-axis positive direction side).Its result tilts because of receiving the bottom surface of removing wet part 70, so the cutting fluid adipping that is present on this bottom surface flows, arrives easily in any one through hole 74.Therefore,, cutting fluid is further flowed down from through hole 74, can discharge well by this tilted configuration.
Remove wet part 70 according to the reception that as above constitutes, smear metal is not because of passing through through hole 74, received except that in the wet part 70 so catch and pile up, remain in, and cutting fluid flows down from through hole 74, receives cutting fluid returnable 81 recovery that remove wet part 70 belows by being configured in.This cutting fluid returnable 81 for example is connected with draining pump (not shown) etc., is discharged to the outside with the cutting fluid that will reclaim by liquid distribution pipe 81a.
Below, the parts 90 that claw as the feature of present embodiment are described.Claw parts 90, for clawing, make it to fall the parts of the formula of for example uprooting in the smear metal returnable 82 except that the smear metal on the wet part 70 to receiving the discharge end 70a side of removing wet part 70 by manually remaining in reception.
This claws parts 90 as Fig. 3～shown in Figure 5, by be located at the leading section that claws parts 90 and when smear metal claws with receive the elastomeric element 92 that the bottom of removing wet part 70 contacts, support the support unit 94 of this elastomeric element 92, the arm member 96 that be connected with support unit 94 with an end, the other end forms handle 98 constitutes.
The lengthwise shape parts of arm member 96 for for example the integrally bendings such as pipe of metal material being become コ font roughly to form.This arm member 96 has length and the width that removes wet part 70 corresponding to receiving.Specifically, the length of the Y direction of this arm member 96, longer than above-mentioned reception except that the length of the Y direction of wet part 70, in addition, and the width of the X-direction of arm member 96, also wideer than above-mentioned reception except that the width of the X-direction of wet part 70.This arm member 96 on an end of inboard, is equipped with above-mentioned support unit 94 and elastomeric element 92, and forms handle 98 respectively on the both ends of front side.
That uses structure like this claws parts 90, and as Fig. 6～shown in Figure 7, the operator is by manually, can receive the smear metal P that removes on the wet part 70 and claw remaining in, and it is fallen in the smear metal returnable 82 from receiving the discharge end 70a that removes wet part 70.
Specifically, when discharging smear metal P, operator station stands in the front side of the Y direction of smear metal treating apparatus 80, holds 2 handles 98 of the arm member 96 that claws parts 90 with two handgrips, and will claw parts 90 and move the front side to.At this moment, make the elastomeric element 92 that claws parts 90 and receive the bottom of removing wet part 70 and continue to further contiguously and claw parts 90.In view of the above, remain in and receive the smear metal P that removes on wet part 70 bottoms,, draw in discharging end 70a side by elastomeric element 92 and support unit 94 pushings.
At this moment, the resilient elastomeric element 92 that forms by rubber etc., the bottom of removing wet part 70 because of the reception with the hard that is formed by stainless steel etc. contact, thus better at the sliding that claws parts 90 that receives except that on the wet part 70, have the advantage that does not produce noise.In addition, the smear metal P that draws in is even under situation about hanging on the through hole 74 that receives the bottom of removing wet part 70, because by resilient elastomeric element 92, can make this smear metal P that tangles break away from through hole 74 sleekly, thus through hole 74 periphery and claw parts 90 self can be damaged.In addition, because of elastomeric element 92 closely contacts with receiving the bottom of removing wet part 70,, can improve water removal effect so the cutting fluid W that remains in this bottom can be guided, flows down to through hole 74 by elastomeric element 92.
So, to drawing in the smear metal P that receives the discharge end 70a side of removing wet part 70, furthering further by the operator claws parts 90, can be as illustrated in fig. 7, and 70a falls and is recovered in the smear metal returnable 82 from this discharge end.
At this moment, because of receiving except that on the discharge end 70a of wet part 70, be provided with the two sides of cover discharging end 70a and above prevent the cover 72 that disperses, so can prevent to disperse to periphery, can be recovered to preferably in the smear metal returnable 82 from discharging the smear metal P that end 70a claws.
In addition, owing to receive the bottom of the open end 70a that removes wet part 70,,, smear metal P also falls towards smear metal returnable 82 well so sliding on this inclined plane for towards the downward inclined plane of smear metal returnable 82 sides (positive direction of Y-axis).
As mentioned above, claw parts 90 (with reference to Fig. 7) pulling out fully, after smear metal P is recovered in the smear metal returnable 82, the operator will claw parts 90 and turn back to original position (with reference to Fig. 6) before clawing.At this moment, the operator utilizes in the outstanding parts carry portion 76 that claws that is provided with of the discharge end 70a upper lateral part that receives the two side of removing wet part 70, can will claw parts 90 return-to-home position easily.Specifically, the arm member 96 that the operator will claw parts 90 is positioned in and claws in the parts carry portion 76, claw parts carry portion 76 as fulcrum with this, elastomeric element 92 grades that claw parts 90 are lifted to leave the state that receives except that wet part 70 bottoms, by travelling arm parts 96, will claw parts 90 and turn back to original position then.Turn back to original position by so clawing parts 90, remain under the situation that receives the bottom of removing wet part 70, thereby can prevent from the phenomenon that receives the very difficult scrap fallaway in inboard that removes wet part 70 is filled in smear metal in smear metal.
In addition, this claws parts carry portion 76, when the discharge of not carrying out smear metal is handled, also can support mounting in receiving the arm member that claws parts 90 96 that removes on the wet part 70.
More than, the smear metal treating apparatus 80 of present embodiment is illustrated.In this smear metal treating apparatus 80, remove wet part 70 and replace in the past endless belt because of having used to receive, so, can form a plurality of bigger through holes 74 in order to discharge cutting fluid.Therefore, cutting fluid can flow down and smear metal be dewatered fully well, and cutting fluid can not flow in the smear metal returnable 82 yet.
In addition, in the smear metal treating apparatus 80 of present embodiment, to be deposited in the smear metal that receive to remove on the wet part 70 with clawing parts 90 by manually clawing the structure of discharging because of having, so there is no need to be provided with such in the past automatic transport and discharge the driving mechanism of smear metal.For this reason, can solve because of smear metal is blocked on the driving mechanism problem that the smear metal treating apparatus stops.So, owing to can not stop topping machanism 10 because of the fault of smear metal treating apparatus 80, even thereby in machining, also can discharge smear metals with smear metal treating apparatus 80 in operator desirable any time.
So, except the discharge of smear metal the operator can freely select constantly, remain in and receive the permission capacity that removes the smear metal on the wet part 70 and the storage capacity of the smear metal in the smear metal returnable 82, the operator can also freely determine.In addition, reception removes wet part 70 and is in ground, top tilted configuration because of discharging end 70a side, so smear metal is very difficult unrestrained from receiving the discharge end 70a that removes wet part 70.For this reason, below discharge end 70a, need not often dispose smear metal returnable 82.
Have again, because of above-mentioned driving mechanism is not set, thus simplified the structure of smear metal treating apparatus 80, and can make smear metal treating apparatus 80 at low cost.Be useful so for the few user of frequency of utilization because of smear metal treating apparatus 80 such as the kind of machined object and machining states.
More than, with reference to accompanying drawing most preferred embodiment of the present invention is illustrated, but the present invention is not limited to this example.For those of ordinary skills, in the category of claim scope record, can expect various modifications or revise example that these also belong within the technical scope of the present invention certainly obviously.
For example, in the above-described embodiments, exemplified csp substrate 50 as machined object and be illustrated, but the present invention is not limited to this example.Machined object, if pass through the material that machining generates the bigger smear metal of sapwood etc., it for example also can be the base plate for packaging of the various semiconductor monocrystal sheets, GPS substrate, BGA substrate etc. of silicon chip etc., sapphire substrate, glass material, ceramic material, metal material, the synthetic resin material of plastics etc. etc.In addition, the shape of machined object can be tabular for essentially rectangular, arbitrary shape such as disc-shape roughly.In addition, also can change the shape that clamps platform 40 grades with the shape of machined object with matching.
In addition, in the above-described embodiments, be to make to clamp platform 40 and move back and forth in X-direction, cutting mechanism 20 is fixed on X-direction finishes machining, but be not limited to this example, also can be fixing with clamping platform 40, move back and forth cutting mechanism 20 ground in X-direction and carry out machining.At this moment, do not move, so also the mode of the whole circumference of the clamping platform 40 that the reception transfer unit 68 of catching smear metal etc. can be fixed with encirclement is provided with because of clamping platform 40.
In addition, receive the example that the bottom of removing wet part 70 is not limited to form the such a plurality of through holes 74 of the foregoing description.Receive to remove the bottom of wet part 70, the structure that cutting fluid is flowed down if can smear metal be fallen then also can be the structure that for example mesh members or a plurality of plate-shaped member is arranged in grate type etc.
In addition, in the above-described embodiments, the operator will claw parts 90 and further, and claw to discharging end 70a side except that the smear metal on the wet part 70 being deposited in reception, but the present invention be not limited to this example.For example, the operator also can release and claw parts 90, claws to discharging end 70a side except that the smear metal on the wet part 70 being deposited in reception.
In addition, the structure that claws parts 90 is not limited to the foregoing description, if can remove the structure that the smear metal on the wet part 70 manually claws by the operator with remaining in to receive, then can be any structure.For example, clawing parts 90 and can have support unit 94, can be that elastomeric element 92 directly is installed to structure on the arm member 96.
Utilizability on the industry
The present invention is applicable to topping machanism, particularly applicable to having the smear metal treating apparatus Topping machanism, this smear metal treating apparatus will generate when the machined object of cutting csp substrate etc. Smear metal is processed.
Claims (4)
1, a kind of topping machanism has the clamping platform that keeps machined object, cuts the cutting mechanism and the smear metal treating apparatus of described machined object by cutting knife, it is characterized in that described smear metal treating apparatus has:
Receive transfer unit, this reception transfer unit and described clamping platform are caught smear metal of splashing because of the cutting of described machined object and the cutting fluid that is used to cut, and described smear metal and described cutting fluid are moved to the end in abutting connection with setting;
Receive and remove wet part, this reception removes wet part and catches the described smear metal that falls from the described end of described reception transfer unit, and described cutting fluid is flowed down;
The cutting fluid returnable, this cutting fluid returnable reclaims from described reception and removes the described cutting fluid that wet part flows down;
Claw parts, this claws parts and will remain in the described smear metal that described reception removes on the wet part and remove the discharge end side of wet part by manually clawing described reception;
The smear metal returnable, this smear metal returnable will be reclaimed by the described described smear metal that claws that parts claw and remove from described reception under the described outlet side clan of wet part.
2, topping machanism as claimed in claim 1 is characterized in that, the described parts that claw have:
When clawing, described smear metal removes the elastomeric element that the bottom of wet part contacts with described reception;
Support the support unit of described elastomeric element;
One end is connected with described support unit, and the other end forms handled arm member.
3, topping machanism as claimed in claim 1 or 2 is characterized in that, the bottom that described reception removes wet part tilts in the mode that described discharge end side is in the top.
As each the described topping machanism in the claim 1,2 or 3, it is characterized in that 4, a plurality of through holes that described cutting fluid is flowed down are formed on the bottom of removing wet part in described reception.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004343938 | 2004-11-29 | ||
| JP2004343938A JP4657688B2 (en) | 2004-11-29 | 2004-11-29 | Cutting equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1781657A true CN1781657A (en) | 2006-06-07 |
Family
ID=36629383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510127038 Pending CN1781657A (en) | 2004-11-29 | 2005-11-29 | Cutting device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4657688B2 (en) |
| CN (1) | CN1781657A (en) |
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| CN109560015A (en) * | 2017-09-27 | 2019-04-02 | 东和株式会社 | Processing unit (plant) |
| CN110170661A (en) * | 2019-04-23 | 2019-08-27 | 钱开捷 | A kind of axial high-precision positioner of lathe workpiece |
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| JP2008140981A (en) * | 2006-12-01 | 2008-06-19 | Disco Abrasive Syst Ltd | Processing apparatus |
| JP2008147344A (en) * | 2006-12-08 | 2008-06-26 | Disco Abrasive Syst Ltd | Machining equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2506318Y2 (en) * | 1989-12-13 | 1996-08-07 | 株式会社吉野工業所 | Cream-like material dispensing container |
| JPH0417038U (en) * | 1990-05-30 | 1992-02-12 | ||
| JPH08108339A (en) * | 1994-10-11 | 1996-04-30 | Van Tekunika:Kk | Device for separating cutting water from work chips |
| JP3523448B2 (en) * | 1997-04-24 | 2004-04-26 | ジヤトコ株式会社 | Chip dispenser |
| JP2002103177A (en) * | 2000-09-27 | 2002-04-09 | Disco Abrasive Syst Ltd | Drainage device |
| JP4685227B2 (en) * | 2000-10-30 | 2011-05-18 | Ｎｔｎ株式会社 | Magnetic levitation pump |
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- 2005-11-29 CN CN 200510127038 patent/CN1781657A/en active Pending
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| CN106091651A (en) * | 2016-07-25 | 2016-11-09 | 宿迁陈工机械制造有限公司 | A kind of aluminum bits wind send dehydrator |
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| TWI734937B (en) * | 2017-09-27 | 2021-08-01 | 日商Ｔｏｗａ股份有限公司 | Processing device |
| CN109560015B (en) * | 2017-09-27 | 2023-06-02 | 东和株式会社 | Processing device |
| CN108213589A (en) * | 2017-12-21 | 2018-06-29 | 昆山万马五金有限公司 | One kind is used for five metalworking cutting apparatus |
| CN110170661A (en) * | 2019-04-23 | 2019-08-27 | 钱开捷 | A kind of axial high-precision positioner of lathe workpiece |
| CN112975543A (en) * | 2019-12-16 | 2021-06-18 | 发那科株式会社 | Machine tool system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4657688B2 (en) | 2011-03-23 |
| JP2006150494A (en) | 2006-06-15 |
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