CN1696653A - Method for measuring Kashmir inside rectangular cavity - Google Patents
Method for measuring Kashmir inside rectangular cavity Download PDFInfo
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- CN1696653A CN1696653A CN 200510040458 CN200510040458A CN1696653A CN 1696653 A CN1696653 A CN 1696653A CN 200510040458 CN200510040458 CN 200510040458 CN 200510040458 A CN200510040458 A CN 200510040458A CN 1696653 A CN1696653 A CN 1696653A
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- rectangular cavity
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Abstract
A method for measuring Casimir force in rectangular cavity utilizes physical structure formed by scan - probe microscope, corp probe, specially made rectangular cavity and planar composite substrate and applies D - value of planar portion to rectangular cavity portion to realize indirect measurement of Casimir force in rectangular cavity.
Description
Technical field
The present invention relates to the force measurement method, refer in particular to a kind of method for measuring Kashmir inside rectangular cavity.
Background technology
Development along with micromechanics, the characteristic dimension of mechanism is more and more littler, cause the quality of part to reduce rapidly, while dwindling along with spacing between part, progressed into the effect category of long-range quantum power, so originally, negligible quantum effect in mechanical movement, it is important just to become, and has become the key that can some micro mechanical system normally move sometimes.And in long-range quantum power on, it is generally acknowledged that be Van der Waals force (Van derWaals) at 20nm with the long-range quantum power of interior effect, the long-range quantum power beyond 20nm then is card assorted Mil's power (Casimir).
Since Casimir has proposed by zero point energy to have Casimir power between two parallel planes, and after having proposed the computing formula of Casimir, people constantly attempt Casimir power is measured, and compare, revise with theoretical formula.Though Casimir power can be used as the quantum power under a kind of macroscopic conditions, its value is decided by the size of spacing fully, former measurement means under the minimum dimension condition that can provide, its value is very little.Under the ideal conditions, be 1 μ m in two spacings for example, area is 1cm
2Parallel plane between Casimir power have only 10
-7N, this was a no small challenge for former testing apparatus.Atomic force microscope AFM is that all were measured in the Casimir power instrument at present, and used precision is the highest.It is the Casimir power between Measuring Object accurately, can also eliminate the influence of electrostatic force, the experiment condition of while vacuum environment, can eliminate the influence of dust in the air, more estimable is, AFM can also make accurately the surface topography on plane and measuring, and is not means of testing with the atomic force microscope also at present, the bibliographical information that Casimir power in the rectangular cavity is measured.
Summary of the invention
The objective of the invention is to utilize existing AFM, improve a little and realize effectively measuring Casimir power in the rectangular cavity.
The invention provides a kind of to method for measuring Kashmir inside rectangular cavity, this method is to realize under the atomic force microscope on the multi-functional scanning probe microscopy (AFM) pattern, method of modifying to main microscope during by similar its conventionally test surface potential energy is reequiped, and its probe changed into plane probe, the size of plane probe is between 6～10 μ m, substrate adopts the composite structure of rectangular cavity with the plane, size is between 20 * 10 * 2 μ m～40 * 20 * 4 μ m, on-chip rectangular cavity requires three limit sizes all between 100～1000nm simultaneously, the ratio of long and high size and wide size is greater than 3, slab-thickness between chamber and the chamber is less than 150nm, when the tack probe with the planar section of substrate over against, form two parallel plane structures, obtain a measured value 1, tack probe with AFM moves on to rectangular cavity superstructure on the substrate again, obtains measured value 2, and measured value 2 deducts measured value 1 just can obtain Casimir power value in the rectangular cavity structure.
See under the prerequisite of Casimir power measurement of correlation in the rectangular cavity also last, the invention provides a kind of method of measuring Casimir power in the rectangular cavity, also combine simultaneously,, realize Casimir force measurement in the rectangular cavity indirectly by two parallel plane structures with two parallel plane structures.
Description of drawings
The plane probe synoptic diagram that Fig. 1 Nanoword company is provided
Fig. 2 substrate synoptic diagram
The synoptic diagram of rectangular cavity on Fig. 3 substrate
Fig. 4 is the design sketch when measuring rectangular cavity with the Planar Compound structure, and plane probe is represented on wherein yellow plane, and blue portion is represented substrate.
Embodiment
Describe in detail according to the course of work of the present invention in conjunction with measurement effect Fig. 3.
At first carry out certain repacking on the atomic force microscope of U.S. DI company, probe is changed into the tack probe that German Nanoworld company provides, size is elected 6 μ m as simultaneously.The overall dimension of pedestal is elected 20 * 10 * 2 μ m as, wherein planar section respectively accounts for 10 μ m with the rectangular cavity part, and rectangular cavity is of a size of 1000 * 100 * 600nm, the dull and stereotyped thick 100nm between chamber and the chamber, choosing of these sizes mainly considered the restriction of existing manufacturing technology.This pedestal adopts the electron beam nano-photoetching system to process.
The tack probe of AFM with the planar section of substrate over against the time, form two parallel plane structures, at this moment the zero point energy in the two parallel plane structures and the computing formula of Casimir power stand good, because the spacing on two planes is compared with the size of probe or be very little at this moment, satisfy the computing formula under the ideal conditions.Measure the result who comes and should be two plane-parallel results this moment.And when the tack probe of AFM moves on on the substrate rectangular cavity superstructure, just can not calculate it with the zero point energy computing formula in the rectangular cavity simply, can think on two plane-parallel bases, to have added the rectangular cavity structure, so resulting measurement result can be thought the composite structure that two parallel plane structures and rectangular cavity structure are formed, the result who measures when deducting two parallel planes by the result who measures just can obtain the result of Casimir power in the rectangular cavity structure.
Claims (1)
1, a kind of method for measuring Kashmir inside rectangular cavity, it is characterized in that: this method is to realize under the atomic force microscope on the multi-functional scanning probe microscopy (AFM) pattern, method of modifying to main microscope during by similar its conventionally test surface potential energy is reequiped, and its probe changed into plane probe, the size of plane probe is between 6～10 μ m, substrate adopts the composite structure of rectangular cavity with the plane, size is between 20 * 10 * 2 μ m～40 * 20 * 4 μ m, on-chip rectangular cavity requires three limit sizes all between 100～1000nm simultaneously, the ratio of long and high size and wide size is greater than 3, slab-thickness between chamber and the chamber is less than 150nm, when the tack probe with the planar section of substrate over against, form two parallel plane structures, obtain a measured value 1, tack probe with AFM moves on to rectangular cavity superstructure on the substrate again, obtains measured value 2, and measured value 2 deducts the size that measured value 1 just can obtain the Casimir power in the rectangular cavity structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510040458 CN1696653A (en) | 2005-06-09 | 2005-06-09 | Method for measuring Kashmir inside rectangular cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510040458 CN1696653A (en) | 2005-06-09 | 2005-06-09 | Method for measuring Kashmir inside rectangular cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1696653A true CN1696653A (en) | 2005-11-16 |
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ID=35349475
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510040458 Pending CN1696653A (en) | 2005-06-09 | 2005-06-09 | Method for measuring Kashmir inside rectangular cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1696653A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2443024A (en) * | 2006-10-19 | 2008-04-23 | Stephen Joseph Kaye | Device claimed to manipulate the zero-point field |
| CN106558263A (en) * | 2016-11-01 | 2017-04-05 | 同济大学 | A kind of room temperature multistable balanced microcomputer tool system and its implementation |
-
2005
- 2005-06-09 CN CN 200510040458 patent/CN1696653A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2443024A (en) * | 2006-10-19 | 2008-04-23 | Stephen Joseph Kaye | Device claimed to manipulate the zero-point field |
| CN106558263A (en) * | 2016-11-01 | 2017-04-05 | 同济大学 | A kind of room temperature multistable balanced microcomputer tool system and its implementation |
| CN106558263B (en) * | 2016-11-01 | 2019-01-25 | 同济大学 | A kind of room temperature multistable balanced microcomputer tool system and its implementation |
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| C12 | Rejection of a patent application after its publication | ||
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