CN1332482C - Unstable laser cavity tunned by grating - Google Patents
Unstable laser cavity tunned by grating Download PDFInfo
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- CN1332482C CN1332482C CNB200410081185XA CN200410081185A CN1332482C CN 1332482 C CN1332482 C CN 1332482C CN B200410081185X A CNB200410081185X A CN B200410081185XA CN 200410081185 A CN200410081185 A CN 200410081185A CN 1332482 C CN1332482 C CN 1332482C
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Abstract
The present invention relates to an unstable laser resonant cavity for grating tuning, relates to a laser device, and is suitable for high power grating tuning. The present invention is composed of a convex spherical reflection mirror, a concave spherical reflection mirror and a grating composite convergent optical system, wherein the concave spherical reflection mirror is provided with a center hole. The grating composite convergent optical system is positioned behind the concave spherical reflection mirror. The convex spherical reflection mirror, the grating composite convergent optical system and the concave spherical reflection mirror with the center hole have the same optical axis, and the grating normal line and the optical axis form a Littrow angle. A grating is a reflection type concave spherical diffraction grating or a reflection type plane diffraction grating. The present invention has low cavity loss, can output high laser energy and laser power, has wide application foreground in the fields of laser chemistry, atmospheric transmission, laser processing, laser radar, etc., and is suitable for various tunable lasers of carbon dioxide lasers, carbon monoxide lasers, hydrogen fluoride/ deuterium fluoride lasers, etc.
Description
Technical field
The present invention relates to the laser technique field, particularly relate to a kind of unstable laser resonant cavity that is applicable to that the high power grating is tuning.
Background technology
Superpower laser is CO for example
2Laser often adopts the unstable laser resonant cavity.The tunable wave length that in some important use, needs laser output.Existing tunable techniques is that concave spherical mirror is replaced (list of references: R.Barbini, A.Ghigo, A.Palucci, S.Ribezzo.Line tunable TEA CO with convex lens-reflective plane diffraction grating complex optics
2Laser using SFUR configuration.Optics Communications, 1988,68 (1): 41-44).There is following shortcoming in this system: 1. the loss of the resonant cavity of this complex optics of employing is bigger.This is because the coating by vaporization anti-reflective film is all wanted on two surfaces of convex lens, and the grating reflection rate is that the efficient of grating can not be very high under the existing processes level, usually between 90% to 95%.2. grating directly under the irradiation of high power laser light, is easy to damage.3. required raster size is very big, is difficult to make, and price is higher.
Summary of the invention
The purpose of this invention is to provide a kind of new unstable laser cavity tunned by grating that is applicable to the high power tunable laser, adopt grating to form low-loss resonant cavity to realize the laser output of high power tunable.
For achieving the above object, technical solution of the present invention provides a kind of unstable laser cavity tunned by grating, form by protruding spherical reflector, the concave spherical mirror of band centre bore and the compound convergence optical system of grating that is positioned at thereafter, the concave spherical mirror of protruding spherical reflector, band centre bore and the compound convergence optics of grating be an optical axis altogether, and the grating normal becomes the Littrow angle with optical axis.
Described laserresonator, its described protruding spherical reflector and the band centre bore concave spherical mirror, for metallic mirror, gold-plated or the plating deielectric-coating metallic mirror, gold-plated or the plating deielectric-coating the silicon base speculum.
Described laserresonator, the compound convergence optical system of its described grating is a reflective concave spherical surface diffraction grating.
Described laserresonator, the compound convergence optical system of its described grating, comprise that also one assembles lens, convergent lens is between the concave spherical mirror and grating of band centre bore, and concave spherical mirror, convergent lens and the grating of protruding spherical reflector, band centre bore be totally one optical axis.
Described laserresonator, the compound convergence optical system of its described grating also comprises a concave mirror, the concave surface of concave mirror is positioned at the concave spherical mirror and the grating rear of band centre bore forward.The concave spherical mirror of protruding spherical reflector, band centre bore and concave mirror be totally one optical axis; Grating is positioned at the front side of concave mirror, and its reflecting surface backward, and is corresponding with the concave surface of concave mirror.
Described laserresonator, its described concave mirror is spherical reflector or non-spherical reflector.
Described laserresonator, its described composite grating convergence optical system, also comprise a beam expander, beam expander is between the concave spherical mirror and grating thereafter of band centre bore, and concave spherical mirror, beam expander and the grating of protruding spherical reflector, band centre bore be totally one optical axis.
Described laserresonator, its described beam expander is made up of divergent lens and convergent lens, and convergent lens is positioned at the divergent lens rear, and concave spherical mirror, divergent lens, convergent lens and the grating of protruding spherical reflector, band centre bore be totally one optical axis.
Described laserresonator, its described beam expander is made up of convex reflecting mirror and concave mirror, two mirrors protruding, concave surface is relative, the convex surface of convex reflecting mirror forward, the concave surface of concave mirror backward, concave mirror is positioned at the front side of convex reflecting mirror; The concave spherical mirror of protruding spherical reflector, band centre bore and convex reflecting mirror be totally one optical axis.
Described laserresonator, its described convex reflecting mirror and concave mirror are spherical reflector or non-spherical reflector.
Described laserresonator, its described grating is reflective plane diffraction grating or reflective concave spherical surface diffraction grating.
The output that directly outside the edge of protruding spherical reflector, is coupled of described laserresonator, its laser beam.
Described laserresonator, adopt the side annular laser way of output, the plane output coupled mirrors of band centre bore then is set between the concave spherical mirror of protruding spherical reflector and band centre bore, the plane output coupled mirrors of protruding spherical reflector, band centre bore, the concave spherical mirror of band centre bore and the compound convergence optics of grating be an optical axis altogether, between the normal of the plane output coupled mirrors of band centre bore and the optical axis inclination angle is arranged, the inclination angle scope is 20 ° to 70 °.
The cavity loss of unstable laser cavity tunned by grating of the present invention is low, can export high laser energy and laser power, be applicable to carbon dioxide laser, CO (carbon monoxide converter) laser, multiple tunable laser such as hydrogen fluoride/deuterium fluoride laser, in laser chemistry, fields such as propagation in atmosphere, laser processing, laser radar have wide practical use.
Description of drawings
Fig. 1 is common no tuning unstable laser resonant cavity schematic diagram;
Fig. 2 is existing unstable laser cavity tunned by grating schematic diagram;
Fig. 3 is a unstable laser cavity tunned by grating schematic diagram of the present invention;
Fig. 4 is the first embodiment of the present invention;
Fig. 5 is the second embodiment of the present invention;
Fig. 6 is the third embodiment of the present invention;
Fig. 7 is the fourth embodiment of the present invention;
Fig. 8 is the fifth embodiment of the present invention;
Fig. 9 is the sixth embodiment of the present invention.
Embodiment:
For further specifying feature of the present invention and structure, the present invention is described in detail below in conjunction with accompanying drawing.
Consult Fig. 1 no tuning confocal unsteady cavity schematic diagram that just propping up usually.Resonant cavity is by protruding spherical reflector 1, and coupled mirrors 2 is exported on 45 ° of planes of band centre bore and concave spherical mirror 3 is formed.The radius of curvature of its convexity spherical reflector is R
1, being the speculum of dispersing, focal length is f
1=R
1/ 2; The radius of curvature of concave spherical mirror 3 is R
2, its speculum for assembling, focal length is f
2=R
2/ 2.The spacing of protruding spherical reflector 1 and concave spherical mirror 3 is L.45 ° of planes output coupled mirrors 2 of band centre bore are positioned near the protruding spherical reflector 1, and middle body has the hole that diameter is a, and the axis in this hole and level crossing are also at 45, and as shown in the figure, in fact this is a major axis and the ratio of minor axis is the elliptical aperture of .
According to common unsteady cavity theory (but for example list of references: A.E.Siegman. " Lasers ", Mill Valley, California:University Science Books.1986) following relation is arranged:
L＝f
2-f
1
M is the magnification ratio of unsteady cavity in the formula, and L is that the chamber of resonant cavity is long.Illumination diameter actual on protruding spherical reflector 1 is a
1, a
1=a.Actual illumination diameter is a on plane output coupled mirrors 2
2, a
2=Ma.According to the unsteady cavity theory, to spherical mirror resonator, the power loss of round trip is in the chamber
, as the output coupling.Corresponding gain is fed back to
The difference of existing unstable laser cavity tunned by grating shown in Figure 2 and common no tuning unstable laser resonant cavity shown in Figure 1 is that convergent lens 4 and reflective plane diffraction grating are formed compound optical system and replaced concave spherical mirror 3.The focal distance f of focal length and concave spherical mirror 3 is assembled in the equivalence of the optical system that this is compound
2Identical, so the resonant cavity of Fig. 2 is similarly for the unsteady cavity of the wavelength that meets grating auto-collimation condition and Fig. 1 standard, only is the substandard completely reflecting mirror of effective reflectivity of this complex optics.
The auto-collimation condition of grating is the Littrow condition: 2dSin α=λ.D is a grating constant in the formula, and α is the angle of grating normal and resonant cavity optical axis, and λ is an optical maser wavelength.
Fig. 3 is a unstable laser cavity tunned by grating schematic diagram of the present invention.Concave spherical mirror 6 and the compound convergence optical system 20 of grating that laserresonator of the present invention is exported coupled mirrors 2, band centre bore by protruding spherical reflector 1,45 ° of planes with holes, center are formed, wherein the compound convergence optical system 20 of grating is made up of beam expander 7 and reflective diffraction gratings 5, the concave spherical mirror 6 of protruding spherical reflector 1, band centre bore, beam expander 7 and reflective diffraction gratings 5 be totally one optical axis.The focal length of the concave spherical mirror 6 of band centre bore is identical with the concave spherical mirror 3 of Fig. 1, is f
2The diameter of the centre bore on the concave spherical mirror 6 of band centre bore is identical with the diameter that the hole on the coupled mirrors 2 is exported on 45 ° of planes, is a.Beam expander 7 also is f with the equivalent focal length of the grating complex optics 20 that grating 5 is formed
2According to design of the present invention, the equivalence convergence focal length of being made up of concave spherical mirror 6 and the compound convergence optical system 20 of grating is f
2, promptly identical with concave spherical mirror 3 among Fig. 1.Concave spherical mirror 6 is optical elements of high reflectance, for example for the CO2 laser, adopts gold-plated copper speculum, and its reflectivity can reach more than 99%.Because the percentage of concave spherical mirror 6 shared area in the whole equivalent optical system of being made up of concave spherical mirror 6 and the compound convergence optical system 20 of grating is very big, for
Therefore loss that should the equivalence optical system is very little, and efficient is very high.Adopted beam expander 7 in the compound convergence optical system 20 of this external grating, the laser intensity on the grating 5 also will descend greatly, thereby prevent grating 5 to be subjected to the light laser effect and destroy.For laser can be turned round under high power, grating 5 and speculum 6 can adopt the manufacturing of high heat conductance base material and cool off with cooling fluid.
Fig. 4 is the first embodiment of the present invention, has wherein formed beam expander 7 by concavees lens 8 and convex lens 9.
Fig. 5 is the second embodiment of the present invention, wherein by convex reflecting mirror 10 and concave mirror 11 form beam expander 7, two mirrors protruding, concave surface is relative, the convex surface of convex reflecting mirror 10 is forward, the concave surface of concave mirror 11 backward, concave mirror 11 is positioned at the front side of convex reflecting mirror 10; The concave spherical mirror 6 of protruding spherical reflector 1, band centre bore and convex reflecting mirror 10 be totally one optical axis.Convex reflecting mirror 10 and concave mirror 11 are spherical reflectors.In order to reduce optical aberration, improve the optical quality of laser beam, these two speculums also can adopt non-spherical reflector.
Fig. 6 is the third embodiment of the present invention, is a kind of simplification situation, does not adopt beam expander 7 in the compound convergence optical system 20 of grating, is replaced by a convergent lens 12.Convergent lens 12 is between the concave spherical mirror 6 and reflective diffraction gratings thereafter 5 of band centre bore, and concave spherical mirror 6, convergent lens 12 and the reflective diffraction gratings 5 of band centre bore be totally one optical axis.
Fig. 7 is the fourth embodiment of the present invention, it is the another kind of situation of simplifying, do not adopt beam expander 7 in the compound convergence optical system 20 of grating, replace by a concave mirror 13, the concave surface of concave mirror 13 forward, be positioned at the concave spherical mirror 6 and reflective diffraction gratings 5 rears of band centre bore, the concave spherical mirror 6 of band centre bore and concave mirror 13 be totally one optical axis; Reflective diffraction gratings 5 is positioned at the front side of concave mirror 13, and its reflecting surface backward, and is corresponding with the concave surface of concave mirror 13.Concave mirror 13 is spherical reflectors.In order to reduce optical aberration, improve the optical quality of laser beam, this speculum 13 also can adopt non-spherical reflector.
Fig. 8 is the fifth embodiment of the present invention, is further simplification situation of the present invention, and the compound convergence optical system 20 of grating is a reflective concave spherical surface diffraction grating 14.
Fig. 9 is the sixth embodiment of the present invention, and 45 ° of planes output coupled mirrors of band centre bore wherein are not set, the laser beam output that directly is coupled outside the edge of protruding spherical reflector 1.
Claims (14)
1. unstable laser cavity tunned by grating, by the concave spherical mirror of protruding spherical reflector, band centre bore and the compound convergence optical system of grating after being positioned at the concave spherical mirror of band centre bore forms, it is characterized in that: the compound convergence optical system of grating after this unstable laser resonant cavity comprises the concave spherical mirror of a band centre bore and is positioned at the concave spherical mirror of being with centre bore; The concave spherical mirror of protruding spherical reflector, band centre bore and the compound convergence optics of grating be an optical axis altogether, and the grating normal becomes the Littrow angle with optical axis.
2. laserresonator as claimed in claim 1 is characterized in that: the concave spherical mirror of described protruding spherical reflector and band centre bore is metallic mirror or silicon base speculum gold-plated or the plating deielectric-coating.
3. laserresonator as claimed in claim 1 is characterized in that: the concave spherical mirror of described protruding spherical reflector and band centre bore is metallic mirror gold-plated or the plating deielectric-coating.
4. laserresonator as claimed in claim 1 is characterized in that: the compound convergence optical system of described grating is a reflective concave spherical surface diffraction grating.
5. laserresonator as claimed in claim 1, it is characterized in that: the compound convergence optical system of described grating, comprise that one assembles lens, convergent lens is between the concave spherical mirror and grating of band centre bore, and concave spherical mirror, convergent lens and the grating of protruding spherical reflector, band centre bore be totally one optical axis.
6. laserresonator as claimed in claim 1 is characterized in that: the compound convergence optical system of described grating, comprise a concave mirror, and the concave surface of concave mirror is positioned at the concave spherical mirror and the grating rear of band centre bore forward; The concave spherical mirror of protruding spherical reflector, band centre bore and concave mirror be totally one optical axis; Grating is positioned at the front side of concave mirror, and its reflecting surface backward, and is corresponding with the concave surface of concave mirror.
7. laserresonator as claimed in claim 6 is characterized in that: described concave mirror is spherical reflector or non-spherical reflector.
8. laserresonator as claimed in claim 1, it is characterized in that: the compound convergence optical system of described grating, comprise a beam expander, this beam expander is between the concave spherical mirror and grating thereafter of band centre bore, and concave spherical mirror, beam expander and the grating of protruding spherical reflector, band centre bore be totally one optical axis.
9. laserresonator as claimed in claim 8, it is characterized in that: described beam expander, be made up of divergent lens and convergent lens, convergent lens is positioned at the divergent lens rear, and concave spherical mirror, divergent lens, convergent lens and the grating of protruding spherical reflector, band centre bore be totally one optical axis.
10. laserresonator as claimed in claim 8 is characterized in that: described beam expander, form by convex reflecting mirror and concave mirror, two mirrors protruding, concave surface is relative, the convex surface of convex reflecting mirror forward, the concave surface of concave mirror backward, concave mirror is positioned at the front side of convex reflecting mirror; The concave spherical mirror of protruding spherical reflector, band centre bore and convex reflecting mirror be totally one optical axis.
11. laserresonator as claimed in claim 10 is characterized in that: described convex reflecting mirror and concave mirror are spherical reflector or non-spherical reflector.
12. as claim 5,6,8,9 and 10 each described laserresonator wherein, it is characterized in that: described grating is reflective plane diffraction grating or reflective concave spherical surface diffraction grating.
13. laserresonator as claimed in claim 1 is characterized in that: the laser beam output that directly outside the edge of protruding spherical reflector, is coupled.
14. laserresonator as claimed in claim 1, it is characterized in that: adopt the side annular laser way of output, the plane output coupled mirrors of band centre bore is set between the concave spherical mirror of protruding spherical reflector and band centre bore, the plane output coupled mirrors of protruding spherical reflector, band centre bore, the concave spherical mirror of band centre bore and the compound convergence optics of grating be an optical axis altogether, and the inclination angle is 20 ° to 70 ° between the normal of the plane output coupled mirrors of band centre bore and the optical axis.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410081185XA CN1332482C (en) | 2004-10-11 | 2004-10-11 | Unstable laser cavity tunned by grating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410081185XA CN1332482C (en) | 2004-10-11 | 2004-10-11 | Unstable laser cavity tunned by grating |
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|---|---|
| CN1761110A CN1761110A (en) | 2006-04-19 |
| CN1332482C true CN1332482C (en) | 2007-08-15 |
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|---|---|---|---|
| CNB200410081185XA Expired - Fee Related CN1332482C (en) | 2004-10-11 | 2004-10-11 | Unstable laser cavity tunned by grating |
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| CN103170732A (en) * | 2013-03-19 | 2013-06-26 | 启东文鑫电子有限公司 | Operation system of laser |
| CN105720471B (en) * | 2014-12-02 | 2018-11-02 | 中国科学院大连化学物理研究所 | A kind of regulating device of hydrogen fluoride laser grating unsteady cavity |
| CN106785855B (en) * | 2015-11-23 | 2019-01-25 | 中国科学院大连化学物理研究所 | A kind of high efficiency hydrogen fluoride laser grating unsteady cavity |
| CN110137799B (en) * | 2019-05-29 | 2021-12-31 | 北京工业大学 | Composite cavity laser with adjustable laser emitting direction |
| CN111082300B (en) * | 2019-12-31 | 2021-07-27 | 华中科技大学 | Cavity length locking method and system of double-resonance optical parametric oscillator |
| CN113381277B (en) * | 2021-05-27 | 2022-11-15 | 哈尔滨工程大学 | Circular polarization laser of chiral metamaterial |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4361889A (en) * | 1980-08-06 | 1982-11-30 | The United States Of America As Represented By The United States Department Of Energy | Grating tuned unstable resonator laser cavity |
| CN86103373A (en) * | 1986-05-15 | 1987-11-25 | 北京工业学院 | The broad band coupling method of multi-frequency tunable laser |
| CN2030766U (en) * | 1987-07-25 | 1989-01-11 | 中央民族学院物理系 | Individual tuning multi-wavelength dye laser |
| CN2089211U (en) * | 1991-04-24 | 1991-11-20 | 机械电子工业部第十二研究所 | Full internal cavity construction of constant spectrum line co2 laster |
| US6671295B2 (en) * | 1998-09-14 | 2003-12-30 | Interscience, Inc. | Tunable diode laser system, apparatus and method |
-
2004
- 2004-10-11 CN CNB200410081185XA patent/CN1332482C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4361889A (en) * | 1980-08-06 | 1982-11-30 | The United States Of America As Represented By The United States Department Of Energy | Grating tuned unstable resonator laser cavity |
| CN86103373A (en) * | 1986-05-15 | 1987-11-25 | 北京工业学院 | The broad band coupling method of multi-frequency tunable laser |
| CN2030766U (en) * | 1987-07-25 | 1989-01-11 | 中央民族学院物理系 | Individual tuning multi-wavelength dye laser |
| CN2089211U (en) * | 1991-04-24 | 1991-11-20 | 机械电子工业部第十二研究所 | Full internal cavity construction of constant spectrum line co2 laster |
| US6671295B2 (en) * | 1998-09-14 | 2003-12-30 | Interscience, Inc. | Tunable diode laser system, apparatus and method |
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|---|---|
| CN1761110A (en) | 2006-04-19 |
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