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CN1322050C - Acoustic backing composition, ultrasonic probe and ultrasonic diagnostic apparatus - Google Patents

Acoustic backing composition, ultrasonic probe and ultrasonic diagnostic apparatus Download PDF

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Publication number
CN1322050C
CN1322050C CNB2005100764567A CN200510076456A CN1322050C CN 1322050 C CN1322050 C CN 1322050C CN B2005100764567 A CNB2005100764567 A CN B2005100764567A CN 200510076456 A CN200510076456 A CN 200510076456A CN 1322050 C CN1322050 C CN 1322050C
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China
Prior art keywords
acoustic
lining member
acoustic lining
fiber
filler
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CN1712443A (en
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山下洋八
细野靖晴
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Canon Medical Systems Corp
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Toshiba Corp
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Abstract

Disclosed is an acoustic backing composition comprising an ethylene-vinyl acetate copolymer containing 20 to 80% by weight of the vinyl acetate units and a filler contained in the ethylene-vinyl acetate copolymer.

Description

Acoustic backing composition, ultrasonic probe and diagnostic ultrasound equipment
The cross reference of related application
2004-176334 number of on June 15th, 2004-176333 number 1 filing an application according to the Japanese patent application of filing an application 15 days previous June in 2004 of the application and 2005-161985 number of filing an application on June 1st, 2005 and require its right of priority, its full content is here as quoting with reference to institute.
Technical field
The present invention relates to a kind of acoustic backing composition, a kind ofly comprise the acoustic lining member that forms by acoustic backing composition and be used to receive and dispatch ultrasonic probe and a kind of diagnostic ultrasound equipment of travelling to and fro between as ultrasonic signal between the object that comprises this ultrasonic probe.
Background technology
Medical ultrasound ripple diagnostic device or ultrasonic imaging inspection units send to object with ultrasonic signal and receive the echoed signal returned in the object to form the image of interior of articles.Main use can send the also array-type ultrasonic probe of received ultrasonic signal in these ultrasonic diagnosiss and ultrasonic imager.
Ultrasonic probe comprises sound lens and piezoelectric element.Using ultrasonic probe to carry out in the medical diagnosis, piezoelectric element is in the ultrasonic probe that makes in sound lens one side and contacts object so that enter the state of object from the front transmission ultrasonic signal of piezoelectric element.Ultrasonic signal appointed positions in object is assembled by the electron focusing function that produces the runtime according to piezoelectric element and by the focusing function that sound lens produces.In this case, can ultrasonic signal be sent in the intravital designated area of thing by the runtime of control piezoelectric element, and receive echoed signal and ultrasonic probe, handle so that obtain ultrasonic imaging (tomographic analytic image) in the above-mentioned designated area from object.The running of piezoelectric element also can be discharged into the back side with ultrasonic signal.Therefore, the acoustic lining member is placed in the piezoelectric element back side sends to the ultrasonic signal at the back side, thereby avoid normal ultrasonic signal to send to harmful effect in the object with the ultrasonic signal (echoed signal) of backside reflection to absorb (weakening).
Traditional acoustic lining member comprises as the Resins, epoxy of base resin and as filler and is filled in powder material in the base resin.In base resin, use highdensity powder such as tungsten (W) powder, lead (Pb) powder or zinc oxide (ZnO) powder as the powder material of filling.The acoustic lining member has about 2.0g/cm 3Density, about 2, the velocity of sound of 500m/s and the specific acoustic resistance of about 5MRalys.
Described in " Haifeng Wan etc.; IEEE Transaction Ultrasonic Ferroelectrics andFrequency Control; vol.48; No.1; P.78,2001 " and be filled in acoustic lining member in the base resin a kind of comprising with highdensity powder material such as W, pb or ZnO as the elastomeric material of base resin such as neoprene (CR), isoprene-isobutylene rubber or urethanes and as filler.Acoustic lining member described in this piece publication has about 3.0g/cm 3Density, about 1, the velocity of sound of 500m/s and the specific acoustic resistance of about 5MRalys.
Japanese Patent the 3rd, 420, No. 951 and the 3rd, 420, disclosed in No. 954 is ultrasonic probe.A kind of in these ultrasonic probes constitutes like this, is about to material such as aluminium nitride, boron nitride, copper or carbon that a slice has high thermal conductivity and is placed between piezoelectric element and the acoustic lining member.Another kind of ultrasonic probe is made up of the acoustic lining member that comprises aluminium nitride, silicon carbide or copper as filler.Disclosed ultrasonic probe can be discharged into heat the back side of piezoelectric element effectively in these patent documents.
Japanese Patent open (KoKai) 60-68832 number is disclosed to be the ultrasonic probe that comprises the back layer of performance anisotropy acoustic characteristics.Disclosed be ultrasonic probe comprise be installed on synthetic resins such as Resins, epoxy or the acrylic resin or be installed in steel fiber on the compound-material that forms by rubber, and these steel fibers are arranged on the direction identical with the orientation of oscillation of piezoelectric oscillator.
In addition, Japanese Patent discloses in 9-127955 number (United States Patent (USP) the 5th, 648, No. 941) and discloses a kind of acoustic lining member that is formed by preform and matrix material.Disclosed is that preform is represented linear fibrous texture, planar fibrous texture such as synthetic resins reticulation thin slice or three-dimensional fibrous structure.Also disclosed is that matrix material uses rubber and/or Resins, epoxy.
Yet disclosed acoustic lining member all can cause following pointed problem in each above-mentioned publication that exemplifies.
In making ultrasonic probe, piezoelectric element is bonded on the acoustic lining member, subsequently acoustic matching layer is adhered on the piezoelectric element.Then, carry out cutting process so that acoustic matching layer and piezoelectric element are divided into the part of a plurality of arrangements from acoustic matching layer towards the acoustic lining member, thereby form a plurality of passages.Then, sound lens is placed on the acoustic matching layer of each passage.In the cutting process process, in the acoustic lining member, form the groove that is fit to cutting part.For the susceptibility in the ultrasonic probe that improves ad hoc structure, the ratio that reduces the defectiveness parts of passage is important.And, having therein in the diagnostic ultrasound equipment of ultrasonic probe, the ratio that reduces the defectiveness parts of passage according to the quality of tomographic analytic image also is important.More particularly, if the physical strength in zone is not enough between the adjacent grooves that forms in the acoustic lining member, subsides with the acoustic lining member and make passage to use thereby will cause being included on the groove piezoelectric element in the formed passage.
Acoustic lining member described in each above-mentioned publication that exemplifies all comprises base resin for example Resins, epoxy or rubber such as neoprene, isoprene-isobutylene rubber or urethanes and the various filler that is filled in the base resin.Therefore acoustic lining member with ad hoc structure is brittle, can break or peels off owing to stress produces between base resin and the filler in the cutting process process.Breaking or peeling off to cause the acoustic lining member to be folded in the zone between the adjacent grooves, perhaps causes peeling off between acoustic lining member and the piezoelectric element, thereby causes defective passage.Especially attempting to dwindle channel sized, miniaturized ultrasonic ripple probe with the spacing of 50~200 μ m and increasing the density of array and the place of implementing cutting process towards the acoustic lining member from acoustic matching layer, because big stress is understood peeling off between folding and the acoustic lining member and the piezoelectric oscillator that cause acoustic lining member between the adjacent grooves more significantly.
By using high temperature (120 ℃ or higher) solidified epoxyn to be used for bonding acoustic lining member and piezoelectric element can improve peeling off between acoustic lining member and the piezoelectric oscillator to a certain extent.Yet it should be noted that in the place of using neoprene, isoprene-isobutylene rubber or urethanes the acoustic lining member be out of shape or sex change so that cause bonding strength deficiency between bonding acoustic lining member afterwards and the piezoelectric element under bonding temp as the base mateiral of acoustic lining member.
Equally, in using neoprene, isoprene-isobutylene rubber or the acoustic lining member of urethanes as base resin, it is low that it weakens hyperacoustic performance.More particularly, be difficult to weaken fully from the acoustic lining member ultrasonic waves transmitted of piezoelectric element towards the back side.In order to make specific acoustic lining member weaken ultrasonic wave fully, be necessary to increase the thickness of acoustic lining member.But,, be difficult to reduce the weight and the hear rate performance of ultrasonic probe if the thickness of acoustic lining member increases.
Summary of the invention
According to first aspect of the present invention, a kind of acoustic backing composition is provided, comprising:
Comprise the unitary ethylene-vinyl acetate copolymer of 20~80 weight % vinyl acetates, and be included in the filler in the ethylene-vinyl acetate copolymer.
According to second aspect of the present invention, a kind of ultrasonic probe is provided, it comprises:
A plurality of arrangements, form that spatial between the passage and each all have piezoelectric element and the passage of formed acoustic matching layer on piezoelectric element;
Flaky acoustic lining member is furnished with piezoelectric element and has the groove that forms according to described space on it;
And the sound lens that on acoustic matching layer, forms;
Wherein the acoustic lining member comprises and contains 20~80 unitary ethylene-vinyl acetate copolymers of weight % vinyl acetate and be included in filler in the ethylene-vinyl acetate copolymer.
In addition, according to the 3rd aspect of the present invention, provide a kind of diagnostic ultrasound equipment, it comprises a ultrasonic probe and the ultrasonic probe controller that is connected ultrasonic probe by cable, and this ultrasonic probe comprises:
A plurality of arrangements, form that spatial between the passage and each all have piezoelectric element and the passage of the acoustic matching layer that forms on piezoelectric element;
Flaky acoustic lining member, the groove that adapts with the space of being furnished with piezoelectric element on it and having formation;
And the sound lens that on acoustic matching layer, forms;
Wherein the acoustic lining member comprises and contains the unitary ethylene-vinyl acetate copolymer of 20~80 weight % vinyl acetates and be included in filler in the ethylene-vinyl acetate copolymer.
Description of drawings
Fig. 1 is the oblique drawing of illustrative according to the ultrasonic probe structure of embodiment of the present invention.
Fig. 2 is included in the cross-sectional view of the peripheral portion structure of the piezoelectric element in the ultrasonic probe shown in Figure 1 for explanation.
Fig. 3 A~3D is illustrated together is made acoustic lining member process according to embodiment of the present invention a cross-sectional view.
Fig. 4 A and 4B are illustrated together is made the ultrasonic probe process according to embodiment of the present invention cross-sectional view.
Fig. 5 illustrative according to the structure of the diagnostic ultrasound equipment of embodiment of the present invention.
Embodiment
To describe embodiment of the present invention in detail now.
According to the acoustic backing composition of embodiment, it comprises base resin that contains 20~80 unitary ethylene-vinyl acetate copolymers of weight % vinyl acetate (hereinafter referred to as EVA) and the filler that is included among the EVA.
If the unitary content of vinyl acetate is lower than 20 weight % in the EVA base resin, EVA base resin itself just becomes brittle so that is difficult in and sneaks into a large amount of fillers among the EVA so.If the mixed volume of filler is limited, be difficult to reach the velocity of sound and specific acoustic resistance prescribed value separately, promptly 1,500~4, the velocity of sound of 000m/s and the specific acoustic resistance of 2.0~8MRalys.On the other hand, if the unitary content of vinyl acetate surpasses 80 weight %, EVA just becomes very soft so that feasiblely become inconvenient from composition casting acoustic lining member that comprises EVA and the surface of polishing molded acoustic lining member so.Wish that the more unitary content of vinyl acetate is in the scope of 40~60 weight % among the EVA.
Be included in physical strength and the thermal transpiration performance that filler among the EVA is used to improve the acoustic lining member with for example form of fiber, chemically woven fabrics, powder or thin slice, improve the hyperacoustic rate of fall-off and the control velocity of sound.
Can use different fibers to comprise and for example at least aly be selected from fiber in the group of forming by carbon fiber, silicon carbide fiber and sapphire whisker as filler.The fiber that uses among the embodiment is not limited to those fibers that is formed by the single kind material.For example, also can use by the CVD method at the SiC of surface coverage diamond film or resin molding fiber.
In these fibers, special wish be to use carbon fiber.Can use carbon fiber such as the pitch-based carbon fiber and the PAN based carbon fiber of different grades.Also can use carbon nanotube as carbon fiber.Especially, wish that use has 2.1g/cm 3Or the pitch-based carbon fiber of higher density and 100w/mK or higher thermal conductivity.
For carbon fiber, desirable is to have 20 μ m or littler diameter and the length that is five times in or more is multiple times than diameter.Be used to suppress reflection by comprising acoustic lining member that acoustic backing composition with 20 μ m or littler mean diameter carbon fiber forms from the piezoelectric element that is placed in the arrangement on the acoustic lining member.Also can be used for reaching desired physical strength in enough cutting process processes.On the other hand, have the acoustic lining member that the acoustic backing composition that is five times in or more is multiple times than the fiber of diameter length forms and further to improve the thermal transpiration performance by comprising.For example, under specific acoustic lining member was used for the situation of belly probe that 2~5MHz requires 4mm or thicker degree, heat can be disperseed in the acoustic lining member effectively.More be limited to 500 times of diameter on the staple length of Xi Wanging.
Fleut and laminal filler comprise at least a inorganic materials that is selected from the group that comprises zinc oxide, zirconium white, aluminum oxide, silicon oxide, titanium dioxide, silicon carbide, aluminium nitride and boron nitride.It is desirable having 30 μ m or littler average particle diameter for fleut, more preferably 20 μ m or littler.
The desirable amount that is included in the filler among the EVA is 20~70 volume % based on EVA and filler total amount.If filler content is lower than 20 volume %, be difficult to improve effectively mechanical property, dissipation of heat performance, rate of fall-off and the velocity of sound of the acoustic lining member that forms by resulting acoustic backing composition.On the other hand, if filler content surpasses 70 volume %, be difficult to filler is kneaded in the EVA base resin, thereby be difficult to resulting acoustic backing composition is used to form the acoustic lining member with desired shape.The filler content amount of the filler of EVA and filler total amount (promptly based on) more wishes to be in the scope of 40~60 volume %.
For the acoustic backing composition according to embodiment, it preferably further comprises at least one profit and is selected from metal powder in following group: tungsten (W), molybdenum (Mo) and silver (Ag).The acoustic lining member that is formed by the acoustic backing composition that comprises metal powder above-mentioned has higher density and makes it possible to further improve hyperacoustic rate of fall-off.Promptly based on the amount of the metal powder of EVA, filler and metal powder total amount, be preferably 10 volume % or still less for the content of metal powder.
For the acoustic backing composition according to embodiment, it further comprises vulcanizing agent, vulcanization accelerator, slipping agent such as carnauba wax, anti-degradation agents and silicone resin also is acceptable.
The above-mentioned acoustic backing composition that is used for embodiment is mainly used the starting material of the acoustic lining member that acts on the ultrasonic probe that comprises unidirectional array type piezoelectric element described below.Acoustic backing composition is also made the starting material that comprise the ultrasonic probe of bi-directional arrangement type piezoelectric element or be used for the acoustic lining member of manufacturing cell (single element) ultrasonic probe with acting on.
The structure of the ultrasonic probe that comprises the sheet acoustic lining member that is formed by above-mentioned acoustic backing composition is described referring now to accompanying drawing.
Fig. 1 is the oblique drawing of the explanation of part disengaging according to the ultrasonic probe structure of embodiment.Fig. 2 is the cross-sectional view of the structure in the explanation ultrasonic probe main points part shown in Figure 1.
Ultrasonic probe 1 comprises base 2.Flaky acoustic lining member 3 is fixed on the base 2, has the insulation of insertion glue-line 4 between them.Insulation glue-line 4 is formed and is had the thickness of 20~200 μ m by for example epoxy resin tackiness agent.The insulation glue-line 6 that passage 11 usefulness a plurality of arrangements, that form desired width spaces between the passage are inserted between it is fixed on the acoustic lining member 3.Passage 11 has the space of desired width between the passage.Insulation glue-line 6 is formed and is had the thickness of 20~200 μ m by for example epoxy resin tackiness agent.First and second electrode 8a, 8b that each passage 11 comprises the piezoelectric element 5 with insulation glue-line 6 and has piezoelectrics 7 and form on two surfaces of piezoelectrics 7, acoustic matching layer 9 is fixed on second electrode 8b of piezoelectric element 5, has the insulation glue-line 10 of insertion between them.Insulation glue-line 10 is formed by the epoxy resin tackiness agent and has for example thickness of 2.0~200 μ m.In acoustic lining member 3 with passage 11 between the form that conforms to of space form groove 12.In addition, sound lens 13 is fixed on the acoustic matching layer 9 in each passage 11, has the insulation glue-line (not marking) that forms by for example silicone resin of insertion between them.
Base 2, acoustic lining member 3, passage 11 and sound lens 13 are embedded in the container 14.Being embedded into equally in the container 14 can also be signal treatment circuit (not marking), and it comprises the pilot circuit of runtime of piezoelectric element 5 of each passage that is used for controlling a plurality of passages 11 and the amplifying circuit that is used for the signal that amplifying piezo-electric element 5 receives.The cable 15 that connects first and second electrode 8a, 8b extends to the outside of container 14 from a side relative with sound lens 13.
In the ultrasonic probe of said structure, apply voltage so that piezoelectrics 7 produce resonance between first electrode 8a of the piezoelectric element 5 in being included in each passage 11 and second electrode 8b, thereby by acoustic matching layer 9 and sound lens 13 emission (transmission) ultrasonic wave.In the reception stage, the ultrasonic wave that receives by sound lens 13 and acoustic matching layer 9 makes piezoelectrics 7 produce vibration.Then, vibration is converted to signal so that obtain image by electricity.
In the ultrasonic probe of said structure, base is formed by the material that for example has small deformation and high rigidity.Having the metal of high thermoconductivity or stupalith by use is used to form base 2 and can promotes the dissipation of heat performance.
In the ultrasonic probe of said structure, acoustic lining member 3 is formed by previously described acoustic backing composition.As shown in Figure 2, acoustic lining member 3 comprises by comprising 20~80 unitary ethylene-vinyl acetate copolymers of weight % vinyl acetate (EVA) base resin 16 that forms and the filler 17 (fiber for instance) that is included in the base resin 16.
The filler that uses in the acoustic lining member replaces the form of fiber above-mentioned to be included in the EVA base resin with chemically woven fabrics, powder or thin slice.Equally, for filler, also can comprise fiber together with powdery or sheet inorganic materials.
Can use different fibers as filler, comprise the fiber in for example at least a group that is selected from carbon fiber, silicon carbide fiber and sapphire whisker.Fiber is not limited to those fibers that is formed by the single kind material.For example, also can use by the CVD method at the SiC of surface coverage diamond film or resin molding fiber.For fiber, for mechanical property and the dissipation of heat performance of improving the acoustic lining member and improve hyperacoustic rate of fall-off, wish to have 20 μ m or littler diameter and the length that is five times in or more is multiple times than diameter.
In these fibers, special wish be to use carbon fiber.Can use carbon fiber such as the pitch-based carbon fiber and polyacrylonitrile (PAN) based carbon fiber of different grades.Also can use carbon nanotube as carbon fiber.Especially, desirable being to use has 2.1g/cm 3Or the pitch-based carbon fiber of higher density and 100w/mK or higher thermal conductivity.
Fleut and laminal filler comprise at least a inorganic materials that is selected from the group of being made up of zinc oxide, zirconium white, aluminum oxide, silicon oxide, titanium dioxide, silicon carbide, aluminium nitride and boron nitride.Especially at least a powder or the thin slice that comprises the inorganic materials in aluminium nitride and the boron nitride group that be selected from shows excellent heat conductivity, thereby can be so that the acoustic lining piece table reveals the dissipation of heat performance of further improvement.
For the filler that is included in the EVA base resin, owing to previously described reason, the amount of its hope is 20~70 volume %, is preferably 40~60 volume %.
Especially, for having 20 μ m or more minor diameter and the fiber that is five times in or more is multiple times than diameter length, the desirable amount that is filled in the acoustic lining member is 20~70 volume %.Becoming 30 ° or 20~80 volume % of the fiberfill fibers arranged of Small angle more for the axle with relative acoustic lining member thickness direction, also is desirable.
For at least a powder that is selected from the metal of tungsten, molybdenum and silver, the metal powder of 10 volume % or less amount for example, further being filled in the acoustic lining member is acceptable.
For the acoustic lining member, has 2.0g/cm 3Or littler density is desirable.Especially, for the acoustic lining member, have specific acoustic resistance, 5w/mk or bigger thermal conductivity and the 2.0g/cm of 2~8MRalys 3Or littler density is desirable.
In the side of acoustic lining member metal skirt such as copper or silver being installed is acceptable so that further improve the dissipation of heat performance of acoustic lining member.Equally, the acoustic lining member is connected in the ground-electrode line of the cable that connects signal electric connection or ground connection electric connection or shielding wire so that promote that heat also is acceptable from base material dispersive performance.
Piezoelectrics are crystal formation by for example PZT system or relaxation oscillator (relaxor) series piezoelectric ceramic material or relaxation oscillator.
Be baked onto two surfaces of piezoelectrics by the mashed prod that for example will comprise bronze, silver powder or nickel powder, utilize reactive sputtering to pass through to form gold and silver or nickel dams, perhaps by form first and second electrode at two electroplating surface gold and silver of piezoelectrics or nickel dam on two of piezoelectrics surfaces.
Acoustic matching layer is formed by the material that for example comprises as the Resins, epoxy of base material.Acoustic matching layer is not limited to single layer structure.Also can use the acoustic matching layer of multilayered structure.
Sound lens is formed by for example siloxane-based material.
The manufacture method of acoustic lining member is described referring now to Fig. 3 A~3D.
The first step, to comprise the unitary EVA base resin of 20~80 weight % vinyl acetates and introduce space between two hot-rollings with the EVA base resin of kneading, then for example vulcanizing agent and vulcanization accelerator join in the EVA base resin, and the resulting mixture of kneading is to form thin slice 21 as shown in Figure 3A.Wish to have the thickness of 0.5~1.0mm for thin slice 21.Then, thin slice 21 punchings forming a plurality of thin rounded flakes 22 shown in Fig. 3 B, are then being folded thin rounded flakes 22 that another lamination obtains by punching to form the laminar structure 23 shown in Fig. 3 C for one.Then, laminar structure 23 is heated to 120~180 ℃ so that thin rounded flakes 22 sticks together each other by sulfuration (crosslinked), thereby obtains the circular block shown in Fig. 3 D with 10~30mm thickness.The circular block 24 that obtains is like this cut into a plurality of parts to make a plurality of flaky acoustic lining members 25 with the direction perpendicular to circular surfaces.
Especially, in above-mentioned manufacture method, wish to use comprise EVA base resin and 20~70 volume % have 20 μ m or more minor diameter and the acoustic backing composition that is five times in or more is multiple times than the fiber (carbon fiber for instance) of diameter length.In this case, the fiber that can obtain the wherein filling of 20~80 volume % becomes 30 ° or the sheet acoustic lining member arranged of Small angle more with the axle of relative acoustic lining member thickness direction.
The manufacture method of previously described ultrasonic probe is described referring now to Fig. 4 A and 4B.
The first step, shown in Fig. 4 A, use is inserted in epoxy resin glue- line 4,6 and 10 between the adjacent pressure lamination member and acoustic lining member 3, piezoelectric element 5 and acoustic matching layer 9 are being folded one by one of the order of mentioning is laminated on the base 2, so that obtain laminar structure.Acoustic lining member 3 is by for example method manufacturing shown in Fig. 3 A~3D.Then, with laminar structure for example 120 ℃ down about one hour of heating so that cured epoxy resin is a tackiness agent, thereby finish between base 2 and the acoustic lining member 3, the fixed bonding by insulation glue- line 4,6 and 10 respectively between acoustic lining member 3 and the piezoelectric element 5 and between piezoelectric element 5 and the acoustic matching layer 9.
Next step, use diamond saw with laminar structure from acoustic matching layer 9 towards acoustic lining member 3 with the width of 50~200 μ m (spacing) cutting for example so that laminar structure is divided into the part of a plurality of arrangements, a plurality of wherein each comprises the passage 11 of piezoelectric element 5 and acoustic matching layer 9 thereby form.In this stage, in acoustic lining member 3 with passage 11 between the mode that conforms to of space form groove 12.Then, sound lens (not marking) is bonded on the acoustic matching layer 9 in each passage 11 with siloxane-based tackiness agent, will comprises that subsequently the acoustic lining member 3 of base 2, passage 11 and sound lens is embedded in the container to make ultrasonic probe.
The diagnostic ultrasound equipment of being furnished with ultrasonic probe is described referring now to Fig. 5.It should be noted, ultrasonic signal is sent to object and receives the ultrasonic probe 1 that comprises can the transmitting of arrangement/received ultrasonic signal from the echoed signal of object reflected back with the diagnostic ultrasound equipment (or ultrasonography device) of the medical science that forms subject image.The previous acoustic lining member of describing composition formation is incorporated in the ultrasonic probe 1.As shown in FIG., ultrasonic probe 1 links to each other with diagnostic ultrasound equipment main body 30 by cable 15.Diagnostic ultrasound equipment main body 30 is inlaid with indicating meter 31.
As mentioned above, comprise according to the acoustic backing composition of above-described embodiment and contain the unitary EVA base resin of 20~80 weight % vinyl acetates.Comprising the unitary EVA of specified amount vinyl acetate makes hyperacoustic high rate of fall-off become possibility.Equally, the EVA that does not comprise filler makes the velocity of sound reach about 1,500m/s.In addition, the filler of vast scale can mix with the EVA base resin to improve the physical strength of EVA composition relatively.And EVA also shows high relatively thermotolerance.Reveal 1,500~4, the velocity of sound of 000m/s by comprise the formed acoustic lining piece table of acoustic backing composition that filler prepares by the EVA base resin that allows specified property.Rely on the kind of filler and the amount of being filled, the velocity of sound can bring up to 2,000~4,000m/s.Reach a conclusion thus, even at 1.0~2.5g/cm 3Low density under, the acoustic lining member also can be set in 2.0~8MRalys with specific acoustic resistance.Equally, pass through to fill the acoustic lining member that the powder material of W, Pb or ZnO prepares and compare with traditional at the elastomeric material middle-high density, this acoustic lining member can be reached high rate of fall-off (for instance, rate of fall-off is 3.0~6.0dB/mm MHz under the survey frequency of 1-3MHz).Reach a conclusion thus, even the thickness of acoustic lining member reduces, the ultrasonic signal that produces by the running piezoelectric element also can be absorbed and side decay overleaf fully.As a result, can obtain comprising the small ultrasonic probe of thin acoustic lining member.
Owing to, make that under the survey frequency of 1-3MHz rate of fall-off can further be increased to for example 4.0~6.0dB/mm MHz, so the thickness of acoustic lining member can further reduce by using fiber as filler.Especially, owing to, make rate of fall-off further improve, therefore can further reduce the thickness of acoustic lining member by using carbon fiber as filler.
It should be noted that equally the acoustic lining piece table that is formed by previously described acoustic backing composition reveals high mechanical property.In addition, the EVA base resin that uses in the acoustic backing composition shows high relatively thermotolerance.Reach a conclusion thus, the acoustic lining member can firmly be bonded on the piezoelectric element by the epoxy resin tackiness agent that uses the performance high-adhesive-strength.More particularly, acoustic lining member and piezoelectric element by the situation of using the epoxy resin tackiness agent and being bonded to each other under, in order to solidify purpose, tackiness agent is heated to 120 ℃ or higher temperature.Distortion or sex change under the temperature that the rubber that uses in traditional acoustic lining member such as neoprene, isoprene-isobutylene rubber or urethanes are mentioned in the above are so that make that the bonding strength between acoustic lining member and the piezoelectric element is not enough in bonding back.On the other hand, thus the EVA base resin has high relatively thermotolerance can bear solidification value above-mentioned.As a result, can piezoelectric element be bonded on the acoustic lining member that is formed by the acoustic backing composition that comprises the EVA base resin by using the epoxy resin tackiness agent, and not cause that the heat of performance changes.In addition, even after bonding, also can keep bonding strength.It should be noted about this point, as discussed previously, utilize the epoxy resin tackiness agent that piezoelectric element is bonded on the acoustic lining member, then acoustic matching layer is bonded on the piezoelectric element so that the form layers laminated structure.Then laminar structure is carried out cutting process towards the acoustic lining member with the spacing of for example 50~200 μ m from acoustic matching layer,, thereby form a plurality of passages so that will be divided into the part of a plurality of arrangements by the laminar structure that acoustic matching layer and piezoelectric element are formed.Institute it should be noted and since as the maintenance of pointing out above high bonding strength between acoustic lining member and the piezoelectric element, therefore can prevent peeling off between the acoustic lining member and piezoelectric element in the process that forms some passages.Equally, because the EVA base resin and the filler of acoustic lining member itself firmly bond together each other, so also can prevent to be included between EVA in the base resin and the filler breaking or peel off in the cutting process process.Reach a conclusion thus, in the cutting process process, can suppress or prevent the formation of defective passage, thereby can obtain highly sensitive ultrasonic probe with a plurality of passages.Further, can reach improvement aspect the tomographic analytic image quality so that wherein incorporate the diagnostic ultrasound equipment of ultrasonic probe into.
In addition, can comprise filler, as aluminium nitride, boron nitride powder or carbon fiber with highly conc for the acoustic backing composition that uses in the embodiment.The acoustic lining piece table that is formed by specific acoustic backing composition reveals the dissipation of heat performance of further raising.Reach a conclusion thus, in the ultrasonic probe that comprises specific acoustic lining member, the heat energy hot or that produced by hyperacoustic multipath reflection that is produced by piezoelectric element is radiated the external world enough effectively.As a result, can incorporate into therein increase in the diagnostic ultrasound equipment of special ultrasonic ripple probe signal transmit voltage in case can increase can observed diagnostic region scope.For example, can observe the intravital locations deep of people.Especially carbon fiber shows excellent heat conductivity and has the directivity that heat transmits at the acoustic lining component inside.Reach a conclusion thus, in the ultrasonic probe that comprises specific acoustic lining member, heat that produces in the piezoelectric element or the heat energy that is produced by hyperacoustic multipath reflection enough more effectively are radiated the external world.
Like this, the acoustic backing composition according to embodiment can be used for obtaining in light weight and thin acoustic lining member and be used for obtaining highly sensitive ultrasonic probe.And the diagnostic ultrasound equipment with special ultrasonic ripple probe of incorporating into wherein also may improve the quality of tomographic analytic image.In addition, can also make the ultrasonic probe surface that comprises specific acoustic lining member keep low temperature by filler such as aluminium nitride, boron nitride powder or the carbon fiber of selecting to have high thermal conductivity.In the diagnostic ultrasound equipment that contains the special ultrasonic ripple probe of incorporating into wherein, can increase can observed diagnostic region scope.For example, can observe the intravital locations deep of people.
Especially, can by select carbon fiber (especially have 20 μ m or more minor diameter and length is five times in or more be multiple times than the carbon fiber of diameter) as being included in the high performance acoustic lining member that filler in the acoustic backing composition obtains meeting above-mentioned characteristic.
Equally, can by with filler for example following formation filled with carbon fibers acoustic lining member and further improve the characteristic of acoustic lining member.
Particularly, as shown in Figure 2, in acoustic lining member 3, fiber 17 parts of filling are placed in the zone that has low mechanical strength between the zone that has low mechanical strength between the adjacent groove 12 and groove 12 and the end face.Because fiber 17 is placed between the adjacent groove 12 and the zone that has low mechanical strength between groove 12 and the end face, therefore can increase the physical strength of acoustic lining member 3.As a result, can prevent that acoustic lining member 3 is cutting process collapsing between the adjacent groove 12 and in the zone between groove 12 and the end face in the process that forms passage 11.Reach a conclusion thus, can prevent the formation of defective passage in the cutting process process effectively.
For the acoustic lining member, can by have 20 μ m or more 5 times of minor diameter and length to or more be multiple times than diameter fiber use and by fiber arranged, make the fiber that is included in the acoustic lining member of 20~80 volume % become 30 ° or littler angle to arrange to reach high ultrasonic-attenuation rate with axle with respect to acoustic lining member thickness direction.More particularly, as shown in Figure 2, the ultrasonic wave that produces from piezoelectric element 5 not only is transmitted on the whole lip-deep sound lens 11, and is transmitted on the acoustic lining member 3 on the back side.It should be noted, if the fiber that is included in the acoustic lining member 3 of reasonable amount is arranged with the thickness direction of acoustic lining member, promptly arrange with hyperacoustic propagation direction, can produce astonishing effect so, so that ultrasonic wave is attenuated when fiber is transmitted effectively passing, thereby can further improve hyperacoustic rate of fall-off.Especially selecting carbon fiber, can further improve rate of fall-off as being filled under the situation of the filler in the acoustic backing composition.
It should be noted equally, the physical strength of thickness direction can be depended on the physical strength institute balance of the in-plane that the carbon fiber in the acoustic lining member that is filled in specified structure among the embodiment is arranged, make it possible in the cutting process process, relax satisfactorily stress, thereby and prevent fissured appearance.As a result, can prevent the formation of defective passage effectively.
In addition, the acoustic lining member of specified structure can further improve the dissipation of heat performance in the embodiment.Especially can further improve the dissipation of heat performance significantly as being filled in the fiber in the acoustic backing composition by selecting carbon fiber.
Same it should be noted between adjacent groove and the zone between groove and the end face by pars fibrosa being placed in wherein have between the groove adjacent in the acoustic lining member of fiber as the arrangement of appointment carbon fiber and the zone between groove and the end face can prevent the acoustic lining component damage effectively.As a result, can prevent the formation of defective passage in the cutting process process effectively.
To describe some embodiments of the present invention in detail now.
Embodiment 1
To comprise the 50 unitary ethylene-vinyl acetate copolymer of weight % vinyl acetate (EVA) base resins and supply in the space that is heated between about 70 ℃ hot-rolling, tentatively knead 20 minutes.Then, in the EVA base resin that 100 weight parts are tentatively kneaded, it is that 15 μ m and mean length are glass fibre (filler), 6 weight part dioctyl sebacates (vulcanizing agent), 2 weight part sebacic acid zinc (vulcanization accelerator), 4 weight part carnauba waxs and the 3 weight part silicone resin of 20mm that adding has mean diameter, the resultant composition of then further kneading, and the composition that will knead subsequently to carry out moulding in blocks 20 minutes be that 400mm and thickness are that the resin groups of 0.5mm is in blocks to obtain having width.Incidentally, glass fibre is mixed in the material of kneading with the amount of 70 volume %.Then, the sheet punching to obtain the disk that each all has the 100mm diameter, is then being folded 40 disks of a lamination to obtain laminar structure for one.The laminar structure that obtains like this put into mould and under pressurized conditions 180 ℃ of heating 15 minutes finishing sulfuration, thereby obtain having the 100mm diameter, the nahlock of 20mm thickness.Further, nahlock is cut into slices with the spacing of 3mm so that obtain the section that each all has 50~100mm length, 20mm width and 3mm thickness in the direction perpendicular to circular surfaces.Selection has the section of 80mm length as the acoustic lining member that is used to estimate.Find that the acoustic lining member has glass fibre that 25 volume % fill and becomes 30 ° or Small angle structure arranged more with the axle with respect to acoustic lining member thickness direction.
Embodiment 2~7
The vinyl acetate between to for plastic ester units in being included in the EVA base resin and the amount of employed filler are as shown in table 1, according to six kinds of acoustic lining members that are used to estimate of method preparation of embodiment 1.Should be mentioned that every kind of ZrO in passing as filler 2Powder and ZnO powder have the median size of 15 μ m, the SiC fiber and the Al of every kind of use 2O 3Fiber has the length of diameter and the 20mm of 15 μ m.Equally, at the acoustic lining member that is used for estimating, the SiC fiber and the Al of 25 volume % loading levels 2O 3Fiber becomes 30 ° or more Small angle arrangement with the axle with respect to acoustic lining member thickness direction.
Comparative example 1~5
Shown in embodiment 1, cutting into slices by the nahlock that each is had 100mm diameter and 20mm thickness obtains the acoustic lining member that five kinds of every kinds of being used to estimate all have 80mm length, 20mm width and 3mm thickness.More particularly, have 15 μ m diameters and 20mm length A l by section by comprising 30 volume % 2O 3The nahlock that the Resins, epoxy of fiber is formed obtains the acoustic lining member of comparative example 1.By cutting into slices by comprising same size Al 2O 3The nahlock that the neoprene of fiber (CR) is formed obtains the acoustic lining member of comparative example 2.By cutting into slices by comprising same size Al 2O 3The nahlock that the synthetic polyisoprene of fiber (IR) is formed obtains the acoustic lining member of comparative example 3.By cutting into slices by comprising same size Al 2O 3The nahlock that the common Butadiene Rubber (NBR) of fiber is formed obtains the acoustic lining member of comparative example 4.In addition, by cutting into slices by comprising same size Al 2O 3The nahlock that the urethane resin of fiber is formed obtains the acoustic lining member of comparative example 5.
For the acoustic lining member that is used to estimate of each embodiment 1~7 and comparative example 1~5, measuring density, the velocity of sound, specific acoustic resistance (AI), rate of fall-off, thermal conductivity and defective passage ratio.
Utilize nahlock to obtain density value.
In order to measure each velocity of sound and rate of fall-off, the acoustic lining member that will be used to estimate uses probe, and (survey frequency is 1.0~3.0MHz) to measure by method under water down at 25 ℃.
Specific acoustic resistance (AI) refers to that the velocity of sound that will measure and density multiply each other and the product that obtains.
Thermal conductivity is measured by laser flash method (laser flash method).
In addition, defective passage ratio is measured as follows.Specifically, use is inserted in the epoxy resin tackiness agent between acoustic lining member and the piezoelectric element and between piezoelectric element and the acoustic matching layer, one of the acoustic matching layer of piezoelectric element and epoxy resin-matrix is being folded one be laminated to the acoustic lining member that is used to estimate, then under 120 ℃, laminar structure heated and be used for cured adhesive in about 1 hour so that complete layer laminated structure bonding.Then, with the width of 50 μ m and cut into the acoustic lining member 200 μ m degree of depth from acoustic matching layer towards the acoustic lining member that is used to estimate and carry out cutting process, to form 2 row passages, every row are made up of 200 passages, i.e. 400 passages altogether.Measure the strength of signal of the piezoelectric element of each passage, defective passage ratio by the piezoelectric element strength of signal based on 400 passages be lower than original signal value at least 20%, the passage that is regarded as the defectiveness passage measures.Should be mentioned that in passing, such formation of the piezoelectric element of use make first and second each all on two surfaces of PZT series piezoelectric ceramic body (piezoelectrics), form by the electrode that Ni makes.
Table 1 has provided the result.The composition of the acoustic lining member that is used to estimate is also listed in table 1.
Table 1
The composition of acoustic lining member Density (the g/cm of acoustic lining member 3)
Base resin Filler
Kind Density (g/cm 3) Kind Amount (volume %)
Embodiment 1 EVA:60/40 0.87 Glass fibre 70 2.36
Embodiment 2 EVA:60/40 0.87 ZrO 2Fiber 30 2.31
Embodiment 3 EVA:60/40 0.87 The ZnO fiber 30 2.29
Embodiment 4 EVA:50/50 0.88 The SiC fiber 50 2.04
Embodiment 5 EVA:40/60 0.89 The SiC fiber 40 1.81
Embodiment 6 EVA:30/70 0.91 Al 2O 3Fiber 30 1.81
Embodiment 7 EVA:20/80 0.93 Al 2O 3Fiber 20 1.52
Comparative example 1 Resins, epoxy 1.10 Al 2O 3Fiber 30 1.94
Comparative example 2 CR 1.24 Al 2O 3Fiber 30 2.04
Comparative example 3 IR 1.10 Al 2O 3Fiber 30 1.94
Comparative example 4 NBR 1.10 Al 2O 3Fiber 30 1.94
Comparative example 5 Urethane 0.96 Al 2O 3Fiber 30 1.84
* for EVA, the numeral of oblique line front and back refers to ethylene unit and vinyl acetate between to for plastic ester units respectively.(not intact)
The characteristic of acoustic lining member
The velocity of sound (m/s) AI(MRayls) Rate of fall-off (dB/mm MHz) Thermal conductivity (W/mk) The ratio of defectiveness passage (%)
Embodiment 1 3358 7.9 3.1 1 0
Embodiment 2 1350 3.1 3.7 0.9 0
Embodiment 3 1400 3.2 3.8 1.8 0
Embodiment 4 2320 4.7 4.5 3.9 0
Embodiment 5 2120 3.8 4.8 3.3 0
Embodiment 6 1950 3.5 4.4 2.9 0
Embodiment 7 1700 2.6 4.2 1.9 0
Comparative example 1 2700 5.2 0.96 2.9 25
Comparative example 2 2000 4.1 1.9 2.8 8
Comparative example 3 2050 4.0 1.8 2.8 11
Comparative example 4 2100 4.1 2.2 2.8 10
Comparative example 5 1970 3.6 2.1 2.8 9
Can significantly find out from table 1, the unitary EVA base resin of 20~80 weight % vinyl acetates that wherein contains for embodiment 1~7 comprises as the fiber of filler or the acoustic lining member of inorganic powder, shows the specific acoustic resistance (AI) of 3.1 suitable~7.9MRalys and the high rate of fall-off of 3.1~4.8dB/mm MHz.In addition, unlikelyly in cutting step, form defective passage.Especially find wherein use SiC fiber or the Al of embodiment 4~7 2O 3Fiber as the acoustic lining piece table of filler reveal be higher than each embodiment in embodiment 2 and 3 wherein use the rate of fall-off of inorganic powder as the acoustic lining member of filler.
As a result, can reduce the thickness of the acoustic lining member of each embodiment among the embodiment 1~7, and ultrasonic probe can be incorporated in the ultrasonic probe and miniaturization by thin acoustic lining member with each embodiment among these embodiment.Equally, because the defective passage of unlikely generation in the acoustic lining member of each embodiment in embodiment 1~7 is so can be incorporated into the sensitivity that improves ultrasonic probe in the ultrasonic probe by the acoustic lining member with each embodiment among these embodiment.Especially the SiC fiber that wherein uses of each embodiment reveals the high heat conductivity that is not less than 3.3W/mK as the acoustic lining piece table of filler among the embodiment 4 and 5.In fact, can keep low temperature by the acoustic lining member of each embodiment among these embodiment being incorporated into the surface that makes ultrasonic probe.Reach a conclusion thus, can increase signal in the diagnostic ultrasound equipment and transmit voltage by in these ultrasonic probes any is incorporated into, can observed scope so that can increase diagnostic ultrasound equipment institute.For example can observe the intravital locations deep of people.
On the other hand, for the wherein Resins, epoxy of comparative example 1 acoustic lining member, find to exist the reduction of rate of fall-off as base resin.In addition, defective passage ratio significantly increases in cutting process.The increase of defective passage ratio is to be included in breaking of taking place between the sapphire whisker in the Resins, epoxy and to peel off caused by Resins, epoxy in cutting process with as filler.
In addition, for the acoustic lining member that the wherein isoprene-isobutylene rubber of each embodiment in the comparative example 2~5, neoprene, common isoprene-isobutylene rubber and urethanes are used separately as base resin, find to exist the reduction of rate of fall-off.In addition, increase in defective passage ratio of cutting stage.It should be noted that the epoxy resin tackiness agent of bonding piezoelectric element of being used for that uses worsens 120 ℃ of about processes that were used for cured adhesive in 1 hour of heating, so that the increase of defective passage ratio takes place.
Embodiment 8~18
The amount of unitary ratio of ethylene unit and vinyl acetate and employed carbon fiber is pressed shown in the table 2 and to be set in the EVA base resin, obtain 11 kinds of acoustic lining members that are used to estimate according to the method for embodiment 1.Incidentally, use has the pitch-based carbon fiber of 500W/mK thermal conductivity as filler.Equally, the carbon fiber at the acoustic lining member 25 volume % loading levels that are used for estimating becomes 30 ° or littler angle arrangement with the axle with respect to acoustic lining member thickness direction.
For each acoustic lining member that is used to estimate of embodiment 8~18, in method measuring density, the velocity of sound, specific acoustic resistance (AI), rate of fall-off, thermal conductivity and the defective passage ratio of embodiment 1.Table 2 has provided the result.
Table 2
The composition of acoustic lining member Density (the g/cm of acoustic lining member 3)
Base resin Carbon fiber
Size; Mean diameter (μ m)/mean length (mm) Amount (volume %)
Embodiment 8 EVA:80/20 7/20 20 1.14
Embodiment 9 EVA:70/30 7/20 25 1.20
Embodiment 10 EVA:60/40 10/20 30 1.27
Embodiment 11 EVA:50/50 10/20 30 1.30
Embodiment 12 EVA:50/50 10/20 35 1.34
Embodiment 13 EVA:50/50 10/20 40 1.41
Embodiment 14 EVA:50/50 10/20 45 1.47
Embodiment 15 EVA:50/50 10/20 50 1.54
Embodiment 16 EVA:40/60 10/20 55 1.61
Embodiment 17 EVA:20/80 20/20 60 1.68
Embodiment 18 EVA:50/50 20/20 70 1.81
* for EVA, the numeral of oblique line front and back refers to ethylene unit and vinyl acetate between to for plastic ester units respectively.(not intact)
The characteristic of acoustic lining member
The velocity of sound (m/s) AI(MRayls) Rate of fall-off (dB/mm MHz) Thermal conductivity (W/mk) The ratio of defectiveness passage (%)
Embodiment 8 1790 2.0 4.4 4.0 0
Embodiment 9 1980 2.4 3.7 5.2 0
Embodiment 10 2030 2.6 3.8 5.9 0
Embodiment 11 1950 2.5 4.4 7.7 0
Embodiment 12 2240 3.0 5.1 6.3 0
Embodiment 13 2750 3.9 5.0 7.0 0
Embodiment 14 2880 4.2 4.8 7.5 0
Embodiment 15 2980 4.6 4.5 8.8 0
Embodiment 16 3760 6.1 4.8 13.8 0
Embodiment 17 3900 6.6 5.7 16.2 0
Embodiment 18 4200 7.6 6.0 19.4 0.4
Can significantly find out from table 2, for the acoustic lining member that wherein is comprised in EVA base resin of each embodiment among the embodiment 8~18, show the specific acoustic resistance of 2.0 suitable~7.6MRalys with 20~80 weight % vinyl acetate content as the carbon fiber of filler.Equally, the acoustic lining piece table of these embodiment reveals the rate of fall-off of 3.6~6.0dB/mm MHz.It is higher than the rate of fall-off of the acoustic lining member of the comparative example 1~5 shown in the table 1.In addition, unlikelyly in the cutting step of embodiment 8~18, produce defective passage.
What should pay special attention to is, the acoustic lining member among the embodiment 4 and 15 for example, shown in table 1 and 2, though use SiC fiber and carbon fiber as filler in embodiment 4 and 15 respectively, the unitary content of vinyl acetate and being included in equates aspect the amount of the filler in the EVA base resin in the EVA base resin.The rate of fall-off that is also to be noted that embodiment 4 and 15 is respectively 4.5dB/mm MHz and 5.0dB/mm MHz.Reach a conclusion thus, can obtain showing the acoustic lining member of the rate of fall-off of further raising as filler by using carbon fiber.
As a result, can further reduce the thickness of the acoustic lining member of each embodiment among the embodiment 8~18, so that can make the ultrasonic probe miniaturization of wherein incorporating the acoustic lining member into.Equally, the defective passage of unlikely generation in the acoustic lining member of each embodiment of embodiment 8~18 is so that can increase the sensitivity of the ultrasonic probe of the acoustic lining member of wherein incorporating each embodiment among the embodiment 8~18 into.In addition, the carbon fiber of each embodiment reveals 4.0W/mK or bigger high thermoconductivity as the acoustic lining piece table that filler is filled in wherein among the embodiment 8~18, makes the surface of ultrasonic probe keep low temperature in the ultrasonic probe thereby be incorporated into by the acoustic lining member with each embodiment among the embodiment 8~18.Reach a conclusion thus, can increase signal in the diagnostic ultrasound equipment and transmit voltage by specific ultrasonic probe is incorporated into, so as can to increase can observed diagnostic region scope.For example can observe the intravital locations deep of people.
To one skilled in the art, favourable part in addition and change will be easy to take place.Therefore, with wideer angle, what the present invention was not limited to list here and describe specifies and representational embodiment.Therefore, on the spirit or scope basis that does not break away from by additional claim and their total inventive concept that right of equal value limited, can do different changes.

Claims (4)

1. acoustic backing composition, it comprises:
Comprise the unitary ethylene-vinyl acetate copolymer of 20~80 weight % vinyl acetates; And
Be included in the filler in the ethylene-vinyl acetate copolymer, it is characterized in that:
Wherein use fiber as described filler, and described filler is included in the ethylene-vinyl acetate copolymer with the amount based on 20~70 volume % of ethylene-vinyl acetate copolymer and filler total amount.
2. according to the acoustic backing composition of claim 1, wherein fiber has 20 μ m or littler diameter and the length that is five times in or more is multiple times than diameter.
3. according to the acoustic backing composition of claim 1, wherein fiber is to be selected from least a in following group: carbon fiber, silicon carbide fiber and sapphire whisker.
4. according to the acoustic backing composition of claim 1, the wherein at least a powder that is selected from the metal in following group further is included in the ethylene-vinyl acetate copolymer: tungsten, molybdenum and silver.
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